Ultrahigh vacuum system

Abstract

The utility model relates to vacuum observation equipment, in particular to an ultrahigh vacuum system, which comprises a sample injection component, a vacuum cavity, a displacement mechanism, a corrugated pipe and a rotating component. The displacement mechanism comprises a moving channel capable of controllably displacing, the end, away from the vacuum cavity, of the moving channel is a bearing end, and a gas channel used for communicating the interior with the vacuum pump is formed in the bearing end. And the corrugated pipe is hermetically connected between the inlet / outlet of the vacuum cavity and the bearing end of the moving channel. The rotating assembly comprises a cylindrical rotating piece rotationally connected to the bearing end of the moving channel and a rotating power piece for driving the rotating piece to controllably rotate. The sample injection assembly comprises a bearing rod, a sample table and a sample injection flange fixedly arranged on the bearing rod in a sleeving mode. The bearing rod drives the sample table at the end part to penetrate through the rotating piece, the moving channel and the corrugated pipe in the first direction to enter the vacuum cavity. The sample introduction flange is detachably connected to the rotating part, so that the sample table can controllably move and change the direction in the vacuum cavity, and an ultrahigh vacuum state can be kept in the vacuum cavity.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum observation equipment, especially in a kind of ultrahigh vacuum system. BACKGROUND

[0002] When microcosmic object is imaged, handled and analyzed, etc., it is often needed to be carried out in ultrahigh vacuum environment, at this time, ultrahigh vacuum system is needed to provide operating environment. However, to maintain ultrahigh vacuum environment, higher sealing degree is needed, so the position of sample stage is fixed, to improve sealing degree, prevent vacuum degree from falling.

[0003] When sample size is larger, there is the need to adjust the relative position of sample and operating equipment, such as microscope lens, to realize the observation of local position of sample, etc., however, to ensure vacuum degree, the position of sample stage relative to sample inlet is determined, and the change of relative position is difficult to realize. UTILITY MODEL CONTENT

[0004] The utility model aims at providing a kind of ultrahigh vacuum system of sample stage position adjustable.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical scheme:

[0006] A kind of ultrahigh vacuum system, comprising:

[0007] Sample inlet assembly, including the bearing rod being arranged along the first direction, sample stage and sample inlet flange being connected to the bearing rod, the sample stage is used to carry sample, the sample inlet flange is set in the bearing rod and is fixedly connected with the bearing rod;

[0008] Vacuum cavity, with the entrance and exit for the sample stage to go in and out along the first direction, for providing ultrahigh vacuum environment;

[0009] Displacement mechanism, including the mobile channel of controllably displacement, the mobile channel is for the sample stage to pass along the first direction, and the mobile channel is away from the one end of the vacuum cavity and is bearing end;

[0010] Bellows, both ends are sealedly connected to the entrance and exit of the vacuum cavity and the bearing end of the mobile channel, and the bellows is matched with the sample stage;

[0011] The rotating assembly comprises a rotating member and a rotating power member, the rotating member is configured as a cylindrical structure with both ends open and for the sample table to pass through in the first direction, one end of the rotating member is rotatably connected to the bearing end of the moving channel, the other end is detachably connected to the sample flange of the sample feeding assembly, and the rotating member is in airtight connection with the sample flange, a gas channel is arranged on the outer wall of the bearing end of the moving channel and is in communication with the inside and outside of the rotating member, the gas channel is used to connect a vacuum pump, and the rotating power member is used to drive the rotating member to controllably rotate relative to the moving channel.

[0012] Optionally, a heater is arranged in the vacuum cavity, a heating interface is arranged on the outer wall of the moving channel, the heating interface is electrically connected with the heater, and the heater is used to heat the sample carried on the sample table.

[0013] Optionally, the heater is an electron bombardment heater, and the heater is connected to the sample table.

[0014] Optionally, the bearing rod is configured as a hollow tubular structure, has a cooling end in communication with the inside of the sample table and a communication end opposite to the cooling end, the communication end is provided with a liquid nitrogen inlet and an exhaust outlet, and the sample flange is connected between the cooling end and the communication end of the bearing rod.

[0015] Optionally, a temperature sensor is arranged on the sample table, and a temperature sensing interface electrically connected with the temperature sensor is arranged on the outer wall of the moving channel.

