Sectional type heating device and ALD process furnace

Abstract

The utility model relates to the technical field of heating devices, in particular to a sectional type heating device and an ALD (atomic layer deposition) process furnace, which comprise a square shell, a partition plate, a main heating component and a main thermal insulation layer, the square shell comprises two opposite first outer walls and two opposite second outer walls, and the partition plate, the main heating assembly and the main heat preservation layer are at least arranged to be a group located outside one first outer wall. The main heating assemblies are detachably connected to the heating sections in a one-to-one correspondence mode, the main heating assemblies can be installed in or pulled out of the heating sections in the width direction of the square shell, and the heating device has the beneficial effects that a hardware foundation is provided for flexible regulation and control of the heating device through the segmented heating scheme, and the use flexibility of the heating device is ensured. Due to the fact that the main heating assembly is arranged outside the square shell and can be installed in or pulled out of the heating section in the width direction of the square shell, the maintenance convenience of the main heating assembly is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of heating device especially relates to a sectional heating device and ALD process furnace. BACKGROUND

[0002] ALD process furnace is a kind of equipment based on atomic layer deposition (Atomic Layer Deposition, for short ALD) technology, and the technical principle of ALD process furnace is to pass different precursors into reactor in the form of pulse alternately, and chemical adsorption and reaction occur on substrate, forming the required thin film material. Inert gas is passed after each precursor pulse to ensure complete reaction and avoid gas-phase reaction between precursors. This layer-by-layer deposition method can ensure the uniformity and consistency of the thin film.

[0003] ALD process furnace includes vacuum tube heating cavity, in the prior art, usually adopt the mode of placing stainless steel heating tube inside cavity to heat, but this heating mode can make heating tube contact process gas, affect heating uniformity, and also inconvenient to clean and maintain heating tube. SUMMARY

[0004] (1) technical problem to be solved

[0005] In view of the above-mentioned shortcomings and deficiencies of the prior art, the utility model provides a sectional heating device and ALD process furnace, which solves the technical problems of poor heating uniformity and difficult cleaning and maintenance of the heating tube in the prior art.

[0006] (2) technical scheme

[0007] In order to achieve the above purpose, the main technical scheme adopted by the utility model includes:

[0008] Firstly, the utility model provides a sectional heating device, which comprises a square shell, a partition plate, a main heating assembly and a main heat preservation layer. The square shell comprises two opposite first outer walls and two opposite second outer walls. The partition plate, the main heating assembly and the main heat preservation layer are arranged at least in one group outside one first outer wall. The main heat preservation layer is detachably connected to the first outer wall. The partition plate is fixedly connected to the outer wall of the square shell and located between the main heat preservation layer and the square shell, so as to divide the space between the main heat preservation layer and the square shell into a plurality of heating sections. The main heating assembly is detachably connected to the heating sections one by one, and the main heating assembly can be loaded into or extracted from the heating sections along the width direction of the square shell.

[0009] Secondly, the utility model provides an ALD process furnace comprising the sectional heating device in the above technical scheme.

[0010] (3) beneficial effects

[0011] The sectional heating device and the ALD process furnace have the following beneficial effects: the space between the main heat preservation layer and the square shell is divided into multiple heating sections by the partition plate, and the sectional heating of the square shell can be realized by cooperating with the main heating assembly; the square shell can be gradient heated or locally heated by adjusting and controlling the heating temperature of different main heating assemblies.

[0012] Since the main heating assembly is arranged outside the square shell and can be inserted into or separated from the heating section along the width direction of the square shell, the maintenance convenience of the main heating assembly is improved. The main heating assembly does not directly contact the medium in the square shell, so the cleaning and maintenance frequency of the main heating assembly is also reduced.

[0013] The main heat preservation layer is used for reducing heat loss and improving heating efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 Figure 1 is a structural schematic view of the sectional heating device of the utility model;

[0015] Figure 2 Figure 2 is a structural schematic view of the sectional heating device of the utility model;

[0016] Figure 3 Figure 3 is a structural schematic view of the sectional heating device of the utility model;

[0017] Figure 4 Figure 4 is a structural schematic view of the sectional heating device of the utility model;

[0018] Figure 5 Figure 5 is a structural schematic view of the sectional heating device of the utility model;

[0019] Figure 6 Figure 6 is a structural schematic view of the sectional heating device of the utility model Figure 5 Figure 7 is a local enlarged structural schematic view of the position of the main heating assembly in the utility model;

[0020] Figure 7 Figure 8 is a structural schematic view of the auxiliary heat preservation layer of the utility model;

[0021] Figure 8 Figure 9 is a structural schematic view of the end plate of the utility model;

[0022] Figure 9 Figure 10 is a sectional view of the main heat preservation layer, the reflecting layer, the main heating pipe and the square shell of the utility model.

