Wafer box
By installing a time-limit monitoring device on the wafer cassette, the problem of wafers not being consumed in time within their storage period was solved, thus achieving timely consumption and quality assurance of wafers.
Patent Information
- Application Number
- CN202520175534.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-26
- Publication Date
- 2026-02-03
- Estimated Expiration
- 2035-01-26
AI Technical Summary
The failure to consume wafers within their storage lifespan leads to performance degradation and waste.
Design a wafer box equipped with a timeout monitoring device, including a processing module, a clock module, a display module, and a reminder module, to monitor and remind users of the wafer storage duration and ensure timely consumption.
The reminder function reduces the storage time of wafers beyond their expiration date, lowers product processing risks, and ensures product quality.
Smart Images
Figure CN223872719U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to the technical field of semiconductor, especially relates to a wafer box. BACKGROUND
[0002] In the semiconductor industry, wafer box is often used to carry wafers, for example, wafer box is used to transfer and store wafers in different processes. Due to the storage period of materials and other reasons, the wafers in the wafer box generally need to be removed and consumed within a certain period, such as the next process needs to be carried out within a certain period. If the wafers cannot be consumed in time within the storage period, the performance of the wafers exceeding the storage period will be affected, resulting in waste. SUMMARY
[0003] The purpose of the present application is to provide a wafer box, which comprises:
[0004] A box body having a receiving cavity for accommodating wafers, the box body having a wafer inlet and outlet communicating with the receiving cavity;
[0005] A box cover capable of being closed on the wafer inlet and outlet;
[0006] A period monitoring device provided on at least one of the box body and the box cover; the period monitoring device comprises a processing module, and a setting module, a clock module, a display module and a reminding module electrically connected with the processing module; wherein,
[0007] The setting module is used to input the first storage time length of the wafers accommodated in the wafer box;
[0008] The clock module is used to provide time information;
[0009] The processing module is used to determine storage time length data according to the input first storage time length and the time information, and can generate a first reminding instruction when the stored time length of the wafers accommodated in the receiving cavity reaches a second storage time length; wherein, the storage time length data includes at least one of the stored time length and the remaining storage time length of the wafers accommodated in the wafer box; the second storage time length is less than the first storage time length;
[0010] The display module is used to display the storage time length data of the wafers accommodated in the receiving cavity;
[0011] The reminding module is used to execute the reminding work according to the first reminding instruction.
[0012] In some embodiments, a first detection sensor is provided in the box body for detecting whether the wafer box accommodates wafers.
[0013] In some embodiments, the first detection sensor comprises a receiving module and a transmitting module; the box body has a bottom wall, first and second side walls opposite in a first direction, and third and fourth side walls opposite in a second direction; the bottom wall and the first, second, third and fourth side walls enclose the accommodating cavity;
[0014] The third side wall is provided with first partition teeth, and the fourth side wall is provided with second partition teeth; first limiting grooves are formed between adjacent first partition teeth, and second limiting grooves are formed between adjacent second partition teeth; one first limiting groove is opposite to one second limiting groove, and the first limiting groove and the second limiting groove opposite thereto are used for limiting the opposite ends of one wafer;
[0015] The first side wall is provided with a transmitting module, and the second side wall is provided with a receiving module; each first partition tooth is provided with a through hole; the transmitting module, the through holes of the first partition teeth, and the receiving module are arranged along the same straight line.
[0016] In some embodiments, the display module comprises a first display submodule and a second display submodule; wherein,
[0017] The first display submodule is used for displaying the storage time length data of the wafer accommodated in the accommodating cavity;
[0018] The processing module is further used for determining the opening time length of the box cover when the wafer box accommodates a wafer and the box cover is opened, and the second display submodule is used for displaying the opening time length of the box cover.
[0019] In some embodiments, the processing module is further used for determining the opening time length of the box cover when the wafer box accommodates a wafer and the box cover is opened, and generating a second reminding instruction when the opening time length of the box cover reaches a preset opening time length;
[0020] The reminding module is further used for performing a reminding work according to the second reminding instruction.
