Cleaning device for semiconductor production

Abstract

The utility model discloses a cleaning device for semiconductor production, which comprises a bottom frame, four corners of the bottom frame are provided with upright columns extending upwards, one end of each upright column far away from the bottom frame is provided with an upper frame body, and the bottom frame, the upright columns and the upper frame body form a mounting frame; three supporting short arms extending inwards are arranged on the bottom frame, and downward positioning grooves are formed in the inward suspended head ends of the supporting short arms. A dust removal assembly is arranged in the mounting frame, a moving structure is arranged on the dust removal assembly, an air pressure assembly is arranged on the moving structure, and the dust removal assembly, the moving structure and the air pressure assembly are arranged in the mounting frame; the dust removal assembly comprises a dust removal head cavity, a bottom plate is arranged at the bottom of the dust removal head cavity, and a frame sealing cover is arranged at the top end of the dust removal head cavity; and a positive pressure cavity extending upwards from the bottom plate is formed in the middle in the dust removal head cavity. The non-contact dust removal head is adopted for cleaning, the cleaning efficiency is improved, and the automation degree of equipment is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor production, in particular to a cleaning device for semiconductor chip production. BACKGROUND

[0002] The wafer is a silicon chip used for making silicon semiconductor integrated circuits, and is used for producing the chip of the integrated circuit. During the semiconductor production process, the wafer is placed in a wafer box, and the wafer box is transported to the carrier of different load ports (Loadport) through an AMHS (automatic material handling system). After a period of time, dust will be left on the surface of the carrier, which will affect the yield of the wafer product.

[0003] In order to maintain the cleanliness of the carrier, the carrier of the semiconductor processing equipment needs to be cleaned regularly. The existing cleaning methods mainly include manual cleaning and brush cleaning. Manual cleaning needs to be performed during equipment maintenance, which is time-consuming and labor-intensive, and has low efficiency. Moreover, it is not conducive to the environment of the whole working condition, and it is also difficult to control the cleanliness of the cleaning. Brush cleaning is a contact type, which may scratch the carrier and generate static electricity. UTILITY MODEL CONTENT

[0004] In order to solve the problems existing in the prior art, the purpose of the utility model is to provide a cleaning device for semiconductor chip production. The cleaning device realizes non-contact suspended positive and negative air duct cleaning, and simultaneously realizes gas and electricity isolation and independent operation, thereby improving the stability and yield of product processing.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A cleaning device for semiconductor production, comprising a bottom frame, four corners of the bottom frame are provided with upwardly extending vertical columns, one end of the vertical column away from the bottom frame is provided with an upper frame body, the bottom frame, the vertical column and the upper frame body form an installation frame; three inwardly extending support arms are arranged on the bottom frame, and a downward positioning groove is arranged at the inwardly suspended head end of the support arm;

[0007] A dust removal assembly is arranged in the installation frame, a moving structure is arranged on the upper surface of the dust removal assembly, and a gas pressure assembly is arranged on the upper surface of the moving structure; the dust removal assembly, the moving structure and the gas pressure assembly are arranged in the installation frame;

[0008] The dust removal assembly comprises a dust removal head cavity, a bottom plate is arranged at the bottom of the dust removal head cavity, and a frame body sealing cover is arranged at the top end of the dust removal head cavity;

[0009] A positive pressure cavity extending upward from the bottom plate is arranged in the middle of the dust removal head cavity, and a separation distance is arranged between the top end of the positive pressure cavity and the top end of the dust removal head cavity;

[0010] Two sides of the positive pressure cavity are respectively provided with negative pressure cavities, the two sides of the negative pressure cavities are arranged in the dust removal head cavity, and the two sides of the negative pressure cavities are connected in penetration;

[0011] The middle part in the mounting frame is provided with a horizontal loading plate for mounting, one end of the horizontal loading plate is fixedly arranged at the middle part of the two adjacent vertical columns, the other end of the horizontal loading plate away from the vertical column is fixedly provided with a vertical plate perpendicular to the vertical column, and a moving structure is arranged on the horizontal loading plate;

[0012] The moving structure comprises an air piece seat, and the air piece seat is provided with an air pressure assembly; the air pressure assembly comprises a pressure distribution bin, the pressure distribution bin is provided with a positive pressure barrel and a negative pressure barrel in parallel, the positive pressure barrel is provided with a positive pressure fan, and the negative pressure barrel is provided with a negative pressure fan.

