Process gas conveying system and exhaust pipe applied to sputter coating equipment

Abstract

The utility model discloses a process gas conveying system and an exhaust pipe applied to sputter coating equipment, which comprise three flow meter groups positioned outside a coating chamber and a gas conveying pipeline communicated with the three flow meter groups, the device is characterized in that the gas conveying pipeline comprises a gas inlet pipeline, a gas inlet connector, a folding pipe, a gas outlet connector and a gas outlet pipeline which are sequentially communicated, the gas inlet pipeline is communicated with the flowmeter set, and a first valve is arranged on the gas inlet pipeline; and the air outlet pipeline is communicated with an exhaust part located in the coating chamber, and a second valve is arranged on the air outlet pipeline. Due to the fact that the exhaust part communicated with the gas outlet pipeline is located in the film coating cavity, the interior of the film coating cavity is in a vacuum state, and the flow meter set and the gas conveying pipeline are located outside the film coating cavity and are larger than standard atmospheric pressure, gas exhausted by the flow meter set can be rapidly sucked into the film coating cavity, and when the gas is conveyed in the gas conveying pipeline, the gas can be rapidly sucked into the film coating cavity. And the mutual collision further enhances the gas mixing effect.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field technology of coating equipment, especially to a process gas conveying system and exhaust pipe applied to sputtering coating equipment. BACKGROUND

[0002] When sputtering coating, a certain amount of process gas needs to be injected to cooperate with the cathode column and form a plasma to bombard the target material. The traditional process gas injection method is to use three independent pipelines to convey gas when three different process gases are injected into the coating chamber, causing the gas to mix by diffusion after entering the coating chamber, resulting in poor mixing of process gases and ultimately affecting the coating effect. SUMMARY

[0003] In view of the above, the utility model mainly aims at the defects of the prior art, and provides a process gas conveying system and exhaust pipe applied to sputtering coating equipment, which can further.

[0004] To achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a process gas conveying system applied to sputtering coating equipment, comprising three flowmeter groups located outside the coating chamber and a gas conveying pipeline communicating with the three flowmeter groups, characterized in that: the gas conveying pipeline comprises a gas inlet pipeline, a gas inlet interface, a folding pipe, a gas outlet interface and a gas outlet pipeline connected in turn, the gas inlet pipeline is in communication with the flowmeter group and is provided with a first valve; the gas outlet pipeline is in communication with an exhaust member located in the coating chamber, and the gas outlet pipeline is provided with a second valve.

[0005] Further, the gas inlet pipeline is divided into a first pipe conveying argon, a second pipe conveying oxygen and a third pipe conveying nitrogen, and each of the three pipes is connected to one end of the corresponding gas conveying flowmeter group.

[0006] Further, the gas inlet interface adopts a four-way interface; the first pass of the four-way interface is connected to one end of the first pipe, the second pass of the four-way interface is connected to one end of the second pipe, the third pass of the four-way interface is connected to one end of the third pipe, and the fourth pass of the four-way interface is connected to one end of the folding pipe.

[0007] Further, the gas outlet interface adopts a three-way interface; the first pass of the three-way interface is connected to the other end of the folding pipe, and the second pass and the third pass of the three-way interface are in communication with the gas outlet pipeline.

[0008] Further, the gas outlet pipeline is divided into a first gas outlet pipe and a second gas outlet pipe, one end of each of the first gas outlet pipe and the second gas outlet pipe is in communication with the second pass and the third pass of the three-way interface, and the other end is connected to the exhaust member.

[0009] Further, the first valve adopts an electromagnetic valve and has three, and is respectively arranged on the first pipe, the second pipe and the third pipe.

[0010] Further, the second valve is an electromagnetic valve and has two, and is respectively arranged on the first gas outlet pipe and the second gas outlet pipe.

