Fluid on-off diaphragm valve

Abstract

The utility model discloses a fluid on-off diaphragm valve, which comprises a valve body, a first valve block and a second valve block, an accommodating space is formed between the first valve block and the second valve block, the first valve block is provided with a flow channel, the second valve block is provided with a throttling part and an air chamber, and the throttling part is communicated with the air chamber; the diaphragm is arranged in the containing space, the diaphragm is located between the flow channel and the throttling part, the diaphragm can block or open the flow channel, and the throttling part is used for reducing the movement speed of the diaphragm. By the adoption of the scheme, sudden pressure change of liquid output by the diaphragm valve can be avoided, and stability of output flow is guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor fluid control equipment technical field especially relates to a fluid on-off diaphragm valve. BACKGROUND

[0002] In many industrial applications, it is critical to precisely control the flow and rate of fluids, especially in the semiconductor processing field. When applying photochemical substances such as photoresist on a semiconductor wafer, it is necessary to ensure that the coating is evenly distributed over the entire wafer surface and to perform film thickness measurements. In order to achieve uniform application, the flow of the chemical substance applied to the semiconductor wafer must be strictly controlled. The on-off valves currently in use can easily generate sharp pressure peaks in the fluid, which not only can change the physical properties of the fluid, but also can cause the pump to dispense more fluid than expected, resulting in film thickness process defects. Diaphragm valves are commonly used in the prior art to control the on-off of fluids. The flat diaphragm inside the diaphragm valve can move to apply pressure to the process fluid.

[0003] However, the prior art is limited by the thickness of the material, and the aperture is usually large. A larger aperture causes the flow rate of the fluid to be too fast, which is extremely fast to fill the valve chamber for dry compressed air and extremely fast to empty the valve chamber for vacuum, both of which cause the position of the diaphragm to change dramatically in a very short time. This dramatic change causes a shock to the liquid in the flow passage on the other side of the diaphragm, resulting in a dramatic change in liquid pressure and ultimately causing the flow of the liquid out of the diaphragm valve to be unstable.

[0004] Therefore, it is necessary to provide a fluid on-off diaphragm valve to solve the above problems existing in the prior art. SUMMARY

[0005] The utility model discloses a fluid on-off diaphragm valve for avoiding the flow of the liquid out of the diaphragm valve to be unstable.

[0006] To achieve the above object, the technical scheme of the utility model is as follows:

[0007] A fluid on-off diaphragm valve, comprising:

[0008] A valve body comprising a first valve block and a second valve block, a containing space being formed between the first valve block and the second valve block, a flow passage being formed on the first valve block, a throttling portion and a gas chamber being formed on the second valve block, the throttling portion and the gas chamber being in communication with each other;

[0009] A diaphragm is arranged in the containing space, the diaphragm being located between the flow passage and the throttling portion, the diaphragm being capable of blocking or opening the flow passage, and the throttling portion being used to slow down the movement speed of the diaphragm.

[0010] The fluid on-off diaphragm valve has the advantages that: on the one hand, the flow rate of the gas is slowed down through the design of the throttling part, so that the movement of the diaphragm is more gentle, and the stability of the output flow is ensured; on the other hand, the original material of the valve body is ingeniously utilized, so that an additional speed regulating valve or a throttling connector is avoided, space and cost are saved, the shape coefficient is reduced, and the efficiency of the overall system is improved.

[0011] Further, the throttling part comprises a first throttling hole and a second throttling hole, the diameter of the first throttling hole is smaller than that of the second throttling hole, and the first throttling hole and the second throttling hole are sequentially close to the diaphragm.

[0012] By adopting the above technical scheme, the larger hole diameter can provide a higher flow rate, so that the gas can enter faster. Then the first throttling hole with a smaller hole diameter limits the flow rate of the gas, so that the speed of the gas entering the gas chamber is slowed down. Through the difference between the two hole diameters, the flow rate of the gas changes smoothly, avoiding the situation that the gas is rapidly filled into the gas chamber, and avoiding that the diaphragm moves violently due to the too fast flow rate of the gas. This helps the smooth movement of the diaphragm and avoids that the diaphragm changes violently in a short time.

