Cleaning device of TRAY for CVD

Abstract

The utility model discloses a TRAY cleaning device for CVD (chemical vapor deposition), which is provided with a complete machine support used for connecting all modules of a complete machine; the feeding module serves as a feeding device in the TRAY cleaning process; the chemical liquid module is connected with the feeding module through the whole machine support; the pure water module is connected with the chemical liquid module through the complete machine bracket; the drying module is connected with the pure water module through the whole machine bracket; the discharging module serves as a discharging device in the TRAY cleaning process and is connected with the drying module through a whole machine support. The conveying device is arranged in front of the feeding module, the chemical liquid cleaning module, the pure water cleaning module, the drying module and the discharging module and used for conveying the TRAY cleaning support among the modules in the TRAY cleaning process. And the TRAY cleaning bracket is used for placing a plurality of TRAYs to be cleaned. According to the TRAY cleaning device, automatic soaking, cleaning, drying and the like of TRAY for CVD can be achieved, and compared with a traditional manual cleaning mode, the working efficiency and the stability of the cleaning process are improved, and the safety of the operation process is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of TRAY's cleaning device for CVD, belong to wafer processing technical field. BACKGROUND

[0002] In wafer processing field, TRAY refers to the tray that carries wafer to run, ensure the stable transmission and accurate positioning of wafer.In the chemical vapor deposition (CVD) process of wafer processing process, TRAY needs to be used to carry wafer into equipment interior to carry out vapor deposition process.During this period, TRAY surface also grows a layer of silicon dioxide film due to vapor deposition, long-term use can affect the process parameters of wafer, and the deposited silicon dioxide film on TRAY needs to be cleaned regularly.The traditional cleaning method is to manually put TRAY into chemical liquid tank for soaking, take out from chemical liquid tank after soaking for a certain time, then put into pure water tank for soaking, finally use air gun to blow dry water spot on TRAY surface and put into oven for baking and drying.TRAY is mostly made of silicon carbide material, and the corrosion of chemical liquid to TRAY itself is larger after exceeding a certain soaking time, causing irreversible loss.Meanwhile, under the condition that TRAY cannot be completely dried, it is easy to cause TRAY to break when entering CVD equipment for processing.The above cleaning process is completed by manual operation at present, and it is difficult to accurately control the time of cleaning process and drying time.TRAY is relatively expensive, and the economic loss caused by TRAY damage due to improper manual operation is large, and TRAY also has a certain weight, so manual handling and cleaning are time-consuming and laborious. SUMMARY

[0003] Based on the problems existing in the prior art, the purpose of the utility model is to provide a kind of TRAY's cleaning device for CVD, can automatically control cleaning time, chemical liquid concentration, drying time and temperature and other process parameters, to solve the problem that TRAY used in current wafer processing process CVD process is cleaned time-consuming and laborious and poor stability and safety.

[0004] To achieve the above purpose, the utility model adopts the following technical solutions.

[0005] A kind of TRAY's cleaning device for CVD, the device has:

[0006] Whole machine support, for the connection of each module of whole machine, fixed adjacent two modules to form a whole;

[0007] Feeding module, as the feeding device of TRAY cleaning process;

[0008] Chemical liquid module, connected with feeding module by whole machine support;

[0009] Pure water module, connected with chemical liquid module by whole machine support;

[0010] The drying module is connected with the pure water module through the whole machine support;

[0011] The unloading module is connected with the drying module through the whole machine support as a unloading device in the TRAY cleaning process.

[0012] The conveying device is arranged in the front of the feeding module, the chemical liquid cleaning module, the pure water cleaning module, the drying module and the unloading module, and is used for conveying the TRAY cleaning support between the modules in the TRAY cleaning process.

[0013] The TRAY cleaning support is used for placing a plurality of TRAYs to be cleaned.

[0014] Further, the feeding module, the chemical liquid cleaning module, the pure water cleaning module, the drying module and the unloading module are respectively supported by external frames, and the frames are covered and sealed by chemical corrosion resistant cover plates.

[0015] Preferably, the feeding module, the chemical liquid cleaning module, the pure water cleaning module, the drying module and the unloading module are respectively provided with high efficiency filters (FFU) for introducing clean gas into the module; and the rear cover plate is provided with an exhaust port.

