High-vacuum coating sample table

Abstract

The utility model discloses a high vacuum coating sample table, which relates to the field of vacuum coating equipment and comprises a lifting mechanism, the lifting mechanism comprises a top plate, a main shaft is connected onto the top plate in a sliding manner, a rotating mechanism is arranged at the upper end of the main shaft and comprises a rotating shaft, and a temperature control mechanism is arranged at the lower end of the rotating shaft and comprises a temperature guide table. A shielding mechanism is arranged on one side of the temperature guide table, a turnover mechanism is arranged on the temperature guide table and comprises a rotating ring, a connecting block is rotationally connected to one side of the rotating ring, a sample placement table is rotationally connected to the connecting block, a second gear is fixed to the other end of the sample placement table, and an arc-shaped rack is fixed to the bottom of the temperature guide table. The device has the beneficial effects that a shielding mechanism is used for limiting a rotating ring, a rotating mechanism drives a gear ring to rotate, the gear ring drives a sample placing table and a second gear to rotate, the second gear is meshed with an arc-shaped rack, the second gear drives the sample placing table to turn over, and therefore after the sample placing table is reset, a sample is turned over.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating equipment field especially, it is a kind of high vacuum coating sample stage. BACKGROUND

[0002] The film material is placed in vacuum, and is evaporated by heating it by evaporation source, and the evaporated atom or molecule escapes from the surface of evaporation source. Due to high vacuum atmosphere, the average free path of gas molecules in vacuum chamber is greater than the linear size of vacuum chamber, so the vapor molecules rarely collide with other molecules, reach the substrate surface in a straight line, and condense on the substrate surface by physical adsorption and chemical adsorption, forming a thin film. This is the basic principle of vacuum evaporation coating. The substrate temperature is one of the key factors affecting film quality. In order to obtain better film quality, a substrate heating device is usually configured in the evaporation chamber.

[0003] For example, the patent document with the announcement number CN218507894U discloses a vacuum coating sample stage and a vacuum coating equipment, which belong to the technical field of vacuum coating, and comprises a sample stage body, a main shaft, a top plate and a lifting mechanism. The sample stage body and the main shaft are connected, the main shaft and the top plate are connected, the top plate is provided with a lifting mechanism connected with the main shaft, and the lifting mechanism is used for driving the sample stage body to move up and down. A vacuum coating equipment comprises the vacuum coating sample stage. The utility model has the advantages that the sample stage can move vertically up and down, the height is adjustable, it can be freely stretched and contracted vertically up and down, the mask plate can be accurately and conveniently replaced, the thin film with various patterns can be coated, and it is convenient to clean. The height between the sample stage and the evaporation source is adjustable, which meets the differentiated coating needs of customers. In the prior art, the sample needs to be coated on both sides during vacuum coating, and the worker needs to take out the sample manually to turn it over, and then send it into the vacuum coating chamber. This operation is time-consuming and laborious, and the first coating may be adversely affected when the second coating is performed. Therefore, a sample stage capable of automatically turning over the sample in the vacuum coating chamber is needed. SUMMARY

[0004] The utility model discloses a high vacuum coating sample stage to solve the above -mentioned problem.

[0005] The utility model discloses the following technical scheme to realize the above-mentioned purpose:

[0006] The utility model provides a high vacuum coating sample stage, including lifting mechanism, lifting mechanism includes the top plate, the main shaft is sealed and is connected with the top plate on the sliding, the main shaft upper end is provided with rotating mechanism, rotating mechanism includes the rotary shaft that rotates in the main shaft, rotary shaft lower end is provided with temperature control mechanism, temperature control mechanism includes the temperature guide platform that fixes connection in the rotary shaft bottom, the side of temperature guide platform is provided with shielding mechanism, shielding mechanism includes with the support shaft of top plate rotation connection, temperature guide platform top is provided with turnover mechanism, turnover mechanism includes the rotary ring, rotary ring one side bottom rotation connection has the connecting block, the sample placement platform is rotationally connected on the connecting block, the other end of sample placement platform is fixedly connected with second gear, the bottom of temperature guide platform is fixedly connected with arc gear rack, arc gear rack can be engaged with second gear.