[0013] Further, a sealing ring is arranged on the diaphragm, an annular mounting groove is formed in the second valve block, the sealing ring is arranged in the mounting groove, a groove is formed in the first valve block, the sealing ring has a pressing part, and the pressing part can extrude the diaphragm in the groove.

[0014] Further, a transition part is arranged between the first throttling hole and the second throttling hole, and the transition part is used for gradually reducing the flow rate of the fluid from the second throttling hole to the first throttling hole.

[0015] Further, the diameter of the transition part gradually decreases along the direction close to the diaphragm.

[0016] By adopting the above technical scheme, when the fluid passes through the second throttling hole and the first throttling hole with different cross-sectional areas, if there is no transition section, the sharp change of the flow rate of the fluid can cause turbulence, which not only affects the flow control accuracy of the system, but also can cause noise and vibration. The design of the conical transition part can effectively slow down the speed change of the gas flow or liquid flow, make the fluid flow more stable, and avoid the turbulence caused by the too large pressure difference when the fluid flows from the large hole to the small hole.

[0017] Further, the diameter of the second throttling hole is not less than 2mm, and the diameter of the first throttling hole is 0.1mm-1mm.

[0018] Further, the second valve block is provided with a gas joint, and the second valve block is provided with an air inlet flow channel, the gas joint is used for introducing positive pressure gas or negative pressure gas into the air inlet flow channel, and the air inlet flow channel and the second throttling hole are in communication with each other.

[0019] Further, the second throttling hole is provided with a plug, and the plug is used for plugging one side of the second throttling hole away from the first throttling hole.

[0020] Further, the air chamber is a spherical air chamber, and the spherical air chamber is concave to the first valve block.

[0021] Further, the flow channel comprises a first flow channel and a second flow channel, and the first flow channel and the second flow channel are respectively used for inflow and outflow of liquid. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 It is a whole structure schematic view of a fluid on-off diaphragm valve according to an embodiment of the present application;

[0023] Figure 2 It is a partial sectional view of a flow channel according to an embodiment of the present application;

[0024] Figure 3 It is a partial sectional view of a fluid on-off diaphragm valve according to an embodiment of the present application;

[0025] Figure 4 It is an internal structure schematic view of a fluid on-off diaphragm valve according to an embodiment of the present application;

[0026] Figure 5 It is a diaphragm state schematic view when positive pressure air is introduced into an air chamber according to an embodiment of the present application;

[0027] Figure 6 It is a diaphragm state schematic view when vacuum is introduced into an air chamber according to an embodiment of the present application.

[0028] Fig. 1 is a valve body; 11 is a first valve block; 12 is a second valve block; 2 is a flow channel; 3 is a throttling part; 31 is a first throttling hole; 32 is a second throttling hole; 33 is a transition part; 4 is an air chamber; 5 is a diaphragm; 6 is a sealing ring; 61 is a mounting groove; 62 is a groove; 7 is a gas joint; 8 is a plug. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor belong to the protection scope of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the usual meaning understood by those skilled in the art. The similar words such as "include" used in this paper mean that the elements or objects before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0030] The technical scheme in the embodiments of the utility model will be clearly and completely described below. Figure 1 -Appendix Figure 6 The specific embodiments of the utility model will be further described in detail.

[0031] The utility model discloses a kind of fluid on-off diaphragm valves, including valve body 1 and diaphragm 5.Valve body 1 includes oppositely arranged first valve block 11 and second valve block 12, first valve block 11 is also distribution block, and second valve block 12 is valve plate.Gap-shaped accommodating space is formed between first valve block 11 and second valve block 12.First valve block 11 is provided with flow channel 2, and flow channel 2 includes first flow channel 2 and second flow channel 2, and second flow channel 2 and second flow channel 2 are used for liquid inflow and outflow respectively.In the embodiment of the utility model, first flow channel 2 and second flow channel 2 are arranged in parallel, and respectively with the pump chamber of control fluid pumping in and pumping out are interconnected, for controlling the on-off of fluid in pump chamber.Diaphragm 5 uses corrosion-resistant material, and has corrosion resistance.

