Pump delivery tool

Abstract

A pump delivery tool includes a length adjustment mechanism, a width adjustment mechanism, a first securing element, a handle assembly, and a handle. The width adjustment mechanism crosses the length adjustment mechanism. A first securing element secures the width adjustment mechanism to the length adjustment mechanism such that the width adjustment mechanism is perpendicular to the length adjustment mechanism. Handle assemblies are connected to the width adjustment mechanism, and each of the handle assemblies includes a handle, and a connector interconnects one of the handle and the width adjustment mechanism. The handles are fastened to the width adjustment mechanism and are respectively adjacent to the fixing elements. A handle extends upwardly from the width adjustment mechanism.

Description

Technical Field

[0001] This disclosure relates to a pump delivery tool. Background Technology

[0002] Integrated circuits, including semiconductor devices, are used in a variety of electronic applications, such as personal computers, mobile phones, digital cameras, and other electronic equipment. Semiconductor devices are typically manufactured by sequentially depositing insulating or dielectric layers, conductive layers, and semiconductor material layers on a semiconductor substrate; and using photolithography to pattern the various material layers to form circuit components and elements thereon. A series of chemical and physical processes can be performed during the manufacturing process using equipment with processing chambers, which are typically maintained at low pressure or partial vacuum. Utility Model Content

[0003] According to some embodiments, a pump delivery tool includes a length adjustment mechanism, a width adjustment mechanism, a first fixing element, a handle assembly, and a handle. The width adjustment mechanism extends beyond the length adjustment mechanism. The first fixing element secures the width adjustment mechanism to the length adjustment mechanism such that the width adjustment mechanism is perpendicular to the length adjustment mechanism. The handle assembly is connected to the width adjustment mechanism, and each handle assembly includes a handle and a connector, the connector interconnecting the handle and one of the width adjustment mechanisms. The handle is secured to the width adjustment mechanism and is adjacent to the fixing element. The handle extends upward from the width adjustment mechanism.

[0004] According to some embodiments, a pump delivery tool includes a plurality of length adjustment mechanisms; a plurality of width adjustment mechanisms extending beyond the length adjustment mechanisms; a plurality of first fixing elements fastening the width adjustment mechanisms to the length adjustment mechanisms such that the width adjustment mechanisms are perpendicular to the length adjustment mechanisms; a plurality of handle assemblies connected to the width adjustment mechanisms; a plurality of handles fastened to the width adjustment mechanisms and respectively adjacent to the first fixing elements, wherein the handles extend upward from the width adjustment mechanisms; and a plurality of fixing assemblies connected to the width adjustment mechanisms, wherein one of the handles is located between one of the fixing assemblies and one of the first fixing elements.

[0005] According to some embodiments, a pump delivery tool includes a plurality of length adjustment mechanisms; a plurality of width adjustment mechanisms coupled to the length adjustment mechanisms, wherein the length adjustment mechanisms are perpendicular to the width adjustment mechanisms; a plurality of handle assemblies connected to the width adjustment mechanisms and including a plurality of handles; and a handle projecting from one of the width adjustment mechanisms. Attached Figure Description

[0006] The state of this disclosure is in relation to the accompanying documents. Figure 1 The best way to understand this text is by referring to the detailed description below. Please note that, according to industry standard practice, the features are not drawn to scale. In fact, the dimensions of the features may be arbitrarily increased or decreased for clarity of explanation.

[0007] Figure 1 A diagram illustrating a wafer fabrication facility according to some embodiments;

[0008] Figure 2 The flowchart illustrates a method for delivering and replacing vacuum pumps in a wafer fabrication facility, according to some embodiments.

[0009] Figure 3 According to some embodiments Figure 1 Perspective view of a medium vacuum pump;

[0010] Figures 4 to 7 Different views of a pump delivery tool according to some embodiments;

[0011] Figure 8 A schematic exploded view of a pump delivery tool according to some embodiments;

[0012] Figure 9 The illustrations are flowcharts of a method for mounting a pump delivery tool on a vacuum pump, according to some embodiments.

[0013] Figure 10 A perspective view of a pump delivery tool and a vacuum pump according to some embodiments;

[0014] Figure 11 The illustrations are flowcharts of a method for delivering an assigned vacuum pump using a pump delivery tool, according to some embodiments.

[0015] Figure 12 The following is a flowchart illustrating a method for detaching a pump delivery tool from a vacuum pump, according to some embodiments;

[0016] Figure 13 This is a flowchart illustrating a method for delivering an old vacuum pump out of an area in a wafer fabrication facility, according to some embodiments.

[0017] [Symbol Explanation]

