Lissajous optical fiber scanner with combined cylindrical body

Abstract

The Lissajous optical fiber scanner comprises the cylindrical body and an optical fiber, the cylindrical body is composed of a base body with an upper opening and a supporting plate for sealing and covering part of the upper opening or the whole upper opening of the base body, and the front end of the supporting plate exceeds the front end of the base body. The supporting plate enables a difference value to exist between a certain-order inherent frequency, closest to a V-order inherent frequency in the horizontal direction, of a combined part formed by the cylindrical body, the first piezoelectric plate, the second piezoelectric plate and the optical fiber in the vertical direction and the V-order inherent frequency in the horizontal direction, and V is an integer larger than or equal to 1. The vibration frequencies of the combination part in the two directions meet the requirements of Lissajous scanning working conditions by adjusting the appearance structure and / or size parameters of the supporting plate, the requirements for the machining size and precision of the barrel-shaped body are reduced, the machining difficulty of the barrel-shaped body is low, machining errors are easy to control, the yield is high, and the machining cost is reduced. And the processing efficiency and the yield are obviously improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of optical fiber scanner structure, and particularly relates to a Lissajous optical fiber scanner with a combined barrel body. BACKGROUND

[0002] The optical fiber scanner is a display technology using a scanning driver to control the swing of an optical fiber and the emission of light rays of the optical fiber, and is mainly used in the technical fields of optical fiber scanning display technology, optical fiber scanning endoscope technology, optical fiber scanning radar and the like. When the optical fiber scanner is applied to image display, the color of the pattern irradiated by the technology is sharp and saturated, the contrast is high, the brightness is high, and the structure volume is very small.

[0003] The optical fiber scanner uses the mechanical resonance principle to make the cantilevered optical fiber realize a large scanning range. The scanning mode of the scanning driver can be divided into spiral scanning, grid scanning and Lissajous scanning. The miniature piezoelectric scanning device of the Lissajous scanning generally has two driving parts in two directions, and the scanning device vibrates in two directions at the same time. The closer the driving frequencies in the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and theoretically, the closer the driving frequencies in the two directions are, the better. However, the closer the inherent frequencies used in the two directions of the scanning device are, the more obvious the vibration coupling effect is, which can deteriorate the scanning trajectory and cause uncontrolled components in the scanning trajectory, resulting in distortion of the scanning image, which is difficult to completely eliminate through post-processing. Therefore, the inherent frequencies used in the two directions of the Lissajous scanner preferably have a precise difference range, so that neither coupling effect occurs due to too small difference nor uniformity does not meet the requirements due to too large difference.

[0004] However, the Lissajous scanner with inherent frequencies used in two directions having a precise difference requires extremely high processing precision, and both the cost of processing equipment and the yield cannot be guaranteed. Content of the utility model

[0005] The present application provides a Lissajous optical fiber scanner with a combined barrel body, which can reduce the processing difficulty and improve the processing yield.

[0006] In order to achieve the above-mentioned application purposes, the present application provides a Lissajous optical fiber scanner with a combined barrel body, which comprises a barrel body and an optical fiber, and the axial extension direction of the barrel body is the front-rear direction. The rear end of the barrel body is fixedly connected with a base, and the barrel body is supported by the base,

[0007] The barrel body is composed of an upper opening base body and a support plate with an upper opening or an entire upper opening. The front end of the support plate exceeds the front end of the base body. The part of the support plate connected with the base body forms a barrel coinciding part with the base body. The optical fiber is fixedly arranged at the front end of the support plate in a cantilever support manner.

[0008] At least one side of the left and right sides of the cylindrical coincident part is provided with a first piezoelectric sheet, and the front end of the cylindrical body is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet,

[0009] At least one side of the upper and lower sides of the cylindrical coincident part is provided with a second piezoelectric sheet, and the front end of the cylindrical body is driven to vibrate along the vertical direction by the expansion and contraction of the second piezoelectric sheet,

[0010] The support plate is configured such that the natural frequency of the combination of the cylindrical body, the first piezoelectric sheet, the second piezoelectric sheet, and the optical fiber in the horizontal direction is greater than the same order natural frequency of the combination in the vertical direction, and the combination in the vertical direction has a difference between a certain order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the horizontal direction, and V is an integer greater than or equal to 1.

[0011] The application utilizes the adjustment of the shape and / or size parameters of the support plate to make the natural frequencies of the combination utilized in two directions meet the requirements of being close enough to ensure good scanning effect and having uniform and dense scanning grid, and also have sufficient difference to prevent the vibration of the combination in two directions from being coupled.

[0012] The difference satisfies the requirement that when the combination performs Lissajous scanning under the driving of the driving signal, the vibration of the combination in the horizontal direction and the vibration in the vertical direction will not be coupled.

[0013] Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz.

[0014] Optionally, any one side of the left and right sides of the cylindrical coincident part is provided with a first piezoelectric sheet, and the front end of the cylindrical coincident part is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet. The number of first piezoelectric sheets can be one, two or more. When the number of first piezoelectric sheets is two or more, each first piezoelectric sheet synchronously and equally expands and contracts.

