Novel piezoelectric actuating structure, piezoelectric ceramic and semiconductor device

Abstract

The utility model discloses a novel piezoelectric actuating structure, piezoelectric ceramic and a semiconductor device. The utility model relates to the technical field of piezoelectric effect. The device is mainly composed of a piezoelectric ceramic actuating stack 2, a fastening end 1 and a fastening assembly. The piezoelectric ceramic actuating stack 2 serves as a core component and is responsible for converting electric energy into mechanical energy, and precise movement is achieved. And the fastening end 1 is tightly connected with the telescopic end of the actuating stack 2 through a fastening assembly, so that firm combination between the fastening end 1 and the actuating stack 2 is ensured. The fastening device is characterized in that the fastening end 1 and the actuating stack 2 are connected in the axial direction, that is, the direction of the fastening force is parallel to the axis of the actuating stack 2; according to the novel piezoelectric actuating structure provided by the utility model, through the design of the elastic piece (the disc spring) and the fastening piece (the jackscrews which are arranged in an annular array mode), an unnecessary horizontal rotating force is avoided while an enough pre-tightening force is applied to the piezoelectric ceramic stacking structure. The motion precision and stability of the actuator are greatly improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to piezoelectric effect technical field, specifically piezoelectric drive technical field, especially a new piezoelectric drive structure, piezoelectric ceramic and semiconductor device. BACKGROUND

[0002] As a core component in the field of precision motion control, piezoelectric ceramic actuators work based on the unique physical phenomenon of piezoelectric effect. Piezoelectric effect refers to the relative displacement of positive and negative charge centers within certain crystal materials (such as piezoelectric ceramics) when subjected to external forces, resulting in a potential difference. Conversely, when an electric field is applied to these materials, they will deform. It is this characteristic that enables piezoelectric ceramic actuators to achieve precise movement within a very small range under the action of an electric field.

[0003] In precision motion applications, piezoelectric ceramic actuators are highly favored due to their high resolution, fast response, and lack of electromagnetic interference. However, the deformation of a single piezoelectric ceramic sheet is usually very small, making it difficult to meet the demand for larger travel in practical applications. Therefore, engineers have adopted the technology of piezoelectric ceramic stacking (i.e. multiple piezoelectric ceramic sheets are bonded together with glue) to achieve the accumulation of deformation and functional improvement. This stacking structure not only increases the total deformation, but also improves the carrying capacity and stiffness of the actuator.

[0004] The document "Zhang Tao, Sun Lining, Cai Hegao. Basic characteristics of piezoelectric ceramics [J]. Optics and Precision Engineering, 1998 (5)" points out that multiple piezoelectric ceramics are combined together with glue to achieve functional improvement. Therefore, a pre-tightening force is required to make the piezoelectric ceramic stacking structure tight. The original piezoelectric actuator now makes changes to the way the pre-tightening force is provided by rotating the top down. In order to ensure the stability and reliability of the piezoelectric ceramic stacking structure during operation, it is necessary to apply appropriate pre-tightening force. The role of pre-tightening force is to eliminate the gap between the stacked sheets and ensure the tight contact between the sheets, so as to ensure that the electric field can uniformly act on each piezoelectric ceramic, realizing efficient electric energy-mechanical energy conversion.

[0005] Although pre-tightening force is crucial to the performance of piezoelectric ceramic stacking structure, the traditional pre-tightening force application method, such as the method of rotating the top down, has certain defects. This method usually applies pre-tightening force by rotating a screw or nut to press down the stacking structure. However, this rotating and pressing method inevitably brings a horizontal rotational force to the piezoelectric ceramic stacking structure while applying the pre-tightening force.

[0006] This non-axial horizontal force is an unfavorable factor for the stability of the piezoelectric ceramic stack structure. Because the piezoelectric ceramic material itself is brittle, and the glue layer in the stack structure may also be sheared and deformed or damaged due to uneven force. The existence of horizontal rotation force can exacerbate these adverse effects, causing uneven stress distribution inside the stack structure, and even causing cracks or delamination. In addition, the horizontal rotation force can also affect the motion accuracy and repeatability of the piezoelectric ceramic actuator. Because when the stack structure is subjected to non-axial force, its deformation behavior may become complex and unpredictable, thereby reducing the positioning accuracy and motion stability of the actuator.

