Common rail type carrying equipment

Abstract

The utility model provides common rail type carrying equipment. The common rail type carrying equipment comprises a linear driving rail, a platform, a lifting driving assembly, a movable arm and a rotating driving assembly. The linear driving track comprises a power supply control module, a track, a first sliding piece, a second sliding piece, a third sliding piece and a fourth sliding piece. The track comprises a plurality of linearly arranged electromagnetic coils which are electrically connected with the power supply control module. The first sliding piece, the second sliding piece, the third sliding piece and the fourth sliding piece respectively have fixed magnetism and are sequentially and movably coupled to the track, and the power supply control module supplies power to the electromagnetic coil to generate a corresponding magnetic field so as to control the first sliding piece, the second sliding piece, the third sliding piece and the fourth sliding piece to slide on the track respectively. The lifting driving assembly is connected with the second sliding piece, the fourth sliding piece and the platform. The rotation driving assembly is arranged on the first sliding piece, the third sliding piece and the platform to be connected with the movable arm. The common rail type carrying equipment provided by the utility model has better carrying efficiency and vacuum space utilization rate.

Description

Technical Field

[0001] This utility model relates to a material handling device, and more particularly to a common rail material handling device. Background Technology

[0002] Due to the high cleanliness requirements, robotic equipment, related wafer front end modules (EFEMs), and vacuum transfer platforms are widely used in semiconductor manufacturing across various fields, including wafer fabrication processes, wafer fab facilities and photomask equipment, back-end assembly, packaging, and testing.

[0003] Generally, in the semiconductor device manufacturing process, the interior of the processing module housing the wafer is placed in a depressurized (vacuum) state to facilitate various processing operations or storage of the wafer. These processing operations are performed in a substrate processing apparatus (hereinafter also referred to as a wafer processing apparatus) equipped with multiple processing modules. This wafer processing apparatus, for example, includes: an atmospheric section, equipped with an atmospheric module for performing desired processing of the wafer in an atmospheric environment; and a depressurized (vacuum) section, equipped with a depressurized (vacuum) module for processing the wafer in a depressurized (vacuum) environment. The atmospheric section and the depressurized (vacuum) section are integrally connected by a loading locking module configured to switch between atmospheric and depressurized (vacuum) environments. When designing a wafer processing apparatus, from the perspective of user needs or wafer processing efficiency, it is sometimes required to accommodate more processing modules. Given various issues such as reducing the footprint of the wafer processing apparatus, limitations on the length of the transport arms, and increasing the production volume of the wafer processing apparatus, there is room for further discussion regarding the appropriate device design for adding processing modules. For example, when a vacuum handling system carries more processing modules, it is proposed to set up a bus module for linking existing vacuum handling modules. However, problems such as increased area due to the carrying of the bus module or notch orientation shift due to receiving and delivering wafers in the bus module may arise.

[0004] As mentioned above, due to limitations in space, manufacturing costs, and the achievable vacuum level, the aforementioned transmission devices cannot consistently achieve maximum simplification. For example, since maintaining a large vacuum level is relatively difficult, a common approach is to set up a buffer zone between at least two sets of transmission devices (such as robotic arms), that is, to achieve the purpose of transferring objects in a vacuum environment through a relay method using robotic arms.

[0005] However, even with the above approach, the height of existing vacuum chambers is limited by the height of the robotic arm's position (platform), the height of the rotation axis, the height of the arm joints, and the height of the buffer zone's position (platform), thus limiting the usable (transportation) space. Utility Model Content

[0006] This utility model relates to a common rail conveying device, which has better conveying efficiency and vacuum space utilization.

[0007] According to an embodiment of this utility model, a common-rail transport device suitable for vacuum environments includes a linear drive rail, a platform, a lifting drive assembly, a movable arm, and a rotary drive assembly. The linear drive rail includes a power supply control module, a rail, a first slide, a second slide, a third slide, and a fourth slide. The rail includes multiple linearly arranged electromagnetic coils, each electrically connected to the power supply control module. The first, second, third, and fourth slides are sequentially and movably coupled to the rail and each possesses fixed magnetism. The power supply control module supplies power to the electromagnetic coils to generate corresponding magnetic fields, driving and controlling the first, second, third, and fourth slides to slide on the rail. The lifting drive assembly connects the second and fourth slides to the platform, wherein the power supply control module drives the second and fourth slides to slide on the rail, while the lifting drive assembly drives the platform to rise and fall relative to the rail. The movable arm is movably mounted on the platform. A rotary drive assembly is disposed on the first slide, the third slide, and the platform to connect the movable arm. The power supply control module drives the first slide and the third slide to slide on the track, thereby driving the movable arm to extend or rotate relative to the track via the rotary drive assembly.

