Coating equipment

Abstract

The utility model discloses coating equipment which at least comprises a process box body, a gas inlet device, at least two partition plates, a conveying device and a gas extractor, the gas inlet device is arranged on the upper portion of the process box body, treatment cavities used for coating treatment are formed between the pair of partition plates and the process box body, and the gas inlet device is used for spraying process gas to all the treatment cavities; the at least one group of wafer boats are placed on the conveying device, fractures on two opposite sides of a plurality of battery pieces in the wafer boats are respectively positioned on two sides, and the air extracting device is used for extracting air from the bottom of the processing cavity. By means of the arrangement, the cross sections on the two sides of the battery piece can be subjected to film coating treatment at the same time in one-time film coating treatment, and the efficiency is high.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of photovoltaic cell production and manufacturing, and in particular to a coating equipment. BACKGROUND

[0002] In the field of photovoltaic cell production and manufacturing, most component manufacturers use half-slices, three-slices, four-slices formed by laser cutting to be connected, laid out, laminated, and finally form photovoltaic components. The cut cell pieces will form a cross section at the cutting position, resulting in a decrease in the power generation efficiency of the components. It has been verified by experiments that applying ALD (Atomic Layer Deposition) treatment to the cross section of the cell piece can effectively avoid the decrease in the power generation efficiency. The existing ALD equipment can only spray passivation on the single side of the cross section of the cell piece. If the opposite sides of the cell piece both have cross sections, the cell piece needs to be taken out and adjusted after processing one side of the cross section, and then the other side of the edge is processed, which has a low processing efficiency and wastes time. CONTENT OF THE UTILITY MODEL

[0003] The purpose of the present application is to provide a coating equipment to solve the problem of long time consumption and low efficiency of the existing coating equipment.

[0004] To achieve this purpose, the present application adopts the following technical solutions:

[0005] A coating equipment, the coating equipment comprises a process box body with one end open, a first gas inlet device, and at least two partitions, wherein:

[0006] The at least two partitions are arranged in the process box body along a first horizontal direction, and a processing cavity is formed between a pair of partitions, or a processing cavity is formed between adjacent partitions;

[0007] A group of crystal boats is accommodated in the processing cavity, and at least one group of vertically arranged cell piece groups is carried in the crystal boats, each group of cell piece groups is arranged along a second horizontal direction, the first horizontal direction is perpendicular to the second horizontal direction, and the two side cross sections of the cell pieces in the cell piece group respectively face the adjacent partitions;

[0008] The first gas inlet device is arranged at the inner top of the process box body and faces the processing cavity, the first gas inlet device fills the process gas into the processing cavity to form at least one gas flow channel on the inner side of the pair of partitions, and the gas flow channels on the two sides of the crystal boats in the processing cavity respectively spray passivation on the two side cross sections of the cell pieces in the crystal boats.

[0009] Through the above arrangement, the two opposite edge sections of a large number of battery pieces can be passivated automatically and conveniently, the coating efficiency is effectively improved, and the production time is saved. In the above arrangement, the two side sections of the battery piece are respectively located at the two spraying sides of the boat, and the two side sections are both subjected to spraying. Similarly, when the battery piece has only one side section, the placement position of the battery piece in the boat can be adjusted so that the side section is located at one of the two spraying sides. The coating equipment provided in the application can also be used for coating the battery piece with a single side section.

[0010] Optionally, the partition plate includes at least two pairs of partition plates, and a processing cavity is formed between each pair of partition plates. An isolation cavity is formed between adjacent two pairs of partition plates and between the outermost partition plate and the process box.

[0011] The processing cavity is formed by the partition plate, which can seal and accommodate a group of boats and form airflow channels on both sides of the boat. In addition, the consumption of process gas is small, which reduces the cost.

[0012] Optionally, the coating equipment further includes a first heating member, which is installed in the isolation cavity or inside the partition plate.

[0013] Optionally, the first heating member is an infrared lamp tube or an armored heater, and the first heating member is used to heat the partition plate to heat the section of the battery piece.

[0014] In this way, the section of the battery piece is heated, which at least improves the speed of the coating reaction, saves production time, does not need long-time spraying, and reduces production cost.