[0016] Optionally, a plurality of reserved interfaces are arranged on the outer wall of the moving channel, the reserved interfaces are controllably closed and are in communication with the inside of the moving channel.

[0017] Optionally, the rotating assembly further comprises a synchronization wheel connected to the rotating power member, the bearing end is configured as a circular ring, the rotating power member is connected to the outer wall of the bearing end of the moving channel and drives the synchronization wheel to controllably rotate in a direction parallel to the bearing end, the outer wall of the rotating member is configured as an external gear shape matched with the synchronization wheel and is in meshing connection with the synchronization wheel.

[0018] Optionally, the displacement mechanism comprises a first displacement assembly, a second displacement assembly and a third displacement assembly, the first displacement assembly comprises a first track arranged along the first direction, a first sliding plate slidingly connected to the first track and a first power member for controllably sliding the first sliding plate along the first track, the first track is arranged transversely and the first sliding plate is supported on the first track, the second displacement assembly comprises a second sliding plate slidingly connected to the first sliding plate and a second power member for controllably sliding the second sliding plate along a second direction, the second direction is transverse and parallel to the first sliding plate, and the second sliding plate is parallel to the first sliding plate, the third displacement assembly comprises a third sliding plate slidingly connected to the second sliding plate and a third power member for controllably sliding the third sliding plate along a third direction, the third direction is longitudinal and parallel to the first sliding plate, and the third sliding plate is parallel to the first sliding plate, the moving channel is connected to the middle part of the third sliding plate, and the middle part of the first sliding plate and the second sliding plate is provided with a through hole for the bellows to pass through.

[0019] Optionally, the displacement mechanism further comprises an auxiliary support assembly, the auxiliary support assembly comprises an auxiliary track matched with the first track, a balancing member and a tension spring, the auxiliary track is arranged on the side of the third sliding plate away from the first track, the balancing member is configured as a symmetrical structure comprising a support part and a connecting part, the middle part of the support part is slidingly connected to and supported on the auxiliary track, the two ends of the support part are respectively connected to two identical connecting parts, and the connecting parts are arranged on the side of the support part close to the first track, and the two tension springs are respectively connected between the ends of the connecting parts away from the support part and the bearing end of the moving channel for supporting the moving channel.

[0020] Optionally, the middle part of the connecting part of the balancing member is provided with a rotating structure for freely rotating the part of the connecting part close to the tension spring in the plane parallel to the first sliding plate.

[0021] The beneficial effects of the utility model lie in that the sample table at the end of the bearing rod sequentially passes through the rotating member, the moving channel and the bellows along the first direction, and enters the vacuum cavity. The sampling flange is hermetically connected to the rotating member, so that the opening of the vacuum cavity is sealed. The moving seat controllably displaces, drives the sampling flange to move relative to the vacuum cavity, so that the displacement of the sample table is realized. The rotating power member drives the sampling flange connected to the rotating member to rotate relative to the moving channel, so that the direction of the sample table is changed. Since the rotating member is rotatably connected to the moving channel, the sealing degree between the rotating member and the moving channel is low. The vacuum pump is connected to the connecting part of the rotating member and the moving channel through the gas channel, which helps to keep the ultra-high vacuum state in the vacuum cavity, so that the change of the sample position and direction is realized while the vacuum degree is ensured.

[0022] Further, by setting the heater, it is convenient to heat the sample. By setting the heating interface, it is convenient to adjust the working state of the heater working in the ultrahigh vacuum environment.

[0023] Further, the electron bombardment heater is arranged on the sample table, which can realize high temperature heating, and is helpful to accurately heat the sample and reduce energy waste.

[0024] Further, the bearing rod is used as a liquid nitrogen channel to introduce liquid nitrogen into the sample table, which is helpful to realize the cooling of the sample table. The nitrogen gas after warming and gasification is discharged from the gas outlet to maintain the pressure inside the bearing rod.

[0025] Further, by setting the temperature sensor and the temperature detection interface, it is convenient to detect the temperature of the sample table in real time, and the temperature of the sample table is easy to control.

[0026] Further, the gear meshing mode is used to drive the rotating part to rotate, which is helpful to avoid structural interference and improve the smoothness of rotation, so that the rotating part can rotate to any rotation angle.

