Device for synchronously measuring surface type, eccentricity and inclination of optical element

Abstract

The utility model provides a device for synchronously measuring the surface type, eccentricity and inclination of an optical element, and belongs to the technical field of optical element measurement. The device for synchronously measuring the surface type, eccentricity and inclination of the optical element comprises a machine body, a position adjusting mechanism and a non-contact measuring head position adjusting structure. The position adjusting mechanism comprises a motor and a supporting table, one end of the transmission part is sleeved with a disc in a threaded mode, the non-contact type measuring head position adjusting structure comprises a magnetometer base and a movable rod set, the movable rod set is rotationally connected to the top of the magnetometer base, and a non-contact type measuring head body is arranged in the clamping hoop. According to the utility model, through the cooperation of the motor and the supporting table, the disc and the optical element rotate slowly, through the cooperation of the transmission member and the disc, the position of the optical element can be adjusted, and through the cooperation of the magnetic gauge stand and the movable rod group, the clamp and the non-contact measuring head body are rotated, so that the surface type, eccentricity and inclination of the optical element can be measured synchronously.

Description

TECHNICAL FIELD

[0001] The utility model relates to optical element measurement field, specifically, an optical element surface type, eccentric and tilt synchronous measuring device. BACKGROUND

[0002] Optical element not only has the requirement to surface type in use, and its eccentricity and tilt have direct influence to the image quality of optical system, therefore, it is very necessary to detect the surface type, tilt and eccentricity of optical element in the process of optical processing, and the convergence of optical element to the design index range is guided by the detection result, in the process of processing an optical element, the surface type, eccentricity and tilt often need to be measured for many times.

[0003] At present, the existing measuring device usually detects the surface type and tilt eccentricity in steps when measuring the optical element, which leads to the optical element needing to be moved to another device after measuring the optical element by using one device, and the work intensity of the staff is greatly increased, thereby the detection efficiency of the optical element is reduced, and the economic cost is high. UTILITY MODEL CONTENT

[0004] In order to make up for the above shortcomings, the utility model provides an optical element surface type, eccentric and tilt synchronous measuring device, which aims at improving the problem that the existing measuring device usually detects the surface type and tilt eccentricity in steps when measuring the optical element, which leads to the optical element needing to be moved to another device after measuring the optical element by using one device.

[0005] The utility model is realized as follows:

[0006] The utility model provides an optical element surface type, eccentric and tilt synchronous measuring device, which comprises a body, a position adjusting mechanism and a non-contact probe position adjusting structure.

[0007] The body comprises a base and a support structure, the position adjusting mechanism comprises a motor and a support table, the motor is installed in the base, the output shaft of the motor is fixedly connected with the support table, a transmission part is rotatably connected in the support table, a disc is threadedly sleeved on one end of the transmission part, the disc is slidably arranged on the upper surface of the support table, the non-contact probe position adjusting structure comprises a magnetic table seat and a movable rod group, the magnetic table seat is installed on the upper surface of the base, the movable rod group is rotatably connected at the top of the magnetic table seat, a clamp is rotatably connected at one end of the movable rod group, and a non-contact probe body is arranged in the clamp.

[0008] In one embodiment of the present invention, the support structure includes two support plates, a top plate and a fixing rod. The two support plates are mounted on the upper surface of the base, the top plate is mounted on the top of the two support plates, and the fixing rod is mounted on the side of one of the support plates.

[0009] In one embodiment of this utility model, a non-contact probe assembly is connected to one end of the fixing rod, and the non-contact probe assembly is located above the disk.

[0010] In one embodiment of this utility model, a groove is provided on the lower surface of the base, and the motor is installed in the groove.

[0011] In one embodiment of this utility model, the output shaft of the motor is connected to a main shaft, and the upper end of the main shaft is fixedly connected to the lower surface of the support platform.

[0012] In one embodiment of this utility model, the transmission component includes a lead screw and an adjusting rod. The lead screw is rotatably connected inside the support platform, and one end of the lead screw is fixedly connected to the adjusting rod. The adjusting rod is located outside the support platform, and the disc is threaded onto the surface of the lead screw.

