Ceramic substrate measuring device

Abstract

The utility model discloses a ceramic substrate measuring device, which relates to the technical field of single-layer chip ceramic dielectric capacitor production, and comprises a workbench, a shield, an air supply filtering mechanism, an X-direction movement mechanism, a tray, a Y-direction movement mechanism, a measuring mechanism and a controller, the shield is arranged at the upper part of the workbench, the X-direction movement mechanism is used for driving the tray to move along the X direction, and the Y-direction movement mechanism is used for driving the tray to move along the Y direction. The tray is used for placing a to-be-measured product or a calibration block, the Y-direction movement mechanism is used for driving the measuring mechanism to move in the Y direction, the measuring mechanism comprises a mounting frame, a lifting assembly and a first laser displacement sensor, the lifting assembly can drive the first laser displacement sensor to move up and down, and the first laser displacement sensor can be located above the tray; an opening is formed in one side of the protective cover, the tray can penetrate through the opening to extend to the outside, a mounting opening is formed in the protective cover, and an air supply filtering mechanism is arranged at the mounting opening. The device can prevent the product from bumping, scratching and subfissure, and can ensure the high precision of measurement.

Description

TECHNICAL FIELD

[0001] The utility model relates to single layer chip porcelain dielectric capacitor production technical field, especially a kind of ceramic substrate measuring device. BACKGROUND

[0002] Single layer chip porcelain dielectric capacitor surface adopts gold electrode, and it is suitable for gold wire, gold ribbon and other micro-assembly process, and single layer chip porcelain dielectric capacitor is small in size, high in precision, solid in structure and stable in performance, which can be applied to electronic equipment such as aerospace, aviation, radar and microwave communication.

[0003] In the production process of single layer chip porcelain dielectric capacitor, the ceramic substrate needs to be ground, and the thickness of the ceramic substrate needs to be measured after grinding. At present, most of the measuring instruments on the market are contact type measuring instruments, such as micrometer. It is found that contact measurement can cause scratches and hidden cracks on the product, resulting in quality problems. At the same time, the wear of the contact point can cause measurement problems. UTILITY MODEL CONTENT

[0004] To solve the above technical problems, the utility model provides a ceramic substrate measuring device, which can prevent the product from being scratched and cracked, and can ensure high precision of measurement.

[0005] To achieve the above purpose, the utility model provides the following scheme:

[0006] The utility model provides a ceramic substrate measuring device, which comprises a workbench, a shield, a air supply filtering mechanism, an X direction movement mechanism, a tray, a Y direction movement mechanism, a measuring mechanism and a controller. The shield is arranged on the upper part of the workbench. The X direction movement mechanism is arranged on the workbench and located in the shield. The X direction movement mechanism is used to drive the tray to move along the X direction. The tray is used to place the product to be measured or the calibration block. The Y direction movement mechanism is arranged on the workbench and located in the shield. The Y direction movement mechanism is used to drive the measuring mechanism to move along the Y direction. The measuring mechanism comprises a mounting frame, a lifting assembly and a first laser displacement sensor. The lifting assembly is arranged on the mounting frame. The lifting assembly can drive the first laser displacement sensor to move up and down. The first laser displacement sensor can be located above the tray. One side of the shield is provided with an opening. The tray can pass through the opening to the outside. The shield is provided with a mounting port. The air supply filtering mechanism is arranged at the mounting port. The X direction movement mechanism, the Y direction movement mechanism, the air supply filtering mechanism and the first laser displacement sensor are connected with the controller.

[0007] Preferably, the X-direction moving mechanism comprises a first screw driving assembly, a moving table and a first guide assembly, the first guide assembly is arranged on the worktable, the moving table is slidingly installed on the first guide assembly, the first screw driving assembly is used to drive the moving table to slide along the first guide assembly, and the first screw driving assembly is connected with the controller; an upper portion of the moving table is provided with a second guide assembly, a length direction of the second guide assembly is consistent with a length direction of the first guide assembly, the tray is slidingly installed on the second guide assembly, and a linear telescopic driving part for driving the tray to slide along the second guide assembly is arranged on the upper portion of the moving table, and the linear telescopic driving part is connected with the controller.

[0008] Preferably, the first guide assembly comprises two first guide rails parallel to each other, and each of the first guide rails is slidingly installed with a first slider group, and each of the first slider groups is connected with the lower portion of the moving table.

