Sealing ring dismounting tool

Abstract

The utility model provides a tool for removing a sealing ring. The tool comprises a holding rod; the picking hook is located at the end of the holding rod, the picking hook comprises a connecting part and a picking part, the picking part is connected with the holding rod through the connecting part, and the extending direction of the picking part is different from the axial direction of the holding rod. The sealing ring dismantling tool is made of high polymer materials, has certain hardness, is enough to pick up the sealing ring, does not abrade the groove for installing the sealing ring, can effectively improve the efficiency of dismantling the sealing ring and protect equipment, particularly for a furnace tube machine table, the leakage rate is controlled, the sealing performance of the furnace tube machine table is ensured, and the service life of the furnace tube machine table is prolonged. And the environment of the inner cavity of the furnace tube machine meets the process requirements, and the product quality is ensured.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment tools, and in particular to a sealing ring removal tool. Background Technology

[0002] Semiconductor heat treatment equipment is a crucial process in integrated circuit manufacturing. A semiconductor furnace tube is a device used for heating and processing semiconductor materials. Its working principle utilizes resistance heating, introducing an inert gas inside the furnace tube to subject the semiconductor material to heat treatment, evaporation, and fusion processes at high temperatures. Semiconductor furnace tubes also feature excellent high-temperature uniformity, fast reaction rates, and high control precision.

[0003] Semiconductor furnace tubes are widely used in electronic component manufacturing and semiconductor processing. Common applications include semiconductor wafer growth and manufacturing, sintering and heat treatment of electronic components, and solar cell manufacturing. Semiconductor furnace tubes include atmospheric pressure furnace tubes and low-pressure furnace tubes. Low-pressure furnace tubes are a type of semiconductor furnace tube equipment that is beneficial for improving the fume deposition rate, featuring high temperature uniformity and low pollution. Low-pressure furnace tube equipment often uses sealing rings as the sealing structure of the furnace opening. The sealing performance of the sealing structure directly affects the leakage rate of the low-pressure furnace tube equipment. Low-pressure furnace tube equipment requires a vacuum-sealed environment during the process. Vacuum leakage will prevent the internal cavity of the low-pressure furnace tube equipment from reaching the vacuum level required by the process, thus affecting the electrical performance of the chip. This can lead to problems such as decreased operating speed, signal distortion, overheating, or even scrapping of the device, thereby reducing the overall chip performance and affecting the chip's reliability and quality. The challenge of low-pressure furnace tubes lies in the leakage rate, which must be as low as possible.

[0004] During the routine maintenance of low-pressure furnace tube machines, it is necessary to remove sealing rings from multiple locations on the machine. Due to space constraints and ambient temperature, some sealing rings are difficult to remove, and there are no specialized removal tools available. The current method involves inserting a metal hexagonal rod into the groove where the sealing ring is installed to hook it out. However, the sealing ring is prone to falling off and springing back during this process. This method is difficult to operate, inefficient, and the process of inserting the metal hexagonal rod into the groove can wear down the groove, posing a risk of damage. This can lead to an abnormally high leakage rate, sealing failure, and ultimately, affect product quality. Utility Model Content

[0005] The purpose of this utility model is to provide a sealing ring removal tool that can effectively improve the efficiency of sealing ring removal, protect equipment, especially for furnace tube machines, control leakage rate, ensure the sealing performance of the furnace tube machine, make the environment inside the furnace tube machine meet process requirements, and guarantee product quality.

[0006] To achieve the above objectives, this utility model provides a sealing ring removal tool, which includes:

[0007] Grip the stick;

[0008] A hook is located at the end of the grip rod. The hook includes a connecting part and a lifting part. The lifting part is connected to the grip rod through the connecting part, and the extension direction of the lifting part is different from the axial direction of the grip rod.

[0009] Optionally, the outer diameter of the lifting portion is smaller than the outer diameter of the gripping rod.