[0007] [1] The document "Xu Liping. Design and analysis of flexible hinge for white light interferometer based on piezoelectric ceramic driving [D]. Fujian: Huaiqiao University, 2013" points out that precise linear motion requires piezoelectric ceramic actuators to be embedded in a guide device, usually a frictionless flexible hinge guide mechanism, which can achieve motion without hysteresis within a few millimeters of travel range. This mechanical guiding concept also combines force decoupling and preloading, and has no adverse effect on system stiffness.

[0008] [2] The document "Xiu Zhou. Piezoelectric ceramic (PZT) property test and analysis [J]. Kunming University of Science and Technology, 2005" points out that in piezoelectric ceramic actuators, flexible hinge guide mechanisms can achieve precise control of motion. Through the elastic deformation of the flexible hinge, the driving force generated by the piezoelectric ceramic is transmitted while maintaining the stiffness of the system. The flexible hinge relies on the relatively weak part in its mechanism to produce obvious elastic angular deformation under force (torque) to complete the transmission and conversion of motion or force.

[0009] Further, it can be determined that the technical problem to be solved at the present stage is how to avoid unnecessary horizontal rotation force to the piezoelectric ceramic stack structure while applying sufficient pre-tightening force, so as to ensure the long-term stability and high performance of the actuator.

[0010] Therefore, the utility model provides a new piezoelectric actuation structure, piezoelectric ceramic and semiconductor device. Utility model content

[0011] Therefore, the utility model hopes to provide a new piezoelectric actuation structure, piezoelectric ceramic and semiconductor device to solve or alleviate the technical problems existing in the prior art, that is, how to avoid unnecessary horizontal rotation force to the piezoelectric ceramic stack structure while applying sufficient pre-tightening force, so as to ensure the long-term stability and high performance of the actuator, and at least provide an advantageous selection for this. The technical scheme of the utility model is as follows:

[0012] Firstly, a new piezoelectric actuation structure:

[0013] The main components include a piezoelectric ceramic actuator stack 2, a fastening end 1, and a fastening assembly. The piezoelectric ceramic actuator stack 2 is the core component, responsible for converting electrical energy into mechanical energy to achieve precise movement. The fastening end 1 is connected to one end of the actuator stack 2 through the fastening assembly, ensuring a firm connection between the two. The key is that the connection between the fastening end 1 and the actuator stack 2 is along the axial direction, i.e., the direction of the fastening force is parallel to the axis of the actuator stack 2. In this way, when the external structural component (such as a load that needs to be pushed) is connected to the fastening end 1, its weight or other external forces will be transmitted along the axial direction, without generating horizontal rotational forces.

[0014] In one embodiment, the actuator stack 2 is manufactured using a laminated bonding and co-firing process. Specifically, piezoelectric ceramic sheets with a thickness of about 100 microns are selected as the basic unit, and these sheets are stacked layer by layer with alternating electrodes. During the stacking process, the mechanical deformation of each layer of piezoelectric ceramic sheets is accumulated through series connection, while the electrodes of each layer are connected in parallel to ensure that they can receive control signals simultaneously. In this way, a multi-layer piezoelectric ceramic structure with both mechanical series and electrical parallel characteristics is formed. The bottom of the actuator stack 2 is connected to a sheath 3.

[0015] In one embodiment, the fastening end 1 is composed of a telescopic part 103, a spring part 102, a fixed part 101, and a fastening part 104. The telescopic part 103 serves as a bridge connecting the actuator stack 2 and the external structural component, with the ability to stretch and contract within a certain range. The spring part 102 is sleeved inside the telescopic part 103, with one end abutting against the telescopic part 103 and the other end abutting against the fixed part 101. In this way, when the external structural component exerts force on the telescopic part 103, the spring part 102 will deform elastically, absorbing and buffering this part of the force, while driving the telescopic part 103 to perform elastic movement. The fastening part 104 is used to firmly connect one end of the telescopic part 103 to the end of the actuator stack 2 that stretches and contracts, ensuring tight fit and stable transmission between the two.

