Probe card and test probe housing thereof

Abstract

The embodiment of the utility model discloses a probe card and a test probe shell thereof. The test probe shell comprises a first connecting part, a second connecting part and a middle section, and the first connecting part and the second connecting part are located at the two ends of the middle section respectively. A set included angle is formed between the extending direction of the probe hole and the horizontal direction; a supporting plane is arranged at the bottom of the middle section, an arc-shaped surface connected with the supporting plane is arranged at the bottom of the first connecting part, and the supporting plane is in smooth transition with the arc-shaped surface; and an avoiding groove is formed in the top of the middle section. According to the embodiment of the invention, the probe hole in the first connecting part can be used for fixing the probe, and the avoiding groove in the middle section can be used for avoiding the head of the probe, so that the probe does not need to be set into a bent structure while a certain inclination angle of the probe is ensured, the signal distance is shortened, and the signal quality is improved. And the linear transmission of the signal can be ensured, and the accuracy of the test result is improved.

Description

Technical Field

[0001] This application relates to the field of semiconductor testing technology, and in particular to a probe card and its test probe housing. Background Technology

[0002] In the chip manufacturing process, after wafer fabrication, the chip must first undergo performance testing before entering the packaging and testing stage. With the improvement of chip performance, miniaturization, and diversification of functions, the requirements for the probe card itself, which serves as the connection channel between the chip and the testing machine, are also increasing. The testing of radio frequency chips requires shielding protection for radio frequency signals, and the higher the frequency, the more difficult the shielding protection becomes. Currently, due to the limitations of housing and space, test probes are often made into probe structures with bending angles. The non-coaxial signal protection distance of this type of test probe is long, the shielding effect is poor, and the test results cannot be obtained stably. Utility Model Content

[0003] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a probe card and its test probe housing to solve the problem of long non-coaxial signal protection distance of the test probe affecting the test structure.

[0004] In a first aspect, this application provides a test probe housing, comprising: a first connecting portion, a second connecting portion, and an intermediate section, wherein the first connecting portion and the second connecting portion are respectively located at both ends of the intermediate section;

[0005] The first connecting part has a probe hole for the tail end of the probe to pass through, and the extension direction of the probe hole forms a set angle with the horizontal direction;

[0006] The bottom of the middle section has a supporting plane, and the bottom of the first connecting part is provided with an arc-shaped surface connected to the supporting plane, and the supporting plane and the arc-shaped surface are smoothly transitioned.

[0007] The top of the middle section is provided with a clearance groove for avoiding the head of the probe;

[0008] The second connecting part has a threaded hole extending in the vertical direction.

[0009] Based on the test probe housing, the probe can be fixed using the probe hole on the first connecting part, and the probe head can be avoided using the clearance groove on the middle section. This allows the probe to have a certain tilt angle without the need for a bending structure, thereby shortening the signal distance and ensuring straight signal transmission, thus improving the accuracy of the test results. The support plane at the bottom of the middle section provides reliable support for the probe tail when the probe card is working, ensuring overall stability.

[0010] Optionally, the top of the probe hole has an annular groove to accommodate at least part of the probe head.

[0011] Furthermore, based on the aforementioned annular groove, the head of part of the probe can enter the interior of the first connecting part, reducing the space occupied by the probe head and also reducing interference between the probe head and other structures on the housing.

[0012] In further examples, the inner wall of the annular groove can slide against the circumference of the probe head, thereby providing radial support to the probe head, further improving the stability of the probe and the accuracy of the test structure of the probe card.

[0013] Furthermore, the bottom end face of the annular groove can abut against the bottom end face of the probe head, thereby limiting and supporting the bottom end face of the probe head, preventing excessive probe intrusion, and achieving precise installation of the probe.

[0014] Optionally, at least two threaded holes are arranged in a direction perpendicular to the extension direction of the probe holes.

[0015] Furthermore, based on the above arrangement of threaded holes, it can be ensured that after the housing is connected to other structures through the threaded holes, the first connecting part or the probe on the first connecting part can interfere with other structures around the housing as much as possible.

[0016] Optionally, at least two of the threaded holes are symmetrically arranged on both sides of the probe hole.

[0017] Optionally, a shielding layer is provided on the supporting plane and the arc-shaped surface.

[0018] Furthermore, based on the aforementioned shielding layer, it can both protect the probe card and shield the signal, thereby improving the accuracy of the test.

