Ion source position adjusting mechanism of ultra-precise ion grinder

Abstract

The utility model belongs to the technical field of application of ultra-precise ion grinders, and particularly discloses an ion source position adjusting mechanism of an ultra-precise ion grinder. Comprising a pedestal plate, a power supply, a sample bin table, an electric lead, an ion source, a vertical column, a circular hollow positioning sleeve, a transverse ion source mounting table, a screw groove, a vertical supporting stud, a locking nut, a vertical fixing seat, a vertical small hydraulic cylinder, an upper connecting seat, an upper connecting seat screw groove, a transition screw rod, a distance measuring sensor, a PLC and the like. Wherein the vertical small hydraulic cylinder and the distance measuring sensor are respectively connected with the PLC. The utility model has the beneficial effects that: 1, the component pattern of the original ultra-precise ion grinder is not damaged, the overall structural design is reasonable, the rapid installation is realized, and the maintenance is convenient; and 2, the automatic self-adaptive relative distance height H adjustment between the sample bin platform and the ion source according to requirements can be realized, the accuracy and timeliness of the adjustment are ensured, the corresponding stable material grinding is completed, and the adjustment is safe and practical.

Description

Technical Field

[0001] This utility model belongs to the field of ultra-precision ion polishing instrument application technology, specifically relating to the ion source position adjustment mechanism of an ultra-precision ion polishing instrument. Background Technology

[0002] Ion beam polishing is a non-contact, high-precision surface processing technology that uses high-energy or low-energy ion beams to damage and remove material surfaces, causing minute displacements and deformations of atoms and molecules on the surface, thereby achieving fine surface processing.

[0003] It achieves ultra-high-speed cross-section grinding and high-efficiency cross-section processing, making sample processing simpler when observing cross-sections under an electron microscope.

[0004] In the production of ultra-precision ion polishing equipment, the distance H between the sample chamber stage and the ion source affects the polishing effect. This means that in actual operation, it is necessary to make reasonable relative adjustments between the sample chamber stage and the ion source. For example... Figure 1 The traditional distance height H adjustment structure is shown, which has problems such as large adjustment error, inconvenience of adjustment and long time consumption, which affect the grinding effect and efficiency.

[0005] Therefore, based on the above problems, this utility model provides an ion source position adjustment mechanism for an ultra-precision ion polishing instrument. Utility Model Content

[0006] Purpose of the utility model: The purpose of this utility model is to provide an ion source position adjustment mechanism for an ultra-precision ion mill, solving the problems of inconvenient adjustment and large error in existing models.

[0007] Technical Solution: The ion source position adjustment mechanism of the ultra-precision ion milling instrument provided by this utility model includes a base plate, a power supply, a sample chamber stage, electrical wires, an ion source, a vertical column, a circular hollow positioning sleeve, and a horizontal ion source mounting stage. A screw groove is provided in the upper end face of the vertical column, and a vertical support stud is provided in the screw groove. A locking nut is provided on the vertical support stud. A vertical fixing seat is provided on one end face of the vertical support stud, and a small vertical hydraulic cylinder is provided on the vertical fixing seat. An upper connecting seat is provided on one end face of the small vertical hydraulic cylinder. The base has an upper connecting seat screw groove on one side. On the horizontal ion source mounting platform, a horizontal ion source mounting stage screw groove is provided vertically downward from the upper connecting seat. The upper connecting seat and the horizontal ion source mounting platform are fixed together by a transition screw through the upper connecting seat screw groove and the horizontal ion source mounting stage screw groove. Transition screw locking nuts are provided at both ends of the transition screw. A distance measuring sensor is provided on the bottom surface of the horizontal ion source mounting platform. A PLC controller is mounted on the power supply. The vertical small hydraulic cylinder and the distance measuring sensor are respectively connected to the PLC controller.

[0008] In this technical solution, the ion source position adjustment mechanism of the ultra-precision ion polishing instrument further includes an upper adjusting nut and a lower adjusting nut set on the vertical column and located above / below the circular hollow positioning sleeve, and the outer wall of the vertical column is set with an external thread structure.

[0009] In this technical solution, the vertical fixing seat is configured as an inverted L-shaped structure.