[0013] In one embodiment of this utility model, a placement groove is provided on the upper surface of the support platform, the lead screw is rotatably connected in the placement groove, a movable block is connected to the lower surface of the disc, the movable block is threaded onto the surface of the lead screw, and the movable block is in contact with the inner wall of the placement groove.

[0014] In one embodiment of this utility model, the movable rod assembly includes a connecting rod, a universal rod, and a damping shaft. One end of the connecting rod is rotatably connected to the top of the magnetic base through the damping shaft, and the other end of the connecting rod is rotatably connected to the universal rod through the damping shaft. The universal rod is rotatably connected to the clamp through the damping shaft.

[0015] The beneficial effects of this utility model are as follows: The optical element surface shape, eccentricity, and tilt synchronous measurement device obtained by the above design is used by placing the optical element on a disk within the support structure. Through the cooperation of the motor and the support platform, the output shaft drives the support platform to rotate slowly, thereby driving the disk and the optical element to rotate slowly, which is conducive to adjusting the angle of the optical element. Through the cooperation of the transmission component and the disk, the transmission component drives the disk to move, which is conducive to adjusting the position of the disk and the optical element. Then, through the cooperation of the magnetic base and the movable rod assembly on the base, the movable rod assembly drives the clamp and the non-contact probe body to rotate. Through the non-contact probe body, the surface shape, eccentricity, and tilt of the optical element can be measured synchronously, reducing the possibility of needing to move the optical element to another device after measuring the optical element with one device. Attached Figure Description

[0016] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings needed in the embodiments will be briefly introduced as follows. Obviously, the following drawings only show some of the embodiments of the present application, and should not be considered as limiting the scope. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0017] Figure 1 is a structural schematic view of the optical element surface type, eccentricity and tilt synchronous measurement device provided by the embodiments of the present application;

[0018] Figure 2 is a structural partial cross-sectional view of the optical element surface type, eccentricity and tilt synchronous measurement device provided by the embodiments of the present application;

[0019] Figure 3 is a structural partial cross-sectional view of the motor and support table connection provided by the embodiments of the present application;

[0020] Figure 4 is a structural schematic view of the magnetic table seat and movable rod group connection provided by the embodiments of the present application.

[0021] In the figure: 100 - fuselage; 110 - base; 111 - groove; 120 - support structure; 121 - support plate; 122 - top plate; 123 - fixed rod; 200 - position adjusting mechanism; 210 - motor; 211 - main shaft; 220 - support table; 221 - placing groove; 230 - transmission member; 231 - screw rod; 232 - adjusting rod; 240 - disc; 241 - moving block; 300 - non-contact probe position adjusting structure; 310 - magnetic table seat; 320 - movable rod group; 321 - connecting rod; 322 - universal rod; 323 - damping rotating shaft; 330 - clamp; 340 - non-contact probe body; 350 - non-contact probe group. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical scheme and advantages of the embodiments of the present application more clear, the technical scheme in the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0023] EMBODIMENT

[0024] Please refer to Figures 1-4The utility model provides a kind of optical element face type, eccentric and tilt synchronous measuring device, including fuselage 100, position adjusting mechanism 200 and non-contact probe position adjusting structure 300.

[0025] Wherein, position adjusting mechanism 200 and non-contact probe position adjusting structure 300 are mounted on fuselage 100, the position of optical element can be adjusted by position adjusting mechanism 200, the position and angle of non-contact probe body 340 can be adjusted by non-contact probe position adjusting structure 300, so that the face type, eccentric and tilt of optical element are measured, reduce the possibility that optical element needs to be moved to another device after using a device to measure optical element.

[0026] Please refer to Figures 1-2 Fuselage 100 includes base 110 and support structure 120.

