Lissajous optical fiber scanner with double driving parts

Abstract

The utility model discloses a dual-driving-part Lissajous optical fiber scanner, which comprises a cylindrical piezoelectric actuating part, a sheet-shaped piezoelectric actuating part and an optical fiber, and is characterized in that the rear end of the sheet-shaped piezoelectric actuating part is fixedly connected with the cylindrical body of the cylindrical piezoelectric actuating part, and the front end of the sheet-shaped piezoelectric actuating part vibrates along the vertical direction; the sheet-shaped piezoelectric actuating part and the cylindrical body are provided with an overlapping part in the front-back direction; the sheet-shaped piezoelectric actuating part and the overlapping part enable a combination part composed of the cylindrical piezoelectric actuating part, the sheet-shaped piezoelectric actuating part and the optical fiber to have a difference value between a certain-order inherent frequency and a V-order inherent frequency, wherein the certain-order inherent frequency is closest to the V-order inherent frequency in the horizontal direction of the combination part in the vertical direction of the combination part. According to the invention, the inherent frequencies of the cylindrical body in the two driving directions are allowed to be the same or close, the processing difficulty of the piezoelectric actuating part of the Lissajous scanner is reduced, and the processing efficiency and the yield are remarkably improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical fiber scanner structure, and particularly relates to a double-driving Lissajous optical fiber scanner. BACKGROUND

[0002] The optical fiber scanner is a display technology using a scanning driver to control the swing of an optical fiber while the light emitted by the optical fiber, which is mainly used in the technical fields of optical fiber scanning display technology, optical fiber scanning endoscope technology, optical fiber scanning radar and the like. When the optical fiber scanner is applied to image display, the color of the pattern irradiated by the technology is sharp and saturated, the contrast is high, the brightness is high, and the structure volume is very small.

[0003] The optical fiber scanner uses the mechanical resonance principle to make the cantilever of the optical fiber realize a large scanning range. The scanning mode of the scanning driver can be divided into spiral scanning, grid scanning and Lissajous scanning. The miniature piezoelectric scanning device of the Lissajous scanning generally has two driving parts, which vibrate along two directions simultaneously. The closer the driving frequencies of the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and theoretically, the closer the driving frequencies of the two directions are, the better. However, the closer the inherent frequencies used in the two directions of the scanner are, the more obvious the vibration coupling effect is, which can deteriorate the scanning trajectory and cause uncontrolled components in the scanning trajectory, resulting in distortion of the scanning image, which is difficult to completely eliminate through post-processing. Therefore, the inherent frequencies used in the two directions of the Lissajous scanner preferably have a precise difference range, so that neither coupling effect is caused due to too small difference nor uniformity is not met due to too large difference.

[0004] However, the Lissajous scanner with the inherent frequencies used in the two directions having a precise difference requires extremely high processing precision, and neither the cost of the processing equipment nor the yield can be guaranteed. CONTENT OF THE INVENTION

[0005] The present application provides a double-driving Lissajous optical fiber scanner to reduce the processing difficulty and improve the processing yield.

[0006] In order to achieve the above application purposes, the present application provides a double-driving Lissajous optical fiber scanner, which comprises a cylindrical piezoelectric actuating part, a sheet-shaped piezoelectric actuating part fixedly connected with the cylindrical piezoelectric actuating part, and an optical fiber fixedly arranged on the sheet-shaped piezoelectric actuating part in a cantilever support mode,

[0007] The cylindrical piezoelectric actuating part comprises a cylindrical body, the axial extension direction of the cylindrical body is the front-rear direction, the rear end of the cylindrical body is fixedly connected with a base to be supported by the base,

[0008] At least one side of the left and right sides of the cylindrical body is provided with a first piezoelectric sheet, and the front end of the cylindrical body is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet,

[0009] The sheet-shaped piezoelectric actuating part is arranged along the horizontal direction, is located at the front side of the cylindrical body, and is fixedly connected to the cylindrical body at the rear end. The front end of the sheet-shaped piezoelectric actuating part vibrates along the vertical direction. The optical fiber is fixedly arranged at the front end of the sheet-shaped piezoelectric actuating part in a cantilever support manner. The sheet-shaped piezoelectric actuating part and the cylindrical body have an overlapping part in the front-rear direction. The sheet-shaped piezoelectric actuating part and the overlapping part make the combined part composed of the cylindrical piezoelectric actuating part, the sheet-shaped piezoelectric actuating part and the optical fiber have a natural frequency in the horizontal direction greater than the same order natural frequency of the combined part in the vertical direction, and make the combined part have a difference between a certain order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction, and V is an integer greater than or equal to 1.

[0010] The application utilizes the shape structure and / or size parameter adjustment of the sheet-shaped piezoelectric actuating part and the overlapping part to make the natural frequencies of the combined part in two directions meet the requirements of being close enough to ensure good scanning effect and having uniform and dense scanning grid, and also have enough difference to make the vibration of the combined part in two directions not coupled.

[0011] The difference meets the requirements that the vibration of the combined part in the horizontal direction and the vibration in the vertical direction do not couple when the piezoelectric actuating part performs Lissajous scanning under the driving of the driving signal. Generally, the difference is in the range of 10 Hz to 12 KHz. Further preferably, the difference is in the range of 1 KHz to 10 KHz. The value of the V order natural frequency of the cantilever in the horizontal direction is selected according to the selected scanner, as long as the difference meets the requirements that the scanner cantilever has enough amplitude when the piezoelectric actuating part performs Lissajous scanning under the driving, and the vibration of the scanner cantilever in the horizontal direction and in the vertical direction does not couple. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0012] Preferably, the natural frequency of the cylindrical body in the horizontal direction and the same order natural frequency in the vertical direction are the same or similar. The cylindrical body meeting such requirements is of regular shape and rotational symmetry structure, so that the processing difficulty of the cylindrical body is low, the processing error is easy to control, and the yield is high, such as a cylindrical body or a square cylindrical body.

[0013] Optionally, any one side of the left and right sides of the cylindrical body is provided with a first piezoelectric sheet, and the front end of the cylindrical body is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet. The number of the first piezoelectric sheets can be one, two or more. When the number of the first piezoelectric sheets is two or more, each first piezoelectric sheet expands and contracts synchronously and equally.

[0014] Optionally, the first piezoelectric sheet is arranged on the left and right sides of the cylindrical body, and the first piezoelectric sheet arranged on the left side and the first piezoelectric sheet arranged on the right side synchronously and reversely stretch and contract by the same length to drive the front end of the cylindrical body to vibrate left and right in the horizontal direction. The number of the first piezoelectric sheets arranged on the same side can be one, two or more. When the number of the first piezoelectric sheets arranged on the same side is two or more, the first piezoelectric sheets arranged on the same side synchronously stretch and contract by the same length.

[0015] Preferably, the surface of the cylindrical body on which the first piezoelectric sheet is arranged is a plane, so as to facilitate the arrangement of the piezoelectric sheet. Further optionally, the surface of the cylindrical body on which the first piezoelectric sheet is arranged can be the inner surface of the cylindrical body or the outer surface of the cylindrical body.

[0016] Further preferably, when the first piezoelectric sheet is arranged on the left and right sides of the cylindrical body, the first piezoelectric sheets arranged on the left and right sides of the cylindrical body are symmetrically arranged, so as to drive the cylindrical body to accurately vibrate left and right in the horizontal direction without generating a displacement component in the vertical direction.

[0017] Optionally, the sheet-shaped piezoelectric actuating part is a single piezoelectric sheet actuator or a double piezoelectric sheet actuator.