[0010] Compared with the prior art, the beneficial effects of the ion source position adjustment mechanism of the precision ion mill of this utility model are as follows: 1. It does not damage the original ultra-precision ion mill component layout, the overall structure is reasonably designed, and it can achieve quick installation and convenient maintenance; 2. It can realize the automatic and adaptive relative distance height H adjustment between the sample chamber stage and the ion source, ensuring the accuracy and timeliness of the adjustment, completing the corresponding stable material grinding, while the adjustment is safe and practical. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a schematic diagram of the existing adjustment structure;

[0013] Figure 2 This is a front view schematic diagram of the ion source position adjustment mechanism of the precision ion polisher of this utility model;

[0014] Figure 3 This is a left-side structural schematic diagram of the vertical support stud and the vertical fixing seat;

[0015] The numbers in the diagram are as follows: 10-Base plate, 11-Power supply, 12-Sample chamber platform, 13-Electrical wire, 14-Ion source, 15-Vertical column, 16-Circular hollow positioning sleeve, 17-Vertical column screw groove, 18-Circular hollow positioning sleeve screw hole, 19-Bolt, 100-Screw groove, 101-Vertical support stud, 102-Locking nut, 103-Vertical fixed seat, 104-Vertical small hydraulic cylinder, 105-Upper connecting seat, 106-Upper connecting seat screw groove, 107-Horizontal ion source mounting platform screw groove, 108-Transition screw, 109-Transition screw locking nut, 110-Distance sensor, 111-Upper adjusting nut, 112-Lower adjusting nut, 113-PLC controller. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0017] In the description of this utility model, it should be noted that the terms "top," "bottom," "one side," "the other side," "front," "back," "middle part," "inner," "top," and "bottom," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. The terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. Furthermore, unless otherwise explicitly specified and limited, the terms "installed," "connected," and "joined" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0018] Example 1

[0019] like Figure 2 and Figure 3 The ion source position adjustment mechanism of the ultra-precision ion mill shown includes a base plate 10, a power supply 11, a sample chamber stage 12, electrical wires 13, an ion source 14, a vertical column 15, a circular hollow positioning sleeve 16, and a horizontal ion source mounting stage 20.

[0020] A screw groove 100 is provided in the upper end face of the vertical column 15.

[0021] A vertical support stud 101 is provided inside the screw groove 100.

[0022] A locking nut 102 is provided on the vertical support stud 101.

[0023] A vertical fixing seat 103 is provided on one end face of the vertical support stud 101.

[0024] A small vertical hydraulic cylinder 104 is installed on the vertical fixed base 103.

[0025] An upper connecting seat 105 is provided on one end face of the vertical small hydraulic cylinder 104.

[0026] An upper connecting seat screw groove 106 is provided inside one side of the upper connecting seat 105.

[0027] A horizontal ion source mounting stage 20 is provided on the horizontal ion source mounting stage 20, and is located vertically downward from the upper connecting seat 105.

[0028] The upper connecting seat 105 and the horizontal ion source mounting stage 20 are fixed together by a transition screw 108 through the upper connecting seat screw groove 106 and the horizontal ion source mounting stage screw groove 107.

[0029] Both ends of the transition screw 108 are respectively provided with transition screw locking nuts 109.

[0030] A ranging sensor 110 is installed on the bottom surface of the horizontal ion source mounting stage 20.

[0031] A PLC controller 113 is mounted on the power supply 11;

[0032] Among them, the vertical small hydraulic cylinder 104 and the distance sensor 110 are respectively connected to the PLC controller 113.

[0033] The working principle is as follows: the distance sensor 110 is used to feed back the height distance H parameter between the sample chamber platform 12 and the horizontal ion source mounting platform 20 to the PLC controller 113; the PLC controller 113 controls the working state of the vertical small hydraulic cylinder 104 (pressing down or moving up) according to the fed-back height distance H parameter.

[0034] When downward adjustment is required (to shorten the height distance H between the sample chamber platform 12 and the horizontal ion source mounting platform 20), the vertical small hydraulic cylinder 104 is activated by the PLC controller 113 to press down. In this way, the transition screw 108 on the vertical small hydraulic cylinder 104 drives the horizontal ion source mounting platform 20 to press down synchronously. At this time, the circular hollow positioning sleeve 16 presses down vertically on the vertical column 15, completing the control of the ion source 14 on the horizontal ion source mounting platform 20 to approach the short sample chamber platform 12. After adjusting to the appropriate position, the PLC controller 113 makes corresponding control actions based on the feedback parameters of the distance sensor 110, and controls the vertical small hydraulic cylinder 104 to stop.