[0018] 1: Wafer manufacturing facilities

[0019] 5: Floor

[0020] 10: Equipment

[0021] 15: Area

[0022] 20: Pump Storage Area

[0023] 30: Grid corridor

[0024] 40: Vacuum pump

[0025] 45: Vacuum pump

[0026] 45t: Top surface

[0027] 46: Main Body

[0028] 47a: Sidewall

[0029] 47b: Sidewall

[0030] 48: Wheel

[0031] 50: Control Unit

[0032] 100: Pump delivery tool

[0033] 110: Length adjustment mechanism

[0034] 112: Length adjustment element

[0035] 114: Porosity

[0036] 116: Length adjustment element

[0037] 118: Slit

[0038] 119: Fixed Components

[0039] 120: Width Adjustment Mechanism

[0040] 122: Width Adjustment Element

[0041] 124: Porosity

[0042] 126: Width Adjustment Element

[0043] 128: Slit

[0044] 129: Fixed Components

[0045] 130a: Fixed element

[0046] 130b: Fixed element

[0047] 140: Fixed assembly

[0048] 142: Main Body

[0049] 144: Knob

[0050] 146: Screw

[0051] 148: Slewing ring gasket

[0052] 150: Handle

[0053] 160: Handle assembly

[0054] 162: Handle

[0055] 164: Connector

[0056] 166: End plate

[0057] D1: Adjustable distance / distance

[0058] D2: Adjustable distance / distance

[0059] H: Height

[0060] L: Length

[0061] M1~M5: Methods

[0062] Op: Operator

[0063] R1: concave part

[0064] S12: Operation

[0065] S14: Operation

[0066] S16: Operation

[0067] S18: Operation

[0068] S20: Operation

[0069] S32: Operation

[0070] S34: Operation

[0071] S36: Operation

[0072] S38: Operation

[0073] S40: Operation

[0074] S102: Operation

[0075] S104: Operation

[0076] S106: Operation

[0077] S108: Operation

[0078] S110: Operation

[0079] S202: Operation

[0080] S204: Operation

[0081] S206: Operation

[0082] S302: Operation

[0083] S304: Operation

[0084] S306: Operation

[0085] S308: Operation

[0086] W: Width

[0087] X, Y, Z: Axes Detailed Implementation

[0088] The following disclosure provides numerous different embodiments or instances for implementing various features of the provided subject matter. Specific examples of components and configurations are described below to simplify this disclosure. Of course, these components and configurations are merely examples and are not intended to be limiting. For example, the formation of a first feature above or on a second feature in the following description may include embodiments where the first and second features are formed in direct contact, and may also include embodiments where additional features may be formed between the first and second features such that the first and second features are not in direct contact. Furthermore, references to numbers and / or letters may be repeated in various instances of this disclosure. This repetition is for simplicity and clarity and does not in itself indicate a relationship between the various embodiments and / or configurations discussed.

[0089] Additionally, spatial relative terms, such as “below,” “under,” “lower,” “above,” “upper,” and similar terms, may be used herein for ease of description to describe the relationship between one or more elements or features illustrated in the figures and another element or feature. Spatial relative terms are intended to cover different orientations of the device in use or operation other than those depicted in the figures. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatial relative descriptors used herein may be interpreted accordingly.

[0090] As used herein, “approximately,” “about,” “around,” or “substantially” should generally mean within 20%, 10%, or 5% of a given value or range. The quantities given herein are approximate, thus meaning that the terms “approximately,” “about,” “around,” or “substantially” can be interpreted without explicit statement. Those skilled in the art will understand that dimensions can vary depending on different technical nodes. Those skilled in the art will recognize that dimensions depend on the specific type of device, the technology employed, the minimum feature size, and the like. Therefore, the intended terminology should be interpreted in light of the technology being evaluated.

[0091] Integrated circuit manufacturing facilities typically utilize vacuum systems, in which one or more vacuum pumps operate to maintain low pressures (e.g., from below atmospheric pressure (<760 Torr) to approximately millitor) within vacuum chambers of numerous processing equipment / tools used to manufacture semiconductor devices. In a semiconductor fabrication facility (FAB), wafers are frequently transported between various processing equipment / tools in corresponding compartments for different semiconductor manufacturing processes. Because the processing equipment / tools are located in different areas of the FAB, vacuum pumps are delivered to these areas to install vacuum systems for the processing equipment / tools requiring vacuum.

[0092] Some embodiments of this disclosure relate to the delivery of vacuum pumps in a FAB. More specifically, some embodiments of this disclosure provide pump delivery tools for delivering vacuum pumps and methods for using the pump delivery tools. With the pump delivery tools, various heavy-duty vacuum pumps can be easily and efficiently delivered by an operator. Furthermore, operator safety is improved when delivering vacuum pumps.

[0093] Figure 1 This is an illustrative diagram of a wafer fabrication facility 1 according to some embodiments. In the wafer fabrication facility 1, equipment 10 with similar functions may be aggregated in a region 15 called a processing bay or bay. Inter-bay corridors 30 are located between regions 15. A pump storage area 20 is located in the wafer fabrication facility 1 and is a temporary area for storing vacuum pumps 45 intended for use in the vacuum system of the equipment 10. Note that regions 15 and pump storage area 20 are... Figure 1 The distribution shown is for illustrative purposes only and is not intended to be limited to anything beyond what is specifically described in the claims. It is understood that any distribution of region 15 and pump storage area 20 can be designed according to various manufacturing requirements.

[0094] During the manufacture of semiconductor devices, a vacuum system is used in equipment 10. However, since the vacuum pump 40 used in the vacuum system is not in operation, the old vacuum pump 40 is replaced by a new vacuum pump 45, which is stored in the pump storage area 20. The operator Op uses a pump delivery tool 100 (not shown) to... Figure 1 Please see the Chinese version. Figures 4 to 8 and Figure 10 Operator Op is responsible for moving vacuum pump 45 to area 15 as needed. Also, after the old vacuum pump 40 is replaced by the new vacuum pump 45, operator Op is responsible for delivering vacuum pump 40 out of area 15 as needed.

[0095] Figure 2The illustration is a flowchart of a method M1 for delivering and replacing vacuum pumps in a wafer fabrication facility 1, according to some embodiments. Various operations of method M1 are at least related to... Figures 1 to 12 The discussion is related. It should be noted that each of the methods presented below is merely an example and is not intended to limit this disclosure to anything explicitly described in the claims. Additional operations may be provided before, during, and after each of the methods. Some of the described operations may be replaced, eliminated, or moved for additional embodiments of the delivery method. Furthermore, some elements in the figures have been simplified for clarity and ease of explanation.