[0013] Further, in some embodiments, one side of the pressure distribution bin is provided with an inclined air guide wall, a transmission suspension top cavity protruding outward is arranged at the top of the side of the positive pressure barrel close to the inclined air guide wall, and the positive pressure barrel and the transmission suspension top cavity are connected in penetration through an air outlet;

[0014] The top end of the side of the negative pressure barrel close to the inclined air guide wall is provided with a suction suspension top cavity protruding outward, and the negative pressure barrel and the suction suspension top cavity are connected in penetration through a suction air outlet;

[0015] The top surface of the transmission suspension top cavity is provided with a positive pressure pressure measuring port, and the bottom surface of the transmission suspension top cavity is provided with a downward positive pressure connector;

[0016] The top surface of the suction suspension top cavity is provided with a negative pressure pressure measuring port, and the bottom surface of the suction suspension top cavity is provided with a downward negative pressure connector;

[0017] The transmission suspension top cavity and the suction suspension top cavity are arranged in parallel and adjacent to each other, and a spacing isolation layer is arranged between the transmission suspension top cavity and the suction suspension top cavity, and the transmission suspension top cavity and the suction suspension top cavity are independent of each other and are not connected to each other through the spacing isolation layer.

[0018] Further, in some embodiments, the end of the positive pressure cavity away from the bottom plate is provided with a positive pressure sealing cover; the positive pressure sealing cover is provided with an air inlet cylinder extending upward and penetrating through the frame sealing cover, one end of the air inlet cylinder away from the positive pressure cavity extends above the frame sealing cover, and the air inlet cylinder is connected in penetration with the positive pressure cavity;

[0019] The frame sealing cover is provided with an air outlet cylinder, and the air outlet cylinder is connected in penetration with the negative pressure cavity;

[0020] The positive pressure cavity and the two sides of the negative pressure cavity are arranged in the dust removal head cavity, and the positive pressure cavity and the negative pressure cavity are isolated from each other and are not connected in penetration.

[0021] Further, in some embodiments, the bottom surface of the positive pressure cavity is provided with a first dust blowing slot penetrating in the horizontal direction, and the two ends of the first dust blowing slot are provided with matching and symmetrical second dust blowing slots, the second dust blowing slots are arranged perpendicularly to the first dust blowing slot, and the first dust blowing slot and the second dust blowing slot penetrate and are arranged on the bottom plate of the positive pressure cavity;

[0022] The bottom surface of the negative pressure cavity is provided with a first suction slot and a second suction slot which are transversely arranged, and the first suction slot and the second suction slot are arranged in parallel with the first dust blowing slot; the first suction slot is arranged close to the first dust blowing slot, and the second suction slot is arranged away from the first dust blowing slot; and a separation distance is arranged between the first suction slot and the second suction slot.

[0023] The first suction slot and the second suction slot are arranged on the bottom plate of the negative pressure cavity, and the first suction slot and the second suction slot are arranged on the bottom plate.

[0024] The first dust blowing slot is arranged in parallel with the first suction slot.

[0025] Further, in some embodiments, a separation plate is arranged between the positive pressure barrel and the negative pressure barrel, and the positive pressure barrel and the negative pressure barrel are isolated from each other by the separation plate and are not in communication with each other.

[0026] The negative pressure connector is connected in communication with the exhaust duct of the dust removal assembly through a gas guide pipe, and the positive pressure connector is connected in communication with the air inlet duct of the dust removal assembly through another gas guide pipe.

[0027] Further, in some embodiments, the first dust blowing slot and the second dust blowing slot are arranged on the bottom plate, and the second dust blowing slot is arranged close to the inner wall of the short side of the positive pressure cavity.

[0028] The top of the dust removal head cavity is provided with an opening, and the opening at the top of the dust removal head cavity is provided with a frame sealing cover; the dust removal head cavity is integrally formed with the bottom plate, and a distance is arranged between the top of the positive pressure cavity away from the bottom plate and the frame sealing cover.

[0029] The bottom surface of the positive pressure cavity is provided with two matching symmetrical variable cross-section rods, the variable cross-section rods are arranged in parallel with the first dust blowing slot, and the two variable cross-section rods are arranged on the two sides of the first dust blowing slot.

[0030] The outer wall of the short side of the positive pressure cavity is provided with a third suction slot which penetrates the dust removal head cavity, the third suction slot is arranged between the outer wall of the short side of the positive pressure cavity and the inner wall of the dust removal head cavity, and the third suction slot is arranged in parallel with and adjacent to the second dust blowing slot.

[0031] The third suction slot extends downward and penetrates the bottom plate, and the third suction slot is connected in communication with the negative pressure cavity.

[0032] Further, in some embodiments, the moving structure includes a mounting rail, the mounting rail is fixedly arranged below the transverse loading plate, one end of the mounting rail is provided with a first motor, a mounting sliding seat is arranged on the mounting rail and can slide, and the first motor is in transmission connection with the mounting sliding seat.

[0033] The air piece seat is fixedly connected with the mounting slide, is vertically arranged with the mounting rail, and one end of the air piece seat extends outside the horizontal loading plate.

[0034] Further, in some embodiments, a transmission slide is fixedly arranged on one side of the air piece seat away from the mounting slide, the transmission slide is perpendicular to the mounting rail, one end of the transmission slide is provided with a second motor, a slidable hanging slide is arranged on the transmission slide, the hanging slide is in transmission connection with the second motor, and a dust removal assembly is hung at one end of the hanging slide away from the transmission slide.