[0010] Optionally, the number of hooks is two, with one hook at each end of the gripping rod.

[0011] Optionally, the extension directions of the two hooks are at different angles to the axial direction of the gripping rod.

[0012] Optionally, the extension direction of the lifting portion of one of the hooks is perpendicular to the axial direction of the gripping rod.

[0013] Optionally, the angle between the extension direction of the lifting portion of one of the hooks and the axial direction of the gripping rod is 30° to 60°.

[0014] Optionally, the grip bar has a polygonal cross-section.

[0015] Optionally, the outer diameter of the connecting part is smaller than the outer diameter of the grip rod, and the extending direction of the connecting part is consistent with the axial direction of the grip rod.

[0016] Optionally, the end of the protruding part is a pointed tip.

[0017] Optionally, the sealing ring removal tool is made of polymer material.

[0018] As configured above, this utility model provides a sealing ring removal tool, which has a gripping rod and a hook. The hook is located at the end of the gripping rod and includes a connecting part and a lifting part. The lifting part is connected to the gripping rod through the connecting part. The extension direction of the lifting part is different from the axial direction of the gripping rod; that is, the lifting part does not extend along the axial direction of the gripping rod, but extends obliquely at a certain angle to the axial direction of the gripping rod or perpendicular to the axial direction of the gripping rod. This allows it to adapt to narrower spaces and prevents the sealing ring from falling off and springing back when hooking it up, making this sealing ring removal tool of this utility model widely applicable and suitable for various application scenarios. Furthermore, the outer diameter of the lifting part is smaller than the outer diameter of the gripping rod. This design allows the lifting part to easily engage between the sealing ring and the groove to remove the sealing ring. In addition, the sealing ring removal tool of this utility model is made of a polymer material with a certain degree of hardness, sufficient to lift the sealing ring without damaging the groove where the sealing ring is installed. In summary, this utility model can effectively improve the efficiency of removing the sealing ring, protect the equipment, especially for furnace tube machines, control the leakage rate, ensure the sealing performance of the furnace tube machine, make the environment inside the furnace tube machine meet the process requirements, and guarantee the quality of the product. Attached Figure Description

[0019] Those skilled in the art will understand that the accompanying drawings are provided to better understand the present invention and do not constitute any limitation on the scope of the present invention. Wherein:

[0020] Figure 1 This is a schematic diagram of a sealing ring removal tool according to an embodiment of the present invention.

[0021] The reference numerals in the attached figures are as follows:

[0022] 1-Holding rod; 2-Hook; 21-Connecting part; 22-Lifting part; 3-Transition section. Detailed Implementation

[0023] In this document, unless otherwise stated, the terms “upper,” “lower,” “left,” “right,” “inner,” “outer,” “front,” “back,” “top,” “bottom,” etc., are used to indicate orientation or positional relationship based on the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a characteristic orientation and operation, and therefore should not be construed as a limitation of the present invention.

[0024] The specific embodiments of this utility model will now be described in more detail with reference to the accompanying drawings. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0025] The preferred embodiments of this utility model are given below with reference to the accompanying drawings and described in detail.

[0026] Figure 1 This is a schematic diagram of a sealing ring removal tool according to an embodiment of the present invention. Please refer to it. Figure 1 This utility model provides a sealing ring removal tool, including a gripping rod 1 and a hook 2.

