Groove body self-locking device

Abstract

The utility model relates to a groove body self-locking device which comprises a groove body, a self-locking pressing plate, a self-locking supporting plate and a self-locking structure, the self-locking pressing plate is fixedly arranged on the side face of the groove body, the self-locking supporting plate is correspondingly arranged below the self-locking pressing plate, the self-locking structure comprises a self-locking groove, a lock bolt groove, a lock bolt structure and a driving structure, the self-locking groove is an inverted-T-shaped groove, and the self-locking supporting plate is arranged below the self-locking pressing plate. The T-shaped groove penetrates through the self-locking pressing plate in the vertical direction, the lock bolt groove is a long-strip-shaped groove, the long-strip-shaped groove corresponds to the T-shaped groove in position and penetrates through the self-locking supporting plate in the length direction of the groove body, and the driving structure penetrates through the lock bolt groove and is arranged on the self-locking supporting plate. The lock bolt structure is connected with the driving structure and upwards penetrates through the lock bolt groove to extend to the self-locking groove. The device has the beneficial effects that the self-locking pressing plate on the side face of the groove body is driven to press downwards to abut against the self-locking supporting plate through the self-weight of the groove body, the driving structure is pressed by the self-locking pressing plate, the driving structure drives the lock bolt structure to act to be self-locked through the self-locking groove, the installation process is rapid and convenient, and the bolt state does not need to be observed regularly.

Description

Technical Field

[0001] This utility model relates to the field of chip testing technology, and in particular to a slot self-locking device. Background Technology

[0002] In the semiconductor industry, cleaning equipment is frequently used during the processing of semiconductor chips, such as using pure water in a QDR cleaning tank to clean residues on silicon wafers.

[0003] Patent No. 202321330980.2 discloses a chip QDR cleaning tank, including a tank body, a filter base plate, a nitrogen device, and a spray device. The tank body is used to hold DI water. The filter base plate has multiple filter holes through it to filter fragments of LED chips caused by accidents. The nitrogen device includes an outlet, an inlet, and a nitrogen delivery section. The nitrogen delivery section is used to supply nitrogen, and the inlet is connected to the nitrogen delivery section. The filter base plate and the outlet are both located inside the tank body, with the filter base plate covering the outlet. The outlet has multiple outlet holes. Nitrogen passes through the outlet holes and filter holes to cause the DI water to bubble. The spray device includes a first water inlet pipe and a spray section. The spray section is located on the first water inlet pipe and faces inward towards the inside of the tank body. The chip QDR cleaning tank of this utility model filters abnormal fragments of the wafer through the filter base plate, and also works with the nitrogen device to perform powerful cleaning of the wafer. Finally, the spray device removes residual chemicals, improving the cleaning effect.

[0004] In the existing technology, when the QDR cleaning tank is installed into the cleaning equipment, it is generally connected by screw fastening. The installation process is relatively cumbersome, and the condition of the bolts needs to be checked regularly to avoid loosening due to long-term use and affecting the normal use of the equipment. Utility Model Content

[0005] In view of the above-mentioned problems in the prior art, the main purpose of this utility model is to provide a self-locking device for a groove that can automatically lock under the action of gravity, so as to achieve the effect of quick and convenient installation and no need to regularly observe the status of bolts.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a self-locking device for a tank body, comprising a tank body, a self-locking pressure plate, a self-locking support plate, and a self-locking structure. The self-locking pressure plate is fixedly disposed on the side of the tank body, and a self-locking support plate is disposed correspondingly below the self-locking pressure plate. The self-locking structure includes a self-locking groove, a bolt groove, a bolt structure, and a driving structure. The self-locking groove is a U-shaped groove that extends vertically through the self-locking pressure plate. The bolt groove is a long strip groove that corresponds to the U-shaped groove and extends along the length of the tank body through the self-locking support plate. The driving structure passes through the bolt groove and is disposed on the self-locking support plate. The bolt structure is connected to the driving structure and extends upward through the bolt groove to the self-locking groove. The driving structure is driven by the pressure of the self-locking pressure plate, causing the bolt structure to reciprocate between the bottom and top of the U-shaped groove in the self-locking groove to achieve self-locking and unlocking.