[0008] In the common-rail conveying device according to an embodiment of the present invention, the aforementioned rotary drive assembly includes a first rack and a first gear. The first rack is fixed to a first slide. The first gear is rotatably mounted on the platform, and the first rack and the first gear are on each other's movement paths.

[0009] In the common rail conveying device according to an embodiment of the present invention, the rotary drive assembly further includes a second rack and a second gear. The second rack is fixed to a third slide. The second gear is rotatably mounted on the platform, and the second rack and the second gear are movably meshed together.

[0010] In the common rail conveying device according to an embodiment of the present invention, the first gear and the second gear are coaxial with each other and arranged in an upper and lower configuration.

[0011] In the common rail conveying device according to an embodiment of the present invention, the common rail conveying device further includes: a first shaft, a second shaft, and a first track assembly. The first shaft is assembled to the platform, and the second arm of the movable arm is connected to the first shaft. The first track assembly connects the first shaft and the second shaft, and the first shaft moves up and down relative to the second shaft via the first track assembly.

[0012] In the common rail conveying device according to an embodiment of the present invention, the first gear surrounds the first shaft and the second shaft, and the second gear and the second shaft are an integral structure, so that when the second gear rotates, the second arm is driven to rotate through the second shaft, the first track assembly and the first shaft.

[0013] In the common rail conveying device according to an embodiment of the present invention, the first gear has an annular toothed portion and a driving protrusion extending from the top surface of the annular portion. The movable arm includes a first arm, which is pivotally mounted on the platform. The first arm has a first arm portion and a driven protrusion extending from the bottom surface of the first arm portion. The driven protrusion passes through the platform and extends to the rotation path of the driving protrusion, so that when the first gear rotates, the first arm is driven to rotate through the driving protrusion and the driven protrusion.

[0014] In the common rail conveying device according to an embodiment of the present invention, the above-mentioned rotary drive assembly further includes a second track assembly disposed between the driven protrusion of the first arm and the driving protrusion of the first gear, so that the first arm and the first gear rotate synchronously on one axis and slide relative to each other along the axis.

[0015] In the common rail conveying device according to an embodiment of the present invention, the aforementioned movable arm is a scissor linkage mechanism, and the second arm of the movable arm is connected to and synchronized with the second gear via a shaft assembly. The first gear is coaxially sleeved outside the shaft assembly and can rotate relative to each other. The power supply control module drives the first slide and the third slide to move synchronously in opposite directions at the same speed to drive the movable arm to rotate along the axis. The power supply control module also drives the first slide and the third slide to move synchronously in the same direction at the same speed to drive the movable arm to extend or retract.

[0016] In the common-rail transport device according to an embodiment of the present invention, the lifting drive assembly is a scissor linkage mechanism. One end of the scissor linkage mechanism is pivotally connected to the second slide member, and the other end is pivotally connected to the fourth slide member. The power supply control module drives the second and fourth slide members to move closer to each other to raise the platform, and drives the second and fourth slide members to move further apart to lower the platform.

[0017] In the common rail conveying device according to an embodiment of the present invention, the first slide, the second slide, the third slide and the fourth slide are respectively permanent magnets or electromagnets.

[0018] In the common rail conveying device according to an embodiment of the present invention, the first slide, the second slide, the third slide and the fourth slide are coplanar.

[0019] In the common rail transport device according to an embodiment of the present invention, the common rail transport device further includes a second rail assembly assembled between the lifting drive assembly and the platform, so that the platform can slide relative to the lifting drive assembly along the rail via the second rail assembly.

[0020] In the common rail transport device according to an embodiment of the present invention, the common rail transport device is adapted to be configured in a vacuum chamber to form a vacuum processing system. A plurality of processing stations are connected to the periphery of the vacuum chamber, and a substrate in one of the processing stations is adapted to be transported to another processing station by the common rail transport device.

