Production equipment of electronic grade tetramethylammonium hydroxide pentahydrate

Abstract

The utility model discloses production equipment for electronic grade tetramethylammonium hydroxide pentahydrate, which relates to the technical field of tetramethylammonium hydroxide, and comprises a heating base, a servo motor and a membrane positioning plate, a reaction box body is arranged right above the heating base, the top end of the reaction box body is connected with a sealing cover, and the membrane positioning plate is arranged on the reaction box body. A liquid injection pipe fitting is connected to the top end of the sealing cover in a penetrating mode, an exhaust mechanism is arranged on the outer side of the sealing cover, and gas generated in the purification and heating process of tetramethylammonium hydroxide is extracted through the exhaust mechanism, so that the situation that waste gas escapes in an operation workshop, and the operation safety is affected is avoided; a purification mechanism is arranged in the reaction box body. In the using process, the membrane positioning plates connect and position the upper side and the lower side of the exchange membrane through the membrane clamping grooves, meanwhile, the two sides of a membrane body are positioned through the symmetrically-arranged C-shaped membrane positioning plates, and the operation stability of the membrane body in the power supply process is guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of tetramethyl ammonium hydroxide, specifically relates to a kind of electronic grade tetramethyl ammonium hydroxide pentahydrate production equipment. BACKGROUND

[0002] Tetramethyl ammonium hydroxide is important basic key material of electronic industry, is important support material of semiconductor material, key research and development new panel, high-efficiency lighting material, high-performance packaging material, large-size silicon epitaxial material, intelligent LCD material, chip, integrated circuit etc., and the production of electronic grade tetramethyl ammonium hydroxide needs to be purified by purification device, so that it is convenient to use.

[0003] If a piece of membrane electrode or other components inside electrolytic cell fails, the whole electrolytic cell will stop working immediately, and during maintenance, the whole electrolytic cell needs to be disassembled, the faulty components need to be found out and replaced, and then the electrolytic cell is assembled again for recovery, and the performance needs to be activated again after recovery. The whole maintenance process is time-consuming and laborious, and it is difficult to adjust the positioning range according to the surface area of the exchange membrane, which affects the positioning difficulty of the membrane body. SUMMARY

[0004] The utility model aims at providing a kind of electronic grade tetramethyl ammonium hydroxide pentahydrate production equipment to solve the above-mentioned defects caused in prior art.

[0005] A kind of electronic grade tetramethyl ammonium hydroxide pentahydrate production equipment, including heating pedestal, servo motor and membrane positioning plate, the top of the heating pedestal is provided with reaction box body, the top of the reaction box body is connected with sealing cover, the top of the sealing cover is connected with liquid injection pipe piece, the outside of the sealing cover is provided with exhaust mechanism, the exhaust mechanism extracts the gas generated during the purification and heating process of tetramethyl ammonium hydroxide, to avoid waste gas from escaping in the operation workshop, affecting the safety of operation, the inside of the reaction box body is provided with purification mechanism, the purification mechanism is positioned and replaced according to the number of liquid to be treated for different lengths of exchange membrane for purification.

[0006] Preferably, the exhaust mechanism includes exhaust pipe, servo motor, exhaust box, fan blade and mixing blade, the exhaust pipe is throughly arranged at the top of the exhaust box, the top of the exhaust box is connected with servo motor, the output shaft of the servo motor is connected with fan blade, the bottom end shaft of the fan blade is connected with mixing blade, the fan blade is arranged in the inside of the exhaust box, and the exhaust box is installed above the sealing cover.

[0007] Preferably, the reaction box body is communicated with exhaust pipe through the exhaust box arranged at the top.

[0008] Preferably, the purification mechanism comprises cation exchange membranes, membrane positioning plates, anion exchange membranes, distance adjusting rods and membrane clamping grooves, one set of the membrane positioning plates is symmetrically installed at the bottom end of the reaction box body, the membrane positioning plates are provided with membrane clamping grooves, another set of the membrane positioning plates is arranged at the top end of the distance adjusting rods, the tail end of the distance adjusting rods is connected with a set of the membrane positioning plates, one set of the membrane clamping grooves is internally connected with the anion exchange membranes, and another set of the membrane clamping grooves is internally connected with the cation exchange membranes.

[0009] Preferably, the membrane positioning plates are connected with another set of the membrane positioning plates through the penetratingly connected distance adjusting rods.

[0010] Preferably, the membrane clamping grooves provided on the outer side of the membrane positioning plates are connected with the anion exchange membranes.

[0011] Compared with the prior art, the utility model has the following advantages:

[0012] 1、In the using, membrane positioning plate is connected to the both sides of exchange membrane through membrane clamping groove positioning treatment, and the both sides of membrane body are positioned by symmetrically arranged "C" type membrane positioning plate, so that the running stability of membrane body in power supply process is ensured, and the distance between the parallel arranged membrane positioning plates is adjusted according to the surface area of membrane body, so that the outer sides of exchange membranes of different sizes are positioned.