[0015] Also optionally, the left and right sides of the cylindrical coincident part are both provided with first piezoelectric sheets, the first piezoelectric sheet on the left side synchronously and reversely expands and contracts with the first piezoelectric sheet on the right side, and the front end of the cylindrical coincident part is driven to vibrate left and right along the horizontal direction. The number of first piezoelectric sheets on the same side can be one, two or more. When the number of first piezoelectric sheets on the same side is two or more, the first piezoelectric sheets on the same side synchronously and equally expand and contract.

[0016] Optionally, any one of the upper and lower sides of the cylindrical coincident part is provided with a second piezoelectric sheet, and the front end of the cylindrical coincident part is driven to vibrate up and down along the vertical direction by the expansion and contraction of the second piezoelectric sheet. The number of the second piezoelectric sheets can be one, two or more. When the number of the second piezoelectric sheets is two or more, the second piezoelectric sheets are synchronously and equally long in expansion and contraction.

[0017] Optionally, the upper and lower sides of the cylindrical coincident part are both provided with the second piezoelectric sheets, and the second piezoelectric sheets on the upper side and the second piezoelectric sheets on the lower side are synchronously and equally long in expansion and contraction in opposite directions, thereby driving the front end of the cylindrical coincident part to vibrate up and down along the vertical direction. The number of the second piezoelectric sheets on the same side can be one, two or more. When the number of the second piezoelectric sheets on the same side is two or more, the second piezoelectric sheets on the same side are synchronously and equally long in expansion and contraction.

[0018] Preferably, the surface of the first piezoelectric sheet or the second piezoelectric sheet provided on the cylindrical coincident part is a plane, so as to facilitate the arrangement of the piezoelectric sheet. Further optionally, the surface of the first piezoelectric sheet or the second piezoelectric sheet provided on the cylindrical coincident part can be the inner surface of the cylindrical coincident part or the outer surface of the cylindrical coincident part.

[0019] Further preferably, when the first piezoelectric sheets are provided on the left and right sides of the cylindrical coincident part, the first piezoelectric sheets on the left and right sides of the cylindrical coincident part are symmetrically arranged, so as to drive the cylindrical coincident part to accurately vibrate left and right along the horizontal direction without generating a displacement component in the vertical direction; when the second piezoelectric sheets are provided on the upper and lower sides of the cylindrical coincident part, the second piezoelectric sheets on the upper and lower sides of the cylindrical coincident part are symmetrically arranged, so as to drive the cylindrical coincident part to accurately vibrate along the vertical direction without generating a displacement component in the horizontal direction.

[0020] The one or more technical solutions in the present application have at least the following technical effects or advantages:

[0021] The present application makes the piezoelectric actuating part of the Lissajous scanner itself not necessarily have a specific difference in the inherent frequency in the two driving directions, and can also avoid the coupling of the vibrations in the two driving directions, thereby reducing the processing difficulty and the requirement for processing precision. The present application uses the adjustment of the shape structure and / or size parameter of the support plate to make the vibration frequency of the combined part in the two directions meet the Lissajous scanning working condition requirement, thereby reducing the processing size and precision requirement of the cylindrical body, making the processing difficulty of the cylindrical body low, the processing error easy to control, and the yield high, and significantly improving the processing efficiency and yield. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1 FIG. 1 is a structural schematic diagram of the present application;

[0023] Figure 2 FIG. 2 is a structural schematic diagram of another embodiment of the present application;

[0024] Figure 3 Figure 3 is a structural schematic diagram of a third embodiment of the present application;

[0025] Figure 4 Figure 4 is a structural schematic diagram of a fourth embodiment of the present application; Figure 3 Figure 5 is a front structural schematic diagram of a cylindrical body of the embodiment shown in Figure 4;

[0026] Figure 5 Figure 4 is a structural schematic diagram of a fourth embodiment of the present application;

[0027] Figure 6 Figure 5 is a front structural schematic diagram of a cylindrical body of the embodiment shown in Figure 4; Figure 5 Figure 5 is a front structural schematic diagram of a cylindrical body of the embodiment shown in Figure 4. DETAILED DESCRIPTION

[0028] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0029] Embodiment 1:

[0030] Figure 1 shows a Lissajous fiber scanner with a combined cylindrical body, comprising a cylindrical body and a fiber 104, Figure 1 Figure 1 shows a Lissajous fiber scanner with a combined cylindrical body, comprising a cylindrical body and a fiber 104,

[0031] The axis extension direction of the cylindrical body is the front-back direction, and the rear end of the cylindrical body is fixedly connected with the base 200 to be supported by the base 200,

[0032] The cylindrical body is composed of an upper opening base 100 and a support plate 103 which covers part of the upper opening or the entire upper opening of the base 100. The front end of the support plate 103 exceeds the front end of the base 100, and the part of the support plate 103 connected with the base 100 forms a cylindrical coincident part with the base 100. The fiber 104 is fixedly arranged at the front end of the support plate 103 in a cantilever support manner,

[0033] At least one side of the left and right sides of the cylindrical coincident part is provided with a first piezoelectric sheet 101, and the front end of the cylindrical body is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101,

[0034] At least one side of the upper and lower sides of the cylindrical coincident part is provided with a second piezoelectric sheet 102, and the front end of the cylindrical body is driven to vibrate vertically along the vertical direction by the expansion and contraction of the second piezoelectric sheet 102,

[0035] The support plate 103 makes the natural frequency of the combination of the barrel-shaped body, the first piezoelectric sheet 101, the second piezoelectric sheet 102 and the optical fiber 104 in the horizontal direction greater than the same order natural frequency of the combination in the vertical direction, and makes the combination in the vertical direction have a difference between a certain order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the horizontal direction, V being an integer greater than or equal to 1.