[0023]

Explanation of reference signs

[0024] 1. square shell; 11. first outer wall; 12. second outer wall;

[0025] 2. partition plate; 200. heating section;

[0026] 3. main heating assembly; 31. main heating pipe; 32. end plate; 33. temperature measuring piece;

[0027] 4. main insulation layer;

[0028] 5. auxiliary heating assembly; 51. auxiliary heating pipe;

[0029] 6. auxiliary insulation layer; 600. pulling accommodation opening;

[0030] 7. heat dissipation assembly;

[0031] 8. reflective layer. DETAILED DESCRIPTION

[0032] In order to better explain the utility model, so as to facilitate understanding, the following will be combined with the drawings of the utility model Figures 1-9 , through specific embodiment, the utility model is described in detail. Among them, the width direction mentioned in this paper is the Y direction in Figure 3 , the length direction is the X direction in Figure 1 .

[0033] Example 1:

[0034] Referring to Figures 1-9 , the embodiment of the utility model provides a sectional heating device, which comprises square shell 1, partition plate 2, main heating assembly 3 and main insulation layer 4; square shell 1 comprises two opposite first outer walls 11 and two opposite second outer walls 12; partition plate 2, main heating assembly 3 and main insulation layer 4 are at least arranged as a group outside one first outer wall 11; main insulation layer 4 is detachably connected to the first outer wall 11, partition plate 2 is fixedly connected to the outer wall of square shell 1 and located between main insulation layer 4 and square shell 1, so as to separate the space between main insulation layer 4 and square shell 1 into a plurality of heating sections 200; main heating assembly 3 is detachably connected to heating section 200 one by one, and main heating assembly 3 can be loaded into or pulled out of heating section 200 along the width direction of square shell 1.

[0035] In this embodiment, partition plate 2 separates the space between main insulation layer 4 and square shell 1 into a plurality of heating sections 200, which cooperates with main heating assembly 3 to realize sectional heating of square shell 1, and by adjusting the heating temperature of different main heating assemblies 3, square shell 1 can be gradient heated or locally heated. In other words, the sectional heating scheme in this embodiment provides a hardware basis for flexible regulation and control of the heating device, ensuring the use flexibility of the heating device.

[0036] Since the main heating assembly 3 is arranged outside the square shell 1 and can be loaded or unloaded along the width direction of the square shell 1 into or away from the heating section 200, the maintenance convenience of the main heating assembly 3 is improved. The main heating assembly 3 is not directly in contact with the medium in the square shell 1, so the cleaning and maintenance frequency of the main heating assembly 3 is also reduced.

[0037] The main heat preservation layer 4 is used to reduce heat loss and improve heating efficiency.

[0038] Specifically, the heating space is divided into multiple heating sections 200 by the partition plate 2, and the temperature of each heating section 200 can be independently controlled to achieve more precise temperature regulation and heat distribution. This segmented heating method can improve heating efficiency, reduce energy waste, and meet different heating needs.

[0039] Embodiment 2:

[0040] Referring to Figures 1-9 In addition to all the technical solutions of the above-mentioned embodiments, the embodiments of the utility model further have the following technical solutions:

[0041] The segmented heating device further comprises a secondary heating assembly 5 and a secondary heat preservation layer 6, and the secondary heating assembly 5 and the secondary heat preservation layer 6 are arranged at least as a group outside the second outer wall 12; the secondary heat preservation layer 6 is detachably connected to the second outer wall 12, and the secondary heating assembly 5 is supported on the secondary heat preservation layer 6; the extension area of the first outer wall 11 is larger than that of the second outer wall 12.

[0042] In this embodiment, the secondary heating assembly 5 is used to provide additional heating capacity, thereby further improving the heating efficiency of the heating device, and the secondary heat preservation layer 6 also reduces heat loss and improves heating efficiency.

[0043] The extension area of the first outer wall 11 is larger than that of the second outer wall 12, so that the main heating assembly 3 is arranged on the first outer wall 11, which can ensure the heating area of the square shell 1 and improve the heating effect on the square shell 1. The secondary heating assembly 5 is arranged on the second outer wall 12 and cooperates with the first heating assembly to heat the square shell 1, thereby further improving the heating efficiency.

[0044] Since the secondary heating assembly 5 is supported on the secondary heat preservation layer 6, the two can be integrated and loaded and unloaded, thereby improving the loading and unloading efficiency and further improving the disassembly and maintenance efficiency of the heating device.