[0013] 2、In the using, the waste gas generated in the electrolysis of the inside of reaction box body is sucked in by the rotation of the fan blade driven by the servo motor, and the gas is discharged through the exhaust pipe arranged at the top end, so that the waste gas overflow is avoided. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is the overall three-dimensional structure schematic diagram of the utility model.

[0015] Figure 2 It is the inside structure schematic diagram of the reaction box body in the utility model.

[0016] Figure 3 It is the structure schematic diagram of the membrane positioning plate in the utility model.

[0017] Figure 4 It is the sealing cover front cut structure schematic diagram in the utility model.

[0018] Figure 5 It is the reaction box body side cut structure schematic diagram in the utility model.

[0019] Among them:

[0020] 1, heating base; 2, reaction box body; 3, sealing cover; 4, exhaust mechanism; 5, exhaust pipe; 6, servo motor; 7, exhaust box; 8, liquid injection pipe; 9, fan blade; 10, mixed liquid blade; 11, purification mechanism; 12, cation exchange membrane; 13, membrane positioning plate; 14, anion exchange membrane; 15, distance adjusting rod; 16, membrane clamping groove. DETAILED DESCRIPTION

[0021] In order to make the technical means, creative features, purposes and effects of the utility model easy to understand, the utility model is further described below in combination with specific embodiments.

[0022] As shown in Figures 1 to 5 A kind of production equipment of electronic grade tetramethylammonium hydroxide pentahydrate, including heating base 1, servo motor 6 and membrane positioning plate 13, the top of the heating base 1 is provided with reaction box body 2, the top of the reaction box body 2 is connected with sealing cover 3, the top of the sealing cover 3 is connected with liquid injection pipe 8, the outside of the sealing cover 3 is provided with exhaust mechanism 4, the exhaust mechanism 4 extracts the gas generated in the process of tetramethylammonium hydroxide purification and heating, in turn avoids waste gas to escape in operating workshop, affects the safety of operation, the inside of the reaction box body 2 is provided with purification mechanism 11, the purification mechanism 11 is positioned and replaced according to the quantity of liquid to be treated with different lengths of exchange membrane for purification.

[0023] In the embodiment, the exhaust mechanism 4 includes exhaust pipe 5, servo motor 6, exhaust box 7, fan blade 9 and mixed liquid blade 10, the exhaust pipe 5 is throughly arranged at the top of the exhaust box 7, the top of the exhaust box 7 is connected with servo motor 6, the output end shaft of the servo motor 6 is connected with fan blade 9, the bottom end shaft of the fan blade 9 is connected with mixed liquid blade 10, the fan blade 9 is arranged in the inside of the exhaust box 7, and the exhaust box 7 is installed above the sealing cover 3.

[0024] In the embodiment, the reaction box body 2 is communicated with exhaust pipe 5 by the top setting exhaust box 7, and the gas is directly discharged through the exhaust box 7, to avoid the waste gas to escape around.

[0025] In the embodiment, the purification mechanism 11 includes cation exchange membrane 12, membrane positioning plate 13, anion exchange membrane 14, distance adjusting rod 15 and membrane clamping groove 16, a group of the membrane positioning plate 13 is symmetrically installed at the bottom end of the reaction box body 2, the membrane positioning plate 13 is provided with membrane clamping groove 16, another group of the membrane positioning plate 13 is arranged at the top of the distance adjusting rod 15, the tail end of the distance adjusting rod 15 is throughly connected with a group of membrane positioning plate 13, a group of the membrane clamping groove 16 is connected with anion exchange membrane 14 in the inside, and another group of the membrane clamping groove 16 is connected with cation exchange membrane 12 in the inside.

[0026] In this embodiment, the film positioning plate 13 is connected to another set of film positioning plate 13 through the through connecting distance bar 15, and the distance between the two sets of film positioning plate 13 is adjusted through the distance bar 15.

[0027] In this embodiment, the film clamping groove 16 opened on the outer side of the film positioning plate 13 is connected with the anion exchange membrane 14, and the outer side of the anion exchange membrane 14 is positioned through the film clamping groove 16, which is convenient for positioning the anion exchange membrane 14 with different surface area.