[0036] The combination has a first order natural frequency, a second order natural frequency, a third order natural frequency,..., and an N order natural frequency in the vertical direction, wherein a certain order (for example, U order, U being an integer greater than or equal to two) natural frequency is closest to the V order natural frequency in the horizontal direction (V is less than U), the closer the driving frequencies in the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and the more the number of points is, and theoretically the closer the driving frequencies in the two directions are, the better, but the closer the natural frequencies used by the combination in the two directions are, the more obvious the coupling effect is, so the application adjusts the shape and / or size parameters of the support plate 103 to make the natural frequencies of the combination used in the two directions meet the requirements of the Lissajous scanning condition, and at the same time, the difference is sufficient to prevent the vibration of the combination in the two directions from being coupled. In the embodiment, the V order is the first order and the U order is the second order. Of course, this is only the parameter selection of the embodiment, and in other embodiments of the same structure type as the embodiment, V can also be selected as an integer greater than 1, and U can be selected as an integer greater than V.

[0037] Therefore, the application adjusts the shape and / or size parameters of the support plate 103 to make the vibration frequencies of the combination in the two directions meet the requirements of the Lissajous scanning condition, which reduces the requirements for the machining size and precision of the barrel-shaped body, makes the barrel-shaped body easy to machine, the machining error easy to control, and the yield high.

[0038] The difference satisfies that when the combination is driven by the driving signal to perform Lissajous scanning, the vibration of the combination in the horizontal direction and the vibration of the combination in the vertical direction will not be coupled.

[0039] Generally, the difference is in the range of 10 Hz to 12 KHz. Further preferably, the difference is in the range of 1 KHz to 10 KHz. The value is selected according to the selected V order natural frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies that the scanner cantilever has sufficient amplitude when the piezoelectric actuator is driven to perform Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction will not be coupled. For those skilled in the art, the numerical selection according to the above description is a conventional technical means in the art.

[0040] Optionally, any one side of the left and right sides of the cylindrical coincident part is provided with a first piezoelectric sheet 101, and the front end of the cylindrical coincident part is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of the first piezoelectric sheet 101 can be one, two or more. When the number of the first piezoelectric sheet 101 is two or more, each first piezoelectric sheet 101 expands and contracts synchronously and equally.

[0041] Optionally, the left and right sides of the cylindrical coincident part are both provided with a first piezoelectric sheet 101, and the front end of the cylindrical coincident part is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of the first piezoelectric sheet 101 on the same side can be one, two or more. When the number of the first piezoelectric sheet 101 on the same side is two or more, the first piezoelectric sheet 101 on the same side expands and contracts synchronously and equally.

[0042] Optionally, any one side of the upper and lower sides of the cylindrical coincident part is provided with a second piezoelectric sheet 102, and the front end of the cylindrical coincident part is driven to vibrate up and down along the vertical direction by the expansion and contraction of the second piezoelectric sheet 102. The number of the second piezoelectric sheet 102 can be one, two or more. When the number of the second piezoelectric sheet 102 is two or more, the second piezoelectric sheet 102 expands and contracts synchronously and equally.

[0043] Optionally, the upper and lower sides of the cylindrical coincident part are both provided with a second piezoelectric sheet 102, and the front end of the cylindrical coincident part is driven to vibrate up and down along the vertical direction by the expansion and contraction of the second piezoelectric sheet 102. The number of the second piezoelectric sheet 102 on the same side can be one, two or more. When the number of the second piezoelectric sheet 102 on the same side is two or more, the second piezoelectric sheet 102 on the same side expands and contracts synchronously and equally.

[0044] Preferably, the surface of the cylindrical coincident part provided with the first piezoelectric sheet 101 or the second piezoelectric sheet 102 is a plane, so as to facilitate the arrangement of the piezoelectric sheet. Further optionally, the surface of the cylindrical coincident part provided with the first piezoelectric sheet 101 or the second piezoelectric sheet 102 can be the inner surface of the cylindrical coincident part, or the outer surface of the cylindrical coincident part.

[0045] Further preferably, when the left and right sides of the cylindrical coincident part are both provided with the first piezoelectric sheet 101, the first piezoelectric sheet 101 on the left and right sides of the cylindrical coincident part is symmetrically arranged, so as to drive the cylindrical coincident part to accurately vibrate left and right along the horizontal direction, without generating a displacement component in the vertical direction; when the upper and lower sides of the cylindrical coincident part are both provided with the second piezoelectric sheet 102, the second piezoelectric sheet 102 on the upper and lower sides of the cylindrical coincident part is symmetrically arranged, so as to drive the cylindrical coincident part to accurately vibrate up and down along the vertical direction, without generating a displacement component in the horizontal direction.