[0019] Optionally, the clearance groove includes a clearance surface arranged parallel to the axis of the probe hole and a connection surface connected to the top surface of the first connection portion facing the second connection portion;

[0020] The clearance surface is connected to the lowest point of the top surface of the first connecting part facing the second connecting part through the connecting surface.

[0021] Furthermore, the aforementioned clearance groove can allow some of the probe's head to pass through, facilitating probe installation while reducing interference between the housing and the probe.

[0022] Optionally, the top of the clearance surface is connected to the top surface of the second connecting portion, and the clearance surface forms a reinforcing rib structure for connecting the second connecting portion and the intermediate section.

[0023] Furthermore, based on the aforementioned avoidance surface, it is possible to reduce the volume of the shell structure itself to avoid the probe while ensuring the structural strength of the shell itself. The avoidance surface can be a complete plane or it can be composed of multiple inclined surfaces. In other words, the avoidance surface can be formed by piecing together the inclined surfaces of multiple connecting surfaces and the reinforcing ribs of the second connecting part.

[0024] Optionally, the connecting surface is a horizontal plane, and in the vertical direction, the bottom of the second connecting part is lower than the connecting surface.

[0025] Furthermore, based on the aforementioned intermediate section, the structural strength of the intermediate section of the shell can be increased. The intermediate section, as well as the connection between the intermediate section and the first connecting part or the connection between the intermediate section and the second connecting part, all have sufficient thickness and there are no obviously weak points, thereby improving the overall strength and reliability of the shell.

[0026] Optionally, the end of the middle section facing the second connecting part is provided with a limiting end face, and the limiting end face forms a right-angled groove with the bottom of the second connecting part.

[0027] Furthermore, based on the right-angled groove formed by the second connecting part and the limiting end face, the two vertical surfaces can be fixed by bolting after the second connecting part is connected to other structures, thereby further ensuring the stability of the entire housing and the probe on the housing.

[0028] In a second aspect, this application provides a probe card, including a test probe housing and a probe as described above, wherein the tail end of the probe passes through the probe hole and the head of the probe is limited and engaged with the top of the probe hole.

[0029] Based on the aforementioned probe card, the probe can be fixed using the probe hole on the first connecting part, and the probe head can be avoided using the clearance groove on the middle section. This allows the probe to have a certain tilt angle without needing to be bent, thereby shortening the signal distance while ensuring straight signal transmission and improving the accuracy of the test results. The support plane at the bottom of the middle section provides reliable support for the probe tail when the probe card is working, ensuring overall stability.

[0030] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0031] The disclosure of this application will become more readily understood with reference to the accompanying drawings. It will be readily understood by those skilled in the art that these drawings are for illustrative purposes only and are not intended to limit the scope of protection of this application. Furthermore, similar numbers in the drawings are used to denote similar components, wherein:

[0032] Figure 1 This is a schematic diagram of the structure of the test probe housing described in an embodiment of this application;

[0033] Figure 2 This is a schematic diagram of the bottom structure of the test probe housing according to an embodiment of this application;

[0034] Figure 3 This is a front view of the test probe housing described in an embodiment of this application.

[0035] Explanation of reference numerals in the attached figures

[0036] 11. First connecting part; 111. Probe hole; 1111. Annular groove; 112. Arc-shaped surface; 12. Second connecting part; 121. Threaded hole; 13. Intermediate section; 131. Support plane; 132. Clearance groove; 1321. Clearance surface; 1322. Connecting surface; 133. Limiting end face; 14. Shielding layer. Detailed Implementation

[0037] Some embodiments of this application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of this application and are not intended to limit the scope of protection of this application.

[0038] Currently, due to limitations in housing and space, test probes are often manufactured with a bent angle. This type of test probe has a long non-coaxial signal protection distance, poor shielding effect, and cannot obtain stable test results.

[0039] Based on this, this application provides a probe card and its test probe housing. The probe card can fix the probe using the probe hole on the first connecting part, and can also use the avoidance groove on the middle section to avoid the probe head. Thus, while ensuring that the probe has a certain tilt angle, it does not need to be set as a bending structure, thereby shortening the signal distance and ensuring the straight transmission of the signal, improving the accuracy of the test results. The support plane at the bottom of the middle section can provide reliable support for the tail end of the probe when the probe card is working, ensuring the overall stability.

[0040] The present application will be described in detail below through specific embodiments.

