Lissajous optical fiber scanner with supporting plate
By introducing a support plate and an overlapping section into the Lissajous fiber scanner, the natural frequency difference was adjusted, the vibration coupling problem was solved, the scanning effect and processing efficiency were improved, and the yield was increased.
Patent Information
- Application Number
- CN202520587715.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2026-02-06
- Estimated Expiration
- 2034-12-30
AI Technical Summary
When the natural frequencies used by a Lissajous scanner in two directions are close, vibration coupling effects are likely to occur, leading to distortion of the scanning trajectory and making it difficult to guarantee processing accuracy and yield.
A Lissajous fiber optic scanner with a support plate is designed. By setting the support plate and overlapping part on the piezoelectric cylindrical body, the shape structure and size parameters are adjusted so that the natural frequencies in two directions are both close and have a sufficient difference, avoiding vibration coupling. The rotationally symmetric structure is adopted to reduce the processing difficulty.
It achieves excellent scanning results and a uniform and dense scanning grid, while reducing processing difficulty and improving yield.
Smart Images
Figure CN223883851U_ABST
Abstract
Description
[0001] This application is a divisional application of the Chinese patent application No. 2024232650214, filed on December 30, 2024, with the State Intellectual Property Office of China, and entitled "Lissajous Fiber Scanner with Support Plate", the whole content of which is incorporated herein by reference. TECHNICAL FIELD
[0002] The present application relates to the technical field of fiber scanner structure, in particular to a Lissajous fiber scanner with a support plate. BACKGROUND
[0003] The fiber scanner is a display technology that uses a scanning driver to control the swing of a fiber while the fiber emits light. It is mainly used in the technical fields of fiber scanning display technology, fiber scanning endoscope technology, fiber scanning radar, etc. When the fiber scanner is applied to image display, the color of the pattern illuminated by this technology is sharp and saturated, the contrast is high, the brightness is high, and the structure is very small.
[0004] The fiber scanner uses the principle of mechanical resonance to make the fiber cantilever achieve a large scanning range. The scanning mode of the scanning driver can be divided into spiral scanning, grid scanning and Lissajous scanning. The miniature piezoelectric scanning device of Lissajous scanning generally has two driving parts, which drive the scanning device to vibrate in two directions at the same time. The closer the driving frequencies of the two directions in Lissajous scanning, the closer the uniformity (density) of the scanning grid in the two directions, and theoretically the closer the driving frequencies of the two directions, the better. However, the closer the inherent frequencies used in the two directions of the scanner, the more obvious the vibration coupling effect will be, which will worsen the scanning trajectory, cause uncontrollable components in the scanning trajectory and result in distortion of the scanning image, which is difficult to completely eliminate through post-processing. Therefore, the inherent frequencies used in the two directions of the Lissajous scanner should have a precise difference range, neither too small to cause coupling effect, nor too large to cause non-uniformity.
[0005] However, the Lissajous scanner that processes and manufactures inherent frequencies with a precise difference in the two directions requires extremely high processing precision, and both the cost of processing equipment and the yield cannot be guaranteed. Practical new type content
[0006] The present application provides a Lissajous fiber scanner with a support plate to reduce the processing difficulty and improve the processing yield.