[0046] The piezoelectric actuating part of the Lissajous scanner does not necessarily have a specific difference in the natural frequency in two driving directions, and the coupling of vibration in the two driving directions can also be avoided, thereby reducing the processing difficulty and the requirement for processing accuracy. The adjustment of the shape structure and / or size parameter of the support plate 103 is used to make the vibration frequency of the combined part in two directions meet the Lissajous scanning working condition requirement, thereby reducing the processing size and accuracy requirement of the barrel-shaped body, making the barrel-shaped body processing difficult, the processing error easy to control, and the good product rate high, so that the processing efficiency and good product rate are significantly improved.

[0047] Embodiment 2:

[0048] In combination Figure 2 As shown in the figure, a Lissajous optical fiber scanner with a combined barrel-shaped body includes a barrel-shaped body and an optical fiber 104,

[0049] The axis extension direction of the barrel-shaped body is the front-back direction, the rear end of the barrel-shaped body is fixedly connected with the base 200, and the barrel-shaped body is supported by the base 200,

[0050] The barrel-shaped body is composed of an upper opening base body 100 and a support plate 103 which covers part of the upper opening or the entire upper opening of the base body 100, the front end of the support plate 103 exceeds the front end of the base body 100, the part where the support plate 103 is connected with the base body 100 forms a barrel-shaped coincident part with the base body 100, and the front end of the support plate 103 is fixedly provided in a cantilever support manner,

[0051] At least one of the inner surface and the outer surface of the left and right sides of the barrel-shaped coincident part is respectively provided with a first inner electrode 1011 and a first outer electrode 1012 which are correspondingly matched, the part of the barrel-shaped coincident part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material part polarized in the thickness direction, the piezoelectric material part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the barrel-shaped body is driven to vibrate left and right in the horizontal direction,

[0052] At least one of the inner surface and the outer surface of the upper and lower sides of the barrel-shaped coincident part is respectively provided with a second inner electrode 1021 and a second outer electrode 1022 which are correspondingly matched, the part of the barrel-shaped coincident part between the second inner electrode 1021 and the second outer electrode 1022 is a piezoelectric material part polarized in the thickness direction, the piezoelectric material part between the second inner electrode 1021 and the second outer electrode 1022 is driven to stretch and contract in the front-back direction by the second inner electrode 1021 and the second outer electrode 1022, and the front end of the barrel-shaped body is driven to vibrate in the vertical direction,

[0053] The support plate 103 makes the natural frequency of the combined part of the barrel body and the optical fiber 104 in the horizontal direction greater than the same order natural frequency of the combined part in the vertical direction, and makes the combined part in the vertical direction have a difference between a certain order natural frequency closest to the V order natural frequency in the horizontal direction and the natural frequency in the horizontal direction, V being an integer greater than or equal to 1.

[0054] The combined part has a first order natural frequency, a second order natural frequency, a third order natural frequency,..., and an N order natural frequency in the vertical direction, where a certain order (for example, U order, U being an integer greater than or equal to two) of the natural frequencies is closest to the V order natural frequency of the combined part in the horizontal direction (V is less than U). The closer the driving frequencies in the two directions in the Lissajous scan are, the closer the uniformity (density) of the scan grid in the two directions is, and the more the number of points is. In theory, the closer the driving frequencies in the two directions are, the better. However, the closer the natural frequencies used by the combined part in the two directions are, the more obvious the coupling effect will be. Therefore, the application adjusts the shape and / or size parameters of the support plate 103 to make the natural frequencies of the combined part in the two directions meet the requirements of the Lissajous scan condition, and at the same time, the vibration of the combined part in the two directions does not produce coupling.

[0055] Therefore, the application adjusts the shape and / or size parameters of the support plate 103 to make the vibration frequencies of the combined part in the two directions meet the requirements of the Lissajous scan condition, which reduces the requirements for the machining size and precision of the barrel body, makes the barrel body easy to machine, the machining error easy to control, and the yield high.

[0056] In the embodiment, the V order is the first order, and the U order is the second order. Of course, this is only the parameter selection of the embodiment. In other embodiments of the same structure type as the embodiment, V can also be selected as an integer greater than 1, and U can be selected as an integer greater than V.

[0057] The difference satisfies that when the combined part is driven by the driving signal to perform the Lissajous scan, the vibration of the combined part in the horizontal direction and the vibration in the vertical direction do not produce coupling.

[0058] Generally, the difference is in the range of 10 Hz to 12 KHz. Further preferably, the difference is in the range of 1 KHz to 10 KHz. The value is selected according to the selected V order natural frequency of the scanner cantilever in the horizontal direction. As long as the difference satisfies that the scanner cantilever has sufficient amplitude when the piezoelectric actuator is driven to perform the Lissajous scan, and the vibration of the scanner cantilever in the horizontal direction and the vibration in the vertical direction do not produce coupling. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.

[0059] Optionally, the inner surface and the outer surface of any one side of the left and right sides of the cylindrical coincident part are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 arranged correspondingly, and the part of the cylindrical coincident part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the cylindrical coincident part is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 on the same side can be one, two or more.

[0060] Optionally, the inner surface and the outer surface of any one side of the left and right sides of the cylindrical coincident part are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 arranged correspondingly, and the part of the cylindrical coincident part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the cylindrical coincident part is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 on the same side can be one, two or more.

[0061] Optionally, the inner surface and the outer surface of any one side of the left and right sides of the cylindrical coincident part are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 arranged correspondingly, and the part of the cylindrical coincident part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the cylindrical coincident part is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 on the same side can be one, two or more.