[0096] Operation S12 of method M1 includes receiving a request for delivery of a vacuum pump in a wafer fabrication facility. For example, in... Figure 1 In this process, when vacuum pump 40 in one of the regions 15 is not functioning, the need to replace vacuum pump 40 with a new vacuum pump 45 can be sent (by operator Op and / or corresponding equipment 10) to control unit 50 of wafer fabrication facility 1. In some other embodiments, when a new processing bay is established in wafer fabrication facility 1, new equipment 10 and vacuum systems are scheduled to move to the new processing bay. Therefore, the need to deliver a new vacuum pump 45 can be sent (by operator Op and / or corresponding equipment 10) to control unit 50 of wafer fabrication facility 1.

[0097] Operation S14 of method M1 includes assigning vacuum pumps to a pump storage area in the wafer fabrication facility. Specifically, the vacuum pumps 45 in the pump storage area 20 include one or more dry pumps, such as turbomolecular pumps (TMP), adsorption pumps, sputtered ion pumps, mechanical booster pumps, or cryogenic pumps. Each type of vacuum pump 45 may have various models. Therefore, the operator Op and / or control unit 50 assigns a specific type and model of vacuum pump 45 to the pump storage area 20, which is quantified for use in the corresponding processing compartment and corresponding equipment 10.

[0098] Figure 3 According to some embodiments Figure 1 Perspective view of vacuum pump 45. Besides vacuum pump 45, Figure 3 The X-axis, Y-axis, and Z-axis directions are depicted. In some embodiments, the vacuum pump 45 has a main body 46 and a plurality of wheels 48 fastened to the main body 46. The main body 46 has dimensions including length L, width W, and height H. The pumping unit of the vacuum pump 45 is located in the main body 46. Note that some components of the vacuum pump 45 (such as conduits, valves, tubes, etc.) are not shown. Figure 3In general, the main body 46 weighs over 100 kg and has a height H that is about half that of an adult. Therefore, the delivery of the vacuum pump 45 is a challenge for the operator due to its height and size.

[0099] Operation S16 of method M1 includes mounting a pump delivery tool onto an assigned vacuum pump. Figures 4 to 7 For different views of the pump delivery tool 100 according to some embodiments, and Figure 8 This is a schematic exploded view of a pump delivery tool 100 according to some embodiments. Besides the pump delivery tool 100, Figures 4 to 8 The X-axis, Y-axis, and Z-axis directions are depicted. The pump delivery tool 100 includes a plurality of length adjustment elements 112 and 116. Each length adjustment element 112 has a plurality of orifices 114, which are separated from each other and arranged along the extension direction of the length adjustment element 112 (i.e., the Y-direction in this case). Each length adjustment element 116 has a slit 118 therein and extends along the extension direction of the length adjustment element 116 (i.e., the Y-direction in this case).

[0100] One of the length adjusting elements 112 can be assembled to one of the length adjusting elements 116 by a fixing element (e.g., a screw or a rotary knob) 119 to form a length adjusting mechanism 110. For example, the fixing element 119 is inserted into the slit 118 of the length adjusting element 116 and the individual apertures 114 of the length adjusting element 112, such that the length adjusting element 116 is movable relative to the length adjusting element 112 in the Y direction. After the relative position between the length adjusting elements 112 and 116 is determined, the fixing element 119 is rotated to secure the length adjusting elements 112 and 116. The two pairs of length adjusting mechanisms 110 are separated from each other by an adjustable distance D1 (which is adjusted by using the width adjusting mechanism 120 described below). In some embodiments, the distance D1 is determined by the width W of the vacuum pump 45 (see...). Figure 3 )determination.

[0101] The pump delivery tool 100 further includes a plurality of width adjustment elements 122 and 126. Each width adjustment element 122 has a plurality of apertures 124, which are spaced apart from each other and arranged along the extension direction of the width adjustment element 122 (i.e., the X direction in this case). Each width adjustment element 126 has a slit 128 therein and is arranged along the extension direction of the width adjustment element 126 (i.e., the X direction in this case).

[0102] One of the width adjusting elements 122 can be assembled to one of the width adjusting elements 126 by a fixing element (e.g., a screw or a rotary knob) 129 to form a width adjusting mechanism 120. For example, the fixing element 129 is inserted into the slit 128 of the width adjusting element 126 and into the individual apertures 124 of the width adjusting element 122, such that the width adjusting element 126 is movable relative to the width adjusting element 122 in the X direction. After the relative position between the width adjusting elements 122 and 126 is determined, the fixing element 129 is rotated to secure the width adjusting elements 122 and 126. The two pairs of width adjusting mechanisms 120 are separated from each other by an adjustable distance D2 (which is adjusted by using the length adjusting mechanism 110). In some embodiments, the distance D2 is determined by the length L of the vacuum pump 45 (see...). Figure 3 )determination.

[0103] The length adjustment mechanism 110 and the width adjustment mechanism 120 can be assembled together using fastening elements (e.g., screws or rotary knobs) 130a and 130b, such that the length adjustment mechanism 110 extends over and is substantially perpendicular to the width adjustment mechanism 120. Specifically, the fastening elements 130a and 130b secure the length adjustment mechanism 110 to the width adjustment mechanism 120, such that the width adjustment mechanism 120 is coupled to the length adjustment mechanism 110. For example, each of the fastening elements 130a is inserted into one of the apertures 114 of the length adjustment element 112 and one of the apertures 124 of the width adjustment element 122; each of the fastening elements 130b is inserted into one of the slits 118 of the length adjustment element 116 and one of the slits 128 of the width adjustment element 126. However, in some other embodiments, one of the fixing elements 130a and 130b may be inserted into one of the apertures 114 and one of the slits 128, or may be inserted into one of the slits 118 and one of the apertures 124.