[0018] The one or more technical solutions in the application have at least the following technical effects or advantages:

[0019] The application makes the piezoelectric actuating part of the Lissajous scanner itself not necessarily have a specific difference in the inherent frequencies in the two driving directions, and also avoids the coupling of the vibrations in the two driving directions, thereby reducing the processing difficulty and the requirement for processing precision. Further preferably, the application allows the inherent frequencies of the cylindrical body in the two driving directions to be the same or close to each other, and allows the cylindrical body itself to be a rotationally symmetric structure, which further reduces the processing difficulty of the piezoelectric actuating part of the Lissajous scanner, and significantly improves the processing efficiency and the yield. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 Fig. 1 is a structural schematic view of the application;

[0021] Figure 2 Fig. 2 is a structural schematic view of the application in the front and rear directions;

[0022] Figure 3 Fig. 3 is a structural schematic view of another embodiment of the application;

[0023] Figure 4 Fig. 4 is a structural schematic view of a third embodiment of the application;

[0024] Figure 5 Fig. 5 is a structural schematic view of a fourth embodiment of the application;

[0025] Figure 6 This is a schematic diagram of the structure of the fifth embodiment of the present utility model;

[0026] Figure 7 This is a schematic diagram of the structure of the sixth embodiment of the present utility model;

[0027] Figure 8 This is a structural schematic diagram of the seventh embodiment of the present utility model;

[0028] Figure 9 This is a schematic diagram of the structure of the eighth embodiment of the present utility model;

[0029] Figure 10 This is a structural schematic diagram of the ninth embodiment of the present utility model;

[0030] Figure 11 for Figure 10 The schematic diagram of the front view of the cylindrical body in the embodiment shown is shown.

[0031] Figure 12 This is a schematic diagram of the structure of the tenth embodiment of the present utility model;

[0032] Figure 13 for Figure 12 A schematic diagram of the front view structure of the cylindrical body in the embodiment shown. Detailed Implementation

[0033] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0034] Example 1:

[0035] like Figure 1 , Figure 2 As shown, a dual-drive Lissajous fiber optic scanner includes a cylindrical piezoelectric actuator, a sheet-like piezoelectric actuator 103 fixedly connected to the cylindrical piezoelectric actuator, and an optical fiber 104 fixedly mounted on the sheet-like piezoelectric actuator 103 in a cantilevered manner.

[0036] The cylindrical piezoelectric actuator includes a cylindrical body 100, with the axial extension direction of the cylindrical body 100 as the front-rear direction. The rear end of the cylindrical body 100 is fixedly connected to the base 200 and supported by the base 200.

[0037] At least one side of the cylindrical body 100 is provided with a first piezoelectric sheet 101, and the front end of the cylindrical body 100 is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101,

[0038] The sheet-shaped piezoelectric actuating part 103 is arranged along the horizontal direction, is located at the front side of the cylindrical body 100, and is fixedly connected to the rear end of the cylindrical body 100. The front end of the sheet-shaped piezoelectric actuating part 103 vibrates along the vertical direction. The optical fiber 104 is fixedly arranged at the front end of the sheet-shaped piezoelectric actuating part 103 in a cantilever support manner. The sheet-shaped piezoelectric actuating part 103 and the cylindrical body 100 have a coincident part 105 in the front-rear direction. The sheet-shaped piezoelectric actuating part 103 and the coincident part 105 make the combined part composed of the cylindrical piezoelectric actuating part, the sheet-shaped piezoelectric actuating part 103 and the optical fiber 104 have a natural frequency in the horizontal direction greater than the same order natural frequency of the combined part in the vertical direction, and make the combined part have a difference between a certain order natural frequency in the vertical direction closest to a V order natural frequency in the horizontal direction and the V order natural frequency in the horizontal direction, and V is an integer greater than or equal to 1.

[0039] The combined part has a first order natural frequency, a second order natural frequency, a third order natural frequency, …, and an N order natural frequency in the vertical direction. One of the natural frequencies (for example, a U order natural frequency, U is an integer greater than or equal to two) is closest to the V order natural frequency in the horizontal direction (V is less than U). The closer the driving frequencies in the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and the more the number of points is. In theory, the closer the driving frequencies in the two directions are, the better. However, the closer the natural frequencies used by the combined part in the two directions are, the more obvious the coupling effect will be. Therefore, the shape structure and / or size parameter of the sheet-shaped piezoelectric actuating part 103 and the coincident part 105 are adjusted so that the natural frequencies of the combined part used in the two directions are close enough to ensure good scanning effect and have a uniform and dense scanning grid, and at the same time have a sufficient difference to prevent the vibration of the combined part in the two directions from being coupled.

[0040] The difference satisfies that when the piezoelectric actuating part is driven to perform Lissajous scanning, the vibration of the combined part in the horizontal direction and the vibration in the vertical direction will not be coupled. Generally, the difference is in the range of 10 Hz to 12 KHz. Further preferably, the difference is in the range of 1 KHz to 10 KHz. The value of the V order natural frequency in the horizontal direction of the scanner cantilever is selected according to the selected scanning device, as long as the difference satisfies that when the piezoelectric actuating part is driven to perform Lissajous scanning, the scanner cantilever has a sufficient amplitude, and the vibration of the scanner cantilever in the horizontal direction and in the vertical direction will not be coupled. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0041] Preferably, the inherent frequency of the cylindrical body 100 in the horizontal direction and the same order inherent frequency in the vertical direction are the same or similar, the cylindrical body 100 meeting such requirements is of regular shape and rotationally symmetric structure, so that the cylindrical body 100 has low processing difficulty, processing error is easy to control, and the yield is high, such as a cylindrical body or a square cylindrical body.

[0042] Optionally, any one of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101, and the front end of the cylindrical body 100 is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of first piezoelectric sheets 101 can be one, two or more. When the number of first piezoelectric sheets 101 is two or more, each first piezoelectric sheet 101 synchronously and equally expands and contracts.

[0043] Optionally, the left and right sides of the cylindrical body 100 are both provided with a first piezoelectric sheet 101, and the first piezoelectric sheet 101 on the left side synchronously and reversely expands and contracts with the first piezoelectric sheet 101 on the right side to drive the front end of the cylindrical body 100 to vibrate left and right along the horizontal direction. The number of first piezoelectric sheets 101 on the same side can be one, two or more. When the number of first piezoelectric sheets 101 on the same side is two or more, the first piezoelectric sheets 101 on the same side synchronously and equally expand and contract.

[0044] Preferably, the surface of the cylindrical body 100 provided with the first piezoelectric sheet 101 is a plane, so as to facilitate the arrangement of the piezoelectric sheet. Further optionally, the surface of the cylindrical body 100 provided with the first piezoelectric sheet 101 can be the inner surface of the cylindrical body 100 or the outer surface of the cylindrical body 100.

[0045] Further preferably, when the left and right sides of the cylindrical body 100 are both provided with a first piezoelectric sheet 101, the first piezoelectric sheets 101 on the left and right sides of the cylindrical body 100 are symmetrically arranged to drive the cylindrical body 100 to accurately vibrate left and right along the horizontal direction, without generating a displacement component in the vertical direction.

[0046] Optionally, the sheet-shaped piezoelectric actuator 103 is a single piezoelectric sheet actuator or a double piezoelectric sheet actuator.

[0047] The present application makes the piezoelectric actuator of the Lissajous scanner itself not necessarily have a specific difference in the inherent frequency in the two driving directions, and also avoids coupling of vibration in the two driving directions, thereby reducing the processing difficulty and the requirement for processing accuracy; further preferably, the present application allows the inherent frequency of the cylindrical body 100 in the two driving directions to be the same or similar, and allows the cylindrical body 100 itself to be a rotationally symmetric structure, which further reduces the processing difficulty of the piezoelectric actuator of the Lissajous scanner, and significantly improves the processing efficiency and yield.

