Air bag ramming head

Abstract

The utility model discloses an air bag ramming head which comprises a ramming head metal plate and a connecting mechanism. A first cavity and a second cavity are formed in the polishing head metal plate, and the second cavity is formed in the first cavity; an air inlet pipe and an air outlet pipe are arranged at the top of the first cavity and penetrate through the connecting mechanism; a detector is arranged in the first chamber; a polishing end is arranged at the end part of the polishing head metal plate, a plurality of through holes are formed in one side of the polishing end, one side of the polishing end is covered with a flexible film, and the flexible film is attached to the through holes; by arranging the first chamber and the second chamber, certain negative pressure is formed in the through hole in the end part, and meanwhile, the end part is covered with the flexible film, so that the wafer is prevented from being damaged while the air bag ramming head adsorbs the wafer, and lossless adsorption treatment of the wafer is realized.

Description

Technical Field

[0001] This utility model relates to the field of chip processing technology, and more specifically, to an airbag throwing head. Background Technology

[0002] During wafer processing, a polishing head is needed to pick up and hold the wafer. Existing airbag polishing heads do not have two chambers, making it difficult to adjust the negative pressure inside the polishing head and affecting the wafer adhesion force. Utility Model Content

[0003] To solve at least one of the above-mentioned technical problems, this utility model proposes an airbag throwing head.

[0004] The first aspect of this utility model provides an airbag throwing head, including: a throwing head sheet metal and a connecting mechanism;

[0005] The sheet metal head is provided with a first chamber and a second chamber, with the second chamber located inside the first chamber.

[0006] An air inlet pipe and an air outlet pipe are provided at the top of the first chamber, and the air inlet pipe and the air outlet pipe pass through the connecting mechanism;

[0007] A detector is installed inside the first chamber;

[0008] The end of the sheet metal polishing head is provided with a polishing end. A plurality of through holes are provided on one side of the polishing end. A flexible film is covered on one side of the polishing end, and the flexible film is attached to the through holes to form a cavity.

[0009] In a preferred embodiment of the present invention, the connecting mechanism includes a first mounting end and a second mounting end, the second mounting end being sealed to one end of the polished sheet metal, and the air inlet pipe and the air outlet pipe extending through to the first mounting end.

[0010] In a preferred embodiment of this utility model, the first mounting end and the second mounting end are provided with a plurality of fixing holes evenly distributed along the circumference.

[0011] In a preferred embodiment of this utility model, a positioning screw is provided on one side of the first mounting end.

[0012] In a preferred embodiment of this utility model, a sealing element is provided between the polishing end and the polishing sheet metal.

[0013] In a preferred embodiment of this utility model, a plurality of fixing members are provided on the outer side of the sealing member, and a snap-fit ​​member is provided inside the sealing member, with the snap-fit ​​member corresponding to the fixing member one by one.

[0014] In a preferred embodiment of this utility model, the outer side of the polishing end is provided with multiple grooves to facilitate the outflow of polishing liquid.

[0015] In a preferred embodiment of the present invention, an annular air passage is provided inside the first chamber.

[0016] The above-mentioned technical solution of this utility model has the following advantages compared with the prior art:

[0017] This application creates a certain negative pressure in the end through-hole by setting a first chamber and a second chamber, and at the same time covering the end with a flexible membrane, so as to prevent damage to the wafer while the airbag head adsorbs the wafer, thus achieving non-destructive wafer adsorption processing. Attached Figure Description

[0018] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, some of the drawings in the following description are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 This is a three-dimensional structural diagram of the airbag throwing head according to an embodiment of the present invention;

[0020] Figure 2 This is a front view of the airbag throwing head according to an embodiment of this utility model;

[0021] Figure 3 This is a partial cross-sectional view of the airbag projectile head according to an embodiment of this utility model.

[0022] In the diagram: 1. Positioning screw, 2. Air inlet, 3. Fixing hole, 4. Connecting mechanism, 5. Seal, 6. Polishing end, 7. Groove, 8. Fixing component, 9. Polishing head sheet metal, 10. First mounting end, 11. Air outlet, 12. Second mounting end, 13. Air passage, 14. First chamber, 15. Snap-fit ​​component, 16. Detector, 17. Second chamber. Detailed Implementation

[0023] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described in detail below with reference to specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0024] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the scope of protection of the present invention is not limited to the specific embodiments disclosed below.