[0041] Reference Figures 1 to 3As shown, this embodiment provides a test probe housing, including: a first connecting part 11, a second connecting part 12, and an intermediate section 13. The first connecting part 11 and the second connecting part 12 are respectively located at both ends of the intermediate section 13. The first connecting part 11 has a probe hole 111 for the tail end of the probe to pass through, and the extension direction of the probe hole 111 forms a set angle with the horizontal direction. The bottom of the intermediate section 13 has a support plane 131, and the bottom of the first connecting part 11 has an arc-shaped surface 112 connected to the support plane 131. The support plane 131 and the arc-shaped surface 112 are smoothly transitioned. The top of the intermediate section 13 has a relief groove 132 for avoiding the head of the probe. The second connecting part 12 has a threaded hole 121 extending in the vertical direction.

[0042] The test probe housing provided in this embodiment can fix the probe using the probe hole 111 on the first connecting part 11, and can also avoid the head of the probe using the avoidance groove 132 on the middle section 13. Thus, while ensuring that the probe has a certain tilt angle, it does not need to be set as a bending structure, thereby shortening the signal distance and ensuring the straight transmission of the signal, improving the accuracy of the test results. The support plane 131 at the bottom of the middle section 13 can provide reliable support for the tail end of the probe when the probe card is working, ensuring the overall stability.

[0043] In some embodiments, the top of the probe hole 111 has an annular groove 1111 that accommodates at least part of the head of the probe, wherein the annular groove 1111 and the probe hole 111 together form a countersunk hole structure.

[0044] Furthermore, based on the aforementioned annular groove 1111, part of the probe head can enter the interior of the first connecting part 11, reducing the space occupied by the probe head and also reducing interference between the probe head and other structures on the housing.

[0045] In further examples, the inner wall of the annular groove 1111 can slide and engage with the circumferential side of the probe head, thereby achieving radial support for the probe head, further improving the stability of the probe and the accuracy of the test structure of the probe card.

[0046] Furthermore, the bottom end face of the annular groove 1111 can abut against the bottom end face of the probe head, thereby limiting and supporting the bottom end face of the probe head, preventing excessive probe intrusion, and achieving precise installation of the probe.

[0047] Optionally, at least two threaded holes 121 are arranged in a direction perpendicular to the extension direction of the probe hole 111. Specifically, multiple threaded holes 121 are arranged in a horizontal direction perpendicular to the extension direction of the probe hole 111.

[0048] Furthermore, based on the arrangement of the threaded holes 121, it can be ensured that after the housing is connected to other structures through the threaded holes 121, the first connecting part 11 or the probe on the first connecting part 11 can interfere with other structures around the housing as much as possible.

[0049] In some embodiments, at least two threaded holes 121 are symmetrically arranged on both sides of the probe hole 111. When there is an odd number of threaded holes 121, the axis of the middle threaded hole 121 is coplanar with the axis of the probe hole 111.

[0050] Continue to refer to Figure 3 As shown, a shielding layer 14 is provided on the supporting plane 131 and the arc-shaped surface 112. The shielding layer 14 can be a thin film structure attached to the supporting plane 131 and the arc-shaped surface 112. The shielding layer 14 is a complete thin film structure, that is, there are no seams or other structures at the connection between the supporting plane 131 and the arc-shaped surface 112.

[0051] Furthermore, based on the aforementioned shielding layer 14, it can both protect the probe card and shield the signal, thereby improving the accuracy of the test.

[0052] In some embodiments, the clearance groove 132 includes a clearance surface 1321 arranged parallel to the axis of the probe hole 111 and a connecting surface 1322 connected to the top surface of the first connecting portion 11 facing the second connecting portion 12; the clearance surface 1321 is connected to the lowest point of the top surface of the first connecting portion 11 facing the second connecting portion 12 through the connecting surface 1322.

[0053] Furthermore, the aforementioned clearance groove 132 can allow some of the probe head to pass through, which facilitates the installation of the probe while reducing interference between the housing and the probe.

[0054] Optionally, the top of the clearance surface 1321 is connected to the top surface of the second connecting portion 12, and the clearance surface 1321 forms a reinforcing rib structure for connecting the second connecting portion 12 and the intermediate section 13.

[0055] Furthermore, based on the aforementioned avoidance surface 1321, it is possible to reduce the volume of the shell structure itself to avoid the probe while ensuring the structural strength of the shell itself. The avoidance surface 1321 can be a complete plane or it can be composed of multiple inclined surfaces. In other words, the avoidance surface 1321 can be formed by assembling multiple inclined surfaces that connect the connecting surface 1322 and the reinforcing rib of the second connecting part 12.

