Flexible pressure sensor

Abstract

The utility model discloses a flexible pressure sensor, which comprises an upper substrate layer and a lower substrate layer, a plurality of row electrode strips distributed at intervals are arranged on the surface of the lower substrate layer towards the surface of the upper substrate layer, and the plurality of row electrode strips are arranged in parallel. The surface, facing the lower base material layer, of the upper base material layer is provided with a plurality of column electrode strips distributed at intervals, the multiple column electrode strips are arranged in parallel, and the row electrode strips and the column electrode strips are arranged at a perpendicular angle. A pressure-sensitive sensing film is positioned between the plurality of column electrode strips of the upper base material layer and the plurality of row electrode strips of the lower base material layer; and the upper base material layer and the lower base material layer are respectively positioned in the edge areas of the periphery of the pressure-sensitive sensing film and are connected together. According to the flexible pressure sensor, the response speed of the flexible pressure sensor to pressure is high, the defect that deformation continues to occur under constant pressure is overcome, rapid recovery of the flexible pressure sensor is facilitated when the pressure disappears, and the detection speed and stability of the flexible pressure sensor are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of sensor especially relates to a flexible pressure sensor. BACKGROUND

[0002] The pressure sensing film device is a sensor that senses pressure and converts the pressure signal into an electrical signal output according to a certain rule. The pressure sensing film device is usually composed of a pressure-sensitive element and a signal processing unit, and can be used for monitoring and testing different devices. The pressure sensing film device has a wide range of applications, such as medical devices, environmental monitoring, aerospace, industrial automation, consumer electronics, and automotive industries.

[0003] The pressure sensing film device can be divided into piezoresistive, capacitive, piezoelectric or other types according to the working principle. Among them, the piezoresistive pressure sensing film device uses piezoresistive effect and generally adopts upper and lower electrode or single electrode form; the capacitive pressure sensing film device uses capacitance change; and the piezoelectric sensor detects pressure change through the piezoresistive effect of semiconductor materials. The most widely used is the piezoresistive pressure sensing film device, which has lower price, higher precision and better linearity. The response speed of the existing pressure sensing film device under pressure application and removal needs to be further improved. SUMMARY

[0004] The technical problem to be solved by the utility model is to provide a flexible pressure sensor, which has fast response speed to pressure, improves the defect of continuous deformation under constant pressure, is beneficial to the rapid recovery of the flexible pressure sensor when the pressure disappears, and improves the detection speed and stability of the flexible pressure sensor.

[0005] To achieve the above purpose, the utility model adopts the technical scheme of: a flexible pressure sensor, comprising: an upper substrate layer and a lower substrate layer, the surface of the lower substrate layer facing the upper substrate layer is provided with a plurality of spaced row electrode strips, a plurality of the row electrode strips are arranged in parallel, the surface of the upper substrate layer facing the lower substrate layer is provided with a plurality of spaced column electrode strips, a plurality of the column electrode strips are arranged in parallel, and the row electrode strips and the column electrode strips are arranged at a perpendicular angle; a pressure-sensitive sensing film is located between the plurality of column electrode strips of the upper substrate layer and the plurality of row electrode strips of the lower substrate layer, and the upper substrate layer and the lower substrate layer are connected together at the edge area of the periphery of the pressure-sensitive sensing film respectively.

[0006] The further improved technical scheme in the above technical scheme is as follows:

[0007] 1. In the above scheme, the row electrode strips and the column electrode strips are formed by physical vapor deposition.

[0008] 2. In the above scheme, the row electrode strip is a copper electrode strip or an aluminum electrode strip, and the column electrode strip is a copper electrode strip or an aluminum electrode strip.

[0009] 3. In the above scheme, the edge areas of the upper substrate layer and the lower substrate layer are connected by an adhesive part.

[0010] 4. In the above scheme, both the upper substrate layer and the lower substrate layer are PET film layers.

[0011] 5. In the above scheme, the thickness of the upper substrate layer and the lower substrate layer is 30~50μm.

[0012] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:

[0013] This utility model relates to a flexible pressure sensor, in which a pressure-sensitive sensing membrane is located between several column electrode strips of an upper substrate layer and several row electrode strips of a lower substrate layer. The upper and lower substrate layers are connected together at their respective edge regions around the pressure-sensitive sensing membrane. Since the pressure-sensitive sensing membrane is not connected to the upper and lower substrate layers by means of bonding or other methods, there will be gaps between the pressure-sensitive sensing membrane and the upper and lower substrate layers when no pressure is applied. This makes the flexible pressure sensor respond quickly to pressure, improves the defect of continued deformation under constant pressure, and also facilitates the rapid recovery of the flexible pressure sensor when the pressure disappears, thereby improving the detection speed and stability of the flexible pressure sensor. Attached Figure Description

[0014] Appendix Figure 1 This is a cross-sectional structural diagram of the flexible pressure sensor of this utility model;

[0015] Appendix Figure 2 This is a partial structural schematic diagram of the flexible pressure sensor of this utility model;

[0016] Appendix Figure 3 This is a schematic diagram of the lower substrate layer structure in the flexible pressure sensor of this utility model;

[0017] Appendix Figure 4 This is a schematic diagram of the upper substrate layer structure in the flexible pressure sensor of this utility model.

[0018] In the above figures: 1. Upper substrate layer; 2. Lower substrate layer; 3. Column electrode strip; 4. Row electrode strip; 5. Pressure-sensitive sensing film; 6. Adhesive part. Detailed Implementation

[0019] The present patent can be further understood through the specific embodiments given below, but they are not intended to limit the present patent.

