Integrated base for semiconductor production

Abstract

The utility model provides an integrated base for semiconductor production, which comprises a base body, the base body comprises a single body I, a single body II and a single body III, an interface board D, an interface board E and an interface board G are arranged on the single body I, an interface board A, an interface board B, an interface board F and an interface board H are arranged on the single body II, and an interface board C is arranged on the single body III. According to the utility model, pipeline installation is modularized, various installation accessories are intensively designed on the interface board, the interface board is installed on the anti-micro-vibration base, the anti-micro-vibration base and pipeline installation are integrated, the pipelines are directly connected through accessory interfaces on the interface board during installation, the installation is rapid and convenient, and the construction period is shortened; and the interface board and all the accessories are connected in a bolting mode, so that mounting and dismounting are convenient, the universality is high, and dismounting and maintenance are convenient.

Description

Technical Field

[0001] This utility model relates to the field of integrated circuit process equipment technology, specifically an integrated base for semiconductor production. Background Technology

[0002] The semiconductor industry is developing rapidly, and the upgrading of precision semiconductor manufacturing equipment is accelerating, leading to a surge in the installation and modification of such equipment. For semiconductor factories, especially chip manufacturing plants, the construction cycle is a critical factor, often determining the market success of a product. Currently, in semiconductor factories, vacuum pumps, piping, and circuits are all installed on-site, making schedule control difficult, resulting in long installation and deployment cycles. On-site construction accounts for a significant portion of the overall project time and poses numerous safety and quality risks. Furthermore, when equipment layout modifications are needed, dismantling is time-consuming and labor-intensive.

[0003] Furthermore, semiconductor manufacturing precision equipment demands increasingly higher precision and is becoming more sensitive to environmental factors such as micro-vibrations. Even slight micro-vibrations can reduce equipment yield or even cause malfunction. Therefore, isolating equipment from micro-vibrations is becoming increasingly important. Traditional anti-vibration bases include concrete and steel structures, often requiring openings in the top for on-site installation of upper equipment pipelines. The challenge lies in modularizing pipeline installation and integrating it into the anti-vibration base, thereby achieving both anti-vibration functionality and simplifying pipeline installation, thus shortening the construction period. Utility Model Content

[0004] The purpose of this utility model is to provide an integrated substrate for semiconductor manufacturing to solve the problems existing in the background art.

[0005] The technical solution of this utility model is implemented as follows:

[0006] An integrated substrate for semiconductor manufacturing includes a substrate body, which includes a first substrate, a second substrate, and a third substrate. Interface boards D, E, and G are mounted on the first substrate. Interface boards A, B, F, and H are mounted on the second substrate. Interface board C is mounted on the third substrate.

[0007] Further, the single unit includes a top beam and a bottom beam, both of which are welded into a rectangular frame. A longitudinal beam is welded to the inner side of the top beam, and several transverse beams are welded between the longitudinal beams and the top beam. An interface plate D is installed at the bottom of the top beam on the left side, an interface plate E is installed at the bottom of the transverse beams, and an interface plate G is installed at the bottom of the top beam on the right side. The interface plate D includes a connecting steel plate. A ferrule fitting A is installed at the lower left corner of the connecting steel plate. A through-plate reducing connector is installed diagonally above and to the right of the ferrule fitting A at the lower right of the connecting steel plate. The through-plate reducing connector is connected to a face sealing connector A, which is connected to a one-way valve. The top of the connecting steel plate is bolted to the top beam by bolts F. The interface plate E includes an L-shaped connecting plate C. A support device A is installed at the bottom outer end of the L-shaped connecting plate C. A metal flexible hose B is installed on the support device A. A ferrule tube is connected to the metal flexible hose B. A face sealing joint B is installed at the other end of the ferrule tube. The top of the L-shaped connecting plate C is bolted to the crossbeam by bolts G. The interface plate G includes an L-shaped connecting plate E. A connecting pipe D is vertically installed at the bottom end of the L-shaped connecting plate E. A flange C is installed at the top end of each connecting pipe D. An MF flange is installed at the bottom end of the connecting pipe D. The L-shaped connecting plate E is bolted to the top beam by bolts I.

