Self-locking electrically-driven low-noise vacuum valve

Abstract

The utility model relates to the technical field of vacuum valves, and provides a self-locking electrically-driven low-noise vacuum valve which comprises a valve body and a valve element, the valve element linearly slides in the valve body through a driving assembly, and the valve element comprises a connecting plate and valve plates connected to the two ends of the connecting plate through elastic pieces respectively. A ball used for changing the distance between the connecting plate and the valve plate is arranged on the connecting plate, a round nest groove is formed in the valve plate and comprises an arc groove in the center and a plane groove in the periphery of the arc groove, and the outer edge of the plane groove and the inner plane of the valve plate are in fillet transition to limit movement of the ball. Through the arrangement of the arc groove and the plane groove, when the valve is closed, the ball stays on the plane groove, self-locking of the valve element is achieved, leakage of fluid at a valve port is avoided, the vacuum degree of a system is ensured, and the reliability and safety of the valve are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum valve technical field, specifically, relate to a kind of electric drive low-noise vacuum valve of self-locking. BACKGROUND

[0002] Vacuum valve is a key element used in vacuum system, the main function is to change airflow direction, regulate air flow and cut off or connect pipeline. In recent years, the demand of traditional vacuum industry for vacuum valve gradually weakens, while new energy and semiconductor field in domestic shows broad market potential, and the requirement of vacuum valve is increasing.

[0003] In traditional vacuum field, electric vacuum valve generally exists the problem of big noise when opening and closing valve during operation, especially the noise when opening valve is particularly significant. In actual application, when valve is in flat state, valve core will be offset downward due to gravity, causing the asymmetry of valve core structure. This asymmetry may cause excessive contact between sealing ring on valve core and shell flange sealing surface during valve core movement, causing sealing ring wear and increasing noise. At the same time, motor-driven vacuum valve in prior art lacks mechanical self-locking function, and valve core cannot be stably locked in closed position, once power is off, valve core may be slightly displaced, and then valve port fluid leakage or system vacuum degree change is caused. These problems seriously affect the performance and service life of electric vacuum valve. SUMMARY

[0004] The utility model aims at providing a kind of electric drive low-noise vacuum valve of self-locking, solve the problem that existing vacuum valve opens and closes valve noise and lacks self-locking function.

[0005] The utility model realizes the following technical scheme: a kind of electric drive low-noise vacuum valve of self-locking, including valve body and valve core, valve core is linearly slid in valve body interior by driving assembly, valve core includes connecting plate and the valve plate respectively connected to the both ends of connecting plate by elastic member, connecting plate is equipped with ball for changing the distance between connecting plate and valve plate, valve plate is equipped with round nest groove, round nest groove includes the circular arc groove of center position and the plane groove of circular arc groove outer periphery, plane groove outer edge and valve plate inner plane fillet transition are used to limit the movement of ball, when valve core is in closed position, ball is located on plane groove.

[0006] Further, buffer cylinder is provided on connecting plate, buffer cylinder both ends extend out of connecting plate with same length, when ball slides to the bottom of circular arc groove, buffer cylinder both ends are just respectively abutted with both ends of valve plate.

[0007] Further, buffer cylinder is made of engineering plastic material.

[0008] Further, the driving assembly comprises a motor, a first connecting rod and a second connecting rod, the first connecting rod is connected with an output shaft of the motor, one end of the second connecting rod is hinged with the first connecting rod, and the other end of the second connecting rod is hinged with the connecting plate, and the first connecting rod and the second connecting rod are just in the same straight line when the valve core is in the valve closing position.

[0009] Further, the connecting plate is connected with the ball through a sleeve, the sleeve is fixed on the connecting plate, two balls are limited in the sleeve, and the two balls are respectively abutted against the valve plates at two ends.

[0010] Further, a supporting ring abutting against the balls is arranged between the two balls on the inner wall of the sleeve.

[0011] Further, first pulleys slidingly connected with the inner side walls of the valve body are arranged on the two sides of the connecting plate, and second pulleys slidingly connected with the inner end walls of the valve body are arranged on the two sides of the connecting plate.

[0012] Further, the radius of the round corner is the same as the radius of the ball.

[0013] The utility model has at least the following advantages and beneficial effects:

[0014] (1) through the setting of the circular arc groove and the plane groove, the ball stays on the plane groove when the valve is closed, the valve core is self-locked, the leakage of the valve port fluid is avoided, the vacuum degree of the system is ensured, and the reliability and safety of the valve are improved.

