Single crystal furnace cooling system

Abstract

The utility model discloses a single crystal furnace cooling system which comprises a plurality of cooling pipelines, a main inlet water segregator, a main return water segregator, a main inlet pressure sensor, a main outlet pressure sensor and a main outlet pressure sensor, the main return pressure sensor is used for detecting the water inlet pressure of the cooling system; the manual ball valve is used for adjusting the cooling water flow of the corresponding cooling pipeline; the vortex shedding flowmeter is used for detecting the water outlet flow and temperature of the corresponding cooling pipeline; the turbine flowmeter is used for detecting the total water return flow of the cooling system; according to the invention, the operation safety of the single crystal furnace is improved, and the occurrence of explosion of the single crystal furnace is greatly reduced; the energy consumption of the single crystal furnace is reduced; whether the alarm is a false alarm or not is judged through double insurance of flow and temperature, and a powerful basis is provided for troubleshooting reasons.

Description

TECHNICAL FIELD

[0001] The utility model belongs to single crystal silicon preparation technical field, concretely relates to a single crystal furnace cooling system. BACKGROUND

[0002] In the single crystal silicon preparation process, the cooling system is the key component of guaranteeing the safe and stable operation of the single crystal furnace. At present, the existing single crystal furnace cooling system is usually composed of main inlet water distributor, main return water distributor, temperature switch, pressure gauge, flow switch and the like. These systems can realize the cooling function to a certain extent, but still have some technical problems and deficiencies: the existing cooling system mainly relies on temperature switch and flow switch for state monitoring. The accuracy of these switches is relatively low, when the cooling system is abnormal, the electric control system can not identify the abnormal reason in time and accurately, and the operator is difficult to obtain enough accurate data to judge the fault root cause, in serious cases, the fault can not be eliminated in time, which can cause the safety accident of the single crystal furnace, such as explosion. In order to ensure the cooling effect, the existing technology often uses the cooling water flow higher than the actual demand of the single crystal furnace, however, lacking fine flow control means, resulting in part of the cooling water flow surplus, causing energy waste, and the energy consumption of the single crystal furnace is high. The existing alarm system is mainly based on the set value of the temperature switch, which is easy to misreport or have no alarm after abnormality, and can not provide reliable early warning information for the operator, which can delay the processing opportunity. Therefore, an improved single crystal furnace cooling system is needed, which can improve the monitoring accuracy, accurately control the cooling water flow and provide reliable alarm, so as to guarantee the safe and stable operation of the single crystal furnace and reduce the energy consumption. CONTENT OF THE UTILITY MODEL

[0003] In view of the deficiencies in the background art, the utility model aims at providing a single crystal furnace cooling system, which solves the problems of (1) the relatively low accuracy of the monitoring switches such as temperature switch and flow switch of the existing cooling system, when the cooling system is abnormal, the electric control system can not identify the abnormal reason in time and accurately, and the operator is difficult to obtain enough accurate data to judge the fault root cause, which can easily cause the safety accident of the single crystal furnace; (2) the existing cooling system lacks fine flow control means, resulting in part of the cooling water flow surplus, causing energy waste, and the energy consumption of the single crystal furnace is high; (3) the alarm system in the existing cooling system is mainly based on the set value of the temperature switch, which is easy to misreport or have no alarm after abnormality, and can not provide reliable early warning information for the operator, which can delay the processing opportunity.