[0027] Further, the first displacement assembly, the second displacement assembly and the third displacement assembly improve the freedom of the position of the sample table.

[0028] Further, by setting the auxiliary support assembly, the moving channel is supported on the auxiliary track by the tension spring, which reduces the pressure borne by the first track, helps to reduce the loss of the first track, and improves the smoothness of the movement of the first sliding block.

[0029] Further, by setting the rotating structure, when the moving channel moves in the second direction, the part close to the tension spring of the connecting part rotates, which reduces the stretching amount of the tension spring and prevents the tension spring from falling off or being damaged.

[0030] The above description is only a summary of the technical scheme of the present application. In order to more clearly understand the technical means of the present application, and can be implemented according to the content of the specification, the following will be described in detail with the preferred embodiments of the present application and the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0031] Figure 1 Part of the structure schematic diagram of the ultrahigh vacuum system shown in the embodiment of the present application;

[0032] Figure 2 For Figure 1 The local enlarged view of A in the middle.

[0033] Legend: 1 - sample inlet assembly, 11 - bearing rod, 111 - cooling end, 112 - communication end, 113 - liquid nitrogen inlet, 114 - gas outlet, 12 - sample flange, 2 - vacuum cavity, 21 - inlet and outlet, 3 - displacement mechanism, 311 - first rail, 312 - first slide, 313 - first power piece, 314 - pointer, 315 - indicating scale, 321 - second slide, 322 - second power piece, 331 - third slide, 332 - third power piece, 34 - moving channel, 341 - bearing end, 342 - gas channel, 343 - heating interface, 344 - reserved interface, 345 - connecting lug, 35 - auxiliary support assembly, 351 - auxiliary rail, 352 - balancing piece, 353 - support part, 354 - connecting part, 355 - rotating structure, 356 - tension spring, 4 - bellows, 5 - rotating assembly, 51 - rotating piece, 52 - rotating power piece. DETAILED DESCRIPTION

[0034] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application. In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for the purpose of description, and cannot be understood as indicating or implying relative importance. In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0035] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as there is no conflict between them.

[0036] Please refer to Figure 1 and Figure 2The utility model discloses an ultra -high vacuum system including sample feeding subassembly 1, vacuum cavity 2, displacement mechanism 3, bellows 4 and rotating assembly 5. Vacuum cavity 2 is used to provide ultra -high vacuum environment, has entrance and exit 21. Displacement mechanism 3 includes the mobile channel 34 of controllable displacement, and the mobile channel 34 is away from the one end of vacuum cavity 2 and is bearing end 341, and bearing end 341 outer wall is provided with the gas passage 342 for the intercommunication mobile channel 34 inside and vacuum pump. The both ends of bellows 4 are sealedly connected to entrance and exit 21 of vacuum cavity 2 and the bearing end 341 of mobile channel 34 respectively. Rotating assembly 5 includes rotating piece 51 and rotating power piece 52, and rotating piece 51 both ends open, and rotationally connected to the bearing end 341 of mobile channel 34, and rotating power piece 52 drives rotating piece 51 controllably rotates. Sample feeding subassembly 1 includes bearing rod 11, sample table and the sample flange 12 of fixed sleeve in bearing rod 11 middle part. Bearing rod 11 drives the sample table at its end and passes rotating piece 51, mobile channel 34 and bellows 4 along the first direction into vacuum cavity 2.

[0037] The sample table at the end of bearing rod 11 passes rotating piece 51, mobile channel 34 and bellows 4 in sequence along the first direction, and enters into vacuum cavity 2. The sample flange 12 is sealedly connected to rotating piece 51, and the opening of vacuum cavity 2 is sealed. Mobile seat controllably displaces, drives the sample flange 12 relative to vacuum cavity 2 and moves, to realize the displacement of sample table. Rotating power piece 52 drives the sample flange 12 connected to rotating piece 51 relative to mobile channel 34 and rotates, to change the direction of sample table. Since rotating piece 51 is rotationally connected to mobile channel 34, the sealing degree between rotating piece 51 and mobile channel 34 is low. The vacuum pump is communicated to the connecting place of rotating piece 51 and mobile channel 34 through gas passage 342, which helps to keep the ultra -high vacuum state in vacuum cavity 2, to change the sample position and direction while ensuring the vacuum degree.