[0016] Further, the feeding module and the unloading module are respectively provided with TRAY cleaning support positioning blocks for accurate positioning when the conveying device grabs the TRAY cleaning support.

[0017] Further, the chemical liquid module is provided with a chemical liquid inner tank and an outer tank larger than the inner tank for preventing splashing and leakage, and the inner tank and the outer tank are both provided with a liquid discharge pipe.

[0018] Further, the pure water module is provided with a pure water inner tank and an outer tank larger than the inner tank for preventing splashing and leakage, and the inner tank and the outer tank are both provided with a liquid discharge pipe.

[0019] Further, the drying module is provided with a drying tank, clean gas nozzles for air drying in the drying tank, and a heating lamp for drying.

[0020] Further, the conveying device is provided with a mechanical arm, which conveys the TRAY support between the modules by grabbing the TRAY support and moving left and right.

[0021] Preferably, a track is arranged in the front of each module, and the mechanical arm grabbing the TRAY support can move left and right along the track, and the mechanical arm can move up and down to realize the grabbing and dropping actions of the TRAY support.

[0022] Preferably, the TRAY cleaning support is provided with a handle matched with the mechanical arm of the conveying device; the TRAY cleaning support is internally provided with a plurality of clamping grooves for placing TRAYs.

[0023] The present application has the advantages that:

[0024] The present application provides a cleaning device capable of realizing automatic soaking, cleaning and drying of TRAYs for CVD, which improves work efficiency and stability of the cleaning process compared with the traditional manual cleaning method, and also improves the safety of the operation process. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a front view state structure schematic diagram of the TRAY cleaning device for CVD.

[0026] Figure 2 is a side view state structure schematic diagram of the TRAY cleaning device for CVD.

[0027] Figure 3 is a top view state structure schematic diagram of the TRAY cleaning device for CVD.

[0028] Figure 4 is a whole structure schematic diagram of the TRAY cleaning device for CVD.

[0029] Figure 5 is a whole machine working schematic diagram of the TRAY cleaning device for CVD.

[0030] REFERENCE NUMERALS

[0031] 1 - feeding module, 2 - chemical liquid module, 3 - pure water module, 4 - drying module, 5 - discharging module, 6 - conveying device, 7 - whole machine support, 8 - TRAY cleaning support, 9 - external guard plate, 10 - transparent guard plate, 101 - feeding module air outlet, 201 - chemical liquid module air outlet, 301 - pure water module air outlet, 401 - drying module air outlet, 501 - discharging module air outlet, 601 - conveying device track, 801 - TRAY cleaning support handle, 102 - feeding module FFU, 202 - chemical liquid module FFU, 302 - pure water module FFU, 402 - drying module FFU, 502 - discharging module FFU, 602 - conveying device gripper, 103 - feeding module positioning block, 203 - chemical liquid module positioning block, 303 - pure water module positioning block, 403 - drying module positioning block, 503 - discharging module positioning block, 603 - conveying device gripper air cylinder, 404 - heating lamp tube, 405 - gas nozzle. DETAILED DESCRIPTION

[0032] The utility model will be further described in detail below in combination with the drawings, and it should be particularly pointed out that the utility model content described below is only as an individual embodiment of the utility model, and is not particularly limited to the utility model. In addition, it should be emphasized that, in order to facilitate the description of the utility model, only part of the utility model is listed in the drawings, and the part expanded also includes in the utility model.

[0033] As shown in Figures 1-4 The cleaning device of the TRAY for CVD at least has a feeding module 1, a chemical liquid module 2, a pure water module 3, a drying module 4, a discharging module 5, a conveying device 6 and a whole machine support 7. The feeding module 1, the chemical liquid module 2, the pure water module 3, the drying module 4 and the discharging module 5 are connected by the whole machine support 7 to form a whole. The conveying device 6 is arranged at the front of the feeding module 1, the chemical liquid cleaning module 2, the pure water cleaning module 3, the drying module 4 and the discharging module 5, is supported in the machine table through the conveying device track 601 arranged at the front of each module, and moves left and right at the front of each module along the conveying device track 601, and is used for conveying the TRAY cleaning support 8 between the modules in the TRAY cleaning process. The TRAY cleaning support 8 is used for placing a plurality of TRAYs to be cleaned, so as to facilitate the conveying of the TRAY between the modules by the conveying device 6.