[0048] Embodiment 2:

[0049] As shown in Figure 1 , Figure 2 A double-drive Lissajous fiber scanner, comprising a cylindrical piezoelectric actuating part, a sheet piezoelectric actuating part 103 fixedly connected with the cylindrical piezoelectric actuating part, and a fiber 104 fixedly arranged on the sheet piezoelectric actuating part 103 in a cantilever support manner,

[0050] The cylindrical piezoelectric actuating part comprises a cylindrical body 100, with the axis extension direction of the cylindrical body 100 as the front-rear direction, and the rear end of the cylindrical body 100 is fixedly connected with a base 200 to be supported by the base 200,

[0051] At least one side of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101, and the first piezoelectric sheet 101 drives the front end of the cylindrical body 100 to vibrate left and right along the horizontal direction through expansion and contraction,

[0052] The sheet piezoelectric actuating part 103 is arranged along the direction parallel to the horizontal plane, and is located at the front side of the cylindrical body 100, and the rear end thereof is fixedly connected with the cylindrical body 100. The left and right side walls of the cylindrical body 100 are both provided with mounting grooves 106 for connecting the sheet piezoelectric actuating part 103, and the rear end of the sheet piezoelectric actuating part 103 is partially inserted into the mounting grooves 106 and fixedly connected with the cylindrical body 100. The front end of the sheet piezoelectric actuating part 103 vibrates along the vertical direction, and the fiber 104 is fixedly arranged on the front end of the sheet piezoelectric actuating part 103 in a cantilever support manner. The sheet piezoelectric actuating part 103 and the cylindrical body 100 have a coincident part 105 in the front-rear direction. The part of the sheet piezoelectric actuating part 103 inserted into the mounting grooves 106 and the part of the cylindrical body 100 coincident with the part of the sheet piezoelectric actuating part 103 in the front-rear direction constitute the coincident part 105. The sheet piezoelectric actuating part 103 and the coincident part 105 make the combined part composed of the cylindrical piezoelectric actuating part, the sheet piezoelectric actuating part 103 and the fiber 104 have a natural frequency in the horizontal direction greater than the same order natural frequency of the combined part in the vertical direction, and make the combined part have a difference between the U order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction. In this embodiment, the V order is the first order, and the U order is the second order.

[0053] Of course, this is only the parameter selection of this embodiment. In other embodiments of the same structure type as this embodiment, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.

[0054] Specifically, the shape structure and / or the size parameter of the piezoelectric actuating part 103 and the overlapping part 105 are adjusted so that the combined part in two directions satisfies the condition that the frequencies are close enough to ensure good scanning effect and have uniform and dense scanning grid, and the frequencies are different enough to prevent the vibration of the combined part in two directions from being coupled.

[0055] The difference satisfies the condition that when the piezoelectric actuating part is driven to perform Lissajous scanning, the vibration of the combined part in the horizontal direction and the vibration in the vertical direction are not coupled. Generally, the difference is in the range of 10 Hz to 12 KHz. Further preferably, the difference is in the range of 1 KHz to 10 KHz. The difference is selected according to the value of the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies the condition that when the piezoelectric actuating part is driven to perform Lissajous scanning, the scanner cantilever has sufficient amplitude, and the vibration of the scanner cantilever in the horizontal direction and the vibration in the vertical direction are not coupled. For those skilled in the art, the numerical selection according to the above description is a conventional technical means in the art.

[0056] Optionally, the mounting groove 106 can be located at the middle, upper or lower part of the left and right side walls of the cylindrical body 100 in the vertical direction, which is not limited.

[0057] Optionally, the piezoelectric actuating part 103 is a single piezoelectric sheet actuator or a double piezoelectric sheet actuator.

[0058] Optionally, as shown in Figure 1 , the natural frequency of the cylindrical body 100 in the horizontal direction is the same as the natural frequency in the vertical direction, and the outer contour is square, and the center hole with square or circular contour coaxial with the outer contour is arranged in the inner part.

[0059] Optionally, as shown in Figure 3 , the natural frequency of the cylindrical body 100 in the horizontal direction is the same as the natural frequency in the vertical direction, and the outer contour is circular, and the center hole with square or circular contour coaxial with the outer contour is arranged in the inner part.

[0060] In this embodiment, the piezoelectric sheet attached to the outer surface or inner surface of the cylindrical body 100 is a flat plate type piezoelectric sheet or an arc-shaped piezoelectric sheet which cooperates with the outer surface or inner surface of the cylindrical body 100, and is adaptively selected according to the specific working conditions. On this basis, the setting mode of the first piezoelectric sheet 101 in this embodiment is the same as that in Embodiment 1.

[0061] Embodiment 3:

[0062] As shown in Figure 4 , Figure 2As shown, a double driving part Lissajous fiber scanner comprises a cylindrical piezoelectric actuating part, a sheet piezoelectric actuating part 103 fixedly connected with the cylindrical piezoelectric actuating part, and a fiber 104 fixedly arranged on the sheet piezoelectric actuating part 103 in a cantilever support manner,

[0063] The cylindrical piezoelectric actuating part comprises a cylindrical body 100, the axis extension direction of the cylindrical body 100 is the front-rear direction, the rear end of the cylindrical body 100 is fixedly connected with a base 200, and the cylindrical body 100 is supported by the base 200,

[0064] At least one side of the left and right sides of the cylindrical body 100 is provided with a first piezoelectric sheet 101, the first piezoelectric sheet 101 drives the front end of the cylindrical body 100 to vibrate left and right along the horizontal direction through expansion and contraction;

[0065] The sheet piezoelectric actuating part 103 is arranged along the direction parallel to the horizontal plane, and is located at the front side of the cylindrical body 100, and the rear end of the sheet piezoelectric actuating part 103 is attached to the upper surface or the lower surface of the cylindrical body 100 and is fixedly connected with the cylindrical body 100, the surface of the cylindrical body 100 for attaching the sheet piezoelectric actuating part 103 is a plane, the front end of the sheet piezoelectric actuating part 103 vibrates along the vertical direction, the fiber 104 is fixedly arranged on the front end of the sheet piezoelectric actuating part 103 in a cantilever support manner, the part of the sheet piezoelectric actuating part 103 attached to the cylindrical body 100 and the part of the cylindrical body 100 coinciding with the part of the sheet piezoelectric actuating part 103 in the front-rear direction constitute a coinciding part 105, the sheet piezoelectric actuating part 103 and the coinciding part 105 make the inherent frequency of the combination part of the cylindrical body 100, the first piezoelectric sheet 101, the second piezoelectric sheet, the sheet piezoelectric actuating part 103 and the fiber 104 in the horizontal direction greater than the same frequency inherent frequency of the combination part in the vertical direction, and make the combination part in the vertical direction have a difference value between the U-order inherent frequency closest to the V-order inherent frequency in the horizontal direction and the V-order inherent frequency in the horizontal direction. In this embodiment, the V-order is the first order, and the U-order is the second order.

[0066] Of course, this is only the parameter selection of this embodiment, in other embodiments of the same structure type as this embodiment, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.

[0067] Specifically, by adjusting the shape structure and / or size parameters of the sheet piezoelectric actuating part 103 and the coinciding part 105, the inherent frequencies of the combination part used in the two directions are simultaneously satisfied to be close enough to ensure good scanning effect and have uniform and dense scanning grid, and at the same time have sufficient difference value to make the vibration of the combination part in the two directions not coupled.

[0068] Preferably, the inherent frequency of the cylindrical body 100 in the horizontal direction and the same order inherent frequency in the vertical direction are the same. Alternatively, the outer contour is square, and a center hole with a square or circular contour is arranged coaxially with the outer contour. Of course, this is not limited, for example, the outer surface is a substantially cylindrical surface, and several planes are arranged rotationally symmetrically, one of which is used to attach the support plate.