[0032] Second valve block 12 is provided with throttle part 3 and air chamber 4, and throttle part 3 and air chamber 4 are interconnected;Diaphragm 5 is arranged in accommodating space, and diaphragm 5 is located between flow channel 2 and throttle part 3, diaphragm 5 can block or open flow channel 2, and throttle part 3 is used to slow down the movement speed of diaphragm 5.Through the setting of throttle part 3, avoid gas to fill or empty air chamber 4 extremely fast, avoid the position of diaphragm 5 to produce violent change in extremely short time, and then avoid to cause the impact of liquid in flow channel 2 on the other side of diaphragm 5 to cause liquid pressure to change sharply, finally avoid to cause the outflow liquid flow to be unstable.

[0033] In some embodiments of the utility model, throttle portion 3 includes first throttle hole 31 and second throttle hole 32, the diameter of first throttle hole 31 is less than the diameter of second throttle hole 32, first throttle hole 31 and second throttle hole 32 are in turn close to diaphragm 5. Gas enters through larger second throttle hole 32. Because larger aperture can provide higher flow, gas can enter faster. Then the first throttle hole 31 of smaller gas, limit the flow rate of gas, so that the speed of gas into the air chamber 4 slows down. Through the difference of two aperture, the gas flow rate changes smoothly, avoids the situation that gas fills the air chamber 4 sharply, avoids diaphragm 5 to produce violent movement because of the flow rate of gas is too fast. This helps the smooth movement of diaphragm 5, avoids diaphragm 5 to produce violent change in a short time. Through this big first small throttle design, it can effectively avoid that gas fills the air chamber 4 suddenly, reduces the rapid change of diaphragm 5 position, thereby reduces the impact on fluid flow, maintains the stability of liquid flow, can control the import and export of fluid accurately at the same time, ensures that photochemical substances, such as photoresist, are applied more uniformly and accurately in the process of semiconductor processing. In addition, throttle portion 3 utilizes the original material of valve plate, does not need additional speed regulating valve or throttle connector, reduces the overall shape coefficient.

[0034] In some embodiments of the utility model, diaphragm 5 is provided with sealing ring 6, sealing ring 6 is provided with extrusion part, second valve block 12 is provided with annular installation groove 61, sealing ring 6 is arranged in installation groove 61, first valve block 11 is provided with groove 62, the extrusion part on sealing ring 6 can extrude part of diaphragm 5 in groove 62, and groove 62 is V-shaped. The design of annular installation groove 61 makes sealing ring 6 can be simply and quickly installed in place, and has higher positioning accuracy. By installing sealing ring 6 directly into the groove, misplacement and uneven pressure distribution during installation can be avoided, and poor sealing caused by improper installation is reduced. In some high-pressure or high-speed fluid control applications, sealing ring 6 needs to withstand large pressure difference and fluid impact. By designing V-shaped groove 62, sealing ring 6 can better adapt to these working conditions and maintain stable sealing effect. The shape of V-shaped groove 62 helps to provide a larger contact area when sealing ring 6 is compressed, making the sealing effect stronger.

