Liquid conveying tank

Abstract

The utility model provides a liquid transmission tank which comprises a tank body which comprises a cavity used for containing liquid. The ventilation device comprises a gas transmission pipe and at least one gas outlet pipe, the gas transmission pipe enters the cavity from the outside of the tank body, the gas outlet pipe is arranged at the bottom of the cavity and is in sealed connection with the gas transmission pipe, and a plurality of first gas outlet holes are formed in the gas outlet pipe. According to the liquid conveying tank provided by the invention, the gas content of the liquid in the liquid conveying tank can be adjusted, so that the gas content of the liquid in the liquid conveying tank is maintained in a set interval.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a liquid transfer tank. Background Technology

[0002] In the process of integrated circuit manufacturing, the metal gate is usually made by etching the gate shape in dummy polysilicon, then cleaning and removing the polysilicon before filling it with metal to obtain the metal gate. The cleaning of polysilicon mainly includes dry etching and wet etching. The main chemical used in wet etching is tetramethylammonium hydroxide (TMAH).

[0003] Generally, wet etching involves storing the etching solution, obtained by mixing TMAH with other chemical reagents, in a tank. During use, the etching solution is transferred from the tank to the etching machine, with the tank being replenished in real-time. The etching rate of polysilicon by TMAH is affected by the dissolved oxygen content in the etching solution. As the etching solution is replenished, air enters the tank, increasing the dissolved oxygen level and affecting the etching rate of polysilicon, thus impacting product yield.

[0004] Therefore, it is necessary to develop a liquid transfer tank that can regulate the oxygen content of the internal liquid and maintain it within a set range. Utility Model Content

[0005] This application provides a liquid transfer tank for adjusting the gas content of the liquid inside the tank, so that the gas content of the liquid inside the tank is maintained within a set range.

[0006] This application provides a liquid transfer tank, including: a tank body, including a cavity for containing liquid; and a venting device, including a gas transfer pipe and at least one vent pipe, wherein the gas transfer pipe enters the cavity from outside the tank body, the vent pipe is disposed at the bottom of the cavity and is sealed to the gas transfer pipe, and the vent pipe is provided with a plurality of first vent holes.

[0007] In some embodiments, the air outlet pipes are evenly distributed at the bottom of the cavity.

[0008] In some embodiments, there are multiple air outlet pipes, which are parallel to each other and are connected to the gas transmission pipe through a guide pipe.

[0009] In some embodiments, the first air outlet is evenly distributed circumferentially around the air outlet pipe.

[0010] In some embodiments, the first vent outlet is directed toward the top of the tank and the periphery of the tank.

[0011] In some embodiments, the guide tube is provided with a plurality of second air outlets penetrating the wall of the guide tube.

[0012] In some embodiments, a plurality of second air outlets are evenly distributed circumferentially around the guide tube.

[0013] In some embodiments, the second vent outlet is directed toward the top of the tank and the periphery of the tank.

[0014] In some embodiments, the liquid transfer tank further includes: an air inlet pipe, a first end of which is sealed to the gas transfer pipe, a second end of which is configured to be connected to a gas source, and a flow controller provided on the air inlet pipe; an oxygen content detector disposed in the cavity for detecting the oxygen content of the liquid in the cavity; and a controller connected to the oxygen content detector and the flow controller, the controller being configured to control the flow rate of the gas in the air inlet pipe according to the oxygen content of the liquid.

[0015] In some embodiments, the tank body is further provided with an inlet and an outlet, which are used to allow liquid to enter the cavity and to supply the liquid to other devices, respectively.

[0016] The beneficial effects of the liquid transfer tank provided in this application embodiment include, but are not limited to, the following:

[0017] The liquid transfer tank provided in this application includes a tank body and a venting device disposed inside the tank body. Through the venting device, gas can be transferred into the tank body, thereby adjusting the content of certain gases in the liquid inside the tank body, for example, adjusting the oxygen content in the etching solution used for wet etching, thereby stabilizing the etching rate. Attached Figure Description

[0018] The following accompanying drawings describe in detail the exemplary embodiments disclosed in this application. The same reference numerals denote similar structures in several views of the drawings. Those skilled in the art will understand that these embodiments are non-limiting and exemplary, and the drawings are for illustrative purposes only and are not intended to limit the scope of this application. Other embodiments may similarly fulfill the inventive intent of this application. It should be understood that the drawings are not drawn to scale.

