Connecting structure of large thermal field guide cylinder and water cooling screen

Abstract

The utility model discloses a large thermal field guide cylinder and water cooling screen connecting structure, which comprises a water cooling screen hanging plate and a heat conduction cylinder hanging piece rod, the water cooling screen hanging plate is detachably connected with the heat conduction cylinder hanging piece rod through an embedded assembly, and the embedded assembly comprises an embedded groove which is arranged at one end of the top of the water cooling screen hanging plate and is sunken downwards. One end of the water cooling screen hanging plate is provided with an open groove which corresponds to the embedded groove and is matched with the heat conduction cylinder hanging piece rod, the top end of the heat conduction cylinder hanging piece rod is provided with an embedded head matched with the embedded groove, and the embedded head is matched with the embedded groove in an embedded mode. According to the large-thermal-field flow guide cylinder and water-cooling screen connecting structure, the heat conduction cylinder hanging piece rod and the water-cooling screen hanging plate can be conveniently hung through the arranged embedded assembly, the moving space of the heat conduction cylinder hanging piece rod can be reduced, the stability is improved, and the crystal pulling accident that the heat conduction cylinder hanging piece rod is unhooked for seeding due to displacement is avoided.

Description

Technical Field

[0001] This utility model relates to the field of single crystal furnace technology, and in particular to a connection structure between a large hot zone guide tube and a water-cooled screen. Background Technology

[0002] With the increasing market demand for large-size silicon wafers, large-temperature single-crystal furnaces have become key equipment for achieving large-size crystal growth. Large-temperature single-crystal furnaces successfully meet the market demand for large-size single-crystal silicon crystals by providing a larger growth space and a more stable growth environment. Furthermore, the large hot zone not only improves the heating efficiency and crystal growth rate of the single-crystal furnace, significantly enhancing production efficiency, but also reduces energy consumption and production costs by optimizing energy utilization, bringing significant economic benefits to related enterprises.

[0003] However, with the increasing prevalence of large hot zones in single crystal furnaces, the traditional connection method between the water-cooled screen mounting plate and the flow guide tube is gradually revealing its disadvantages in stability and reliability in the current development trend of hot zones. Traditional cylindrical flow guide tube mounting components have a large range of motion. During long-term use, the mounting components must bear the weight of the flow guide tube as well as the vibrations and impacts that may occur during the operation of the single crystal furnace. This can lead to displacement of the mounting components, affecting crystal pulling production. They also have poor resistance to deformation, are easily deformed, and cannot stably withstand the weight of the flow guide tube and the vibrations and impacts that may occur during the operation of the single crystal furnace for extended periods. These problems not only affect the stability and uniformity of crystal growth but may also cause displacement of the mounting components, thus affecting crystal pulling production. Therefore, it is urgent to change the existing traditional structural connection method and improve the mounting plate structure to enhance the stability and reliability of the overall system.

[0004] Therefore, it is necessary to propose a connection structure between a large thermal field guide tube and a water-cooled screen to solve the above problems. Utility Model Content

[0005] The main purpose of this utility model is to provide a connection structure between a large thermal field guide tube and a water-cooled screen, which can effectively solve the problems in the background art.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] A connection structure between a large heat field guide tube and a water-cooled screen includes a water-cooled screen mounting plate and a heat-conducting tube mounting rod. The water-cooled screen mounting plate and the heat-conducting tube mounting rod are detachably connected by an embedded component. The embedded component includes an embedded groove recessed downward at one end of the top of the water-cooled screen mounting plate. One end of the water-cooled screen mounting plate has a slot corresponding to the embedded groove and adapted to the heat-conducting tube mounting rod. The top of the heat-conducting tube mounting rod has an embedded head adapted to the embedded groove. The embedded head is embedded and matched with the embedded groove.

[0008] Preferably, both the recessed groove and the recessed head have a "bowl-shaped" structure.

[0009] Preferably, the inner wall of the end of the slot is an arc-shaped surface, which is adapted to the arc of the side wall of the heat conduction cylinder hanger rod, and when the side wall of the heat conduction cylinder hanger rod is in contact with the inner end of the slot, the axis of the embedded groove coincides with the axis of the heat conduction cylinder hanger rod.