[0009] Preferably, the second guide assembly comprises two second guide rails parallel to each other, each of the second guide rails is slidingly installed with a second slider group, each of the second slider groups is connected with the bottom of the tray, and the linear telescopic driving part is located between the two second guide rails.

[0010] Preferably, the tray is provided with a through hole, an annular limiting plate is arranged on an upper portion of the tray, a center hole of the annular limiting plate corresponds in position to the through hole, a size of the center hole is greater than a size of the through hole, and the annular limiting plate is used to place the product to be measured or the calibration block.

[0011] Preferably, the measuring mechanism further comprises a second laser displacement sensor, the lifting assembly can drive the second laser displacement sensor to move up and down, the second laser displacement sensor corresponds in position to the first laser displacement sensor in a vertical direction, the second laser displacement sensor can be located below the tray, and the second laser displacement sensor is connected with the controller.

[0012] Preferably, the lifting assembly comprises a dovetail groove guide rail, a rack, a first gear, a second gear, a first dovetail groove slider, a second dovetail groove slider, a first adjusting knob, a second adjusting knob, a first connecting plate and a second connecting plate, the dovetail groove guide rail is vertically fixed on the mounting frame, and the rack is vertically arranged on the dovetail groove guide rail; the first dovetail groove slider is slidingly installed on the upper portion of the dovetail groove guide rail, the first adjusting knob is rotatably installed on the first dovetail groove slider through a first rotating shaft, the first rotating shaft extends into the first dovetail groove sliding table and is fixedly sleeved with the first gear, the first gear is engaged with the rack, and the first connecting plate is arranged on the side, away from the dovetail groove guide rail, of the first dovetail groove slider; and the first laser displacement sensor is arranged on the first connecting plate; the second dovetail groove slider is slidingly installed on the lower portion of the dovetail groove guide rail, the second adjusting knob is rotatably installed on the second dovetail groove slider through a second rotating shaft, the second rotating shaft extends into the second dovetail groove sliding table and is fixedly sleeved with the second gear, the second gear is engaged with the rack, the second connecting plate is arranged on the side, away from the dovetail groove guide rail, of the second dovetail groove slider, and the second laser displacement sensor is arranged on the second connecting plate.

[0013] Preferably, the Y-direction motion mechanism comprises a second screw drive assembly, a moving plate and a third guide assembly, the third guide assembly is arranged on the workbench, the moving plate is slidingly installed on the third guide assembly, the second screw drive assembly is used for driving the moving plate to slide along the third guide assembly, the mounting frame is arranged on the moving plate, and the second screw drive assembly is connected with the controller.

[0014] Preferably, the third guide assembly comprises two third guide rails which are parallel to each other, and each third guide rail slidingly installs a third slider group, and each third slider group is connected with the lower portion of the moving plate.

[0015] Preferably, the air supply filtering mechanism comprises an air blower and a filter, the mounting port is arranged at the top of the protective cover, the air blower and the filter are sequentially installed at the mounting port from top to bottom, and the air blower is connected with the controller.

[0016] The utility model discloses relative to prior art has obtained following technical effect:

[0017] This utility model discloses a ceramic substrate measuring device comprising a worktable, a protective cover, an air supply and filtration mechanism, an X-axis motion mechanism, a tray, a Y-axis motion mechanism, a measuring mechanism, and a controller. The measuring mechanism includes a mounting frame, a lifting assembly, and a first laser displacement sensor. The X-axis motion mechanism drives the tray to move along the X-axis, and the tray is used to place the product to be tested or a calibration block. During operation, the first laser displacement sensor is positioned above the tray, and a calibration block of known thickness is placed on the tray. The first laser displacement sensor measures the distance between itself and the upper surface of the calibration block. The calibration block is then removed, and the product to be tested is placed on the tray. The first laser displacement sensor measures the distance between itself and the upper surface of the product to be tested. The thickness of the product to be tested is calculated by combining the thickness of the calibration block and the distance measured by the first laser displacement sensor. The measurement accuracy can reach ±1μm. The device avoids contact with the ceramic substrate surface during measurement, preventing scratches, microcracks, and potential impacts on the product. It also avoids measurement problems caused by wear at contact points, ensuring high measurement accuracy. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A first perspective structural view of the ceramic substrate measuring device provided by this utility model;

[0020] Figure 2 A second perspective structural view of the ceramic substrate measuring device provided by this utility model;