[0015] Optionally, the coating equipment further includes a second gas inlet device, which fills inert gas into the isolation cavity.

[0016] The inert gas filled into the isolation cavity can prevent the process gas in the processing cavity from leaking into the isolation cavity, thereby causing a production accident. At the same time, the inert gas can be used to clean the first heating member to prevent the first heating member from being corroded by the possibly leaked process gas.

[0017] Optionally, the coating equipment further includes a gas extraction device, which is arranged at the bottom of the process box and is configured to extract the gas in each processing cavity and isolation cavity.

[0018] By arranging the gas extraction device, the process gas or inert gas can be extracted and timely removed from the processing cavity or the isolation cavity to prevent gas accumulation and mixing.

[0019] Optionally, the first air inlet device comprises at least a first air inlet cavity, a second air inlet cavity, a third air inlet cavity, and a first spray head, a second spray head, a third spray head, each processing cavity is provided with the first spray head, the second spray head, the third spray head on the top, the first spray head is communicated with the first air inlet cavity, the second spray head is communicated with the second air inlet cavity, and the third spray head is communicated with the third air inlet cavity.

[0020] The first air inlet cavity, the second air inlet cavity and the third air inlet cavity spray different process gases into the processing cavity through the communicated spray head.

[0021] By setting three mutually independent air inlet cavities and spray heads communicated with them, different process gases supplied from outside can be collected, and different process gases can be sprayed to the opposite edge sections of the battery piece at different times according to the predetermined setting.

[0022] Optionally, a plurality of groups of first spray heads, second spray heads and third spray heads are arranged on the top of the same processing cavity, and the plurality of groups of first spray heads, second spray heads and third spray heads are arranged alternately along the second horizontal direction.

[0023] By alternately arranging the spray heads communicated with different air inlet cavities in each processing cavity, it is ensured that the opposite edges of the battery piece are uniformly sprayed.

[0024] Optionally, the first spray head, the second spray head and the third spray head are inclined, so that the spraying direction forms an angle of not more than 15° with the section of the battery piece.

[0025] By setting the spray head to be inclined, the film coating effect of the battery piece section at low height can be avoided.

[0026] Optionally, the first air inlet device comprises three uniform gas mechanisms, and the three uniform gas mechanisms are arranged in the first air inlet cavity, the second air inlet cavity and the third air inlet cavity respectively.

[0027] By arranging the uniform gas mechanisms in the three air inlet cavities, the process gas supplied from outside can be homogenized, so that the gas concentration of the spray head communicated with the air inlet cavity is uniform when supplying gas to each processing cavity.

[0028] Optionally, the first air inlet device is provided with a second heating member, and the second heating member is used for preheating the process gas provided by the first air inlet device.

[0029] The gas used for spraying is heated before spraying, which improves the speed of film coating reaction and saves time.

[0030] Optionally, the film coating equipment further comprises a conveying device and a door sealing mechanism, wherein:

[0031] The conveying device comprises a driving mechanism and at least one conveying mechanism in transmission connection with the driving mechanism, each conveying mechanism is arranged in one processing cavity, and the conveying mechanism is configured to carry a group of crystal boats and send the group of crystal boats into one processing cavity under the driving of the driving mechanism;

[0032] The door sealing mechanism is configured to seal the process box after the conveying mechanisms send the groups of crystal boats into the processing cavities, so that each processing cavity forms a closed environment.

[0033] The conveying device and the door sealing mechanism are arranged, which can efficiently send or take out the group of crystal boats from the box, and the door sealing mechanism can be opened when the group of crystal boats is taken out or placed, and can keep each cavity closed when the film coating process is performed.

[0034] Optionally, the conveying mechanism comprises a linear track extending along the second horizontal direction and a carrying table slidingly arranged on the linear track, the carrying table is used to carry a group of crystal boats, and the driving mechanism is configured to drive the carrying table to move along the linear track to send or take out the group of crystal boats from the process box; or,

[0035] The conveying mechanism comprises a cantilever, the cantilever extends along the second horizontal direction, and the cantilever is used to carry a group of crystal boats.