[0062] Optionally, the inner surface and the outer surface of any one side of the left and right sides of the cylindrical coincident part are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 arranged correspondingly, and the part of the cylindrical coincident part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the cylindrical coincident part is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 on the same side can be one, two or more.

[0063] Further preferably, when the inner surface and the outer surface on the left and right sides of the cylinder type overlapping part are respectively provided with the first inner electrode 1011 and the first outer electrode 1012 corresponding thereto, the first inner electrode 1011 on the left and right sides of the cylinder type overlapping part is symmetrically arranged to drive the cylinder type overlapping part to accurately vibrate left and right along the horizontal direction without generating a displacement component in the vertical direction; when the inner surface and the outer surface on the upper and lower sides of the cylinder type overlapping part are respectively provided with the second inner electrode 1021 and the second outer electrode 1022 corresponding thereto, the second inner electrode 1021 on the upper and lower sides of the cylinder type overlapping part is symmetrically arranged to drive the cylinder type overlapping part to accurately vibrate along the vertical direction without generating a displacement component in the horizontal direction.

[0064] The application makes the piezoelectric actuator of the Lissajous scanner itself not necessarily have a specific difference in the inherent frequency in the two driving directions, and also avoids coupling of vibration in the two driving directions, thereby reducing the processing difficulty and the requirement for processing precision. The application uses adjustment of the shape structure and / or size parameter of the support plate 103 to make the vibration frequency of the combined part in the two directions meet the Lissajous scanning working condition requirement, thereby reducing the processing size and precision requirement of the cylinder type body, making the processing difficulty of the cylinder type body low, the processing error easy to control, and the yield high, and significantly improving the processing efficiency and yield.

[0065] Embodiment 3:

[0066] In combination with FIGS. 1-3, Figure 3 , Figure 4 As shown in FIG. 4, a Lissajous fiber scanner with a combined cylinder type body includes a cylinder type body and a fiber 104,

[0067] The axis extension direction of the cylinder type body is the front-rear direction, the rear end of the cylinder type body is fixedly connected with the base 200 to be supported by the base 200,

[0068] The cylinder type body includes four support columns 105 arranged at four corners and four side plates 106 connecting any two adjacent support columns 105, and an upper side plate 107 located at the upper side has a length in the front-rear direction longer than that of the other three side plates 106,

[0069] The rear half of the upper side plate 107 is surrounded by the four support columns 105 and the other three side plates 106 to form a cylinder type overlapping part, and the fiber 104 is fixedly arranged at the front end of the upper side plate 107 in a cantilever support manner,

[0070] At least one side of the left and right sides of the cylinder type overlapping part is provided with a first piezoelectric sheet 101, and the front end of the cylinder type body is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101,

[0071] At least one side of the upper and lower sides of the cylindrical coincident part is provided with the second piezoelectric sheet 102, and the front end of the cylindrical body is driven to vibrate in the vertical direction by the expansion and contraction of the second piezoelectric sheet 102,

[0072] The upper side plate 107 is configured to make the natural frequency of the combined part composed of the cylindrical body, the first piezoelectric sheet 101, the second piezoelectric sheet 102 and the optical fiber 104 in the horizontal direction greater than the same order natural frequency of the combined part in the vertical direction, and make the combined part have a difference between the certain order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction, and V is an integer greater than or equal to 1.

[0073] The combined part has a first order natural frequency, a second order natural frequency, a third order natural frequency,..., and an N order natural frequency in the vertical direction, and there is a certain order (for example, U order, U is an integer greater than or equal to two) of the natural frequency closest to the V order natural frequency in the horizontal direction (V is less than U). The closer the driving frequencies in the two directions in the Lissajous scan, the closer the uniformity (density) of the scan grid in the two directions, and the more the number of points. In theory, the closer the driving frequencies in the two directions, the better, but the closer the natural frequencies used by the combined part in the two directions, the more obvious the coupling effect. Therefore, the application adjusts the shape and / or size parameters of the upper side plate 107 to make the natural frequencies of the combined part used in the two directions meet the requirements of Lissajous scanning conditions, reduce the requirements of the processing size and precision of the cylindrical body, make the processing difficulty of the cylindrical body low, and the processing error easy to control, and the yield rate high.

[0074] At the same time, the rigidity of the support column 105 is greater than that of the side plate 106, which can isolate the mutual deformation interference of the side plate 106 vibrating in the horizontal direction and the side plate 106 vibrating in the vertical direction, and improve the scanning accuracy.

[0075] In the embodiment, the V order is the first order, and the U order is the second order. Of course, this is only the parameter selection of the embodiment, and in other embodiments similar to the structure type of the embodiment, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.

[0076] The difference satisfies that when the combined part is driven by the driving signal to make Lissajous scan, the vibration in the horizontal direction and the vibration in the vertical direction of the combined part will not be coupled.

[0077] Generally, the difference ranges from 10Hz to 12kHz. More preferably, the difference ranges from 1kHz to 10kHz. Specifically, the difference is selected based on the V-order natural frequency of the scanner arm in the horizontal direction. The difference is sufficient to ensure that the scanner arm has sufficient amplitude when the piezoelectric actuator performs a Lissajous scan under drive, and that the vibrations of the scanner arm in the horizontal and vertical directions do not couple. For those skilled in the art, selecting values ​​based on the above description is a conventional technique in the field.