[0019] in:

[0020] Figure 1 This is a schematic diagram of the structure of a liquid transfer tank according to some embodiments of this application;

[0021] Figure 2 This is a schematic diagram of the structure of a ventilation device according to some embodiments of this application;

[0022] Figure 3 This is a schematic diagram of the structure of a ventilation device according to other embodiments of this application; and

[0023] Figure 4 for Figure 3 A top view of the ventilation device shown. Detailed Implementation

[0024] The following description provides specific application scenarios and requirements for this application, intended to enable those skilled in the art to make and use the content of this application. Various partial modifications to the disclosed embodiments will be apparent to those skilled in the art, and the general principles defined herein can be applied to other embodiments and applications without departing from the spirit and scope of this application. Therefore, this application is not limited to the embodiments shown, but rather to the widest scope consistent with the claims.

[0025] This application provides a liquid transfer tank, including a tank body for storing and transferring liquid; and a venting device disposed inside the tank body. The venting device includes a gas transfer pipe and at least one vent pipe. The gas transfer pipe enters the tank body from the top or side of the tank body. The vent pipe is disposed at the bottom of the tank body and is sealed to the gas transfer pipe. The vent pipe is provided with a plurality of first vent holes penetrating the vent pipe.

[0026] The liquid transfer tank provided in this application includes a tank body and a venting device disposed inside the tank body. Through the venting device, gas can be transferred into the tank body, thereby adjusting the content of certain gases in the liquid inside the tank body, for example, adjusting the oxygen content in the etching solution used for wet etching, thereby stabilizing the etching rate.

[0027] The liquid transfer tank provided in this application will be described in detail below with reference to the embodiments and accompanying drawings.

[0028] refer to Figure 1 This application provides a liquid transfer tank, which includes a tank body 100 and a venting device 200 located inside the tank body 100.

[0029] The tank 100 includes a cavity 103 for containing liquid. In some embodiments, the tank 100 is used to store and transport etching solution required for wet etching.

[0030] In some embodiments, the top and bottom of the tank 100 are respectively provided with a liquid inlet 101 and a liquid outlet 102, which are used to allow liquid to enter the cavity 103 and to supply the liquid to other devices, respectively.

[0031] In some embodiments, the inlet 101 is configured to connect to a liquid source, and when liquid needs to be added to the tank 100, the liquid enters the tank 100 through the inlet 101.

[0032] In some embodiments, the number of liquid inlets 101 is multiple, used to introduce different types of liquids into the tank 100.

[0033] In some embodiments, the outlet 102 is configured to connect to a liquid-using device (e.g., an etching machine for wet etching). When the liquid-using device is in operation, the liquid in the tank 100 is discharged from the tank 100 through the outlet 102 and flows to the liquid-using device.

[0034] In some embodiments, the tank 100 is in the shape of a cuboid, a cube, or a cylinder.

[0035] The ventilation device 200 provided in this application embodiment includes a gas transmission pipe 201 and at least one outlet pipe 202. The gas transmission pipe 201 enters the cavity 103 from the outside of the tank 100. The outlet pipe 202 is disposed at the bottom of the cavity 103 and is sealed to the gas transmission pipe 201. The outlet pipe 202 is provided with a plurality of first outlet holes 202a penetrating the outlet pipe 202.

[0036] The gas is transmitted through the gas transmission pipe 201 to the gas outlet pipe 202 located at the bottom of the cavity 103, and then discharged through the first gas outlet 202a. Since the density of gas is much less than that of liquid, after the gas enters the liquid in the cavity 103 through the first gas outlet 202a, the gas will rapidly rise towards the top surface of the liquid. Because the gas outlet pipe 202 is located at the bottom of the cavity 103, the gas can quickly fill the entire liquid, thereby achieving rapid adjustment of the gas content in the liquid.

[0037] In some embodiments, the gas transmission pipe 201 is located at the center of the cavity 103, for example, the axis of the gas transmission pipe 201 coincides with the axis of the cavity 103.

[0038] In some embodiments, the vent pipes 202 are evenly distributed at the bottom of the cavity 103. For example, the vent pipes 203 are centrally symmetrically distributed, and the center point of the vent pipes 203 is located on the axis of the cavity 103. The even distribution of the vent pipes 202 facilitates the uniform dispersion of gas entering the cavity 103 from the vent pipes 202 in the liquid within the cavity 103.

[0039] In some embodiments, reference Figure 2There is one gas outlet pipe 202, and the gas transmission pipe 201 is connected to the middle of the gas outlet pipe 202.

[0040] In some embodiments, the gas outlet pipe 202 and the gas transmission pipe 201 are integrally formed.