[0027] The hook 2 is located at the end of the grip rod 1. The hook 2 includes a connecting part 21 and a lifting part 22. The lifting part 22 is connected to the grip rod 1 through the connecting part 21, that is, one end of the connecting part 21 is connected to the lifting part 22, and the other end of the connecting part 21 is connected to the grip rod 1. Furthermore, the outer diameter of the connecting part 21 is smaller than the outer diameter of the grip rod 1, and the extending direction of the connecting part 21 is consistent with the axial direction of the grip rod 1, that is, the connecting part 21 extends along the axial direction of the grip rod 1. The connecting part 21 can be, for example, cylindrical. Furthermore, since the outer diameter of the connecting part 21 is smaller than the outer diameter of the grip rod 1, a transition section 3 can be provided between the connecting part 21 and the grip rod 1 so that the outer diameter of the connecting part 21 gradually transitions to the outer diameter of the grip rod 1. The transition section 3 can be, for example, conical, to avoid the end of the grip rod 1 being too sharp and easily cutting the hand if there is no transition section 3. The outer diameter of the lifting part 22 is smaller than the outer diameter of the gripping rod 1, and the extending direction of the lifting part 22 is different from the axial direction of the gripping rod 1, that is, the lifting part 22 does not extend along the axial direction of the gripping rod 1. Furthermore, the end of the lifting part 22 is a pointed tip, which allows the hook 2 to more easily engage between the sealing ring and the groove. Specifically, refer to... Figure 1 The end of the lifting part 22 is conical.

[0028] Preferably, there are two hooks 2, with one hook 2 at each end of the gripping rod 1. More preferably, the angles between the extending directions of the lifting portions 22 of the two hooks 2 and the axial direction of the gripping rod 1 are different. In this embodiment, since the extending direction of the connecting portion 21 is consistent with the axial direction of the gripping rod 1, the angle between the lifting portion 22 and the connecting portion 21 is equal to the angle between the extending direction of the lifting portion 22 and the axial direction of the gripping rod 1. For example, the extending direction of the lifting portion 22 of one hook 2 is perpendicular to the axial direction of the gripping rod 1, and the angle between the extending direction of the lifting portion 22 of the other hook 2 and the axial direction of the gripping rod 1 is 30° to 60°. Figure 1 In the middle, the included angle is 45°. The two hooks 2 can be located in the same plane or not in the same plane. The hook 2 with the lifting part 22 perpendicular to the axis of the holding rod 1 can be used when the demolition space is large, and the hook 2 with the extension direction of the lifting part 22 at an angle of 45° to the axis of the holding rod 1 can be used when the demolition space is narrow.

[0029] The grip lever 1 has a polygonal cross-section, meaning the cross-section perpendicular to its axis is polygonal. For example, the grip lever 1 can be a polygonal rod. This design provides a non-slip surface, making it easier for the operator to apply force when gripping it. For instance, the grip lever 1 can be a hexagonal, pentagonal, or quadrilateral rod.

[0030] Preferably, the seal ring removal tool is made of a polymer material, such as polyimide (PI), polybenzimidazole (PBI), and polytetrafluoroethylene (PTFE). Polyimide has a high temperature resistance of over 300°C and high hardness; polybenzimidazole has a high temperature resistance of over 300°C and a hardness half that of quartz; polytetrafluoroethylene has a high temperature resistance of around 240°C and a lower hardness than the other two. Therefore, based on comprehensive testing and analysis, polyimide is the best among the three materials and can handle removal work under various conditions. The seal ring removal tool in this embodiment is made of polyimide, which is both heat-resistant and has sufficient hardness to lift the seal ring without damaging the groove where the seal ring is installed.

[0031] As configured above, this utility model provides a sealing ring removal tool, which has a gripping rod 1 and a hook 2. The hook 2 is located at the end of the gripping rod 1 and includes a connecting part 21 and a lifting part 22. The lifting part 22 is connected to the gripping rod 1 through the connecting part 21. The extension direction of the lifting part 22 is different from the axial direction of the gripping rod 1. That is, the lifting part 22 does not extend along the axial direction of the gripping rod 1, but extends obliquely at a certain angle to the axial direction of the gripping rod 1 or perpendicular to the axial direction of the gripping rod 1. This allows it to adapt to narrower spaces and prevents the sealing ring from falling off and springing back when hooking it up, making the sealing ring removal tool of this utility model widely applicable and suitable for various application scenarios. Furthermore, the outer diameter of the lifting part 22 is smaller than the outer diameter of the gripping rod 1. This design allows the lifting part 22 to easily engage between the sealing ring and the groove to remove the sealing ring. In addition, the sealing ring removal tool of this utility model is made of a polymer material with a certain hardness, sufficient to lift the sealing ring without damaging the groove where the sealing ring is installed. In summary, this utility model can effectively improve the efficiency of removing the sealing ring, protect the equipment, especially for furnace tube machines, control the leakage rate, ensure the sealing performance of the furnace tube machine, make the environment inside the furnace tube machine meet the process requirements, and guarantee the quality of the product.