[0104] The pump delivery tool 100 further includes a plurality of fixing assemblies 140 connected to the width adjustment mechanism 120. Specifically, each of the fixing assemblies 140 includes a body 142, a knob 144, a screw 146, and a swivel pad 148. The body 142 is connected to the width adjustment element 122 or 126 and extends downward from the width adjustment mechanism 120 in the Z direction. That is, the body 142 is substantially perpendicular to the width adjustment element 122 or 126. Each of the handles 150 is located between the body 142 and a corresponding fixing element 130a / 130b. The screw 146 passes through the body 142 and interconnects the knob 144 and the swivel pad 148. The position of the swivel pad 148 is adjusted by rotating the knob 144.

[0105] The pump delivery tool 100 further includes a plurality of handles 150 fastened to the width adjustment mechanism 120. Specifically, the handles 150 are positioned adjacent to the fixing elements 130a / 130b, respectively. That is, the handles 150 are positioned at the four corners of the pump delivery tool 100. Furthermore, the handles 150 protrude from the width adjustment mechanism 120 and move upward in the Z direction. Therefore, at least one of the operators Op can hold one of the handles 150 to pull the pump delivery tool 100 in the X and Y directions when delivering the vacuum pump 45 using the pump delivery tool 100. In addition, the operator Op can guide the pump delivery tool 100 and the vacuum pump 45 by pulling the handles 150 in different directions.

[0106] The pump delivery tool 100 further includes a plurality of handle assemblies 160 connected to the width adjustment mechanism 120. Specifically, each of the handle assemblies includes a handle 162 and a connector 164. The connector 164 interconnects the handle 162 and the width adjustment element 122 or 126. Figure 8 As illustrated, each of the connectors 164 extends below and is secured to the width adjustment element 122 or 126. A handle 162 extends in the Y direction and is above the top surface 45t of the vacuum pump 45, allowing the operator Op to hold the handle 162 and push the pump delivery tool 100 forward or pull it backward. In some embodiments, each handle assembly 160 further includes an end plate 166 connected to the connector 164. The end plate 166 extends downward from the connector 164 in the Z direction and is angled against the sidewall of the vacuum pump 45 to secure the pump delivery tool 100 to the vacuum pump 45.

[0107] Figure 9 This is a flowchart illustrating a method M2 (i.e., operation S16 of method M1) for mounting a pump delivery tool 100 on a vacuum pump 45, according to some embodiments. The various operations of method M2 are at least related to... Figures 3 to 8 and Figure 10 The discussion is related. It should be noted that each of the methods presented below is merely an example and is not intended to limit this disclosure to anything explicitly described in the claims. Additional operations may be provided before, during, and after each of the methods. Some of the described operations may be replaced, eliminated, or moved for additional embodiments of the delivery method. Furthermore, some elements in the figures have been simplified for clarity and ease of explanation.

[0108] Operation S102 of method M2 includes providing a pump delivery tool in a released state. For example, Figure 8 The pump delivery tool 100 is assembled as shown in Figure 4. Specifically, in Figure 8In this assembly, length adjusting elements 112 and 116 each have a recess R1 at their ends. After the length adjusting elements 112 and 116 are assembled to the width adjusting elements 122 and 126, the recesses R1 of the length adjusting elements 112 and 116 are respectively coupled to the connector 164 of the handle assembly 160. Therefore, the relative positions between the intersecting length adjusting elements 112 / 116 and width adjusting elements 122 / 126 can be fixed. Fixing elements 130a and 130b are then inserted into the holes 114 and 124 or slits 118 and 128 of the intersecting length adjusting elements 112 / 116 and width adjusting elements 122 / 126, and are then tightened to a secure state.

[0109] Subsequently, the fixing element 119, in the loosened state, is inserted into the slit 118 of the length adjusting element 116 and the individual holes 114 of the length adjusting element 112. That is, the fixing element 119 is not tightened, and the length adjusting element 116 remains movable relative to the length adjusting element 112 in the extending direction of the length adjusting elements 112 and 116. Furthermore, the fixing element 129, in the loosened state, is inserted into the slit 128 of the width adjusting element 126 and the individual holes 124 of the width adjusting element 122. That is, the fixing element 129 is not tightened, and the width adjusting element 126 remains movable relative to the width adjusting element 122 in the extending direction of the width adjusting elements 122 and 126.

[0110] The operation S104 of method M2 includes placing the release pump delivery tool on the assigned vacuum pump. Figure 10 This is a perspective view of a pump delivery tool 100 and a vacuum pump 45 according to some embodiments. (Refer to...) Figure 2 , Figure 4 and Figure 10 As mentioned in operation S16 of method M1, the pump delivery tool 100 is mounted on the assigned vacuum pump 45. Initially, the pump delivery tool 100, in the released state as mentioned in operation S102, is placed on the top surface 45t of the assigned vacuum pump 45. Figure 1 and Figure 10 As illustrated, the length adjustment mechanism 110 and width adjustment mechanism 120 of the pump delivery tool 100 are located above the top surface 45t of the vacuum pump 45, and the pump delivery tool 100 is separated from the floor 5 of the wafer fabrication facility 1. After the pump delivery tool 100 is placed on the vacuum pump 45, at least one of the end plates 166 and at least one of the swivel pads 148 do not contact the main body 46 of the vacuum pump 45.

[0111] Operation S106 of method M2 includes adjusting the relative position of the length adjustment element until the end plate of the pump delivery tool contacts the assigned vacuum pump. For example... Figure 4 and Figure 10 As illustrated, in some embodiments, the length adjustment element 116 moves relative to the length adjustment element 112 until the end plate 166 on the opposite side of the pump delivery tool 100 contacts the opposite sidewall 47a of the main body 46 of the vacuum pump 45. At that point, the relative position between the length adjustment elements 112 and 116 is determined. The fixing element 119 is then screwed into the orifice 114 in a tensioned state. Thus, the length adjustment mechanism 110 is fastened / fixed to the vacuum pump 45.