[0008] Further, the second unit includes a top beam and a bottom beam, both of which are welded into a rectangular frame. Two horizontal beams are welded to the inner side of the top beam. Vertical beams are also welded perpendicularly between the horizontal beams and between the horizontal beams and the top beam. Interface plate A is installed at the bottom of the right side of the top beam. Two interface plates B are installed at the perpendicular intersections of the vertical beams and horizontal beams. Interface plate F is installed at the bottom of the upper top beam, and interface plate H is installed at the bottom of the left side of the top beam. Interface plate A includes an L-shaped connecting plate A, with a connecting pipe A vertically installed at its bottom. Flanges A are installed at both ends of the connecting pipe A. The L-shaped connecting plate A is bolted to the top beam using bolts A. Interface plate B includes an L-shaped connecting plate... B, the bottom end of the L-shaped connecting plate B is vertically mounted with a connecting pipe B, and flanges B are respectively installed at the upper and lower ends of the connecting pipe B. The L-shaped connecting plate B is bolted to the top beam II by bolts B. The interface plate F includes an L-shaped connecting plate D, and four support devices B in two rows and two columns are installed at the bottom of the L-shaped connecting plate D. A connecting pipe C is installed inside the support device B. A union joint is installed at the left end of the connecting pipe C, and a compression fitting B is installed at the right end of the connecting pipe C. The L-shaped connecting plate D is bolted to the top beam II by bolts H. The interface plate H includes an L-shaped connecting plate F, and a connecting pipe E is vertically mounted on the outer side of the bottom end of the L-shaped connecting plate F. Flanges C are respectively installed at the upper and lower ends of the connecting pipe E. The L-shaped connecting plate F is bolted to the top beam II by bolts G.

[0009] Furthermore, the single unit three includes a top beam three and a bottom beam three, both of which are welded into a rectangular frame. A longitudinal beam three is welded to the inner side of the top beam three, and several transverse beams three are welded between the longitudinal beam three and the top beam three. The interface plate C is installed at the bottom of the upper transverse beam three. The interface plate C includes two vertical steel supports. A transverse beam is installed on the outer side of the bottom of the vertical steel supports. A metal flexible hose A is installed side by side at the bottom of the transverse beam through a clamping device. A diaphragm valve is installed at the top of the metal flexible hose A. The vertical steel supports are bolted and fixed to the top beam three by bolts C.

[0010] Furthermore, an L-shaped reinforcing rib is installed between the crossbeam and the vertical steel support. One end of the L-shaped reinforcing rib is bolted to the vertical steel support by bolt D, and the other end of the L-shaped reinforcing rib is bolted to the crossbeam by bolt E.

[0011] The beneficial effects of this utility model are as follows:

[0012] This utility model adopts a modular design for pipeline installation, with various installation accessories centrally designed on the interface plate. The interface plate is installed on the anti-vibration base, integrating the anti-vibration base with the pipeline installation. During pipeline installation, the accessories are directly connected through the interface plate, making installation quick and convenient, shortening the construction period. Furthermore, the interface plate and all accessories are connected by bolting, making installation and disassembly convenient, highly versatile, and easy to disassemble and maintain. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of this utility model.

[0014] Figure 2 This is a schematic diagram of the interface board A of this utility model.

[0015] Figure 3 This is a schematic diagram of the interface board B of this utility model.

[0016] Figure 4 This is a schematic diagram of the interface board C of this utility model.

[0017] Figure 5 This is a schematic diagram of the interface board D of this utility model.

[0018] Figure 6 This is a schematic diagram of the interface board E of this utility model.

[0019] Figure 7 This is a schematic diagram of the interface board F of this utility model.

[0020] Figure 8 This is a schematic diagram of the interface board G of this utility model.

[0021] Figure 9 This is a schematic diagram of the interface board H of this utility model.