[0004] The purpose of the utility model can be realized by the following technical scheme: a single crystal furnace cooling system, comprising:

[0005] A plurality of cooling pipelines, each of the cooling pipelines is connected to the corresponding component in the single crystal furnace,

[0006] a main inlet water distributor arranged at one side of the single crystal furnace for receiving external cooling water and distributing the cooling water to a plurality of the cooling pipes,

[0007] a main return water distributor arranged at the other side of the single crystal furnace for collecting the cooling water returned from the plurality of the cooling pipes,

[0008] a main inlet pressure sensor arranged at the inlet of the main inlet water distributor for detecting the inlet water pressure of the cooling system,

[0009] a main return pressure sensor arranged at the outlet of the main return water distributor for detecting the return water pressure of the cooling system,

[0010] a plurality of manual ball valves arranged on each of the cooling pipes for adjusting the flow of the cooling water of the corresponding cooling pipe,

[0011] a plurality of vortex flow meters arranged on each of the cooling pipes, the vortex flow meters integrating flow and temperature for detecting the flow and temperature of the cooling water of the corresponding cooling pipe,

[0012] a turbine flow meter arranged at the outlet of the main return water distributor for detecting the total return water flow of the cooling system.

[0013] Further, in the single crystal furnace cooling system, the single crystal furnace comprises a first water distribution assembly and a second water distribution assembly, the first water distribution assembly is arranged to input the cooling water from the main inlet water distributor to the main return water distributor along a first distribution direction, the first water distribution assembly comprises a plurality of first components connected in parallel, the plurality of first components comprises a main negative electrode, a main positive electrode, a secondary positive electrode, a vacuum pipe, a secondary negative electrode, an upper furnace cylinder and a lower furnace cylinder, each of the first components is connected to the main inlet water distributor and the main return water distributor through a cooling pipe; the second water distribution assembly is arranged to input the cooling water from the main inlet water distributor to the main return water distributor along a second distribution direction, the second water distribution assembly comprises a plurality of second components connected in parallel, the plurality of second components comprises a secondary chamber, a rotary valve, a rotary valve shaft, a heat shield, a furnace cover, a crucible shaft and a furnace bottom, each of the second components is connected to the main inlet water distributor and the main return water distributor through a cooling pipe.

[0014] Further, the plurality of cooling pipes comprises a plurality of first cooling pipes and a plurality of second cooling pipes connected in parallel, the plurality of first cooling pipes are applied to the first water distribution assembly, and the plurality of second cooling pipes are applied to the second water distribution assembly.

[0015] Further, one vortex flow meter and two manual ball valves are arranged on each of the first cooling pipes, and one vortex flow meter and two manual ball valves are arranged on each of the second cooling pipes.

[0016] Preferably, two manual ball valves are arranged on each of the cooling pipes, one of which is arranged on one side of the main inlet water distributor, and the other is arranged on one side of the main return water distributor.

[0017] Further, the vortex flow meter arranged on each of the cooling pipes is arranged between a component of the single crystal furnace and the main return water distributor.

[0018] Further, the cooling system further comprises an electric control system, which monitors the detection data of the vortex flow meter, the turbine flow meter and the pressure sensor in real time, and sends an alarm when any data is abnormal.

[0019] The beneficial effects possibly brought by the utility model include but are not limited to: (1) the turbine flow meter arranged on the main return water distributor is used to detect the total return water flow, the vortex flow meter arranged on each of the cooling pipes is used to detect the return water flow and temperature of each component, and the pressure sensor arranged on the main inlet and main return water distributors is used to detect the real-time pressure of the main inlet and main return cooling water; through the arrangement of these detection sensor elements, the relevant data of the cooling system during the operation of the single crystal furnace is monitored in real time by the electric control system, the electric control system sends an alarm immediately when a certain data is abnormal, informs the operator to troubleshoot the problem, improves the safety of the operation of the single crystal furnace, and greatly reduces the occurrence of the explosion of the single crystal furnace; (2) the manual ball valve is arranged on each of the cooling pipes, the operator can adjust the manual ball valve according to the cooling water flow and temperature displayed in real time by the vortex flow meter in the cooling pipe, so that the cooling water flow of each component reaches the best state, and the energy consumption of the single crystal furnace is reduced; (3) when the component sends an alarm, the operator can judge whether the alarm is a false alarm according to the displayed flow and temperature, which provides a strong basis for troubleshooting. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the drawings needed to be used in the embodiment or the prior art description will be briefly introduced below.