[0035] When downward adjustment is required (to increase the height distance H between the sample chamber platform 12 and the horizontal ion source mounting platform 20), the vertical small hydraulic cylinder 104 is activated by the PLC controller 113 to move upward. In this way, the transition screw 108 on the vertical small hydraulic cylinder 104 drives the horizontal ion source mounting platform 20 to move upward synchronously. At this time, the circular hollow positioning sleeve 16 moves vertically upward on the vertical column 15, completing the control of the ion source 14 on the horizontal ion source mounting platform 20 away from the short sample chamber platform 12. After adjusting to the appropriate position, the PLC controller 113 makes corresponding control actions based on the feedback parameters of the distance sensor 110, and controls the vertical small hydraulic cylinder 104 to stop.

[0036] The pressure adjustment distance of the PLC controller 113 can be preset according to different materials, and the safe adjustment range distance parameter can also be preset.

[0037] Example 2

[0038] Based on Embodiment 1, the ion source position adjustment mechanism of the ultra-precision ion polishing instrument also includes an upper adjusting nut 111 and a lower adjusting nut 112 set on the vertical column 15 and located above / below the circular hollow positioning sleeve 16. The outer wall of the vertical column 15 is configured with an external thread structure.

[0039] By rotating the upper adjusting nut 111 and the lower adjusting nut 112 respectively, their relative positions on the vertical column 15 can be adjusted. This also allows for adjustment of the stroke distance H of the circular hollow positioning sleeve 16 as it is pressed down or moved up. Another function is that, after adjustment, the upper adjusting nut 111 and the lower adjusting nut 112 can be rotated relative to each other to lock the circular hollow positioning sleeve 16 onto the vertical column 15, thus securing and limiting the ion source 14 working on the horizontal ion source mounting stage 20.

[0040] In addition, the vertical fixing base 103 is preferably configured as an inverted L-shaped structure, which can facilitate convenient and stable assembly of the vertical small hydraulic cylinder 104.

[0041] The ion source position adjustment mechanism of this ultra-precision ion mill can achieve automated, rapid, precise, and safe adjustment, solving the problem of... Figure 1 Current technical issues in China.

[0042] It should be noted that, in this document, terms such as "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0043] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. An ion source position adjustment mechanism for an ultra-precision ion milling instrument, comprising a base plate (10), a power supply (11), a sample chamber stage (12), electrical wires (13), an ion source (14), a vertical column (15), a circular hollow positioning sleeve (16), and a horizontal ion source mounting stage (20), characterized in that: The upper end face of the vertical column (15) is provided with a screw groove (100). A vertical support stud (101) is provided in the screw groove (100). A locking nut (102) is provided on the vertical support stud (101). A vertical fixing seat (103) is provided on one end face of the vertical support stud (101). A small vertical hydraulic cylinder (104) is provided on the vertical fixed base (103). One end face of the vertical miniature hydraulic cylinder (104) is provided with an upper connecting seat (105). The upper connecting seat (105) has an upper connecting seat screw groove (106) on one side. A horizontal ion source mounting stage (20) is provided on the horizontal ion source mounting stage (20), and is located vertically downward from the upper connecting seat (105) with a horizontal ion source mounting stage screw groove (107). The upper connecting seat (105) and the horizontal ion source mounting stage (20) are fixed together by a transition screw (108) through the upper connecting seat screw groove (106) and the horizontal ion source mounting stage screw groove (107). The transition screw (108) is provided with transition screw locking nuts (109) at both ends. A ranging sensor (110) is provided on the bottom surface of the horizontal ion source mounting stage (20). A PLC controller (113) is mounted on the power supply (11); The vertical small hydraulic cylinder (104) and the distance sensor (110) are respectively connected to the PLC controller (113).

2. The ion source position adjustment mechanism of the ultra-precision ion polisher according to claim 1, characterized in that: The ion source position adjustment mechanism of the ultra-precision ion polishing instrument also includes an upper adjusting nut (111) and a lower adjusting nut (112) set on the vertical column (15) and located above / below the circular hollow positioning sleeve (16). The outer wall of the vertical column (15) is set with an external thread structure.

3. The ion source position adjustment mechanism of the ultra-precision ion mill according to claim 1, characterized in that: The vertical fixing seat (103) is configured as an inverted L-shaped structure.

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