[0007] Preferably, the rotary ring is rotatably connected to the upper end of the temperature guide platform, the rotary ring is fixedly connected to a limiting block on the side close to the support shaft, the limiting block can be in contact with the support shaft for limiting, the top of the connecting block is fixedly connected to a first gear, the lower end of the temperature guide platform is fixedly connected to a gear ring, and the gear ring is engaged with the first gear.

[0008] Preferably, the top plate is fixedly connected to the top of the vacuum coating chamber, a plurality of guide columns are fixedly connected to the top of the top plate, a lifting plate is slidably connected to the guide columns, the lifting plate is fixedly connected to the main shaft, a lifting support is arranged on one side of the lifting plate, the lifting support is fixedly connected to the top plate, a screw rod is rotatably connected to the lifting support, a lifting motor is fixedly connected to the top of the lifting support, the output end of the lifting motor is fixedly connected to the screw rod, and the screw rod is threadedly connected to the lifting plate.

[0009] Preferably, a pulley support is fixedly connected to the lifting plate, a first pulley is rotatably connected to the pulley support, a rotating motor is fixedly connected to the top of the pulley support, the output end of the rotating motor is fixedly connected to the first pulley, a second pulley is fixedly connected to the upper end of the rotary shaft, and the first pulley and the second pulley are connected through a synchronous belt.

[0010] Preferably, a sample baffle is fixedly connected to the bottom of the support shaft, the sample baffle can be rotated to below the sample placement platform, a turnover shaft is fixedly connected to the top of the support shaft, a guide groove is arranged on the turnover shaft, and the guide groove is slidably connected to the lifting plate. O

[0011] Preferably, a heat medium inlet pipe is fixedly connected to the top of the temperature guide platform, the heat medium inlet pipe is fixedly connected to the rotary shaft, the heat medium inlet pipe is connected with a heat exchange medium source, a heat medium outlet pipe is fixedly connected to the top of the temperature guide platform, the heat medium outlet pipe is fixedly connected to the rotary shaft, and the rotary shaft is connected with a heat exchange medium recovery mechanism.

[0012] ​The beneficial effect lies in: through the setting of the overturning mechanism, the rotating ring is limited by the lifting mechanism, then the gear ring is driven to rotate by the rotating mechanism, the connecting block is driven to rotate by the gear ring, the connecting block drives the sample placing table to rotate, in the rotating process of the connecting block, the second gear is engaged with the arc-shaped gear rack, the sample placing table is overturned by the second gear, so that the sample is overturned after the sample placing table rotates back to the original position, the overturning mechanism has the advantages of simple structure and high overturning sample efficiency, and the two-side coating speed of the sample is improved.

[0013] The additional technical features and advantages of the utility model will be more obvious in the following description, or can be understood through the specific practice of the utility model. BRIEF DESCRIPTION OF DRAWINGS

[0014] The drawings are used to provide further understanding of the utility model, and constitute a part of the specification, and are used together with the following specific embodiments to explain the utility model, but do not constitute the limitation to the utility model.In the drawings:

[0015] Figure 1 It is the perspective view of the high vacuum coating sample table described in the utility model;

[0016] Figure 2 It is the front view of the high vacuum coating sample table described in the utility model;

[0017] Figure 3 It is the rear side sectional view of the high vacuum coating sample table described in the utility model;

[0018] Figure 4 It is the structure schematic view of the lifting mechanism of the high vacuum coating sample table described in the utility model;

[0019] Figure 5 It is the mechanism schematic view of the rotating mechanism of the high vacuum coating sample table described in the utility model;

[0020] Figure 6 It is the relative position schematic view of the shielding mechanism and temperature control mechanism of the high vacuum coating sample table described in the utility model;

[0021] Figure 7 It is the structure schematic view of the overturning mechanism of the high vacuum coating sample table described in the utility model;

[0022] Figure 8 It is the relative position schematic view of the sample placing table and rotating block of the high vacuum coating sample table described in the utility model.

[0023] The reference signs are explained as follows:

[0024] 101, top plate; 102, guide column; 103, lifting plate; 104, lifting support; 105, lifting motor; 106, screw rod; 107, main shaft; 201, sample baffle; 202, support shaft; 203, turnover shaft; 204, guide groove; 301, temperature guide table; 302, heat medium inlet pipe; 303, heat medium outlet pipe; 401, pulley support; 402, rotating motor; 403, first pulley; 404, second pulley; 405, rotating shaft; 501, rotating ring; 502, limiting block; 503, first gear; 504, gear ring; 505, connecting block; 506, second gear; 507, arc-shaped rack; 508, sample placing table. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application.