[0015] (2) through the setting of the first connecting rod and the second connecting rod, the first connecting rod and the second connecting rod are in the same straight line when the valve is closed, the driving assembly is self-locked, and the stability of the vacuum system is ensured.

[0016] (3) through the setting of the buffer cylinder on the connecting plate, the buffer cylinder plays a buffering role at the moment when the ball falls into the bottom of the circular arc groove, the wear condition of the ball at the circular arc groove is alleviated, the generation of vibration and noise is reduced, and the service life of the ball is prolonged.

[0017] (4) through the setting of the supporting ring abutting against the two balls on the inner wall of the sleeve, no matter what the placing mode of the valve is, the supporting ring always provides a vertical upward supporting force to the balls at two ends, the balls and the valve plates at two ends relative to the connecting plate will be in the centered position, noise is reduced, the stability of the ball is enhanced, and the service life of the valve is prolonged. BRIEF DESCRIPTION OF DRAWINGS

[0018] Figure 1 A structure schematic diagram of the electrically-driven low-noise vacuum valve capable of self-locking is provided.

[0019] Figure 2 An internal structure schematic diagram of the electrically-driven low-noise vacuum valve capable of self-locking in the open valve state is provided.

[0020] Figure 3 The utility model provides a kind of internal structure schematic diagram of electric drive low-noise vacuum valve valve closing state of self-locking.

[0021] Figure 4 The utility model provides a kind of structure schematic diagram of valve core in electric drive low-noise vacuum valve of self-locking.

[0022] Figure 5 The utility model provides Figure 4 Valve core cross-sectional view in A-A direction opening valve state.

[0023] Figure 6 The utility model provides Figure 4 Valve core cross-sectional view in A-A direction closing valve state.

[0024] Figure 7 The utility model provides Figure 4 Valve core cross-sectional view in B-B direction opening valve state.

[0025] Figure 8 The utility model provides Figure 4 Valve core cross-sectional view in B-B direction closing valve state.

[0026] Figure 9 The utility model provides Figure 7 Local enlarged view in C.

[0027] Figure 10 The utility model provides Figure 7 Local enlarged view in D.

[0028] Reference numeral: 1-valve body, 2-valve core, 21-connection plate, 22-valve plate, 221-sealing plate, 222-supporting plate, 223-sealing ring, 23-elastic member, 24-buffer cylinder, 25-first pulley, 26-second pulley, 3-sleeve, 30-supporting ring, 31-rolling ball, 4-round nest groove, 41-circular arc groove, 42-flat groove, 43-round angle, 5-driving assembly, 51-motor, 52-first connecting rod, 53-second connecting rod. Specific embodiment

[0029] The specific embodiment in conjunction with the accompanying drawings.

[0030] Embodiment

[0031] As Figures 1 to 10As shown, this embodiment mainly discloses a self-locking electrically driven low-noise vacuum valve, including a valve body 1 and a valve core 2. The valve core 2 slides linearly inside the valve body 1 via a drive assembly 5. The valve core 2 includes a connecting plate 21 and valve plates 22 connected to both ends of the connecting plate 21 via elastic members 23. The connecting plate 21 is provided with balls 31 for changing the distance between the connecting plate 21 and the valve plates 22. The valve plates 22 are provided with circular grooves 4, including an arc groove 41 at the center and a flat groove 42 on the outer periphery of the arc groove 41. The outer edge of the flat groove 42 transitions to the inner plane of the valve plate 22 with a rounded corner 43 to restrict the movement of the balls 31. When the valve core 2 is in the closed position, the balls 31 are located on the flat groove 42. Specifically, the valve plates 22 at both ends of the connecting plate 21 can be functionally divided into a sealing plate 221 that acts as a seal towards the fluid source end and a support plate 222 that acts as a compression seal away from the fluid source end. A sealing ring 223 is provided on the sealing plate 221. The valve core 2 slides linearly within the valve body 1 under the drive of the drive assembly 5, thus opening and closing the valve. When the valve is open, the ball bearing 31 is located in the arc groove 41 at the center of the circular recess 4. At this time, the distance between the valve plate 22 and the connecting plate 21 is minimal, and the distance between the two valve plates 22 is less than the width of the inner wall of the valve body 1, which facilitates opening the valve. During the valve closing process, the valve core 2 moves synchronously, with the valve plate 22 reaching its position first. Under the action of the drive assembly 5, the connecting plate 21 continues to move a certain distance. At this time, the valve plate 22 and the connecting plate 21 move relative to each other, and the ball bearing 31 slides out of the arc groove. 41. The valve plates 22 at both ends are opened, so that the sealing rings 223 on the valve plates 22 are tightly abutted against the flanges on the valve body 1, achieving valve closure sealing. Due to the constraints of the valve body 1 and the rounded corners 43, the ball 31 finally stops on the flat groove 42. The force between the sealing rings 223 and the flange is exactly parallel to the force on the ball 31, with no torque, achieving the self-locking purpose of the valve core 2. Even in the event of power failure, the valve core 2 will not shift, avoiding leakage of fluid at the valve port, ensuring the vacuum degree of the system, and improving the reliability and safety of the valve.

