Semiconductor carrier tape dust removal device

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and discloses a semiconductor carrier tape dust removal device which comprises a supporting assembly, the supporting assembly comprises a supporting frame, a supporting seat is fixedly installed at the top of the supporting frame, an installation plate is fixedly installed at the top of the supporting frame, a cleaning groove is formed in the installation plate, and a dust removal groove is formed in the cleaning groove. And a filter plate is fixedly mounted in the cleaning tank. According to the carrier tape cleaning device, through the drying assembly arranged in the mounting plate, it can be ensured that after the carrier tape is cleaned by the cleaning assembly, water stains on the surface of the carrier tape are subjected to air drying treatment through the air dryer, it is ensured that secondary pollution of the carrier tape caused by chemical residues is avoided, and the carrier tape can be cleaned by removing the water stains on the surface of the carrier tape and possibly existing chemical residues in time. The purity and the stability of the carrier tape when the carrier tape enters a subsequent semiconductor production link are guaranteed, the yield of semiconductor production is improved, product defects caused by pollution of the carrier tape are reduced, and the quality and the efficiency of semiconductor production are improved on the whole.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially to a semiconductor carrier tape dust removal device. BACKGROUND

[0002] With the semiconductor technology developing towards smaller process and higher integration, the sensitivity of semiconductor devices to impurities and pollution is higher and higher. In the manufacturing process of semiconductor chips, carrier tapes are used to transport chips and other components. If there are dust, chemical residues and other pollutants on the carrier tapes, impurities may be introduced in the chip manufacturing process, resulting in performance degradation or even failure of the chips.

[0003] The semiconductor carrier tape dust removal device disclosed in the publication CN221387744U has solved the problem that the existing dust removal device is prone to clogging the filter plate when filtering dust in water, causing the spray head to be unable to spray water, affecting subsequent carrier tape cleaning, and requiring manual cleaning by the staff. However, the dust removal device still has many defects in actual use, such as: the existing dust removal device only focuses on cleaning and dust removal, lacks drying function, and chemical residues left by water stains on the surface of the carrier tape may cause secondary pollution. Therefore, a semiconductor carrier tape dust removal device needs to be designed. SUMMARY

[0004] To solve the above technical problems, the utility model provides a semiconductor carrier tape dust removal device.

[0005] The utility model adopts the following technical scheme: a semiconductor carrier tape dust removal device, comprising a support assembly, the support assembly comprises a support frame, a support seat is fixedly installed at the top of the support frame, an installation plate is fixedly installed at the top of the support frame, a cleaning groove is formed in the inside of the installation plate, a filter plate is fixedly installed in the inside of the cleaning groove, an inlet disc is fixedly installed at the top of the installation plate, a plurality of groups of roller wheels are rotatably installed in the inside of the inlet disc, and the semiconductor carrier tape dust removal device further comprises:

[0006] A winding assembly, comprising a first support rod, and a winding roller is rotatably installed in the inside of the first support rod.

[0007] A cleaning assembly, comprising a water pump, a water delivery pipe is fixedly installed at the output end of the water pump, and a shunt pipe is fixedly installed at the front end of the water delivery pipe.

[0008] A drying assembly, comprising a air dryer, and the air dryer is fixedly installed in the inside of the installation plate.

[0009] As a further improvement of the above scheme, a first motor is fixedly installed on the outer surface of the first support rod, and a winding roller is fixedly installed at the output end of the first motor.

[0010] Through the technical scheme, since the installation position of the first motor is relatively fixed, when driving the winding roller to rotate, the shaking or deviation caused by unstable power transmission structure can be reduced, thereby ensuring the stability of the tape winding process.

[0011] As a further improvement of the above scheme, a water storage tank is fixedly installed on the top of the support seat, the water pump is arranged on the outer surface of the water storage tank, and a second motor is fixedly installed on the outer surface of the mounting plate.

[0012] Through the technical scheme, the water storage tank can store chemical agents (such as isopropyl alcohol, etc.) required for cleaning the semiconductor carrier tape, and the water pump can extract and deliver the cleaning liquid in the water storage tank to the subsequent water delivery pipe, ensuring that the cleaning liquid can be continuously and stably supplied to the cleaning position.

[0013] As a further improvement of the above scheme, a drive screw is fixedly installed on the output end of the second motor, and a cleaning seat is threadedly connected to the outer surface of the drive screw.