[0036] Two embodiments for carrying crystal boats are provided, which facilitate efficient and automatic sending or taking out of the group of crystal boats from the box.

[0037] Optionally, the carrying table or the cantilever comprises at least two limiting members arranged along the second horizontal direction, the limiting members extend along the vertical direction, and adjacent two limiting members are used to limit the crystal boats arranged along the vertical direction.

[0038] The limiting members are further arranged on the carrying table, which prevent the crystal boats from overturning along the conveying direction or the opposite direction during the conveying of the group of crystal boats.

[0039] Optionally, the door sealing mechanism comprises a door sealing driving assembly, a sealing door arranged on the driving end of the door sealing driving assembly, and a door sealing guide, the sealing door is slidingly arranged on the door sealing guide, the door sealing guide extends along the first horizontal direction or the vertical direction, and the door sealing driving assembly is used to drive the sealing door to close the opening of the process box after all the crystal boats are sent into the process box by the conveying device; or,

[0040] The door sealing mechanism comprises a sealing door arranged on the driving end of the driving mechanism, so that the sealing door closes the opening of the process box after all the crystal boats are sent into the process box by the driving mechanism driving the conveying mechanism.

[0041] Optionally, the spacing between the pair of partitions gradually decreases along the vertical downward direction.

[0042] By reducing the distance between the two partitions in the vertical downward direction, the process gas sprayed is more likely to contact the low-height cell piece section, avoiding poor plating quality of the low-height cell piece section.

[0043] The plating equipment provided by the present application can efficiently plate the sections of the opposite sides of the cell piece, without repeatedly taking out and adjusting the direction of the crystal boat, thereby saving time. BRIEF DESCRIPTION OF DRAWINGS

[0044] Figure 1 is a structural diagram of the plating equipment of the present application in a first perspective view;

[0045] Figure 2 is a structural diagram of the plating equipment of the present application in a second perspective view;

[0046] Figure 3 is a structural diagram of a first embodiment of the partition and heating element in the present application;

[0047] Figure 4 is a structural diagram of a second embodiment of the partition and heating element in the present application;

[0048] Figure 5 is a structural diagram of a third embodiment of the partition and heating element in the present application.

[0049] Figures 1 to 5 The following reference signs are included in the drawings:

[0050] 1, process box; 2, first gas inlet device; 21, gas inlet

[0051] 3, partition; 31, processing cavity; 32, first heating element; 33, isolation cavity

[0052] 4, conveying device; 5, gas extraction device; 7, crystal boat. DETAILED DESCRIPTION

[0053] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the present application will be further described in detail below in combination with the drawings and specific embodiments.

[0054] In the field of photovoltaic cell production and manufacturing, most component manufacturers use half-slices, three-slices, four-slices formed by laser cutting to be connected, laid out, laminated, and finally form photovoltaic modules. The cut cell pieces will form a cross section at the cut, resulting in reduced power generation efficiency of the module. Experimental verification shows that applying ALD (Atomic Layer Deposition) treatment to the cross section of the cell piece can effectively avoid the reduction of power generation efficiency. The existing ALD equipment can only spray passivation on the single side of the cross section of the cell piece. If the cell piece has a cross section on both sides, it needs to be taken out and adjusted after processing one side of the cross section, and then the other side edge is processed, which has low processing efficiency and wastes time.

[0055] To solve this problem, the present application provides a coating equipment, as shown in Figures 1-3

[0056] The coating equipment includes a process box 1 with one end open, a first gas inlet device 2, and at least two partitions 3, wherein:

[0057] The at least two partitions 3 are arranged in the process box 1 along a first horizontal direction, and between each pair of partitions 3, a processing cavity 31 can be formed, or alternatively, between adjacent partitions 3, a processing cavity 31 is formed, for example, three partitions 3 arranged in sequence form two processing cavities 31;

[0058] The processing cavity 31 is used to accommodate a group of crystal boats 7 Figure 1 Only the highest crystal boat 7 and the lowest crystal boat 7 are shown in the figure, and the middle crystal boat 7 is hidden), and the crystal boat 7 carries at least one group of vertically arranged cell piece groups, each group of cell piece groups is arranged along a second horizontal direction, and the first horizontal direction is perpendicular to the second horizontal direction. The two side cross sections of the cell pieces in the cell piece group are respectively directed towards the adjacent partitions 3 to receive the spraying of the process gas;

[0059] The first gas inlet device 2 is arranged at the inner top of the process box 1 and is directed towards the processing cavity 31, and the first gas inlet device 2 fills the process gas into the processing cavity 31 to form at least one gas flow channel on the inner side of each pair of partitions 3. The gas flow channels on both sides of the crystal boat 7 in the processing cavity 31 spray and passivate the two side cross sections of the cell pieces in the crystal boat 7.