[0021] Based on the above, the common-rail transport equipment uses a linear drive rail as the primary drive source, with four sliding members movably configured on the same rail. The rail includes multiple linearly arranged electromagnetic coils, and each sliding member has a fixed magnetic field. The electromagnetic coils are powered by a power supply control module, generating corresponding magnetic fields that drive the sliding members on the common rail. Therefore, when the power supply control module uses the magnetic force generated by the electromagnetic coils to drive these sliding members to slide on the rail, the lifting and lowering of the movable arm and the picking and placing of the substrate can be further achieved through a lifting drive assembly or a rotation drive assembly. The lifting action is achieved by the second and fourth sliding members in conjunction with the lifting drive assembly, while the rotation action is achieved by the first and third sliding members in conjunction with the rotation drive assembly.

[0022] The four magnetically driven sliders allow the platform and movable arm to move along the track. Furthermore, different sliders are paired with corresponding lifting and rotating drive components, allowing the platform and movable arm to generate different motion patterns based on the sliders' different movement modes on the track. In this way, the aforementioned drive components can be effectively and unobstructedly positioned within the vacuum chamber, avoiding concerns about vacuum levels or contamination, and enabling object transfer in a vacuum environment with the movement of a single movable arm.

[0023] To make the above-mentioned features and advantages of this utility model more apparent and understandable, specific embodiments are described below, and detailed descriptions are provided in conjunction with the accompanying drawings. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of a vacuum processing system according to an embodiment of the present invention;

[0025] Figure 2A yes Figure 1 A top view of the vacuum processing system;

[0026] Figure 2B yes Figure 1 A schematic diagram of some components of a vacuum processing system;

[0027] Figure 3A yes Figure 2B An exploded view of some of the components;

[0028] Figure 3B Showing it from another perspective Figure 3A Some components;

[0029] Figure 3C yes Figure 3A A further exploded diagram of some of the components;

[0030] Figure 3D A partial cross-sectional view of the common rail conveyor at the rotary drive assembly is shown.

[0031] Figures 4A to 4D The different operating modes of the common rail transport equipment are illustrated with simple diagrams.

[0032] Figure 5 This is the operation flowchart for common rail transport equipment;

[0033] Figures 6A to 13 Shown from different perspectives and with different graphics Figure 5 A diagram showing the corresponding process. Detailed Implementation

[0034] Figure 1 This is a schematic diagram of a vacuum processing system according to an embodiment of the present invention. Figure 2A yes Figure 1 A top view of the vacuum processing system. Please also refer to... Figure 1 and Figure 2A In this embodiment, the vacuum processing system 10 is used to transport substrates in a vacuum environment to effectively prevent contamination of the substrates by the external environment. The vacuum processing system 10 includes a common rail transport device 100, a vacuum chamber 200, and multiple processing stations. The common rail transport device 100 is disposed within the vacuum chamber 200. Besides providing accommodating space for the common rail transport device 100, the vacuum chamber 200 also includes related vacuum equipment (e.g., vacuum pumps, vacuum pipes, etc., used to generate a vacuum environment in the accommodating space, not shown here), and multiple slit valves 210 are connected to multiple processing stations to ensure a vacuum environment through the opening and closing of the slit valves 210. In this way, the vacuum processing system 10 can transport substrates (e.g., the aforementioned wafers) between these processing stations through the vacuum chamber 200 and the common rail transport device 100 within it. Figure 2A As shown, the vacuum chamber 200 in this embodiment can connect to 9 processing stations (or storage chambers), but is not limited thereto. The following will use processing stations P1 and P2 as examples for related explanations.

[0035] Figure 2B yes Figure 1 A schematic diagram of some components of the vacuum processing system is provided here. A rectangular coordinate system (XYZ) is provided for component description. Please also refer to... Figure 2A and Figure 2B In this embodiment, the common-rail transport device 100 includes a linear drive rail, a platform 130, a lifting drive assembly 150, a movable arm 120, and a rotary drive assembly 140. The linear drive rail includes a power supply control module CM, a rail 110, a first slider SL1, a second slider SL2, a third slider SL3, and a fourth slider SL4. The rail 110 includes a plurality of linearly arranged electromagnetic coils 111, each electrically connected to the power supply control module CM. The first slider SL1, the second slider SL2, the third slider SL3, and the fourth slider SL4 are sequentially and movably coupled to the rail 110 and each has fixed magnetism. Here, the required fixed magnetism is achieved by providing permanent magnets M1 within these sliders. In another embodiment (not shown), electromagnets can also be provided within these sliders to generate fixed magnetism after being powered by the power supply control module CM. Here, the first slider SL1, the second slider SL2, the third slider SL3, and the fourth slider SL4 are coplanar and share the same rail on the rail 110.

