Evaporation boat and evaporation device

Abstract

The utility model discloses an evaporation boat and an evaporation device, and relates to the technical field of battery piece production, the evaporation boat comprises a containing groove, the two ends of the containing groove are respectively connected with a lead, each lead comprises an auxiliary heating section and a connecting section, one end of each auxiliary heating section is connected with the containing groove, the auxiliary heating sections are annularly arranged on the outer side of the containing groove at intervals, and the connecting sections are connected with the other ends of the auxiliary heating sections and extend away from the containing groove. Heat conduction of the bottom and the side wall of the containing groove and heat radiation of the auxiliary heating section on the evaporation boat jointly face the heated object placed in the containing groove, the heating efficiency of the evaporation boat is fully improved, the temperature in the containing groove is uniform, the temperature of the connecting section away from the containing groove is gradually reduced, and the durability of the evaporation boat is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to battery piece production technical field especially relates to a kind of evaporation boat and evaporation coating device. BACKGROUND

[0002] In the process of silicon wafer coating, heating evaporation coating material is carried out by using resistance heating, electron beam heating, radio frequency induction heating, arc heating and laser heating, etc., to vaporize the coating material and adhere it to the surface of the battery piece, so that a thin film passivation layer is formed on the surface of the battery piece. The thin film passivation layer can effectively prevent the loss of electric charge from the silicon wafer, preventing the recombination loss of electric charge, thereby improving the photoelectric conversion efficiency of the battery piece. The evaporation boat of the prior art is usually used in combination with a crucible as a part of supporting the crucible and heating the crucible. However, only a part of the heat generated by the overall heating of the evaporation boat is radiated to the crucible, and most of the heat is lost outside the evaporation boat. SUMMARY

[0003] To solve the above technical problems, the utility model provides an evaporation boat and an evaporation coating device,

[0004] In a first aspect, an evaporation boat comprises a receiving groove, two ends of the receiving groove are connected with lead wires, the lead wires comprise a auxiliary heating section connected with the receiving groove at one end and spacedly arranged outside the receiving groove, and a connecting section connected with the other end of the auxiliary heating section and extending away from the receiving groove.

[0005] Optionally, the receiving groove is provided with two or more receiving grooves, and the two or more receiving grooves are connected by a linking section.

[0006] Optionally, the cross-sectional area of the linking section is equal to or less than the cross-sectional area of the receiving groove.

[0007] Optionally, the material of the evaporation boat is any one of tungsten, graphite, molybdenum, nickel and platinum.

[0008] Optionally, the receiving groove and the auxiliary heating section and / or the junction of the auxiliary heating section and the connecting section are connected by at least two branches, and the cross-sectional area of the branches is less than that of the auxiliary heating section.

[0009] Optionally, the cross-sectional area of the connecting section increases step by step away from the receiving groove.

[0010] In a second aspect, an evaporation coating device comprises any one of the above evaporation boats, and further comprises a power supply mechanism electrically connected with both ends of the two connecting sections of the evaporation boat, a movable shutter plate arranged above the evaporation boat, and a passivation furnace body for accommodating the material to be coated and the evaporation boat.

[0011] Optionally, a crucible is further included, which is arranged in the accommodating groove and used for accommodating the material to be evaporated.

[0012] Optionally, an outer side of the auxiliary heating section is further provided with a heat preservation cover, an opening consistent with a slot of the accommodating groove is arranged at a top of the heat preservation cover, and a gas feeding port communicating with the opening is arranged on the heat preservation cover and used for feeding hydrogen gas to the evaporation boat.

[0013] Compared with the prior art, the evaporation boat has the advantages that the heat for heating and evaporating the material to be evaporated in the space for accommodating the material to be evaporated is from the heat conduction of the bottom and the side wall of the accommodating groove and the heat radiation of the auxiliary heating section on the evaporation boat, the heating of the coating material is more uniform, the evaporation speed of the material to be evaporated is improved, and the heating efficiency of the evaporation boat is improved. Moreover, the accommodating groove and the auxiliary heating section are in an integrated structure, the accommodating groove and the auxiliary heating section are simple to process, have high material utilization rate, and are low in production cost. In addition, the technical scheme provided by the utility model does not need a split crucible structure, the temperature in the accommodating groove is uniform, the temperature of the lead wire end is low, and the durability of the evaporation boat is improved.