[0035] Further, in some embodiments, the vertical plate is arranged on the upper frame at one end away from the horizontal loading plate, a battery is arranged on the upper surface of the horizontal loading plate, and the horizontal loading plate and the vertical plate form an L-shaped fixed hanging piece structure.

[0036] One side of the air piece seat away from the vertical plate is provided with an air pressure assembly, and the air pressure assembly is arranged adjacent to the vertical plate.

[0037] The cleaning device of the application is used for cleaning the chip box (chip wafer box) on the carrier, and the carrier is cleaned. The device of the application is placed on the chip carrier for cleaning. There are usually hundreds or thousands of wafer processing carriers (positions) in the working environment. A crane system is provided in the working environment. The crane is loaded with a movable clamp. After one work position is cleaned, the crane system transports the cleaning device of the application to the next idle work position (carrier position) to be cleaned. Only the work position route map is needed to clean one idle work position at a time.

[0038] The application adopts a non-contact suspension + air and electricity isolation design. Dust is blown away by fluctuating air flow, and a wind curtain barrier (negative pressure suction) is used to close the dust removal working space. A high-efficiency filter is arranged on the suction fan (negative pressure fan) to filter dust (high efficiency). Two fans provide a positive or negative pressure air source without external air source. In addition, a battery is used for power supply without external power supply. The fan and the motor are both 24 volts. The whole device is isolated from external air and electricity. The two fans are arranged on the mounting rail (horizontal moving guide rail) and are movable. The fan is connected with the dust removal head through an air guide pipe. The fan moves together with the dust removal head. When the dust removal head (dust removal assembly) moves, the fan moves together with it. The distance between the fan and the dust removal head will not become too large, which is beneficial to avoid collision with the nearby plate and shaft, and realizes intelligent cleaning.

[0039] The dust removal head (blow and suction head) of the application is suspended on the carrier and is not in contact. The middle blowing seam blows and the surrounding suction seam sucks. Dust will not be exposed, and the four-way negative pressure suction (suction seam) will not leak air, which can prevent dust from floating out.

[0040] The dust removal head has two suction seams (suction narrow seam channels) on each side. The gap width of the suction seam is greater than the width of the blowing seam. The wind blown by the middle blowing seam of the dust removal head (working gun) will spread to both sides, and two suction seams are provided on each side to form a wind curtain, and then the dust is sucked away. The narrow edges of the dust removal head are provided with blowing seams and suction seams, and the four-way suction seam forms a suction wind curtain. This avoids the spread of dust from the blowing gun and improves the cleaning efficiency and the degree of automation of the equipment. BRIEF DESCRIPTION OF DRAWINGS

[0041] Figure 1 The application is an application schematic diagram of the embodiment;

[0042] Figure 2 The application is a structural schematic diagram of the embodiment;

[0043] Figure 3 The application is a three-dimensional schematic diagram of the embodiment;

[0044] Figure 4 The application is an assembly schematic diagram of the gas pressure assembly part of the embodiment;

[0045] Figure 5 The application is an exploded structural diagram of the pressure distribution bin part of the embodiment;

[0046] Figure 6 The application is a structural schematic diagram of the gas pressure assembly part of the embodiment;

[0047] Figure 7 The application is an assembly schematic diagram of the moving structure part of the embodiment;

[0048] Figure 8 The application is a structural schematic diagram of the drag chain part of the embodiment;

[0049] Figure 9 The application is a structural schematic diagram of the gas guide pipe part of the embodiment;

[0050] Figure 10 The application is a structural schematic diagram of the dust removal assembly part of the embodiment;

[0051] Figure 11 The application is an assembly schematic diagram of the dust removal assembly part of the embodiment;

[0052] Figure 12 The application is a structural schematic diagram of the bottom plate part of the embodiment;

[0053] Figure 13 As Figure 12 The structural schematic diagram of A, B part in the middle;

[0054] Figure 14 The cross-sectional structural diagram of the dust removal assembly part of the embodiment of the application;

[0055] Figure 15 The air duct schematic diagram of the embodiment of the application. DETAILED DESCRIPTION

[0056] In order to further understand the characteristics, technical means and specific purposes and functions achieved by the utility model, the utility model is further described in detail below in combination with the drawings and specific embodiments.

[0057] In the production of semiconductor chips, the surface of the carrier 18 supporting the processing chip box is provided with three separate and uniformly distributed positioning support heads 19. In order to prevent the cleaning device of the application from contacting the surface of the carrier 18, the bottom frame 11 of the cleaning device of the application is provided with three support short arms 16 corresponding to the three positioning support heads 19. The bottom surface of the suspended head end of the support short arm 16 is provided with a positioning groove 17 corresponding to the positioning support head 19, so that the positioning groove 17 of the support short arm 16 (the bottom frame 11) is in contact with the positioning support head 19 of the carrier 18. Through three-point and three-short-beam bearing, the dust removal head is suspended on the carrier 18 in a non-contact manner, so that the bottom frame 11 of the cleaning device is spaced apart from the surface of the carrier 18 without contact.