[0036] Furthermore, the power supply control module CM supplies power to the electromagnetic coil 111, generating a corresponding magnetic field to drive and control the first slider SL1, the second slider SL2, the third slider SL3, and the fourth slider SL4 to slide along the track 110. The lifting drive assembly 150 connects the second slider SL2, the fourth slider SL4, and the platform 130. The power supply control module CM drives the second slider SL2 and the fourth slider SL4 to slide on the track 110, while the lifting drive assembly 150 drives the platform 130 to move up and down relative to the track 110 along the Z-axis. The movable arm 120 is movably mounted on the platform 130. The rotation drive assembly 140 is disposed on the first slider SL1, the third slider SL3, and the platform 130 to connect the movable arm 120. The power supply control module CM drives the first slider SL1 and the third slider SL3 to slide on the track 110, while the rotation drive assembly 140 drives the movable arm 120 to extend, retract, or rotate relative to the track 110.

[0037] Figure 3A yes Figure 2B An exploded view of some of the components. Figure 3B Showing it from another perspective Figure 3A Some components. Figure 3C yes Figure 3A A further exploded diagram of some of the components. Figure 3D This shows a partial sectional view of the common rail conveyor at the rotary drive assembly. Please refer to [reference needed]. Figures 3A to 3CIn this embodiment, the rotary drive assembly 140 includes a first rack 141, a first gear 142, a second rack 143, and a second gear 144. The first rack 141 is fixed to the first slider SL1 and extends toward the third slider SL3. The first gear 142 is rotatably mounted on the platform 130, and the first rack 141 and the first gear 142 are on each other's movement paths, so that when the first slider SL1 slides, the first rack 141 can movably mesh with the first gear 142, thereby driving the first gear 142 to rotate along the Z-axis. The second rack 143 is fixed to the third slider SL3, and the second gear 144 is rotatably mounted on the platform 130, and the second rack 143 and the second gear 144 movably mesh with each other, so that the sliding motion of the third slider SL3 along the X-axis on the track 110 can be converted into the rotational motion of the second gear 144 along the Z-axis.

[0038] Furthermore, please refer to [the following]: Figure 3C and Figure 3D The rotary drive assembly 140 also includes a first bearing BR1, a second bearing BR2, a third bearing BR3, and a fourth bearing BR4. The first bearing BR1 is disposed between the second arm 122 and the first arm portion 121a of the first arm 121 to allow them to rotate relative to each other along the Z-axis. The second bearing BR2 is disposed between the driven protrusion 121b of the first arm 121 and the platform 130 to allow them to rotate relative to each other along the Z-axis. The third bearing BR3 is disposed between the tooth portion 142a (inner ring surface) of the first gear 142 and the upper outer ring surface of the tooth portion of the second gear 144 to allow them to rotate relative to each other along the Z-axis. The fourth bearing BR4 is disposed between the inner ring surface of the second gear 144 and the bearing 149a (outer ring surface) of the carrier plate 149 to allow them to rotate relative to each other along the Z-axis. Meanwhile, the carrier plate 149 is substantially fixed to the fourth slider SL4 and extends above the third slider SL3 (i.e., the carrier plate 149 does not contact the third slider SL3) to facilitate the matching design of the rotary drive assembly 140 and the movable arm 120. Here, the support 149a has a protruding structure to accommodate the concave structure 144a of the second gear 144 (shown in...). Figure 3B and Figure 3D ).

[0039] Furthermore, in the common-rail handling device 100 of this embodiment, the rotary drive assembly 140 further includes a shaft assembly SA, which is composed of a first shaft 145, a second shaft 147, and a first track assembly 146. The first shaft 145 is rotatably assembled to the platform 130, and the second arm 122 of the movable arm 120 is connected to the first shaft 145. The first track assembly 146 connects the first shaft 145 and the second shaft 147, and the first shaft 145 moves up and down relative to the second shaft 147 along the Z-axis via the first track assembly 146. A first gear 142 surrounds the first shaft 145 and the second shaft 147, and the second gear 144 and the second shaft 147 are an integral structure, so that when the second gear 144 rotates, it drives the second arm 122 to rotate along the Z-axis through the second shaft 147, the first track assembly 146, and the first shaft 145.