[0014] The evaporation boat is applied to the evaporation device, the cut surface of the battery piece is coated, the material to be evaporated can be directly placed in the accommodating groove for heating and evaporation, no other independent material to be evaporated bearing structure is needed, the structure is simple, and cost is saved. BRIEF DESCRIPTION OF DRAWINGS

[0015] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the following will briefly introduce the drawings needed to be used in the embodiments, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained according to these drawings without paying creative labor.

[0016] Figure 1 It is a structure schematic view of the first evaporation boat in the utility model;

[0017] Figure 2 It is a structure schematic view of the second evaporation boat in the utility model;

[0018] Figure 3 It is a structure schematic view of the third evaporation boat in the utility model;

[0019] Figure 4 It is a structure schematic view of the evaporation device in the utility model.

[0020] Among them, the reference signs are:

[0021] 100, to-be-evaporated substance; 10, containing groove; 11, auxiliary heating section; 12, connecting section; 13, linking section; 14, branch; 15, power supply mechanism; 16, heat preservation cover; 161, air inlet. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0023] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings.

[0024] As shown in Figure 1 The evaporation boat provided by the present application can improve the heating efficiency of the to-be-evaporated substance 100 and has a simple structure. The evaporation boat specifically comprises a containing groove 10, and two ends of the containing groove 10 are connected with lead wires. The lead wires comprise auxiliary heating sections 11 connected with the containing groove 10 and spaced apart and arranged outside the containing groove 10, and connecting sections 12 combined with the other ends of the auxiliary heating sections 11 and extending away from the containing groove 10.

[0025] The two auxiliary heating sections 11 in the two lead wires connected with the two ends of the containing groove 10 are wrapped around the two sides of the containing groove 10. One end of the connecting section 12 is connected with the auxiliary heating section 11, and the other end extends away from the containing groove 10 and is electrically connected with an external structure. As shown in Figure 1 The two ends of the containing groove 10 are a first end and a second end. One end of one of the auxiliary heating sections 11 connected with the containing groove 10 is connected with the first end of the containing groove 10, and the other end of the auxiliary heating section 11 is wound to the second end of the containing groove 10 and is combined with the connecting section 12. The other auxiliary heating section 11 is connected with the second end of the containing groove 10 and is reversely wound around the first end of the containing groove 10. The two auxiliary heating sections 11 approximately wrap around the periphery of the containing groove 10, so that the heat on the auxiliary heating sections 11 is utilized on the containing groove 10 to improve the heating efficiency of the containing groove 10.

[0026] It should be noted that the external structure can be the power supply mechanism 15, and the two outwardly extending connecting sections 12 are connected to the positive and negative poles of the power supply mechanism 15, respectively. The power supply mechanism 15 performs power supply heating on the evaporation boat, so that the evaporation boat as a whole generates heat by itself. The auxiliary heating section 11 wrapped on both sides of the containing groove 10 and the containing groove 10 generate heat together. After the containing groove 10 is heated, it has heat radiating outward. The auxiliary heating section 11 not only blocks part of the heat radiating outward from the containing groove 10, but also assists in heating the containing groove 10 to increase the heat of the containing groove 10 itself. Therefore, the local temperature of the containing groove 10 where the to-be-evaporated substance 100 is concentrated is increased, and the heating efficiency of the evaporation boat is improved.

[0027] The evaporation boat in the present application adopts an integrated structure, and uses the lead of the evaporation boat itself as an auxiliary heating structure for containing the to-be-evaporated substance 100, that is, the auxiliary heating section 11 connected with the containing groove 10 is extended to heat the containing groove 10, so that different temperature gradients are generated on the same evaporation boat to concentrate the heat of the evaporation boat at the containing groove 10. The auxiliary heating section 11 connected with the containing groove 10 further radiates heat to the containing groove 10 to improve the heating efficiency of the containing groove 10 on the to-be-evaporated substance 100.