[0038] Specifically, see the following examples.

[0039] Example one:

[0040] See Figure 1 and Figure 2The ultrahigh vacuum system shown in the preferred embodiment of the present application comprises a sample feeding assembly 1, a vacuum chamber 2, a displacement mechanism 3, a bellows 4 and a rotating assembly 5. The vacuum chamber 2 has a circular inlet 21 for the sample to enter or exit, which is used to provide an ultrahigh vacuum environment. The bellows 4 is sealingly connected between the inlet 21 of the vacuum chamber 2 and a moving channel 34 of the displacement mechanism 3. A rotating member 51 of the rotating assembly 5 is rotatably connected to an end of the moving channel 34 of the displacement mechanism 3 away from the bellows 4 and is controllably rotated under the driving of a rotating power member 52. The sample feeding assembly 1 comprises a carrier rod 11, a sample stage connected to an end of the carrier rod 11 and a sample feeding flange 12 fixedly sleeved on the carrier rod 11. The carrier rod 11 is horizontally arranged along a first direction and drives the sample stage at its end to sequentially pass through the rotating member 51, the moving channel 34 and the bellows 4 into the vacuum chamber 2 along the first direction, and makes the sample feeding flange 12 detachably connected to an end of the rotating member 51 away from the moving channel 34, so that the sample stage is relatively fixed with the rotating member 51. The moving channel 34 is controllably moved, the rotating member 51 is controllably rotated, and the sample carried on the sample stage is controllably moved and turned relative to the vacuum chamber 2.

[0041] The displacement mechanism 3 comprises a first displacement assembly, a second displacement assembly, a third displacement assembly and a moving channel 34. The moving channel 34 is coaxially arranged with the inlet 21 of the vacuum chamber 2 along the first direction.

[0042] The first displacement assembly comprises a first track 311, a first sliding plate 312 and a first power member 313. The first sliding plate 312 is vertically arranged and parallel to a second direction, which is a horizontal direction perpendicular to the first direction. The first sliding plate 312 is supported above the first track 311 and slidingly connected to the first track 311, and a first through hole in a circular shape is arranged at the middle part thereof. The first power member 313 is a servo motor connected between the first track 311 and the first sliding plate 312, which pushes the first sliding plate 312 to controllably reciprocate along the first track 311. In the embodiment, the maximum moving distance of the first sliding plate 312 compared to its initial position is ±12.5 mm.

[0043] The second displacement assembly comprises a second track, a second sliding plate 321 and a second power member 322. The second track is arranged on the side of the first sliding plate 312 away from the vacuum chamber 2 and parallel to the second direction. The second sliding plate 321 is slidingly connected to the second track, and a second through hole in a circular shape is formed at the middle part thereof matching the position of the first through hole. The second power member 322 is also a servo motor connected between the second track and the second sliding plate 321, which pushes the second sliding plate 321 to controllably reciprocate along the second track. In the embodiment, the maximum moving distance of the second sliding plate 321 compared to its initial position is ±12.5 mm.

[0044] The third displacement assembly comprises a third track, a third sliding plate 331 and a third power element 332. The third track is arranged on the side of the second sliding plate 321 away from the vacuum cavity 2 and is parallel to the third vertical direction. The third sliding plate 331 is slidingly connected to the third track and is provided with a third through hole coaxial with the first through hole in the middle part, and the diameter of the third through hole is smaller than that of the first and second through holes. The third power element 332 is also a servo motor connected between the third track and the third sliding plate 331, which drives the third sliding plate 331 to controllably reciprocate along the third track. In this embodiment, the maximum moving distance of the third sliding plate 331 compared with its initial position is 100 mm.

[0045] The moving channel 34 is integrally configured as a cylindrical structure with both ends open, and its diameter is matched with the third through hole. The moving channel 34 is fixedly connected to the side of the third sliding plate 331 away from the vacuum cavity 2 along the first direction and is located corresponding to the third through hole. The end of the moving channel 34 away from the third sliding plate 331 is the bearing end 341. The side wall of the moving channel 34 is provided with a plurality of interfaces extending towards the outside of the moving channel 34 for connecting the inside and outside of the moving channel 34. In this embodiment, five interfaces are arranged on the outer wall of the moving channel 34, including a heating interface 343, a temperature probe interface and three reserved interfaces 344. The heating interface 343 and the temperature probe interface are both sealed electrical interfaces, and the reserved interfaces 344 are airtight, which provide interfaces for adding equipment into the sealed cavity.