[0007] In order to achieve the above application purpose, the present application provides a Lissajous fiber scanner with a support plate, which comprises a piezoelectric material cylinder body, a support plate fixedly connected with the piezoelectric material cylinder body, and a fiber fixedly arranged on the support plate in a cantilever support manner,
[0008] The axis extension direction of the piezoelectric material cylinder body is the front-rear direction, the rear end of the piezoelectric material cylinder body is fixedly connected with the base, and the piezoelectric material cylinder body is supported by the base,
[0009] The inner surface and the outer surface of at least one side of the left and right sides of the piezoelectric material cylinder body are respectively provided with a corresponding first inner electrode and a first outer electrode, the part of the piezoelectric material cylinder body between the first inner electrode and the corresponding first outer electrode is polarized along the thickness direction, the piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract along the front-rear direction by the first inner electrode and the corresponding first outer electrode, and the front end of the cylinder body is driven to vibrate left and right along the horizontal direction;
[0010] The inner surface and the outer surface of at least one side of the upper and lower sides of the piezoelectric material cylinder body are respectively provided with a corresponding second inner electrode and a second outer electrode, the part of the piezoelectric material cylinder body between the second inner electrode and the second outer electrode is polarized along the thickness direction, the piezoelectric material between the second inner electrode and the second outer electrode is driven to stretch and contract along the front-rear direction by the second inner electrode and the second outer electrode, and the front end of the piezoelectric material cylinder body is driven to vibrate along the vertical direction,
[0011] The support plate is arranged along the horizontal direction parallel to the horizontal plane, is located at the front side of the piezoelectric material cylinder body, and has a rear end fixedly connected with the piezoelectric material cylinder body, the optical fiber is fixedly arranged at the front end of the support plate in a cantilever support manner, the support plate and the piezoelectric material cylinder body have a coincident part in the front-rear direction, and the support plate and the coincident part make the natural frequency of the combination part composed of the piezoelectric material cylinder body, the support plate and the optical fiber in the horizontal direction greater than the same order natural frequency of the combination part in the vertical direction, and make the combination part in the vertical direction have a difference between a certain order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the horizontal direction, and V is an integer greater than or equal to 1.
[0012] The combination part has a first order natural frequency, a second order natural frequency, a third order natural frequency, …, and an N order natural frequency in the vertical direction, and there is a certain order (for example, a U order, U is an integer greater than or equal to two) of the natural frequencies closest to the V order natural frequency of the combination part in the horizontal direction (V is less than the U order natural frequency), the closer the driving frequencies of the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, the more the number of points is, and theoretically the closer the driving frequencies of the two directions are, the better, but the closer the natural frequencies of the combination part used in the two directions are, the more obvious the coupling effect will be, so the application adjusts the shape structure and / or size parameters of the support plate and the coincident part to make the natural frequencies of the combination part used in the two directions at the same time meet the requirements of being close enough to ensure good scanning effect and have a uniform and dense scanning grid, and at the same time have a sufficient difference to make the vibration of the combination part in the two directions not coupled.
[0013] The difference satisfies that when the combination part is driven to perform Lissajous scanning, the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction do not generate coupling.
[0014] Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The difference is selected according to the value of the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuator is driven to perform Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not generate coupling. For those skilled in the art, numerical selection according to the above description is a routine technical means in the art.
[0015] Preferably, the piezoelectric material cylinder body has the same or similar natural frequency in the horizontal direction and the same order natural frequency in the vertical direction. The piezoelectric material cylinder body satisfying such requirements has a regular shape and a rotational symmetry structure, so that the piezoelectric material cylinder body has low processing difficulty, easy processing error control, and high yield, such as a cylindrical body or a square cylindrical body.
[0016] Optionally, the inner surface and the outer surface of any one side of the piezoelectric material cylinder body are respectively provided with a corresponding first inner electrode and a first outer electrode, and the part of the piezoelectric material cylinder body between the first inner electrode and the corresponding first outer electrode is polarized in the thickness direction, and the piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract in the front-back direction by the first inner electrode and the corresponding first outer electrode, and the front end of the cylinder body is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes or first outer electrodes can be one, two or more.
[0017] Optionally, the inner surface and the outer surface of any one side of the piezoelectric material cylinder body are respectively provided with a corresponding first inner electrode and a first outer electrode, and the part of the piezoelectric material cylinder body between the first inner electrode and the corresponding first outer electrode is polarized in the thickness direction, and the piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract in the front-back direction by the first inner electrode and the corresponding first outer electrode, and the piezoelectric material on the left and right sides synchronously and reversely stretches and contracts by the same length, and the front end of the cylinder body is driven to vibrate left and right in the horizontal direction. The number of first inner electrodes or first outer electrodes can be one, two or more.