[0028] In some embodiments, referring to Figure 2 It is shown that the containing groove 10 is provided with two or more, and the two or more containing grooves 10 are connected through the linking section 13. Multiple containing grooves 10 simultaneously place multiple to-be-evaporated substances 100, increase the evaporation area, and make the particles of the to-be-evaporated substance 100 after evaporation more dense. For the material to be coated, the evaporation particle thickness is more uniform.

[0029] As shown in Figure 3 It is shown that the containing groove 10 can also be provided with four, and the four containing grooves 10 are arrayed. The two containing grooves 10 on the opposite sides are connected with the auxiliary heating section 11 through the multiple branches 14, respectively. The temperature of the containing groove 10 gradually decreases to the auxiliary heating section 11, and the temperature of the end of the connecting section 12 connected to the auxiliary heating section 11 is the lowest and is used to connect the external power supply structure.

[0030] In another aspect, the cross-sectional area of the linking section 13 is equal to or less than the cross-sectional area of the containing groove 10. Based on Joule's law, the size of the internal current distribution of the active material layer with different internal resistance is adjusted to ensure that the heat generated in different regions of the evaporation boat is distributed differently, so as to ensure that the temperature in the evaporation boat gradually decreases from the containing groove 10 region to the region extending from the connecting section 12.

[0031] Specifically, the material in the evaporation boat is preferably any one of tungsten, graphite, molybdenum, nickel, and platinum, wherein tungsten is preferably used as the material for preparing the evaporation boat. Tungsten has very stable chemical properties and does not react with air and water at room temperature, nor does it react with hydrochloric acid, sulfuric acid, and nitric acid of any concentration. In addition, tungsten has a high melting point and is not easy to melt, and the material has stable performance.

[0032] In some embodiments, the auxiliary heating section 11 is connected to the containing groove 10 through at least two branches 14, the cross-sectional area of the branches 14 is smaller than that of the auxiliary heating section 11, and the structure of the branches 14 transitions the heat at the connection between the auxiliary heating section 11 and the containing groove 10 through the size of the cross-sectional area, that is, the cross-sectional area of the containing groove 10 gradually increases from the sum of the cross-sectional areas of the branches 14 to the cross-sectional area of the auxiliary heating section 11, so that the uniformity of the heat between the containing groove 10 and the auxiliary heating section 11 decreases, the concentration of heat in the evaporation boat is reduced, and the distribution of heat in the evaporation boat is further improved, so that the heat at the containing groove 10, which is concentrated and heated, is the most concentrated and has the highest temperature, the auxiliary heating section 11 between the containing groove 10 and the connecting section 12 has part of the heat, which is used for auxiliary heating of the containing groove 10, and the heat on the evaporation boat decreases uniformly from the containing groove 10 to the outwardly extending connecting section 12.

[0033] In some embodiments, the cross-sectional area of the outwardly extending connecting section 12 increases in steps, the cross-sectional area is larger closer to the end, and correspondingly, the heat is smaller closer to the end, so that the temperature of the part of the evaporation boat far from the containing groove 10 is lower, the heat conducted to the external structure connected to the end of the connecting section 12 of the evaporation boat is reduced, and the external structure is protected from being damaged by heat.

[0034] On the other hand, as Figure 4 shown, the application also provides an evaporation device, which comprises any one of the above evaporation boats, a power supply mechanism 15 electrically connected to the two ends of the two connecting sections 12 of the evaporation boat, a movable shutter plate arranged above the evaporation boat, and a passivation furnace body for containing the material to be plated and the evaporation boat. The material to be plated in the passivation furnace body is arranged above the evaporation boat, and the evaporation material can be directly placed in the containing groove 10 and directly heated by the evaporation boat, so that the heating speed is fast, thereby improving the evaporation speed of the evaporation material. When evaporation is needed, the shutter plate at the upper part of the evaporation boat is moved to one side, the evaporation boat is opposite to the material to be plated, the power supply mechanism 15 supplies power to the evaporation boat to heat it, the evaporation material 100 placed in the containing groove 10 is heated to the boiling point, the evaporation material 100 is vaporized into a gas state, the gas state evaporation material 100 gathers and adsorbs to the plating surface of the material to be plated to form a passivation layer. When the evaporation is stopped, the shutter plate is moved to the upper part of the evaporation boat to block the evaporation material 100 after being heated and vaporized from moving to the battery piece.