[0021] Figure 3 A schematic diagram of the structure of the ceramic substrate measuring device provided by this utility model after removing the sliding door, left side glass, right side glass and rear side glass;

[0022] Figure 4 A three-dimensional structural diagram of the X-axis motion mechanism and the tray in the ceramic substrate measuring device provided by this utility model;

[0023] Figure 5 A front view of the X-axis motion mechanism and tray in the ceramic substrate measuring device provided by this utility model;

[0024] Figure 6 A three-dimensional structural diagram of the X-axis motion mechanism, tray, Y-axis motion mechanism, and measuring mechanism in the ceramic substrate measuring device provided by this utility model;

[0025] Figure 7 The left view of the X-direction movement mechanism, the tray, the Y-direction movement mechanism and the measuring mechanism in the ceramic substrate measuring device is provided in the utility model;

[0026] Figure 8 The three-dimensional structure view of the measuring mechanism in the ceramic substrate measuring device is provided in the utility model;

[0027] Figure 9 The three-dimensional structure view of the annular limiting plate in the ceramic substrate measuring device is provided in the utility model.

[0028] The drawing mark explanation: 100, ceramic substrate measuring device;1, workbench;2, shield;3, push-pull door;4, left side glass;5, opening;6, right side glass;7, air blower;8, rack;9, ground foot;10, support leg;11, first guide rail;12, moving table;13, first motor;14, first support;15, first coupling;16, first lead screw;17, first lead screw nut;18, first sliding block;19, second guide rail;20, straight line telescopic drive part;21, tray;22, annular limiting plate;221, outer annular plate;222, inner annular plate;23, product to be measured;24, third guide rail;25, moving plate;26, mounting frame;27, dovetail groove guide rail;28, first dovetail groove sliding block;29, first adjusting knob;30, first rotating shaft;31, first connecting plate;32, first laser displacement sensor;33, second dovetail groove sliding block;34, second adjusting knob;35, second rotating shaft;36, second connecting plate;37, second laser displacement sensor;38, second motor;39, second support;40, second coupling;41, second lead screw;42, second lead screw nut;43, third sliding block. DETAILED DESCRIPTION

[0029] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all the other embodiments obtained by the ordinary skilled in the art without creative labor fall within the scope of protection of the utility model.

[0030] The utility model aims at providing a kind of ceramic substrate measuring device, prevent product from appearing knock scratch and the problem of hidden crack, can guarantee the high accuracy of measurement.

[0031] In order to make the above purpose, features and advantages of the utility model more obvious and easy to understand, the utility model is further described in detail with reference to the drawings and specific embodiments.

[0032] As Figures 1-9As shown, the embodiment provides a ceramic substrate measuring device 100, which comprises a workbench 1, a shield 2, a blowing filtering mechanism, an X-direction moving mechanism, a tray 21, a Y-direction moving mechanism, a measuring mechanism and a controller. The shield 2 is arranged on the upper part of the workbench 1, and specifically, the bottom of the shield is of an open structure and is fixedly connected with the upper part of the workbench 1. The X-direction moving mechanism is arranged on the workbench 1 and located in the shield 2, and is used to drive the tray 21 to move along the X-direction. The tray 21 is used to place a product to be measured 23 or a calibration block. The Y-direction moving mechanism is arranged on the workbench 1 and located in the shield 2, and is used to drive the measuring mechanism to move along the Y-direction. It should be noted that the X-direction and the Y-direction are perpendicular to each other, the X-direction is defined as the left-right direction, and the Y-direction is defined as the front-rear direction. The measuring mechanism comprises a mounting frame 26, a lifting assembly and a first laser displacement sensor 32. The lifting assembly is arranged on the mounting frame 26 and can drive the first laser displacement sensor 32 to move up and down. The first laser displacement sensor 32 can be located above the tray 21. One side of the shield 2 is provided with an opening 5, and the tray 21 can extend to the outside through the opening 5. The shield 2 is provided with a mounting port, and the blowing filtering mechanism is arranged at the mounting port. The X-direction moving mechanism, the Y-direction moving mechanism, the blowing filtering mechanism and the first laser displacement sensor 32 are all connected with the controller.