[0069] The difference satisfies the condition that when the piezoelectric actuator part performs Lissajous scanning under the driving of the driving signal, the vibration of the combination part in the horizontal direction and the vibration in the vertical direction do not couple. Generally, the difference is in the range of 10 Hz to 12 KHz. Further preferably, the difference is in the range of 1 KHz to 10 KHz. The value is selected according to the selected V-order inherent frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies the condition that when the piezoelectric actuator part performs Lissajous scanning under the driving, the scanner cantilever has sufficient amplitude, and the vibration of the scanner cantilever in the horizontal direction and the vibration in the vertical direction do not couple. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0070] Alternatively, the sheet-shaped piezoelectric actuator part 103 is a single piezoelectric sheet actuator or a double piezoelectric sheet actuator.

[0071] In this embodiment, the piezoelectric sheet attached to the outer surface or the inner surface of the cylindrical body 100 is a flat plate type piezoelectric sheet or an arc-shaped piezoelectric sheet with a shape matching the outer surface or the inner surface of the cylindrical body 100, which is adaptively selected according to specific working conditions. On this basis, the setting mode of the first piezoelectric sheet 101 in this embodiment is the same as that of Embodiment 1.

[0072] Embodiment 4:

[0073] In combination Figure 5 , Figure 2 As shown in FIG. 8, a double-drive Lissajous fiber scanner includes a cylindrical piezoelectric actuator part, a sheet-shaped piezoelectric actuator part 103 fixedly connected to the cylindrical piezoelectric actuator part, and a fiber 104 fixedly arranged on the sheet-shaped piezoelectric actuator part 103 in a cantilever support manner,

[0074] The cylindrical piezoelectric actuator part includes a piezoelectric material cylindrical body 100, the axial extension direction of the piezoelectric material cylindrical body 100 is the front-back direction, the rear end of the piezoelectric material cylindrical body 100 is fixedly connected to the base 200, and the base 200 supports,

[0075] The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, so that the front end of the cylinder body 100 vibrates left and right along the horizontal direction,

[0076] The sheet-shaped piezoelectric actuating part 103 is arranged along the direction parallel to the horizontal plane, and is located at the front side of the piezoelectric material cylinder body 100, and the rear end thereof is fixedly connected with the piezoelectric material cylinder body 100. The front end of the sheet-shaped piezoelectric actuating part 103 vibrates along the vertical direction, the optical fiber 104 is fixedly arranged at the front end of the sheet-shaped piezoelectric actuating part 103 in a cantilever support manner, the sheet-shaped piezoelectric actuating part 103 and the piezoelectric material cylinder body 100 have a coincident part 105 in the front-back direction, and the sheet-shaped piezoelectric actuating part 103 and the coincident part 105 make the combination part composed of the piezoelectric material cylinder body 100, the sheet-shaped piezoelectric actuating part 103 and the optical fiber 104 have a natural frequency in the horizontal direction which is greater than the same order natural frequency of the combination part in the vertical direction, and make the combination part have a difference between the certain order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction, and V is an integer greater than or equal to 1.

[0077] The combination part has a first order natural frequency, a second order natural frequency, a third order natural frequency, …, and an N order natural frequency in the vertical direction, and there is a certain order (for example, U order, U is an integer greater than or equal to two) of the natural frequency closest to the V order natural frequency in the horizontal direction (V is less than U), the closer the driving frequencies in the two directions in the Lissajous scanning, the closer the uniformity (density) of the scanning grid in the two directions, and the more the number of points, and theoretically the closer the driving frequencies in the two directions, the better, but the closer the natural frequencies used by the combination part in the two directions, the more obvious the coupling effect, so that the shape structure and / or size parameter of the sheet-shaped piezoelectric actuating part 103 and the coincident part 105 are adjusted, so that the natural frequencies of the combination part used in the two directions at the same time meet the requirements of being close enough to ensure good scanning effect and have uniform and dense scanning grid, and at the same time have enough difference to make the vibration of the combination part in the two directions not coupled.

[0078] The difference satisfies that the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction do not generate coupling when the combination part performs Lissajous scanning under the driving of the driving signal. Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The difference is selected according to the value of the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuating part performs Lissajous scanning under the driving, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not generate coupling. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0079] Preferably, the piezoelectric material cylinder body 100 has the same or similar natural frequency in the horizontal direction and the same order natural frequency in the vertical direction. The piezoelectric material cylinder body 100 satisfying such requirements has a regular shape and a rotational symmetry structure, so that the piezoelectric material cylinder body 100 has low processing difficulty, easy processing error control, and high yield, such as a cylindrical body or a square cylindrical body.

[0080] Optionally, the inner surface and the outer surface of any one of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, and the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized in the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the cylinder body 100 is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.

[0081] Optionally, the inner surface and the outer surface of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, and the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized in the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the piezoelectric material on the left and right sides synchronously and reversely stretches and contracts by the same length, and the front end of the cylinder body 100 is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.

[0082] Further preferably, when the inner surface and the outer surface of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with the first inner electrode 1011 and the first outer electrode 1012 corresponding thereto, the first inner electrodes 1011 of the left and right sides of the piezoelectric material cylinder body 100 are symmetrically arranged to drive the piezoelectric material cylinder body 100 to accurately vibrate left and right in the horizontal direction without generating a displacement component in the vertical direction.

[0083] The application allows the piezoelectric actuating part of the Lissajous scanner itself to not necessarily have a specific difference in the natural frequency in the two driving directions, and also avoids coupling of the vibrations in the two driving directions, thereby reducing the processing difficulty and the requirement for processing accuracy; further preferably, the application allows the natural frequency of the piezoelectric material cylinder body 100 in the two driving directions to be the same or close, and allows the piezoelectric material cylinder body 100 itself to be a rotationally symmetric structure, which further reduces the processing difficulty of the piezoelectric actuating part of the Lissajous scanner, and significantly improves the processing efficiency and the yield.

[0084] Embodiment 5:

[0085] In combination with FIGS. 1-4, Figure 5 , Figure 2 As shown in FIG. 5, a double-drive Lissajous optical fiber scanner includes a cylindrical piezoelectric actuating part, a sheet-shaped piezoelectric actuating part 103 fixedly connected with the cylindrical piezoelectric actuating part, and an optical fiber 104 fixedly arranged on the sheet-shaped piezoelectric actuating part 103 in a cantilever support manner,

[0086] The cylindrical piezoelectric actuating part includes a piezoelectric material cylinder body 100, with the axial extension direction of the piezoelectric material cylinder body 100 being the front-rear direction, and the rear end of the piezoelectric material cylinder body 100 being fixedly connected with a base 200 to be supported by the base 200,

[0087] The inner surface and the outer surface of at least one side of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with the first inner electrode 1011 and the first outer electrode 1012 corresponding thereto, the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the first outer electrode 1012 is polarized in the thickness direction, the piezoelectric material between the first inner electrode 1011 and the first outer electrode 1012 is driven to stretch and contract in the front-rear direction by the first inner electrode 1011 and the first outer electrode 1012 corresponding thereto, and the front end of the piezoelectric material cylinder body 100 is driven to vibrate left and right in the horizontal direction;

[0088] The piezoelectric actuator 103 is arranged along the horizontal direction, and is located at the front side of the piezoelectric material cylinder body 100. The rear end of the piezoelectric actuator 103 is fixedly connected to the piezoelectric material cylinder body 100. The front end of the piezoelectric actuator 103 vibrates along the vertical direction. The optical fiber 104 is fixedly arranged at the front end of the piezoelectric actuator 103 in a cantilever support manner. The piezoelectric actuator 103 and the piezoelectric material cylinder body 100 have a coincident portion 105 in the front-rear direction. The left and right side walls of the piezoelectric material cylinder body 100 are each provided with a mounting groove 106 for connecting the piezoelectric actuator 103. The rear end of the piezoelectric actuator 103 is inserted into the mounting groove 106 and is fixedly connected to the piezoelectric material cylinder body 100. The portion of the piezoelectric actuator 103 inserted into the mounting groove 106 and the portion of the piezoelectric material cylinder body 100 coincident with the portion of the piezoelectric actuator 103 in the front-rear direction constitute the coincident portion 105. The piezoelectric actuator 103 and the coincident portion 105 make the natural frequency of the combination of the piezoelectric material cylinder body 100, the piezoelectric actuator 103 and the optical fiber 104 in the horizontal direction greater than the same order natural frequency of the combination in the vertical direction, and make the combination have a difference between the U order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction. In this embodiment, the V order is the first order and the U order is the second order.