[0026] In the description of the present application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship shown in the drawings, and are only used to facilitate the description of the present application and simplify the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0027] The present application will be further described below with reference to the drawings:

[0028] As Figures 1-8As shown, a high vacuum coating sample stage, including lifting mechanism, lifting mechanism includes the top plate 101, the top plate 101 is sealed slidingly connected with the main shaft 107, the main shaft 107 upper end is provided with rotating mechanism, rotating mechanism includes the rotating shaft 405 which is rotatably connected in the main shaft 107, the rotating shaft 405 lower end is provided with temperature control mechanism, temperature control mechanism includes the temperature guide table 301 which is fixedly connected at the bottom of the rotating shaft 405, the temperature guide table 301 one side is provided with shielding mechanism, shielding mechanism includes the support shaft 202 which is rotatably connected with the top plate 101, the temperature guide table 301 is provided with turnover mechanism, turnover mechanism includes the rotating ring 501, the rotating ring 501 one side bottom rotatably connected with the connecting block 505, the connecting block 505 rotatably connected with the sample placing table 508, the sample placing table 508 and the connecting block 505 between a certain damping, the sample placing table 508 other end is fixedly connected with the second gear 506, the temperature guide table 301 bottom is fixedly connected with the arc gear rack 507, the arc gear rack 507 can be engaged with the second gear 506, the rotating ring 501 and the temperature guide table 301 upper end rotatably connected, the rotating ring 501 and the temperature guide table 301 between a certain damping, the rotating ring 501 close to the support shaft 202 one side is fixedly connected with the limit block 502, the limit block 502 can be in contact with the support shaft 202 limit, the connecting block 505 top is fixedly connected with the first gear 503, the temperature guide table 301 lower end is fixedly connected with the gear ring 504, the gear ring 504 and the first gear 503 meshing, when the sample needs to be turned over, control the lifting mechanism to drive the rotating ring 501 lifting, rotating mechanism drives the rotating ring 501 rotation, the rotating ring 501 drives the limit block 502 movement and cooperates with the support shaft 202 limit, at this time the rotating ring 501 is in a stationary state, the temperature guide table 301 rotation drives the gear ring 504 rotation, the gear ring 504 drives the first gear 503 rotation, the first gear 503 drives the connecting block 505 rotation, the connecting block 505 drives the second gear 506 and the sample placing table 508 rotation, when the second gear 506 rotates to the temperature guide table 301 below begins to mesh with the arc gear rack 507, the arc gear rack 507 drives the second gear 506 rotation 180o, the second gear 506 drives the sample placing table 508 overturn 180o, the connecting block 505 continues to rotate drives the sample placing table 508 re-rotation to the temperature guide table 301 below, so the sample is turned over.

[0029] The top plate 101 is fixedly connected at the top of the vacuum coating chamber, a plurality of guide columns 102 are fixedly connected at the top of the top plate 101, a lifting plate 103 is slidably connected on the guide columns 102, the lifting plate 103 is fixedly connected with a main shaft 107, a lifting support 104 is arranged on one side of the lifting plate 103, the lifting support 104 is fixedly connected with the top plate 101, a screw rod 106 is rotatably connected on the lifting support 104, a lifting motor 105 is fixedly connected at the top of the lifting support 104, the output end of the lifting motor 105 is fixedly connected with the screw rod 106, the screw rod 106 is threadedly connected with the lifting plate 103, the lifting motor 105 drives the screw rod 106 to rotate, the screw rod 106 drives the lifting plate 103 to lift, the lifting plate 103 drives the main shaft 107 to lift, and the guide columns 102 ensure that the lifting plate 103 will not be displaced during lifting.

[0030] A belt wheel support 401 is fixedly connected on the lifting plate 103, a first belt wheel 403 is rotatably connected on the belt wheel support 401, a rotating motor 402 is fixedly connected at the top of the belt wheel support 401, the output end of the rotating motor 402 is fixedly connected with the first belt wheel 403, a second belt wheel 404 is fixedly connected on the upper end of a rotating shaft 405, the first belt wheel 403 and the second belt wheel 404 are connected through a synchronous belt, the rotating motor 402 drives the first belt wheel 403 to rotate, the first belt wheel 403 drives the second belt wheel 404 to rotate through the synchronous belt, and the second belt wheel 404 drives the rotating shaft 405 to rotate.