[0078] Optionally, a first piezoelectric sheet 101 is provided on either the left or right side of the cylindrical overlapping portion, and the extension and retraction of the first piezoelectric sheet 101 drives the front end of the cylindrical overlapping portion to vibrate left and right in the horizontal direction. The number of first piezoelectric sheets 101 can be one, two, or more. When there are two or more first piezoelectric sheets 101, each first piezoelectric sheet 101 extends and retracts synchronously and at the same length.

[0079] Optionally, a first piezoelectric sheet 101 is provided on both the left and right sides of the cylindrical overlapping portion. The first piezoelectric sheet 101 on the left side and the first piezoelectric sheet 101 on the right side extend and retract synchronously in opposite directions with equal length, driving the front end of the cylindrical overlapping portion to vibrate horizontally. The number of first piezoelectric sheets 101 on the same side can be one, two, or more. When there are two or more first piezoelectric sheets 101 on the same side, the first piezoelectric sheets 101 on the same side extend and retract synchronously with equal length.

[0080] Optionally, a second piezoelectric sheet 102 is provided on either the upper or lower side of the cylindrical overlapping portion, and the extension and retraction of the second piezoelectric sheet 102 drives the front end of the cylindrical overlapping portion to vibrate vertically. The number of second piezoelectric sheets 102 can be one, two, or more. When there are two or more second piezoelectric sheets 102, the second piezoelectric sheets 102 extend and retract synchronously and at the same length.

[0081] Alternatively, second piezoelectric plates 102 are provided on both the upper and lower sides of the cylindrical overlapping portion. The second piezoelectric plate 102 on the upper side and the second piezoelectric plate 102 on the lower side synchronously extend and retract in opposite directions with equal length, driving the front end of the cylindrical overlapping portion to vibrate vertically up and down. The number of second piezoelectric plates 102 on the same side can be one, two, or more. When there are two or more second piezoelectric plates 102 on the same side, the second piezoelectric plates 102 on the same side synchronously extend and retract with equal length.

[0082] Preferably, the surface on which the first piezoelectric sheet 101 or the second piezoelectric sheet 102 is disposed in the cylindrical overlapping portion is a plane to facilitate the placement of the piezoelectric sheet. Further optionally, the surface on which the first piezoelectric sheet 101 or the second piezoelectric sheet 102 is disposed in the cylindrical overlapping portion can be either the inner surface or the outer surface of the cylindrical overlapping portion.

[0083] Further preferably, when the first piezoelectric sheet 101 is arranged on both sides of the cylindrical coincident part, the first piezoelectric sheet 101 is symmetrically arranged on both sides of the cylindrical coincident part to drive the cylindrical coincident part to accurately vibrate in the horizontal direction left and right without generating a displacement component in the vertical direction; when the second piezoelectric sheet 102 is arranged on both sides of the cylindrical coincident part, the second piezoelectric sheet 102 is symmetrically arranged on both sides of the cylindrical coincident part to drive the cylindrical coincident part to accurately vibrate in the vertical direction without generating a displacement component in the horizontal direction.

[0084] The present application makes the piezoelectric actuator of the Lissajous scanner itself not necessarily have a specific difference in the natural frequency in the two driving directions, and also avoids coupling of vibration in the two driving directions, thereby reducing the processing difficulty and the requirement for processing accuracy. The present application uses adjustment of the shape structure and / or size parameters of the upper side plate 107 to make the vibration frequency of the combined part in the two directions meet the Lissajous scanning working condition requirement, thereby reducing the processing size and accuracy requirement of the cylindrical body, making the processing difficulty of the cylindrical body low, the processing error easy to control, and the yield high, and significantly improving the processing efficiency and yield.

[0085] Embodiment 4:

[0086] In combination with FIGS. 1-3, Figure 5 Figure 6 As shown in FIG. 4, a Lissajous optical fiber scanner with a combined cylindrical body includes a cylindrical body and an optical fiber 104,

[0087] The axis extension direction of the cylindrical body is defined as the front-rear direction, and the rear end of the cylindrical body is fixedly connected with the base 200 to be supported by the base 200,

[0088] The cylindrical body includes support columns 105 arranged at four corners and side plates 106 connecting any two adjacent support columns 105, and the upper side plate 107 located at the upper side has a length in the front-rear direction longer than the lengths of the other three side plates 106,

[0089] The rear half of the upper side plate 107 and the four support columns 105 and the other three side plates 106 surround the cylindrical coincident part, and the optical fiber 104 is fixedly arranged at the front end of the upper side plate 107 in a cantilever support manner,

[0090] At least one of the left and right sides of the cylindrical coincident part is provided with a first inner electrode 1011 and a first outer electrode 1012 arranged in corresponding cooperation on the inner surface and the outer surface, respectively, and the part of the cylindrical coincident part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material part polarized in the thickness direction, which is driven by the first inner electrode 1011 and the corresponding first outer electrode 1012 to stretch and contract in the front-rear direction, thereby driving the front end of the cylindrical body to vibrate left and right in the horizontal direction, ​

[0091] At least one of the inner surface and the outer surface of the upper side and the lower side of the cylindrical coincident part is respectively provided with a second inner electrode 1021 and a second outer electrode 1022 which are correspondingly matched, and the part of the cylindrical coincident part between the second inner electrode 1021 and the second outer electrode 1022 is a piezoelectric material part polarized along the thickness direction, and the piezoelectric material part between the second inner electrode 1021 and the second outer electrode 1022 is driven to stretch and contract along the front-rear direction by the second inner electrode 1021 and the second outer electrode 1022, and the front end of the cylindrical body is driven to vibrate along the vertical direction,

[0092] The upper side plate 107 is configured to make the natural frequency of the combined part of the cylindrical body and the optical fiber 104 in the horizontal direction greater than the same order natural frequency of the combined part in the vertical direction, and make the combined part have a difference between the certain order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction, and V is an integer greater than or equal to 1.