[0045] The pull-out accommodation opening 600 of the main heating assembly 3 is arranged on the auxiliary insulation layer 6, so that the main heating assembly 3 can be smoothly pulled out or inserted from the heating section 200 along the width direction of the square shell 1 when maintenance or replacement is required. The design of the pull-out accommodation opening 600 makes the maintenance and replacement of the main heating assembly 3 more convenient. The user can easily maintain the main heating assembly 3 without disassembling the auxiliary insulation layer 6.

[0046] Embodiment 3:

[0047] With reference to Figures 1-9 In addition to having all the technical solutions of any of the above embodiments, the embodiments of the utility model further have the following technical solutions:

[0048] The main heating assembly 3 comprises a main heating pipe 31 and an end plate 32, and the auxiliary heating assembly 5 comprises an auxiliary heating pipe 51; the main heating pipe 31 and the auxiliary heating pipe 51 are both arranged as serpentine pipes, and the two ends of the main heating pipe 31 and the auxiliary heating pipe 51 both extend along the width direction of the square shell 1; the two ends of the main heating pipe 31 both pass through and are fixedly connected to the end plate 32; the end plate 32 extends along the length direction of the square shell 1 and is detachably connected to the outer wall of the auxiliary insulation layer 6; and the two ends of the main heating pipe 31 and the auxiliary heating pipe 51 both extend out of the auxiliary insulation layer 6.

[0049] In this embodiment, the main heating pipe 31 and the auxiliary heating pipe 51 are both arranged as serpentine pipes, which helps to increase the length of the main heating pipe 31 and the auxiliary heating pipe 51, thereby improving the heating area and the heating efficiency. The two ends of the main heating pipe 31 both extend along the width direction of the square shell 1 and pass through and are fixedly connected to the end plate 32, so that the main heating pipe 31 can smoothly pass through the pull-out accommodation opening 600 when being disassembled along the width direction of the square shell 1, ensuring the disassembly efficiency and being conducive to the uniform distribution of the main heating pipe 31 in the heating section 200, thereby ensuring the uniform distribution of heat.

[0050] The end plate 32 is detachably connected to the outer wall of the auxiliary insulation layer 6, which serves to support and fix the main heating pipe 31; by releasing the connection between the end plate 32 and the auxiliary insulation layer 6, the main heating assembly 3 can be conveniently disassembled as a whole, thereby improving the disassembly efficiency.

[0051] The two ends of the main heating pipe 31 and the auxiliary heating pipe 51 both extend out of the auxiliary insulation layer 6, which are used for connecting external devices.

[0052] The main heating pipe 31 and the auxiliary heating pipe 51 are arranged to closely adhere to the side wall of the square shell 1, so as to improve the heat transfer efficiency.

[0053] Embodiment 4:

[0054] With reference to Figures 1-9The embodiment of the utility model further has the following technical solutions in addition to all the technical solutions of any one of the above embodiments.

[0055] The main heating assembly 3 further comprises a temperature measuring piece 33 which can be supported on the end plate 32 to detect the temperature of the main heating pipe 31.

[0056] In this embodiment, the temperature measuring piece 33 can be supported on the end plate 32 to ensure that it can stably measure the temperature of the main heating pipe 31. The temperature measuring piece 33 can be provided as a temperature sensor or a thermocouple or other temperature detection element, which can monitor the temperature change of the main heating pipe 31 in real time and transmit the temperature signal to the control system.

[0057] The temperature measuring piece 33 can monitor the temperature change of the main heating pipe 31 in real time, ensuring that the heating device always maintains a stable heating temperature during operation. Through real-time monitoring of the temperature measuring piece 33, the control system can timely adjust the heating power to avoid overheating or insufficient temperature. This helps to improve heating efficiency and reduce energy waste.

[0058] The presence of the temperature measuring piece 33 enhances the safety of the heating device. When the temperature is too high or exceeds the preset range, the control system can immediately take measures such as shutting down the heating power supply or starting the alarm device to prevent equipment damage or the occurrence of safety accidents such as fire.

[0059] Since the temperature measuring piece 33 is supported on the end plate 32, it can be conveniently maintained and calibrated. This helps to ensure the accuracy and reliability of the temperature measuring piece 33, thereby prolonging the service life of the heating device.

[0060] Embodiment 5:

[0061] Referring to Figures 1-9 The embodiment of the utility model further has the following technical solutions in addition to all the technical solutions of any one of the above embodiments.