[0046] In this embodiment, the first sliding plate 312, the second sliding plate 321 and the third sliding plate 331 are all connected with a pointer 314, and the first track 311, the second track and the third track are all provided with an indicating scale 315 matched with the pointer 314, which is used to indicate the sliding displacement of the moving channel 34.

[0047] In this embodiment, the displacement mechanism 3 further includes an auxiliary support assembly 35. The auxiliary support assembly 35 includes an auxiliary track 351 positioned directly above the moving channel 34 along a first direction, a balance member 352, and tension springs 356. The balance member 352 has a symmetrical structure, including a support portion 353 and a connecting portion 354. The elongated support portion 353 is positioned along a second direction, with its middle portion slidably connected above the auxiliary track 351. Two identical connecting portions 354 are connected to both ends of the support portion 353. The connecting portions 354 are vertically positioned with their top ends connected to the support portion 353 and their bottom ends having an annular structure. Two annular connecting ears 345, flush with each other along the second direction, are fixedly connected to the bearing end 341 of the moving channel 34. Both ends of the two tension springs 356 have hook structures, and the two tension springs 356 are hooked between the connecting portions 354 and the connecting ears 345, thereby supporting the moving channel 34, reducing the pressure on the first track 311 and the second track, helping to reduce structural wear and improve the smoothness of the sliding motion. When the moving channel 34 slides along the first direction, the auxiliary support assembly 35 slides synchronously along the first direction under its drive, which helps to reduce the stress on the tension spring 356 and thus prevent the tension spring 356 from being damaged.

[0048] In this embodiment, a rotating structure 355 is also provided in the middle of the connecting part 354 of the balance member 352, which allows the part of the connecting part 354 near the tension spring 356 to rotate freely in the second direction. When the moving channel 34 slides in the second direction, the part of the connecting part 354 near the tension spring 356 rotates, reducing the deformation of the tension spring 356 and thus preventing its deformation.

[0049] The bellows 4 passes through the first and second through holes and is sealed between the third through hole and the inlet / outlet 21 of the vacuum chamber 2. The bellows 4 has good flexibility; when the moving channel 34 is displaced, the bellows 4 deforms while maintaining a sealed connection between the moving channel 34 and the vacuum chamber 2. The radius of the inner wall of the bellows 4 is any value between 2cm and 10cm, for example, any value among 2cm, 4cm, 6cm, 8cm, and 10cm, facilitating the passage of large-diameter wafers. In this embodiment, the radius of the inner wall of the bellows 4 is 9cm.

[0050] The rotating assembly 5 comprises a rotating part 51, a transmission structure and a rotating power part 52. The rotating part 51 is configured as a circular ring with open ends and is rotatably connected to the bearing end 341 of the moving channel 34. The side wall of the bearing end 341 of the moving channel 34 is provided with two gas channels 342 that communicate inside and outside the rotating part 51 and extend towards the outside of the rotating part 51. The gas channels 342 are used to connect the vacuum pump, so that the vacuum pump communicates with the connection between the moving channel 34 and the rotating part 51, preventing air leakage at the connection between the moving channel 34 and the rotating part 51 from causing insufficient vacuum in the vacuum chamber 2. The continuous operation of the vacuum pump helps to maintain an ultra-high vacuum state in the vacuum chamber 2. The rotating power part 52 is a servo motor fixedly connected to the outer wall of the bearing end 341 of the moving channel 34. The transmission structure comprises a synchronous wheel and a direction changing structure, and the synchronous wheel and the rotating part 51 are configured as mutually cooperating external gear structures. The rotating part 51 and the synchronous wheel are parallel to each other and mesh with each other, and the motor shaft of the rotating power part 52 is controllably rotated to drive the synchronous wheel to controllably rotate, thereby driving the rotating part 51 to controllably rotate.