[0016] In one embodiment, the spring part 102 is preferably a disc spring. The disc spring is a flat spring with a special shape, with a conical or wavy cross-section, capable of producing large elastic deformation and storing energy when subjected to axial pressure. In the structure of the fastening end 1, the disc spring 102 is sleeved inside the telescopic part 103, with one end abutting against the telescopic part 103 and the other end abutting against the fixed part 101. In this way, when the external structural component exerts force on the telescopic part 103, the disc spring 102 will deform elastically, absorbing and buffering this part of the force, while driving the telescopic part 103 to perform elastic movement.

[0017] In one embodiment, the fastener 104 is designed as a ring array of top screws. These top screws are evenly distributed around the telescopic member 103, and the pressure on the elastic member 102 can be adjusted by rotating the top screws. The elastic member 102 (such as a disc spring) maintains a certain pre-tightening force after being pressed by the top screws, ensuring that the telescopic member 103 can stably perform elastic movement when subjected to external forces. Importantly, this design ensures that the rotating part (i.e., the rotating adjustment part of the top screws) does not directly contact the elastic member 102, thus avoiding horizontal rotational forces.

[0018] In a second aspect, a piezoelectric ceramic:

[0019] The piezoelectric ceramic adopts the new piezoelectric actuation structure as described above, which is placed in the housing 5. The housing 5 serves as a protective shell, providing not only structural support but also ensuring the stability and safety of the internal components. The telescopic member 103, as the output end of the new piezoelectric actuation structure, can slide and extend out of the housing 5, achieving direct interaction with the external environment. The fixed member 101 is fixed inside the housing 5, providing stable support and positioning for the telescopic member 103.

[0020] In a third aspect, a semiconductor device:

[0021] The semiconductor device adopts the piezoelectric ceramic as described above:

[0022] By integrating the piezoelectric ceramic into the semiconductor device, precise conversion and control of electrical signals and mechanical movements are achieved, making it possible for semiconductor devices to be used in precision positioning, micro-nano operations, sensors, and other fields.

[0023] Compared with the prior art, the utility model has the advantages of:

[0024] 1. High precision and stability: The new piezoelectric actuation structure provided by the utility model realizes the application of sufficient pre-tightening force to the piezoelectric ceramic stack structure while avoiding unnecessary horizontal rotational force through the design of the elastic member (disc spring) and the fastener (ring array of top screws). This greatly improves the movement precision and stability of the actuator, ensuring long-term high performance.

[0025] 2. Reliability and durability: The elastic member of the utility model has good elastic recovery force, which can maintain the original position of the telescopic member after multiple uses, reducing the risk of wear and fatigue. The design of the fastener ensures the long-term stability of the pre-tightening force, and even during long-term use, the performance and precision of the actuator can be maintained.

[0026] III. Flexibility and adjustability: The utility model discloses through adjusting the pressure of fastener (jackscrew), can flexibly change the size of pre-tightening force, to adapt to different application scenarios and demand.The modular design of the novel piezoelectric actuation structure makes it easy to integrate into various piezoelectric ceramics and semiconductor devices, improving the flexibility and scalability of the design. BRIEF DESCRIPTION OF DRAWINGS

[0027] In order to more clearly illustrate the technical scheme in the embodiments of the present application or the prior art, the drawings needed to be used in the embodiments or prior art description will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can also obtain other drawings according to these drawings without creative labor.

[0028] Figure 1 It is a three-dimensional structure schematic diagram of the utility model;

[0029] Figure 2 It is a three-dimensional half cut one perspective schematic diagram of the utility model;

[0030] Figure 3 It is a three-dimensional half cut another perspective schematic diagram of the utility model;

[0031] Figure 4 It is a half cut main perspective schematic diagram of the utility model;

[0032] Figure 5 It is a fixed end three-dimensional composition schematic diagram of the utility model;

[0033] Figure 6 It is an improved scheme schematic diagram of the second embodiment of the embodiment.

[0034] Reference signs: 1, fastening end; 101, fixing piece; 102, elastic piece; 103, telescopic piece; 104, fastener; 106, flat pad; 2, actuation stack; 3, sheath; 4, cable; 5, shell; 6, fixed end. DETAILED DESCRIPTION

[0035] In order to make the above-mentioned purpose, features and advantages of the utility model more obvious and easy to understand, the specific implementation of the utility model will be described in detail below. In the following description, a lot of specific details are set forth in order to fully understand the utility model. However, the utility model can be implemented in many other ways different from the description, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below;

[0036] Related term explanation:

[0037] (1) Actuated stack: piezoelectric stack, piezoelectric ceramic stack, stacked piezoelectric ceramic or stacked micro-displacement piezoelectric ceramic.