[0112] Operation S108 of method M2 includes adjusting the relative position of the width adjustment element until the rotating ring pad of the pump delivery tool contacts the vacuum pump. For example... Figure 4 and Figure 10 As illustrated, in some embodiments, the width adjustment element 126 moves relative to the width adjustment element 122 until the swivel pad 148 on the opposite side of the pump delivery tool 100 touches the other opposite sidewall 47b of the main body 46 of the vacuum pump 45. At that point, the relative position between the width adjustment elements 122 and 126 is determined. The fixing element 129 is then screwed into the orifice 124 in a tensioned state. Thus, the width adjustment mechanism 120 is fastened / fixed to the vacuum pump 45.

[0113] Operation S110 of method M2 includes screwing the rotating ring gasket toward the vacuum pump. For example... Figure 4 and Figure 10 As illustrated, in some embodiments, after the length adjustment mechanism 110 and width adjustment mechanism 120 are fastened / secured to the vacuum pump 45, the knob 144 of the fixing assembly 140 is further turned to push the swivel pad 148 against the sidewall 47b of the main body 46 of the vacuum pump 45, thereby increasing the friction between the swivel pad 148 and the sidewall 47b of the main body 46. This configuration prevents the pump delivery tool 100 from being detached from the vacuum pump 45 during delivery.

[0114] Looking back Figure 2 Operation S18 of method M1 includes delivering the assigned vacuum pump using a pump delivery tool. For example... Figure 1 and Figure 10 As illustrated, after the pump delivery tool 100 is mounted on the vacuum pump 45, the operator Op can deliver the vacuum pump 45 from the pump storage area 20 to the area 15 as needed.

[0115] Figure 11 This is a flowchart illustrating a method M3 (i.e., operation S18 of method M1) for delivering an assigned vacuum pump 45 using a pump delivery tool 100, according to some embodiments. The various operations of method M3 are at least related to... Figure 1 and Figure 10The discussion is related. It should be noted that each of the methods presented below is merely an example and is not intended to limit this disclosure to anything explicitly described in the claims. Additional operations may be provided before, during, and after each of the methods. Some of the described operations may be replaced, eliminated, or moved for additional embodiments of the delivery method. Furthermore, some elements in the figures have been simplified for clarity and ease of explanation.

[0116] Operation S202 of method M3 includes pushing the pump delivery tool by an assigned vacuum pump. Operation S204 of method M3 includes pulling the pump delivery tool by an assigned vacuum pump. In some embodiments, each of the operators Op stands on the back side of the vacuum pump 45. Operator Op may hold the handle 162 with both hands and push the vacuum pump 45 forward from the back side of the vacuum pump 45. Alternatively, operator Op may pull the vacuum pump 45 backward from the front side of the vacuum pump 45. On the other hand, another operator Op may stand next to the vacuum pump 45 and grasp one of the handles 150 to pull the vacuum pump 45 forward. Thus, with two operators Op cooperating, the heavy vacuum pump 45 can be easily moved and delivered to a predetermined location (e.g., the desired area 15).

[0117] Operation S206 of method M3 includes pulling the handle of the pump delivery tool in different directions to rotate the direction of the delivery vacuum pump. For example... Figure 1 As illustrated, vacuum pump 45 can reach a specific area 15 via inter-chamber corridor 30. Therefore, the delivery route may have some turns. During the delivery of vacuum pump 45, when the direction satisfies the turns of the delivery route and the vacuum pump 45 can be easily turned to several specific directions, the operator Op holding handle 150 can pull handle 150 in different directions.

[0118] Additionally, in some embodiments, area 15 may be occupied by a number of tools and / or devices. Therefore, the delivery path in area 15 may be narrower than the inter-chamber corridor 30, and the vacuum pump 45 and pump delivery tool 100 may impact the walls or objects in area 15. Figure 10 As illustrated, the mounting assembly 140 protrudes from the side wall 47b of the vacuum pump 45, making the mounting assembly 140 a shock absorber resistant to impact energy, thereby preventing damage to the vacuum pump 45, even when the pump delivery tool 100 impacts a wall or object. Furthermore, the handle 150 retracts from the mounting assembly 140. The operator Op's hand, gripping the handle 150, is not injured, even when the pump delivery tool 100 impacts a wall or object.

[0119] Looking back Figure 2 Method M1 operation S20 includes the self-assigned vacuum pump detachment pump delivery tool. Then refer to... Figure 1 and Figure 10 After the vacuum pump 45 is delivered to a predetermined position in the specific area 15 by the pump delivery tool 100, the pump delivery tool 100 is detached from the vacuum pump 45, and the vacuum pump 45 is being installed in the specific area 15 by the equipment 10.

[0120] Figure 12 This is a flowchart illustrating a method M4 (i.e., operation S20 of method M1) for detaching the pump delivery tool 100 from the vacuum pump 45, according to some embodiments. The various operations of method M4 are at least related to... Figure 4 and Figure 10 The discussion is related. It should be noted that each of the methods presented below is merely an example and is not intended to limit this disclosure to anything explicitly described in the claims. Additional operations may be provided before, during, and after each of the methods. Some of the described operations may be replaced, eliminated, or moved for additional embodiments of the delivery method. Furthermore, some elements in the figures have been simplified for clarity and ease of explanation.

[0121] Operation S302 of method M4 includes releasing the rotating ring pad of the pump delivery tool from the vacuum pump. (See reference...) Figure 4 and Figure 10 As mentioned above, the retaining assembly 140 is in a tensioned state during delivery. Therefore, the operator Op can turn knob 144 to loosen the retaining assembly 140. In some embodiments, after the retaining assembly 140 is loosened, the swivel gasket 148 may be in a loosened state but still in contact with the sidewall 47b of the vacuum pump 45. Alternatively, the swivel gasket 148 may be detached from the sidewall 47b of the vacuum pump 45.