[0032] It should be noted that references to "an embodiment," "an embodiment," "a specific embodiment," "some embodiments," etc., in the specification only indicate that the described embodiment may include a specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. Additionally, when a specific feature, structure, or characteristic is described in conjunction with an embodiment, whether explicitly described or not, implementing such a feature, structure, or characteristic in conjunction with other embodiments is within the knowledge of those skilled in the art.

[0033] It should be noted that the various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the systems disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the descriptions are relatively simple, and relevant parts can be referred to the method section.

[0034] It should also be noted that although the present invention has been disclosed above with reference to preferred embodiments, these embodiments are not intended to limit the present invention. For any person skilled in the art, many possible variations and modifications can be made to the present invention without departing from the scope of the present invention, or equivalent embodiments can be modified based on the disclosed technical content. Therefore, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the present invention shall still fall within the protection scope of the present invention.

[0035] It should also be understood that, unless otherwise specified or indicated, the terms “first,” “second,” “third,” etc., in the specification are used only to distinguish the various components, elements, and steps in the specification, and not to indicate the logical or sequential relationships between the various components, elements, and steps.

[0036] Furthermore, it should be recognized that the terminology described herein is used only to describe particular embodiments and not to limit the scope of the invention. It must be noted that the singular forms “a” and “an” used herein and in the appended claims include plural bases unless the context clearly indicates otherwise. For example, a reference to “a step” or “an apparatus” means a reference to one or more steps or apparatuses, and may include secondary steps and secondary apparatuses. All conjunctions used should be understood in the broadest sense. Also, the word “or” should be understood to have the definition of logical “or” rather than logical “exclusive OR”, unless the context clearly indicates otherwise. Furthermore, implementation of the methods and / or devices in embodiments of the invention may include performing selected tasks manually, automatically, or in combination.

Claims

1. A sealing ring removal tool, characterized in that, include: Grip the stick; The hook is located at the end of the grip rod. The hook includes a connecting part and a lifting part. The lifting part is connected to the grip rod through the connecting part. The extension direction of the lifting part is different from the axial direction of the grip rod. There are two hooks, one at each end of the grip rod.

2. The sealing ring removal tool as described in claim 1, characterized in that, The outer diameter of the lifting part is smaller than the outer diameter of the gripping rod.

3. The sealing ring removal tool as described in claim 1, characterized in that, The angles between the extension directions of the two hooks and the axial direction of the grip rod are different.

4. The sealing ring removal tool as described in claim 3, characterized in that, One of the hooks extends in a direction perpendicular to the axial direction of the gripping rod.

5. The sealing ring removal tool as described in claim 3, characterized in that, The angle between the extension direction of the lifting part of one of the hooks and the axis of the gripping rod is 30° to 60°.

6. The sealing ring removal tool as described in claim 1, characterized in that, The grip bar has a polygonal cross-section.

7. The sealing ring removal tool as described in claim 1, characterized in that, The outer diameter of the connecting part is smaller than the outer diameter of the grip rod, and the extension direction of the connecting part is consistent with the axial direction of the grip rod.

8. The sealing ring removal tool as described in claim 1, characterized in that, The end of the lifting part is a pointed tip.

9. The sealing ring removal tool as described in claim 1, characterized in that, The sealing ring removal tool is made of polymer material.

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