[0028] The production equipment of this electronic grade tetramethyl ammonium hydroxide pentahydrate can be used in practical application, including the following working contents:

[0029] Step 1: in the use process, first, the film positioning plate 13 is symmetrically arranged in the inside of the reaction box body 2, the film positioning plate 13 and the reaction box body 2 are positioned through the screw, then the anion exchange membrane 14 and the cation exchange membrane 12 are installed into the film clamping groove 16 opened on the outer side of the film positioning plate 13, and then the other set of film clamping groove 16 opened on the outer side of the film positioning plate 13 is connected with the top of the anion exchange membrane 14 and the cation exchange membrane 12 by pulling the distance bar 15 arranged on the top of the film positioning plate 13;

[0030] Step 2: the operator inserts the screw into the outer side of the distance bar 15 and the film positioning plate 13 for positioning treatment, thereby completing the positioning and support of the outer side of the symmetrically arranged film positioning plate 13, then the sealing cover 3 is installed in the inside of the reaction box body 2, the liquid is injected into the inside of the reaction box body 2 through the liquid injection pipe 8 arranged on the top, then the anion exchange membrane 14 and the cation exchange membrane 12 are opened, and then the servo motor 6 is opened;

[0031] Step 3: the liquid is mixed by the mixing blade 10 driven by the servo motor 6, the inside liquid of the reaction box body 2 is heated by the heating base 1 wire, the solution is heated and stirred by the mixing blade 10, which promotes the solution flow and impurity separation 1. The impurities in the solution are volatilized or decomposed by heating, and the inside air is continuously sucked into the inside of the exhaust box 7 by the fan blade 9;

[0032] Step 4: the exhaust box 7 discharges the gas generated by heating through the exhaust pipe 5 arranged on the top, then after waiting for a period of time, the heating base 1 is closed, and then the cation exchange membrane 12 and the anion exchange membrane 14 are opened, and the solution is filtered by the cation exchange membrane 12 and the anion exchange membrane 14 to remove the cation and anion impurities in the solution. This method can effectively remove the metal ions and chloride ions in the solution, and improve the purity of the product.

[0033] Thus, the disclosed embodiments are merely exemplary, and are not the only way to implement the present application. All changes within the scope of the present application or equivalent to the scope of the present application are included in the present application.

Claims

1. A production plant of electronic grade tetramethylammonium hydroxide pentahydrate, characterized in that: Including heating base (1), servo motor (6) and membrane positioning plate (13), the top of the heating base (1) is provided with reaction box (2), the top end of the reaction box (2) is connected with sealing cover (3), the top end of the sealing cover (3) is connected with liquid injection pipe (8), the outer side of the sealing cover (3) is provided with exhaust mechanism (4), the exhaust mechanism (4) extracts the gas generated in the process of purifying and heating tetramethylammonium hydroxide, thereby avoiding the waste gas from escaping in the operation workshop, affecting the safety of operation, the inside of the reaction box (2) is provided with purification mechanism (11), the purification mechanism (11) positions and replaces the exchange membrane with different lengths for purification according to the quantity of the liquid to be treated.

2. The apparatus for producing electronic grade tetramethyl ammonium hydroxide pentahydrate according to claim 1, characterized in that: The exhaust mechanism (4) includes exhaust pipe (5), servo motor (6), exhaust box (7), fan blade (9) and mixing blade (10), the exhaust pipe (5) is arranged through the top of the exhaust box (7), the top of the exhaust box (7) is connected with servo motor (6), the output end shaft of the servo motor (6) is connected with fan blade (9), the bottom end shaft of the fan blade (9) is connected with mixing blade (10), the fan blade (9) is arranged in the inside of the exhaust box (7), and the exhaust box (7) is installed above the sealing cover (3).

3. The apparatus for producing electronic grade tetramethyl ammonium hydroxide pentahydrate according to claim 2, characterized in that: The reaction box (2) is communicated with the exhaust pipe (5) through the exhaust box (7) arranged at the top.

4. The apparatus for producing electronic grade tetramethyl ammonium hydroxide pentahydrate according to claim 1, characterized in that: The purification mechanism (11) includes cation exchange membrane (12), membrane positioning plate (13), anion exchange membrane (14), distance adjusting rod (15) and membrane clamping groove (16), a group of membrane positioning plates (13) are symmetrically installed at the bottom end of the reaction box (2), the membrane positioning plate (13) is provided with membrane clamping groove (16), another group of membrane positioning plates (13) are arranged at the top end of the distance adjusting rod (15), the tail end of the distance adjusting rod (15) is connected with a group of membrane positioning plates (13), a group of membrane clamping grooves (16) are connected with anion exchange membranes (14) in the inside, and another group of membrane clamping grooves (16) are connected with cation exchange membranes (12) in the inside.

5. The apparatus for producing electronic grade tetramethyl ammonium hydroxide pentahydrate according to claim 4, characterized in that: The membrane positioning plate (13) is connected with another group of membrane positioning plates (13) through the distance adjusting rod (15) connected through.

6. The apparatus for producing electronic grade tetramethyl ammonium hydroxide pentahydrate according to claim 4, characterized in that: The membrane clamping groove (16) formed in the outer side of the membrane positioning plate (13) is connected with the anion exchange membrane (14).

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