[0089] Of course, this is only the parameter selection of this embodiment. In other embodiments of the same structure type as this embodiment, V can also be selected as an integer greater than 1, and U can be selected as an integer greater than V.

[0090] Specifically, the shape and / or size parameters of the piezoelectric actuator 103 and the coincident portion 105 are adjusted so that the natural frequencies of the combination in the two directions simultaneously meet the requirements of being close enough to ensure good scanning effect and having uniform and dense scanning grid, and simultaneously meet the requirements of having a sufficient difference to prevent the vibrations of the combination in the two directions from being coupled.

[0091] Optionally, as shown in Figure 5 , the natural frequency of the piezoelectric material cylinder body 100 in the horizontal direction is the same as the same order natural frequency in the vertical direction. The outer contour of the piezoelectric material cylinder body 100 is a square, and a center hole with a square or circular contour is arranged in the piezoelectric material cylinder body 100 coaxially with the outer contour.

[0092] Optionally, as shown in Figure 6 , the natural frequency of the piezoelectric material cylinder body 100 in the horizontal direction is the same as the same order natural frequency in the vertical direction. The outer contour of the piezoelectric material cylinder body 100 is a square, and a center hole with a square or circular contour is arranged in the piezoelectric material cylinder body 100 coaxially with the outer contour.

[0093] The difference satisfies that when the combination part is driven to perform Lissajous scanning, the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction do not generate coupling.

[0094] Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The difference is selected according to the value of the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuator is driven to perform Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not generate coupling. For those skilled in the art, numerical selection according to the above description is a routine technical means in the art.

[0095] Optionally, the mounting groove 106 can be located at the middle, upper or lower part of the left and right side walls of the piezoelectric material cylinder body 100 in the vertical direction, which is not limited.

[0096] Optionally, the sheet-shaped piezoelectric actuator 103 is a single piezoelectric sheet actuator or a double piezoelectric sheet actuator.

[0097] In this embodiment, the first inner electrode 1011 and the first outer electrode 1012, and the second inner electrode and the second outer electrode are arranged in the same way as in Embodiment 4, and the polarization mode, driving mode and driving principle of the corresponding part of the piezoelectric material cylinder body 100 are also the same as in Embodiment 4.

[0098] Embodiment 6:

[0099] In combination with FIGS. 1-5, Figure 7 、 Figure 2 As shown in FIG. 6, a double-drive Lissajous fiber scanner includes a cylindrical piezoelectric actuator, a sheet-shaped piezoelectric actuator 103 fixedly connected to the cylindrical piezoelectric actuator, and a fiber 104 fixedly arranged on the sheet-shaped piezoelectric actuator 103 in a cantilever support manner,

[0100] The cylindrical piezoelectric actuator includes a piezoelectric material cylinder body 100, the axis extension direction of the piezoelectric material cylinder body 100 is the front-back direction, the rear end of the piezoelectric material cylinder body 100 is fixedly connected to a base 200 to be supported by the base 200, the inner surface and the outer surface of at least one side of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 arranged in a corresponding matching manner, the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized in the thickness direction, the piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the piezoelectric material cylinder body 100 is driven to vibrate left and right in the horizontal direction,

[0101] The sheet piezoelectric actuator 103 is arranged in parallel to the horizontal direction, and is located at the front side of the piezoelectric material cylinder body 100, and the rear end of the sheet piezoelectric actuator 103 is attached to the upper surface or the lower surface of the piezoelectric material cylinder body 100, and is fixedly connected with the piezoelectric material cylinder body 100. The surface of the piezoelectric material cylinder body 100 to which the sheet piezoelectric actuator 103 is attached is a plane, the front end of the sheet piezoelectric actuator 103 vibrates in the vertical direction, the optical fiber 104 is fixedly arranged at the front end of the sheet piezoelectric actuator 103 in a cantilever support manner, the part of the sheet piezoelectric actuator 103 attached to the piezoelectric material cylinder body 100 and the part of the piezoelectric material cylinder body 100 coinciding with the part of the sheet piezoelectric actuator 103 in the front-rear direction form a coinciding part 105, the sheet piezoelectric actuator 103 and the coinciding part 105 make the natural frequency of the combination of the piezoelectric material cylinder body 100, the sheet piezoelectric actuator 103 and the optical fiber 104 in the horizontal direction greater than the same order natural frequency of the combination in the vertical direction, and make the combination in the vertical direction have a difference value between the U order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the horizontal direction. In this embodiment, the V order is the first order, and the U order is the second order.

[0102] Of course, this is only the parameter selection of this embodiment, in other embodiments of the same structure type as this embodiment, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.

[0103] Specifically, by adjusting the shape and / or size parameters of the sheet piezoelectric actuator 103 and the coinciding part 105, the natural frequencies of the combination used in the two directions are simultaneously satisfied to be close enough to ensure good scanning effect and have uniform and dense scanning grid, and at the same time have sufficient difference to make the vibration of the combination in the two directions not coupled.

[0104] Preferably, the natural frequency of the piezoelectric material cylinder body 100 in the horizontal direction is the same as the natural frequency in the vertical direction, the outer contour is a square, and a center hole with a square or circular contour coaxial with the outer contour is arranged in the center. Of course, this is not limited, for example, the outer surface is a generally cylindrical surface, and several planes are arranged in rotational symmetry, one of which is used to attach the sheet piezoelectric actuator 103.

[0105] The difference satisfies that the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction do not generate coupling when the combination part performs Lissajous scanning under the driving of the driving signal. Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The difference is selected according to the value of the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuating part performs Lissajous scanning under the driving, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not generate coupling. For those skilled in the art, numerical selection according to the above description is a routine technical means in the art.

[0106] Optionally, the sheet-shaped piezoelectric actuating part 103 is a single piezoelectric sheet actuator or a double piezoelectric sheet actuator.

[0107] The first inner electrode 1011 and the first outer electrode 1012 and the second inner electrode and the second outer electrode in the embodiment are arranged in the same way as in Embodiment 4, and the polarization mode, the driving mode and the driving principle of the piezoelectric material cylinder body 100 corresponding part are also the same as in Embodiment 4.

[0108] Embodiment 7:

[0109] In combination Figure 8 As shown in the figure, a double-drive Lissajous optical fiber scanner includes a cylinder body and an optical fiber 104,

[0110] The axis extension direction of the cylinder body is the front-back direction, the rear end of the cylinder body is fixedly connected with the base 200, and the cylinder body is supported by the base 200,

[0111] The cylinder body is composed of an upper opening base 100 and a sheet-shaped piezoelectric actuating part 103 sealing the upper opening of the base 100, the front end of the sheet-shaped piezoelectric actuating part 103 exceeds the front end of the base 100, the part of the sheet-shaped piezoelectric actuating part 103 connected with the base 100 forms a cylinder coincident part with the base 100, the front end of the sheet-shaped piezoelectric actuating part 103 vibrates in the vertical direction, and the optical fiber 104 is fixedly arranged at the front end of the sheet-shaped piezoelectric actuating part 103 in a cantilever support manner,

[0112] At least one side of the left and right sides of the cylinder coincident part is provided with a first piezoelectric sheet 101, the front end of the cylinder body is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101,

[0113] The sheet piezoelectric actuating part 103 makes the natural frequency of the combination part in the horizontal direction greater than the same order natural frequency of the combination part in the vertical direction, and makes the combination part in the vertical direction have a difference between a certain order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the horizontal direction, V being an integer greater than or equal to 1.