[0035] In some embodiments, the evaporation device further comprises a crucible, the crucible is placed in the accommodating groove 10, the crucible is used for containing the to-be-evaporated substance 100, the outer wall and the bottom of the accommodating groove 10 provide heat to the crucible together, the to-be-evaporated substance 100 in the crucible is heated, and the auxiliary heating section 11 in communication with the inside of the accommodating groove 10 also provides heat to the crucible, on the one hand, the heat generated on the evaporation boat is fully utilized, and the heating efficiency of the evaporation boat is improved, and on the other hand, the temperature of the connecting section 12 connected with the external structure in the evaporation boat can be reduced, the external components connected with the evaporation boat are protected from thermal damage, and the service life is increased.

[0036] In some embodiments, the outer side of the two auxiliary heating sections 11 is further provided with a heat preservation cover 16, the top of the heat preservation cover 16 is provided with an opening consistent with the slot of the accommodating groove 10, the heat preservation cover 16 is provided with a gas feeding port 161 in communication with the opening, the gas feeding port 161 supplies hydrogen to the evaporation boat, the hydrogen directly contacts the outer wall of the evaporation boat and reacts with the evaporation boat made of special metal material, and the hydrogen is heated to be cracked into hydrogen atoms, the evaporation boat made of special metal material acts as a catalyst for hydrogen cracking, the hydrogen atoms after cracking can be combined with some dangling bonds on the surface of the battery piece, and a hydrogen passivation layer is formed on the surface of the battery piece, so that the passivation effect of the surface of the battery piece is further improved, and the stability of the surface of the battery piece is improved.

[0037] The principle and implementation mode of the specific examples in the utility model are described, and the above embodiment is only used for helping to understand the method and core idea of the utility model; meanwhile, for the general technical personnel in the field, according to the idea of the utility model, the specific implementation mode and application range will be changed. In conclusion, the content of the specification should not be understood as the limitation of the utility model.

Claims

1. An evaporation boat, characterized in that The application relates to an evaporation boat, which comprises: a containing groove (10), two ends of the containing groove (10) being connected with lead wires, the lead wires comprising an auxiliary heating section (11) connected with the containing groove (10) and arranged in a spaced ring outside the containing groove (10) and a connecting section (12) connected with the other end of the auxiliary heating section (11) and extending away from the containing groove.

2. The evaporation boat according to claim 1, characterized in that The containing groove (10) is provided with two or more containing grooves (10), and the two or more containing grooves (10) are connected through a connecting section (13).

3. The evaporation boat according to claim 2, characterized in that The cross-sectional area of the connecting section (13) is equal to or smaller than that of the containing groove (10).

4. The vaporization boat of claim 1, wherein The material of the evaporation boat is any one of tungsten, graphite, molybdenum, nickel and platinum.

5. The evaporation boat according to claim 1, characterized in that The connecting section (12) is connected with the containing groove (10) and / or the auxiliary heating section (11) through at least two branches (14), and the cross-sectional area of the branches (14) is smaller than that of the auxiliary heating section (11).

6. The vaporization boat of claim 1, wherein The cross-sectional area of the connecting section (12) increases step by step away from the containing groove.

7. An evaporation device, characterized by The application further relates to the evaporation boat as claimed in any one of claims 1-6, which further comprises an electrifying mechanism (15) electrically connected with two ends of the two connecting sections (12) of the evaporation boat, a movable shielding plate arranged above the evaporation boat and a passivation furnace body for containing materials to be plated.

8. The evaporation apparatus according to claim 7, wherein The application further relates to a crucible arranged in the containing groove (10), which is used for containing materials to be evaporated (100).

9. The evaporation apparatus according to claim 7, wherein The outer side of the auxiliary heating section (11) is further provided with a heat preservation cover (16), the top of the heat preservation cover (16) is provided with an opening consistent with the slot of the containing groove (10), the heat preservation cover (16) is provided with a gas feeding port (161) communicating with the opening, and the gas feeding port (161) is used for feeding hydrogen gas to the evaporation boat.

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