[0093] The combined part has a first order natural frequency, a second order natural frequency, a third order natural frequency, …, and an N order natural frequency in the vertical direction, and there is a certain order (for example, U order, U is an integer greater than or equal to two) of the natural frequency closest to the V order natural frequency of the combined part in the horizontal direction (V is less than U), the closer the driving frequencies of the two directions in the Lissajous scanning, the closer the uniformity (density) of the scanning grid in the two directions, and the more the number of points, and theoretically the closer the driving frequencies of the two directions, the better, but the closer the natural frequencies of the combined part used in the two directions, the more obvious the coupling effect, so the application adjusts the shape and / or size parameters of the upper side plate 107 to make the natural frequencies of the combined part used in the two directions meet the requirements of Lissajous scanning at the same time, which can ensure good scanning effect and have uniform and dense scanning grid, and at the same time have sufficient difference to make the vibration of the combined part in the two directions not coupled.

[0094] Therefore, the application adjusts the shape and / or size parameters of the upper side plate 107 to make the vibration frequencies of the combined part in the two directions meet the requirements of Lissajous scanning, which reduces the requirements of the machining size and precision of the cylindrical body, makes the machining difficulty of the cylindrical body low, the machining error easy to control, and the yield high.

[0095] In the embodiment, the V order is the first order, and the U order is the second order. Of course, this is only the parameter selection of the embodiment, and in other embodiments of the similar structure type, V can also be selected as an integer greater than 1, and U is selected as an integer greater than V.

[0096] The difference meets the requirements of Lissajous scanning of the combined part driven by the driving signal, so that the vibration of the combined part in the horizontal direction and the vibration in the vertical direction will not be coupled.

[0097] Generally, the difference is in the range of 10 Hz to 12 KHz. Further preferably, the difference is in the range of 1 KHz to 10 KHz. The difference is selected according to the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuator is driven to perform Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and in the vertical direction does not couple. For those skilled in the art, numerical selection according to the above description is a routine technical means in the art.

[0098] Optionally, the inner surface and the outer surface of any one side of the left and right sides of the cylindrical coincident part are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, and the part of the cylindrical coincident part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the cylindrical coincident part is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.

[0099] Optionally, the inner surface and the outer surface of the left and right sides of the cylindrical coincident part are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, and the part of the cylindrical coincident part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, and the front end of the cylindrical coincident part is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.

[0100] Optionally, the inner surface and the outer surface of any one side of the upper and lower sides of the cylindrical coincident part are respectively provided with a corresponding second inner electrode 1021 and a second outer electrode 1022, and the part of the piezoelectric material cylindrical body between the second inner electrode 1021 and the second outer electrode 1022 is a piezoelectric material part polarized in the thickness direction. The piezoelectric material part between the second inner electrode 1021 and the second outer electrode 1022 is driven to stretch and contract in the front-back direction by the second inner electrode 1021 and the second outer electrode 1022, and the front end of the cylindrical coincident part is driven to vibrate up and down in the vertical direction. The number of second inner electrodes 1021 or second outer electrodes 1022 can be one, two or more.

[0101] Optionally, the inner surface and the outer surface of the upper and lower sides of the cylindrical coincident part are respectively provided with a second inner electrode 1021 and a second outer electrode 1022 corresponding to the second inner electrode 1021, and the part of the piezoelectric material cylinder body between the second inner electrode 1021 and the second outer electrode 1022 is a piezoelectric material part polarized in the thickness direction, which is driven by the second inner electrode 1021 and the second outer electrode 1022 to stretch and contract in the front-back direction, and the piezoelectric material parts on the upper and lower sides synchronously stretch and contract in the opposite direction with the same length, thereby driving the front end of the cylindrical coincident part to vibrate up and down in the vertical direction. The number of the second inner electrode 1021 or the second outer electrode 1022 on the same side can be one, two or more.

[0102] Further preferably, when the inner surface and the outer surface of the left and right sides of the cylindrical coincident part are respectively provided with a first inner electrode 1011 and a first outer electrode 1012 corresponding to the first inner electrode 1011, the first inner electrodes 1011 on the left and right sides of the cylindrical coincident part are symmetrically arranged to drive the cylindrical coincident part to accurately vibrate left and right in the horizontal direction without a displacement component in the vertical direction; and when the inner surface and the outer surface of the upper and lower sides of the cylindrical coincident part are respectively provided with a second inner electrode 1021 and a second outer electrode 1022 corresponding to the second inner electrode 1021, the second inner electrodes 1021 on the upper and lower sides of the cylindrical coincident part are symmetrically arranged to drive the cylindrical coincident part to accurately vibrate in the vertical direction without a displacement component in the horizontal direction.