[0051] The sample feeding assembly 1 comprises a bearing rod 11, a sample table and a sample feeding flange 12. The bearing rod 11 is configured as a hollow straight pipe structure with opposite cooling ends 111 and communication ends 112. The cooling ends 111 of the bearing rod 11 communicate with the inside of the sample table, and the communication ends 112 are provided with a liquid nitrogen inlet 113 and a gas outlet 114. Liquid nitrogen enters the bearing rod 11 from the liquid nitrogen inlet 113 and flows into the inside of the sample table, achieving cooling of the sample table. The nitrogen gas formed by the gasification of the liquid nitrogen exits the bearing rod 11 from the gas outlet 114. The sample feeding flange 12 is fixedly sleeved between the cooling ends 111 and the communication ends 112 of the bearing rod 11. The sample table is made of metal and serves to bear and fix the sample. The bottom of the sample table is fixedly connected with an electronic emitter that is electrically connected with the heating interface 343. In a vacuum environment, the electronic emitter and the metal sample table together form an electron bombardment heater for heating the sample table and can achieve a high heating temperature. The sample table is provided with a temperature sensor on the surface that abuts the sample. The temperature sensor is electrically connected with the temperature sensing interface and is used to detect the temperature of the sample. The bearing rod 11 arranged in the first direction supports the sample table to sequentially pass through the rotating part 51, the moving channel 34 and the bellows 4 into the vacuum chamber 2 in the first direction, at which time the position of the sample feeding flange 12 is matched with the end of the rotating part 51 away from the moving channel 34. The sample feeding flange 12 is detachably and airtightly connected with the rotating part 51 through a nut, forming a sealed chamber. At this time, the relative position of the sample table and the rotating part 51 is fixed, the sample table is flipped with the rotation of the rotating part 51, and the sample table is displaced with the movement of the moving channel 34.

[0052] In the utility model, through setting displacement mechanism 3 and rotating assembly 5, the position and direction of sample table relative to vacuum cavity 2 can be changed conveniently.Through setting gas passage 342 of external vacuum pump, gas leakage caused by rotating connection is prevented, and the ultra-high vacuum environment in vacuum cavity 2 is protected.Through setting heater and temperature sensor, and bearing rod 11 is structured as liquid nitrogen passage, the sample temperature is regulated and controlled.Through auxiliary supporting assembly 35, the bearing capacity is improved, the mechanical wear caused by large total weight of equipment is reduced, and the whole has higher practicability.

[0053] The technical features of the above-described embodiments can be combined arbitrarily, and to make the description simple, all possible combinations of the technical features in the above-described embodiments are not described, however, as long as the combinations of the technical features do not exist contradictory, they should be considered as the scope of the present application.

[0054] The above-described embodiments only express several implementation manners of the utility model, the description is more specific and detailed, but it should not be understood as the limitation of the utility model patent scope. It should be pointed out that for ordinary skilled in the art, on the premise of not departing from the utility model concept, a number of modifications and improvements can be made, which belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent should be subject to the appended claims.

Claims

1. An ultrahigh vacuum system, characterized in that, The application relates to a sample injection device, which comprises the following components: a sample injection assembly (1) comprising a carrier rod (11) arranged along a first direction, a sample table connected to the carrier rod (11) and used for carrying a sample, and a sample injection flange (12) sleeved on the carrier rod (11) and fixedly connected to the carrier rod (11); a vacuum cavity (2) having an entrance (21) for the sample table to enter and exit along the first direction and used for providing an ultrahigh vacuum environment; a displacement mechanism (3) comprising a movable channel (34) which is controllably displaced and through which the sample table passes along the first direction, and the movable channel (34) has a carrying end (341) at one end away from the vacuum cavity (2); a bellows (4) which is sealingly connected to the entrance (21) of the vacuum cavity (2) and the carrying end (341) of the movable channel (34) at two ends respectively and is matched with the sample table; a rotating assembly (5) comprising a rotating member (51) and a rotating power member (52), the rotating member (51) is in the form of a cylindrical structure with two open ends and is used for the sample table to pass along the first direction, one end of the rotating member (51) is rotationally connected to the carrying end (341) of the movable channel (34), the other end is detachably connected to the sample injection flange (12) of the sample injection assembly (1), and the rotating member (51) is sealingly connected to the sample injection flange (12), a gas channel (342) is arranged on the outer wall of the carrying end (341) of the movable channel (34) and is connected to the inside and outside of the rotating member (51), the gas channel (342) is used for connecting a vacuum pump, and the rotating power member (52) is used for controllably rotating the rotating member (51) relative to the movable channel (34). A heater is arranged in the vacuum cavity (2), a heating interface (343) is arranged on the outer wall of the movable channel (34) and is electrically connected to the heater and used for heating the sample carried on the sample table. The heater is an electron bombardment heater, and the heater is connected to the sample table. The carrier rod (11) is in the form of a hollow tubular structure and has a cooling end (111) connected to the inside of the sample table and a connecting end (112) opposite to the cooling end (111), the connecting end (112) is provided with a liquid nitrogen inlet (113) and an air outlet (114), and the sample injection flange (12) is connected between the cooling end (111) and the connecting end (112) of the carrier rod (11). A temperature sensor is arranged on the sample table, and a temperature sensing interface electrically connected to the temperature sensor is arranged on the outer wall of the movable channel (34). A plurality of reserved interfaces (344) are arranged on the outer wall of the movable channel (34), the reserved interfaces (344) are controllably closed and are connected to the inside of the movable channel (34).