[0014] Through the technical scheme, compared with the static cleaning method, the movement of the cleaning seat can cover different parts of the carrier tape, ensuring that dirt, dust, and chemical residues on the carrier tape can be more thoroughly removed, improving the cleaning effect.

[0015] As a further improvement of the above scheme, a clamping assembly is fixedly installed on the top of the mounting plate, the clamping assembly comprises a mounting seat, and a top limiting roller is rotatably installed on the inner wall of the mounting seat.

[0016] Through the technical scheme, the top limiting roller can limit the upper part of the carrier tape, preventing the carrier tape from shifting upward during operation, ensuring that the carrier tape can move along the predetermined path during cleaning, drying, and winding, and improving the stability and reliability of the entire device.

[0017] As a further improvement of the above scheme, a limiting rod is fixedly installed in the mounting seat, a bottom limiting roller is slidingly installed on the outer surface of the limiting rod, and a second fixing seat is fixedly installed on one side of the bottom limiting roller.

[0018] Through the technical scheme, the structure design enables the bottom limiting roller to flexibly adjust the distance with the top limiting roller within a certain range, and the flexibility of the distance adjustment can adapt to semiconductor carrier tapes of different thicknesses, ensuring that the clamping assembly can effectively clamp the carrier tape regardless of the thickness of the carrier tape, thereby improving the versatility of the device.

[0019] As a further improvement of the above scheme, a first fixing plate is fixedly installed on the outer surface of the mounting seat, the first fixing plate is matched with the second fixing seat, and a fixing bolt is threadedly connected in the first fixing plate.

[0020] Through the technical scheme, the fixing bolt can ensure that the top limiting roller and the bottom limiting roller maintain appropriate spacing during the carrier tape processing, thereby stably clamping the carrier tape, preventing displacement or loosening of the carrier tape during cleaning, drying and other operations, and ensuring consistency of the processing effect.

[0021] Compared with the prior art, the utility model has the advantages that:

[0022] The utility model discloses a sliding bottom limiting roller is used for adjusting the spacing between the top limiting roller, and the limiting rod can ensure that the bottom limiting roller can horizontally slide, when the spacing adjustment is completed, the top limiting roller and the bottom limiting roller are clamped to the carrier tape by screwing the fixing bolt, and the drying assembly arranged in the mounting plate can ensure that the water spots on the surface of the carrier tape are dried by the air dryer after the cleaning assembly finishes cleaning the carrier tape, so that the carrier tape is not polluted again by chemical residues, the water spots and possible chemical residues on the surface of the carrier tape are removed in time, the purity and stability of the carrier tape when entering the subsequent semiconductor production link are ensured, the yield of semiconductor production is improved, product defects caused by carrier tape pollution are reduced, and the quality and efficiency of semiconductor production are improved as a whole. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 It is the whole structure schematic diagram of the utility model;

[0024] Figure 2 It is the shunt pipe structure schematic diagram of the utility model;

[0025] Figure 3 It is the cleaning assembly structure schematic diagram of the utility model;

[0026] Figure 4 It is the clamping assembly structure schematic diagram of the utility model;

[0027] Figure 5 It is the utility model Figure 4 It is the structure enlarged schematic diagram of A place in the utility model.

[0028] Main symbol explanation:

[0029] 1, support assembly; 101, support frame; 102, support seat; 103, mounting plate; 104, cleaning tank; 105, filter plate; 106, feeding tray; 2, winding assembly; 201, first support rod; 203, first motor; 204, winding roller; 3, cleaning assembly; 301, water pump; 302, water supply pipe; 303, shunt pipe; 304, water storage tank; 305, second motor; 306, drive screw; 307, cleaning seat; 4, drying assembly; 401, air dryer; 5, clamping assembly; 501, mounting seat; 502, first fixed plate; 503, top limiting roller; 504, limiting rod; 505, bottom limiting roller; 506, second fixed seat; 507, fixed bolt. DETAILED DESCRIPTION

[0030] In the following, the utility model will be further described in conjunction with the drawings and specific embodiments. It should be noted that the following described embodiments or technical features can be combined to form new embodiments without conflict.

