Positioning and guiding device for cover part of mask box

Abstract

The utility model discloses a positioning and guiding device for a cover part of a mask plate, which relates to the technical field of semiconductor manufacturing, and comprises a box body, a box cover, two positioning components, a guide rod and an insertion hole, the box cover is arranged above the box body, and the two positioning components are both arranged between the box body and the box cover. Through the box body, the box cover, the positioning assembly, the guide rod and the insertion hole, when the box cover is closed, the guide rod is aligned with the insertion hole and inserted into the insertion hole, preliminary positioning is carried out, rapid alignment of the box cover and the box body is achieved, dislocation is avoided when the box cover and the box body are closed, meanwhile, a sliding column can be inserted into a positioning cylinder, and a clamping column enters a clamping groove; then the sliding column is pressed to compress the spring through the limiting plate, then the sliding column is rotated, the sliding column is loosened after the clamping column moves to the groove of the clamping groove, the sliding column is driven to move upwards through the elastic force of the spring, the clamping column is clamped to the groove of the clamping groove, and positioning and fixing of the box cover and the box body can be completed.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, specifically a positioning and guiding device for the cover of a photomask. Background Technology

[0002] In the photolithography process of chip manufacturing, photomasks play a crucial role. They are used to accurately transfer circuit patterns onto wafers, which determines the final performance and quality of the chip. Since the photolithography process requires the use of a large number of photomasks with different patterns, photomask cassette devices are important tools for storing and transporting these photomasks. Their performance is directly related to whether the photomasks can be properly protected and managed.

[0003] However, existing photomask boxes have significant drawbacks in practical use. They lack necessary positioning and guiding components, making it difficult to ensure that the lid accurately covers the box body. They also make it difficult to quickly align the lid with the box body, leading to misalignment. Furthermore, even after alignment, it is not easy to quickly position and fix the lid, thus failing to ensure that the lid can stably cover the box body, thereby reducing the protective effect on the photomask. To address these issues, we provide a photomask box lid positioning and guiding device. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the existing technology and provide a positioning and guiding device for the cover of a mask box.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a mask box lid positioning and guiding device, comprising a box body, a box lid, positioning components, guide rods, and insertion holes. The box lid is disposed above the box body. There are two positioning components, both of which are installed between the box body and the box lid. There are four guide rods, each rectangularly distributed on the bottom surface of the box lid. There are four insertion holes, each rectangularly formed on the upper surface of the box body. The four guide rods are respectively adapted to the four insertion holes. The positioning component includes a fixing block and a positioning cylinder. The fixing block is fixedly connected to the side surface of the box lid, and the positioning cylinder is fixedly connected to the side surface of the box body. The positioning cylinder corresponds to the fixing block. A sliding column is slidably connected inside the fixing block, and the upper and lower ends of the sliding column extend to the top and bottom of the positioning cylinder, respectively.

[0006] Furthermore, a limiting plate is fixedly connected to the outer surface of the sliding column inside the positioning cylinder, and a spring is fixedly connected to the bottom surface of the limiting plate. The spring is sleeved on the outer surface of the sliding column, and a snap-fit ​​post is fixedly connected to the outer surface of the sliding column below the positioning cylinder. A snap-fit ​​groove is opened on the outer surface of the positioning cylinder, and the snap-fit ​​groove is adapted to the snap-fit ​​post.

[0007] Furthermore, a clamping assembly is installed inside the box, and a placement plate is fixedly connected to the inner wall of the box, with the placement plate located above the clamping assembly.

[0008] Furthermore, the clamping assembly includes a knob disposed on the front side of the box body. A rotating rod is fixedly connected to the side of the knob near the box body. The rotating rod is rotatably connected to the front side of the box body, and the end of the rotating rod away from the knob extends to the inner side of the box body. A bidirectional lead screw is fixedly connected to the end of the rotating rod away from the knob, and the end of the bidirectional lead screw away from the rotating rod is rotatably connected to the inner wall of the box body.