[0027] In the embodiment, support structure 120 includes two support plates 121, top plate 122 and fixed rod 123, two support plates 121 are installed on the upper surface of base 110, top plate 122 is installed on the top of two support plates 121, and fixed rod 123 is installed on the side surface of one of support plates 121;Fixed rod 123 is connected with non-contact probe group 350 at one end, and non-contact probe group 350 is located above disc 240, in specific implementation, non-contact probe group 350 is connected with fixed rod 123 at one end by the way of hoop (not shown), which is beneficial to the stability of non-contact probe group 350 on the device.

[0028] Please refer to Figures 1-3 Position adjusting mechanism 200 includes motor 210 and support table 220, motor 210 is installed in base 110, and the output shaft of motor 210 is fixedly connected with support table 220, driving part 230 is rotatably connected in support table 220, one end of driving part 230 is threadedly sleeved with disc 240, and disc 240 is slidably arranged on the upper surface of support table 220, in specific implementation, optical element is placed on disc 240, and the angle of disc 240 and optical element is adjusted by starting motor 210, so that the output shaft drives support table 220 and disc 240 to rotate slowly, which is beneficial to the adjustment of the angle of disc 240 and optical element, driving part 230 is rotated to drive disc 240 to move along the upper surface of support table 220, which reduces the possibility that the moving track of support table 220 deviates in the moving process, and is beneficial to the adjustment of the position of disc 240 and optical element, and optical element can be held by hand in the adjustment process of optical element.

[0029] In the embodiment, the bottom surface of the base 110 is provided with a groove 111, and the motor 210 is installed in the groove 111; the output shaft of the motor 210 is connected with a main shaft 211, and the upper end of the main shaft 211 is fixedly connected with the lower surface of a support table 220; a transmission member 230 includes a screw rod 231 and an adjusting rod 232, the screw rod 231 is rotatably connected in the support table 220, and one end of the screw rod 231 is fixedly connected with the adjusting rod 232, the adjusting rod 232 is located outside the support table 220, and a disc 240 is threadedly sleeved on the surface of the screw rod 231.

[0030] The upper surface of the support table 220 is provided with a placing groove 221, the screw rod 231 is rotatably connected in the placing groove 221, the lower surface of the disc 240 is connected with a moving block 241, the moving block 241 is threadedly sleeved on the surface of the screw rod 231, and the moving block 241 is attached to the inner wall of the placing groove 221; in specific implementation, the screw rod 231 is arranged in the placing groove 221, which can protect the screw rod 231 and facilitate the compactness between the components of the device; the adjusting rod 232 is rotated to drive the screw rod 231 to rotate, and then drive the moving block 241 to move along the inner wall of the placing groove 221, which facilitates to improve the stability of the moving block 241 and the disc 240 during the movement.

[0031] Please refer to Figures 1-4 , the non-contact probe position adjusting structure 300 includes a magnetic table seat 310 and a movable rod group 320, the magnetic table seat 310 is installed on the upper surface of the base 110, the movable rod group 320 is rotatably connected at the top of the magnetic table seat 310, and one end of the movable rod group 320 is rotatably connected with a clamp 330, the clamp 330 is provided with a non-contact probe body 340; in specific implementation, the optical element is placed on the disc 240, and then the non-contact probe body 340 is installed on the clamp 330; through the cooperation of the magnetic table seat 310 and the movable rod group 320, the angle and position of the clamp 330 and the non-contact probe body 340 can be adjusted, which facilitates to simultaneously measure the face type, eccentricity and inclination of the optical element, and reduces the possibility that the optical element needs to be moved to another device after being measured by one device.

[0032] In the embodiment, the movable rod group 320 includes a connecting rod 321, a universal rod 322 and a damping rotating shaft 323, one end of the connecting rod 321 is rotatably connected with the top of the magnetic table seat 310 through the damping rotating shaft 323, the other end of the connecting rod 321 is rotatably connected with the universal rod 322 through the damping rotating shaft 323, and the universal rod 322 is rotatably connected with the clamp 330 through the damping rotating shaft 323.