[0040] like Figure 3C As shown, the first gear 142 has an annular tooth portion 142a and a drive protrusion 142b extending from the top surface of the annulus. The movable arm 120 also includes a first arm 121, which is pivotally mounted on the platform 130. The first arm 121 has a first arm portion 121a and a driven protrusion 121b extending from the bottom surface of the first arm portion 121a. The driven protrusion 121b extends through the platform 130 to the rotation path of the drive protrusion 142b, so that when the first gear 142 rotates along the Z-axis, the drive protrusion 142b and the driven protrusion 121b drive the first arm 121 to rotate along the Z-axis together. On the other hand, the rotary drive assembly 140 of this embodiment also includes a second track assembly 148, disposed between the driven protrusion 121b and the drive protrusion 142b. Each of the two sets of second track assemblies 148 includes a pair of linear tracks and a buffer block between them. The second track assembly 148 enables the first arm 121 and the first gear 142 to rotate synchronously along the Z-axis, with only relative movement between them along the Z-axis. The second track assembly 148 has the same structure and function as the first track assembly 146 described above.

[0041] The movable arm 120 in this embodiment also includes a third arm 123, a fourth arm 124, and a pick-and-place arm 125. The third arm 123 is pivotally connected to the first arm 121, and the fourth arm 124 is pivotally connected to the second arm 122. The third arm 123 and the fourth arm 124 are pivotally connected to each other and simultaneously pivotally connected to the pick-and-place arm 125, thereby forming a scissor linkage mechanism to extend or retract through opposite rotation. Further explanation will follow.

[0042] Figures 4A to 4D The different operating modes of the common rail transport system are illustrated with simple diagrams. Please refer to the diagrams first. Figure 4C and Figure 4DFollowing the aforementioned components of the rotary drive assembly 140, its operating mode will be further described in detail. As previously mentioned, the first gear 142 is driven by the first rack 141. Therefore, when the first rack 141 moves along direction D1 (corresponding to the positive X-axis direction), it drives the first gear 142 to rotate along the Z-axis (clockwise), and in particular, drives the first arm 121 to rotate along direction D2. Conversely, when the first rack 141 moves along direction D3 (corresponding to the negative X-axis direction), it drives the first gear 142 to rotate (counterclockwise), and in particular, drives the first arm 121 to rotate along direction D4.

[0043] On the other hand, the second gear 144 is driven by the second rack 143. Therefore, when the second rack 143 moves along direction D5 (corresponding to the positive X-axis direction), it drives the second gear 144 to rotate along the Z-axis (counterclockwise), and in particular, drives the second arm 122 to rotate along direction D6. Conversely, when the second rack 143 moves along direction D7 (corresponding to the negative X-axis direction), it drives the second gear 144 to rotate (clockwise), and in particular, drives the second arm 122 to rotate along direction D8.

[0044] In addition, at the same time Figure 4C , Figure 4D As mentioned above Figure 3C The components clearly show that the first track assembly 146 is assembled between the connecting part 145b of the first shaft 145 and the second shaft 147. The second gear 144 and the second shaft 147 are integrally formed. The second arm 122 is connected to the top 145a of the first shaft 145. Therefore, in addition to enabling the first shaft 145 to move (lift or lower) relative to the second gear 144 along the Z-axis through the first track assembly 146, it does not restrict the rotation of the second arm 122 along the Z-axis driven by the second gear 144.

[0045] Next, please refer to the following: Figure 4A , Figure 4B And compare Figure 3A or Figure 3BIn this embodiment, the lifting drive assembly 150 is a scissor linkage mechanism, which includes multiple links 151, 152, 153, and 154. Link 151 is pivotally connected to platform 130 and the second slider SL2, and link 152 is pivotally connected to platform 130 and the fourth slider SL4. Links 151 and 152 are centrally pivotally connected to each other. Conversely, link 154 is pivotally connected to platform 130 and the second slider SL2, and link 153 is pivotally connected to platform 130 and the fourth slider SL4. Links 153 and 154 are centrally pivotally connected to each other. Thus, one end of the scissor linkage mechanism (links 151 and 154) is pivotally connected to the second slider SL2, and the other end of the scissor linkage mechanism (links 152 and 153) is pivotally connected to the fourth slider SL4. Accordingly, the power supply control module CM drives the second slider SL2 and the fourth slider SL4 to move closer together to lift platform 130. Figures 4A to 4B The process involves the power supply control module CM driving the second slider SL and the fourth slider SL4 to move apart to lower the platform 130. Figures 4B to 4A (the process).

[0046] Furthermore, such as Figure 3A and Figure 3B As shown, the lifting drive assembly 150 also includes a third track assembly 155, which is assembled between the connecting rods 152 and 153 of the lifting drive assembly 150 and the platform 130, so that the platform 130 can slide relative to the lifting drive assembly 150 along the track 110 via the third track assembly 155, thereby providing the required movement margin of the scissor linkage mechanism during movement.