[0058] The application comprises a bottom frame 11, four corners of the bottom frame 11 are provided with vertical columns 12 extending upward, one end of the vertical column 12 away from the bottom frame 11 is provided with an upper frame body 13, the bottom frame 11, the vertical column 12 and the upper frame body 13 form an installation frame; a dust removal assembly 20 is arranged in the installation frame, a moving structure 40 is arranged on the upper surface of the dust removal assembly 20, a gas pressure assembly 60 is arranged on the upper surface of the moving structure 40, the dust removal assembly 20, the moving structure 40 and the gas pressure assembly 60 are arranged in the installation frame.

[0059] A horizontal loading plate 58 for mounting is arranged in the middle of the installation frame, one end of the horizontal loading plate 58 is fixedly arranged at the middle of two adjacent vertical columns 12, the other end of the horizontal loading plate 58 away from the vertical column 12 is fixedly provided with a vertical plate 59 perpendicular thereto; one end of the vertical plate 59 away from the horizontal loading plate 58 is arranged on the upper frame body 13, the vertical plate 59 is connected to the middle of the upper frame body 13, and the horizontal loading plate 58 and the vertical plate 59 form an L-shaped fixed mounting structure.

[0060] Further, in one of the embodiments, the upper surface of the cross-loading plate 58 is provided with the battery 15, which provides power supply for all the power components. The moving structure 40 comprises a hanging rail 41 fixedly arranged under the cross-loading plate 58, which is arranged on the side of the cross-loading plate 58 close to the vertical plate 59 and parallel to the vertical plate 59. One end of the hanging rail 41 is provided with the first motor 42, and the hanging rail 41 is provided with the slidable hanging slide 43, which is in transmission connection with the first motor 42. The first motor 42 drives the hanging slide 43 to move back and forth on the hanging rail 41, and the first motor 42 drives the hanging slide 43 through the output wheel→belt transmission or the first motor 42 drives the hanging slide 43 through the screw→nut seat transmission. The driving connection mode of the first motor 42 and the hanging slide 43 is various and is prior art, and details are not described here.

[0061] Further, in one of the embodiments, the lower surface of the hanging slide 43 is provided with the air piece seat 46, which is in fixed connection with the hanging slide 43 and is arranged perpendicularly to the hanging rail 41. One end of the air piece seat 46 extends outside the cross-loading plate 58. The end of the air piece seat 46 away from the cross-loading plate 58 is provided with the bearing wheel 49, which is arranged on the support cross beam 14 arranged between two adjacent vertical columns 12. The air piece seat 46 is fixedly provided with the transmission slide rail 44 on the side away from the hanging slide 43, which is perpendicular to the hanging rail 41. One end of the transmission slide rail 44 is provided with the second motor 45, and the transmission slide rail 44 is provided with the slidable hanging slide 29, which is in transmission connection with the second motor 45. The end of the hanging slide 29 away from the transmission slide rail 44 is provided with the dust removal assembly 20. The second motor 45 drives the hanging slide 29 to move back and forth on the transmission slide rail 44, and the second motor 45 drives the hanging slide 29 through the output wheel→belt transmission or the second motor 45 drives the hanging slide 29 through the screw→nut seat transmission. The driving connection mode of the second motor 45 and the hanging slide 29 is various and is prior art, and details are not described here. The first motor 42 and the second motor 45 drive the dust removal assembly 20 to move longitudinally and transversely.

[0062] The air pressure assembly 60 is arranged adjacent to the vertical plate 59 on the side of the air piece seat 46 away from the vertical plate 59.

[0063] Further, in one of the embodiments, the air pressure assembly 60 comprises a pressure dividing chamber 61, in which a positive pressure barrel 62 (positive pressure cavity) and a negative pressure barrel 63 (negative pressure cavity) are arranged side by side, and the positive pressure barrel 62 and the negative pressure barrel 63 are arranged in staggered manner. A partition plate 75 is arranged between the positive pressure barrel 62 and the negative pressure barrel 63, and the positive pressure barrel 62 and the negative pressure barrel 63 are isolated from each other by the partition plate 75. A sinking step 74 is arranged between the negative pressure barrel 63 and the positive pressure barrel 62.

[0064] The positive pressure barrel 62 is provided with a positive pressure fan 79, and the negative pressure barrel 63 is provided with a negative pressure fan 78.

[0065] Further, in one of the embodiments, the negative pressure barrel 63 is provided with the first high-efficiency filter 56, and the first high-efficiency filter 56 is arranged above the negative pressure barrel 63. The positive pressure barrel 62 is provided with the second high-efficiency filter 57, and the second high-efficiency filter 57 is arranged above the positive pressure barrel 62.