[0060] ​With the above setup, passivation treatment of two opposite edge sections of a large batch of solar cells can be performed efficiently and automatically, effectively improving coating efficiency and saving production time. In the above setup, the two side sections of the solar cell are respectively located on the two spray sides of the crystal boat 7, and both side sections are sprayed. Similarly, when the solar cell has only one side section, the placement position of the solar cell in the crystal boat 7 can be adjusted so that the side section is located on one of the two spray sides. The coating equipment provided in this application can also perform coating treatment on solar cells with a single side section.

[0061] Optionally, the separator 3 includes at least two pairs of separators 3, with a processing chamber 31 formed between each pair of separators 3. Isolation chambers 33 are formed between adjacent pairs of separators 3 and between the outermost separator 3 and the process housing 1. A set of crystal boats 7 is located in one processing chamber 31, with channels for process gas formed on both sides. The cross-sections of the solar cells inside the crystal boats 7 are sprayed with process gas. The processing chambers 31 are provided to accommodate the crystal boats 7, and the isolation chambers 33 are provided to isolate each processing chamber 31. The separators 3 on both sides are close to the crystal boats 7, which can reduce gas consumption and save costs.

[0062] To improve the effectiveness of the coating reaction, specifically, to at least increase the reaction rate and / or coating consistency, as a feasible embodiment, such as... Figure 1 , Figures 3-5 Each partition 3 has a first heating element 32 on the side opposite to the crystal boat 7. That is, the first heating element 32 is provided in the isolation cavity 33. The first heating element 32 is used to heat the cross-section of the battery cell by heating the partition 3.

[0063] During assembly, the first heating element 32 can be installed in various forms, such as: Figure 5 This is a third embodiment of the partition 3 and the first heating element 32, wherein the first heating element 32 can be disposed within the isolation cavity 33 without contact with the partition 3; for example... Figure 4 In a second embodiment of the partition 3 and the first heating element 32, the first heating element 32 can be disposed on the side of the partition 3 located in the isolation cavity 33; as shown Figure 3 This is a first embodiment of the partition 3 and the first heating element 32, where the first heating element 32 can be disposed inside the partition 3. The first heating element 32 can be selected from existing heaters, such as infrared lamps, armored heaters, or other heaters. Infrared lamps heat through light irradiation, so a small number of infrared lamps are sufficient to achieve the required irradiation heating range. The heating section of the armored heater is a heating tube extending in an arc shape; to ensure the required heating range, the heating tube needs to extend over a larger area. Both are low-cost and easy to obtain and maintain.

[0064] When the first heating member 32 is arranged in the isolation chamber 33 without contacting the partition plate 3, the first heating member 32 can be an infrared lamp tube. When the first heating member 32 is arranged on one side of the partition plate 3 or inside the partition plate 3, a sheathed heater can be selected. The heating pipe of the sheathed heater extends along the side of the partition plate 3 or inside the partition plate 3 in an arch shape, so that the partition plate 3 becomes a heating plate, which can significantly reduce heat loss and rapidly increase the temperature.

[0065] As an optional embodiment, the process box 1 is also provided with the first heating member 32 parallel to the inner side of the partition plate 3, so that each processing chamber 31 is located in a suitable process environment, which is beneficial to the film plating reaction.

[0066] Alternatively, the first heating member 32 can include a combination of the above two types of heaters, for example, the heating pipe of the sheathed heater is arranged inside the partition plate 3, and the infrared lamp tube is arranged on the side of the partition plate 3 located in the processing chamber 31, and the two are used in combination.