[0018] Optionally, the inner surface and the outer surface of any one of the upper side and the lower side of the piezoelectric material cylinder body are respectively provided with a second inner electrode and a second outer electrode arranged correspondingly, the part of the piezoelectric material cylinder body between the second inner electrode and the second outer electrode is polarized along the thickness direction, the piezoelectric material between the second inner electrode and the second outer electrode is driven to stretch and contract along the front-rear direction by the second inner electrode and the second outer electrode, and the front end of the piezoelectric material cylinder body is driven to vibrate along the vertical direction. The number of the second inner electrode or the second outer electrode on the same side can be one, two or more.
[0019] Optionally, the inner surface and the outer surface of the upper side and the lower side of the piezoelectric material cylinder body are respectively provided with a second inner electrode and a second outer electrode arranged correspondingly, the part of the piezoelectric material cylinder body between the second inner electrode and the second outer electrode is polarized along the thickness direction, the piezoelectric material between the second inner electrode and the second outer electrode is driven to stretch and contract along the front-rear direction by the second inner electrode and the second outer electrode, and the front end of the piezoelectric material cylinder body is driven to vibrate along the vertical direction. The number of the second inner electrode or the second outer electrode on the same side can be one, two or more.
[0020] Further preferably, when the inner surface and the outer surface of the left side and the right side of the piezoelectric material cylinder body are respectively provided with a first inner electrode and a first outer electrode corresponding thereto, the first inner electrodes on the left side and the right side of the piezoelectric material cylinder body are symmetrically arranged to drive the piezoelectric material cylinder body to accurately vibrate along the horizontal direction left and right without generating a displacement component in the vertical direction; when the inner surface and the outer surface of the upper side and the lower side of the piezoelectric material cylinder body are respectively provided with a second inner electrode and a second outer electrode corresponding thereto, the second inner electrodes on the upper side and the lower side of the piezoelectric material cylinder body are symmetrically arranged to drive the piezoelectric material cylinder body to accurately vibrate along the vertical direction without generating a displacement component in the horizontal direction.
[0021] Optionally, the piezoelectric material cylinder body has the same natural frequency in the horizontal direction and the same order natural frequency in the vertical direction, the outer contour thereof is square, and a center hole with a square or circular contour coaxial with the outer contour is arranged inside the piezoelectric material cylinder body. Further preferably, the V order is the first order and the U order is the second order.
[0022] Optionally, the piezoelectric material cylinder body has the same natural frequency in the horizontal direction and the same natural frequency in the vertical direction, the outer contour thereof is circular, and a center hole with a circular or square contour coaxial with the outer contour is arranged inside the piezoelectric material cylinder body. Further preferably, the V order is the first order and the U order is the second order.
[0023] One or more technical solutions in the present application have at least the following technical effects or advantages:
[0024] The application utilizes the shape structure and / or the adjustment of the size parameters of the supporting plate and the overlapping part, so that the natural frequencies of the combined part in two directions are simultaneously satisfied, that is, the natural frequencies are close enough to ensure good scanning effect and have uniform and dense scanning grid, and the natural frequencies have enough difference to prevent the vibration of the combined part in two directions from being coupled.
[0025] The application allows the piezoelectric actuating part of the Lissajous scanner to not necessarily have specific difference in the natural frequencies in two driving directions, and also avoids the vibration in two driving directions from being coupled, thereby reducing the processing difficulty and the requirement of processing precision. BRIEF DESCRIPTION OF DRAWINGS
[0026] Figure 1 Fig. 1 is a structural schematic view of the application;
[0027] Figure 2 Fig. 3 is a structural schematic view of the overlapping part of the supporting plate and the cylindrical body in the front-back direction;
[0028] Figure 3 Fig. 4 is a structural schematic view of another embodiment of the application. DETAILED DESCRIPTION
[0029] The technical solutions in the embodiments of the application will be clearly and completely described in combination with the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments of the application. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the application.