[0114] The combination part has a first order natural frequency, a second order natural frequency, a third order natural frequency,..., and an N order natural frequency in the vertical direction, wherein a certain order (for example, U order, U being an integer greater than or equal to two) of the natural frequencies is closest to the V order natural frequency in the horizontal direction (V is less than U), the closer the driving frequencies in the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and the more the number of points is, and theoretically the closer the driving frequencies in the two directions are, the better, but the closer the natural frequencies used by the combination part in the two directions are, the more obvious the coupling effect is, so that the application adjusts the shape structure and / or size parameters of the sheet piezoelectric actuating part 103 to make the natural frequencies of the combination part used in the two directions meet the requirements of the Lissajous scanning condition, reduce the processing size and precision requirements of the cylindrical body, make the processing difficulty of the cylindrical body low, and make the processing error easy to control and the yield high.

[0115] Thus, the application adjusts the shape structure and / or size parameters of the sheet piezoelectric actuating part 103 to make the vibration frequencies of the combination part in the two directions meet the requirements of the Lissajous scanning condition, reduce the processing size and precision requirements of the cylindrical body, make the processing difficulty of the cylindrical body low, and make the processing error easy to control and the yield high.

[0116] The difference satisfies that the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction do not produce coupling when the combination part is driven by the driving signal to perform Lissajous scanning.

[0117] Generally, the difference is in the range of 10 Hz to 12 KHz. Further preferably, the difference is in the range of 1 KHz to 10 KHz. The value is selected according to the selected V order natural frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies that the scanner cantilever has sufficient amplitude when the piezoelectric actuating part is driven to perform Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not produce coupling. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0118] Optionally, any one of the left and right sides of the cylindrical coincident part is provided with a first piezoelectric sheet 101, and the front end of the cylindrical coincident part is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of first piezoelectric sheets 101 can be one, two or more. When the number of first piezoelectric sheets 101 is two or more, each first piezoelectric sheet 101 expands and contracts synchronously and equally.

[0119] Optionally, the left and right sides of the cylindrical coincident part are provided with first piezoelectric sheets 101, and the first piezoelectric sheet 101 on the left side and the first piezoelectric sheet 101 on the right side expand and contract synchronously and equally in reverse, driving the front end of the cylindrical coincident part to vibrate left and right along the horizontal direction. The number of first piezoelectric sheets 101 on the same side can be one, two or more. When the number of first piezoelectric sheets 101 on the same side is two or more, the first piezoelectric sheets 101 on the same side expand and contract synchronously and equally.

[0120] Preferably, the surface of the cylindrical coincident part provided with the first piezoelectric sheet 101 is a plane, so as to facilitate the arrangement of the piezoelectric sheet. Further optionally, the surface of the cylindrical coincident part provided with the first piezoelectric sheet 101 can be the inner surface of the cylindrical coincident part, or the outer surface of the cylindrical coincident part.

[0121] Further preferably, when the left and right sides of the cylindrical coincident part are provided with first piezoelectric sheets 101, the first piezoelectric sheets 101 on the left and right sides of the cylindrical coincident part are symmetrically arranged, so as to drive the cylindrical coincident part to vibrate accurately left and right along the horizontal direction, without generating a displacement component in the vertical direction.

[0122] The present application makes the piezoelectric actuator of the Lissajous scanner itself not necessarily have a specific difference in the inherent frequency in the two driving directions, and also avoids the coupling of vibration in the two driving directions, thereby reducing the processing difficulty and the requirement for processing accuracy. The present application uses the adjustment of the shape structure and / or size parameters of the sheet-shaped piezoelectric actuator 103 to make the combined part have a vibration frequency in two directions that meets the Lissajous scanning working condition requirement, thereby reducing the processing size and accuracy requirement of the cylindrical body, making the processing difficulty of the cylindrical body low, the processing error easy to control, and the yield high, and significantly improving the processing efficiency and yield.

[0123] Embodiment 8:

[0124] In combination Figure 9 As shown in the figure, a double-drive Lissajous optical fiber scanner includes a cylindrical body and an optical fiber 104,

[0125] The axial extension direction of the cylindrical body is the front-rear direction, and the rear end of the cylindrical body is fixedly connected with the base 200 to be supported by the base 200,

[0126] The barrel-shaped body is composed of an upper opening base body 100 and a sheet-shaped piezoelectric actuating part 103 covering the upper opening of the base body 100, the front end of the sheet-shaped piezoelectric actuating part 103 exceeds the front end of the base body 100, the part where the sheet-shaped piezoelectric actuating part 103 connects with the base body 100 forms a barrel-shaped coincident part, the front end of the sheet-shaped piezoelectric actuating part 103 vibrates in the vertical direction, and the optical fiber 104 is fixedly arranged at the front end of the sheet-shaped piezoelectric actuating part 103 in a cantilever support manner,

[0127] The inner surface and the outer surface of at least one side of the barrel-shaped coincident part are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 arranged in correspondence, the part between the first inner electrode 1011 and the corresponding first outer electrode 1012 of the barrel-shaped coincident part is a piezoelectric material part polarized in the thickness direction, the piezoelectric material part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-rear direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the barrel-shaped body is driven to vibrate left and right in the horizontal direction,

[0128] The sheet-shaped piezoelectric actuating part 103 makes the inherent frequency of the combination part composed of the barrel-shaped body and the optical fiber 104 in the horizontal direction greater than the same order inherent frequency of the combination part in the vertical direction, and makes the combination part in the vertical direction have a difference between a certain order inherent frequency closest to the V order inherent frequency in the horizontal direction and the inherent frequency in the horizontal direction, V being an integer greater than or equal to 1.

[0129] The combination part has a first order inherent frequency, a second order inherent frequency, a third order inherent frequency, …, and an N order inherent frequency in the vertical direction, among which the inherent frequency of a certain order (for example, a U order, U being an integer greater than or equal to two) is closest to the V order inherent frequency in the horizontal direction (V is less than U), the closer the driving frequencies in the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and the more the number of points is, theoretically the closer the driving frequencies in the two directions are, but the closer the inherent frequencies of the combination part used in the two directions are, the more obvious the coupling effect will be, therefore the application adjusts the shape structure and / or size parameters of the sheet-shaped piezoelectric actuating part 103, so that the inherent frequencies of the combination part used in the two directions at the same time meet the requirements of being close enough to ensure good scanning effect and have a uniform and dense scanning grid, and at the same time have a sufficient difference, so that the vibration of the combination part in the two directions will not produce coupling. Therefore, the application adjusts the shape structure and / or size parameters of the sheet-shaped piezoelectric actuating part 103 to make the vibration frequencies of the combination part in the two directions meet the Lissajous scanning working condition requirements, reduces the requirements of the processing size and precision of the barrel-shaped body, makes the barrel-shaped body have low processing difficulty, the processing error is easy to control, and the yield is high.

[0130] In this embodiment, the V order is the first order, and the U order is the second order. Of course, this is only the parameter selection of this embodiment. In other embodiments of similar structure types as this embodiment, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.