[0047] Figure 5 This is the operation flowchart for common rail transport equipment. Figures 6A to 13 Shown from different perspectives and with different graphics Figure 5 A corresponding schematic diagram of the process. As mentioned above, the process of this embodiment will be described by way of example, where the common rail transport device 100 takes the substrate 20 from the processing station P1 to the vacuum chamber 200 and then sends it from the vacuum chamber 200 to the processing station P2.

[0048] Please refer to this first. Figure 5 , Figure 6A and Figure 6B First, in step 1, the power supply control module CM drives the second slider SL2 and the fourth slider SL4 to move closer to each other, thereby raising the platform 130 and the movable arm 120 along the Z-axis, and raising the movable arm 120 to a height that corresponds to the opening, that is, from... Figure 6A The height h1 shown is converted to Figure 6B The height h2 is shown, where height h2 is greater than height h1. The openings mentioned here include the opening P1b of the processing station P1, the opening 211 of the gate valve 210, and the opening 221 of the side plate 220 of the vacuum chamber 200.

[0049] Next, please refer to step 2 and compare. Figures 7A to 7C The power supply control module CM drives the first slider SL1 and the third slider SL3, wherein the first slider SL1 moves in the positive X-axis direction (that is, as shown in the figure). Figure 4C As shown in direction D1), to drive the first arm 121 to rotate clockwise (that is, as shown in...). Figure 4C As shown in direction D2). Simultaneously, the power supply control module CM also moves the third slider SL3 in the positive X-axis direction (that is, as shown in...). Figure 4C As shown in direction D5), to drive the second arm 122 to rotate counterclockwise (that is, as shown in...). Figure 4C (Direction D6 is shown). Here, direction D1 is in the same direction as direction D5. In this way, the first arm 121 and the second arm 122 rotate synchronously but in opposite directions, allowing the movable arm 120 to move from... Figure 7B The conversion shown is to Figure 7C As shown. In other words, in this embodiment, the power supply control module CM drives the first slider SL1 and the third slider SL3 to move synchronously and at the same speed in the positive X-axis direction (and preferably, during the movement, the first slider SL1 and the third slider SL3 maintain a relative distance from each other), which can drive the movable arm 120 to extend so that the movable arm 120 sequentially passes through the openings 221, 211 and P1b and extends into the processing station P1.

[0050] Next, please refer to step 3 and compare. Figure 7D The power supply control module CM drives the second slider SL2 and the fourth slider SL4 to bring them closer together, and the lifting drive assembly 150 raises the platform 130 and the movable arm 120 along the Z-axis, thereby lifting the substrate 20.

[0051] Next, please refer to step 4 and compare. Figure 7A and Figure 8 The power supply control module CM synchronously drives the first slider SL1 and the third slider SL3 to move at the same speed in the negative X-axis direction, thereby driving the movable arm 120 to retract and move the substrate 20 out of the processing station P1 and into the vacuum chamber 200. Here, it is also possible to... Figure 7C Comparison, or reverse execution Figure 7C As shown, (please also refer to) Figure 4C Move the first slider SL1 in direction D3 to drive the first arm 121 to rotate in direction D4, and at the same time move the third slider SL3 in direction D7 to drive the second arm 122 to rotate in direction D8, thus completing the retraction movement of the aforementioned movable arm 120 and exiting the processing station P1.

[0052] Next, please refer to step 5 and compare. Figure 8 , Figure 9A and Figure 9BThe power supply control module CM synchronously drives the first slider SL1, the second slider SL2, the third slider SL3, and the fourth slider SL4 to move towards the negative X-axis, so as to move from... Figure 8 The position shown is switched to Figure 9A The location is shown. Next, please refer to step 6 and compare... Figure 9A , Figure 10A The power supply control module CM synchronously drives the first slider SL1 to move at a constant speed in the negative X-axis direction and the third slider SL3 to move at a constant speed in the positive X-axis direction (and preferably, the first slider SL1 and the third slider SL3 maintain a relative distance from each other during the movement), so as to rotate the movable arm 120 counterclockwise and align the substrate 20 with the processing station P2. Please also refer to... Figure 9B and Figure 10B The action indication is marked in Figure 10B As can be seen from the attached diagram, the power supply control module CM drives the first slider SL1 to move along direction D3, thereby driving the first arm 121 to rotate along direction D4, and simultaneously drives the third slider SL3 to move along direction D5, thereby driving the second arm 122 to rotate along direction D6. Here, directions D4 and D6 are in the same direction (i.e., the aforementioned counterclockwise direction).