[0020] The present invention will be further described below with reference to embodiments:

[0021] Embodiment 1: A flexible pressure sensor, comprising: an upper substrate layer 1 and a lower substrate layer 2, the lower substrate layer 2 is provided with a plurality of spaced row electrode strips 4 facing the surface of the upper substrate layer 1, a plurality of the row electrode strips 4 are arranged in parallel, the upper substrate layer 1 is provided with a plurality of spaced column electrode strips 3 facing the surface of the lower substrate layer 2, a plurality of the column electrode strips 3 are arranged in parallel, the row electrode strips 4 are arranged at a perpendicular angle with the column electrode strips 3; a pressure sensitive sensing film 5 is located between the plurality of column electrode strips 3 of the upper substrate layer 1 and the plurality of row electrode strips 4 of the lower substrate layer 2, the upper substrate layer 1 and the lower substrate layer 2 are connected together at the edge area of the periphery of the pressure sensitive sensing film 5 respectively.

[0022] The row electrode strips 4 are copper electrode strips, and the column electrode strips 3 are copper electrode strips.

[0023] The edge area of each of the upper substrate layer 1 and the lower substrate layer 2 is connected by an adhesive part 6.

[0024] The upper substrate layer 1 and the lower substrate layer 2 are both PET film layers.

[0025] The thickness of each of the upper substrate layer 1 and the lower substrate layer 2 is 35 μm.

[0026] Embodiment 2: A flexible pressure sensor, comprising: an upper substrate layer 1 and a lower substrate layer 2, the lower substrate layer 2 is provided with a plurality of spaced row electrode strips 4 facing the surface of the upper substrate layer 1, a plurality of the row electrode strips 4 are arranged in parallel, the upper substrate layer 1 is provided with a plurality of spaced column electrode strips 3 facing the surface of the lower substrate layer 2, a plurality of the column electrode strips 3 are arranged in parallel, the row electrode strips 4 are arranged at a perpendicular angle with the column electrode strips 3; a pressure sensitive sensing film 5 is located between the plurality of column electrode strips 3 of the upper substrate layer 1 and the plurality of row electrode strips 4 of the lower substrate layer 2, the upper substrate layer 1 and the lower substrate layer 2 are connected together at the edge area of the periphery of the pressure sensitive sensing film 5 respectively.

[0027] The row electrode strips 4 and the column electrode strips 3 are both formed by physical vapor deposition.

[0028] The row electrode strips 4 are aluminum electrode strips, and the column electrode strips 3 are aluminum electrode strips.

[0029] The edge area of each of the upper substrate layer 1 and the lower substrate layer 2 is connected by an adhesive part 6.

[0030] The upper substrate layer 1 and the lower substrate layer 2 are both PET film layers.

[0031] The thickness of each of the upper substrate layer 1 and the lower substrate layer 2 is 46 μm.

[0032] When using the above-mentioned flexible pressure sensor, its pressure-sensitive sensing film is located between several column electrode strips of the upper substrate layer and several row electrode strips of the lower substrate layer. The upper substrate layer and the lower substrate layer are connected together at their respective edge areas around the pressure-sensitive sensing film. Since the pressure-sensitive sensing film is not connected to the upper substrate layer and the lower substrate layer by means of bonding or other methods, there will be gaps between the pressure-sensitive sensing film and the upper and lower substrate layers when no pressure is applied. This makes the flexible pressure sensor respond quickly to pressure, improves the defect of continued deformation under constant pressure, and also helps the flexible pressure sensor to recover quickly when the pressure disappears, thus improving the detection speed and stability of the flexible pressure sensor.

[0033] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. A flexible pressure sensor, characterized in that: include: The upper substrate layer (1) and the lower substrate layer (2) are provided with a plurality of spaced row electrode strips (4) on the surface of the lower substrate layer (2) facing the upper substrate layer (1), and the plurality of row electrode strips (4) are arranged in parallel. The upper substrate layer (1) is provided with a plurality of spaced column electrode strips (3) on the surface of the lower substrate layer (2), and the plurality of column electrode strips (3) are arranged in parallel. The row electrode strips (4) and the column electrode strips (3) are arranged at a perpendicular angle. A pressure-sensitive sensing film (5) is located between the plurality of column electrode strips (3) of the upper substrate layer (1) and the plurality of row electrode strips (4) of the lower substrate layer (2). The upper substrate layer (1) and the lower substrate layer (2) are respectively connected together at the edge area around the pressure-sensitive sensing film (5).

2. The flexible pressure sensor according to claim 1, characterized in that: Both the row electrode strips (4) and column electrode strips (3) are formed by physical vapor deposition.

3. The flexible pressure sensor according to claim 1, characterized in that: The row electrode strip (4) is a copper electrode strip or an aluminum electrode strip, and the column electrode strip (3) is a copper electrode strip or an aluminum electrode strip.

4. The flexible pressure sensor according to claim 1, characterized in that: The edge regions of the upper substrate layer (1) and the lower substrate layer (2) are connected by an adhesive part (6).

5. The flexible pressure sensor according to claim 1, characterized in that: Both the upper substrate layer (1) and the lower substrate layer (2) are PET film layers.

6. The flexible pressure sensor according to claim 1, characterized in that: The thickness of both the upper substrate layer (1) and the lower substrate layer (2) is 30~50μm.

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