[0030] Embodiment 1:
[0031] In combination with Fig. 1, Figure 1 , Figure 2 a Lissajous optical fiber scanner with a supporting plate is shown, which comprises a piezoelectric material cylindrical body 100, a supporting plate 103 fixedly connected with the piezoelectric material cylindrical body 100, and an optical fiber 104 fixedly arranged on the supporting plate 103 in a cantilever support manner,
[0032] The extending direction of the axis of the piezoelectric material cylindrical body 100 is the front-back direction, and the rear end of the piezoelectric material cylindrical body 100 is fixedly connected with a base 200 to be supported by the base 200,
[0033] The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract along the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, so as to drive the front end of the cylinder body 100 to vibrate left and right along the horizontal direction.
[0034] The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract along the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, so as to drive the front end of the cylinder body 100 to vibrate left and right along the horizontal direction.
[0035] The support plate 103 is arranged along the horizontal direction, and is located at the front side of the piezoelectric material cylinder body 100, and the rear end of the support plate 103 is fixedly connected with the piezoelectric material cylinder body 100. The optical fiber 104 is fixedly arranged at the front end of the support plate 103 in a cantilever support manner. The support plate 103 and the piezoelectric material cylinder body 100 have a coincident part 105 in the front-back direction. The support plate 103 and the coincident part 105 make the combination of the piezoelectric material cylinder body 100, the support plate 103 and the optical fiber 104 have a natural frequency in the horizontal direction which is greater than the same order natural frequency of the combination in the vertical direction, and make the combination have a difference between the certain order natural frequency in the vertical direction which is closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the horizontal direction, and V is an integer greater than or equal to 1.
[0036] The combination part has a first natural frequency, a second natural frequency, a third natural frequency, and an Nth natural frequency in the vertical direction, wherein the natural frequency of a certain order (for example, Uth, U is an integer greater than or equal to 2) is closest to the Vth natural frequency of the combination part in the horizontal direction (V is less than the Uth natural frequency), the closer the driving frequencies of the two directions in the Lissajous scan, the closer the uniformity (density) of the scan grid in the two directions, the more the number of points, and theoretically the closer the driving frequencies of the two directions, the better, but the closer the natural frequencies of the combination part used in the two directions, the more obvious the coupling effect, so the application adjusts the shape and / or size parameters of the support plate 103 and the overlapping part 105, so that the natural frequencies of the combination part used in the two directions are close enough to ensure good scanning effect and have a uniform and dense scan grid, and at the same time have a sufficient difference, so that the vibration of the combination part in the two directions does not produce coupling.
[0037] The difference satisfies that when the combination part is driven by the driving signal to perform Lissajous scanning, the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction do not produce coupling.
[0038] Generally, the difference is in the range of 10 Hz to 12 KHz. Further preferably, the difference is in the range of 1 KHz to 10 KHz. The value is selected according to the selected Vth natural frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies that the scanner cantilever has sufficient amplitude when the piezoelectric actuator is driven to perform Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not produce coupling. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.
[0039] Preferably, the natural frequency of the piezoelectric material cylinder body 100 in the horizontal direction and the same order natural frequency in the vertical direction are the same or similar, and the piezoelectric material cylinder body 100 satisfying such requirements is a regular shape and a rotationally symmetric structure, so that the piezoelectric material cylinder body 100 has low processing difficulty, easy to control processing error, and high yield, such as a cylindrical body or a square cylindrical body.
[0040] Optionally, the inner surface and the outer surface of any one of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract along the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, so as to drive the front end of the piezoelectric material cylinder body 100 to vibrate left and right along the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.
[0041] Optionally, the inner surface and the outer surface of any one of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract along the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, so as to drive the front end of the piezoelectric material cylinder body 100 to vibrate left and right along the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.
[0042] Optionally, the inner surface and the outer surface of any one of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract along the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, so as to drive the front end of the piezoelectric material cylinder body 100 to vibrate left and right along the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.