[0066] Further, in one of the embodiments, the negative pressure barrel 63 is provided with the first high-efficiency filter 56, and the first high-efficiency filter 56 is arranged above the negative pressure barrel 63. The positive pressure barrel 62 is provided with the second high-efficiency filter 57, and the second high-efficiency filter 57 is arranged above the positive pressure barrel 62.

[0067] One side of the pressure dividing chamber 61 is provided with a slanted air guide wall 77, and the top of the positive pressure barrel 62 close to the slanted air guide wall 77 is provided with an outwardly protruding transmission overhang cavity 66. The positive pressure barrel 62 and the transmission overhang cavity 66 are connected through the air outlet 64. The top surface of the transmission overhang cavity 66 is provided with a positive pressure measuring port 65, and the bottom surface of the transmission overhang cavity 66 is provided with a downward positive pressure connector 67.

[0068] Further, in one of the embodiments, the top of the negative pressure barrel 63 close to the slanted air guide wall 77 is provided with an outwardly protruding suction overhang cavity 71. The negative pressure barrel 63 and the suction overhang cavity 71 are connected through the air suction port 69. The top surface of the suction overhang cavity 71 is provided with a negative pressure measuring port 72, and the bottom surface of the suction overhang cavity 71 is provided with a downward negative pressure connector 73. Further, the air suction port 69 is arranged between the sinking step 74 side wall of the negative pressure barrel 63 and the slanted air guide wall 77.

[0069] The transmission overhang cavity 66 and the suction overhang cavity 71 are arranged side by side, and a spacing isolation layer 76 is arranged between the transmission overhang cavity 66 and the suction overhang cavity 71, and the transmission overhang cavity 66 and the suction overhang cavity 71 are independent and not connected to each other through the spacing isolation layer 76.

[0070] The negative pressure connector 73 is connected in communication with the exhaust cylinder 28 of the dust removal assembly 20 through the air guide pipe 55, and the positive pressure connector 67 is connected in communication with the air inlet cylinder 27 of the dust removal assembly 20 through another air guide pipe 55.

[0071] The application sets a high platform (the transmission overhang cavity 66 and the suction overhang cavity 71) in front of the wind bucket (the pressure distribution bin 61), and the transmission overhang cavity 66 and the suction overhang cavity 71 are arranged on the top of the pressure distribution bin 61, so as to increase the height of the positive pressure connector 67 and the negative pressure connector 73 on the pressure distribution bin 61, prolong the distance between the positive pressure connector 67 and the air inlet cylinder 27 and the distance between the negative pressure connector 73 and the exhaust cylinder 28, facilitate the connection and arrangement of the soft air guide pipe 55, and avoid the air guide pipe 55 from colliding with the nearby plates and shafts, so as to ensure the smooth movement of the dust removal assembly 20.

[0072] The positive pressure measuring port 65 on the transmission overhang cavity 66 and the negative pressure measuring port 72 on the suction overhang cavity 71 are respectively provided with a pressure sensor 53; the drag chain 52 is arranged on the vertical plate 59 away from the pressure distribution bin 61. The working pressure of the positive pressure fan 79 is 5-12 KPa, and the working pressure of the negative pressure fan 78 is -1.5--6 KPa; the air volume ratio of the positive pressure fan 79 to the negative pressure fan 78 is 1:1.5-3. The air inlet cylinder 27 and the exhaust cylinder 28 enter the dust removal assembly 20, and the dust is better blocked in the cleaning space inside the periphery of the dust removal head (the dust removal assembly 20), so as to form a wind curtain to block the entire dust removal working space.

[0073] The drag chain 52 is used for wiring, and the cable can be protected when the fan moves.

[0074] The pressure sensor 53 is used for detecting the pressure, and detecting the pressure value of the port of the positive pressure connector 67 and the negative pressure connector 73.

[0075] The dust removal assembly 20 comprises a dust removal head cavity 21, and the dust removal head cavity 21 is also a pressure distribution bin; the bottom plate 37 is arranged at the bottom of the dust removal head cavity 21, and the dust removal head cavity 21 and the bottom plate 37 are integrally formed; and the frame body sealing cover 26 is arranged at the top end of the dust removal head cavity 21.

[0076] Further, in one of the embodiments, the top of the dust removal head cavity 21 is provided with an opening, and the opening at the top end of the dust removal head cavity 21 is provided with a frame sealing cover 26, that is, the frame sealing cover 26 is the sealing cover plate of the dust removal head cavity 21. The middle part in the dust removal head cavity 21 is provided with a positive pressure cavity 23 extending upward from the bottom plate 37, and the top end of the positive pressure cavity 23 is provided with a separation distance from the top end of the dust removal head cavity 21, that is, the top end of the positive pressure cavity 23 away from the bottom plate 37 and the frame sealing cover 26 are provided with a distance apart from each other; further, the height ratio of the positive pressure cavity 23 to the height of the dust removal head cavity 21 is 2 / 3~3 / 4:1.