[0009] Furthermore, the outer surface of the bidirectional lead screw is threaded with two U-shaped blocks, which are symmetrically distributed. The inner wall of the box is fixedly connected with two limiting slide rods, which are symmetrically distributed on the left and right sides of the bidirectional lead screw. The two U-shaped blocks are slidably connected to the two limiting slide rods. The upper surface of the placement plate is provided with four through slots. The tops of the two U-shaped blocks pass through the four through slots and extend to the top of the placement plate. The tops of the two U-shaped blocks are fixedly connected with clamping blocks.

[0010] Furthermore, a sealing groove is provided on the top of the box body, and a sealing gasket is fixedly connected to the bottom surface of the box cover, the sealing gasket being adapted to the sealing groove.

[0011] Compared with existing technologies, this mask box cover positioning and guiding device has the following advantages:

[0012] This invention utilizes a box body, a lid, a positioning component, a guide rod, and an insertion hole. When the lid is closed, the guide rod is aligned with the insertion hole and inserted for initial positioning, achieving rapid alignment between the lid and the box body and preventing misalignment when the lid and box body are closed. Simultaneously, a sliding column inserts into the positioning cylinder, and a locking pin enters the locking groove. Pressing the sliding column compresses the spring through the limiting plate, and then rotating the sliding column moves the locking pin to the groove of the locking groove. Releasing the sliding column allows the spring force to move the sliding column upward, locking the locking pin into the groove of the locking groove, thus completing the positioning and fixing of the lid and the box body. This design, through the cooperation of the guide rod and the insertion hole, guides the lid for rapid positioning when it is closed, and the positioning component allows the lid to be positioned and fixed stably to the box body.

[0013] This invention utilizes the cooperation of a clamping assembly, a placement plate, a through groove, a sealing groove, and a sealing pad to place the mask on the placement plate. Then, by rotating a knob, the two clamping blocks can be moved closer or further apart in conjunction with a rotating rod, a two-way lead screw, a limiting slide rod, a through groove, and a U-shaped block. This allows for stable clamping of the mask according to its size, ensuring that the mask will not shake or shift inside the box during transportation. The combined design of the sealing groove and the sealing pad greatly improves the sealing performance between the box lid and the box body. Attached Figure Description

[0014] Fig. 1 This is a three-dimensional front view structural diagram of the present invention.

[0015] Fig. 2 This is a three-dimensional structural diagram of the positioning component of this utility model.

[0016] Fig. 3 This is a cross-sectional view of the installation structure of the box body and clamping components of this utility model.

[0017] Fig. 4 This is a three-dimensional structural diagram of the clamping component of this utility model.

[0018] Fig. 5 This is a bottom view of the box lid of this utility model.

[0019] In the diagram: 1. Box body; 2. Box lid; 3. Positioning assembly; 301. Fixing block; 302. Positioning cylinder; 303. Sliding column; 304. Limiting plate; 305. Spring; 306. Snap-fit ​​column; 307. Snap-fit ​​groove; 4. Guide rod; 5. Insertion hole; 6. Clamping assembly; 601. Knob; 602. Rotating rod; 603. Two-way lead screw; 604. U-shaped block; 605. Limiting slide rod; 606. Clamping block; 7. Placement plate; 8. Through groove; 9. Sealing groove; 10. Sealing pad. Detailed Implementation

[0020] The principles and features of this utility model are described below with reference to the accompanying drawings. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.

[0021] This embodiment provides a mask box lid positioning and guiding device. As an important tool for storing and transporting mask plates, this device can properly protect and manage the mask plates. Furthermore, through the cooperation of the guide rod 4 and the insertion hole 5, the device can guide the mask plate when the lid 2 is closed to achieve rapid positioning. The positioning component 3 enables the lid 2 to be positioned and fixed, so that it is stably fixed on the box body 1.