[0041] refer to Figure 3 Alternatively, in some other embodiments, there are multiple air outlet pipes 202, which are parallel to each other and are connected to the gas transmission pipe 201 through a guide pipe 203.

[0042] In some embodiments, reference Figure 4 The guide pipe 203 is connected to the gas transmission pipe 201 through the first tee connector 204; and the gas outlet pipe 202 is connected to the guide pipe 203 through the second tee connector 205.

[0043] In some embodiments, the first air outlet 202a is distributed at equal intervals along the axial direction of the air outlet pipe 202; and the first air outlet 202a is evenly distributed around the circumference of the air outlet pipe 202.

[0044] In other embodiments, the first vent holes 202a are evenly spaced along the axial direction of the vent pipe 202; and the venting directions of the first vent holes 202a are respectively towards the top of the tank 100 and the periphery of the tank 100. For example, three rows of the first vent holes 202a are arranged along the axial direction of the vent pipe 202, and the three rows of the first vent holes 202a are respectively arranged at the top and both sides of the vent pipe 202. The top of the vent pipe 202 refers to the side of the vent pipe 202 facing the top of the tank 100.

[0045] In some embodiments, the guide pipe 203 is provided with a plurality of second air outlet holes 203a that penetrate the wall of the guide pipe 203.

[0046] In some embodiments, the second air outlet 203a is distributed at equal intervals along the axial direction of the guide tube 203; and the second air outlet 203a is evenly distributed around the circumference of the guide tube 203.

[0047] In other embodiments, the second vent holes 203a are evenly spaced along the axial direction of the guide pipe 203; and the venting directions of the second vent holes 203a are respectively towards the top of the tank 100 and the periphery of the tank 100. For example, three rows of second vent holes 203a are arranged along the axial direction of the guide pipe 203, and the three rows of second vent holes 203a are respectively arranged at the top and both sides of the guide pipe 203. The top of the guide pipe 203 refers to the side of the guide pipe 203 facing the top of the tank 100.

[0048] In some embodiments, the diameters of the first vent 202a and the second vent 203a are 0.5 to 1.0 mm, for example, 0.5 mm, 0.7 mm, 0.8 mm or 1.0 mm.

[0049] In some embodiments, reference Figure 1 The liquid transfer tank also includes an air inlet pipe 300, the first end of which is sealed to the gas transfer pipe 201, and the second end of which is configured to be connected to a gas source 400.

[0050] In some embodiments, the gas provided by the gas source 400 includes compressed air.

[0051] In some embodiments, a flow controller 301 is provided on the air intake pipe 300 to control the flow rate of gas passing through the air intake pipe 300.

[0052] In some embodiments, the liquid transfer tank further includes an oxygen content detector disposed within the cavity 103 for detecting the oxygen content of the liquid within the cavity 103.

[0053] In some embodiments, the liquid transfer tank further includes a controller 600 connected to the oxygen content detector 500 and the flow controller 301, the controller 600 being configured to control the flow rate of the gas in the inlet pipe 300 according to the oxygen content of the liquid.

[0054] In some embodiments, when the oxygen content of the liquid is higher than a preset range, the controller 600 controls the flow controller 301 to reduce the gas flow rate in the air intake pipe 300; when the oxygen content of the liquid is lower than the preset range, the controller 600 controls the flow controller 301 to increase the gas flow rate in the air intake pipe 300.

[0055] In some embodiments, the process of adjusting the oxygen content in the etching solution of wet etching using the liquid transfer tank provided in this application is as follows:

[0056] The liquid transfer tank provided in this application embodiment is connected to the process flow path of wet etching, that is, the liquid inlet 101 is connected to the liquid source, the liquid outlet 102 is connected to the etching machine, so that the etching liquid flows into the liquid transfer tank, and the air inlet pipe 300 is connected to the gas source 400 that provides compressed air.

[0057] During the transfer of the etching solution through the liquid transfer tank, the oxygen content in the etching solution is detected by the oxygen content detector 500. When the oxygen content of the etching solution is higher than a preset range, the controller 600 controls the flow controller 301 to reduce the gas flow rate in the air inlet pipe 300; when the oxygen content of the etching solution is lower than the preset range, the controller 600 controls the flow controller 301 to increase the gas flow rate in the air inlet pipe 300, thereby maintaining the oxygen content of the etching solution within a stable range.