[0021] Figure 1 is the system diagram of the utility model embodiment;

[0022] In the figure, 1-cooling pipeline, 2-main inlet water distributor, 3-main return water distributor, 4-main inlet pressure sensor, 5-main return pressure sensor, 6-handball valve, 7-vortex flowmeter, 8-turbine flowmeter, 9-first water distribution assembly, 10-second water distribution assembly. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0024] A single crystal furnace cooling system, specifically, refer to Figure 1 The system comprises a plurality of cooling pipelines 1, each of which is connected to a corresponding component in the single crystal furnace; a main inlet water distributor 2 arranged on one side of the single crystal furnace, which is used to receive external cooling water and distribute it to the plurality of cooling pipelines 1; a main return water distributor 3 arranged on the other side of the single crystal furnace, which is used to collect the cooling water returned by each cooling pipeline 1; a main inlet pressure sensor 4 arranged at the inlet of the main inlet water distributor 2, which is used to detect the inlet water pressure of the cooling system; a main return pressure sensor 5 arranged at the outlet of the main return water distributor 3, which is used to detect the return water pressure of the cooling system; a handball valve 6 arranged on each cooling pipeline 1, which is used to adjust the cooling water flow of the corresponding cooling pipeline 1; a vortex flowmeter 7 arranged on each cooling pipeline 1, which is used to detect the outlet water flow and temperature of the corresponding cooling pipeline 1; and a turbine flowmeter 8 arranged at the outlet of the main return water distributor 3, which is used to detect the total return water flow of the cooling system.

[0025] It can be understood that the structure of the current single crystal furnace cooling system is composed of a main inlet water distributor, a main return water distributor, a temperature switch, a pressure gauge and a flow switch. The temperature switch and the flow switch have low precision. After the cooling system abnormally operates during the operation of the single crystal furnace, the electric control system cannot timely and accurately determine the abnormal reason according to the cooling system data, and the operator cannot accurately eliminate the abnormality of the cooling system, thereby causing a safety accident of the single crystal furnace, and even causing an explosion of the single crystal furnace. The single crystal furnace cooling system of the present application sets a turbine flowmeter 8 on the main return water distributor 3 to detect the total return water flow, sets a vortex flowmeter 7 on each cooling pipeline 1 to detect the return water flow and temperature of each component, and sets a pressure sensor on the main inlet and main return water distributors to detect the real-time pressure of the main inlet and main return cooling water. By setting these detection sensor elements, the relevant data of the cooling system during the operation of the single crystal furnace are monitored by the electric control system in real time. When a certain data is abnormal, the electric control system will immediately issue an alarm to notify the operator to investigate the problem, thereby improving the safety of the operation of the single crystal furnace and greatly reducing the occurrence of the explosion of the single crystal furnace.

[0026] Further, in the cooling system of the single crystal furnace, the single crystal furnace comprises a first shunt component 9 and a second shunt component 10. The first shunt component 9 is connected to the main inlet water distributor 2 and the main return water distributor 3 along a first shunt direction after the cooling water is discharged from the main inlet water distributor 2. The first shunt component 9 comprises a plurality of first components connected in parallel. The plurality of first components comprises a main negative electrode, a main positive electrode, a secondary positive electrode, a vacuum pipe, a secondary negative electrode, an upper furnace cylinder and a lower furnace cylinder. Each first component is connected to the main inlet water distributor 2 and the main return water distributor 3 through a cooling pipe. The second shunt component 10 is connected to the main inlet water distributor 2 and the main return water distributor 3. The second shunt component 10 comprises a plurality of second components connected in parallel. The plurality of second components comprises a secondary chamber, a rotary valve, a rotary valve shaft, a heat shield, a furnace cover, a crucible shaft and a furnace bottom. Each second component is connected to the main inlet water distributor 2 and the main return water distributor 3 through a cooling pipe.