[0043] Optionally, the inner surface and the outer surface of any one of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with a corresponding first inner electrode 1011 and a first outer electrode 1012, the part of the piezoelectric material cylinder body 100 between the first inner electrode 1011 and the corresponding first outer electrode 1012 is polarized along the thickness direction, and the piezoelectric material between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract along the front-back direction by the first inner electrode 1011 and the corresponding first outer electrode 1012, so as to drive the front end of the piezoelectric material cylinder body 100 to vibrate left and right along the horizontal direction. The number of first inner electrodes 1011 or first outer electrodes 1012 can be one, two or more.
[0044] Further preferably, when the inner surface and the outer surface of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with the first inner electrode 1011 and the corresponding first outer electrode 1012, the first inner electrode 1011 of the left and right sides of the piezoelectric material cylinder body 100 is symmetrically arranged to drive the piezoelectric material cylinder body 100 to accurately vibrate left and right in the horizontal direction without generating a displacement component in the vertical direction; when the inner surface and the outer surface of the upper and lower sides of the piezoelectric material cylinder body 100 are respectively provided with the second inner electrode 1021 and the corresponding second outer electrode 1022, the second inner electrode 1021 of the upper and lower sides of the piezoelectric material cylinder body 100 is symmetrically arranged to drive the piezoelectric material cylinder body 100 to accurately vibrate in the vertical direction without generating a displacement component in the horizontal direction.
[0045] The application makes the piezoelectric actuating part of the Lissajous scanner itself not necessarily have a specific difference in the natural frequency in the two driving directions, and also avoids coupling of vibration in the two driving directions, thereby reducing the processing difficulty and the requirement for processing precision; further preferably, the application allows the natural frequency of the piezoelectric material cylinder body 100 in the two driving directions to be the same or close, and allows the piezoelectric material cylinder body 100 itself to be a rotationally symmetric structure, which further reduces the processing difficulty of the piezoelectric actuating part of the Lissajous scanner, and significantly improves the processing efficiency and the yield.
[0046] Embodiment 2:
[0047] In combination with FIGS. 1-3, Figure 1 , Figure 2 As shown in FIG. 4, a Lissajous fiber scanner with a support plate includes a piezoelectric material cylinder body 100, a support plate 103 fixedly connected with the piezoelectric material cylinder body 100, and a fiber 104 fixedly arranged on the support plate 103 in a cantilever support manner,
[0048] The axis extension direction of the piezoelectric material cylinder body 100 is the front-rear direction, and the rear end of the piezoelectric material cylinder body 100 is fixedly connected with the base 200 to be supported by the base 200,
[0049] The inner surface and the outer surface of at least one side of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with the corresponding first inner electrode 1011 and the first outer electrode 1012, and the part of the piezoelectric material cylinder body 100 between the corresponding first inner electrode 1011 and the first outer electrode 1012 is polarized in the thickness direction, so that the piezoelectric material located between the first inner electrode 1011 and the corresponding first outer electrode 1012 is driven to stretch and contract in the front-rear direction, and the front end of the piezoelectric material cylinder body 100 is driven to vibrate left and right in the horizontal direction,
[0050] The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body 100 are respectively provided with a second inner electrode 1021 and a second outer electrode 1022 which are correspondingly matched, the part of the piezoelectric material cylinder body 100 between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction, and the piezoelectric material between the second inner electrode 1021 and the second outer electrode 1022 is driven to stretch and contract along the front-back direction by the second inner electrode 1021 and the second outer electrode 1022, so as to drive the front end of the piezoelectric material cylinder body 100 to vibrate along the vertical direction,
[0051] The piezoelectric material cylinder body 100 has the same natural frequency in the horizontal direction and the same order natural frequency in the vertical direction, and has a square outer contour and a square or circular center hole coaxial with the outer contour in the inside;
[0052] The support plate 103 is arranged along the horizontal direction, is located at the front side of the piezoelectric material cylinder body 100, and is fixedly connected with the piezoelectric material cylinder body 100 at the rear end, the optical fiber 104 is fixedly arranged on the front end of the support plate 103 in a cantilever support manner, the support plate 103 and the piezoelectric material cylinder body 100 have a coincident part 105 in the front-back direction, the left side wall and the right side wall of the piezoelectric material cylinder body 100 are both provided with a mounting groove 106 for connecting the support plate 103, a part of the rear end of the support plate 103 is inserted into the mounting groove 106 and is fixedly connected with the piezoelectric material cylinder body 100, the part of the support plate 103 inserted into the mounting groove 106 and the part of the piezoelectric material cylinder body 100 coincident with the part of the support plate 103 in the front-back direction constitute the coincident part 105, the support plate 103 and the coincident part 105 make the combination of the piezoelectric material cylinder body 100, the support plate 103 and the optical fiber 104 have a natural frequency in the horizontal direction greater than the same order natural frequency in the vertical direction, and make the combination have a difference between the U order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction. In this embodiment, the V order is the first order and the U order is the second order.