[0077] Further, in one of the embodiments, the end of the positive pressure cavity 23 away from the bottom plate 37 is provided with a positive pressure sealing cover 25 (positive pressure cavity cover plate), and the positive pressure sealing cover 25 is provided with an air inlet cylinder 27 extending upward and penetrating the frame sealing cover 26, and the end of the air inlet cylinder 27 away from the positive pressure cavity 23 extends above the frame sealing cover 26, and the air inlet cylinder 27 is connected with the positive pressure cavity 23.

[0078] The two sides of the positive pressure cavity 23 are respectively provided with a negative pressure cavity 22, and the two negative pressure cavities 22 are arranged in the dust removal head cavity 21; the frame sealing cover 26 is provided with an air outlet cylinder 28, and the air outlet cylinder 28 is connected with the negative pressure cavity 22. The positive pressure cavity 23 and the negative pressure cavity 22 are arranged in the dust removal head cavity 21, and the positive pressure cavity 23 and the negative pressure cavity 22 are isolated from each other and do not penetrate each other.

[0079] The frame sealing cover 26 is provided with a hanging sliding seat 29, and the end of the hanging sliding seat 29 away from the frame sealing cover 26 is arranged on the moving structure 40.

[0080] Further, in one of the embodiments, the bottom surface of the positive pressure cavity 23 is provided with a first dust blowing slot 31 penetrating transversely, and the two ends of the first dust blowing slot 31 are provided with matching and symmetrical second dust blowing slots 34, and the second dust blowing slots 34 (side dust blowing slots) are arranged vertically with the first dust blowing slot 31 (middle dust blowing slot), and the first dust blowing slot 31 and the second dust blowing slot 34 penetratingly arranged on the bottom plate of the positive pressure cavity 23. That is, the first dust blowing slot 31 and the second dust blowing slot 34 penetratingly arranged on the bottom plate 37, and the second dust blowing slot 34 is arranged adjacent to the inner wall of the short side of the positive pressure cavity 23.

[0081] Further, in one of the embodiments, the bottom surface of the positive pressure cavity 23 is provided with two matching and symmetrical variable cross-section rods 24, and the variable cross-section rods 24 are arranged parallel to the first dust blowing slot 31, and the two variable cross-section rods 24 are arranged on the two sides of the first dust blowing slot 31.

[0082] The bottom surface of the negative pressure cavity 22 is provided with a first suction slot 32 and a second suction slot 33 which are transversely through, and the first suction slot 32 and the second suction slot 33 are arranged in parallel with the first dust blowing slot 31; the first suction slot 32 (inner side suction slot) is arranged close to the first dust blowing slot 31, the second suction slot 33 (outer side suction slot) is arranged away from the first dust blowing slot 31, and a separation interval is arranged between the first suction slot 32 and the second suction slot 33. Further, the first suction slot 32 and the second suction slot 33 are arranged through the bottom plate of the negative pressure cavity 22, that is, the first suction slot 32 and the second suction slot 33 are arranged through the bottom plate 37. A separation interval is arranged between the first dust blowing slot 31 and the first suction slot 32.

[0083] Referring to FIG. 1, Figure 13 FIG. 2 shows a dust removal head cavity 21, Figure 13 FIG. 3 shows a dust removal head cavity 21, Figure 12 In the specific structure of A and B parts in FIG. 4, the outer wall of the short side of the positive pressure cavity 23 is provided with a third suction slot 35 which is through the dust removal head cavity 21, the third suction slot 35 is arranged between the outer wall of the short side of the positive pressure cavity 23 and the inner wall of the dust removal head cavity 21, and the third suction slot 35 is arranged in parallel and adjacent to the second dust blowing slot 34; further, the third suction slot 35 (side edge suction slot) extends downward and is through the bottom plate 37, and the third suction slot 35 is connected with the negative pressure cavity 22.

[0084] Further, in one of the embodiments, the ratio of the width of the first dust blowing slot 31: the width of the first suction slot 32: the width of the second suction slot 33 is 1:4~5:4~5;

[0085] The ratio of the width of the second dust blowing slot 34: the width of the third suction slot 35 is 1:4~5;

[0086] The width of the first dust blowing slot 31 is consistent with the width of the second dust blowing slot 34, and the first suction slot 32, the second suction slot 33 and the third suction slot 35 are of equal width.

[0087] Further, in one of the embodiments, the ratio of the air volume of the first dust blowing slot 31: the air volume of the first suction slot 32: the air volume of the second suction slot 33 is 1:1.5~3:1.5~3;

[0088] The ratio of the air volume of the second dust blowing slot 34: the air volume of the third suction slot 35 is 1:1.5~3;

[0089] The air pressure of the first dust blowing slot 31 is consistent with the air pressure of the second dust blowing slot 34, and the first suction slot 32, the second suction slot 33 and the third suction slot 35 are of equal pressure.

[0090] The above-described embodiments only express several implementation manners of the utility model, the description is more specific and detailed, but can not therefore be understood as the limitation of the utility model patent range. It should be pointed out that for ordinary skilled person in the art, without departing from the utility model concept, several deformations and improvements can be made, which belong to the protection range of the utility model. Therefore, the protection range of the utility model patent should be subject to the appended claims.