[0038] (2) Traditional horizontal rotational force: In traditional piezoelectric actuator structures, when a preload is applied or the structure is adjusted, a rotational force may be generated in the horizontal direction (i.e., the direction perpendicular to the main direction of movement of the piezoelectric ceramic stack structure). This horizontal rotational force may cause unnecessary mechanical stress on the piezoelectric ceramic stack structure, leading to wear, fatigue or decreased accuracy, thereby affecting the long-term stability and high performance of the actuator.

[0039] (3) Affected by external forces: This refers to the piezoelectric actuation structure being subjected to external forces or influences during operation. These external forces may come from loads, environmental vibrations, temperature changes, etc., during operation. External forces may cause deformation, displacement, or stress concentration in the piezoelectric actuation structure, thereby affecting its motion accuracy and stability. Therefore, when designing a piezoelectric actuation structure, it is necessary to consider how to effectively resist or absorb these external forces to maintain the stability and performance of the structure.

[0040] (4) Rotating Part: In the novel piezoelectric actuation structure, the rotating part refers to the rotatable portion of the fastener (a ring-shaped array of set screws) used to adjust the preload. By rotating this part, the pressure on the elastic element (disc spring) can be changed, thereby adjusting the magnitude of the preload. Importantly, this rotational action is designed not to be directly transmitted to the piezoelectric ceramic stack structure to avoid generating unnecessary horizontal rotational forces. The design of the rotating part makes the adjustment of the preload flexible and controllable, while protecting the piezoelectric ceramic stack structure from unnecessary mechanical stress.

[0041] Example 1: In the prior art, traditional methods of applying preload—such as top-rotation pressing—have certain drawbacks. This method typically applies preload by rotating a screw or nut to press down the stacked structure. However, this rotational pressing method, while applying preload, inevitably introduces a horizontal rotational force into the piezoelectric ceramic stacked structure; therefore, please refer to... Figures 1-5 This embodiment will provide a novel piezoelectric actuation structure to solve the above-mentioned technical problems:

[0042] The piezoelectric actuator structure comprises a piezoelectric ceramic material actuator stack 2 and a fastening end 1 fixed to one end of the actuator stack 2. In traditional piezoelectric actuator structures, the rotation and compression method can generate a horizontal rotation force in the piezoelectric ceramic stack inside the device, which can damage the stability of the actuator stack 2. The fastening end 1 is fixed to the actuator stack 2 by applying a fastening force parallel to the axial direction of the actuator stack 2, so that when the fastening end 1 is affected by external forces (such as the gravity of an external structure that the piezoelectric actuator structure needs to push), no horizontal rotation force is transmitted to the actuator stack 2.

[0043] Specifically, the principle of the piezoelectric actuator structure is to eliminate the influence of horizontal rotation force by axial fastening. In traditional structures, the rotation and compression method can generate a horizontal rotation force because the direction of the applied force is not consistent with the axis of the actuator stack. In the present structure, the connection between the fastening end 1 and the actuator stack 2 is axial, i.e. the direction of the fastening force is completely consistent with the axis of the actuator stack. Therefore, when external forces act on the fastening end 1, the force will be transmitted directly to the actuator stack 2 along the axial direction, without generating any horizontal component or rotation torque. In this way, the stability of the actuator stack 2 is effectively protected, and the movement accuracy and reliability are also improved.

[0044] It can be understood that in the technical solution provided in the embodiment, the piezoelectric actuator structure has significant advantages in function. First, by eliminating the horizontal rotation force, the stress concentration and potential damage inside the actuator stack 2 are reduced, prolonging its service life. Second, the axial fastening method makes the structure more compact and stable, improving the rigidity and anti-vibration ability of the entire actuation system. In addition, the structure also has good universality and adaptability, which can be easily connected and matched with various external structural components to meet the needs of different application scenarios. Therefore, the piezoelectric actuator structure has wide application prospects in the fields of precision motion control, micro-nano operation, precision machining, etc.