[0007] Furthermore, the driving structure includes a sleeve, a driving rod, a driving plate, and a return spring. The bottom end of the sleeve is closed, and the top end passes through the self-locking support plate. It is fixedly installed at the bottom of the self-locking support plate and located at one end of the bolt groove. The side of the sleeve that connects with the bolt groove has a vertical slot. The return spring is installed at the bottom of the sleeve. The driving rod passes through the bolt groove and is inserted into the sleeve, with its bottom abutting against the return spring. The driving plate is a right-angled triangular plate. One right-angled side of the right-angled triangular plate is flush with the top surface of the driving rod, and the other right-angled side is fixedly connected to the driving rod along the length of the driving rod. A portion of the hypotenuse of the right-angled triangular plate is located in the slot. The driving rod reciprocates along the vertical direction under the pressure of the self-locking pressure plate.

[0008] Furthermore, the bolt structure includes a trapezoidal slider, a sliding rod, a T-shaped bolt post, a bolt sleeve, and a return spring. The bolt sleeve is horizontally positioned at the bottom of the other end of the bolt groove on the self-locking support plate. The end of the bolt sleeve away from the driving structure is closed, while the end near the driving structure is open. The return spring is located inside the bolt sleeve. A sliding rod is positioned at the end of the trapezoidal slider near the bolt sleeve. The sliding rod is inserted into the bolt sleeve and abuts against the return spring. The other end of the trapezoidal slider has an upward-facing slope and is connected to the driving structure. The T-shaped bolt post passes through the bolt groove from above and is fixedly positioned at the top of the trapezoidal slider near the bolt sleeve. The width of the T-shaped horizontal arm of the T-shaped bolt post is smaller than the width of the bottom of the convex shape of the self-locking groove but larger than the width of the top of the convex shape.

[0009] Furthermore, the bottom of the T-shaped horizontal arm of the T-shaped bolt is an inclined surface, and the inclined direction of the inclined surface is towards the convex top of the self-locking groove.

[0010] Furthermore, the number of the self-locking structures is set to at least one based on the length of the groove body.

[0011] Preferably, the number of the self-locking structures is set to two, and the two self-locking structures are arranged in a mirror image of each other.

[0012] Furthermore, the top of the self-locking pressure plate is provided with several reinforcing ribs.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: by utilizing the self-weight of the tank body, the self-locking pressure plate set on the side of the tank body is driven to press down and abut against the self-locking support plate. The self-locking pressure plate presses down the driving structure, and the driving structure drives the locking bolt structure to move and achieve self-locking through the self-locking groove. Compared with the prior art that uses screws for fastening, the installation process is faster and more convenient, and there is no need to regularly check the status of the bolts. Attached Figure Description

[0014] Figure 1 This is a schematic diagram showing the overall structure and state of this utility model;

[0015] Figure 2 This is a side view of the present invention;

[0016] Figure 3 This is a top view and a schematic diagram of the second state of this utility model;

[0017] Figure 4 This is a detailed schematic diagram of the self-locking tray of this utility model.

[0018] Legend: 1. Tank body; 2. Self-locking pressure plate; 3. Self-locking support plate; 4. Self-locking structure; 41. Self-locking groove; 42. Locking bolt groove; 43. Locking bolt structure; 431. Trapezoidal slider; 432. Slide rod; 433. T-shaped bolt; 434. Locking bolt sleeve; 44. Drive structure; 441. Sleeve; 442. Drive rod; 443. Drive plate; 5. Reinforcing rib. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some embodiments of this utility model, but not all embodiments. Example

[0020] like Figures 1 to 4As shown, a tank self-locking device includes a tank body 1, a self-locking pressure plate 2, a self-locking support plate 3 fixedly preset in the cleaning equipment, and a self-locking structure 4. The self-locking pressure plate 2 is fixedly disposed on the side of the tank body 1, and the self-locking support plate 3 is correspondingly disposed below the self-locking pressure plate 2. The self-locking structure 4 includes a self-locking groove 41, a bolt groove 42, a bolt structure 43, and a driving structure 44. The self-locking groove 41 is a U-shaped groove that extends vertically through the self-locking pressure plate 2. The bolt groove 42 is a long... The strip-shaped groove and the long strip-shaped groove are positioned corresponding to the convex-shaped groove and are set through the self-locking support plate 3 along the length direction of the groove body 1. The drive structure 44 is set on the self-locking support plate 3 through the bolt groove 42. The bolt structure 43 is connected to the drive structure 44 and extends upward through the bolt groove 42 to the self-locking groove 41. The drive structure 44 is driven by the pressure of the self-locking pressure plate 2, which drives the bolt structure 43 to move back and forth between the bottom and top of the convex-shaped groove in the self-locking groove 41 to achieve self-locking and unlocking.