[0053] Of course, this is only the parameter selection of this embodiment, and in other embodiments of the same structure type as this embodiment, V can also be selected as an integer greater than 1, and U can be selected as an integer greater than V.
[0054] Specifically, the shape structure and / or size parameter of the support plate 103 and the coincident part 105 are adjusted so that the natural frequencies of the combination in the two directions are close enough to ensure good scanning effect and have uniform and dense scanning grid, and at the same time have sufficient difference to prevent the vibration of the combination in the two directions from being coupled.
[0055] The difference satisfies that when the combination part performs Lissajous scanning under the driving of the driving signal, vibration of the combination part in the horizontal direction and vibration of the combination part in the vertical direction do not generate coupling.
[0056] Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The difference is selected according to the value of the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuating part performs Lissajous scanning under the driving, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not generate coupling. For those skilled in the art, numerical selection according to the above description is a routine technical means in the art.
[0057] Optionally, the mounting groove 106 can be located at the middle, upper or lower part of the left and right side walls of the piezoelectric material cylinder body 100 in the vertical direction, which is not limited.
[0058] In the embodiment, the first inner electrode 1011 and the first outer electrode 1012, and the second inner electrode 1021 and the second outer electrode 1022 are arranged in the same manner as in Embodiment 1, and the polarization manner, driving manner and driving principle of the corresponding part of the piezoelectric material cylinder body 100 are also the same as in Embodiment 1.
[0059] Embodiment 3:
[0060] In combination with FIGS. 1 to 3, Figure 3 , Figure 2 As shown in FIG. 4, a Lissajous fiber scanner with a support plate includes a piezoelectric material cylinder body 100, a support plate 103 fixedly connected with the piezoelectric material cylinder body 100, and a fiber 104 fixedly arranged on the support plate 103 in a cantilever support manner,
[0061] The extending direction of the axis of the piezoelectric material cylinder body 100 is the front-back direction, the rear end of the piezoelectric material cylinder body 100 is fixedly connected with the base 200, and the piezoelectric material cylinder body 100 is supported by the base 200,
[0062] The inner surface and the outer surface of at least one side of the left and right sides of the piezoelectric material cylinder body 100 are respectively provided with a first inner electrode and a first outer electrode arranged in a corresponding matching manner, the part of the piezoelectric material cylinder body 100 between the first inner electrode and the corresponding first outer electrode is polarized in the thickness direction, the piezoelectric material located between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract in the front-back direction by the first inner electrode and the corresponding first outer electrode, and the front end of the piezoelectric material cylinder body 100 is driven to vibrate left and right in the horizontal direction,
[0063] The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body 100 are respectively provided with a second inner electrode 1021 and a second outer electrode 1022 which are correspondingly matched, the part of the piezoelectric material cylinder body 100 between the second inner electrode 1021 and the second outer electrode 1022 is polarized along the thickness direction, and the piezoelectric material between the second inner electrode 1021 and the second outer electrode 1022 is driven to stretch and contract along the front-back direction by the second inner electrode 1021 and the second outer electrode 1022, so as to drive the front end of the piezoelectric material cylinder body 100 to vibrate along the vertical direction,
[0064] The piezoelectric material cylinder body 100 has the same natural frequency in the horizontal direction and the natural frequency in the vertical direction, and has a circular outer contour and a circular or square central hole coaxial with the outer contour;