[0045] In the technical solution provided in the embodiment, please refer to Figures 2-5 : The piezoelectric ceramic thin sheets with a thickness of about 100 microns are connected by the electrode alternation method through the lamination bonding co-firing process, and each layer is mechanically connected in series and electrically connected in parallel. The bottom of the actuator stack 2 is connected with a sheath 3.

[0046] When subjected to mechanical stress, an electric field is generated, and vice versa, deformation occurs under the action of an electric field. The actuator stack 2 utilizes this principle to produce a slight expansion or contraction of the piezoelectric ceramic sheets by applying an electric field. Due to the superposition of the multi-layer structure, the displacement of the actuator stack 2 as a whole is significantly improved.

[0047] Specifically, the working principle of the actuation stack 2 is based on the piezoelectric effect. When subjected to mechanical stress, piezoelectric ceramic materials generate an electric field, and conversely, they deform under the action of an electric field. This effect is a unique physical property of piezoelectric ceramic materials and is the basis for the electro-mechanical conversion of the actuation stack 2. When an external electric field acts on the electrodes of the actuation stack 2, the electric field signal is rapidly transmitted to each layer of piezoelectric ceramic sheet through the parallel circuit, causing them to expand or contract slightly at almost the same time. Due to the superposition effect of the multi-layer structure, these small deformations are accumulated under mechanical series action, thereby forming a significant displacement of the actuation stack 2 as a whole.

[0048] It can be understood that in the technical solution provided in this embodiment, the actuation stack 2 in this embodiment has significant advantages in function. Through the lamination bonding co-firing process and the electrode alternating connection method, the perfect combination of mechanical series and circuit parallel is realized, which not only improves the compactness of the structure, but also ensures the uniform distribution of the electric field and the synchronicity of the deformation. Secondly, the superposition of the multi-layer structure significantly improves the overall displacement of the actuation stack 2, so that it can meet the precise motion control requirements of higher precision and larger stroke. In addition, the actuation stack 2 also has the advantages of fast response speed, low energy consumption, and no electromagnetic interference, so it has wide application prospects in the fields of micro-nano operation, precision machining, optical adjustment, etc.

[0049] In the technical solution provided in this embodiment, please refer to Figures 2-5 : The fastening end 1 includes a telescopic member 103 and an elastic member 102, the elastic member 102 is sleeved in the telescopic member 103 and abuts against a fixed member 101, realizing elastic movement of the telescopic member 103; one end of the telescopic member 103 is connected with one end of the actuation stack 2 through a fastening member 104.

[0050] Specifically, the working principle of the fastening end 1 is based on the elastic deformation of the elastic member and the telescopic ability of the telescopic member. When the external structural member exerts force on the telescopic member 103, this force will be transmitted to the elastic member 102 through the telescopic member 103. The elastic member 102 will deform elastically after being subjected to force, absorbing and buffering this part of force, while generating a counterforce to drive the telescopic member 103 to move elastically. Due to the presence of the elastic member 102, the telescopic member 103 can freely telescope within a certain range without causing excessive rigid impact or horizontal rotational force to the actuation stack 2. The fastening member 104 ensures the firm connection between the telescopic member 103 and the actuation stack 2, so that the deformation of the actuation stack 2 can be accurately transmitted to the telescopic member 103, thereby pushing the external structural member to move.

[0051] It can be understood that in the technical solution provided in the embodiment: through the buffering effect of the elastic member 102, the rigid impact of the external structural member on the actuation stack 2 is reduced, and the stability and service life of the actuation stack 2 are protected. Secondly, the telescopic ability of the telescopic member 103 enables the fastening end 1 to adapt to the precise motion control requirements of different strokes, thereby improving the flexibility and adaptability of the entire actuation system. In addition, the firm connection of the fastening member 104 ensures the stable transmission between the actuation stack 2 and the telescopic member 103, thereby improving the precision and reliability of motion control.

[0052] In the technical solution provided in the embodiment, please refer to Figures 2-5 : the elastic member 102 is a disc spring.