[0011] An exhaust pipe applied to process gas delivery in a sputtering film coating device, the exhaust pipe comprising a first pipe body, a second pipe body and a third pipe body which are sequentially sleeved, a positioning block being connected between the first pipe body, the second pipe body and the third pipe body, so that the first pipe body and the second pipe body and the second pipe body and the third pipe body form air passages and are divided into upper half parts and lower half parts, the gas outlet pipeline is communicated with the third pipe body, and the upper half parts and the lower half parts of the first pipe body, the second pipe body and the third pipe body are each provided with through holes which are arranged at equal intervals.

[0012] Further, the number of through holes on the first pipe body, the second pipe body and the third pipe body is in a decreasing multiple manner, and the through holes on the second pipe body are opposite to the first pipe body and the third pipe body.

[0013] Further, the through holes on the first pipe body, the second pipe body and the third pipe body are staggered, and the distance between two adjacent through holes of the through holes on the upper half parts and the lower half parts of the first pipe body, the second pipe body and the third pipe body corresponds.

[0014] Compared with the prior art, the utility model has obvious advantages and beneficial effects, specifically speaking, according to the above technical scheme, the opening and closing of the gas inlet pipeline communicated with the three flowmeter groups are controlled by the first valve, so that the operator can select what process gas to inject into the film coating chamber according to the actual demand of film coating, the gas inlet pipeline is communicated with the gas inlet interface, the gas inlet interface is communicated with the gas outlet interface through the converging pipe, when the two flowmeter groups simultaneously deliver gas, the gas can flow into the converging pipe for mixing and be discharged from the gas outlet pipeline, in this process, because the exhaust pipe communicated with the gas outlet pipeline is located in the film coating chamber, the film coating chamber is in a vacuum state, the flowmeter groups and the gas delivery pipeline are located outside the film coating chamber and are greater than one standard atmospheric pressure, so that the gas discharged from the flowmeter groups can be rapidly sucked into the film coating chamber, and the collision between the gas in the gas delivery pipeline further strengthens the mixing effect of the gas.

[0015] To make the structure features and functions of the utility model clearer, the utility model will be described in detail below by combining with the drawings and specific embodiments. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is the flow block diagram of embodiment 1 of the utility model.

[0017] Figure 2 It is the plan view of the exhaust pipe of embodiment 1 of the utility model.

[0018] Figure 3 It is theFigure 2 Enlarged view of a at 40.

[0019] Brief Description of the Drawings

[0020] 10 flow meter group;

[0021] 20 gas delivery pipe, 21 gas inlet pipe, 211 first pipe, 212 second pipe, 213 third pipe, 22 gas inlet interface, 23 gas outlet interface, 24 gas outlet pipe, 241 first gas outlet pipe, 242 second gas outlet pipe, 25 converging pipe;

[0022] 30 first valve;

[0023] 40 exhaust member, 41 first pipe body, 42 second pipe body, 43 third pipe body, 44 positioning block, 45 air passage, 46 through hole;