[0053] Next, please refer to step 7 and compare. Figure 10A , Figure 11A The power supply control module CM synchronously drives the first slider SL1 and the third slider SL3 to move at the same speed in the positive X-axis direction, thereby driving the movable arm 120 to extend in the positive Y-axis direction and sending the substrate 20 into the processing station P2. Please also refer to... Figure 10B and Figure 11B The direction of the action is indicated in Figure 11B The power supply control module CM drives the first slider SL1 to move along direction D1, thereby driving the first arm 121 to rotate along direction D2, and simultaneously drives the third slider SL3 to move along direction D5, thereby driving the second arm 122 to rotate along direction D6. This is as described above. Figure 7C As shown in the extension action, the power supply control module CM drives the first slider SL1 and the third slider SL3 to move synchronously and in the same direction, which causes the first arm 121 and the second arm 122 to rotate in opposite directions, thereby achieving the purpose of extending the movable arm 120.

[0054] Following the above, after the movable arm 120 moves the substrate 20 into the processing station P2 through openings 231, 211 and P2b in sequence, please refer to step 8 and compare. Figure 12 The power supply control module CM drives the second slider SL2 and the fourth slider SL4 to move them apart, while lowering the platform 130 and the movable arm 120 along the Z-axis to support the substrate 20 on the support column P2a within the processing station P2. After placing the substrate 20, refer to step 9 and compare... Figure 11A , Figure 13The power supply control module CM synchronously drives the first slider SL1 and the third slider SL3 to move at the same speed in the negative X-axis direction, thereby driving the movable arm 120 to retract back into the vacuum chamber 200 along the negative Y-axis direction. The motion shown is the same as described above. Figure 7A Switch to Figure 8 The movements are the same. At this point, the removal and placement of the substrate 20 is completed.

[0055] Finally, please refer to step 10 and execute it in reverse. Figure 10B The action shown is that the power supply control module CM synchronously drives the first slider SL1 to move at a constant speed in the positive X-axis direction and the third slider SL3 to move at a constant speed in the negative X-axis direction, thereby rotating the movable arm 120 clockwise. In other words, at this time, the power supply control module CM drives the first slider SL1 to move in direction D1, thereby driving the first arm 121 to rotate in direction D2, and drives the third slider SL3 to move in direction D7, thereby driving the second arm 122 to rotate in direction D8. At this time, directions D2 and D8 are in the same direction (i.e., clockwise as mentioned above), causing the movable arm 120 to rotate from the positive Y-axis direction back to the positive X-axis direction, and then it can be driven by the power supply control module CM to move to the position shown above. Figure 2A At the position shown, repeat step 1 as described above.

[0056] In summary, in the above embodiments of this utility model, the common-rail transport device uses a linear drive track as the main drive source, wherein four sliders are movably configured on the same track (a single track). The track includes multiple linearly arranged electromagnetic coils, and each slider has a fixed magnetism. The electromagnetic coils are powered by a power supply control module, generating corresponding magnetic fields that drive the sliders on the common track. Therefore, when the power supply control module generates magnetic force through the electromagnetic coils, it can drive these sliders to slide on the track.

[0057] Furthermore, the common rail handling equipment uses a lifting drive assembly paired with the second and fourth slides, and a rotary drive assembly paired with the first and third slides. In this way, the power supply control module can change the sliding mode of the second and fourth slides to achieve the lifting operation of the movable arm using the lifting drive assembly, and can also change the sliding mode of the first and third slides to achieve the rotation and extension operation of the movable arm using the rotary drive assembly. Based on these motion modes, the movement of a single movable arm can meet the needs of substrate picking and placing.

[0058] In this way, the aforementioned drive components can be effectively and unobstructedly arranged in the vacuum chamber, avoiding concerns such as being limited by the vacuum level or causing contamination, and also enabling the transfer of objects in a vacuum environment to be accomplished with the movement of a single movable arm.