[0067] In addition, it can be determined that the heating range of the first heating member 32 covers the partition plate 3, and more specifically, the first heating member 32 is used for indirectly heating the cross section of the battery sheet, so the projection of the cross section of each battery sheet on the partition plate 3 along the first horizontal direction or the opposite direction is within the heating range of the first heating member 32. After the cross section of the battery sheet is heated, it is beneficial to the film plating reaction, which can improve the speed and / or quality of the film plating reaction and save the amount of process gas.

[0068] In view of at least strengthening the isolation of the isolation chamber 33, the film plating device can further include a second gas inlet device. The second gas inlet device can include a plurality of fourth spray heads, and can be in gas communication with any one of the first gas inlet chamber, the second gas inlet chamber, and the third gas inlet chamber, or can be separately arranged. The fourth spray heads are distributed on the top of each isolation chamber 33 and can be arranged at intervals along the second horizontal direction. The fourth spray heads are used to fill inert gases such as nitrogen into each isolation chamber 33. For cost considerations, ordinary air can also be introduced. If the second gas inlet device is separately arranged, the timing of supplying process gas can be flexibly controlled, such as continuous gas supply during film plating, intermittent gas supply during film plating, gas supply only after each film plating, etc. The supplied gas can at least flush the process gas that may leak from the processing chamber 31 into the isolation chamber 33, and further can carry the leaked process gas out of the isolation chamber 33. In addition, it can also protect the first heating member 32 from the influence of the leaked gas, avoiding pollution, corrosion, etc. of the first heating member 32.

[0069] In view of the fact that gas may accumulate and mix in the processing chamber 31 in the isolation chamber 33, an exhaust device 5 can be arranged in the film plating device. Specifically, the exhaust device 5 can be arranged at the bottom of the process box 1 to exhaust the gas in each processing chamber 31 and each isolation chamber 33.

[0070] In order to facilitate the smooth progress of the coating process, the first gas inlet device 2 can at least include three non-communicating gas inlets, i.e., a first gas inlet, a second gas inlet, and a third gas inlet, and a first shower head, a second shower head, and a third shower head. The top of each processing chamber 31 is provided with a first shower head, a second shower head, and a third shower head. The first shower head is in communication with the first gas inlet, the second shower head is in communication with the second gas inlet, and the third shower head is in communication with the third gas inlet. The first gas inlet, the second gas inlet, and the third gas inlet spray different process gases into the processing chamber 31 through the communicating shower heads at the appropriate time to complete the coating process of the battery piece section.

[0071] Further, in order to uniformly spray the battery piece section with different process gases, a plurality of first shower heads, second shower heads, and third shower heads can be arranged alternately along the second horizontal direction.

[0072] Alternatively, the first shower head, the second shower head, and the third shower head are all inclined to form an angle of not more than 30° with the battery piece section, for example, the angle can be selected as 10°, 15°, 17°, 26°, or 30°. The inclined three shower heads can be located on both sides of each group of crystal boats 7 in the processing chamber 31 to avoid poor coating effect of the battery piece section at a low height.

[0073] The first shower head, the second shower head, and the third shower head mentioned above can be selected from various embodiments, such as a gas nozzle type shower head, a dense small round hole, a long waist hole, and the like.

[0074] Similarly, the battery piece section at a low height may not be fully sprayed with process gas, resulting in uneven coating effect and poor product consistency. To solve this problem, the distance between the two baffles 3 arranged on both sides of the same group of crystal boats 7 can be gradually reduced along the vertically downward direction, so that the processing chamber 31 gradually narrows along the vertically downward direction. The flow rate of the process gas sprayed downward from the top is accelerated and approaches the battery piece section at a low height, ensuring that the battery piece section at a low height is subjected to coating treatment and improving the coating effect. The upper and lower ends of a pair of baffles 3 are respectively connected to the process box 1. Specifically, the inside of the process box 1 is provided with a plurality of mounting pieces at the upper or lower part along the second horizontal direction. The upper and lower ends of the baffles 3 are respectively connected to the process box 1 through a mounting bracket. By adjusting the position of the mounting piece, the extension direction of the pair of baffles 3 can form an angle with the vertical direction, i.e. Figure 1 The baffles 3 extend along the vertical direction, the upper end is inclined outward away from the crystal boat 7, and the two baffles 3 form an inverted eight-shaped arrangement.