[0034] The feeding module 1 is located at the first module of the whole machine, is used as a feeding device in the TRAY cleaning process, and is connected with the chemical liquid module 2 through the whole machine support 7. The feeding module 1 is provided with a feeding module fan filter unit (FFU) 102, and clean gas is blown into the module. As shown in Figure 3 The rear cover plate of the feeding module 1 is provided with a feeding module exhaust port 101, and harmful gas volatilized in the module is discharged through the feeding module exhaust port 101; two groups of TRAY cleaning support 8 positioning blocks 103 are arranged on the feeding module 1, which are used for placing the TRAY cleaning support 8 by the operator, and provide accurate positioning for the conveying device 6 to grab the TRAY cleaning support 8.

[0035] The chemical liquid module 2 is located at the second module of the whole machine, is used for chemical liquid cleaning process in the TRAY cleaning process, and is connected with the feeding module 1 and the pure water module 3 through the whole machine support 7. The chemical liquid module 2 is provided with a chemical liquid inner tank and an outer tank larger than the inner tank for preventing spatter and leakage of the inner tank, and the inner tank and the outer tank are provided with a liquid discharge pipe. The chemical liquid module 2 is provided with a chemical liquid module FFU 202, and clean gas is blown into the module; as shown in Figure 3As shown, the rear cover plate of the chemical liquid module 2 is provided with a chemical liquid module exhaust port 201 for exhausting harmful gases volatilized in the module; a TRAY cleaning support 8 positioning block 203 is arranged thereon to place the TRAY cleaning support 8 by the conveying device 6 and provide accurate positioning for the conveying device 6 to grab the TRAY cleaning support 8.

[0036] The pure water module 3 is the third module of the whole machine, used for the pure water cleaning process in the TRAY cleaning process, and connected with the chemical liquid module and the drying module through the machine support. The pure water module 3 is provided with a pure water inner tank and an outer tank slightly larger than the inner tank for preventing splashing and leakage of the inner tank. The inner tank and the outer tank are both provided with a liquid discharge pipe. The pure water liquid module 3 is provided with a pure water liquid module FFU 302 for blowing clean gas into the module. Figure 3 As shown, the rear cover plate of the pure water liquid module 3 is provided with a pure water liquid module exhaust port 301 for exhausting harmful gases volatilized in the module; a TRAY cleaning support 8 positioning block 303 is arranged thereon to place the TRAY cleaning support 8 by the conveying device 6 and provide accurate positioning for the conveying device 6 to grab the TRAY cleaning support 8.

[0037] The drying module 4 is the fourth module of the whole machine, used for the drying process in the TRAY cleaning process, and connected with the pure water module and the feeding module through the machine support. The drying module 4 is provided with a drying tank, clean gas nozzles in the drying tank for air drying, and heating lamp tubes for drying. The drying liquid module 4 is provided with a drying liquid module FFU 402 for blowing clean gas into the module. Figure 3 As shown, the rear cover plate of the drying liquid module 4 is provided with a drying liquid module exhaust port 401 for exhausting harmful gases volatilized in the module; a TRAY cleaning support 8 positioning block 403 is arranged thereon to place the TRAY cleaning support 8 by the conveying device 6 and provide accurate positioning for the conveying device 6 to grab the TRAY cleaning support 8.

[0038] The feeding module 5 is the fifth module of the whole machine, which is a feeding device for the TRAY cleaning process, and is connected with the drying module through the machine support. The feeding module 5 is provided with a feeding module FFU 502 for blowing clean gas into the module. Figure 3 As shown, the rear cover plate of the feeding module 5 is provided with a feeding module exhaust port 501 for exhausting harmful gases volatilized in the module; two groups of TRAY cleaning support 8 positioning blocks 503 are arranged thereon to place the TRAY cleaning support 8 by the conveying device 6 and facilitate the operator to take away the TRAY cleaning support 8.

[0039] As shown, Figure 5As shown, the whole machine is covered by the external protective plate 9, which isolates the internal environment of the machine from the external environment. In addition, the front and upper part of each module is provided with a transparent protective plate 10, which can directly observe the working condition of the internal environment of the machine.