[0103] The present application makes the piezoelectric actuator of the Lissajous scanner itself not necessarily have a specific difference in the natural frequency in the two driving directions, and also avoids the coupling of vibration in the two driving directions, thereby reducing the processing difficulty and the requirement for processing accuracy. The present application adjusts the shape structure and / or size parameter of the upper side plate 107 to make the combined part have a vibration frequency in two directions meeting the Lissajous scanning working condition requirement, thereby reducing the processing size and accuracy requirement of the cylindrical body, making the processing difficulty of the cylindrical body low, the processing error easy to control, and the yield high, and significantly improving the processing efficiency and yield.

[0104] It should be noted that the above embodiments illustrate the present application rather than limit the present application, and those skilled in the art can design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs located between parentheses shall not be construed as limiting the claims. The word "comprising" or "including" does not exclude the presence of elements or steps not listed in the claims. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The use of the word "about" preceding an element does not exclude the presence of the element per se.

[0105] All features disclosed in the specification, except for mutually exclusive features, can be combined in any way.

[0106] Any feature in the foregoing specification that can be added to the application, unless explicitly described as an application, can be replaced by alternatives having similar effect. That is, each feature is one of a number of alternatives that can be substituted for that feature in the application.

[0107] This application is not limited to the specific embodiments previously described. This application extends to any new features or combinations of features disclosed in this specification, and any new methods or processes disclosed or suggested in this specification, or any new combinations of steps of the disclosed methods or processes.

Claims

1. A Lissajous fiber scanner having a combined barrel body, characterized by, The barrel-shaped body and the optical fiber are fixedly connected with the base, and the barrel-shaped body is supported by the base, The barrel-shaped body is composed of an upper opening base body and a support plate which is fixedly connected with the base and covers the upper opening of the base body or the whole upper opening of the base body, the front end of the support plate is beyond the front end of the base body, the part of the support plate which is connected with the base body forms a barrel-shaped coincident part with the base body, and the optical fiber is fixedly arranged at the front end of the support plate in a cantilever support mode, At least one side of the barrel-shaped coincident part is provided with a first piezoelectric sheet, and the front end of the barrel-shaped body is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet, At least one side of the barrel-shaped coincident part is provided with a second piezoelectric sheet, and the front end of the barrel-shaped body is driven to vibrate up and down along the vertical direction by the expansion and contraction of the second piezoelectric sheet, The support plate is configured such that the inherent frequency of the combination part composed of the barrel-shaped body, the first piezoelectric sheet, the second piezoelectric sheet and the optical fiber in the horizontal direction is greater than the same order inherent frequency of the combination part in the vertical direction, and the combination part has a difference between the certain order inherent frequency closest to the V order inherent frequency in the horizontal direction and the V order inherent frequency in the vertical direction, and V is an integer greater than or equal to 1.

2. A Lissajous fiber scanner with a combined barrel body as claimed in claim 1, characterized in that, The difference satisfies that when the combination part is driven by a driving signal to perform Lissajous scanning, the vibration of the combination part in the horizontal direction and the vibration in the vertical direction do not couple.

3. A Lissajous fiber scanner with a combined barrel body as claimed in claim 1 or 2, characterized in that, The difference ranges from 10 Hz to 12 KHz.

4. A Lissajous fiber scanner with a combined barrel body as claimed in claim 1 or 2, characterized in that, The difference ranges from 1 KHz to 10 KHz.

5. A Lissajous fiber scanner with a combined barrel body as claimed in claim 1 or 2, characterized in that, Any one side of the barrel-shaped coincident part is provided with a first piezoelectric sheet, and the front end of the barrel-shaped coincident part is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet.

6. A Lissajous fiber scanner with a combined barrel body as claimed in claim 1 or 2, characterized in that, Both sides of the barrel-shaped coincident part are provided with first piezoelectric sheets, the first piezoelectric sheet on the left side and the first piezoelectric sheet on the right side synchronously and reversely expand and contract with the same length, and drive the front end of the barrel-shaped coincident part to vibrate left and right along the horizontal direction.

7. A Lissajous fiber scanner with a combined barrel body as claimed in claim 1 or 2, characterized in that, Any one side of the barrel-shaped coincident part is provided with a second piezoelectric sheet, and the front end of the barrel-shaped coincident part is driven to vibrate up and down along the vertical direction by the expansion and contraction of the second piezoelectric sheet.

8. A Lissajous fiber scanner with a combined barrel body as claimed in claim 1 or 2, characterized in that, Both sides of the barrel-shaped coincident part are provided with second piezoelectric sheets, the second piezoelectric sheet on the upper side and the second piezoelectric sheet on the lower side synchronously and reversely expand and contract with the same length, and drive the front end of the barrel-shaped coincident part to vibrate up and down along the vertical direction.

9. A Lissajous fiber scanner with a combined barrel body as claimed in claim 6, characterized in that, The first piezoelectric sheets on the left and right sides of the barrel-shaped coincident part are symmetrically arranged.

10. A Lissajous fiber scanner having a combined barrel body as claimed in claim 8, characterized in that, The second piezoelectric sheets on the upper and lower sides of the barrel-shaped coincident part are symmetrically arranged.

Images