[0075] For example, the baffles 3 extend along the vertical direction, the upper end is inclined outward away from the crystal boat 7, and the two baffles 3 form an inverted eight-shaped arrangement. Figure 2As shown, for the convenience of accessing the process gas pipeline, three gas inlets 21 in communication with the first gas inlet cavity, the second gas inlet cavity and the third gas inlet cavity can be arranged in parallel at the same position. When the external gas source supplies gas through the three gas inlets 21 respectively, the process gas inevitably appears uneven gas concentration inside the three gas inlet cavities, that is, the farther away from the gas inlet hole 21, the lower the concentration. In this regard, the first gas inlet device 2 further includes three structurally identical gas equalizing mechanisms, which are respectively arranged inside the first gas inlet cavity, the second gas inlet cavity and the third gas inlet cavity. The externally supplied process gas is uniformly treated by the gas equalizing mechanism before entering the respective shower head for spraying. Alternatively, the gas equalizing mechanism includes at least one mesh plate, and the externally supplied process gas enters the shower head after being uniformly treated by the at least one mesh plate; or the gas equalizing mechanism includes at least two mesh plates, and the through holes on the adjacent two mesh plates are not arranged corresponding to each other, so as to force the externally supplied process gas to move a longer distance and achieve a better gas equalizing effect. The arrangement of the gas equalizing mechanism is not limited to this.

[0076] The first gas inlet cavity, the second gas inlet cavity and the third gas inlet cavity described above are all used to receive different process gases provided externally. Generally, the temperature of the process gas may be low, which may affect the effect of the film plating reaction. Therefore, the first gas inlet device 2 is optionally provided with a second heating member inside, which is used to preheat the process gas to be sprayed into the processing chamber 31.

[0077] In order to efficiently send multiple groups of crystal boats 7 into the processing chamber 31 and form a sealed environment, the film plating equipment further includes a conveying device 4 and a door sealing mechanism. The conveying device 4 includes a driving mechanism and at least one conveying mechanism in transmission connection with the driving mechanism. Each conveying mechanism is arranged in one processing chamber 31 and is configured to carry a group of crystal boats 7 and send the group of crystal boats 7 into one processing chamber 31 under the driving of the driving mechanism. The door sealing mechanism is configured to seal the process box 1 after each conveying mechanism sends each group of crystal boats 7 into the processing chamber 31, so as to form a sealed environment in each processing chamber 31.

[0078] Specifically, the conveying mechanism includes a straight rail extending along the second horizontal direction and located inside each processing chamber 31, and a carrying table slidingly arranged on the straight rail. The carrying table is used to carry a group of crystal boats 7, and the driving mechanism is configured to drive the carrying table to move along the straight rail, so as to send or take out a group of crystal boats 7 from the process box 1; or the conveying mechanism includes a cantilever extending along the second horizontal direction, and the cantilever is used to carry a group of crystal boats 7. Under the driving of the driving mechanism, the carrying table or the cantilever can send a group of crystal boats 7 into one processing chamber 31, which is convenient for film plating processing and has high efficiency.

[0079] Since the crystal boat 7 is heavy, its inertia is also large, and when a group of crystal boats 7 is sent into the processing cavity 31 or taken out from the processing cavity 31, the crystal boats 7 are prone to shaking or even tipping over. To avoid this, the support table and / or the cantilever can include at least two limiters arranged along the second horizontal direction, and the limiters extend along the vertical direction. Two adjacent limiters are used to limit a plurality of crystal boats 7 arranged along the vertical direction. The crystal boats 7 can be arranged in a stacked manner or carried on the limiters. Alternatively, two adjacent limiters are used to limit at least one column of crystal boats 7. When there is only one column of crystal boats 7, the two adjacent limiters at least contact the side of the column of crystal boats 7 perpendicular to the first horizontal direction, preventing the column of crystal boats 7 from shaking. When the two adjacent limiters are used to limit at least two columns of crystal boats 7, the columns of crystal boats 7 are arranged along the second horizontal direction, and the two limiters can only contact the sides of the first column of crystal boats 7 and the last column of crystal boats 7 along the second horizontal direction. The crystal boats 7 of adjacent columns can abut against each other along the second horizontal direction, finally achieving the limitation of each crystal boat 7.