[0062] The partition plate 2 is provided as two or more to form three or more heating sections 200; the tube density of the main heating pipe 31 adjacent to the end of the square shell 1 is greater than that of the other main heating pipes 31.

[0063] In this embodiment, by increasing the tube density of the main heating pipe 31 adjacent to the end of the square shell 1, these areas can be heated faster, thereby shortening the total time of the entire heating process. Since each heating section 200 can be independently controlled, it is easier to achieve uniform temperature distribution inside the entire heating device. At the same time, by adjusting the tube density of the main heating pipe 31 in different heating sections 200, the temperature distribution can be further optimized to meet the heating requirements.

[0064] Embodiment 6:

[0065] With reference to Figures 1-9 The embodiment of the utility model further has the following technical solutions in addition to all the technical solutions of any one of the above embodiments.

[0066] The sectional heating device further comprises a heat dissipation assembly 7, which is detachably connected to the auxiliary heat preservation layer 6 and is adapted to absorb heat emitted from both ends of the main heating pipe 31; the main heating pipe 31 and the auxiliary heating pipe 51 are both armored electric heating pipes.

[0067] When the main heating assembly 3 is disassembled, the heat dissipation assembly 7 is disassembled to make room for the main heating assembly 3.

[0068] Specifically, the heat dissipation assembly 7 comprises a heat dissipation plate and a circulating pipeline, the heat dissipation plate and the circulating pipeline are in communication, and the heat dissipation plate is adjacent to the position of the end of the main heating pipe 31 to absorb the heat emitted therefrom.

[0069] The heat dissipation plate can be connected to the end plate 32 through bolts, and the end plate 32 is connected to the outer wall of the auxiliary heat preservation layer 6 through bolts.

[0070] In this embodiment, the armored electric heating pipe has excellent heating performance and mechanical strength and can withstand harsh conditions such as high temperature and high pressure. At the same time, the armored structure can also provide additional protection to prevent the heating pipe from being damaged due to external factors.

[0071] The heat dissipation assembly 7 can absorb the heat emitted from both ends of the main heating pipe 31, avoid the heat from being emitted into the environment where the sectional heating device is located, and thus be conducive to reducing the temperature of the external environment, preventing heat accumulation, and improving the safety of the heating device.

[0072] Embodiment 7:

[0073] With reference to Figures 1-9 The embodiment of the utility model further has the following technical solutions in addition to all the technical solutions of any one of the above embodiments.

[0074] The partition plate 2, the main heating assembly 3 and the main heat preservation layer 4 are arranged as two groups outside the two first outer walls 11; the auxiliary heating assembly 5 and the auxiliary heat preservation layer 6 are arranged as two groups outside the two second outer walls 12, so that each side wall of the square shell 1 can be heated, and thus the heating efficiency and the heating uniformity of the heating device are further improved.

[0075] The sectional heating device further comprises a reflection layer 8, which is fixedly connected to the side wall of the square shell 1 facing the main heat preservation layer 4 and the auxiliary heat preservation layer 6, so as to further improve the heat preservation effect of the main heat preservation layer 4 and the auxiliary heat preservation layer 6.

[0076] Embodiment 8:

[0077] With reference toFigures 1-9 The embodiment of the utility model further has the following technical solutions in addition to all the technical solutions of any one of the above embodiments.

[0078] The partition plate 2 is annularly arranged on the outer periphery of the square shell 1 to form a reinforcing structure.

[0079] In the embodiment, the partition plate 2 not only plays a role in partitioning the heating section 200, but also enhances the structural strength of the square shell 1, plays a role of a reinforcing rib, and increases the overall rigidity of the heating device. The annular partition plate 2 is made of metal or other high-strength materials to ensure that it can withstand thermal stress and mechanical stress during heating.

[0080] The annular partition plate 2 as a reinforcing structure can significantly improve the structural strength of the square shell 1. This helps to prevent the square shell 1 from deforming or being damaged due to thermal expansion or mechanical stress during heating.

[0081] Embodiment 9:

[0082] ​ The embodiment of the utility model provides an ALD process furnace, which comprises the sectional heating device in any one of the above embodiments, so that the ALD process furnace comprises the sectional heating device in any one of the above embodiments, and details are not described here to avoid repetition.

[0083] It can be understood that, except for the parts that conflict with each other, the above embodiments 1-9 can be freely combined to form other embodiments of the utility model.