[0053] Specifically: the principle of the disc spring as the elastic member 102 lies in its unique shape and elastic properties. The cross-sectional shape of the disc spring enables it to produce a large elastic deformation when subjected to axial pressure, without producing a large rigid impact. This deformation is controllable and can quickly recover to its original shape after the pressure is removed, storing and releasing energy. In the structure of the fastening end 1, the disc spring 102 absorbs and buffers the force exerted by the external structural member on the telescopic member 103 through its elastic deformation, while generating a counterforce to drive the telescopic member 103 to perform elastic motion. This design not only protects the actuation stack 2 from excessive impact, but also ensures the stability and precision of motion.

[0054] It can be understood that in the technical solution provided in the embodiment: the disc spring has a large elastic deformation ability and good recovery, which can effectively absorb and buffer the force exerted by the external structural member on the telescopic member 103, thereby protecting the stability and service life of the actuation stack 2. Secondly, the compact structure and light weight of the disc spring make the fastening end 1 more simple and efficient, thereby adapting to the requirement of compact structure for precise motion control. In addition, the reliability and durability of the disc spring also enable the fastening end 1 to maintain stable performance in long-term use, thereby improving the reliability and service life of the entire actuation system. Therefore, the disc spring as the elastic member 102 in the embodiment has a wide application prospect in the fields of precise motion control, micro / nano operation, and precision machining.

[0055] In the technical solution provided in the embodiment, please refer to Figures 2-5 : the fastening member 104 is a top screw arranged in a ring array to give pressure to the elastic member 102; for a piezoelectric actuation structure, the rotating part still exists but does not contact the elastic member 102, so there is no horizontal rotation force transmitted to the actuation stack 2.

[0056] Specifically: the principle of the top-screw as a fastener 104 lies in its uniform distribution and adjustable pressure characteristics. By rotating adjustment, the pressure on the elastic member 102 can be precisely controlled, ensuring that the telescopic member 103 can perform elastic movement as expected when subjected to external force. Since the rotating part does not directly contact the elastic member 102, the horizontal rotating force caused by the traditional structure of rotating downward pressure is avoided. This design effectively protects the actuation stack 2 from horizontal rotating force, improving its stability and life.

[0057] It needs to be further pointed out that the main function of the fastener 104 (top-screw) is to give the elastic member 102 (such as a disc spring) pressure, so as to realize the pre-tightening of the piezoelectric actuation stack 2. This pre-tightening force is crucial to ensure the stability and accuracy of the piezoelectric actuation stack 2 during movement. The top-screw adopts a ring array arrangement, which means that they are uniformly distributed around the elastic member 102, forming a stable support structure. This layout helps to evenly distribute the pre-tightening force and reduce local stress concentration. The top-screw as a fastener, its head or some parts are designed to be rotatable, so as to adjust the pre-tightening force. However, in this scheme, these rotating parts are ingeniously designed not to directly contact the elastic member 102. This isolation design ensures that when the top-screw rotates to adjust the pre-tightening force, the rotating force will not be directly transmitted to the elastic member 102, thereby avoiding the horizontal rotating force transmitted to the piezoelectric actuation stack 2.

[0058] When the top-screw rotates and presses downward, the pressure is transmitted to the elastic member 102 through the contact surface between the top-screw and the elastic member 102 (possibly through a special contact pad or structure). The elastic member 102 deforms after being subjected to pressure, thereby exerting pre-tightening force on the piezoelectric actuation stack 2. Since the rotating part does not directly contact the elastic member 102, the rotating force will not be transmitted to the piezoelectric actuation stack 2 along the pressure transmission path. This means that the piezoelectric actuation stack 2 only receives vertical pre-tightening force and is not affected by horizontal rotating force.

[0059] Meanwhile, in the piezoelectric actuation structure, the rotating part (such as the rotating part of the top wire arranged in a ring array) is designed not to be in direct contact with the elastic member 102. This means that any rotating force or torque generated by the rotating part cannot directly act on the elastic member 102. When the top wire is pressed down, the pressure is transmitted vertically to the elastic member 102 through the contact surface between the top wire and the elastic member 102 (possibly through a special contact pad or structure). The elastic member 102 deforms under pressure and in turn exerts a pre-tightening force on the piezoelectric actuation stack 2. Since the rotating part is not in direct contact with the elastic member 102, the rotating force cannot be transmitted to the elastic member 102 along the pressure transmission path, and further to the piezoelectric actuation stack 2. The top wire arranged in a ring array can uniformly distribute the pressure to the elastic member 102, reducing local stress concentration and improving the stability and reliability of the structure. This arrangement also helps to isolate the rotating force. Since the top wire is uniformly distributed, the rotating force cancels out in the horizontal direction and does not form a torque on the elastic member 102. In turn, by isolating the contact between the rotating part and the elastic member 102, the present scheme effectively avoids the influence of horizontal rotating force on the piezoelectric actuation stack 2, improving the stability and precision of the actuator.