[0024] 50 second valve. DETAILED DESCRIPTION

[0025] Please refer to Figure 1 The figure shows the specific structure of the preferred first embodiment of the present application, which is a process gas delivery system applied to sputtering coating equipment, comprising three flow meter groups 10 located outside the coating chamber and a gas delivery pipe 20 connected with the three flow meter groups 10. The gas delivery pipe 20 comprises a gas inlet pipe 21, a gas inlet interface 22, a converging pipe 25, a gas outlet interface 23 and a gas outlet pipe 24 connected in sequence. The gas inlet pipe 21 is connected with the flow meter group 10 and is provided with a first valve 30. The gas outlet pipe 24 is connected with an exhaust member 40 located inside the coating chamber and is provided with a second valve 50. In the prior art, the process gas entering the coating chamber is discharged through three pipe bodies. When the coating process requires mixing of two kinds of gas, the gas can only be mixed after entering the coating chamber through diffusion, which results in poor mixing effect. In the process gas delivery system, the first valve 30 controls the opening and closing of the gas inlet pipe 21 connected with the three flow meter groups 10, so that the operator can select the process gas to be injected into the coating chamber according to the actual requirements of the coating process. The gas inlet pipe 21 is connected with the gas inlet interface 22, and the gas inlet interface 22 is connected with the gas outlet interface 23 through the converging pipe 25, so that when two flow meter groups 10 deliver gas at the same time, the gas can flow into the converging pipe 25 for mixing and be discharged through the gas outlet pipe 24. In this process, the exhaust member 40 connected with the gas outlet pipe 24 is located inside the coating chamber, which is in a vacuum state. The flow meter group 10 and the gas delivery pipe 20 are located outside the coating chamber and are greater than one standard atmospheric pressure, so that the gas discharged from the flow meter group 10 can be quickly sucked into the coating chamber. When the gas is delivered in the gas delivery pipe 20, the collision between the gas further enhances the mixing effect of the gas.

[0026] Specifically, the gas inlet pipeline 21 is divided into a first pipe 211 for conveying argon, a second pipe 212 for conveying oxygen and a third pipe 213 for conveying nitrogen, and is connected to one end of the three flow meter groups 10 for conveying corresponding gas respectively. The flow meter group 10 is mainly used for controlling the flow of Ar, N2 and O2 and other gases, so that the amount of gas injected into the first pipe 211, the second pipe 212 and the third pipe 213 should meet the needs of the workpiece coating at that time.

[0027] Specifically, the gas inlet interface 22 adopts a four-way interface; the first pass of the four-way interface is connected to one end of the first pipe 211, the second pass of the four-way interface is connected to one end of the second pipe 212, the third pass of the four-way interface is connected to one end of the third pipe 213, and the fourth pass of the four-way interface is connected to the first end of the converging pipe 25. Because the gas inlet interface 22 adopts a four-way interface, when the user needs to inject argon and oxygen at the same time, the gas in the first pipe 211 and the second pipe 212 will all flow into the gas inlet interface 22, and the argon and oxygen will be mixed by colliding with each other.

[0028] The gas outlet interface 23 adopts a three-way interface; the first pass of the three-way interface is connected to the other end of the converging pipe 25, and the second pass and the third pass of the three-way interface are both connected to the gas outlet pipeline 24.

[0029] The gas outlet pipeline 24 is divided into a first gas outlet pipe 241 and a second gas outlet pipe 242, one end of the first gas outlet pipe 241 and the second gas outlet pipe 242 is connected to the second pass and the third pass of the three-way interface respectively, and the other end is connected to the exhaust member 40.

[0030] Specifically, the first valve 30 adopts an electromagnetic valve and has three, and is respectively arranged on the first pipe 211, the second pipe 212 and the third pipe 213. Under normal circumstances, the first valve 30 is in a closed state, when argon needs to be injected, the valve on the first pipe 211 can be opened, so that the argon enters the first gas outlet pipe 241 or the second gas outlet pipe 242 through the gas inlet interface 22, the converging pipe 25 and the gas outlet interface 23, and is discharged into the coating chamber at the exhaust member 40, when oxygen needs to be added on the basis of argon, the valve on the second pipe 212 is opened, and for the same reason, when nitrogen needs to be injected without argon, the valve on the first pipe 211 is closed, and the valve on the third pipe 213 is opened.