[0084] In the description of the utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited by "first" and "second" can explicitly or implicitly include one or more features. In the description of the utility model, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0085] In the utility model, unless otherwise specifically defined and limited, the terms "installation", "connection", "connection", "fixing" and the like should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements or the interaction relationship between two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0086] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be direct contact of the first and second features, or indirect contact of the first and second features through an intermediate medium. Moreover, the first feature is "above", "over" and "on" the second feature, which can be directly above or obliquely above the first feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature is "below", "under" and "under" the second feature, which can be directly below or obliquely below the first feature, or only indicates that the horizontal height of the first feature is lower than that of the second feature.

[0087] The term "comprising" or any other similar word is intended to encompass a non-exclusive inclusion, so that a process, article or equipment / device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or also includes elements inherent to the process, article or equipment / device.

[0088] So far, the technical scheme of the present application has been described in combination with the preferred embodiments shown in the drawings, but those skilled in the art can easily understand that the protection scope of the present application is obviously not limited to these specific embodiments. Those skilled in the art can make equivalent changes or replacements to related technical features without deviating from the principles of the present application, and the technical schemes after these changes or replacements will fall within the protection scope of the present application.

Claims

1. A sectional heating device, characterized by: The square shell (1) includes two opposite first outer walls (11) and two opposite second outer walls (12), the partition plate (2), the main heating assembly (3) and the main heat preservation layer (4) are arranged at least as a group outside one of the first outer walls (11); The main heat preservation layer (4) is detachably connected to the first outer wall (11), the partition plate (2) is fixedly connected to the outer wall of the square shell (1) and located between the main heat preservation layer (4) and the square shell (1), so as to separate the space between the main heat preservation layer (4) and the square shell (1) into a plurality of heating sections (200); The main heating assembly (3) is one-to-one correspondingly detachably connected to the heating section (200), and the main heating assembly (3) can be loaded into or pulled out of the heating section (200) along the width direction of the square shell (1). The sectional heating device further comprises a secondary heating assembly (5) and a secondary heat preservation layer (6), the secondary heating assembly (5) and the secondary heat preservation layer (6) are arranged at least as a group outside one of the second outer walls (12); 2. The segmented heating device of claim 1, wherein: The secondary heat preservation layer (6) is detachably connected to the second outer wall (12), and the secondary heating assembly (5) is supported on the secondary heat preservation layer (6); The extension area of the first outer wall (11) is greater than that of the second outer wall (12). The secondary heat preservation layer (6) is provided with a pulling accommodation opening (600) of the main heating assembly (3).

3. The segmented heating device of claim 2, wherein: The main heating assembly (3) comprises a main heating pipe (31) and an end plate (32), and the secondary heating assembly (5) comprises a secondary heating pipe (51); 4. The segmented heating device of claim 2, wherein: The main heating pipe (31) and the secondary heating pipe (51) are both arranged as serpentine pipes, and the two ends of the main heating pipe (31) and the secondary heating pipe (51) both extend along the width direction of the square shell (1), and the two ends of the main heating pipe (31) both pass through and are fixedly connected to the end plate (32); The end plate (32) extends along the length direction of the square shell (1), and the end plate (32) is detachably connected to the outer wall of the secondary heat preservation layer (6); The two ends of the main heating pipe (31) and the secondary heating pipe (51) both extend out of the secondary heat preservation layer (6). The main heating assembly (3) further comprises a temperature measuring member (33) supported on the end plate (32) to detect the temperature of the main heating pipe (31).

5. The segmented heating device of claim 4, wherein: The partition plate (2) is arranged as two or more to form three or more heating sections (200); 6. The segmented heating device of claim 4, wherein: The tube density of the main heating pipe (31) adjacent to the end of the square shell (1) is greater than that of other main heating pipes (31). The sectional heating device further comprises a heat dissipation assembly (7) detachably connected to the secondary heat preservation layer (6) to absorb the heat emitted by the two ends of the main heating pipe (31).

7. The segmented heating device of claim 4, wherein: ​ The main heating pipe (31) and the auxiliary heating pipe (51) are armored electric heating pipes.

8. The segmented heating device of claim 4, wherein: The partition plates (2), the main heating assemblies (3) and the main heat preservation layers (4) are arranged outside the two first outer walls (11); the auxiliary heating assemblies (5) and the auxiliary heat preservation layers (6) are arranged outside the two second outer walls (12). The segmented heating device further comprises a reflective layer (8) fixedly connected to the side walls of the main heat preservation layers (4) and the auxiliary heat preservation layers (6) facing the square shell (1).

9. The segmented heating device of any of claims 1-8, wherein: The partition plates (2) are annularly sleeved on the outer periphery of the square shell (1) to form a reinforcing structure.

10. An ALD process furnace characterized by: The segmented heating device according to any one of claims 1-9.

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