[0031] Embodiments:

[0032] Please combine Figures 1-5 The semiconductor carrier tape dust removal device of the embodiment comprises a support assembly 1, the support assembly 1 comprises a support frame 101, a support seat 102 is fixedly installed at the top of the support frame 101, a mounting plate 103 is fixedly installed at the top of the support frame 101, a cleaning tank 104 is formed in the inside of the mounting plate 103, a filter plate 105 is fixedly installed in the inside of the cleaning tank 104, a feeding tray 106 is fixedly installed at the top of the mounting plate 103, a plurality of roller wheels are rotatably installed in the inside of the feeding tray 106, and the utility model also comprises:

[0033] A winding assembly 2, the winding assembly 2 comprises a first support rod 201, and a winding roller 204 is rotatably installed in the inside of the first support rod 201.

[0034] A cleaning assembly 3, the cleaning assembly 3 comprises a water pump 301, a water supply pipe 302 is fixedly installed at the output end of the water pump 301, and a shunt pipe 303 is fixedly installed at the front end of the water supply pipe 302.

[0035] A drying assembly 4, the drying assembly 4 comprises an air dryer 401, and the air dryer 401 is fixedly installed in the inside of the mounting plate 103.

[0036] A first support rod 201, a first motor 203 is fixedly installed on the outer surface of the first support rod 201, and a winding roller 204 is fixedly installed at the output end of the first motor 203.

[0037] Through the driving of the first motor 203, the winding roller 204 is driven to rotate, at this time, the carrier tape is recycled through the rotation of the winding roller 204, and the roller in the feeding disc 106 can assist the winding roller 204 to recycle the carrier tape.

[0038] The top of the support base 102 is fixedly installed with a water storage tank 304, and a water pump 301 is arranged on the outer surface of the water storage tank 304.

[0039] The output end of the second motor 305 is fixedly installed with a driving screw 306, and the outer surface of the driving screw 306 is threadedly connected with a cleaning seat 307.

[0040] Through the driving of the second motor 305, the driving screw 306 is driven to rotate, and since the cleaning seat 307 is slidably installed on the surface of the driving screw 306, the cleaning seat 307 can be adjusted in sliding when the driving screw 306 rotates, so as to clean the carrier tape.

[0041] The top of the mounting plate 103 is fixedly installed with a clamping assembly 5, and the clamping assembly 5 comprises a mounting seat 501.

[0042] The inside of the mounting seat 501 is fixedly installed with a limiting rod 504, the outer surface of the limiting rod 504 is slidably installed with a bottom limiting roller 505, and one side of the bottom limiting roller 505 is fixedly installed with a second fixing seat 506.

[0043] The outer surface of the mounting seat 501 is fixedly installed with a first fixing plate 502, which is matched with the second fixing seat 506, and the inside of the first fixing plate 502 is threadedly connected with a fixing bolt 507.

[0044] By screwing the fixing bolt 507, the fixing bolt 507 is fixed by the threads on the inner walls of the first fixing plate 502 and the second fixing seat 506, so as to ensure that the top limiting roller 503 and the bottom limiting roller 505 clamp the carrier tape.

[0045] The implementation principle of the semiconductor carrier tape dust removal device in the embodiment of the application is as follows: the semiconductor carrier tape to be subjected to dust removal treatment is passed from the cleaning tank 104, clamped by the clamping assembly 5, and finally sleeved on the surface of the winding roller 204. The winding roller 204 is driven to rotate by the first motor 203. At this time, the carrier tape is recycled by the rotation of the winding roller 204, and the roller in the feeding tray 106 can assist the winding roller 204 to recycle the carrier tape. When the winding assembly 2 is operating, the first supporting rod 201 can be used to support the winding assembly 2, so as to ensure the stability of the winding assembly 2 during operation. The supporting frame 101 arranged in the supporting assembly 1 can be used to support the mounting plate 103, so as to ensure the stability of the cleaning assembly 3 and the drying assembly 4 during operation. The cleaning assembly 3 is mounted on the top of the supporting seat 102, so as to ensure the operation of the cleaning assembly 3 and support the cleaning assembly 3 at the same time.

[0046] The chemical agent, which can be isopropyl alcohol, is poured into the water storage tank 304. The agent is input to the water delivery pipe 302 by driving the water pump 301, and the agent is sprayed on the surface of the carrier tape by the spray head in the shunt pipe 303. The driving screw 306 is driven to rotate by the second motor 305. The surface of the driving screw 306 is slidably mounted with the cleaning seat 307, and the inner wall of the cleaning seat 307 is provided with a thread design opposite to that of the driving screw 306. When the driving screw 306 rotates, the cleaning seat 307 can be adjusted by sliding, so as to clean the carrier tape. The filter plate 105 can ensure that the clean agent flows back into the water storage tank 304, and is finally recycled by the water pump 301.