[0031] Specifically, the second valve 50 is an electromagnetic valve and has two, and is arranged on the first gas outlet pipe 241 and the second gas outlet pipe 242 respectively. Since the first gas outlet pipe 241 and the second gas outlet pipe 242 are two separate pipe bodies, the exhaust member 40 connected therewith also has two, and in the composition of the film coating chamber, one cathode column corresponds to at least one exhaust member 40, and two cathode columns need to have two exhaust members 40 corresponding thereto. At this time, if the first gas outlet pipe 241 and the second gas outlet pipe 242 are not closed when Ar, N2 and O2 are injected, the gases will be discharged at the same time at the two exhaust members 40, which will cause the film coating effect to be unpredictable. Therefore, the second valve 50 is installed on the first gas outlet pipe 241 and the second gas outlet pipe 242, and when the first gas outlet pipe 241 transports gas, the valve on the second gas outlet pipe 242 is closed, and similarly, when the second gas outlet pipe 242 transports gas, the valve on the first gas outlet pipe 241 is closed.

[0032] As shown in Figures 2-3 An exhaust pipe for transporting process gas in a sputtering film coating device, the exhaust member 40 includes a first pipe body 41, a second pipe body 42 and a third pipe body 43 which are sequentially sleeved, and a positioning block 44 is connected between the first pipe body 41, the second pipe body 42 and the third pipe body 43, so that the first pipe body 41 and the second pipe body 42 and the second pipe body 42 and the third pipe body 43 form an air channel 45 and are divided into upper and lower parts, the gas outlet pipe 24 is in communication with the third pipe body 43, and the upper and lower parts of the first pipe body 41, the second pipe body 42 and the third pipe body 43 are provided with through holes 46 arranged at equal intervals. Because the exhaust member 40 is composed of the first pipe body 41 sleeved with the second pipe body 42, and the second pipe body 42 sleeved with the third pipe body 43, when the gas is injected into the third pipe body 43 and discharged from the first pipe body 41, if the gas in the third pipe body 43 has argon and oxygen, the mixing degree of argon and oxygen can be further increased by the mutual collision and diffusion between argon and oxygen when the gas is discharged from the third pipe body 43 to the second pipe body 42 to the first pipe body 41, so as to strengthen the film coating effect on the film coating workpiece.

[0033] It should be noted that in order to enable the gas to flow in the first pipe body 41, the second pipe body 42 and the third pipe body 43, the positioning block 44 is added between the middle parts of the first pipe body 41, the second pipe body 42 and the third pipe body 43, so that the first pipe body 41, the second pipe body 42 and the third pipe body 43 form an air channel 45 for the gas to pass through and be discharged from the through hole 46.

[0034] Specifically, the number of through holes 46 on the first tube body 41, the second tube body 42 and the third tube body 43 is in a decreasing multiple manner, and the through holes 46 on the second tube body 42 are opposite to those on the first tube body 41 and the third tube body 43. When the first tube body 41 has eight through holes 46, the second tube body 42 has four through holes 46, and the third tube body 43 has two through holes 46. When the through holes 46 on the third tube body 43 and the first tube body 43 are located in front, the through holes 46 on the second tube body 42 need to be located in the rear. At this time, the first tube body 41 and the second tube body 42 and the second tube body 42 and the third tube body 43 are compared, and the gas outlet directions between the two are opposite, so that the gas entering can be uniformly diffused and mixed before being discharged.

[0035] Specifically, the through holes 46 on the first tube body 41, the second tube body 42 and the third tube body 43 are staggered, and the distance between the two adjacent through holes 46 in the upper half and the lower half of the through holes 46 on the first tube body 41, the second tube body 42 and the third tube body 43 is corresponding. When the first tube body 41 has eight through holes 46, the second tube body 42 has four through holes 46, and the third tube body 43 has two through holes 46. The two through holes 46 on the third tube body 43 are located between the four through holes 46 on the second tube body 42, that is, one through hole is located between two through holes, and the distance between the one through hole and the two through holes is equal. Of course, the through holes 46 on the second tube body 42 are also arranged according to the above arrangement, so as to ensure the uniformity of the gas discharged from the through holes 46 on the first tube body 41.

[0036] The above is only a preferred embodiment of the present application, and does not limit the technical scope of the present application. Therefore, any slight modification, equivalent change and modification of the above embodiment according to the technical essence of the present application still belongs to the scope of the technical scheme of the present application.