[0035] In some embodiments of the utility model, the transition part 33 is arranged between the first throttling hole 31 and the second throttling hole 32, and the transition part 33 is used for gradually reducing the flow rate of fluid from the second throttling hole 32 to the first throttling hole 31. The diameter of the transition part 33 gradually decreases along the direction close to the diaphragm 5. The conical design of the transition part 33 helps to slow down the sharp change of fluid flow. In particular, when the fluid passes through the second throttling hole 32 and the first throttling hole 31 with a difference in cross-sectional area, if there is no transition section, the sharp change of fluid flow rate may cause turbulence, which not only affects the flow control accuracy of the system, but also may cause noise and vibration. The design of the conical transition part 33 can effectively slow down the speed change of the gas flow or the liquid flow, make the fluid flow more stable, avoid the turbulence caused by the too large pressure difference when the fluid flows from the large hole to the small hole, and improve the operation efficiency and stability of the system. In addition, when the fluid passes through the transition part 33, the conical transition can optimize the contact mode of the fluid and the pipeline or the valve body 1, and reduce the friction between the fluid and the pipeline. In this way, not only the energy loss in the fluid flow process can be reduced, but also the transmission efficiency of the fluid can be improved.

[0036] In some embodiments of the utility model, the diameter of the second throttling hole 32 is not less than 2mm, and the diameter of the first throttling hole 31 is 0.1mm-1mm. The throttling holes with different diameters can help to realize more fine flow regulation and optimize the gas flow in different working environments.

[0037] In some embodiments of the utility model, the second valve block 12 is provided with a gas joint 7, the second valve block 12 is provided with an inlet gas flow channel 2, the gas joint 7 is used for introducing the positive pressure gas or the negative pressure gas into the inlet gas flow channel 2, and the inlet gas flow channel 2 and the second throttling hole 32 are in communication. The design of the gas joint 7 can provide the connection with the external gas source, and then provide the positive pressure or negative pressure gas for the valve body 1. This makes the valve body 1 can adjust the gas flow direction or pressure according to the needs, realizes more flexible gas control. When the gas joint 7 introduces the compressed air, the speed is reduced through the second throttling hole 32, the transition part 33 and the first throttling hole 31, so that the diaphragm 5 is softly attached to the left plane of the first valve block 11, so that the flow channel 2 of the liquid is closed, and the pressure mutation of the liquid is reduced. When the gas joint 7 introduces the vacuum, the speed is reduced through the second throttling hole 32, the transition part 33 and the first throttling hole 31, so that the diaphragm 5 is softly attached to the inner wall of the gas chamber 4, so that the flow channel 2 of the liquid is closed, and the pressure mutation of the liquid is reduced. The above-mentioned diaphragm 5 movement process realizes the cutting of the liquid and the flow of the liquid.

[0038] In some embodiments of the utility model, the second throttling hole 32 is provided with a plug 8, the plug 8 is used for plugging one side of the second throttling hole 32 away from the first throttling hole 31. By setting the plug 8 on the side of the second throttling hole 32 away from the first throttling hole 31, the leakage or entry of fluid or gas in this direction can be effectively prevented, and the system is more sealed during operation. The setting of the plug 8 makes part of the second throttling hole 32 become a closed area, which can simplify the structural design of the valve body 1 or the flow channel 2. In addition, the plug 8 is detachably arranged on the second valve block 12, which is convenient for maintenance personnel to check, clean or replace. In this way, if a problem occurs during use of the equipment, the flow state of the second throttling hole 32 can be quickly checked to ensure that the equipment returns to normal operation.

[0039] In some embodiments of the utility model, the air chamber 4 is a spherical air chamber 4, and the spherical air chamber 4 is concave to the first valve block 11. The use of the spherical air chamber 4 can make the diaphragm 5 form more uniform contact on its surface. The diaphragm 5 is made of elastic material and can better adapt to the shape of the contact surface, especially when subjected to pressure changes, it can more uniformly fit the surface, avoiding poor contact due to excessive material rigidity. When vacuum is introduced, the spherical shape helps the diaphragm 5 to fit the inner surface of the air chamber 4 more closely. When dry gas is introduced, the spherical air chamber 4 is more consistent with the movement of fluid mechanics, thereby reducing interference during fluid or gas flow.

[0040] In summary, the utility model on the one hand slows down the flow rate of the gas through the design of the throttling part 3, thereby making the movement of the diaphragm 5 more gentle and ensuring the stability of the output flow; on the other hand, by ingeniously using the original material of the valve body 1, the additional speed regulating valve or throttling joint is avoided, thereby saving space and cost, reducing the shape coefficient and improving the efficiency of the overall system. The combination of the two not only improves the performance of the diaphragm valve, but also has significant advantages in economy and compactness.