[0047] The sliding bottom limiting roller 505 is used to adjust the distance between the top limiting roller 503 and the bottom limiting roller 505. The limiting rod 504 in the mounting seat 501 can ensure that the bottom limiting roller 505 can slide horizontally. After the distance is adjusted, the fixed screw 507 is screwed, and the fixed screw 507 is fixed by the threads in the inner walls of the first fixed plate 502 and the second fixed seat 506, so as to ensure that the top limiting roller 503 and the bottom limiting roller 505 clamp the carrier tape.

[0048] The drying assembly 4 arranged in the mounting plate 103 can ensure that the water stains on the surface of the carrier tape are dried by the air dryer 401 after the cleaning assembly 3 completes the cleaning of the carrier tape, so as to prevent the carrier tape from being secondarily polluted by chemical residues. The limiting of the carrier tape by the clamping assembly 5 can straighten the carrier tape, so as to ensure that the surface of the carrier tape is flat when the carrier tape is dried by the drying assembly 4. The flat surface can make the hot air or other drying methods act more uniformly on the carrier tape, so as to avoid the situation that local drying is not in place due to the bending or wrinkling of the carrier tape. In this way, the drying speed can be accelerated, and the drying efficiency can be improved.

[0049] The above-mentioned embodiments are only preferred embodiments of the present application, and cannot be used to limit the scope of protection of the present application. Any non-essential changes and replacements made by those skilled in the art on the basis of the present application shall fall within the scope of protection of the present application.

Claims

1. A semiconductor carrier band dust removal device, comprising a support assembly (1), the support assembly (1) comprises a support frame (101), a support seat (102) is fixedly installed on the top of the support frame (101), an installation plate (103) is fixedly installed on the top of the support frame (101), a cleaning groove (104) is opened in the inside of the installation plate (103), a filter plate (105) is fixedly installed in the inside of the cleaning groove (104), an inlet disc (106) is fixedly installed on the top of the installation plate (103), a plurality of groups of roller wheels are rotatably installed in the inside of the inlet disc (106), characterized in that, Also include: Winding assembly (2), the winding assembly (2) comprises first support rod (201), the inside rotation of first support rod (201) is installed with winding roller (204); Cleaning assembly (3), the cleaning assembly (3) comprises water pump (301), the output of water pump (301) is fixedly installed with water delivery pipe (302), the front end of water delivery pipe (302) is fixedly installed with shunt pipe (303); Drying assembly (4), the drying assembly (4) comprises air dryer (401), and the air dryer (401) is fixedly installed in the inside of mounting plate (103).

2. The semiconductor carrier tape duster according to claim 1, wherein: The outer surface of the first support rod (201) is fixedly installed with the first motor (203), and the output of the first motor (203) is fixedly installed with the winding roller (204).

3. The semiconductor carrier tape duster of claim 1, wherein: The top of the support base (102) is fixedly installed with the water storage tank (304), the water pump (301) is arranged on the outer surface of the water storage tank (304), and the outer surface of the mounting plate (103) is fixedly installed with the second motor (305).

4. A dust removal apparatus for semiconductor carriers as set forth in claim 3, wherein: The output of the second motor (305) is fixedly installed with the drive screw (306), and the outer surface of the drive screw (306) is threadedly connected with the cleaning seat (307).

5. The semiconductor carrier tape duster of claim 1, wherein: The top of the mounting plate (103) is fixedly installed with the clamping assembly (5), the clamping assembly (5) comprises the mounting seat (501), and the inner wall of the mounting seat (501) is rotatably installed with the top limiting roller (503).

6. A dust removal apparatus for semiconductor carriers as set forth in claim 5, characterized in that: The inside of the mounting seat (501) is fixedly installed with the limiting rod (504), the outer surface of the limiting rod (504) is slidably installed with the bottom limiting roller (505), and one side of the bottom limiting roller (505) is fixedly installed with the second fixed seat (506).

7. A dust removal apparatus for semiconductor carriers according to claim 6, wherein: The outer surface of the mounting seat (501) is fixedly installed with the first fixed plate (502), the first fixed plate (502) is matched with the second fixed seat (506), and the inside of the first fixed plate (502) is threadedly connected with the fixed bolt (507).

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