Claims

1. A cleaning apparatus for semiconductor production, comprising: The bottom frame (11) is provided with an upwardly extending vertical column (12) at four corners thereof, and an upper frame body (13) is arranged at the end of the vertical column (12) away from the bottom frame (11), so as to form an installation frame together with the bottom frame (11) and the vertical column (12); characterized in that three inwardly extending support short arms (16) are arranged on the bottom frame (11), and a downwardly directed positioning groove (17) is formed at the inwardly suspended end of the support short arm (16); A dust removal assembly (20) is arranged in the installation frame, and a moving structure (40) is arranged on the upper surface of the dust removal assembly (20), and a gas pressure assembly (60) is arranged on the upper surface of the moving structure (40), so as to be arranged in the installation frame; The dust removal assembly (20) comprises a dust removal head cavity (21), and a bottom plate (37) is arranged at the bottom of the dust removal head cavity (21), and a frame body sealing cover (26) is arranged at the top end of the dust removal head cavity (21); A positive pressure cavity (23) extending upwardly from the bottom plate (37) is arranged in the middle of the dust removal head cavity (21), and a separation distance is arranged between the top end of the positive pressure cavity (23) and the top end of the dust removal head cavity (21); Negative pressure cavities (22) are arranged at both sides of the positive pressure cavity (23), and the negative pressure cavities (22) are arranged in the dust removal head cavity (21) and are connected in a through manner; A horizontal loading plate (58) for mounting is arranged in the middle of the installation frame, one end of the horizontal loading plate (58) is fixedly arranged at the middle of two adjacent vertical columns (12), the other end of the horizontal loading plate (58) away from the vertical column (12) is fixedly provided with a vertical plate (59) perpendicular thereto, and the moving structure (40) is arranged on the horizontal loading plate (58); The moving structure (40) comprises a gas component seat (46), and the gas pressure assembly (60) is arranged on the gas component seat (46); the gas pressure assembly (60) comprises a pressure distribution bin (61), and a positive pressure barrel (62) and a negative pressure barrel (63) are arranged side by side in the pressure distribution bin (61), a positive pressure fan (79) is arranged in the positive pressure barrel (62), and a negative pressure fan (78) is arranged in the negative pressure barrel (63).

2. The cleaning device for semiconductor production according to claim 1, wherein An inclined air guide wall (77) is arranged on one side of the pressure distribution bin (61), an outwardly protruding transmission overhanging cavity (66) is arranged at the top of the side of the positive pressure barrel (62) close to the inclined air guide wall (77), and the positive pressure barrel (62) and the transmission overhanging cavity (66) are connected in a through manner through an air outlet (64); An outwardly protruding suction overhanging cavity (71) is arranged at the top end of the side of the negative pressure barrel (63) close to the inclined air guide wall (77), and the negative pressure barrel (63) and the suction overhanging cavity (71) are connected in a through manner through a suction air outlet (69); A positive pressure measuring port (65) is formed in the top surface of the transmission overhanging cavity (66), and a downwardly directed positive pressure connector (67) is arranged on the bottom surface of the transmission overhanging cavity (66); A negative pressure measuring port (72) is formed in the top surface of the suction overhanging cavity (71), and a downwardly directed negative pressure connector (73) is arranged on the bottom surface of the suction overhanging cavity (71). The transmission overhang cavity (66) is arranged adjacent to the suction overhang cavity (71) side by side, and a spacing isolation layer (76) is arranged between the transmission overhang cavity (66) and the suction overhang cavity (71), and the transmission overhang cavity (66) and the suction overhang cavity (71) are independent and not communicated with each other through the spacing isolation layer (76).

3. The cleaning device for semiconductor production according to claim 1, wherein The positive pressure cavity (23) is provided with a positive pressure sealing cover (25) at one end away from the bottom plate (37); the positive pressure sealing cover (25) is provided with an air inlet cylinder (27) extending upward and penetrating through the frame sealing cover (26), and the air inlet cylinder (27) extends out of the frame sealing cover (26) at one end away from the positive pressure cavity (23); the air inlet cylinder (27) is connected with the positive pressure cavity (23) in penetration; The frame sealing cover (26) is provided with an air outlet cylinder (28) connected with the negative pressure cavity (22) in penetration; The positive pressure cavity (23) and the two negative pressure cavities (22) are arranged in the dust removal head cavity (21), and the positive pressure cavity (23) and the negative pressure cavities (22) are isolated and not penetrated with each other.