[0041] In the description of the present application, it should be pointed out that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the utility model and simplifying the description, and therefore cannot be understood as limiting the device or element indicated or implied to have a particular orientation, configuration and operation, therefore cannot be understood as limiting the utility model. In addition, the terms "first" and "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0042] Unless otherwise defined, the terms "mounting", "connected", "connecting", "fixed", "fixing" should be construed as broad terms, for example, can be fixed connection, can also be detachable connection; can be mechanical connection, can also be electrical connection; can be directly connected, can also be indirectly connected through an intermediate medium, can be the internal communication of two elements or the interaction relationship of two elements. For those skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0043] Unless otherwise specified and limited, "on" or "under" of the first feature to the second feature can include that the first feature and the second feature are in direct contact, or the first feature and the second feature are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "above" of the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" of the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature

[0044] Although the embodiments of the utility model are described in detail above, it is obvious for those skilled in the art that various modifications and changes can be made to these embodiments. However, it should be understood that such modifications and changes are within the scope and spirit of the utility model described in the claims. Moreover, the utility model described herein can have other embodiments, and can be implemented or realized in various ways.

Claims

1. A fluid on-off diaphragm valve characterized by, The utility model relates to a valve, comprising: a valve body comprising a first valve block and a second valve block, a containing space being formed between the first valve block and the second valve block, a flow channel being formed in the first valve block, a throttling portion and a gas chamber being formed in the second valve block, the throttling portion and the gas chamber being in communication with each other; a diaphragm being arranged in the containing space, the diaphragm being located between the flow channel and the throttling portion, the diaphragm being capable of blocking or opening the flow channel, the throttling portion being used for slowing down the movement speed of the diaphragm.

2. A fluid on-off diaphragm valve according to claim 1 wherein, The throttling portion comprises a first throttling hole and a second throttling hole, the diameter of the first throttling hole being smaller than the diameter of the second throttling hole, the first throttling hole and the second throttling hole being sequentially close to the diaphragm.

3. A fluid on-off diaphragm valve according to claim 1 wherein, A sealing ring is arranged on the diaphragm, an annular mounting groove being formed in the second valve block, the sealing ring being arranged in the mounting groove, a groove being formed in the first valve block, the sealing ring having a pressing portion, the diaphragm being capable of being pressed in the groove by the pressing portion.

4. A fluid on-off diaphragm valve according to claim 2 wherein, A transition portion is arranged between the first throttling hole and the second throttling hole, the transition portion being used for gradually reducing the flow rate of fluid from the second throttling hole to the first throttling hole.

5. A fluid on-off diaphragm valve according to claim 4 wherein, The diameter of the transition portion gradually decreases in the direction close to the diaphragm.

6. A fluid on-off diaphragm valve according to claim 2 wherein, The diameter of the second throttling hole is not less than 2 mm, and the diameter of the first throttling hole is 0.1 mm to 1 mm.

7. A fluid on-off diaphragm valve according to claim 2 wherein, A gas joint is arranged on the second valve block, an air inlet flow channel being formed in the second valve block, the gas joint being used for introducing positive pressure gas or negative pressure gas into the air inlet flow channel, the air inlet flow channel being in communication with the second throttling hole.

8. A fluid on-off diaphragm valve according to claim 2 wherein, A plug is arranged on the second throttling hole, the plug being used for blocking one side of the second throttling hole away from the first throttling hole.

9. A fluid on-off diaphragm valve according to claim 1 wherein, The gas chamber is a spherical gas chamber, the spherical gas chamber being concave to the first valve block.

10. A fluid on-off diaphragm valve according to claim 1 wherein, The flow channel comprises a first flow channel and a second flow channel, the first flow channel and the second flow channel being respectively used for the inflow and outflow of liquid.

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