[0060] It can be understood that in the technical scheme provided in the embodiment: the top wire arranged in a ring array is used as the fastener 104, which has significant advantages in function. First, the uniform distribution and adjustable pressure of the top wire make the elastic movement of the telescopic member 103 more stable and controllable, improving the accuracy and reliability of motion control. Second, the design of the rotating part not being in direct contact with the elastic member 102 effectively avoids the transmission of horizontal rotating force, protecting the stability and life of the actuation stack 2. In addition, this design also makes the installation and adjustment of the fastener 104 more convenient and flexible, adapting to the needs of different application scenarios.

[0061] In summary, to solve the problems in the related art, the present specific implementation is based on the new piezoelectric actuation structure, piezoelectric ceramic and semiconductor device provided above, and uses the following technical means or features to achieve the solution:

[0062] (1) Design of new piezoelectric actuation structure: The new piezoelectric actuation structure includes a telescopic member, an elastic member (such as a disc spring) and a fixed member. It allows sufficient pre-tightening force to be applied by adjusting the elastic member (such as by applying pressure through the top wire), ensuring that the piezoelectric ceramic stack structure maintains close contact during operation, thereby improving the efficiency of force transmission and response.

[0063] (2) Avoidance of horizontal rotational force transmission: The key lies in the design of the fastener (top screw arranged in a ring array). The top screw is used to give pressure to the elastic member, but its rotating part does not directly contact the elastic member. This means that when adjusting the pre-tightening force, the rotating action will not be directly transmitted to the piezoelectric ceramic stack structure, thereby avoiding unnecessary horizontal rotational force. In addition, the design of the telescopic member also plays a key role. It allows the deformation of the elastic member to absorb and buffer external forces while applying pre-tightening force, rather than transmitting these forces in the form of rotation to the piezoelectric ceramic stack structure.

[0064] (3) Long-term stability and high performance: Due to the avoidance of horizontal rotational force transmission, the piezoelectric ceramic stack structure is not subjected to unnecessary mechanical stress, thereby reducing the risk of wear and fatigue. The elastic member (disc spring) provides good elastic restoring force, ensuring that the telescopic member can return to its original position after multiple uses, maintaining the high precision and stability of the actuator. The reliability and durability of the fastener (top screw) also ensure the stability of the pre-tightening force in long-term use, further improving the long-term stability and performance of the actuator.

[0065] Example Three: Based on the new piezoelectric actuation structure provided in Example One, this embodiment further provides an improved scheme as shown in Figure 6

[0066] A flat pad 106 is provided between the fixed member 101, the top screw, and the disc spring to ensure uniform force distribution on the contact surface.

[0067] Example Three: Based on the new piezoelectric actuation structure provided in Example One, this embodiment further provides a piezoelectric ceramic:

[0068] The piezoelectric ceramic adopts the new piezoelectric actuation structure as described in Example One above, including a housing 5 in which the new piezoelectric actuation structure is placed. The housing 5 serves as a protective shell, not only providing structural support but also ensuring the stability and safety of the internal components. The telescopic member 103, as the output end of the new piezoelectric actuation structure, can slide and extend out of the housing 5, realizing direct interaction with the external environment. The fixed member 101 is fixed inside the housing 5, providing stable support and positioning for the telescopic member 103.

[0069] ​The bottom of the shell 5 is fixedly provided with a fixed end 6, which is designed to be connected and matched with the external environment. The fixed end 6 is provided with a connecting structure, such as a threaded hole, for connecting to the external environment or matching the external mechanism, so that the piezoelectric ceramic can be conveniently installed and fixed in various application scenarios. At the same time, the fixed end 6 is internally arranged with a cable 4, which is electrically connected with the actuation stack 2 in the new piezoelectric actuation structure, realizing the transmission and control of electrical signals. The piezoelectric ceramic adopts the new piezoelectric actuation structure and is integrated in the shell 5 and the fixed end 6, which has significant advantages in function. First, the high precision and stability of the new piezoelectric actuation structure ensure the precise motion control of the piezoelectric ceramic, meeting the needs of precision machining, micro-nano operation and other fields. Secondly, the design of the shell 5 and the fixed end 6 makes the piezoelectric ceramic easy to install and fix, adapting to the needs of different application scenarios.