2. The ultrahigh vacuum system of claim 1, wherein, ​ 3. The ultrahigh vacuum system of claim 2, wherein, ​ 4. The ultrahigh vacuum system of claim 1, wherein, ​ 5. Ultra-high vacuum system according to any one of claims 2 to 4, characterized in that ​ 6. The ultrahigh vacuum system of claim 1, wherein, ​ 7. The ultrahigh vacuum system of claim 1, wherein, The rotating component (5) further comprises a synchronous wheel connected to the rotating power element (52), the bearing end (341) is configured as a circular ring, the rotating power element (52) is connected to the outer wall of the bearing end (341) of the moving channel (34), drives the synchronous wheel to controllably rotate along the direction parallel to the bearing end (341), and the outer wall of the rotating element (51) is configured as an external gear shape matched with the external gear of the synchronous wheel and is in meshing connection with the synchronous wheel.

8. The ultrahigh vacuum system of claim 1, wherein, The displacement mechanism (3) comprises a first displacement component, a second displacement component and a third displacement component, the first displacement component comprises a first track (311) arranged along the first direction, a first sliding plate (312) slidingly connected to the first track (311) and a first power element (313) for driving the first sliding plate (312) to controllably slide along the first track (311), the first track (311) is transversely arranged and the first sliding plate (312) is supported on the first track (311), the second displacement component comprises a second sliding plate (321) slidingly connected to the first sliding plate (312) and a second power element (322) for driving the second sliding plate (321) to controllably slide along a second direction, the transverse second direction is parallel to the first sliding plate (312), and the second sliding plate (321) is parallel to the first sliding plate (312), the third displacement component comprises a third sliding plate (331) slidingly connected to the second sliding plate (321) and a third power element (332) for driving the third sliding plate (331) to controllably slide along a third direction, the longitudinal third direction is parallel to the first sliding plate (312), and the third sliding plate (331) is parallel to the first sliding plate (312), the moving channel (34) is connected to the middle part of the third sliding plate (331), and the middle parts of the first sliding plate (312) and the second sliding plate (321) are both provided with through holes for the bellows (4) to pass through.

9. The ultrahigh vacuum system of claim 8, wherein, The displacement mechanism (3) further comprises an auxiliary support assembly (35), the auxiliary support assembly (35) comprises an auxiliary track (351) matched with the first track (311), a counterweight (352) and a tension spring (356), the auxiliary track (351) is arranged on the side of the third sliding plate (331) away from the first track (311), the counterweight (352) is configured as a symmetrical structure, comprising a support part (353) and a connecting part (354), the middle part of the support part (353) is slidingly connected with and supported on the auxiliary track (351), the two ends of the support part (353) are respectively connected with two identical connecting parts (354), and the connecting parts (354) are arranged on the side of the support part (353) close to the first track (311), and the two tension springs (356) are respectively connected between the ends of the connecting parts (354) away from the support part (353) and the bearing end (341) of the moving channel (34), for supporting the moving channel (34).

10. The ultrahigh vacuum system of claim 9, wherein, The connecting part (354) of the counterweight (352) is provided with a rotating structure (355) in the middle part, for allowing the part of the connecting part (354) close to the tension spring (356) to freely rotate in a plane parallel to the first sliding plate (312).

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