[0031] The sample baffle 201 is fixedly connected at the bottom of the support shaft 202, the sample baffle 201 can be rotated to below the sample placing table 508, the sample baffle 201 can completely shield the sample placing table 508, the turnover shaft 203 is fixedly connected at the top of the support shaft 202, the guide groove 204 is arranged on the turnover shaft 203, the upper end of the guide groove 204 is spirally turned by 180 O degrees, the guide groove 204 is slidably connected with the lifting plate 103, during the descending process of the lifting plate 103, the lifting plate 103 drives the turnover shaft 203 to rotate through the guide groove 204, the turnover shaft 203 drives the support shaft 202 to rotate, the support shaft 202 drives the sample baffle 201 to rotate, so that the sample baffle 201 cannot shield the sample placing table 508 any more, and the shielding mechanism ensures that impurities generated when the vacuum coating is just started will not adhere to the sample.

[0032] The top of the temperature guide table 301 is fixedly connected with a heat medium inlet pipe 302, the heat medium inlet pipe 302 is fixedly connected with a rotating shaft 405, the heat medium inlet pipe 302 is connected with a heat exchange medium source, the top of the temperature guide table 301 is fixedly connected with a heat medium outlet pipe 303, the heat medium outlet pipe 303 is fixedly connected with the rotating shaft 405, the rotating shaft 405 is connected with a heat exchange medium recovery mechanism, the heat exchange medium enters the temperature guide table 301 through the heat medium inlet pipe 302, the temperature guide table 301 generates temperature to conduct the temperature of the sample, the heat exchange medium after conducting the temperature leaves the sample table through the heat medium outlet pipe 303 and enters the heat exchange medium recovery mechanism, the heat exchange medium can be high-temperature medium to raise the temperature of the sample or low-temperature medium to cool the sample.

[0033] Working principle: the lifting motor 105 drives the screw rod 106 to rotate, the screw rod 106 drives the lifting plate 103 to lift, the lifting plate 103 drives the main shaft 107 to lift, the setting of the guide column 102 ensures that the lifting plate 103 will not produce displacement deviation in the lifting process, in the lifting process of the lifting plate 103, the lifting plate 103 drives the turnover shaft 203 to rotate through the guide groove 204, the turnover shaft 203 drives the supporting shaft 202 to rotate, the supporting shaft 202 drives the sample baffle 201 to rotate, so that the sample baffle 201 cannot shield the sample placing table 508 again, the heat exchange medium enters the temperature guide table 301 through the heat medium inlet pipe 302, the temperature guide table 301 generates temperature to conduct the temperature of the sample, the heat exchange medium after conducting the temperature leaves the sample table through the heat medium outlet pipe 303 and enters the heat exchange medium recovery mechanism, the heat exchange medium can be high-temperature medium to raise the temperature of the sample or low-temperature medium to cool the sample, the rotating motor 402 drives the first pulley 403 to rotate, the first pulley 403 drives the second pulley 404 to rotate through the synchronous belt, the second pulley 404 drives the rotating shaft 405 to rotate, the rotating shaft 405 drives the temperature guide table 301 to rotate, when the sample needs to be turned over, the lifting mechanism drives the rotating ring 501 to lift, the rotating mechanism drives the rotating ring 501 to rotate, the rotating ring 501 drives the limiting block 502 to move and cooperate with the limiting of the supporting shaft 202, at this time, the rotating ring 501 is in a stationary state, the temperature guide table 301 drives the gear ring 504 to rotate, the gear ring 504 drives the first gear 503 to rotate, the first gear 503 drives the connecting block 505 to rotate, the connecting block 505 drives the second gear 506 and the sample placing table 508 to rotate, when the second gear 506 rotates to below the temperature guide table 301 and begins to mesh with the arc-shaped rack 507, the arc-shaped rack 507 drives the second gear 506 to rotate by 180°, the second gear 506 drives the sample placing table 508 to turn over by 180°, the connecting block 505 continues to rotate and drives the sample placing table 508 to rotate again below the temperature guide table 301, so that the turning over of the sample is completed.