Claims

1. A process gas delivery system for use in a sputtering coating equipment, comprising a three-flowmeter group (10) located outside the coating chamber and a gas delivery pipeline (20) connecting the three flowmeter groups (10), characterized in that: The gas supply pipeline (20) includes an inlet pipeline (21), an inlet port (22), a closing pipe (25), an outlet port (23), and an outlet pipeline (24) connected in sequence. The inlet pipeline (21) is connected to the flow meter group (10) and is provided with a first valve (30). The outlet pipeline (24) is connected to the exhaust component (40) located in the coating chamber and is provided with a second valve (50).

2. The process gas delivery system for sputtering coating equipment according to claim 1, characterized in that: The air intake pipe (21) is divided into a first pipe (211) for conveying argon, a second pipe (212) for conveying oxygen, and a third pipe (213) for conveying nitrogen, and is connected to one end of the three flow meter groups (10) for conveying the corresponding gas.

3. The process gas delivery system for sputtering coating equipment according to claim 2, characterized in that: The air intake interface (22) adopts a four-way interface; the first channel of the four-way interface is connected to one end of the first pipe (211), the second channel of the four-way interface is connected to one end of the second pipe (212), the third channel of the four-way interface is connected to one end of the third pipe (213), and the fourth channel of the four-way interface is connected to one end of the closing pipe (25).

4. The process gas delivery system for sputtering coating equipment according to claim 3, characterized in that: The air outlet (23) adopts a three-way interface; the first end of the three-way interface is connected to the other end of the closing pipe (25), and the second and third ends of the three-way interface are connected to the air outlet pipeline (24).

5. A process gas delivery system for use in sputtering coating equipment according to claim 4, characterized in that: The exhaust pipe (24) is divided into a first exhaust pipe (241) and a second exhaust pipe (242). One end of the first exhaust pipe (241) and the second exhaust pipe (242) are connected to the second and third ports of the three-way interface, respectively, and the other end is connected to the exhaust component (40).

6. A process gas delivery system for sputtering coating equipment according to claim 2, characterized in that: The first valve (30) is a solenoid valve and there are three of them, which are respectively located on the first pipe (211), the second pipe (212) and the third pipe (213).

7. A process gas delivery system for use in sputtering coating equipment according to claim 5, characterized in that: The second valve (50) is a solenoid valve and there are two of them, which are respectively located on the first air outlet pipe (241) and the second air outlet pipe (242).

8. An exhaust pipe for conveying process gas in a sputtering coating equipment, comprising the exhaust element (40) as described in any one of claims 1-7, characterized in that: The exhaust component (40) includes a first pipe body (41), a second pipe body (42), and a third pipe body (43) that are sequentially connected. A positioning block (44) is connected between the first pipe body (41), the second pipe body (42), and the third pipe body (43) so that an air passage (45) is formed between the first pipe body (41) and the second pipe body (42) and between the second pipe body (42) and the third pipe body (43) and is divided into an upper part and a lower part. The exhaust pipe (24) is connected to the third pipe body (43), and the upper part and the lower part of the first pipe body (41), the second pipe body (42), and the third pipe body (43) are provided with through holes (46) arranged at equal intervals.

9. An exhaust pipe for conveying process gas in a sputtering coating equipment according to claim 8, characterized in that: The number of through holes (46) on the first tube (41), the second tube (42) and the third tube (43) decreases by a factor of two, and the orientation of the through holes (46) on the second tube (42) is opposite to that of the first tube (41) and the third tube (43).

10. An exhaust pipe for conveying process gas in a sputtering coating equipment according to claim 9, characterized in that: The through holes (46) on the first tube (41), the second tube (42) and the third tube (43) are staggered, and the through holes (46) in the upper half and the lower half of the first tube (41), the second tube (42) and the third tube (43) correspond to the distance between two adjacent through holes (46).

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