[0131] The difference satisfies that when the combination part is driven by the driving signal to perform Lissajous scanning, the vibration of the combination part in the horizontal direction and the vibration in the vertical direction do not generate coupling.

[0132] Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The value is selected according to the selected V order natural frequency of the scanner cantilever in the horizontal direction. As long as the difference satisfies that when the piezoelectric actuating part is driven to perform Lissajous scanning, the scanner cantilever has sufficient amplitude, and the vibration of the scanner cantilever in the horizontal direction and the vibration in the vertical direction do not generate coupling, it is acceptable. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0133] Optionally, the inner surface and the outer surface of any one side of the left and right sides of the barrel-shaped coincident part are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 corresponding to the first inner electrode 1011 and the first outer electrode 1012. The part of the barrel-shaped coincident part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012. The front end of the barrel-shaped coincident part is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.

[0134] Optionally, the inner surface and the outer surface of any one side of the left and right sides of the barrel-shaped coincident part are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 corresponding to the first inner electrode 1011 and the first outer electrode 1012. The part of the barrel-shaped coincident part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012. The piezoelectric material parts on the upper and lower sides are synchronously and reversely stretched and contracted in equal length, and the front end of the barrel-shaped coincident part is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 on the same side can be one, two or more.

[0135] Further preferably, when the inner surface and the outer surface of the left and right sides of the barrel-shaped coincident part are respectively provided with the first inner electrode 1011 and the corresponding first outer electrode 1012, the first inner electrodes 1011 on the left and right sides of the barrel-shaped coincident part are symmetrically arranged to drive the barrel-shaped coincident part to accurately vibrate left and right in the horizontal direction, without generating a vertical displacement component.

[0136] This embodiment also has the beneficial effects of Example 7.

[0137] Example 9:

[0138] In combination Figure 10 , Figure 11 As shown in FIG. 1, a double-drive Lissajous fiber scanner includes a cylindrical body and a fiber 104,

[0139] The axis of the cylindrical body extends in the front-rear direction, and the rear end of the cylindrical body is fixedly connected to the base 200 to be supported by the base 200.

[0140] The cylindrical body includes four support columns 105 arranged at four corners and four side plates 106 connecting any two adjacent support columns 105, and the upper side plate 106 is a sheet-shaped piezoelectric actuating part 103, the length of the sheet-shaped piezoelectric actuating part 103 in the front-rear direction is longer than that of the other three side plates 106.

[0141] The rear half of the sheet-shaped piezoelectric actuating part 103 is surrounded by the four support columns 105 and the other three side plates 106 to form a cylindrical coincident part, the front end of the sheet-shaped piezoelectric actuating part 103 vibrates in the vertical direction, and the fiber 104 is fixedly arranged at the front end of the sheet-shaped piezoelectric actuating part 103 in a cantilever support manner.

[0142] At least one side of the left and right sides of the cylindrical coincident part is provided with a first piezoelectric sheet 101, and the front end of the cylindrical body is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101.

[0143] The sheet-shaped piezoelectric actuating part 103 makes the inherent frequency of the combination of the cylindrical body, the first piezoelectric sheet 101 and the fiber 104 in the horizontal direction greater than the same order inherent frequency of the combination in the vertical direction, and makes the combination in the vertical direction have a difference between a certain order inherent frequency closest to the V order inherent frequency in the horizontal direction and the inherent frequency in the horizontal direction, V is an integer greater than or equal to 1.

[0144] The combination part has a first-order natural frequency, a second-order natural frequency, a third-order natural frequency, and an Nth-order natural frequency in the vertical direction, wherein the natural frequency of a certain order (for example, Uth-order, U is an integer greater than or equal to two) is closest to the Vth-order natural frequency of the combination part in the horizontal direction (V is less than U). The closer the driving frequencies of the two directions in the Lissajous scan are, the closer the uniformity (density) of the scan grid in the two directions is, and the more the number of points is. In theory, the closer the driving frequencies of the two directions are, the better. However, the closer the natural frequencies of the combination part used in the two directions are, the more obvious the coupling effect will be. Therefore, the shape structure and / or size parameter of the sheet-shaped piezoelectric actuating part 103 is adjusted so that the natural frequencies of the combination part used in the two directions are close enough to ensure good scanning effect and have a uniform and dense scan grid, and at the same time have a sufficient difference so that the vibration of the combination part in the two directions does not produce coupling. Therefore, the shape structure and / or size parameter of the sheet-shaped piezoelectric actuating part 103 is adjusted to make the vibration frequencies of the combination part in the two directions meet the Lissajous scanning working condition requirements, which reduces the processing size and precision requirements of the cylindrical body, makes the processing difficulty of the cylindrical body low, and the processing error easy to control, and the yield is high.

[0145] At the same time, the rigidity of the support column 105 is greater than that of the side plate 106, which can isolate the mutual deformation interference of the side plate 106 vibrating in the horizontal direction and the side plate 106 vibrating in the vertical direction, and improve the scanning accuracy.

[0146] In the embodiment, the Vth-order is the first-order, and the Uth-order is the second-order. Of course, this is only the parameter selection of the embodiment, and in other embodiments of the similar structure type of the embodiment, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.

[0147] The difference satisfies that when the combination part is driven by the driving signal to perform Lissajous scanning, the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction do not produce coupling.

[0148] Generally, the difference range is 10Hz-12KHz. Further preferably, the difference range is 1KHz-10KHz. The value of the Vth-order natural frequency of the scanner cantilever in the horizontal direction is selected according to the selected scanner cantilever, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuating part is driven to perform Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not produce coupling. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0149] Optionally, the first piezoelectric sheet 101 is arranged on any one of the left and right sides of the cylindrical coincident part, and the front end of the cylindrical coincident part is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of the first piezoelectric sheet 101 can be one, two or more. When the number of the first piezoelectric sheet 101 is two or more, each of the first piezoelectric sheets 101 expands and contracts synchronously and equally.

[0150] Optionally, the first piezoelectric sheet 101 is arranged on any one of the left and right sides of the cylindrical coincident part, and the front end of the cylindrical coincident part is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of the first piezoelectric sheet 101 can be one, two or more. When the number of the first piezoelectric sheet 101 is two or more, each of the first piezoelectric sheets 101 expands and contracts synchronously and equally.

[0151] Optionally, the first piezoelectric sheet 101 is arranged on any one of the left and right sides of the cylindrical coincident part, and the front end of the cylindrical coincident part is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of the first piezoelectric sheet 101 can be one, two or more. When the number of the first piezoelectric sheet 101 is two or more, each of the first piezoelectric sheets 101 expands and contracts synchronously and equally.

[0152] Further preferably, when the first piezoelectric sheet 101 is arranged on the left and right sides of the cylindrical coincident part, the first piezoelectric sheets 101 on the left and right sides of the cylindrical coincident part are arranged symmetrically to drive the cylindrical coincident part to vibrate accurately left and right in the horizontal direction without generating a displacement component in the vertical direction.

[0153] The embodiment also has the beneficial effects of the embodiment 7.

[0154] Embodiment 10:

[0155] In combination with FIGS. 1-9, Figure 12 、 Figure 13 A double-drive Lissajous fiber scanner includes a cylindrical body and a fiber 104,

[0156] The axis of the cylindrical body is taken as the front-rear direction, and the rear end of the cylindrical body is fixedly connected with the base 200 to be supported by the base 200.

[0157] The cylindrical body includes support columns 105 arranged at four corners and four side plates 106 connecting any two adjacent support columns 105, and the side plate 106 on the upper side is a sheet-shaped piezoelectric actuating part 103, the length of the sheet-shaped piezoelectric actuating part 103 in the front-rear direction is longer than the lengths of the other three side plates 106.