[0010] Preferably, an embedded ring protruding from the top of the water-cooled screen mounting plate is provided at the corresponding position of the embedded groove, and the inner wall of the embedded ring smoothly transitions with the inner wall of the embedded groove, and the space formed by the inner side of the embedded ring and the inner side of the embedded groove is fully adapted to the embedded head.

[0011] Preferably, one side of the embedded groove is provided with a notch corresponding to the slot, and both the notch and the slot are used for the entry and exit of the heat-conducting cylinder hanger rod.

[0012] Preferably, the notch is larger than the slot;

[0013] The embedded ring is provided with a limiting component, which includes a receiving groove on one side of the notch and a slot on the other side of the notch. An arc-shaped limiting plate is movably connected to the inner side of the receiving groove, and one end of the limiting plate is used to engage with the slot. When one end of the limiting plate contacts the end of the receiving groove, the end of the limiting plate near the slot protrudes out of the notch.

[0014] Preferably, the limiting plate is provided with magnetic sheets at both the end for insertion into the slot and the end of the slot's inner cavity, and the two magnetic sheets have opposite magnetic properties.

[0015] Preferably, the embedded head and the heat-conducting cylinder hanger rod are integrally formed.

[0016] Preferably, the embedded head and the heat-conducting cylinder hanging rod are detachably connected by a screwing component;

[0017] The screwing component includes a mounting groove located at the bottom of the insert head. The inner wall of the mounting groove is provided with an internal thread, and the outer wall of the upper end of the heat-conducting cylinder hanger rod is provided with an external thread. The upper end of the heat-conducting cylinder hanger rod is threadedly engaged with the internal thread in the mounting groove through the external thread.

[0018] Preferably, an elastic element is vertically provided between the top of the heat-conducting cylinder hanger rod and the top of the inner side of the mounting groove.

[0019] Compared with the prior art, this utility model provides a connection structure between a large thermal field guide tube and a water-cooled screen, which has the following beneficial effects:

[0020] 1. The connection structure between the large hot zone guide tube and the water-cooled screen, through the embedded components, allows for easy connection between the heat conduction tube hanger rod and the water-cooled screen mounting plate. This reduces the movement space of the heat conduction tube hanger rod, increases stability, and prevents crystal pulling accidents caused by displacement leading to the heat conduction tube hanger rod detaching. The limiting components, together with the magnetic sheet, further enhance the safety of the connection between the heat conduction tube hanger rod and the water-cooled screen mounting plate, preventing detachment and providing secondary protection.

[0021] 2. The connection structure between the large heat field guide tube and the water-cooled screen is designed with a screwing component to facilitate the disassembly and assembly of the embedded head and the heat conduction tube hanging rod, thereby facilitating replacement and maintenance. The elastic component increases the stability of the connection between the embedded head and the heat conduction tube hanging rod. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of this utility model;

[0023] Figure 2 This is a structural diagram of the present invention in its disassembled state;

[0024] Figure 3 This is a schematic diagram of the embedded ring structure of this utility model;

[0025] Figure 4 This is a structural diagram of the limiting plate and the embedded ring of this utility model in their disassembled state;

[0026] Figure 5 This is a structural schematic diagram of the screwing component of this utility model.

[0027] In the diagram: 1. Water-cooled screen mounting plate; 2. Heat-conducting cylinder mounting rod; 3. Embedded head; 4. Embedded ring; 5. Slot; 6. Limiting plate; 7. Embedded groove; 8. Notch; 9. Magnetic sheet; 10. Slot; 11. Receiving groove; 12. Mounting groove; 13. Elastic element; 14. External thread; 15. Internal thread. Detailed Implementation