[0058] The beneficial effects of the liquid transfer tank provided in this application embodiment include, but are not limited to, the following:

[0059] The liquid transfer tank provided in this application includes a tank body and a venting device disposed inside the tank body. Through the venting device, gas can be transferred into the tank body, thereby adjusting the content of certain gases in the liquid inside the tank body, for example, adjusting the oxygen content in the etching solution used for wet etching, thereby stabilizing the etching rate.

[0060] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects may be any one or a combination of the above, or any other possible beneficial effects.

[0061] The basic concepts have been described above. Obviously, for those skilled in the art, the detailed disclosure above is merely illustrative and does not constitute a limitation of this specification. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are suggested in this specification, and therefore remain within the spirit and scope of the exemplary embodiments of this application.

[0062] It should be noted that, in the description of this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; a mechanical connection or an electrical connection; a rotating connection or a sliding connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application in light of the specific circumstances.

[0063] Furthermore, when the terms "first," "second," "third," etc., are used in this application specification to describe various features, these terms are only used to distinguish these features and should not be construed as indicating or implying the correlation or relative importance between features or implicitly indicating the number of features indicated.

[0064] In addition, this application specification describes exemplary embodiments by referring to idealized exemplary cross-sectional views and / or plan views and / or perspective views. Therefore, differences from the illustrated shapes are foreseeable due to factors such as manufacturing techniques and / or tolerances. Therefore, exemplary embodiments should not be construed as limited to the shapes of the regions shown herein, but should include deviations in shape caused, for example, by manufacturing processes. Thus, the regions shown in the figures are substantially schematic, and their shapes are not intended to illustrate the actual shapes of the regions of the device, nor to limit the scope of the exemplary embodiments.

[0065] Furthermore, this application uses specific terms to describe embodiments of this specification. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic related to at least one embodiment of this application. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this application do not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this application can be appropriately combined.

[0066] Similarly, it should be noted that, in order to simplify the description of the present application and thus aid in the understanding of one or more embodiments of the invention, the foregoing description of the embodiments of the present application sometimes combines multiple features into a single embodiment, drawing, or description thereof. However, this disclosure method does not imply that the subject matter of the application requires more features than those mentioned in the claims. In fact, the embodiments contain fewer features than all the features of the single embodiments disclosed above.

[0067] Finally, it should be understood that the embodiments described in this application are merely illustrative of the principles of the embodiments of this application. Other modifications may also fall within the scope of this application. Therefore, alternative configurations of the embodiments of this application are considered as examples and not limitations, and are regarded as consistent with the teachings of this application. Accordingly, the embodiments of this application are not limited to the embodiments explicitly described and illustrated in this application.

Claims

1. A liquid transfer tank, characterized in that, include: A tank, including a cavity for containing liquid; as well as A ventilation device includes a gas transmission pipe and at least one outlet pipe. The gas transmission pipe enters the cavity from outside the tank body. The outlet pipe is located at the bottom of the cavity and is sealed to the gas transmission pipe. The outlet pipe is provided with a plurality of first outlet holes.

2. The liquid transfer tank according to claim 1, characterized in that, The air outlet pipes are evenly distributed at the bottom of the cavity.

3. The liquid transfer tank according to claim 2, characterized in that, There are multiple air outlet pipes, which are parallel to each other and connected to the gas transmission pipe through a guide pipe.

4. The liquid transfer tank according to claim 3, characterized in that, The first air outlet is evenly distributed around the circumference of the air outlet pipe.

5. The liquid transfer tank according to claim 3, characterized in that, The first vent outlet directs air out toward the top of the tank and the periphery of the tank.

6. The liquid transfer tank according to claim 3, characterized in that, The guide tube is provided with multiple second air outlets that penetrate the wall of the guide tube.

7. The liquid transfer tank according to claim 6, characterized in that, Multiple second air outlets are evenly distributed around the circumference of the guide tube.

8. The liquid transfer tank according to claim 6, characterized in that, The second vent outlet is directed toward the top of the tank and the periphery of the tank.

9. The liquid transfer tank according to claim 1, characterized in that, Also includes: An intake pipe, wherein the first end of the intake pipe is sealed to the gas transmission pipe, the second end of the intake pipe is configured to be connected to a gas source, and a flow controller is provided on the intake pipe; An oxygen content meter is installed inside the cavity to detect the oxygen content of the liquid inside the cavity. as well as A controller, connected to the oxygen content detector and the flow controller, is configured to control the flow rate of the gas in the intake pipe based on the oxygen content of the liquid.

10. The liquid transfer tank according to claim 1, characterized in that, The tank is also provided with an inlet and an outlet, which are used to allow liquid to enter the cavity and supply the liquid, respectively.

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