[0059] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A common-rail transport device, characterized in that, include: Linear drive tracks, including: Power supply control module; The track includes multiple electromagnetic coils arranged linearly, each electrically connected to the power supply control module; The first, second, third, and fourth sliders are sequentially and movably coupled to the track and each has a fixed magnetism. The power supply control module supplies power to the plurality of electromagnetic coils to generate corresponding magnetic fields to drive and control the first slider, the second slider, the third slider and the fourth slider to slide on the track respectively; platform; A lifting drive assembly connects the second slider, the fourth slider, and the platform, wherein the power supply control module drives the second slider and the fourth slider to slide on the track, thereby driving the platform to rise and fall relative to the track via the lifting drive assembly; A movable arm, movably mounted on the platform; and A rotary drive assembly is disposed on the first slider, the third slider, and the platform to connect the movable arm, wherein the power supply control module drives the first slider and the third slider to slide on the track, thereby driving the movable arm to extend or rotate relative to the track by the rotary drive assembly.

2. The common rail conveying equipment according to claim 1, characterized in that, The rotary drive assembly includes: The first rack is fixed to the first slide; and A first gear is rotatably mounted on the platform, and the first rack and the first gear are on each other's path of motion.

3. The common rail conveying equipment according to claim 2, characterized in that, The rotary drive assembly further includes: The second rack is fixed to the third slide member; and The second gear is rotatably mounted on the platform, and the second rack and the second gear are movably meshed together.

4. The common rail conveying equipment according to claim 3, characterized in that, The first gear and the second gear are coaxial with each other and are arranged in an up-down configuration.

5. The common rail conveying equipment according to claim 3, characterized in that, The rotary drive assembly further includes: A first shaft is assembled to the platform, and the second arm of the movable arm is connected to the first shaft. Second shaft member; and A first track assembly is connected between the first shaft and the second shaft, the first shaft being raised and lowered relative to the second shaft via the first track assembly.

6. The common rail conveying equipment according to claim 5, characterized in that, The first gear surrounds the first shaft and the second shaft. The second gear and the second shaft are an integral structure, so that when the second gear rotates, the second arm is driven to rotate through the second shaft, the first track assembly and the first shaft.

7. The common rail conveying equipment according to claim 3, characterized in that, The first gear has an annular toothed portion and a drive protrusion extending from the top surface of the annulus. The movable arm includes a first arm pivotally mounted on the platform. The first arm has a first arm portion and a driven protrusion extending from the bottom surface of the first arm portion. The driven protrusion extends through the platform to the rotation path of the drive protrusion, so that when the first gear rotates, the first arm is driven to rotate through the drive protrusion and the driven protrusion.

8. The common rail conveying equipment according to claim 7, characterized in that, The rotary drive assembly further includes a second track assembly disposed between the driven protrusion of the first arm and the driving protrusion of the first gear, so that the first arm and the first gear rotate synchronously about an axis and slide relative to each other along the axis.

9. The common rail conveying equipment according to claim 7, characterized in that, The movable arm is a scissor linkage mechanism, and the second arm of the movable arm is connected to and synchronized with the second gear through a shaft assembly. The first gear is coaxially sleeved outside the shaft assembly and can rotate relative to each other. The power supply control module drives the first slider and the third slider to move synchronously in opposite directions at the same speed, so as to drive the movable arm to rotate along the axis. The power supply control module also drives the first slider and the third slider to move synchronously in the same direction at the same speed, so as to drive the movable arm to extend or retract.

10. The common rail conveying equipment according to claim 1, characterized in that, The lifting drive assembly is a scissor linkage mechanism. One end of the scissor linkage mechanism is pivotally connected to the second slide member, and the other end of the scissor linkage mechanism is pivotally connected to the fourth slide member. The power supply control module drives the second slide member and the fourth slide member to move closer to each other to raise the platform, and drives the second slide member and the fourth slide member to move away from each other to lower the platform.

11. The common rail conveying equipment according to claim 1, characterized in that, The first slider, the second slider, the third slider, and the fourth slider are all permanent magnets or electromagnets.

12. The common rail conveying equipment according to claim 1, characterized in that, The first slider, the second slider, the third slider, and the fourth slider are coplanar.

13. The common rail conveying equipment according to claim 1, characterized in that, The lifting drive assembly further includes a second track assembly, which is assembled between the two links of the lifting drive assembly and the platform, so that the platform can slide relative to the lifting drive assembly along the track via the second track assembly.

14. The common rail conveying equipment according to claim 1, characterized in that, Suitable for configuration within a vacuum chamber to form a vacuum processing system, the vacuum chamber having multiple processing stations connected to its periphery, wherein a substrate within one of the processing stations is adapted to be transported to another processing station via the common rail transport device.

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