[0021] There are two states between the self-locking pressure plate 2 and the self-locking support plate 3: state one, the self-locking pressure plate 2 and the self-locking support plate 3 are out of contact; state two, the self-locking pressure plate 2 and the self-locking support plate 3 are in contact.

[0022] The drive structure 44 includes a sleeve 441, a drive rod 442, a drive plate 443, and a return spring. The bottom end of the sleeve 441 is closed, and the top end passes through the self-locking support plate 3. It is fixedly set at the bottom of the self-locking support plate 3 and located at one end of the bolt groove 42. The side of the sleeve 441 that connects with the bolt groove 42 has a vertical slot. The return spring is set at the bottom inside the sleeve 441. The drive rod 442 passes through the bolt groove 42 and is inserted into the sleeve 441, with its bottom abutting against the return spring. The drive plate 443 is a right-angled triangular plate. One right-angled side of the right-angled triangular plate is flush with the top surface of the drive rod 442, and the other right-angled side is fixedly connected to the drive rod 442 along the length of the drive rod 442. A part of the hypotenuse of the right-angled triangular plate is located in the slot. The drive rod 442 is pressed down vertically by the pressure of the self-locking pressure plate 2 and reset by the force of the return spring, and then moves back to the reset position. The drive plate 443 and the drive rod 442 move synchronously.

[0023] The bolt structure 43 includes a trapezoidal slider 431, a sliding rod 432, a T-shaped bolt post 433, a bolt sleeve 434, and a return spring. The bolt sleeve 434 is horizontally positioned at the bottom of the other end of the bolt groove 42 on the self-locking support plate 3. The end of the bolt sleeve 434 away from the drive structure 44 is closed, while the end near the drive structure 44 is open. The return spring is located inside the bolt sleeve 434. The sliding rod 432 is positioned at the end of the trapezoidal slider 431 near the bolt sleeve 434. The sliding rod 432 is inserted into the bolt sleeve 434 and abuts against the return spring. The other end of the trapezoidal slider 431 has an upward-facing slope and is connected to the drive structure 44. The T-shaped bolt post 433 passes through the bolt groove 42 from above and is fixedly positioned at the top of the trapezoidal slider 431 near the bolt sleeve 434. The width of the T-shaped horizontal arm of the T-shaped bolt post 433 is smaller than the width of the bottom of the convex shape of the self-locking groove 41 but larger than the width of the top of the convex shape.

[0024] The bottom of the T-shaped horizontal arm of the T-shaped bolt 433 is an inclined surface, and the inclined direction of the inclined surface is towards the convex top of the self-locking groove 41.

[0025] There are at least two states between the drive structure 44 and the locking bolt structure 43:

[0026] State 1: Unlocked state. When the self-locking pressure plate 2 and the self-locking support plate 3 are disengaged, the drive structure 44 and the bolt structure 43 are disengaged. The drive rod 442 of the drive structure 44 is reset upward by the force of the return spring. The drive plate 443 and the drive rod 442 move synchronously. After the hypotenuse of the right-angled triangular plate moves upward, it disengages from the trapezoidal slider 431 of the bolt structure 43. The trapezoidal slider 431 abuts against the return spring through the slide rod 432. When the drive plate 443 and the trapezoidal slider 431 are disengaged, the trapezoidal slider 431 is reset towards the drive structure 44 under the force of the return spring, and drives the T-shaped bolt 433 at the top of the trapezoidal slider 431 from the top of the convex groove of the self-locking groove 41 to the bottom of the convex groove to achieve unlocking.

[0027] State 2: Self-locking state. When the self-locking pressure plate 2 and the self-locking support plate 3 abut, the drive structure 44 and the locking bolt structure 43 abut.

[0028] Compared to existing technologies that use screws for fastening, the process of installing the tank body 1 into the cleaning equipment in this invention is faster and more convenient, and there is no need to periodically check the condition of the bolts.