[0021] In some embodiments, the wafer box further comprises a second detection sensor for detecting whether the box cover is opened;
[0022] The second detection sensor is configured to start a detection work when the wafer box accommodates a wafer, and to stop the detection work when the wafer box does not accommodate a wafer.
[0023] In some embodiments, the display module further comprises a third display submodule for displaying the current date.
[0024] In some embodiments, the reminding module comprises a light reminding module; wherein when the time length of the wafer stored in the wafer box does not reach the second storage time length, the light reminding module is configured to emit a first color light; when the time length of the wafer stored in the wafer box is greater than or equal to the second storage time length, the light reminding module is configured to emit a second color light; when there is no wafer in the wafer box, the light reminding module is configured to emit a third color light; wherein the first color light and the second color light and the third color light are different in color; when the wafer box contains a wafer and the opening time length of the box cover is determined when the box cover is opened, and when the opening time length of the box cover reaches a preset opening time length, the light reminding module is configured to emit a fourth color light; and / or,
[0025] The reminding module comprises an audio reminding module; when the time length of the wafer stored in the wafer box is greater than or equal to the second storage time length, the audio reminding module is configured to emit a first reminding audio; when the wafer box contains a wafer and the opening time length of the box cover is determined when the box cover is opened, and when the opening time length of the box cover reaches a preset opening time length, the audio reminding module is configured to emit a second reminding audio.
[0026] In some embodiments, the time limit monitoring device is arranged in the box body;
[0027] The box body comprises a first side wall and a second side wall opposite in the first direction, when the reminding module comprises a light reminding module and an audio reminding module, the audio reminding module is arranged outside the first side wall, the display module is arranged outside the second side wall, and the light reminding module is arranged at the bottom of the box body.
[0028] In some embodiments, the wafer box further comprises a power supply module for supplying power to the processing module, the clock module, the setting module, the display module and the reminding module.
[0029] In some embodiments, the box cover is detachably covered on the box body, the box cover is provided with a first buckling part, the box body is provided with a second buckling part, and the first buckling part and the second buckling part are buckled and matched to fix the box cover on the box body.
[0030] The main technical effects achieved by the embodiments of the present application are:
[0031] In the wafer cassette provided in this application embodiment, by setting an expiration monitoring device on the wafer cassette, the storage duration data of the wafers stored in the wafer cassette is displayed, and a reminder is given in advance when the second storage duration has not been reached. This helps to reduce or even eliminate the expiration of wafers stored in the wall-mounted wafer cassette, so that the wafers in the wafer cassette are consumed in a timely manner, reducing the risks in the product processing process and helping to ensure product quality.
[0032] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this specification. Attached Figure Description
[0033] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this specification and, together with the description, serve to explain the principles of this specification.
[0034] Figure 1 A three-dimensional structural diagram of a wafer cassette with a separate cassette body and cassette cover, provided as an example of this application;
[0035] Figure 2 A three-dimensional structural diagram of a wafer cassette with a separate cassette body and cassette cover, provided as an example of this application;
[0036] Figure 3 A three-dimensional structural diagram of a box body provided as an example of this application;
[0037] Figure 4 for Figure 3 A magnified view of point A shown. Detailed Implementation
[0038] The technical solutions in the embodiments (or "implementations") of this application will be clearly and completely described herein with reference to the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements.
[0039] If the embodiments of this application contain terms relating to directional indications or positional relationships (such as up, down, left, right, front, back, inside, outside, top, bottom, center, vertical, horizontal, longitudinal, transverse, length, width, counterclockwise, clockwise, axial, radial, circumferential, etc.), such terms are only used to explain the relative positional relationships and movement of the components in a specific posture; if the specific posture changes, the directional indications or positional relationships will also change accordingly. Furthermore, the terms "first" and "second" used in the embodiments of this application are only for descriptive convenience and should not be construed as indicating or implying relative importance.