[0040] When working, the operator places the TRAY cleaning support 8 provided with the TRAY at the positioning block 103 of the feeding module 1, and two groups of TRAYs to be washed can be placed at the same time. After receiving the start operation instruction, the conveying device 6 moves along the conveying device track 601 to the feeding module 1. The conveying device 6 is lowered to a position slightly lower than the handle of the TRAY cleaning support 8. The conveying device gripper cylinder 603 pushes the conveying device gripper 602 to move forward and backward to a position where the handle of the TRAY cleaning support 8 can be gripped. The conveying device 6 is raised to a position where it can move left and right and moves above the chemical liquid module 2. The conveying device 6 is lowered and placed between the positioning blocks 203 of the chemical liquid module 2, and continues to be lowered to a position slightly lower than the handle of the TRAY cleaning support 8. The conveying device gripper cylinder 603 pushes the conveying device gripper 602 to move forward and backward to a position where the handle of the TRAY cleaning support 8 can be released. The conveying device 6 is raised to a position where it can move left and right and waits for the TRAY chemical liquid cleaning time to be completed. During this period, the chemical liquid module completes the stripping of the silicon dioxide film on the surface of the TRAY.

[0041] After receiving the chemical liquid cleaning completion instruction, the conveying device 6 moves along the conveying device track 601 to the chemical liquid module 2. The conveying device 6 is lowered to a position slightly lower than the handle of the TRAY cleaning support 8. The conveying device gripper cylinder 603 pushes the conveying device gripper 602 to move forward and backward to a position where the handle of the TRAY cleaning support 8 can be gripped. The conveying device 6 is raised to a position where it can move left and right and moves above the pure water module 3. The conveying device 6 is lowered and placed between the positioning blocks 303 of the pure water module 3, and continues to be lowered to a position slightly lower than the handle of the TRAY cleaning support 8. The conveying device gripper cylinder 603 pushes the conveying device gripper 602 to move forward and backward to a position where the handle of the TRAY cleaning support 8 can be released. The conveying device 6 is raised to a position where it can move left and right and waits for the TRAY pure water cleaning time to be completed. During this period, the pure water module completes the cleaning of the residual chemical liquid on the surface of the TRAY.

[0042] After receiving the pure water cleaning completion instruction, the conveying device 6 moves along the conveying device track 601 to the upper pure water module 3. The conveying device 6 is lowered to a position slightly lower than the handle of the TRAY cleaning support 8, the conveying device gripper cylinder 603 pushes the conveying device gripper 602 to move forward and backward to a position where the TRAY cleaning support handle 801 can be gripped, the conveying device 6 is gripped and raised to a position where it can move left and right and is moved above the drying module 4. The conveying device 6 is lowered and placed between the positioning blocks 403 of the drying module 4, and continues to be lowered to a position slightly lower than the handle of the TRAY cleaning support 8, the conveying device gripper cylinder 603 pushes the conveying device gripper 602 to move forward and backward to a position where the TRAY cleaning support handle 801 can be released, the conveying device 6 is raised to a position where it can move left and right and waits for the TRAY drying time to be completed. During this period, the gas nozzles 405 arranged on the front and rear sides of the drying module 4 spray clean gas at high speed, and after a certain period of time, the water on the surface of the TRAY is blown dry, and then the heating lamp tubes 404 arranged on the left and right sides of the drying module 4 heat the temperature in the tank to the set temperature, and continue to dry the residual moisture on the surface of the TRAY until the TRAY is completely dried.

[0043] After receiving the drying completion instruction, the conveying device 6 moves along the conveying device track 601 to above the drying module 4. The conveying device 6 is lowered to a position slightly lower than the handle of the TRAY cleaning support 8, the conveying device gripper cylinder 603 pushes the conveying device gripper 602 to move forward and backward to a position where the TRAY cleaning support handle 801 can be gripped, the conveying device 6 is gripped and raised to a position where it can move left and right and is moved above the unloading module 5. The conveying device 6 is lowered and placed between the positioning blocks 503 of the unloading module, and continues to be lowered to a position slightly lower than the handle of the TRAY cleaning support 8, the conveying device gripper cylinder 603 pushes the conveying device gripper 602 to move forward and backward to a position where the TRAY cleaning support handle 801 can be released, the conveying device 6 is raised to a position where it can move left and right, and the TRAY cleaning support loaded with the TRAY is taken away by the operator, completing the entire cleaning process.