[0022] See Figs. 1-5A mask box lid positioning and guiding device includes a box body 1, a box lid 2, a positioning component 3, guide rods 4, and insertion holes 5. The box lid 2 is positioned above the box body 1. There are two positioning components 3, both of which are installed between the box body 1 and the box lid 2. There are four guide rods 4, which are rectangularly distributed on the bottom surface of the box lid 2. There are four insertion holes 5, which are rectangularly formed on the upper surface of the box body 1. The four guide rods 4 are respectively adapted to the four insertion holes 5. The positioning component 3 includes a fixing block 301 and a positioning cylinder 302. The fixing block 301 is fixedly connected to the side surface of the box lid 2, and the positioning cylinder 302 is fixedly connected to the side surface of the box body 1. The positioning cylinder 302 corresponds to the fixing block 301. A sliding column 303 is slidably connected inside the fixing block 301. The upper and lower ends of the sliding column 303 extend to the upper and lower parts of the positioning cylinder 302, respectively.

[0023] There are two positioning components 3, both installed between the box body 1 and the box cover 2, and they are symmetrically distributed. There are four guide rods 4, which are rectangularly distributed on the bottom surface of the box cover 2. There are also four insertion holes 5, which are rectangularly opened on the upper surface of the box body 1. The insertion holes 5 and the guide rods 4 can accurately guide the box cover 2 when it is closed and prevent it from shaking. The positioning component 3 includes a fixing block 301 and a positioning cylinder 302. The fixing block 301 is fixed to the side surface of the box cover 2, and the positioning cylinder 302 is fixed to the side surface of the box body 1 and corresponds to the position of the fixing block 301. The sliding column 303 can slide up and down and rotate left and right inside the fixing block 301, and the lower end of the sliding column 303 can be inserted into the inside of the positioning cylinder 302.

[0024] A limiting plate 304 is fixedly connected to the outer surface of the sliding column 303 inside the positioning cylinder 302. A spring 305 is fixedly connected to the bottom surface of the limiting plate 304. The spring 305 is sleeved on the outer surface of the sliding column 303. A snap-fit ​​post 306 is fixedly connected to the outer surface of the sliding column 303 below the positioning cylinder 302. A snap-fit ​​groove 307 is opened on the outer surface of the positioning cylinder 302. The snap-fit ​​groove 307 is adapted to the snap-fit ​​post 306.

[0025] The sliding column 303 is located inside the positioning cylinder 302. The outer surface of the sliding column 303 is fixedly connected to the limiting plate 304. When the sliding column 303 is pressed, the limiting plate 304 can compress the spring 305. The spring 305 can provide sufficient restoring force in the future. The outer surface of the sliding column 303 is fixedly connected to the snap-fit ​​column 306, which is adapted to the snap-fit ​​groove 307 opened on the outer surface of the positioning cylinder 302. When the snap-fit ​​column 306 enters the snap-fit ​​groove 307, the sliding column 303 is rotated so that the snap-fit ​​column 306 is in the groove of the snap-fit ​​groove 307. After the sliding column 303 is released, under the elastic force of the spring 305, the limiting plate 304 can drive the sliding column 303 to move upward, so that the snap-fit ​​column 306 is stably snapped into the snap-fit ​​groove 307, thereby positioning and fixing the box body 1 and the box cover 2.

[0026] The box 1 is equipped with a clamping assembly 6, and a placement plate 7 is fixedly connected to the inner wall of the box 1. The placement plate 7 is located above the clamping assembly 6.

[0027] The clamping component 6 can clamp and fix the mask placed on the placement plate 7 to prevent the mask from shaking inside the box 1.