[0040] The following is in conjunction with the appendixFigures 1 to 4 The following describes some embodiments of this application in detail. Unless otherwise specified, the embodiments and features described below can be combined with each other.
[0041] Please refer to Figure 1 and combine when necessary Figures 2 to 4 As shown, this application provides a wafer cassette 100. The wafer cassette 100 includes a cassette body 10, a cassette cover 20, and a time-limit monitoring device.
[0042] The housing 10 has a receiving cavity 101 for accommodating wafers, and the housing 10 has a wafer inlet / outlet 1001 communicating with the receiving cavity 101.
[0043] The housing 10 has a bottom wall 15, a first side wall 11 and a second side wall 12 opposite each other in the first direction x, and a third side wall 13 and a fourth side wall 14 opposite each other in the second direction y. The wafer inlet / outlet 1001 and the bottom wall 15 are arranged opposite each other in the third direction z. The first direction x, the second direction y, and the third direction can be perpendicular to each other, or have other non-zero, non-right-angled angles between each other.
[0044] The bottom wall 15, together with the first side wall 11, the second side wall 12, the third side wall 13 and the fourth side wall 14, forms the receiving cavity 101.
[0045] The third sidewall 13 is provided with a first separating tooth 161, and the fourth sidewall 14 is provided with a second separating tooth 162. A first limiting groove 1601 is formed between adjacent first separating teeth 161, and a second limiting groove 1602 is formed between adjacent second separating teeth 162. One first limiting groove 1601 and one second limiting groove 1602 are opposite to each other. The first limiting groove 1601 and the second limiting groove 1602 opposite to it are used to limit the opposite ends of a wafer.
[0046] It is understood that the first dividing tooth 161 near the first sidewall 11 can form a first limiting groove 1601 with the first sidewall 11. The first dividing tooth 161 near the second sidewall 12 can form a first limiting groove 1601 with the first sidewall 11. The second dividing tooth 162 near the first sidewall 11 can form a second limiting groove 1602 with the first sidewall 11. The second dividing tooth 162 near the second sidewall 12 can form a second limiting groove 1602 with the first sidewall 11.
[0047] In some embodiments, the first separating tooth 161 and the second separating tooth 162 are spaced apart. In other embodiments, the bottom of the first separating tooth 161 and the second separating tooth 162 may extend to the bottom wall, and the first separating tooth 161 is connected to the corresponding second separating tooth 162.
[0048] The cover 20 can close onto the wafer inlet / outlet 1001 and can also open the wafer inlet / outlet 1001 to allow the wafer to enter or exit.
[0049] In some embodiments, the cover 20 may be provided with corresponding dividing teeth to form a cover limiting groove. A cover limiting groove, together with a corresponding first limiting groove 1601 and a second limiting groove 1602, together limit a wafer.
[0050] The expiration date monitoring device is located on at least one of the box body 10 and the box cover 20. (Combined) Figure 2 and Figure 4 As shown, the example described here is the deadline monitoring device installed on the housing 10. The deadline monitoring device 30 includes a processing module (not shown), and a setting module 31, a clock module, a display module 32, and a reminder module 33 that are electrically connected to the processing module.
[0051] The clock module is used to provide time information.
[0052] The setting module 31 is used to input the first storage duration of the wafer contained in the wafer cassette 100.
[0053] The processing module is used to determine storage duration data based on the input first storage duration and the time information, and can generate a first reminder instruction when the storage duration of the wafer contained in the receiving cavity 101 reaches a second storage duration. The storage duration data includes at least one of the storage duration of the wafer contained in the wafer cassette 100 and the remaining storage duration. The second storage duration is less than the first storage duration.
[0054] The display module 32 is used to display the storage duration data of the wafer contained in the receiving cavity 101.
[0055] The reminder module 33 is used to perform reminder work according to the first reminder instruction.