[0025] Example 1

[0026] See Figures 1-3 As shown, this utility model proposes an airbag throwing head, including: a throwing head sheet metal 9 and a connecting mechanism 4; the throwing head sheet metal 9 is a custom-made part;

[0027] The internal structure of the sheet metal head 9 is provided with a first chamber 14 and a second chamber 17, with the second chamber 17 located inside the first chamber 14.

[0028] The top of the first chamber 14 is provided with an air inlet pipe and an air outlet pipe, and the air inlet pipe and the air outlet pipe are connected through the mechanism 4.

[0029] A detector 16 is installed inside the first chamber 14 to detect the pressure inside the first chamber 14;

[0030] The end of the polishing head sheet metal 9 is provided with a polishing end 6. Several through holes are provided on one side of the polishing end 6. A flexible film is covered on one side of the polishing end 6, and the flexible film is attached to the through holes to form a cavity.

[0031] According to an embodiment of the present utility model, the connecting mechanism 4 includes a first mounting end 10 and a second mounting end 12. The second mounting end 12 is sealed to one end of the polished sheet metal. The air inlet pipe and the air outlet pipe pass through to the first mounting end 10. The end of the air inlet pipe is provided with an air inlet 2, and the end of the air outlet pipe is provided with an air outlet 11. The air inlet end 2 and the air outlet end 11 are installed on one side of the first mounting end 10.

[0032] According to an embodiment of the present invention, the first mounting end 10 and the second mounting end 12 are provided with a plurality of fixing holes 3 evenly distributed in the circumferential direction.

[0033] According to an embodiment of the present invention, a positioning screw 1 is provided on one side of the first mounting end 10.

[0034] According to an embodiment of the present invention, a sealing element 5 is provided between the polishing end 6 and the polishing sheet metal.

[0035] According to an embodiment of the present invention, a plurality of fixing members 8 are provided on the outer side of the sealing member 5, and a snap-fit ​​member 15 is provided inside the sealing member 5, with the snap-fit ​​member 15 corresponding to the fixing member 8 one by one.

[0036] According to an embodiment of the present invention, a plurality of grooves 7 are provided on the outer side of the polishing end 6 to facilitate the outflow of polishing liquid.

[0037] According to an embodiment of the present invention, an annular air passage 13 is provided inside the first chamber 14.

[0038] In summary, this application creates a certain negative pressure at the end through hole by setting the first chamber 14 and the second chamber 17, and at the same time covers the end with a flexible membrane, so as to prevent damage to the wafer while the airbag head adsorbs the wafer, thus achieving non-destructive wafer adsorption processing.

[0039] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0040] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to the above embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0041] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. An airbag throwing head, comprising: The sheet metal of the polishing head and the connecting mechanism are characterized in that, The sheet metal head is provided with a first chamber and a second chamber, with the second chamber located inside the first chamber. An air inlet pipe and an air outlet pipe are provided at the top of the first chamber, and the air inlet pipe and the air outlet pipe pass through the connecting mechanism; A detector is installed inside the first chamber; The end of the sheet metal polishing head is provided with a polishing end, and a plurality of through holes are provided on one side of the polishing end. A flexible film is covered on one side of the polishing end, and the flexible film is attached to the through holes to form a cavity.

2. The airbag throwing head according to claim 1, characterized in that, The connecting mechanism includes a first mounting end and a second mounting end. The second mounting end is sealed to one end of the polished sheet metal. The air inlet pipe and the air outlet pipe pass through to the first mounting end.

3. The airbag throwing head according to claim 2, characterized in that, The first mounting end and the second mounting end are evenly distributed with multiple fixing holes along the circumference.

4. The airbag throwing head according to claim 2, characterized in that, A positioning screw is provided on one side of the first mounting end.

5. An airbag throwing head according to claim 2, characterized in that, A sealing element is provided between the polishing end and the polished sheet metal.

6. An airbag throwing head according to claim 5, characterized in that, The outer side of the seal is provided with multiple fixing members, and the inner side of the seal is provided with snap-fit ​​members, each of which corresponds to one of the fixing members.

7. An airbag throwing head according to claim 1, characterized in that, The polishing end has multiple grooves on its outer side.

8. An airbag throwing head according to claim 1, characterized in that, The first chamber is provided with an annular air passage.

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