[0033] In work, the tray 21 is driven by the X-direction moving mechanism to move along the X-direction, and the measuring mechanism is driven by the Y-direction moving mechanism to move along the Y-direction, so that the first laser displacement sensor 32 is located above the tray 21. A calibration block with a known thickness is placed on the tray 21, and the first laser displacement sensor 32 measures the distance between the upper surface of the calibration block. Then, the calibration block is removed, and the product to be measured 23 is placed on the tray 21. The first laser displacement sensor 32 measures the distance between the upper surface of the product to be measured 23. Then, the thickness of the product to be measured 23 is calculated by combining the thickness of the calibration block, the distance between the upper surface of the calibration block measured by the first laser displacement sensor 32, and the distance between the upper surface of the product to be measured 23 measured by the first laser displacement sensor 32. The measuring precision can reach ±1μm. In the measuring process, the surface of the ceramic substrate is not contacted, so as to prevent the problems of knocking, scratching and hidden cracking, avoid the influence on the product, avoid the phenomenon that the contact point wears and causes the measurement problem, and ensure the high precision of the measurement.

[0034] As Figure 4 and Figure 5As shown, the X-direction moving mechanism comprises a first screw driving assembly, the moving table 12 and a first guide assembly, the first guide assembly is arranged on the workbench 1, the moving table 12 is slidingly installed on the first guide assembly, the first screw driving assembly is used for driving the moving table 12 to slide along the first guide assembly, and the first screw driving assembly is connected with the controller; the upper portion of the moving table 12 is provided with a second guide assembly, the length direction of the second guide assembly is consistent with the length direction of the first guide assembly, the tray 21 is slidingly installed on the second guide assembly, and the upper portion of the moving table 12 is provided with a linear telescopic driving part 20 used for driving the tray 21 to slide along the second guide assembly, and the linear telescopic driving part 20 is connected with the controller.

[0035] The first guide assembly comprises two first guide rails 11 which are parallel to each other, and each first guide rail 11 is slidingly provided with a first slider group, and each first slider group is connected with the lower portion of the moving table 12. The first slider group in the embodiment comprises two first sliders 18.

[0036] The first screw driving assembly comprises a first motor 13, a first screw rod 16, a first screw nut 17 and two first supports 14, the workbench 1 is provided with a first slot, the length direction of the first slot is consistent with the length direction of the first guide rail 11, and the first slot is located between the two first guide rails 11, the two first supports 14 are arranged on the bottom of the workbench 1 and located at the two ends of the first slot, the two ends of the first screw rod 16 are rotatably installed in the two first supports 14 respectively, the first motor 13 is arranged on the bottom of the workbench 1, the first motor 13 is connected with the controller, and the power output shaft of the first motor 13 is connected with one end of the first screw rod 16, the first screw nut 17 is arranged on the first screw rod 16, and the first screw nut 17 passes through the first slot and is connected with the lower portion of the moving table 12. In the embodiment, the power output shaft of the first motor 13 is connected with one end of the first screw rod 16 through the first coupling 15.

[0037] In use, the first motor 13 is started, so that the first screw rod 16 rotates, the first screw nut 17 reciprocates along the first screw rod 16, and then the moving table 12 moves along the X direction, so that the second guide assembly, the linear telescopic driving part 20 and the tray 21 on the moving table 12 move along the X direction.

[0038] The second guide assembly comprises two second guide rails 19 which are parallel to each other, each second guide rail 19 is slidingly provided with a second slider group, and each second slider group is connected with the bottom of the tray 21, and the second slider group in the embodiment comprises two second sliders. The linear telescopic driving part 20 is located between the two second guide rails 19, the linear telescopic driving part 20 is connected with one end of the tray 21, and the linear telescopic driving part 20 is used for driving the tray 21 to move along the X direction.

[0039] In this specific embodiment, the linear telescopic drive component 20 is a cylinder or an electric push rod.

[0040] The tray 21 has a through hole, and an annular limiting plate 22 is provided on the upper part of the tray 21. The center hole of the annular limiting plate 22 corresponds to the through hole, and the size of the center hole is larger than the size of the through hole. The annular limiting plate 22 is used to place the product to be tested 23 or the calibration block. In this embodiment, the annular limiting plate 22 is fixed to the upper part of the tray 21 by multiple bolts.

[0041] like Figure 9 As shown, the annular limiting plate 22 in this embodiment includes an outer annular plate 221 and an inner annular plate 222 disposed on the lower inner side of the outer annular plate 221. A step is formed between the inner annular plate 222 and the outer annular plate 221. The upper part of the inner annular plate 222 is used to place the product to be tested 23 or the calibration block. The outer annular plate 221 is fixed to the upper part of the tray 21 by multiple bolts.