[0056] The time-limit monitoring device may include a circuit board, such as a PCB. The processing module and the clock module may be integrated on the same circuit board, or they may be separate. The processing module can acquire time information provided by the clock module and perform actions based on that information. The processing module may have a storage unit, or a separate storage module may be provided on the circuit board to store relevant data.
[0057] The setting module 31 may include a setting button. When setting a wafer in the wafer cassette 100, the first storage duration adapted to the wafer can be input via the setting button. The first storage duration can be input into the storage unit of the processing module or the storage module of the circuit board. The first storage duration can be set according to specific circumstances such as the wafer's shelf life, for example, it can be set to the wafer's shelf life, such as 30 days, 50 days, etc.
[0058] This settings button can also be used to change data, such as changing the initial storage duration, so that it can be adjusted as needed.
[0059] The stored duration can be determined by the processing module based on the start time of the wafer being stored in the wafer cassette and the time information provided by the clock module. For example, if the wafer has been stored in the wafer cassette for 8 days, the processing module determines the stored duration to be 8 days.
[0060] The starting time for storing the wafer in the wafer cassette can be the input of the first storage duration.
[0061] The remaining storage time can be determined based on the already stored time and the first storage time. The sum of the remaining storage time and the already stored time is the first storage time. For example, if the first storage time is 30 days and the already stored time is 8 days, the remaining storage time is 22 days.
[0062] The second storage duration can be determined based on specific factors such as wafer consumption and the first storage duration of the wafer. For example, the second storage duration can be proportional to the first storage duration. For instance, the ratio between the second and first storage durations can be less than or equal to 0.8. For example, if the ratio between the second and first storage durations is 0.8, and the first storage duration is 30 days, the second storage duration would be 24 days.
[0063] In some embodiments, the housing 10 is provided with a first detection sensor 40 for detecting whether the wafer cassette 100 contains a wafer.
[0064] The first detection sensor 40 can be electrically connected to the processing module to provide feedback of the detection result to the processing module.
[0065] The first detection sensor may be a photoelectric sensor.
[0066] The first sensor 40 can be triggered when the cover 20 is opened, or it can be activated by a switch or other opening device as needed. In some embodiments, the first sensor 40 can be configured to remain on while the wafer cassette 100 is in use.
[0067] In some embodiments, the first detection sensor 40 includes a receiving module 41 and a transmitting module disposed opposite to each other. When the first detection sensor 40 is working, the transmitting module transmits a detection signal towards the receiving module. If the receiving module can receive the detection signal, it is determined that there is no wafer inside the housing 10; if the receiving module does not receive the detection signal, it is determined that there is a wafer inside the housing 10. When there is a wafer inside the housing 10, a portion of the wafer is located between the transmitting module and the receiving module 41, thus blocking the detection signal, and therefore the receiving module cannot receive the detection signal.
[0068] Combination Figure 3 and Figure 4 As shown, in some embodiments, the first sidewall 11 is provided with a transmitting module, and the second sidewall is provided with a receiving module 41. Each of the first separating teeth 161 has a through hole 1611. The transmitting module, the through holes 1611 of each of the first separating teeth 161, and the receiving module 41 are arranged along the same straight line. When there is no wafer in the housing 10, the detection signal can pass through each through hole 1611 and be received by the receiving module 41. At this time, the first detection sensor 40 detects that there is no wafer in the wafer housing 100. When there is a wafer in the housing 10, the detection signal is blocked by the wafer, and the receiving module 41 cannot receive the detection signal. At this time, the first detection sensor 40 detects that the wafer housing 100 contains a wafer.
[0069] In some embodiments, the display module 32 includes a first display submodule 321 and a second display submodule 322.
[0070] The first display submodule 321 is used to display the storage duration data of the wafer contained in the receiving cavity 101.
[0071] The processing module is also used to contain a wafer in the wafer cassette 100 and to determine the opening duration of the cassette cover 20 when the cover 20 is opened, and the second display submodule 322 is used to display the opening duration of the cassette cover 20.
[0072] The display module 32 can be a display screen, such as an LCD screen. The first display submodule 321 and the second display submodule 322 can be an integrated display screen or two independent display screens.