[0028] The clamping assembly 6 includes a knob 601, which is located on the front side of the box body 1. A rotating rod 602 is fixedly connected to the side of the knob 601 near the box body 1. The rotating rod 602 is rotatably connected to the front side of the box body 1, and the end of the rotating rod 602 away from the knob 601 extends to the inside of the box body 1. A bidirectional lead screw 603 is fixedly connected to the end of the rotating rod 602 away from the knob 601. The end of the bidirectional lead screw 603 away from the rotating rod 602 is rotatably connected to the inner wall of the box body 1.

[0029] The knob 601 is fixedly connected to the rotating rod 602. Rotating the knob 601 can drive the rotating rod 602 and the bidirectional lead screw 603 to rotate.

[0030] The outer surface of the bidirectional lead screw 603 is threaded with two U-shaped blocks 604, which are symmetrically distributed. The inner wall of the box 1 is fixedly connected with two limiting slide rods 605, which are symmetrically distributed on the left and right sides of the bidirectional lead screw 603. The two U-shaped blocks 604 are slidably connected to the two limiting slide rods 605. The upper surface of the placement plate 7 is provided with four through slots 8. The tops of the two U-shaped blocks 604 pass through the four through slots 8 and extend to the top of the placement plate 7. The tops of the two U-shaped blocks 604 are fixedly connected with clamping blocks 606.

[0031] The outer surface of the bidirectional lead screw 603 is threaded with two U-shaped blocks 604, which are symmetrically distributed. Two limiting slide rods 605 limit and guide the two U-shaped blocks 604, so that the two U-shaped blocks 604 can only move along the axial direction of the limiting slide rods 605. The four through slots 8 on the upper surface of the placement plate 7 are adapted to the size of the top of the U-shaped blocks 604, ensuring that the top of the two U-shaped blocks 604 can pass smoothly into the four through slots 8 and extend to the top of the placement plate 7. This facilitates the movement of the two clamping blocks 606 closer or further apart, so as to stably clamp them according to the size of the mask.

[0032] The top of the box body 1 is provided with a sealing groove 9, and the bottom surface of the box cover 2 is fixedly connected with a sealing pad 10, which is adapted to the sealing groove 9.

[0033] The top of the box body 1 is provided with a sealing groove 9. The depth and width of the sealing groove 9 are designed according to the size of the sealing pad 10. The sealing pad 10 is adapted to the sealing groove 9. The sealing pad 10 is made of rubber and has good elasticity and sealing performance. When the box lid 2 is accurately closed on the box body 1, the sealing pad 10 can be tightly embedded in the sealing groove 9, effectively preventing external dust, moisture and other pollutants from entering the interior of the box body 1.

[0034] Working principle: In use, the mask is placed on the placement plate 7 inside the box 1. Then, the knob 601 in the clamping assembly 6 is rotated, which drives the rotating rod 602 and the bidirectional lead screw 603 to rotate. The outer surface of the bidirectional lead screw 603 is threaded with two symmetrically distributed U-shaped blocks 604, and the two U-shaped blocks 604 are limited by two limiting slide rods 605. Therefore, when the bidirectional lead screw 603 rotates, the two U-shaped blocks 604 will move closer or further away from each other along the axial direction of the limiting slide rods 605, thereby driving the two clamping blocks 606 to move in the four through slots 8 to stably clamp the mask. When the box cover 2 is closed, the guide rod 4 on the bottom surface of the box cover 2 is aligned with the insertion hole 5 on the upper surface of the box 1. As the box cover 2 moves down, the guide rod 4 is gradually inserted into the insertion hole 5. Through the cooperation between the guide rod 4 and the insertion hole 5, the mask is clamped. When the lid 2 is closed, it is guided to achieve quick positioning. At the same time, the sliding post 303 in the fixing block 301 is inserted into the positioning cylinder 302, and the locking post 306 moves into the locking groove 307. Then, the sliding post 303 is pressed, which drives the limiting plate 304 to press the spring 305 downward. At the same time, the sliding post 303 and the locking post 306 move downward. Then, the sliding post 303 is rotated, so that the locking post 306 moves to the groove of the locking groove 307. Then, the sliding post 303 is released. Under the elastic force of the spring 305, the limiting plate 304 drives the sliding post 303 to move upward, so that the locking post 306 is locked in the groove of the locking groove 307. Then, the positioning and fixing of the lid 2 and the box body 1 are completed. The design of the sealing groove 9 and the sealing gasket 10 improves the sealing between the lid 2 and the box body 1 after they are closed.