[0022] In the diagram: 10 - Base body; 101 - Single unit 1; 1011 - Top beam 1; 1012 - Bottom beam 1; 1013 - Longitudinal beam 1; 1014 - Horizontal beam 1; 102 - Single unit 2; 1021 - Top beam 2; 1022 - Bottom beam 2; 1023 - Horizontal beam 2; 1024 - Longitudinal beam 2; 103 - Single unit 3; 1031 - Top beam 3; 1032 - Bottom beam 3; 1033 - Longitudinal beam 3; 1034 - Horizontal beam 4; 1 - Interface plate A; 11 - L-shaped connecting plate A; 12 - Connecting pipe A; 13 - Flange A; 14 - Bolt A; 2 - Interface plate B, 21-L-type connecting plate B, 22-Connecting pipe B, 23-Flange B, 24-Bolt B, 3-Interface plate C, 31-Vertical steel support, 32-Horizontal beam, 33-L-type reinforcing rib, 34-Metal hose A, 35-Clamping device, 36-Diaphragm valve, 37-Bolt C, 38-Bolt D, 39-Bolt E, 4-Interface plate D, 41-Connecting steel plate, 42-Compression fitting A, 43-Through-plate reducer, 44-Face seal fitting A, 45-Check valve, 46-Bolt F, 5-Interface plate E, 51- L-type connecting plate C, 52-support device A, 53-metal flexible hose B, 54-compression sleeve, 55-face seal joint B, 56-bolt G, 6-interface plate F, 61-L-type connecting plate D, 62-connecting pipe C, 63-union joint, 64-support device B, 65-compression sleeve joint B, 66-bolt H, 7-interface plate G, 71-L-type connecting plate E, 72-connecting pipe D, 73-flange C, 74-MF flange, 75-bolt I, 8-interface plate H, 81-L-type connecting plate F, 82-connecting pipe E, 83-flange C, 84-bolt G. Detailed Implementation

[0023] The technical solution of this utility model will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0024] like Figure 1-9 As shown, an integrated substrate for semiconductor manufacturing includes a substrate body 1. The substrate body 1 includes a first unit 101, a second unit 102, and a third unit 103. Interface boards D4, E5, and G7 are mounted on the first unit 101. Interface boards A1, B2, F6, and H8 are mounted on the second unit 102. Interface board C3 is mounted on the third unit 103.

[0025] The single unit 101 includes a top beam 1011 and a bottom beam 1012. Both the top beam 1011 and the bottom beam 1012 are welded into a rectangular frame. A longitudinal beam 1013 is welded to the inner side of the top beam 1011. Several transverse beams 1014 are welded between the longitudinal beams 1013 and the top beam 1012. An interface plate D4 is installed at the bottom of the top beam 1011 on the left side. An interface plate E5 is installed at the bottom of the transverse beams 1014. An interface plate G7 is installed at the bottom of the top beam 1011 on the right side. The interface plate D4 includes a connecting steel plate 41. A ferrule fitting A42 is installed at the lower left corner of the connecting steel plate 41. A through-plate reducing connector 43 is installed diagonally above and to the right of the ferrule fitting A42 at the lower right of the connecting steel plate 41. The through-plate reducing connector 43 is connected to a face sealing connector A44. The face sealing connector A44 is connected to... One-way valve 45, the top of the connecting steel plate 41 is bolted to the top beam 1011 by bolt F46, the interface plate E5 includes an L-shaped connecting plate C51, the bottom outer end of the L-shaped connecting plate C51 is equipped with a support device A52, the support device A52 is equipped with a metal flexible hose B53, the metal flexible hose B53 is connected to a ferrule tube 54, the other end of the ferrule tube 54 is equipped with a face sealing joint B55, the top of the L-shaped connecting plate C51 is bolted to the crossbeam 1014 by bolt G57, the interface plate G7 includes an L-shaped connecting plate E71, the bottom end of the L-shaped connecting plate E71 is vertically equipped with a connecting pipe D72, the top end of the connecting pipe D72 is equipped with a flange C73, the bottom end of the connecting pipe D72 is equipped with an MF flange 74, the L-shaped connecting plate E71 is bolted to the top beam 7011 by bolt I75.