[0073] In some embodiments, the display module 32 further includes a third display submodule 323 for displaying the current date, such as a date including year, month and day.
[0074] In some embodiments, the current date may also include the current specific time.
[0075] The third display submodule 323 can also be a display screen. The third display submodule, the first display submodule 321, and the second display submodule 322 can be integrated into a single display screen, or the third display submodule can be an independent display screen.
[0076] When using wafers, a single wafer cassette can hold multiple wafers from the same batch. If the cassette cover 20 is not closed promptly after opening to retrieve some wafers, there is a risk of wafer contamination. Therefore, the wafer cassette 100 can be configured to issue a reminder when the cassette cover 20 has been open for a certain period of time.
[0077] In some embodiments, the processing module is further configured to determine the opening duration of the cover 20 when the wafer is contained in the wafer cassette 100 and the cover 20 is opened, and generate a second reminder instruction when the opening duration of the cover 20 reaches a preset opening duration.
[0078] The reminder module 33 is also used to perform reminder work according to the second reminder instruction.
[0079] The preset on duration can be set according to the specific conditions of the wafer, such as 30 minutes or 1 hour.
[0080] The preset opening duration can be pre-stored in the storage module of the processing module or the circuit board, or input into the storage module of the processing module or the circuit board through the setting module.
[0081] In some embodiments, the wafer cassette 100 further includes a second detection sensor 50 for detecting whether the cassette cover 20 is open.
[0082] The second detection sensor 50 can be a photoelectric sensor.
[0083] When the lid 20 is opened, the second detection sensor 50 can detect that the lid 20 is open; when the lid 20 is closed on the box, the second detection sensor 50 can detect that the lid 20 is closed.
[0084] In some embodiments, the second detection sensor 50 may be configured to activate detection when a wafer is contained in the wafer cassette 100 and deactivate detection when no wafer is contained in the wafer cassette 100.
[0085] In some embodiments, the reminder module 33 includes a light reminder module 331, such as an LED light.
[0086] When the storage time of the wafer in the wafer cassette 100 has not reached the second storage time, the light reminder module is configured to emit a first color light, such as green light.
[0087] When the duration of the wafer stored in the wafer cassette 100 is greater than or equal to the second storage duration, the light reminder module is configured to emit a second color light, such as red light.
[0088] When there are no wafers in the wafer cassette 100, the light reminder module is configured to emit a third color light, such as yellow light.
[0089] The first color light is different from the second color light and the third color light.
[0090] When the wafer is contained in the wafer box 100 and the box cover is open, the opening duration of the box cover is determined. When the opening duration of the box cover reaches the preset opening duration, the light reminder module is configured to emit a fourth color light, such as red light, or light that flashes red, green and yellow alternately.
[0091] The fourth color light can be the same as the second color light, or it can be different. For example, the fourth color light can be orange or other colors that can serve as a reminder.
[0092] In some embodiments, when the first detection sensor activates the light and detects a wafer in the wafer cassette 100, the light alert module can also be configured to emit a corresponding color light, such as the same green as the first color light, or another color different from the first color light. The first color light, the second color light, the third color light, and the fourth color light can each be a monochromatic light, or they can be multi-colored lights.
[0093] It is understandable that when the aforementioned light reminder module emits light of various colors, it can either flash the corresponding color light as a reminder or keep the corresponding color light constantly on as a reminder.
[0094] In some embodiments, the reminder module 33 includes an audio reminder module 332. When the duration of wafer storage in the wafer cassette is greater than or equal to a second storage duration, the audio reminder module is configured to emit a first reminder audio, such as an alarm tone. When the wafer cassette contains a wafer and the cassette cover is open, the opening duration of the cassette cover is determined, and when the opening duration of the cassette cover reaches a preset opening duration, the audio reminder module is configured to emit a second reminder audio, such as another alarm tone. The first reminder audio and the second reminder audio may be the same or different.