[0028] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0029] like Figure 1-5As shown, a connection structure between a large heat field guide tube and a water-cooled screen includes a water-cooled screen mounting plate 1 and a heat-conducting tube mounting rod 2. The water-cooled screen mounting plate 1 and the heat-conducting tube mounting rod 2 are detachably connected by an embedded component. The embedded component includes an embedded groove 7 recessed downward at one end of the top of the water-cooled screen mounting plate 1. One end of the water-cooled screen mounting plate 1 has a slot 5 corresponding to the embedded groove 7 and adapted to the heat-conducting tube mounting rod 2. The top of the heat-conducting tube mounting rod 2 has an embedded head 3 adapted to the embedded groove 7. The inner wall of the end of the slot 5 is an arc-shaped surface, which is adapted to the arc of the side wall of the heat-conducting tube mounting rod 2. When the inner end of the slot 5 is fitted, the axis of the embedded groove 7 coincides with the axis of the heat-conducting cylinder hanger rod 2. The embedded head 3 is embedded and matched with the embedded groove 7. The embedded groove 7 and the embedded head 3 are preferably "bowl-shaped" structures. The top of the water-cooled screen mounting plate 1 is provided with an embedded ring 4 protruding from the top of the water-cooled screen mounting plate 1 at the corresponding position of the embedded groove 7. The inner wall of the embedded ring 4 and the inner wall of the embedded groove 7 are smoothly transitioned. The space formed by the inner side of the embedded ring 4 and the inner side of the embedded groove 7 is completely adapted to the embedded head 3. A notch 8 corresponding to the slot 5 is provided on one side of the embedded groove 7. Both the notch 8 and the slot 5 are used for the entry and exit of the heat-conducting cylinder hanger rod 2.

[0030] Furthermore, a limiting component is provided on the embedded ring 4. The limiting component includes a receiving groove 11 on one side of the notch 8 and a slot 10 on the other side of the notch 8. An arc-shaped limiting plate 6 is movably connected to the inner side of the receiving groove 11, and one end of the limiting plate 6 is used to insert into the slot 10. The width of the notch 8 is greater than that of the slot 5, so that when one end of the limiting plate 6 contacts the end of the receiving groove 11, the end of the limiting plate 6 near the slot 10 protrudes out of the notch 8. A magnetic piece 9 is provided on the end of the limiting plate 6 used to insert into the slot 10 and at the end of the inner cavity of the slot 10, and the two magnetic pieces 9 have opposite magnetic properties.

[0031] As one embodiment, the embedded head 3 and the heat-conducting cylinder hanging rod 2 are connected by an integral molding.

[0032] For future maintenance and replacement convenience, another embodiment is that the embedded head 3 and the heat-conducting cylinder hanging rod 2 are detachably connected by a screwing component. The screwing component includes a mounting groove 12 located at the bottom of the embedded head 3, with an internal thread 15 on the inner wall of the mounting groove 12 and an external thread 14 on the outer wall of the upper end of the heat-conducting cylinder hanging rod 2. The upper end of the heat-conducting cylinder hanging rod 2 is threadedly engaged with the internal thread 15 in the mounting groove 12 through the external thread 14. To increase the stability of the connection between the embedded head 3 and the heat-conducting cylinder hanging rod 2, an elastic element 13 is vertically provided between the top of the heat-conducting cylinder hanging rod 2 and the top of the inner side of the mounting groove 12. The elastic element 13 is preferably a spring. When screwed, the elastic element 13 can be compressed, thereby generating a reverse force, which increases the pressure between the external thread 14 and the internal thread 15, thereby increasing stability and reducing the possibility of loosening.

[0033] It should be noted that this utility model is a connection structure between a large heat field guide tube and a water-cooled screen. In use, the embedded head 3 can be integrally formed with the heat conduction tube hanging rod 2 or can be detachably connected by a screwing component. Then, the heat conduction tube hanging rod 2 is aligned with the slot 5 and the notch 8, and then pushed in to the end. Finally, the heat conduction tube hanging rod 2 is loosened, so that the embedded head 3 enters the space formed by the embedded groove 7 and the embedded ring 4. Finally, the limiting plate 6 is pulled, so that one end of the limiting plate 6 is inserted into the slot 10, so that the two magnetic pieces 9 are magnetically connected.