[0026] The single unit 102 includes a top beam 1021 and a bottom beam 1022, both of which are welded into a rectangular frame. Two horizontal beams 1023 are welded to the inner side of the top beam 1021. Vertical beams 1024 are also welded perpendicularly between the horizontal beams 1023 and between the horizontal beams 1023 and the top beam 1021. An interface plate A1 is installed at the bottom of the top beam 1021 on the right side. Two interface plates B2 are respectively installed on the vertical beams 1021. At the perpendicular intersection of 24 and the second crossbeam 1023, the interface plate F6 is installed at the bottom of the upper top beam 1021, and the interface plate H8 is installed at the bottom of the left top beam 10211. The interface plate 1 includes an L-shaped connecting plate A11, with a connecting pipe A12 vertically installed at the bottom end of the L-shaped connecting plate A11. Flanges A13 are installed at the upper and lower ends of the connecting pipe A12, respectively. The L-shaped connecting plate A11 is bolted and fixed to the second top beam 1021 by bolts A14. B2 includes an L-shaped connecting plate B21, with a connecting pipe B22 vertically installed at the bottom of the L-shaped connecting plate B21. Flanges B23 are installed at both the top and bottom of the connecting pipe B22. The L-shaped connecting plate B21 is bolted to the top beam 1021 by bolts B24. The interface plate F6 includes an L-shaped connecting plate D61, with four support devices B64 arranged in two rows and two columns at the bottom of the L-shaped connecting plate D61. A connecting pipe C62 is installed inside each support device B64. A union joint 63 is installed at the left end of the connecting pipe C62, and a compression fitting B65 is installed at the right end of the connecting pipe C62. The L-shaped connecting plate D61 is bolted to the top beam 1021 by bolts H66. The interface plate H8 includes an L-shaped connecting plate F81. A connecting pipe E82 is vertically installed on the outer side of the bottom end of the L-shaped connecting plate F81. Flanges C83 are installed at the upper and lower ends of the connecting pipe E82 respectively. The L-shaped connecting plate F81 is bolted to the top beam 1021 by bolts G84.

[0027] The single unit 3 103 includes a top beam 3 1031 and a bottom beam 3 1032. The top beam 3 1031 and the bottom beam 3 1032 are both welded into a rectangular frame. A longitudinal beam 3 1033 is welded to the inner side of the top beam 3 1031. Several transverse beams 3 1034 are welded between the longitudinal beams 3 1033 and the top beam 3 1031. The interface plate C3 is installed at the bottom of the upper transverse beam 3 1034. The interface plate C3 includes two vertical steel supports 31. A transverse beam 32 is installed on the outer side of the bottom of the vertical steel supports 31. A metal flexible hose A34 is installed side by side at the bottom of the transverse beam 32 through a clamping device 35. A diaphragm valve 36 is installed at the top of the metal flexible hose A34. The vertical steel supports 31 are bolted and fixed to the top beam 3 1031 by bolts C37.

[0028] An L-shaped reinforcing rib 33 is installed between the crossbeam 32 and the vertical steel support 31. One end of the L-shaped reinforcing rib 33 is bolted to the vertical steel support 31 by bolt D38, and the other end of the L-shaped reinforcing rib 33 is bolted to the crossbeam 32 by bolt E39.

[0029] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An integrated substrate for semiconductor manufacturing, comprising a substrate body, characterized in that, The base body includes unit one, unit two and unit three. Unit one is equipped with interface board D, interface board E and interface board G. Unit two is equipped with interface board A, interface board B, interface board F and interface board H. Unit three is equipped with interface board C.