[0158] The rear half of the sheet piezoelectric actuator 103 is surrounded by the four support columns 105 and the remaining three side plates 106 to form a cylindrical coincident part, the front end of the sheet piezoelectric actuator 103 vibrates in the vertical direction, and the optical fiber 104 is fixedly arranged at the front end of the sheet piezoelectric actuator 103 in a cantilever support manner,

[0159] The inner surface and the outer surface of at least one side of the left and right sides of the cylindrical coincident part are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, and the part between the first inner electrode 1011 and the corresponding first outer electrode 1012 of the cylindrical coincident part is a piezoelectric material part polarized in the thickness direction, which is driven by the first inner electrode 1011 and the corresponding first outer electrode 1012 to stretch and contract in the front-rear direction, and the front end of the cylindrical body is driven to vibrate left and right in the horizontal direction,

[0160] The support plate makes the natural frequency of the combination of the cylindrical body and the optical fiber 104 in the horizontal direction greater than the same order natural frequency of the combination in the vertical direction, and makes the combination in the vertical direction have a difference between a certain order natural frequency close to the V order natural frequency in the horizontal direction and the natural frequency in the horizontal direction, V is an integer greater than or equal to 1.

[0161] The combination has a first order natural frequency, a second order natural frequency, a third order natural frequency, …, and an N order natural frequency in the vertical direction, and there is a certain order (for example, U order, U is an integer greater than or equal to two) of the natural frequency closest to the V order natural frequency of the combination in the horizontal direction (V is less than U), the closer the driving frequencies of the two directions in the Lissajous scan, the closer the uniformity (density) of the scan grid in the two directions, the more the number of points, theoretically the closer the driving frequencies of the two directions, but the closer the natural frequencies of the combination used in the two directions, the more obvious the coupling effect, so the application adjusts the shape and / or size parameters of the support plate to make the natural frequencies of the combination used in the two directions meet the requirements of the Lissajous scan condition, which reduces the requirements of the machining size and precision of the cylindrical body, makes the machining difficulty of the cylindrical body low, and the machining error easy to control, and the yield rate high.

[0162] At the same time, the rigidity of the support column 105 is greater than that of the side plate 106, which can isolate the mutual deformation interference of the side plate 106 vibrating in the horizontal direction and the side plate 106 vibrating in the vertical direction, and improve the scanning accuracy.

[0163] In this embodiment, the V order is the first order, and the U order is the second order. Of course, this is only the parameter selection of this embodiment. In other embodiments of similar structure types as this embodiment, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.

[0164] The difference satisfies that when the combination part is driven by the driving signal to perform Lissajous scanning, the vibration of the combination part in the horizontal direction and the vibration in the vertical direction do not generate coupling.

[0165] Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The value is selected according to the selected V order natural frequency of the scanner cantilever in the horizontal direction. As long as the difference satisfies that when the piezoelectric actuating part is driven to perform Lissajous scanning, the scanner cantilever has sufficient amplitude, and the vibration of the scanner cantilever in the horizontal direction and the vibration in the vertical direction do not generate coupling, it is acceptable. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0166] Optionally, the inner surface and the outer surface of any one side of the left and right sides of the barrel-shaped coincident part are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 corresponding to the first inner electrode 1011 and the first outer electrode 1012. The part of the barrel-shaped coincident part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012. The front end of the barrel-shaped coincident part is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.

[0167] Optionally, the inner surface and the outer surface of the left and right sides of the barrel-shaped coincident part are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 corresponding to the first inner electrode 1011 and the first outer electrode 1012. The part of the barrel-shaped coincident part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012. The piezoelectric material parts on the upper and lower sides are synchronously and reversely stretched and contracted in equal length, and the front end of the barrel-shaped coincident part is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 on the same side can be one, two or more.

[0168] Further preferably, when the inner surface and the outer surface of the left and right sides of the barrel-shaped coincident part are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 corresponding to the first inner electrode 1011, the first inner electrodes 1011 on the left and right sides of the barrel-shaped coincident part are symmetrically arranged to drive the barrel-shaped coincident part to accurately vibrate left and right in the horizontal direction, without generating a vertical displacement component.

[0169] This example likewise has the advantageous effects that Example 7 has.

[0170] It should be noted that the above-mentioned examples illustrate rather than limit the application, and that those skilled in the art will be able to design many alternative examples without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses shall not be construed as limiting the claim. The word 'comprising' or 'including' does not exclude the presence of elements or steps other than those listed in a claim. The word 'a' or 'an' preceding an element does not exclude the presence of a plurality of such elements. The use of the word 'about' preceding an element does not exclude the presence of the element in an exact or substantially exact state.

[0171] All features disclosed in this specification, other than those in the claims, are examples of specific implementations and do not imply that other implementations are outside the scope of the application, particularly as the specification states that the application is not limited to the specific features.

[0172] Any feature in the present specification, including any accompanying claims, abstract, and drawings, can be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is one of a number of equivalent or similar features.

Claims

1. A dual drive Lissajous fiber scanner, characterized in that, The application relates to a piezoelectric actuator, which comprises a cylindrical piezoelectric actuator, a sheet piezoelectric actuator fixedly connected with the cylindrical piezoelectric actuator, and an optical fiber fixedly arranged on the sheet piezoelectric actuator in a cantilever support mode, The cylindrical piezoelectric actuator comprises a cylindrical body, the axis extension direction of the cylindrical body is the front-back direction, the rear end of the cylindrical body is fixedly connected with a base to be supported by the base, At least one side of the left and right sides of the cylindrical body is provided with a first piezoelectric sheet, and the front end of the cylindrical body is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet, The sheet piezoelectric actuator is arranged along the direction parallel to the horizontal plane, is located at the front side of the cylindrical body, and the rear end thereof is fixedly connected with the cylindrical body; the front end of the sheet piezoelectric actuator vibrates along the vertical direction; the optical fiber is fixedly arranged on the front end of the sheet piezoelectric actuator in a cantilever support mode; the sheet piezoelectric actuator and the cylindrical body have a coincident part in the front-back direction; the sheet piezoelectric actuator and the coincident part make the inherent frequency of the combination part of the cylindrical piezoelectric actuator, the sheet piezoelectric actuator and the optical fiber in the horizontal direction greater than the same order inherent frequency of the combination part in the vertical direction, and make the combination part have a difference between the certain order inherent frequency closest to the V order inherent frequency in the horizontal direction and the V order inherent frequency in the vertical direction, and V is an integer greater than or equal to 1.

2. A dual drive Lissajous fiber scanner as claimed in claim 1, characterized in that, The difference makes the vibration of the combination part in the two directions not coupled.

3. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that The difference ranges from 10 Hz to 12 KHz.

4. A dual drive Lissajous fiber scanner as claimed in claim 3, characterized in that The difference ranges from 1 KHz to 10 KHz.

5. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that, The inherent frequency of the cylindrical body in the horizontal direction is the same as or close to the same order inherent frequency in the vertical direction.

6. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that Any one side of the left and right sides of the cylindrical body is provided with a first piezoelectric sheet, and the front end of the cylindrical body is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet.

7. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that Both the left and right sides of the cylindrical body are provided with the first piezoelectric sheet, the first piezoelectric sheet located at the left side and the first piezoelectric sheet located at the right side synchronously and reversely expand and contract by the same length to drive the front end of the cylindrical body to vibrate left and right along the horizontal direction.

8. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that, The sheet piezoelectric actuator is a single piezoelectric sheet actuator or a double piezoelectric sheet actuator.

9. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that, The surface of the cylindrical body provided with the first piezoelectric sheet is a plane.

10. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that, When the first piezoelectric sheets are arranged on both the left and right sides of the cylindrical body, the first piezoelectric sheets on the left and right sides of the cylindrical body are symmetrically arranged.

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