4. The cleaning device for semiconductor production according to claim 1, wherein The bottom surface of the positive pressure cavity (23) is provided with a first dust blowing slot (31) penetrating in the transverse direction, and the two ends of the first dust blowing slot (31) are provided with matching and symmetrical second dust blowing slots (34), and the second dust blowing slots (34) are arranged perpendicularly to the first dust blowing slot (31); the first dust blowing slot (31) and the second dust blowing slot (34) penetrating are arranged on the bottom plate of the positive pressure cavity (23); The bottom surface of the negative pressure cavity (22) is provided with a first suction slot (32) and a second suction slot (33) penetrating in the transverse direction, and the first suction slot (32) and the second suction slot (33) are arranged parallel to the first dust blowing slot (31); the first suction slot (32) is arranged close to the first dust blowing slot (31), and the second suction slot (33) is arranged away from the first dust blowing slot (31); and a spacing distance is arranged between the first suction slot (32) and the second suction slot (33); The first suction slot (32) and the second suction slot (33) penetrating are arranged on the bottom plate of the negative pressure cavity (22), and the first suction slot (32) and the second suction slot (33) penetrating are arranged on the bottom plate (37); The first dust blowing slot (31) and the first suction slot (32) are arranged with a spacing.

5. The cleaning device for semiconductor production according to claim 1, wherein The positive pressure barrel (62) and the negative pressure barrel (63) are provided with an isolation partition plate (75) therebetween, and the positive pressure barrel (62) and the negative pressure barrel (63) are isolated and not communicated with each other through the partition plate (75); The negative pressure connector (73) is connected with the air outlet cylinder (28) of the dust removal assembly (20) through a gas guide pipe (55), and the positive pressure connector (67) is connected with the air inlet cylinder (27) of the dust removal assembly (20) through another gas guide pipe (55).

6. The cleaning device for semiconductor production according to claim 4, wherein The first dust blowing slot (31) and the second dust blowing slot (34) penetrating are arranged on the bottom plate (37), and the second dust blowing slot (34) is arranged close to the inner wall of the short side of the positive pressure cavity (23) on both sides; The top of the dust removal head cavity (21) is provided with an opening, and the frame sealing cover (26) is arranged at the opening at the top end of the dust removal head cavity (21); the dust removal head cavity (21) and the bottom plate (37) are integrally formed, and a spacing distance is arranged between the top end of the positive pressure cavity (23) away from the bottom plate (37) and the frame sealing cover (26); The bottom surface of the positive pressure cavity (23) is provided with two matched symmetrical variable cross-section rods (24), the variable cross-section rods (24) are arranged in parallel with the first dust blowing seam (31), and the two variable cross-section rods (24) are arranged on the two sides of the first dust blowing seam (31) respectively; The outer wall of the short side of the positive pressure cavity (23) is provided with a third suction seam (35) penetrating the dust removal head cavity (21), the third suction seam (35) is arranged between the outer wall of the short side of the positive pressure cavity (23) and the inner wall of the dust removal head cavity (21), and the third suction seam (35) is arranged in parallel and adjacent to the second dust blowing seam (34); The third suction seam (35) extends downward and penetrates the bottom plate (37), and the third suction seam (35) is connected with the negative pressure cavity (22) in a penetrating manner.

7. The cleaning device for semiconductor production according to Claim 1, wherein The moving structure (40) comprises a mounting rail (41), the mounting rail (41) is fixedly arranged below the transverse loading plate (58), one end of the mounting rail (41) is provided with a first motor (42), and the mounting rail (41) is provided with a slidable mounting sliding seat (43), and the first motor (42) is in transmission connection with the mounting sliding seat (43); The lower surface of the mounting sliding seat (43) is provided with an air piece seat (46), the air piece seat (46) is fixedly connected with the mounting sliding seat (43), the air piece seat (46) is arranged perpendicularly to the mounting rail (41), and one end of the air piece seat (46) extends to the outer side of the transverse loading plate (58); one end of the air piece seat (46) away from the transverse loading plate (58) is provided with a bearing wheel (49), and the bearing wheel (49) is arranged on the supporting cross beam (14), and the supporting cross beam (14) is arranged between the two adjacent vertical columns (12).

8. The cleaning device for semiconductor production according to claim 7, wherein One side of the air piece seat (46) away from the mounting sliding seat (43) is fixedly provided with a transmission sliding rail (44), and the transmission sliding rail (44) is perpendicular to the mounting rail (41); one end of the transmission sliding rail (44) is provided with a second motor (45), and the transmission sliding rail (44) is provided with a slidable hanging sliding seat (29), and the hanging sliding seat (29) is in transmission connection with the second motor (45); one end of the hanging sliding seat (29) away from the transmission sliding rail (44) is provided with a dust removal assembly (20).

9. The cleaning device for semiconductor production according to Claim 1, wherein One end of the vertical plate (59) away from the transverse loading plate (58) is arranged on the upper frame body (13), the upper surface of the transverse loading plate (58) is provided with a battery (15), and the transverse loading plate (58) and the vertical plate (59) form an L-shaped fixed hanging piece structure; One side of the air piece seat (46) away from the vertical plate (59) is provided with an air pressure assembly (60), and the air pressure assembly (60) is arranged adjacent to the vertical plate (59).

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