[0122] Operation S304 of method M4 includes loosening the retaining element to release the width adjustment mechanism of the pump delivery tool. (See reference...) Figure 4 and Figure 10 After releasing the retaining assembly 140, the operator Op can screw the retaining element 129 until the width adjusting element 126 can move relative to the width adjusting element 122. In some embodiments, the retaining element 129 remains coupled to the width adjusting elements 122 and 126 when the width adjusting mechanism 120 is in the released state. For operator convenience, the pump delivery tool 100 can be mounted to another vacuum pump 40 or 45.

[0123] Operation S306 of method M4 includes loosening the retaining element to release the length adjustment mechanism of the pump delivery tool. (See reference...) Figure 4 and Figure 10After releasing the retaining assembly 140, the operator Op can screw the retaining element 119 until the length adjusting element 116 can move relative to the length adjusting element 112. In some embodiments, the retaining element 119 remains coupled to the length adjusting elements 112 and 116 when the length adjusting mechanism 110 is in the released state. It is convenient for the operator to mount the pump delivery tool 100 to another vacuum pump 40 or 45. Note that in some embodiments, operation S306 can be performed after operation S304, or operations S304 and S306 can be performed simultaneously.

[0124] Operation S308 of method M4 includes carrying the pump delivery tool away from the vacuum pump. For example... Figure 10 As illustrated, when the length adjustment mechanism 110 and the width adjustment mechanism 120 are in the released state, the operator Op can carry the pump delivery tool 100 away from the vacuum pump 45 to complete the delivery.

[0125] Looking back Figure 1 In some embodiments, when a new vacuum pump 45 is delivered to a specific region 15, the corresponding old vacuum pump 40 can be replaced by the new vacuum pump 45. Therefore, the old vacuum pump 40 may need to be taken away from the specific region 15 (to the pump storage area 20 or another temporary area for storing the old vacuum pump 40).

[0126] Figure 13 This is a flowchart illustrating a method M5 for delivering a used vacuum pump 40 out of region 15 in a wafer fabrication facility 1, according to some embodiments. Various operations of method M5 are at least related to... Figure 1 and Figure 10 The discussion is related. It should be noted that each of the methods presented below is merely an example and is not intended to limit this disclosure to anything explicitly described in the claims. Additional operations may be provided before, during, and after each of the methods. Some of the described operations may be replaced, eliminated, or moved for additional embodiments of the delivery method. Furthermore, some elements in the figures have been simplified for clarity and ease of explanation.

[0127] Operation S32 of method M5 includes the requirement for delivery of a first vacuum pump from a processing compartment of the wafer fabrication facility. In some embodiments, the vacuum pump 40 in the processing compartment is operated for an extended period. Components of the vacuum pump 40 (e.g., motor, tubing, conduits, etc.) may be corroded by corrosive gases. The vacuum pump 40 may also attract dust, which can block the tubing and / or conduits of the vacuum pump 40. Therefore, the vacuum pump 40 may eventually become inoperable and require replacement. Operator Op or equipment 10 can provide the requirement for delivery of the vacuum pump 40 from the corresponding area 15 and replace the vacuum pump 40 with a new vacuum pump 45.

[0128] Operation S34 of method M5 includes the removal of the vacuum pump from the self-processing compartment. For example... Figure 1 As illustrated in the diagram. Vacuum pump 40 is initially connected or coupled to the vacuum system used in apparatus 10. Since vacuum pump 40 is not currently in operation, it is detached from the vacuum system used in apparatus 10 and awaits delivery.

[0129] Operation S36 of method M5 includes mounting a pump delivery tool onto a vacuum pump. In some embodiments, Figure 9 Method M2 can be used to mount the pump delivery tool 100 to the old vacuum pump 40. Therefore, a description of this situation will not be provided below.

[0130] Operation S38 of method M5 includes delivering a vacuum pump using a pump delivery tool. In some embodiments, Figure 11 Method M3 can be used to deliver vacuum pump 40 using pump delivery tool 100. Therefore, a description of this situation will not be provided below. In some embodiments, the wheels of an older vacuum pump 40 may be aging and difficult to rotate on floor 5. By using pump delivery tool 100, the operator Op can effectively pull and push vacuum pump 40 even if its wheels are aging.

[0131] Operation S40 of method M5 includes detaching the vacuum delivery tool from the vacuum pump. In some embodiments, Figure 12 Method M4 can be used to detach the vacuum pump 40 from the pump delivery tool 100. Therefore, a description of this situation will not be provided below. The old vacuum pump 40 can be delivered to the pump storage area 20 or other temporary area in the wafer fabrication facility 1.

[0132] Based on the foregoing discussion, it is evident that this disclosure offers advantages. However, it should be understood that other embodiments may offer additional advantages, and not all advantages need to be disclosed herein, nor is any specific advantage claimed for all embodiments. One advantage is that the pump delivery tool can be mounted on different types and models of vacuum pumps. The installation and removal process of the pump delivery tool is simple and quick, thereby simplifying the delivery process of vacuum pumps. Furthermore, the configuration of the handle and grip of the pump delivery tool is operator-friendly and ensures operator safety. In addition, the pump delivery tool saves effort for the operator, allowing for easy delivery of old vacuum pumps even with aging wheels.