[0042] In this specific embodiment, the annular limiting plate 22 is made of PEEK material, so as not to scratch the product under test 23 and the calibration block.

[0043] In this specific embodiment, the through hole is a rectangular through hole, and the annular limiting plate 22 is a rectangular plate with a rectangular central hole.

[0044] The measuring mechanism also includes a second laser displacement sensor 37. The lifting component can drive the second laser displacement sensor 37 to move up and down. The second laser displacement sensor 37 corresponds to the first laser displacement sensor 32 in the vertical direction. The second laser displacement sensor 37 can be located below the tray 21. The second laser displacement sensor 37 is connected to the controller.

[0045] In use, the calibration block or the product under test 23 is placed above the inner annular plate of the annular limiting plate 22, and the lower part of the calibration block or the product under test 23 is exposed to the outside through the through hole so that the second laser displacement sensor 37 located below can perform measurement work.

[0046] In this embodiment, the first lead screw drive assembly is used to drive the moving stage 12 and other components above it to move along the X direction in the protective cover 2. The linear telescopic drive component 20 is used to enable the tray 21 to extend to the outside of the moving stage 12 so that the second laser displacement sensor 37 located below can perform measurement work. The linear telescopic drive component 20 is also used to enable the tray 21 to extend to the outside through the opening 5 on the protective cover 2 so that the calibration block or the product under test 23 can be placed.

[0047] The first lead screw drive assembly and the linear telescopic drive component 20 work together to move the tray 21 along the X direction, ensuring that the calibration block or the product under test 23 is placed and taken out outside the protective cover 2, reducing the amount of dust entering the protective cover 2.

[0048] As Figure 8 shown, the lifting assembly comprises dovetail groove guide rail 27, rack, first gear, second gear, first dovetail groove slider 28, second dovetail groove slider 33, first adjusting knob 29, second adjusting knob 34, first connecting plate 31 and second connecting plate 36, the dovetail groove guide rail 27 is vertically fixed on the mounting frame 26, and the rack is vertically arranged on the dovetail groove guide rail 27.

[0049] The first dovetail groove slider 28 is slidingly installed on the upper part of the dovetail groove guide rail 27, the first adjusting knob 29 is rotatably installed on the first dovetail groove slider 28 through the first rotating shaft 30, the first rotating shaft 30 extends into the first dovetail groove sliding table and is fixedly sleeved with the first gear, the first gear is engaged with the rack, and the first connecting plate 31 is arranged on the side of the first dovetail groove slider 28 away from the dovetail groove guide rail 27, and the first laser displacement sensor 32 is arranged on the first connecting plate 31.

[0050] By rotating the first adjusting knob 29, the first gear can be rotated, and then through the engagement relationship between the first gear and the rack, the first dovetail groove slider 28 moves up and down along the dovetail groove guide rail 27, so as to realize the up and down movement of the first laser displacement sensor 32, and then the distance between the first laser displacement sensor 32 and the upper surface of the calibration block can be adjusted, so as to adjust according to the required test distance of the first laser displacement sensor 32.

[0051] The second dovetail groove slider 33 is slidingly installed on the lower part of the dovetail groove guide rail 27, the second adjusting knob 34 is rotatably installed on the second dovetail groove slider 33 through the second rotating shaft 35, the second rotating shaft 35 extends into the second dovetail groove sliding table and is fixedly sleeved with the second gear, the second gear is engaged with the rack, and the second connecting plate 36 is arranged on the side of the second dovetail groove slider 33 away from the dovetail groove guide rail 27, and the second laser displacement sensor 37 is arranged on the second connecting plate 36.

[0052] By rotating the second adjusting knob 34, the second gear can be rotated, and then through the engagement relationship between the second gear and the rack, the second dovetail groove slider 33 moves up and down along the dovetail groove guide rail 27, so as to realize the up and down movement of the second laser displacement sensor 37, and then the distance between the second laser displacement sensor 37 and the lower surface of the calibration block can be adjusted, so as to adjust according to the required test distance of the second laser displacement sensor 37.

[0053] As Figure 6 and Figure 7As shown, the Y-direction moving mechanism comprises a second screw driving assembly, a moving plate 25 and a third guide assembly, the third guide assembly is arranged on the workbench 1, the length direction of the third guide assembly is perpendicular to the length direction of the first guide assembly, the moving plate 25 is slidingly installed on the third guide assembly, the second screw driving assembly is used for driving the moving plate 25 to slide along the third guide assembly, a mounting frame 26 is arranged on the moving plate 25, and the second screw driving assembly is connected with the controller.