[0032] Furthermore, in specific implementation, such as Figures 5 to 8 As shown, the connecting plate 21 provided in this embodiment of the present invention is provided with a buffer cylinder 24. The two ends of the buffer cylinder 24 extend out of the connecting plate 21 by the same length. When the ball 31 slides to the bottom of the arc groove 41, the two ends of the buffer cylinder 24 just abut against the valve plates 22 at both ends. Specifically, the buffer cylinder 24 is detachably connected to the connecting plate 21 by bolts. During the valve opening process, the drive assembly 5 first drives the connecting plate 21 to move, so that the ball 31 falls into the arc groove 41. At this time, under the action of the elastic restoring force of the elastic element 23 (spring sheet), the valve plates 22 at both ends move closer to each other. The buffer cylinder 24 abuts against the valve plates 22 at both ends at the moment the ball 31 falls into the bottom of the arc groove 41, playing a buffering role, alleviating the wear of the ball 31 at the arc groove 41, reducing the generation of vibration and noise, and extending the service life of the ball 31.

[0033] Preferably, the buffer cylinder 24 is made of engineering plastic material, which has excellent wear resistance and corrosion resistance, and the engineering plastic has moderate elastic modulus, which can effectively absorb impact energy, reduce noise and vibration, and the light weight of the engineering plastic can reduce the weight of the whole valve, facilitating installation and maintenance.

[0034] Further, in specific implementation, as shown in Figure 2 , Figure 3 the above-mentioned driving assembly 5 provided by the embodiment of the utility model includes a motor 51, a first connecting rod 52 and a second connecting rod 53, the first connecting rod 52 is connected with the output shaft of the motor 51, one end of the second connecting rod 53 is hinged with the first connecting rod 52, the other end of the second connecting rod 53 is hinged with the connecting plate 21, when the valve core 2 is in the valve closing position, the first connecting rod 52 and the second connecting rod 53 are just in the same straight line. Specifically, the first connecting rod 52 makes circular arc motion under the drive of the motor 51, when the valve is just closed, the connecting plate 21 is in the limit position, at this time, the first connecting rod 52 and the second connecting rod 53 are in the same straight line, the force of the motor 51 to the first connecting rod 52 and the second connecting rod 53 is in the same straight line, the driving assembly 5 has no torque, the purpose of self-locking of the driving assembly 5 is achieved, even in the case of power failure of the motor 51, the first connecting rod 52 and the second connecting rod 53 will not have a slight displacement, avoiding fluid leakage when the valve is closed, and ensuring the system vacuum degree.

[0035] Further, in specific implementation, as shown in Figure 1 the above-mentioned connecting plate 21 is connected with the ball 31 through the sleeve 3, the sleeve 3 is fixed on the connecting plate 21, two balls 31 are limited in the sleeve 3, and the two balls 31 respectively abut against the valve plates 22 at both ends. The stable movement of the ball 31 is ensured, and the ball 31 is prevented from falling off or being stuck in the movement process. The two balls 31 respectively abut against the valve plates 22 at both ends, so that the valve core 2 is uniformly stressed in the movement process, and the wear and noise are reduced.