[0070] Embodiment three: based on the piezoelectric ceramic provided in embodiment three, a semiconductor device is further provided:

[0071] By integrating the piezoelectric ceramic into the semiconductor device, precise conversion and control of electrical signals and mechanical motion are realized, making it possible for the semiconductor device to be applied in precision positioning, micro-nano operation, sensors and other fields.

[0072] In the semiconductor device, the piezoelectric ceramic mainly plays its precise motion control capability. For example, in precision positioning applications, the piezoelectric ceramic can realize small and precise displacement according to the change of electrical signals, thereby meeting the extremely high requirements of the semiconductor device on position accuracy. In micro-nano operation, the piezoelectric ceramic can drive micro-nano level mechanical structures to perform fine operations such as handling and assembly. In addition, the piezoelectric ceramic can also be used as a sensor element to convert mechanical changes into electrical signals, realizing the perception and monitoring of the external environment.

[0073] The high precision and stability of the piezoelectric ceramic ensure the precise motion and control of the semiconductor device, improving the performance and reliability of the device. Secondly, the piezoelectric ceramic has a fast response speed, which can realize fast electrical-mechanical conversion, adapting to the application requirements of high-speed and high-frequency semiconductor devices. In addition, the piezoelectric ceramic also has the advantages of small size, light weight and low energy consumption, making breakthroughs in the integration and miniaturization of semiconductor devices.

[0074] The above-described embodiments only express the implementation methods of the related actual applications of the present application, and the description is more specific and detailed, but it should not be understood as limiting the scope of the utility model patent. It should be noted that for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the protection scope of the utility model patent should be subject to the appended claims.

Claims

1. A novel piezoelectric actuation structure comprising an actuation stack (2) utilizing piezoelectric ceramic material, characterized in that, The application relates to a novel piezoelectric actuating structure. The fixed end (1) is fixedly connected with the actuating stack (2) by applying a fastening force parallel to the axial direction of the actuating stack (2), so that when the fixed end (1) is affected by external force, no horizontal rotating force is transmitted to the actuating stack (2).

2. The piezoelectric actuation structure of claim 1, wherein: The actuating stack (2) is formed by alternately connecting piezoelectric ceramic sheets through electrodes, and each layer is mechanically connected in series and connected in parallel in an electric circuit.

3. The piezoelectric actuation structure of claim 1, wherein: The fixed end (1) comprises a telescopic part (103) and an elastic part (102), the elastic part (102) is sleeved in the telescopic part (103) and abuts against a fixed part (101), so as to drive the telescopic part (103) to elastically move. One end of the telescopic part (103) is connected with one end of the actuating stack (2) through a fastener (104).

4. The piezoelectric actuation structure of claim 3, wherein: The elastic part (102) is a disc spring.

5. The piezoelectric actuation structure of claim 3, wherein: The fastener (104) is a top-screw actuating stack (2) arranged in a ring array and used for giving pressure to the elastic part (102).

6. The piezoelectric actuation structure of claim 5, wherein: The bottom of the actuating stack (2) is connected with a sheath (3).

7. Piezoelectric ceramic using the new piezoelectric actuator structure according to any one of claims 3 to 6, characterized in that: The novel piezoelectric actuating structure is arranged in a shell (5), and the telescopic part (103) can slide and extend out of the shell (5).

8. The piezoelectric ceramic according to claim 7, characterized by: The fixed part (101) is fixed in the shell (5).

9. The piezoelectric ceramic according to claim 7, characterized by: The bottom of the shell (5) is fixed with a fixed end (6), the fixed end (6) is provided with a connecting structure used for being connected with an external environment or matched with an external mechanism, a cable (4) is arranged in the fixed end (6), and the cable (4) is electrically connected with the actuating stack (2).

10. A semiconductor device, characterized by, The piezoelectric ceramic is adopted as claimed in any one of claims 7-9.

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