[0054] The third guide assembly comprises two third guide rails 24 which are parallel to each other, and each of the third guide rails 24 slidingly installs a third sliding block 43 group, and each of the third sliding block 43 groups is connected with the lower part of the moving plate 25. The third sliding block 43 group in the embodiment comprises two third sliding blocks 43.

[0055] The second screw driving assembly comprises a second motor 38, a second screw 41, a second screw nut 42 and two second supports 39, a second slot is arranged on the workbench 1, the length direction of the second slot is consistent with the length direction of the third guide rail 24, and the second slot is located between the two third guide rails 24, the two second supports 39 are arranged on the bottom of the workbench 1 and located at the two ends of the second slot, the two ends of the second screw 41 are rotatably installed in the two second supports 39 respectively, the second motor 38 is arranged on the bottom of the workbench 1, the second motor 38 is connected with the controller, and the power output shaft of the second motor 38 is connected with one end of the second screw 41, the second screw nut 42 is arranged on the second screw 41, and the second screw nut 42 is connected with the lower part of the moving plate 25 through the second slot. In the embodiment, the power output shaft of the second motor 38 is connected with one end of the second screw 41 through the second coupling 40.

[0056] In use, the second motor 38 is started, so that the second screw 41 rotates, the second screw nut 42 reciprocates along the second screw 41, and the moving plate 25 moves along the Y direction, so that the mounting frame 26, the lifting assembly, the first laser displacement sensor 32 and the second laser displacement sensor 37 on the moving plate 25 move along the Y direction.

[0057] The air supply filtering mechanism comprises an air supply machine 7 and a filter, a mounting port is arranged on the top of the cover 2, the air supply machine 7 and the filter are sequentially installed at the mounting port from top to bottom, and the air supply machine 7 is connected with the controller. The filter in the embodiment is a high-efficiency filter.

[0058] In work, the air supply machine 7 continuously supplies filtered fresh air to the product detection area, so that a pressure difference is generated between the product detection area and the outside of the cover 2, the dust particles can be effectively prevented from entering the product detection area in the cover 2, and the influence of the dust particles on the measurement is reduced.

[0059] The controller in the embodiment is a computer, and the computer comprises operation software which mainly controls the action of the device and stores and arranges the measured data. The operation software also has the following functions: deviation adjustment of the measured value, deviation adjustment of the measured value for different ceramic substrates, mainly involving that the measured value of the laser measurement deviates from the actual size of the ceramic substrate due to the relatively high light transmittance of part of the ceramic substrate, so the measured value of the ceramic substrate needs to be adjusted to make the final value consistent with the actual value, so that the maximum deviation of the repeated measurement value of the same point is below 1 mu m.

[0060] The embodiment also comprises a rack 8, the upper part of the rack 8 is provided with a support plate, the lower part of the workbench 1 is provided with a plurality of supporting legs 10, the lower part of each supporting leg 10 is connected with the upper part of the support plate, and the bottom of the rack 8 is provided with a plurality of footings 9.

[0061] The front side of the shield 2 in the embodiment is provided with a front mounting port, the rear side is provided with a rear mounting port, the left side is provided with a left mounting port, and the right side is provided with a right mounting port, two front and rear staggered sliding doors 3 are arranged at the front mounting port, the sliding doors 3 are moved left and right to open or close the front mounting port, and after being opened, the components inside the shield 2 are convenient to operate, such as rotating the first adjusting knob 29 and the second adjusting knob 34; the rear side is provided with rear side glass at the rear mounting port, the right side is provided with right side glass 6 at the right mounting port, the left side is provided with left side glass 4 at the left mounting port, and the opening 5 is arranged on the left side glass 4, and the opening 5 is a strip-shaped opening which extends in the front-rear direction.

[0062] The specific use process is as follows: the air blower 7 is started, the controller controls the first motor 13 to move the moving table 12 to the leftmost side in the shield 2, then controls the linear extension driving part 20 to extend to make the tray 21 extend to the outside through the opening 5, places the calibration block above the inner ring plate 222 of the ring-shaped limiting plate 22, controls the linear extension driving part 20 to make the tray 21 and the calibration block on the ring-shaped limiting plate 22 move to the inside of the shield 2 through the opening 5 again, and at the same time, the tray 21 is located outside the moving table 12.