[0133] According to some embodiments, a method of delivering and replacing a vacuum pump includes receiving a request for delivering a vacuum pump in a wafer fabrication facility. A vacuum pump is assigned to a pump storage area in the wafer fabrication facility. A pump delivery tool is mounted on the top surface of the assigned vacuum pump. The pump delivery tool includes a length adjustment mechanism, a width adjustment mechanism, and a first fixing element. The width adjustment mechanism and the length adjustment mechanism are located above the top surface of the assigned vacuum pump. The width adjustment mechanism is assembled to the length adjustment mechanism. The width adjustment mechanism is substantially perpendicular to the length adjustment mechanism. The first fixing element secures the length adjustment mechanism to the width adjustment mechanism. The assigned vacuum pump is delivered using the pump delivery tool in the wafer fabrication facility.

[0134] In some embodiments, the step of installing the pump delivery tool includes placing the pump delivery tool on an assigned vacuum pump; adjusting the relative positions between a plurality of length adjustment elements of a length adjustment mechanism until the end plate of the pump delivery tool touches a first sidewall of the assigned vacuum pump; and adjusting the relative positions between a plurality of width adjustment elements of a width adjustment mechanism until the swivel pad of the pump delivery tool touches a second sidewall of the assigned vacuum pump. In some embodiments, the step of installing the pump delivery tool includes, after adjusting the relative positions between the width adjustment elements of the width adjustment mechanism, screwing the swivel pad toward the second sidewall of the assigned vacuum pump. In some embodiments, the step of delivering the assigned vacuum pump using the pump delivery tool in a wafer fabrication facility includes pushing the pump delivery tool from the back side of the assigned vacuum pump. In some embodiments, the step of delivering the assigned vacuum pump using the pump delivery tool in a wafer fabrication facility includes pulling the pump delivery tool beside the assigned vacuum pump. In some embodiments, the method further includes holding a handle positioned on one of the width adjustment mechanisms; and pulling the handle in multiple different directions to change the delivery direction of the assigned vacuum pump. In some embodiments, the method further includes detaching the pump delivery tool from the assigned vacuum pump after the assigned vacuum pump has been delivered to a predetermined position.

[0135] According to some embodiments, a method of delivering and replacing a vacuum pump includes providing a requirement for delivering a first vacuum pump detached from a processing compartment of a wafer fabrication facility. The first vacuum pump is detached from the processing compartment equipment. A pump delivery tool is mounted on the first vacuum pump. The pump delivery tool is placed on the first vacuum pump and spaced apart from the floor of the wafer fabrication facility. Delivering the first vacuum pump using the pump delivery tool includes the steps of: holding a plurality of handles of the pump delivery tool above the top surface of the first vacuum pump to be pushed by the first vacuum pump; and grasping the handle of the pump delivery tool to pull the first vacuum pump.

[0136] In some embodiments, the pump delivery tool includes a plurality of length adjustment mechanisms and a plurality of width adjustment mechanisms coupled to the length adjustment mechanisms, wherein the length adjustment mechanisms are substantially perpendicular to the width adjustment mechanisms. The pump delivery tool includes a handle assembly connected to the width adjustment mechanisms and including a handle, and a handle projecting from one of the plurality of width adjustment mechanisms. In some embodiments, the vacuum pump is a turbomolecular pump, an adsorption pump, a sputtered ion pump, a mechanical booster pump, or a cryogenic pump. In some embodiments, the step of delivering a first vacuum pump via the pump delivery tool includes pulling the handle in multiple different directions to rotate the direction of delivery of the first vacuum pump. In some embodiments, the method further includes detaching the first vacuum pump from the pump delivery tool after delivery. In some embodiments, the method further includes delivering the first vacuum pump to a pump storage area of ​​a wafer fabrication facility, wherein the vacuum pump is stored in the pump storage area. In some embodiments, the method further includes delivering a second vacuum pump from a pump storage area of ​​the wafer fabrication facility to the processing cell before delivering the first vacuum pump out of the processing cell, wherein the vacuum pump is stored in the pump storage area; and replacing the first vacuum pump with the second vacuum pump.

[0137] According to some embodiments, a pump delivery tool includes a length adjustment mechanism, a width adjustment mechanism, a first fixing element, a handle assembly, and a handle. The width adjustment mechanism extends beyond the length adjustment mechanism. The first fixing element secures the width adjustment mechanism to the length adjustment mechanism such that the width adjustment mechanism is perpendicular to the length adjustment mechanism. The handle assembly is connected to the width adjustment mechanism, and each handle assembly includes a handle and a connector, the connector interconnecting the handle and one of the width adjustment mechanisms. The handle is secured to the width adjustment mechanism and is adjacent to the fixing element. The handle extends upward from the width adjustment mechanism.

[0138] In some embodiments, each of the length adjustment mechanisms includes a first length adjustment element having a plurality of orifices arranged along the extension direction of the first length adjustment element; a second length adjustment element having a slit extending along the extension direction of the second length adjustment element; and a plurality of second fixing elements passing through the slit of the second length adjustment element and the orifices of the first length adjustment element. In some embodiments, each of the width adjustment mechanisms includes a first width adjustment element having a plurality of orifices arranged along the extension direction of the first width adjustment element; a second width adjustment element having a slit extending along the extension direction of the second width adjustment element; and a third fixing element passing through the slit of the second width adjustment element and the orifices of the first width adjustment element. In some embodiments, the pump delivery tool further includes a plurality of fixing assemblies connected to the width adjustment mechanism, each fixing assembly including a body, a knob, a screw, and a swivel pad extending downward from one of the width adjustment mechanisms, wherein the screw passes through the body and interconnects the knob and the swivel pad. In some embodiments, one of the handles is located between the body of one of the fixing assemblies and one of the first fixing elements. In some embodiments, each of the handle assemblies further includes an end plate extending downward from the connector.