[0044] In addition, it should be particularly pointed out that the user can increase, decrease or adjust the order between the modules according to different process requirements; in addition, after the conveying device 6 places the TRAY cleaning support 8 from the chemical liquid module 2 on the pure water module, it can again grip the TRAY cleaning support 8 loaded with the TRAY from the feeding module 1 and place it on the chemical liquid module for cleaning, and so on, to realize continuous cleaning operation.

[0045] The utility model discloses a TRAY for CVD's automation soaking, cleaning, drying etc. process has been realized, has improved the working efficiency of cleaning greatly, has also saved a large amount of manpower, material resources. Meanwhile the utility model has improved the stability of cleaning process compared with traditional manual cleaning mode, avoided the economic loss of improper manual operation, and the safety of manual operation process has also been improved in the automatic cleaning mode.

Claims

1. A cleaning apparatus for a CVD tourer, characterized in that, The device has: The whole machine support is used for connecting various modules of the whole machine, fixing two adjacent modules to form a whole; The feeding module is used as a feeding device for the TRAY cleaning process; The chemical liquid module is connected with the feeding module through the whole machine support; The pure water module is connected with the chemical liquid module through the whole machine support; The drying module is connected with the pure water module through the whole machine support; The discharging module is used as a discharging device for the TRAY cleaning process and is connected with the drying module through the whole machine support; The conveying device is arranged in the front part of the feeding module, the chemical liquid cleaning module, the pure water cleaning module, the drying module and the discharging module and is used for conveying the TRAY cleaning support between the modules during the TRAY cleaning process; The TRAY cleaning support is used for placing a plurality of TRAYs to be cleaned.

2. The cleaning apparatus for a TRAY for CVD according to claim 1, wherein The feeding module, the chemical liquid cleaning module, the pure water cleaning module, the drying module and the discharging module are respectively supported by external frames, the frames are covered and sealed by chemical corrosion-resistant cover plates.

3. The cleaning apparatus for a TRAY for CVD according to claim 2, wherein The feeding module, the chemical liquid cleaning module, the pure water cleaning module, the drying module and the discharging module are respectively provided with high-efficiency filters at the top parts for introducing clean gas into the modules; the rear cover plates are provided with exhaust openings.

4. The cleaning apparatus for a TRAY for CVD according to claim 1, wherein The feeding module and the discharging module are respectively provided with TRAY cleaning support positioning blocks for accurate positioning when the conveying device grabs the TRAY cleaning support.

5. The cleaning apparatus for a TRAY for CVD according to claim 1, wherein The chemical liquid module is provided with a chemical liquid inner tank and an outer tank larger than the inner tank for preventing spatter and leakage, and the inner tank and the outer tank are both provided with liquid discharge pipes.

6. The cleaning apparatus for a TRAY for CVD according to claim 1, wherein The pure water module is provided with a pure water inner tank and an outer tank larger than the inner tank for preventing spatter and leakage, and the inner tank and the outer tank are both provided with liquid discharge pipes.

7. The cleaning apparatus for a TRAY for CVD according to claim 1, wherein The drying module is provided with a drying tank, clean gas nozzles for air drying in the drying tank, and heating lamp tubes for drying.

8. The cleaning apparatus for a TRAY for CVD according to claim 1, wherein The conveying device is provided with a mechanical arm for conveying the TRAY support between the modules by grabbing the TRAY support and moving left and right.

9. The cleaning apparatus for a TRAY for CVD according to claim 8, wherein Tracks are arranged in the front parts of the modules, the mechanical arm for grabbing the TRAY support can move left and right along the tracks, the mechanical arm can move up and down to realize the grabbing and placing actions of the TRAY support.

10. The cleaning apparatus for a TRAY for CVD according to claim 8, wherein The TRAY cleaning support is provided with a handle matched with the mechanical arm of the conveying device; the TRAY cleaning support is internally provided with a plurality of clamping grooves for placing TRAYs.

Images