[0063] The controller controls the first motor 13 and the second motor 38 to make the first laser displacement sensor 32 and the second laser displacement sensor 37 be located above and below the calibration block respectively, and the operation software of the controller can display the distance between the first laser displacement sensor 32 and the upper surface of the calibration block and the distance between the second laser displacement sensor 37 and the lower surface of the calibration block, and by rotating the first adjusting knob 29 and the second adjusting knob 34, the distance between the first laser displacement sensor 32 and the upper surface of the calibration block is 30 mm, and the distance between the second laser displacement sensor 37 and the lower surface of the calibration block is 30 mm.

[0064] The linear telescopic driving part 20 is controlled to extend so that the tray 21 extends to the outside through the opening 5, the calibration block is removed, the product to be measured 23 is placed above the inner annular plate 222 of the annular limiting plate 22, the linear telescopic driving part 20 is controlled to move the tray 21 and the product to be measured 23 on the annular limiting plate 22 to the inside of the protective cover 2 through the opening 5 again, and the product to be measured 23 is located between the first laser displacement sensor 32 and the second laser displacement sensor 37.

[0065] The first laser displacement sensor 32 measures the distance between the upper surface of the product to be measured 23, the second laser displacement sensor 37 measures the distance between the lower surface of the product to be measured 23, and then the thickness of the product to be measured 23 is calculated in combination with the thickness of the calibration block, the distance between the upper surface of the calibration block measured by the first laser displacement sensor 32 and the distance between the lower surface of the calibration block measured by the second laser displacement sensor 37. In the embodiment, the measurement accuracy is further improved by the combined mode of the first laser displacement sensor 32 and the second laser displacement sensor 37.

[0066] Meanwhile, since the emitted laser of the first laser displacement sensor 32 and the second laser displacement sensor 37 is relatively thin, the laser hits the product to be measured 23 to measure only one point. The measurement of the product to be measured 23 may be affected by dust particles. Therefore, in the embodiment, the data is collected by the method of area measurement and averaging, that is, the X axis and the Y axis are interpolated with a 1mm diameter circle during measurement. The data of N points (the number can be changed) on the track during the movement are collected and calculated to obtain the final measurement data. The final data accuracy can reach ±1μm.

[0067] In the embodiment, the operation software running in the computer can perform operations of the device, such as starting testing, pausing, automatic / manual mode switching, calibration of the first laser displacement sensor 32 and the second laser displacement sensor 37, and the like. It should be noted that the automatic mode is that the moving table 12 and the moving plate 25 are automatically moved to the set position after the button is pressed. The manual mode is that the operator presses the first forward button or the first backward button to realize the forward movement or the backward movement of the moving table 12, and presses the second forward button or the second backward button to realize the forward movement or the backward movement of the moving plate 25 by the operation software. The measured data can also be recorded and simply statistically summarized (such as maximum value, minimum value, average value), which effectively reduces the data statistical work.

[0068] In the specification, specific examples are applied to describe the principles and implementation modes of the utility model. The above embodiment is only used to help understand the method and core idea of the utility model. Meanwhile, according to the idea of the utility model, the specific implementation mode and application range will be changed by the general technical personnel in the field. In summary, the content of the specification should not be understood as the limitation of the utility model.

Claims

1. A ceramic substrate measuring device characterized by comprising: The application relates to a product measuring device, which comprises a workbench, a shield, a blowing and filtering mechanism, an X-direction moving mechanism, a tray, a Y-direction moving mechanism, a measuring mechanism and a controller, the shield is arranged on the upper portion of the workbench, the X-direction moving mechanism is arranged on the workbench and located in the shield, the X-direction moving mechanism is used for driving the tray to move along the X direction, the tray is used for placing products to be measured or a calibration block, the Y-direction moving mechanism is arranged on the workbench and located in the shield, the Y-direction moving mechanism is used for driving the measuring mechanism to move along the Y direction, the measuring mechanism comprises a mounting frame, a lifting assembly and a first laser displacement sensor, the lifting assembly is arranged on the mounting frame, the lifting assembly can drive the first laser displacement sensor to move up and down, and the first laser displacement sensor can be located above the tray; one side of the shield is provided with an opening, the tray can pass through the opening to the outside, the shield is provided with a mounting opening, and the blowing and filtering mechanism is arranged at the mounting opening; the X-direction moving mechanism, the Y-direction moving mechanism, the blowing and filtering mechanism and the first laser displacement sensor are connected with the controller.