[0027] Further, the plurality of cooling pipes 1 comprises a plurality of first cooling pipes and a plurality of second cooling pipes. The plurality of first cooling pipes is applied to the first shunt component 9. The plurality of second cooling pipes is applied to the second shunt component 10.

[0028] Further, each first cooling pipe is provided with a vortex flowmeter 7 and two manual ball valves 6. Each second cooling pipe is provided with a vortex flowmeter 7 and two manual ball valves 6. The independent connection of each cooling pipe to different components can realize independent cooling control of different components and precise cooling to prevent local overheating.

[0029] Preferably, the two manual ball valves 6 on each cooling pipe 1 are arranged on one side of the main inlet water distributor 2 and the other side of the main return water distributor 3. The operator can adjust the manual ball valves 6 according to the cooling water flow and temperature displayed by the vortex flowmeter 7 in the cooling pipe 1 in real time, so that the cooling water flow of each component reaches the optimal state, avoiding the cooling water from carrying away too much heat and reducing the energy consumption of the single crystal furnace.

[0030] Further, the vortex flowmeter 7 on each cooling pipe 1 is arranged between the single crystal furnace component and the main return water distributor 3. Preferably, the vortex flowmeter 7 integrates flow and temperature to detect the return water flow and temperature of each component. When the component issues an alarm, the operator can determine whether the alarm is a false alarm according to the displayed flow and temperature, which provides a strong basis for investigating the cause.

[0031] Further, the cooling system further comprises an electric control system, which monitors the detection data of the vortex flowmeter 7, the turbine flowmeter 8 and the pressure sensor in real time, and sends an alarm when any data is abnormal, so as to inform the operator to check the problem, improve the safety of the single crystal furnace operation, and greatly reduce the explosion of the single crystal furnace.

[0032] The working process of the single crystal furnace cooling system of the embodiment is as follows: Figure 1 The main inlet pressure sensor 4 is arranged at the inlet of the main inlet distributor 2, and is used to detect the water inlet pressure of the cooling system and transmit the data to the electric control system. When the data is abnormal, the electric control system sends an alarm to inform the operator to adjust the total water inlet valve. When the data is normal, part of the cooling water flows through the main inlet distributor 2, is divided into each first cooling pipeline in the first diversion assembly 9 along the first diversion direction by the main inlet distributor 2, flows in the first cooling pipeline, passes through the components on the first cooling pipeline, the vortex flowmeter 7 and the cooling valve 6, and flows to the main return distributor 3. The vortex flowmeter 7 arranged between each first cooling pipeline 1 and the main return distributor 3 is integrated with flow and temperature, and is used to detect the cooling water flow and temperature of each component and transmit the data to the electric control system. The electric control system can judge whether the cooling effect of the component is normal according to the data. When the outlet water temperature or flow of a certain single crystal furnace component exceeds the preset range, the electric control system sends an alarm to inform the operator to adjust the manual ball valve 6 on the cooling pipeline connected to the corresponding component, so that the cooling water flow of each component reaches the best state, the cooling water does not take away too much heat, and unnecessary energy loss is avoided. Further, the other part of the cooling water flows from the main inlet distributor 2 to the main return distributor 3 through each second cooling pipeline in the second diversion assembly 10 along the second diversion direction. During the diversion process, the main return pressure sensor 5 arranged on the main return distributor 3 monitors the return water pressure of the cooling system in real time, and the turbine flowmeter 8 arranged at the outlet of the main return distributor 3 detects the total return water flow of the entire cooling system and transmits the data to the electric control system. When the data is abnormal, the operator is informed to adjust the total return water valve. When the data is normal, the cooling water from each cooling pipeline 1 is collected by the main return distributor 3 and discharged through the outlet.

[0033] The basic principle, main features and advantages of the utility model are shown and described above. It should be understood by those skilled in the art that the utility model is not limited by the above embodiments, and the above embodiments and descriptions in the specification are only to illustrate the principle of the utility model. Without departing from the spirit and scope of the utility model, the utility model can also have various changes and improvements, and these changes and improvements all fall within the scope of the utility model claimed.