[0080] Further, the limiters on one side of the crystal boats 7 can be provided with a plurality of layers of carrying plates, and each crystal boat 7 is placed on the carrying plates. The carrying plates can be provided with a limiting structure, and each crystal boat 7 is at least subjected to the limiting action of the limiters and possibly subjected to the limiting action of the limiting structure. Obviously, neither the limiters nor the carrying plates will block the cross section of the battery piece.

[0081] To keep the process box 1 closed during the coating process, a door sealing mechanism can be provided. The door sealing mechanism includes a door sealing driving assembly, a sealing door, and a door sealing guide. The sealing door is slidably arranged on the door sealing guide and is in transmission connection with the door sealing driving assembly. Under the driving of the door sealing driving assembly, the sealing door can slide along the door sealing guide. Alternatively, the door sealing driving assembly can include a cylinder or a servo motor, a linear motor, etc. as a power source, and include components for transmission, such as synchronous pulley structure, screw module, gear and rack, etc. At the same time, the door sealing guide can be selected from linear guide, linear module, etc. to at least achieve the guiding function. When the sealing door is driven to be buckled on the inlet of the process box 1, at least the inlet of the process box 1 is sealed, preliminarily meeting the process requirements of coating. Further, when the sealing door is buckled on the inlet of the process box 1, it not only forms a sealed contact with the inlet, but also forms a sealed contact with each partition plate 3, so that the processing cavity 31 and / or the isolation cavity 33 become sealed independent cavities, which is conducive to the coating process.

[0082] In another possible embodiment, the door sealing mechanism comprises at least a sealing door, which is directly arranged on the driving end of the driving mechanism and is synchronously moved with each of the wafer boats 7 under the driving of the driving mechanism. When each of the wafer boats 7 is sent into the processing cavity 31, the sealing door is substantially simultaneously in sealing contact with at least the inlet of the process box 1.

[0083] The process gas involved in the present application refers to the gas needed for film plating, for example, TMA mixed gas, water vapor mixed gas and nitrogen. Among them, any one of the TMA mixed gas and the water vapor mixed gas can be prepared by a bubbling method, that is, the third gas is introduced into the liquid TMA or the liquid water below the liquid surface, and the bubbles floating to the liquid surface and breaking will produce the TMA mixed gas or the water vapor mixed gas carried by the third gas. Alternatively, the third gas can be an inert gas, for example, nitrogen. If it is intended to form a film layer of other material on the section of the battery piece, other process gases can be selected, which are not enumerated here.

[0084] The above embodiments only illustrate the basic principles and characteristics of the present application, and the present application is not limited to the above embodiments. Without departing from the spirit and scope of the present application, the present application has various changes and modifications, and these changes and modifications all fall within the scope of the present application. The scope of protection of the present application is defined by the appended claims and their equivalents.

Claims

1. A coating equipment, characterized in that, The coating equipment includes a process box with one open end, a first air inlet device, and at least two partitions, wherein: The at least two partitions are spaced apart in the process chamber along a first horizontal direction, and a processing cavity is formed between a pair of partitions, or a processing cavity is formed between adjacent partitions; The processing cavity is used to accommodate a set of crystal boats, which carry at least one set of vertically arranged battery cell groups. Each set of battery cell groups is arranged along a second horizontal direction, and the first horizontal direction is perpendicular to the second horizontal direction. The two sides of the battery cells in the battery cell group face the adjacent partition. The first air intake device is disposed on the inner top of the process box and facing the processing chamber. The first air intake device fills the processing chamber with process gas at least in the direction of the processing chamber, so as to form an airflow channel at least on the side of the partition facing the crystal boat. The airflow channels on both sides of the crystal boat in the processing chamber spray passivate the two cross sections of the battery cells in the crystal boat.

2. The coating equipment according to claim 1, characterized in that, The partition includes at least two pairs of partitions, with each pair of partitions forming a processing cavity. Isolation cavities are formed between adjacent pairs of partitions and between the outermost partition and the process box.