[0139] According to some embodiments, a pump delivery tool includes a plurality of length adjustment mechanisms; a plurality of width adjustment mechanisms extending beyond the length adjustment mechanisms; a plurality of first fixing elements fastening the width adjustment mechanisms to the length adjustment mechanisms such that the width adjustment mechanisms are perpendicular to the length adjustment mechanisms; a plurality of handle assemblies connected to the width adjustment mechanisms; a plurality of handles fastened to the width adjustment mechanisms and respectively adjacent to the first fixing elements, wherein the handles extend upward from the width adjustment mechanisms; and a plurality of fixing assemblies connected to the width adjustment mechanisms, wherein one of the handles is located between one of the fixing assemblies and one of the first fixing elements.

[0140] In some embodiments, each of the fixing assemblies includes a body extending downward from one of the width adjustment mechanisms, a knob, a screw, and a swivel washer. The screw passes through the body and interconnects the knob and the swivel washer. In some embodiments, each of the handle assemblies includes a handle and a connector interconnecting the handle with one of the width adjustment mechanisms.

[0141] According to some embodiments, a pump delivery tool includes a plurality of length adjustment mechanisms; a plurality of width adjustment mechanisms coupled to the length adjustment mechanisms, wherein the length adjustment mechanisms are perpendicular to the width adjustment mechanisms; a plurality of handle assemblies connected to the width adjustment mechanisms and including a plurality of handles; and a handle projecting from one of the width adjustment mechanisms.

[0142] The foregoing outlines the features of several embodiments to enable those skilled in the art to better understand the nature of this disclosure. Those skilled in the art will understand that this disclosure can be readily used as a basis for designing or modifying other processes and structures for implementing the embodiments introduced herein and / or achieving the same objectives and / or advantages. Those skilled in the art will also recognize that such equivalent constructions do not depart from the spirit and scope of this disclosure, and that such equivalent constructions can be modified, substituted, and replaced herein without departing from the spirit and scope of this disclosure.

Claims

1. A pump delivery tool, characterized in that, Include: Multiple length adjustment mechanisms; Multiple width adjustment mechanisms that pass over the multiple length adjustment mechanisms; Multiple first fixing elements fasten the multiple width adjustment mechanisms to the multiple length adjustment mechanisms, such that the multiple width adjustment mechanisms are perpendicular to the multiple length adjustment mechanisms; A plurality of handle assemblies are connected to the plurality of width adjustment mechanisms, and each of the plurality of handle assemblies includes: The top leader; as well as A connector interconnects the handle with one of the plurality of width adjustment mechanisms; and a plurality of handles are fastened to the plurality of width adjustment mechanisms and respectively adjacent to the plurality of first fixing elements, wherein the plurality of handles extend upward from the plurality of width adjustment mechanisms.

2. The pump delivery tool as claimed in claim 1, characterized in that, Each of the plurality of length adjustment mechanisms comprises: A first length adjusting element having a plurality of orifices arranged along an extension direction of the first length adjusting element; A second length adjusting element having a slit extending along an extending direction of the second length adjusting element; as well as Multiple second fixing elements pass through the slit of the second length adjusting element and the multiple holes of the first length adjusting element.

3. The pump delivery tool as claimed in claim 1, characterized in that, Each of the plurality of width adjustment mechanisms includes: A first width adjustment element having a plurality of orifices arranged along an extension direction of the first width adjustment element; A second width adjustment element having a slit extending along an extension direction of the second width adjustment element; as well as Multiple third fixing elements are provided through the slit of the second width adjusting element and the multiple holes of the first width adjusting element.

4. The pump delivery tool as claimed in claim 1, characterized in that, Further includes: A plurality of fixed assemblies are connected to the plurality of width adjustment mechanisms, and each of the plurality of fixed assemblies includes: A main body extending downward from one of the plurality of width adjustment mechanisms; One knob; One screw; as well as A swivel pad, wherein the screw passes through the body and interconnects the knob and the swivel pad.

5. The pump delivery tool as claimed in claim 4, characterized in that, One of the plurality of handles is located between the body of one of the plurality of fixing assemblies and one of the plurality of first fixing elements.

6. The pump delivery tool as claimed in claim 4, characterized in that, Each of the plurality of handle assemblies further comprises: One end plate extending downwards from the connector.

7. A pump delivery tool, characterized in that, Include: Multiple length adjustment mechanisms; Multiple width adjustment mechanisms that pass over the multiple length adjustment mechanisms; Multiple first fixing elements fasten the multiple width adjustment mechanisms to the multiple length adjustment mechanisms, such that the multiple width adjustment mechanisms are perpendicular to the multiple length adjustment mechanisms; Multiple handle assemblies are connected to the multiple width adjustment mechanisms; Multiple handles are fastened to the multiple width adjustment mechanisms and are respectively adjacent to the multiple first fixing elements, wherein the multiple handles extend upward from the multiple width adjustment mechanisms; as well as Multiple fixing assemblies are connected to the multiple width adjustment mechanisms, wherein one of the multiple handles is located between one of the multiple fixing assemblies and one of the multiple first fixing elements.

8. The pump delivery tool as claimed in claim 7, characterized in that, Each of the plurality of fixed assemblies comprises: A main body extending downward from one of the plurality of width adjustment mechanisms; One knob; One screw; as well as A swivel pad, wherein the screw passes through the body and interconnects the knob and the swivel pad.

9. The pump delivery tool as claimed in claim 7, characterized in that, Each of the plurality of handle assemblies comprises: The top leader; and A connector interconnects the handle with one of the plurality of width adjustment mechanisms.

10. A pump delivery tool, characterized in that, Include: Multiple length adjustment mechanisms; Multiple width adjustment mechanisms are coupled to the multiple length adjustment mechanisms, wherein the multiple length adjustment mechanisms are perpendicular to the multiple width adjustment mechanisms; Multiple handle assemblies, connected to the multiple width adjustment mechanisms and including multiple handles; and A handle protrudes from one of the plurality of width adjustment mechanisms.

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