[0065] The support plate 103 is arranged along the horizontal direction, is located at the front side of the piezoelectric material cylinder body 100, and is fixedly connected to the piezoelectric material cylinder body 100 at the rear end. The optical fiber 104 is fixedly arranged on the front end of the support plate 103 in a cantilever support manner. The support plate 103 and the piezoelectric material cylinder body 100 have a coincident part 105 in the front-back direction. The left side wall and the right side wall of the piezoelectric material cylinder body 100 are both provided with a mounting groove 106 for connecting the support plate 103. The rear end of the support plate 103 is inserted into the mounting groove 106 and is fixedly connected to the piezoelectric material cylinder body 100. The part of the support plate 103 inserted into the mounting groove 106 and the part of the piezoelectric material cylinder body 100 coincident with the part of the support plate 103 in the front-back direction constitute the coincident part 105. The support plate 103 and the coincident part 105 make the combination of the piezoelectric material cylinder body 100, the support plate 103 and the optical fiber 104 have a natural frequency in the horizontal direction greater than the same order natural frequency in the vertical direction, and make the combination have a difference between the U order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction. In this embodiment, the V order is the first order and the U order is the second order.
[0066] Of course, this is only the parameter selection of this embodiment. In other embodiments of the same structure type as this embodiment, V can also be selected as an integer greater than 1, and U can be selected as an integer greater than V.
[0067] Specifically, the shape structure and / or size parameter of the support plate 103 and the coincident part 105 are adjusted so that the natural frequencies of the combination in the two directions are close enough to ensure good scanning effect and have uniform and dense scanning grid, and at the same time have a sufficient difference to prevent the vibration of the combination in the two directions from being coupled.
[0068] The difference satisfies that when the combination part is driven by the driving signal to perform Lissajous scanning, the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction do not generate coupling. Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The difference is selected according to the value of the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuator is driven to perform Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not generate coupling. For those skilled in the art, numerical selection according to the above description is a routine technical means in the art.
[0069] Optionally, the mounting groove 106 can be located at the middle, upper or lower part of the left and right side walls of the piezoelectric material cylinder body 100 in the vertical direction, which is not limited.
[0070] In the embodiment, the first inner electrode and the first outer electrode, and the second inner electrode 1021 and the second outer electrode 1022 are arranged in the same manner as in Embodiment 1, and the polarization manner, driving manner and driving principle of the corresponding part of the piezoelectric material cylinder body 100 are also the same as in Embodiment 1.
[0071] It should be noted that the above embodiments are illustrative of the present application rather than limiting the present application, and those skilled in the art can design alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs located between parentheses shall not be construed as limiting the claims. The word "comprising" or "including" does not exclude the presence of elements or steps not listed in the claims. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The use of the word "about" preceding an element does not exclude the presence of the element itself. The use of the word "first", "second" and "third" and the like does not imply any order, but these words are to be interpreted as names.
[0072] All features disclosed in this specification, except for mutually exclusive features, can be combined in any way.
[0073] Any feature disclosed in this specification, unless stated otherwise, can be replaced by alternative features serving the same, equivalent or similar purpose. That is, unless stated otherwise, each feature disclosed is one example only of a generic series of equivalent or similar features.
[0074] The present application is not limited to the specific embodiments previously described. The present application extends to any novel one, or any novel combination, of the features disclosed in this specification, and to any novel method or process disclosed, or any novel combination of steps of the methods or processes disclosed.