[0034] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A connection structure between a large heat field guide tube and a water-cooled screen, comprising a water-cooled screen mounting plate (1) and a heat-conducting tube mounting rod (2), characterized in that: The water-cooled screen mounting plate (1) and the heat-conducting cylinder mounting rod (2) are detachably connected by an embedded component. The embedded component includes an embedded groove (7) recessed downward at one end of the top of the water-cooled screen mounting plate (1). One end of the water-cooled screen mounting plate (1) is provided with a slot (5) corresponding to the embedded groove (7) and adapted to the heat-conducting cylinder mounting rod (2). The top end of the heat-conducting cylinder mounting rod (2) is provided with an embedded head (3) adapted to the embedded groove (7). The embedded head (3) is embedded and matched with the embedded groove (7).

2. The connection structure between the large thermal field guide tube and the water-cooled screen according to claim 1, characterized in that: Both the recessed groove (7) and the recessed head (3) are "bowl-shaped" structures.

3. The connection structure between the large thermal field guide tube and the water-cooled screen according to claim 1, characterized in that: The inner wall of the end of the slot (5) is an arc-shaped surface, which is adapted to the arc of the side wall of the heat-conducting cylinder hanger rod (2). When the side wall of the heat-conducting cylinder hanger rod (2) is attached to the inner end of the slot (5), the axis of the embedded groove (7) coincides with the axis of the heat-conducting cylinder hanger rod (2).

4. The connection structure between the large thermal field guide tube and the water-cooled screen according to claim 1, characterized in that: An inset ring (4) protruding from the top of the water-cooled screen mounting plate (1) is provided at the corresponding position of the inset groove (7). The inner wall of the inset ring (4) and the inner wall of the inset groove (7) are smoothly connected. The space formed by the inner side of the inset ring (4) and the inner side of the inset groove (7) is fully adapted to the inset head (3).

5. The connection structure between the large thermal field guide tube and the water-cooled screen according to claim 4, characterized in that: The inner groove (7) has a notch (8) on one side that corresponds to the slot (5). Both the notch (8) and the slot (5) are used for the entry and exit of the heat-conducting cylinder hanger rod (2).

6. The connection structure between the large thermal field guide tube and the water-cooled screen according to claim 5, characterized in that: The notch (8) is larger than the slot (5); The inner ring (4) is provided with a limiting component, which includes a receiving groove (11) provided on one side of the notch (8) and a slot (10) provided on the other side of the notch (8). An arc-shaped limiting plate (6) is movably connected to the inner side of the receiving groove (11), and one end of the limiting plate (6) is used to engage with the slot (10). When one end of the limiting plate (6) contacts the end of the receiving groove (11), the end of the limiting plate (6) near the slot (10) protrudes out of the notch (8).

7. The connection structure between the large thermal field guide tube and the water-cooled screen according to claim 6, characterized in that: The limiting plate (6) is provided with a magnetic sheet (9) on the end that is used to insert into the slot (10) and at the end of the inner cavity of the slot (10), and the two magnetic sheets (9) have opposite magnetic properties.

8. The connection structure between the large thermal field guide tube and the water-cooled screen according to claim 1, characterized in that: The embedded head (3) and the heat-conducting cylinder hanging rod (2) are integrally formed.

9. The connection structure between the large thermal field guide tube and the water-cooled screen according to claim 1, characterized in that: The embedded head (3) and the heat-conducting cylinder hanging rod (2) are detachably connected by a screwing component; The screwing component includes a mounting groove (12) located at the bottom of the insert head (3). The inner wall of the mounting groove (12) is provided with an internal thread (15). The outer wall of the upper end of the heat-conducting cylinder hanger rod (2) is provided with an external thread (14). The upper end of the heat-conducting cylinder hanger rod (2) is threadedly engaged with the internal thread (15) in the mounting groove (12) through the external thread (14).

10. The connection structure between the large thermal field guide tube and the water-cooled screen according to claim 9, characterized in that: An elastic element (13) is vertically arranged between the top of the heat-conducting cylinder hanger rod (2) and the inner top of the mounting groove (12).

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