2. The integrated substrate for semiconductor manufacturing according to claim 1, characterized in that, The single unit includes a top beam and a bottom beam, both welded into a rectangular frame. A longitudinal beam is welded to the inner side of the top beam, and several transverse beams are welded between the longitudinal beams and the top beam. An interface plate D is installed at the bottom of the top beam on the left side, an interface plate E is installed at the bottom of the transverse beams, and an interface plate G is installed at the bottom of the top beam on the right side. The interface plate D includes a connecting steel plate. A ferrule fitting A is installed at the lower left corner of the connecting steel plate. A through-plate reducer is installed diagonally above and to the right of the ferrule fitting A at the lower right of the connecting steel plate. The through-plate reducer is connected to a face seal joint A, which is connected to a one-way valve. The top of the connecting steel plate is bolted to the top beam by bolts F. The interface plate E includes an L-shaped connecting plate C. A support device A is installed at the bottom outer end of the L-shaped connecting plate C. A metal flexible hose B is installed on the support device A. A ferrule tube is connected to the metal flexible hose B. A face sealing joint B is installed at the other end of the ferrule tube. The top of the L-shaped connecting plate C is bolted to the crossbeam by bolts G. The interface plate G includes an L-shaped connecting plate E. A connecting pipe D is vertically installed at the bottom end of the L-shaped connecting plate E. A flange C is installed at the top end of each connecting pipe D. An MF flange is installed at the bottom end of the connecting pipe D. The L-shaped connecting plate E is bolted to the top beam by bolts I.

3. The integrated substrate for semiconductor manufacturing according to claim 1, characterized in that, The second unit includes a top beam and a bottom beam, both welded into a rectangular frame. Two horizontal beams are welded to the inner side of the top beam. Vertical beams are also welded perpendicularly between the horizontal beams and between the horizontal beams and the top beam. Interface plate A is installed at the bottom of the right side of the top beam. Two interface plates B are installed at the perpendicular intersections of the vertical beams and horizontal beams. Interface plate F is installed at the bottom of the upper top beam, and interface plate H is installed at the bottom of the left side of the top beam. Interface plate A includes an L-shaped connecting plate A, with a connecting pipe A vertically installed at its bottom. Flanges A are installed at both ends of the connecting pipe A. The L-shaped connecting plate A is bolted to the top beam using bolts A. Interface plate B includes an L-shaped connecting plate B. A connecting pipe B is vertically installed at the bottom of the L-shaped connecting plate B. Flanges B are installed at both the top and bottom ends of the connecting pipe B. The L-shaped connecting plate B is bolted to the top beam II by bolts B. The interface plate F includes an L-shaped connecting plate D. Four support devices B in two rows and two columns are installed at the bottom of the L-shaped connecting plate D. A connecting pipe C is installed inside the support device B. A union is installed at the left end of the connecting pipe C. A compression fitting B is installed at the right end of the connecting pipe C. The L-shaped connecting plate D is bolted to the top beam II by bolts H. The interface plate H includes an L-shaped connecting plate F. A connecting pipe E is vertically installed on the outer side of the bottom end of the L-shaped connecting plate F. Flanges C are installed at both the top and bottom ends of the connecting pipe E. The L-shaped connecting plate F is bolted to the top beam II by bolts G.

4. The integrated substrate for semiconductor manufacturing according to claim 1, characterized in that, The single unit 3 includes a top beam 3 and a bottom beam 3, both of which are welded into a rectangular frame. A longitudinal beam 3 is welded to the inner side of the top beam 3, and several transverse beams 3 are welded between the longitudinal beams 3 and the top beam 3. The interface plate C is installed at the bottom of the upper transverse beam 3. The interface plate C includes two vertical steel supports. A transverse beam is installed on the outer side of the bottom of the vertical steel supports. A metal flexible hose A is installed side by side at the bottom of the transverse beam through a clamping device. A diaphragm valve is installed at the top of the metal flexible hose A. The vertical steel supports are bolted and fixed to the top beam 3 by bolts C.

5. An integrated substrate for semiconductor manufacturing according to claim 4, characterized in that, An L-shaped reinforcing rib is installed between the crossbeam and the vertical steel support. One end of the L-shaped reinforcing rib is bolted to the vertical steel support by bolt D, and the other end of the L-shaped reinforcing rib is bolted to the crossbeam by bolt E.

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