[0095] Combination Figure 2 As shown, the audio alert module 332 may include an audio module housing 3320 and a speaker. The housing 3320 may form an accommodating space with the first sidewall 11. The speaker may be disposed in the accommodating space. The audio module housing 3320 has an audio outlet 3221, through which the alert audio emitted by the speaker can be transmitted.
[0096] In some embodiments, when the reminder module 33 includes a light reminder module 331 and an audio reminder module 332, the audio reminder module 332 is disposed outside the first side wall 11, the display module 32 is disposed outside the second side wall 12, and the light reminder module 331 is disposed at the bottom of the box body 10.
[0097] Combination Figures 2 to 4 As shown, in some embodiments, the light reminder module 331 may include a plurality of LEDs, which may be arranged at intervals at the bottom edge of each sidewall.
[0098] Based on the above description, when the reminder module 33 includes a light reminder module 331 and an audio reminder module 332, the wafer box 100 can remind operators and managers to pay attention to the wafer storage time through changes in different colored lights and audio sounds emitted by the light reminder module 331, so that products that have not reached or are about to reach their shelf life can be processed and consumed in a timely manner. Furthermore, when the reminder module 33 has a function to remind the operator of the lid opening duration, the wafer box 100 can remind the operator to close the lid promptly after using the wafer, reducing the possibility of wafer contamination and thus reducing the risks during product processing.
[0099] It should be noted that in some other embodiments, the reminder module may include only one of the light reminder module and the audio reminder module.
[0100] In some embodiments, the wafer cassette 100 further includes a power supply module 34 for supplying power to modules or structures that require electricity, such as the processing module, the clock module, the setting module 31, the display module 32, and the reminder module 33.
[0101] The power supply module 34 can be a battery.
[0102] In some embodiments, the power supply module 34 may specifically power the processing module, the clock module, the setting module 31, the first display submodule 321, the second display submodule 322, the third display submodule 323, the audio reminder module 332, the light reminder module 331, the first detection sensor 40, the second detection sensor 50, and other modules or structures that require power.
[0103] The power supply module 34 is replaceable. When the power supply module has low power, the brightness of the light indicator module decreases. When the power supply module has no power, the light indicator module will turn off accordingly.
[0104] In some embodiments, the lid 20 is detachably fitted onto the box body 10. The lid 20 is provided with a first fastening part 21, and the box body 10 is provided with a second fastening part 17. The first fastening part 21 and the second fastening part 17 are fastened together to fix the lid 20 onto the box body.
[0105] The first fastening part 21 and the second fastening part 17 can be fastened together by an interference fit.
[0106] It should be noted that the technical solutions or features described in the above embodiments can be combined or supplemented with each other without conflict. The scope of protection of this application is not limited to the precise structures described in the above embodiments and shown in the accompanying drawings; all modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of protection of this application.
Claims
1. A wafer cassette, characterized in that, The wafer cassette includes: A housing having a receiving cavity for accommodating a wafer, the housing having a wafer inlet and outlet communicating with the receiving cavity; The lid is designed to cover the wafer inlet and outlet. A due date monitoring device is disposed on at least one of the box body and the box cover; the due date monitoring device includes a processing module, and a setting module, a clock module, a display module, and a reminder module electrically connected to the processing module; wherein, The setting module is used to input the first storage duration of the wafer contained in the wafer box; The clock module is used to provide time information; The processing module is used to determine storage duration data based on the input first storage duration and the time information, and can generate a first reminder instruction when the storage duration of the wafer contained in the receiving cavity reaches the second storage duration; wherein, the storage duration data includes at least one of the storage duration of the wafer contained in the wafer cassette and the remaining storage duration; the second storage duration is less than the first storage duration; The display module is used to display the storage duration data of the wafer contained in the receiving cavity; The reminder module is used to perform reminder tasks according to the first reminder instruction.
2. The wafer cassette as described in claim 1, characterized in that, The box is equipped with a first detection sensor for detecting whether the wafer box contains a wafer.