2. The ceramic substrate measurement apparatus according to claim 1, characterized by The X-direction moving mechanism comprises a first screw drive assembly, a moving table and a first guide assembly, the first guide assembly is arranged on the workbench, the moving table is slidingly arranged on the first guide assembly, the first screw drive assembly is used for driving the moving table to slide along the first guide assembly, and the first screw drive assembly is connected with the controller; the upper portion of the moving table is provided with a second guide assembly, the length direction of the second guide assembly is consistent with the length direction of the first guide assembly, the tray is slidingly arranged on the second guide assembly, and the upper portion of the moving table is provided with a linear telescopic driving part used for driving the tray to slide along the second guide assembly, and the linear telescopic driving part is connected with the controller.

3. The ceramic substrate measurement apparatus according to claim 2, characterized by The first guide assembly comprises two first guide rails which are parallel to each other, and each first guide rail is slidingly provided with a first slider group, and each first slider group is connected with the lower portion of the moving table.

4. The ceramic substrate measurement apparatus according to claim 2, characterized by The second guide assembly comprises two second guide rails which are parallel to each other, and each second guide rail is slidingly provided with a second slider group, and each second slider group is connected with the bottom of the tray, and the linear telescopic driving part is located between the two second guide rails.

5. The ceramic substrate measurement apparatus according to claim 1, characterized by The tray is provided with a through hole, the upper portion of the tray is provided with an annular limiting plate, the center hole of the annular limiting plate corresponds to the position of the through hole in a position corresponding mode, the size of the center hole is larger than that of the through hole, and the annular limiting plate is used for placing the products to be measured or the calibration block.

6. The ceramic substrate measurement apparatus according to claim 5, characterized by The measuring mechanism further comprises a second laser displacement sensor, the lifting assembly can drive the second laser displacement sensor to move up and down, the second laser displacement sensor corresponds to the first laser displacement sensor in the vertical direction, the second laser displacement sensor can be located below the tray, and the second laser displacement sensor is connected with the controller.

7. The ceramic substrate measurement apparatus according to claim 6, characterized by The lifting assembly comprises dovetail groove guide rails, a rack, a first gear, a second gear, a first dovetail groove slider, a second dovetail groove slider, a first adjusting knob, a second adjusting knob, a first connecting plate and a second connecting plate, the dovetail groove guide rails are vertically fixed on the mounting frame, and the rack is vertically arranged on the dovetail groove guide rails; the first dovetail groove slider is slidingly installed on the upper portion of the dovetail groove guide rails, the first adjusting knob is rotatably installed on the first dovetail groove slider through a first rotating shaft, the first rotating shaft extends into the first dovetail groove slider and is fixedly sleeved with the first gear, the first gear is engaged with the rack, and the first connecting plate is arranged on the side, away from the dovetail groove guide rails, of the first dovetail groove slider; and the first laser displacement sensor is arranged on the first connecting plate; the second dovetail groove slider is slidingly installed on the lower portion of the dovetail groove guide rails, the second adjusting knob is rotatably installed on the second dovetail groove slider through a second rotating shaft, the second rotating shaft extends into the second dovetail groove slider and is fixedly sleeved with the second gear, the second gear is engaged with the rack, the second connecting plate is arranged on the side, away from the dovetail groove guide rails, of the second dovetail groove slider, and the second laser displacement sensor is arranged on the second connecting plate.

8. The ceramic substrate measurement apparatus of claim 1, wherein The Y-direction motion mechanism comprises a second screw drive assembly, a moving plate and a third guide assembly, the third guide assembly is arranged on the workbench, the moving plate is slidingly installed on the third guide assembly, the second screw drive assembly is used for driving the moving plate to slide along the third guide assembly, the mounting frame is arranged on the moving plate, and the second screw drive assembly is connected with the controller.

9. The ceramic substrate measurement apparatus according to claim 8, characterized by The third guide assembly comprises two third guide rails which are parallel to each other, and each third guide rail slidingly installs a third slider group, and each third slider group is connected with the lower portion of the moving plate.

10. The ceramic substrate measurement apparatus of claim 1, wherein The air supply filtering mechanism comprises an air blower and a filter, the mounting port is arranged at the top of the protective cover, and the air blower and the filter are sequentially installed at the mounting port from top to bottom, and the air blower is connected with the controller.

Images