[0056] Continue to refer to Figure 3 As shown, the connecting surface 1322 is a horizontal plane, and in the vertical direction, the bottom of the second connecting part 12 is lower than the connecting surface 1322.

[0057] Furthermore, based on the aforementioned intermediate section 13, the structural strength of the intermediate section 13 of the shell is increased. The intermediate section 13 and the connection between the intermediate section 13 and the first connecting part 11 or the connection between the intermediate section 13 and the second connecting part 12 have sufficient thickness and there are no obviously weak positions, thereby improving the overall strength and reliability of the shell.

[0058] Optionally, the middle section 13 is provided with a limiting end face 133 at the end facing the second connecting part 12, and the limiting end face 133 forms a right-angled groove with the bottom of the second connecting part 12.

[0059] Furthermore, based on the right-angled slot formed by the second connecting part 12 and the limiting end face 133, the two vertical surfaces can be fixed by bolting after the second connecting part 12 is connected to other structures, thereby further ensuring the stability of the entire housing and the probe on the housing.

[0060] In a second aspect, this application provides a probe card, including the test probe housing and the probe as described above. The tail end of the probe (the test end of the probe) passes through the probe hole 111, and the head of the probe is limited and engaged with the top of the probe hole 111. It should be noted that the head of the probe can be quickly detached or quickly connected to the probe hole 111 by means of a snap-fit ​​or the like.

[0061] Based on the aforementioned probe card, the probe can be fixed using the probe hole 111 on the first connecting part 11, and the probe head can be avoided using the clearance groove 132 on the intermediate section 13. This ensures that the probe has a certain tilt angle without the need for a bent structure, thereby shortening the signal distance and ensuring straight signal transmission, thus improving the accuracy of the test results. The support plane 131 at the bottom of the intermediate section 13 provides reliable support for the tail end of the probe when the probe card is working, ensuring overall stability.

[0062] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0063] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0064] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application.

Claims

1. A test probe housing, characterized in that, include: The first connecting part (11), the second connecting part (12), and the intermediate section (13) are respectively located at both ends of the intermediate section (13); The first connecting part (11) is provided with a probe hole (111) through which the tail end of the probe passes, and the extension direction of the probe hole (111) forms a set angle with the horizontal direction; The bottom of the middle section (13) has a support plane (131), and the bottom of the first connecting part (11) is provided with an arc surface (112) connected to the support plane (131). The support plane (131) and the arc surface (112) are smoothly transitioned. The top of the middle section (13) is provided with a clearance groove (132) for avoiding the head of the probe; The second connecting part (12) has a threaded hole (121) extending in the vertical direction.

2. The test probe housing according to claim 1, characterized in that, The top of the probe hole (111) has an annular groove (1111) for accommodating at least part of the head of the probe.

3. The test probe housing according to claim 1, characterized in that, At least two of the threaded holes (121) are arranged in a direction perpendicular to the extension direction of the probe hole (111).

4. The test probe housing according to claim 3, characterized in that, At least two of the threaded holes (121) are symmetrically arranged on both sides of the probe hole (111).

5. The test probe housing according to claim 1, characterized in that, The supporting plane (131) and the arc-shaped surface (112) are provided with a shielding layer (14).

6. The test probe housing according to any one of claims 1 to 5, characterized in that, The clearance groove (132) includes a clearance surface (1321) arranged parallel to the axis of the probe hole (111) and a connection surface (1322) connected to the top surface of the first connection part (11) facing the second connection part (12); The clearance surface (1321) is connected to the lowest point of the top surface of the first connecting part (11) toward the second connecting part (12) via the connecting surface (1322).

7. The test probe housing according to claim 6, characterized in that, The top of the clearance surface (1321) is connected to the top surface of the second connecting part (12), and the clearance surface (1321) forms a reinforcing rib structure for connecting the second connecting part (12) and the intermediate section (13).

8. The test probe housing according to claim 7, characterized in that, The connecting surface (1322) is a horizontal surface, and in the vertical direction, the bottom of the second connecting part (12) is lower than the connecting surface (1322).

9. The test probe housing according to claim 6, characterized in that, The middle section (13) has a limiting end face (133) at the end facing the second connecting part (12), and the limiting end face (133) and the bottom of the second connecting part (12) form a right-angled groove.

10. A probe card, characterized in that, Includes a test probe housing and a probe as described in any one of claims 1 to 9, wherein the tail end of the probe passes through the probe hole (111) and the head of the probe is limited to the top of the probe hole (111).

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