3. The wafer cassette as described in claim 2, characterized in that, The first detection sensor includes a receiving module and a transmitting module; the housing has a bottom wall, a first side wall and a second side wall opposite each other in a first direction, and a third side wall and a fourth side wall opposite each other in a second direction; the bottom wall, the first side wall, the second side wall, the third side wall and the fourth side wall form the receiving cavity; The third sidewall is provided with a first dividing tooth, and the fourth sidewall is provided with a second dividing tooth. A first limiting groove is formed between adjacent first dividing teeth, and a second limiting groove is formed between adjacent second dividing teeth. One first limiting groove is opposite to one second limiting groove. The first limiting groove and the second limiting groove opposite to it are used to limit the opposite ends of a wafer. The first sidewall is provided with a transmitting module, the second sidewall is provided with a receiving module, and each of the first dividing teeth has a through hole. The transmitting module, the through holes of each of the first dividing teeth, and the receiving module are arranged along the same straight line.
4. The wafer cassette as described in claim 1, characterized in that, The display module includes a first display submodule and a second display submodule; wherein... The first display submodule is used to display the storage duration data of the wafer contained in the receiving cavity; The processing module is also used to contain a wafer in the wafer cassette and to determine the opening duration of the cassette cover when the cover is opened, and the second display submodule is used to display the opening duration of the cassette cover.
5. The wafer cassette as described in claim 1, characterized in that, The processing module is also used to determine the opening duration of the cover when the wafer is contained in the wafer cassette and the cover is opened, and to generate a second reminder instruction when the opening duration of the cover reaches a preset opening duration. The reminder module is also used to perform reminder tasks according to the second reminder instruction.
6. The wafer cassette as claimed in claim 1, characterized in that, The wafer cassette also includes a second detection sensor for detecting whether the cassette cover is open; The second detection sensor is configured to activate detection when a wafer is contained in the wafer cassette and deactivate detection when no wafer is present in the wafer cassette.
7. The wafer cassette as described in claim 1, characterized in that, The display module also includes a third display submodule for displaying the current date.
8. The wafer cassette as claimed in any one of claims 1 to 7, characterized in that, The reminder module includes a light reminder module; wherein, when the storage time of the wafer in the wafer cassette is less than a second storage time, the light reminder module is configured to emit a first color light; when the storage time of the wafer in the wafer cassette is greater than or equal to the second storage time, the light reminder module is configured to emit a second color light; when there is no wafer in the wafer cassette, the light reminder module is configured to emit a third color light; wherein the first color light, the second color light, and the third color light are different colors; when the wafer cassette contains a wafer and the cassette cover is open, the opening time of the cassette cover is determined, and when the opening time of the cassette cover reaches a preset opening time, the light reminder module is configured to emit a fourth color light; and / or, The reminder module includes an audio reminder module; when the storage duration of the wafer in the wafer cassette is greater than or equal to a second storage duration, the audio reminder module is configured to emit a first reminder audio; when the wafer cassette contains a wafer and the cassette cover is open, the opening duration of the cassette cover is determined, and when the opening duration of the cassette cover reaches a preset opening duration, the audio reminder module is configured to emit a second reminder audio.
9. The wafer cassette as described in claim 8, characterized in that, The time limit monitoring device is located in the housing; The box body includes a first sidewall and a second sidewall opposite to each other in a first direction. When the reminder module includes a light reminder module and an audio reminder module, the audio reminder module is located outside the first sidewall, the display module is located outside the second sidewall, and the light reminder module is located at the bottom of the box body.
10. The wafer cassette as claimed in claim 1, characterized in that, The wafer cassette also includes a power supply module for supplying power to the processing module, the clock module, the setting module, the display module, and the reminder module.
11. The wafer cassette as claimed in claim 1, characterized in that, The lid is detachably fitted onto the box body. The lid has a first fastening part, and the box body has a second fastening part. The first fastening part and the second fastening part engage to fix the lid onto the box body.