[0036] Preferably, as shown in Figure 10As shown, a support ring 30 is provided on the inner wall of the sleeve 3 between the two balls 31, abutting against the balls 31. In existing applications, when the valve is in a horizontal position, the balls 31 and the valve plates 22 at both ends will shift downwards due to gravity, causing relative displacement between the three relative to the connecting plate 21, thus leading to asymmetry in the valve core 2 structure. The support ring 30 ensures that, regardless of the valve's placement, it always provides a vertically upward support force to the balls 31 at both ends along the contact surface. Simultaneously, under the clamping force of the elastic element 23, the balls 31 and the valve plates 22 at both ends will be aligned relative to the connecting plate 21. During valve operation, the sleeve 3 does not collide with the contact point of the valve plate 22, thereby reducing noise and minimizing potential contact wear between the sealing ring 223 and the flange sealing surface during movement. This enhances the stability of the balls 31 and extends the valve's service life.

[0037] Furthermore, in specific implementation, such as Figure 4 As shown, in this embodiment of the invention, the connecting plate 21 is provided with first pulleys 25 on both sides, which are slidably connected to the inner wall of the valve body 1, and the connecting plate 21 is provided with second pulleys 26 on both sides, which are slidably connected to the inner end wall of the valve body 1. Using multiple pulleys that roll directly inside the housing helps reduce friction inside the valve body 1, thereby reducing resistance during the movement of the valve core 2, making the movement of the valve core 2 smoother, reducing the load on the motor 51, and improving the system's energy efficiency and response speed.

[0038] Furthermore, in specific implementations, the radius of the fillet 43 provided in this embodiment of the invention is the same as the radius of the ball 31. This ensures close contact between the ball 31 and the edge of the planar groove 42, avoiding jamming or jumping caused by radius mismatch, thereby enhancing the self-locking effect.

Claims

1. A self-locking electrically driven low-noise vacuum valve, comprising a valve body (1) and a valve core (2), the valve core (2) linearly sliding inside the valve body (1) through a driving assembly (5), the valve core (2) comprising a connecting plate (21) and valve plates (22) connected to both ends of the connecting plate (21) through elastic members (23), the connecting plate (21) being provided with balls (31) for changing the distance between the connecting plate (21) and the valve plates (22), characterized in that, The valve plate (22) is provided with a circular groove (4), which includes a circular arc groove (41) at the center position and a flat groove (42) at the outer periphery of the circular arc groove (41), and the outer edge of the flat groove (42) is connected to the inner flat surface of the valve plate (22) through a fillet (43) for limiting the movement of the ball (31), and when the valve core (2) is in the closed valve position, the ball (31) is located on the flat groove (42).

2. The electrically actuated low noise vacuum valve capable of self-locking according to claim 1, characterized in that, The connecting plate (21) is provided with a buffer cylinder (24), and the buffer cylinder (24) extends out of the connecting plate (21) by the same length at both ends, and when the ball (31) slides to the bottom of the circular arc groove (41), the buffer cylinder (24) is in contact with the valve plate (22) at both ends.

3. The electrically actuated low noise vacuum valve capable of self locking according to claim 2, characterized in that, The buffer cylinder (24) is made of engineering plastic material.

4. The electrically actuated low noise vacuum valve capable of self locking according to claim 1, wherein, The driving assembly (5) includes a motor (51), a first connecting rod (52) and a second connecting rod (53), the first connecting rod (52) is connected with the output shaft of the motor (51), one end of the second connecting rod (53) is hinged with the first connecting rod (52), and the other end of the second connecting rod (53) is hinged with the connecting plate (21), and when the valve core (2) is in the closed valve position, the first connecting rod (52) and the second connecting rod (53) are in the same straight line.

5. The electrically actuated low noise vacuum valve capable of self-locking according to claim 1, wherein, The connecting plate (21) is connected with the ball (31) through a sleeve (3), the sleeve (3) is fixed on the connecting plate (21), and two balls (31) are limited in the sleeve (3), and the two balls (31) are in contact with the valve plate (22) at both ends.

6. The electrically actuated low noise vacuum valve capable of self-locking according to claim 5, characterized in that, The inner wall of the sleeve (3) is provided with a support ring (30) in contact with the ball (31) between the two balls (31).

7. The electrically actuated low noise vacuum valve capable of self locking according to claim 1, wherein, The connecting plate (21) is provided with a first pulley (25) on both sides, which is in sliding connection with the inner side wall of the valve body (1), and a second pulley (26) is arranged on both sides of the connecting plate (21), which is in sliding connection with the inner end wall of the valve body (1).

8. The electrically actuated low noise vacuum valve capable of self locking according to claim 1, wherein, The radius of the fillet (43) is the same as the radius of the ball (31).

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