Claims

1. A single crystal furnace cooling system, characterized by, The single crystal furnace cooling system comprises a plurality of cooling pipes (1), each of which is connected to a corresponding component in the single crystal furnace; a main inlet water distributor (2) arranged on one side of the single crystal furnace and used for receiving external cooling water and distributing the cooling water to the plurality of cooling pipes (1); a main return water distributor (3) arranged on the other side of the single crystal furnace and used for collecting the cooling water returned by each cooling pipe (1); a main inlet pressure sensor (4) arranged at the inlet of the main inlet water distributor (2) and used for detecting the inlet water pressure of the cooling system; a main return pressure sensor (5) arranged at the outlet of the main return water distributor (3) and used for detecting the return water pressure of the cooling system; a plurality of manual ball valves (6) arranged on each cooling pipe (1) and used for adjusting the cooling water flow of the corresponding cooling pipe (1); a plurality of vortex flow meters (7) arranged on each cooling pipe (1), the vortex flow meters (7) integrating flow and temperature and used for detecting the outlet water flow and temperature of the corresponding cooling pipe (1); and a turbine flow meter (8) arranged at the outlet of the main return water distributor (3) and used for detecting the total return water flow of the cooling system. The single crystal furnace cooling system comprises a first water distribution assembly (9) and a second water distribution assembly (10), the first water distribution assembly (9) being used for inputting the cooling water from the main inlet water distributor (2) to the main return water distributor (3) along a first distribution direction, the first water distribution assembly (9) comprising a plurality of first components connected in parallel, the plurality of first components comprising a main negative electrode, a main positive electrode, a secondary positive electrode, a vacuum pipe, a secondary negative electrode, an upper furnace cylinder and a lower furnace cylinder, each of the first components being communicated with the main inlet water distributor (2) and the main return water distributor (3) through a cooling pipe; and the second water distribution assembly (10) being used for inputting the cooling water from the main inlet water distributor (2) to the main return water distributor (3) along a second distribution direction, the second water distribution assembly (10) comprising a plurality of second components connected in parallel, the plurality of second components comprising a secondary chamber, a rotary valve, a rotary valve shaft, a heat shield, a furnace cover, a crucible shaft and a furnace bottom, each of the second components being communicated with the main inlet water distributor (2) and the main return water distributor (3) through a cooling pipe. The plurality of cooling pipes (1) comprises a plurality of first cooling pipes connected in parallel and a plurality of second cooling pipes connected in parallel, the plurality of first cooling pipes being applied to the first water distribution assembly (9), and the plurality of second cooling pipes being applied to the second water distribution assembly (10). Each of the first cooling pipes is provided with one vortex flow meter (7) and two manual ball valves (6), and each of the second cooling pipes is provided with one vortex flow meter (7) and two manual ball valves (6). ​ ​ ​ ​ ​ 2. A single crystal furnace cooling system as defined in claim 1, wherein: ​ 3. A single crystal furnace cooling system as defined in claim 2, wherein ​ 4. A single crystal furnace cooling system as defined in claim 3, wherein ​ 5. A single crystal furnace cooling system as claimed in claim 1 or 2, wherein: Two said manual ball valves (6) are arranged on each said cooling pipeline, one said manual ball valve (6) is arranged on one side of said main inlet distributor (2), and the other said manual ball valve (6) is arranged on one side of said main return distributor (3).

6. A single crystal furnace cooling system as defined in claim 3, wherein The said vortex flow meter (7) on each said cooling pipeline (1) is arranged between the components of the single crystal furnace and said main return distributor (3).

7. A single crystal furnace cooling system as defined in claim 2, wherein The said cooling system further comprises an electric control system, which monitors the detection data of said vortex flow meter (7), said turbine flow meter (8) and said pressure sensor in real time, and sends an alarm when any data is abnormal.

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