[0029] Using the weight of the tank body 1, the self-locking pressure plate 2 set on the side of the tank body 1 is driven to press down and abut against the self-locking support plate 3 fixed in the cleaning equipment. The self-locking pressure plate 2 presses down the drive rod 442 of the drive structure 44. The drive plate 443 moves synchronously with the drive rod 442. The hypotenuse of the right-angled triangular plate abuts against the trapezoidal slider 431 of the locking bolt structure 43 during the downward movement, and forces the trapezoidal slider 431 to move towards the locking bolt sleeve 434. This causes the T-shaped bolt 433 at the top of the trapezoidal slider 431 to move from the bottom of the convex groove of the self-locking groove 41 to the top of the convex groove to achieve locking.

[0030] The number of self-locking structures 4 is based on the length of the groove body 1, preferably two, and the two self-locking structures 4 are arranged in a mirror image opposite each other.

[0031] The top of the self-locking pressure plate 2 is provided with several reinforcing ribs 5, which are used to improve the structural strength of the self-locking pressure plate 2 and prevent the self-locking pressure plate 2 from bending and deforming under the gravity of the tank body 1.

[0032] Finally, it should be noted that the above-described embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A self-locking device for a tank, characterized in that: The system includes a tank body, a self-locking pressure plate, a self-locking support plate, and a self-locking structure. The self-locking pressure plate is fixedly installed on the side of the tank body, and a self-locking support plate is correspondingly provided below the self-locking pressure plate. The self-locking structure includes a self-locking groove, a bolt groove, a bolt structure, and a driving structure. The self-locking groove is a U-shaped groove that runs vertically through the self-locking pressure plate. The bolt groove is a long strip groove that corresponds to the U-shaped groove and runs along the length of the tank body through the self-locking support plate. The driving structure passes through the bolt groove and is installed on the self-locking support plate. The bolt structure is connected to the driving structure and extends upward through the bolt groove to the self-locking groove. The driving structure is driven by the pressure of the self-locking pressure plate, causing the bolt structure to move back and forth between the bottom and top of the U-shaped groove in the self-locking groove to achieve self-locking and unlocking.

2. The tank self-locking device according to claim 1, characterized in that: The driving structure includes a sleeve, a driving rod, a driving plate, and a return spring. The bottom end of the sleeve is closed, and the top end passes through the self-locking support plate. It is fixedly installed at the bottom of the self-locking support plate and located at one end of the bolt groove. The side of the sleeve that connects with the bolt groove has a vertical slot. The return spring is located at the bottom of the sleeve. The driving rod passes through the bolt groove and is inserted into the sleeve, with its bottom abutting against the return spring. The driving plate is a right-angled triangular plate. One right-angled side of the right-angled triangular plate is flush with the top surface of the driving rod, and the other right-angled side is fixedly connected to the driving rod along the length of the driving rod. A portion of the hypotenuse of the right-angled triangular plate is located in the slot. The driving rod reciprocates along the vertical direction under the pressure of the self-locking pressure plate.

3. The tank self-locking device according to claim 1, characterized in that: The locking bolt structure includes a trapezoidal slider, a sliding rod, a T-shaped bolt post, a locking bolt sleeve, and a return spring. The locking bolt sleeve is horizontally positioned at the bottom of the other end of the locking bolt groove on the self-locking support plate. The end of the locking bolt sleeve away from the driving structure is closed, while the end closer to the driving structure is open. The return spring is located inside the locking bolt sleeve. A sliding rod is positioned at the end of the trapezoidal slider near the locking bolt sleeve. The sliding rod is inserted into the locking bolt sleeve and abuts against the return spring. The other end of the trapezoidal slider has an upward-facing inclined surface and is connected to the driving structure. The T-shaped bolt post passes through the locking bolt groove from above and is fixedly positioned at the top of the trapezoidal slider near the locking bolt sleeve. The width of the T-shaped horizontal arm of the T-shaped bolt post is smaller than the width of the bottom of the convex shape of the self-locking groove but larger than the width of the top of the convex shape.

4. The tank self-locking device according to claim 3, characterized in that: The bottom of the T-shaped horizontal arm of the T-shaped bolt is an inclined surface, and the inclined direction of the inclined surface is towards the convex top of the self-locking groove.

5. The tank self-locking device according to claim 1, characterized in that: The number of self-locking structures is set to at least one based on the length of the groove body.

6. The tank self-locking device according to claim 5, characterized in that: The number of self-locking structures is set to two, and the two self-locking structures are arranged in a mirror image of each other.

7. The tank self-locking device according to any one of claims 1 to 6, characterized in that: The self-locking pressure plate has several reinforcing ribs on its top.

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