Claims
1. A Lissajous fiber scanner with a support plate, characterized in that, The optical fiber is fixed on the front end of the support plate in a cantilevered manner. The axis of the piezoelectric material cylinder body extends in the front-rear direction, and the rear end of the piezoelectric material cylinder body is fixedly connected to the base to be supported by the base. The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body are respectively provided with a first inner electrode and a first outer electrode arranged correspondingly, and the part of the piezoelectric material cylinder body between the first inner electrode and the corresponding first outer electrode is polarized in the thickness direction, and the piezoelectric material between the first inner electrode and the corresponding first outer electrode is driven to stretch and contract in the front-rear direction by the first inner electrode and the corresponding first outer electrode, and the front end of the cylinder body is driven to vibrate left and right in the horizontal direction. The inner surface and the outer surface of at least one side of the piezoelectric material cylinder body are respectively provided with a second inner electrode and a second outer electrode arranged correspondingly, and the part of the piezoelectric material cylinder body between the second inner electrode and the second outer electrode is polarized in the thickness direction, and the piezoelectric material between the second inner electrode and the second outer electrode is driven to stretch and contract in the front-rear direction by the second inner electrode and the second outer electrode, and the front end of the piezoelectric material cylinder body is driven to vibrate in the vertical direction. The support plate is arranged in parallel to the horizontal direction and is located in front of the piezoelectric material cylinder body, and the rear end of the support plate is fixedly connected to the piezoelectric material cylinder body, and the optical fiber is fixed on the front end of the support plate in a cantilevered manner, and the support plate and the piezoelectric material cylinder body have a coincident part in the front-rear direction, and the support plate and the coincident part make the natural frequency of the combination of the piezoelectric material cylinder body, the support plate and the optical fiber in the horizontal direction greater than the same order natural frequency of the combination in the vertical direction, and make the combination in the vertical direction closest to a certain order natural frequency between the V order natural frequency in the horizontal direction and the V order natural frequency in the vertical direction, and V is an integer greater than or equal to 1.
2. A Lissajous fiber scanner with a support plate as claimed in claim 1, characterized in that, The difference value satisfies that when the combination is driven by a driving signal to make Lissajous scanning, the vibration in the horizontal direction and the vibration in the vertical direction of the combination do not couple.
3. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The difference value ranges from 10 Hz to 12 KHz.
4. A Lissajous fiber scanner with a support plate as claimed in claim 3, characterized in that, The difference value ranges from 1 KHz to 10 KHz.
5. A Lissajous fiber scanner with a support plate as claimed in claim 1 or 2, characterized in that, The natural frequency of the piezoelectric material cylinder body in the horizontal direction and the same order natural frequency in the vertical direction are the same or similar.
6. A Lissajous fiber scanner with a support plate as claimed in claim 1, characterized in that, When the inner surface and the outer surface of the left and right sides of the piezoelectric material cylinder body are respectively provided with the first inner electrode and the corresponding first outer electrode, the first inner electrodes of the left and right sides of the piezoelectric material cylinder body are symmetrically arranged.
7. A Lissajous fiber scanner with a support plate as claimed in claim 1, characterized in that, When the inner surface and the outer surface of the upper and lower sides of the piezoelectric material cylinder body are respectively provided with the second inner electrode and the corresponding second outer electrode, the second inner electrodes of the upper and lower sides of the piezoelectric material cylinder body are symmetrically arranged.
8. A Lissajous fiber scanner with a support plate as claimed in claim 5, characterized in that, The natural frequency of the piezoelectric material cylinder body in the horizontal direction and the same order natural frequency in the vertical direction are the same, and the outer contour of the piezoelectric material cylinder body is a square, and the center hole with a square or circular contour coaxial with the outer contour is arranged in the piezoelectric material cylinder body.
9. A Lissajous fiber scanner with a support plate as claimed in claim 5, characterized in that, The piezoelectric material cylindrical body has the same natural frequency in the horizontal direction and the vertical direction, a circular outer profile, and a center hole with a coaxial center with the outer profile and a circular or square profile.
10. A Lissajous fiber scanner with a support plate as claimed in claim 8 or 9, characterized in that V order is first order, and U order is second order.