3. The coating equipment according to claim 2, characterized in that, The coating equipment further includes a first heating element, which is installed inside the isolation cavity or the partition.

4. The coating equipment according to claim 3, characterized in that, The first heating element is an infrared lamp or an armored heater, and the first heating element is used to heat the separator to heat the cross-section of the battery cell.

5. A coating equipment according to claim 2, characterized in that, The coating equipment also includes a second air intake device, which fills the isolation chamber with inert gas.

6. The coating equipment according to claim 2, characterized in that, The coating equipment also includes an air extraction device, which is located at the bottom of the process chamber and is configured to extract gas from each of the processing chambers and the isolation chamber.

7. The coating equipment according to claim 1, characterized in that, The first air intake device includes at least a first air intake chamber, a second air intake chamber, and a third air intake chamber that are not interconnected, as well as a first spray head, a second spray head, and a third spray head. The top of each processing chamber is provided with the first spray head, the second spray head, and the third spray head. The first spray head is connected to the first air intake chamber, the second spray head is connected to the second air intake chamber, and the third spray head is connected to the third air intake chamber. The first air inlet chamber, the second air inlet chamber, and the third air inlet chamber all spray different process gases into the processing chamber through connected spray heads.

8. The coating equipment according to claim 7, characterized in that, Multiple sets of first spray heads, second spray heads, and third spray heads are arranged at the top of the same processing chamber, and these multiple sets of first spray heads, second spray heads, and third spray heads are arranged alternately along the second horizontal direction.

9. The coating equipment according to claim 7, characterized in that, The first, second, and third spray heads are all tilted so that the spray direction forms an angle of no more than 15° with the cross-section of the battery cell.

10. The coating equipment according to claim 7, characterized in that, The first air intake device includes three air equalization mechanisms, which are respectively disposed in the first air intake chamber, the second air intake chamber, and the third air intake chamber.

11. The coating equipment according to claim 1, characterized in that, The first air intake device is equipped with a second heating element, which is used to preheat the process gas provided by the first air intake device.

12. A coating apparatus according to claim 1, characterized in that, The coating equipment also includes a conveying device and a sealing mechanism, wherein: The conveying device includes a drive mechanism and at least one conveying mechanism that is pulsatorically connected to the drive mechanism. Each conveying mechanism is disposed within one of the processing chambers. The conveying mechanism is configured to carry a set of crystal boats and, under the drive of the drive mechanism, to feed the set of crystal boats into one of the processing chambers. The sealing mechanism is configured to close the process box after each of the conveying mechanisms has sent each set of crystal boats into the processing chamber, thereby creating a sealed environment for each of the processing chambers.

13. The coating equipment according to claim 12, characterized in that, The conveying mechanism includes a linear track extending along a second horizontal direction and a support platform slidably disposed on the linear track. The support platform is used to carry a set of crystal boats. The driving mechanism is configured to drive the support platform to move along the linear track to deliver a set of crystal boats into or remove them from the process housing; or... The conveying mechanism includes a cantilever that extends along a second horizontal direction and is used to carry a set of crystal boats.

14. The coating equipment according to claim 13, characterized in that, The support platform or the cantilever includes at least two limiting members, which are arranged along a second horizontal direction and extend along a vertical direction. Two adjacent limiting members are used to limit the crystal boat arranged along the vertical direction.

15. The coating equipment according to claim 12, characterized in that, The sealing mechanism includes a sealing drive assembly, a sealing door disposed on the drive end of the sealing drive assembly, and a sealing guide. The sealing door is slidably disposed on the sealing guide, which extends along a first horizontal or vertical direction. The sealing drive assembly is used to drive the sealing door to close and seal the opening of the process box after the conveying device has fed all the crystal boats into the process box; or... The sealing mechanism includes a sealing door, which is disposed on the drive end of the drive mechanism, such that after the drive mechanism drives the conveying mechanism to send all the crystal boats into the process box, the sealing door closes the opening of the process box.

16. The coating equipment according to claim 1, characterized in that, The distance between the two paired partitions gradually decreases in the vertical downward direction.

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