[0033] Specifically, the working principle of the optical element surface type, eccentricity and tilt synchronous measurement device is as follows: when in use, the optical element is placed on the disc 240, the motor 210 is started to drive the output shaft to slowly rotate the main shaft 211 and the support table 220, and then drive the disc 240 and the optical element to slowly rotate, which is beneficial to adjust the angle of the optical element, the adjusting rod 232 is rotated to drive the screw rod 231 to rotate, and then drive the moving block 241 to move along the inner wall of the placing groove 221, which is beneficial to adjust the position of the disc 240 and the optical element, the cooperation of the magnetic force table seat 310 on the base 110, the connecting rod 321 and the universal rod 322 drives the universal rod 322 to rotate, and then drives the clamp 330 and the non-contact probe body 340 to rotate, the non-contact probe body 340 and the non-contact probe group 350 can be used to synchronously measure the surface type, eccentricity and tilt of the optical element, and the possibility that the optical element needs to be moved to another device after being measured by one device is reduced.

[0034] The preferred embodiments of the utility model are described above only, and are not used to limit the utility model, for the person skilled in the art, the utility model can have various changes and changes. Any modification, equivalent replacement, improvement, etc. within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A device for simultaneously measuring the surface profile, eccentricity, and tilt of an optical element, characterized in that, Comprising A machine body (100) comprising a base (110) and a support structure (120); A position adjusting mechanism (200) comprising a motor (210) and a support table (220), the motor (210) is installed in the base (110), and the output shaft of the motor (210) is fixedly connected with the support table (220), the support table (220) is rotatably connected with a transmission member (230), one end of the transmission member (230) is threadedly sleeved with a disc (240), and the disc (240) is slidably arranged on the upper surface of the support table (220); A non-contact probe position adjusting structure (300) comprising a magnetic force table seat (310) and a movable rod group (320), the magnetic force table seat (310) is installed on the upper surface of the base (110), the movable rod group (320) is rotatably connected at the top of the magnetic force table seat (310), and one end of the movable rod group (320) is rotatably connected with a clamp (330), and the clamp (330) is provided with a non-contact probe body (340) therein.

2. The device according to claim 1, wherein The support structure (120) comprises two support plates (121), a top plate (122) and a fixed rod (123), the two support plates (121) are installed on the upper surface of the base (110), the top plate (122) is installed at the top of the two support plates (121), and the fixed rod (123) is installed on the side surface of one of the support plates (121).

3. The device of claim 2, wherein the device is configured to measure the face shape, the decentration and the tilt simultaneously. One end of the fixed rod (123) is connected with a non-contact probe group (350), and the non-contact probe group (350) is located above the disc (240).

4. The device of claim 1, wherein the device is characterized by: A groove (111) is formed in the lower surface of the base (110), and the motor (210) is installed in the groove (111).

5. The device of claim 1, wherein the device is characterized by: The output shaft of the motor (210) is connected with a main shaft (211), and the upper end of the main shaft (211) is fixedly connected with the lower surface of the support table (220).

6. The device of claim 5, wherein the device is configured to measure the face, decentration and tilt of the optical element simultaneously. The transmission member (230) comprises a lead screw (231) and an adjusting rod (232), the lead screw (231) is rotatably connected in the support table (220), one end of the lead screw (231) is fixedly connected with the adjusting rod (232), the adjusting rod (232) is located outside the support table (220), and the disc (240) is threadedly sleeved on the surface of the lead screw (231).

7. The device of claim 6, wherein the device is characterized by: A placing groove (221) is formed in the upper surface of the support table (220), the lead screw (231) is rotatably connected in the placing groove (221), the lower surface of the disc (240) is connected with a moving block (241), the moving block (241) is threadedly sleeved on the surface of the lead screw (231), and the moving block (241) is attached to the inner wall of the placing groove (221).

8. The device of claim 1, wherein the device is characterized by: The active rod set (320) comprises a connecting rod (321), a universal rod (322) and a damping rotating shaft (323), one end of the connecting rod (321) is rotatably connected with the top of the magnetic watch holder (310) through the damping rotating shaft (323), and the other end of the connecting rod (321) is rotatably connected with the universal rod (322) through the damping rotating shaft (323), and the universal rod (322) is rotatably connected with the clamp (330) through the damping rotating shaft (323).

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