[0035] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A mask box cover positioning guide device, comprising a box body (1), a box cover (2), a positioning assembly (3), a guide rod (4) and a jack (5), characterized in that: The box cover (2) is arranged above the box body (1), the positioning assembly (3) is two, the two positioning assemblies (3) are installed between the box body (1) and the box cover (2), the guide rod (4) is four and is distributed in the bottom surface of the box cover (2) in a rectangular shape, the jack (5) is four and is opened in the upper surface of the box body (1) in a rectangular shape, four guide rods (4) are matched with four jacks (5) respectively, the positioning assembly (3) includes a fixed block (301) and a positioning cylinder (302), the fixed block (301) is fixedly connected to the side surface of the box cover (2), the positioning cylinder (302) is fixedly connected to the side surface of the box body (1), the positioning cylinder (302) corresponds to the fixed block (301), the inside of the fixed block (301) is slidably connected with a slide column (303), the upper and lower ends of the slide column (303) extend above and below the positioning cylinder (302) respectively.

2. The mask cassette cover positioning guide of claim 1, wherein: The outer surface of the slide column (303) in the positioning cylinder (302) is fixedly connected with a limiting plate (304), the bottom surface of the limiting plate (304) is fixedly connected with a spring (305), the spring (305) is sleeved on the outer surface of the slide column (303), the outer surface of the slide column (303) below the positioning cylinder (302) is fixedly connected with a clamping column (306), the outer surface of the positioning cylinder (302) is provided with a clamping groove (307), and the clamping groove (307) is matched with the clamping column (306).

3. The mask cassette cover positioning guide of claim 1, wherein: The inside of the box body (1) is provided with a clamping assembly (6), the inner wall of the box body (1) is fixedly connected with a placing plate (7), and the placing plate (7) is located above the clamping assembly (6).

4. The mask cassette cover positioning guide of claim 3, wherein: The clamping assembly (6) includes a knob (601), the knob (601) is arranged on the front side of the box body (1), the knob (601) is fixedly connected with a rotating rod (602) close to the side surface of the box body (1), the rotating rod (602) is rotatably connected with the front side of the box body (1), and one end of the rotating rod (602) away from the knob (601) extends to the inside of the box body (1), the one end of the rotating rod (602) away from the knob (601) is fixedly connected with a bidirectional screw rod (603), and the one end of the bidirectional screw rod (603) away from the rotating rod (602) is rotatably connected to the inner wall of the box body (1).

5. The mask cassette cover positioning guide of claim 4, wherein: The outer surface of the bidirectional screw rod (603) is threadedly connected with two U-shaped blocks (604), and the two U-shaped blocks (604) are symmetrically distributed, the inner wall of the box body (1) is fixedly connected with two limiting slide rods (605), the two limiting slide rods (605) are symmetrically distributed on the left and right sides of the bidirectional screw rod (603), the two U-shaped blocks (604) are slidably connected with the two limiting slide rods (605), the upper surface of the placing plate (7) is provided with four through grooves (8), the tops of the two U-shaped blocks (604) are respectively arranged in the inside of the four through grooves (8) and extend above the placing plate (7), and the tops of the two U-shaped blocks (604) are fixedly connected with clamping blocks (606).

6. The mask cassette cover positioning guide of claim 1, wherein: The top of the box (1) is provided with a sealing groove (9), the bottom surface of the box cover (2) is fixedly connected with a sealing soft pad (10), and the sealing soft pad (10) is matched with the sealing groove (9).

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