[0034] The basic principle, main features and advantages of the present application are shown and described above. Those skilled in the art should understand that the present application is not limited by the above examples, and the above examples and descriptions in the specification are only to illustrate the principles of the present application. Without departing from the spirit and scope of the present application, various changes and improvements can be made to the present application, and these changes and improvements all fall within the scope of the claimed present application.

Claims

1. A high vacuum coating sample stage comprising a lifting mechanism, characterized in that: The lifting mechanism includes a top plate (101), a main shaft (107) is sealingly and slidably connected to the top plate (101), a rotating mechanism is arranged at the upper end of the main shaft (107), the rotating mechanism includes a rotating shaft (405) rotatably connected in the main shaft (107), a temperature control mechanism is arranged at the lower end of the rotating shaft (405), the temperature control mechanism includes a temperature guide table (301) fixedly connected to the bottom of the rotating shaft (405), a shielding mechanism is arranged on one side of the temperature guide table (301), the shielding mechanism includes a support shaft (202) rotatably connected to the top plate (101), a turnover mechanism is arranged on the temperature guide table (301), the turnover mechanism includes a rotating ring (501), a connecting block (505) is rotatably connected to the bottom of one side of the rotating ring (501), a sample placing table (508) is rotatably connected to the connecting block (505), a second gear (506) is fixedly connected to the other end of the sample placing table (508), an arc-shaped gear rack (507) is fixedly connected to the bottom of the temperature guide table (301), and the arc-shaped gear rack (507) is capable of meshing with the second gear (506).

2. The high vacuum coating sample stage according to claim 1, characterized in that: The rotating ring (501) is rotatably connected to the upper end of the temperature guide table (301), a limiting block (502) is fixedly connected to the side of the rotating ring (501) close to the support shaft (202), the limiting block (502) is capable of being in contact with the support shaft (202) for limiting, a first gear (503) is fixedly connected to the top of the connecting block (505), a gear ring (504) is fixedly connected to the lower end of the temperature guide table (301), and the gear ring (504) is meshed with the first gear (503).

3. The high vacuum coating sample stage according to claim 1, characterized in that: The top plate (101) is fixedly connected to the top of a vacuum coating chamber, a plurality of guide columns (102) are fixedly connected to the top of the top plate (101), a lifting plate (103) is slidably connected to the guide columns (102), the lifting plate (103) is fixedly connected with the main shaft (107), a lifting support (104) is arranged on one side of the lifting plate (103), the lifting support (104) is fixedly connected with the top plate (101), a screw rod (106) is rotatably connected to the lifting support (104), a lifting motor (105) is fixedly connected to the top of the lifting support (104), the output end of the lifting motor (105) is fixedly connected with the screw rod (106), and the screw rod (106) is threadedly connected with the lifting plate (103).

4. The high vacuum coating sample stage according to claim 3, characterized in that: A belt wheel support (401) is fixedly connected to the lifting plate (103), a first belt wheel (403) is rotatably connected to the belt wheel support (401), a rotating motor (402) is fixedly connected to the top of the belt wheel support (401), the output end of the rotating motor (402) is fixedly connected with the first belt wheel (403), a second belt wheel (404) is fixedly connected to the upper end of the rotating shaft (405), and the first belt wheel (403) and the second belt wheel (404) are connected through a synchronous belt.

5. The high vacuum coating sample stage according to claim 3, characterized in that: The support shaft (202) bottom fixedly connected with sample baffle (201), the sample baffle (201) can be rotated to the sample placement table (508) below, the support shaft (202) top fixedly connected with turnover shaft (203), the turnover shaft (203) is provided with guide slot (204), the guide slot (204) upper end spiral direction 180 o, the guide slot (204) and the lifting plate (103) slidingly connected.

6. The high vacuum coating sample holder according to claim 1, characterized in that: The top of the temperature guide table (301) is fixedly connected with a heat medium inlet pipe (302), the heat medium inlet pipe (302) is fixedly connected with the rotating shaft (405), the heat medium inlet pipe (302) is connected with a heat exchange medium source, the top of the temperature guide table (301) is fixedly connected with a heat medium outlet pipe (303), the heat medium outlet pipe (303) is fixedly connected with the rotating shaft (405), and the rotating shaft (405) is connected with a heat exchange medium recovery mechanism.

Images