Lissajous optical fiber scanner with double driving parts
By adjusting the shape and size parameters of the sheet piezoelectric actuator, the vibration coupling problem of the Lissajous scanner was solved, and a dual-drive Lissajous fiber scanner with high efficiency and high yield was achieved.
Patent Information
- Application Number
- CN202520593531.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2026-02-06
- Estimated Expiration
- 2034-12-30
AI Technical Summary
Existing Lissajous scanners are prone to vibration coupling effects when the natural frequencies used in two directions are close, resulting in scanning trajectory distortion and making it difficult to guarantee processing accuracy and yield.
A dual-drive Lissajous fiber optic scanner is designed. By adjusting the shape and size parameters of the sheet-like piezoelectric actuator, the natural frequencies of the combined part in two directions are made to be both close and different, thus avoiding vibration coupling and reducing the difficulty of processing and the accuracy requirements.
It achieves excellent scanning results and a uniform and dense scanning grid, while improving processing efficiency and yield.
Smart Images
Figure CN223883853U_ABST
Abstract
Description
[0001] This application is a divisional application of the Chinese patent application with the application number 2024232650125, the name of invention is "a double driving part lissajous fiber scanner", which was filed on December 30, 2024, and the whole content is incorporated into this application by reference. TECHNICAL FIELD
[0002] The present application relates to the technical field of fiber scanner structure, in particular to a double driving part lissajous fiber scanner. BACKGROUND
[0003] The fiber scanner is a display technology that uses a scanning driver to control the swing of the optical fiber while the light emitted by the optical fiber. It is mainly used in the technical fields of fiber scanning display technology, fiber scanning endoscope technology, fiber scanning radar, etc. When the fiber scanner is applied to image display, the color of the pattern illuminated by this technology is sharp and saturated, the contrast is high, the brightness is high, and the structure is very small.
[0004] The fiber scanner uses the principle of mechanical resonance to make the cantilever of the optical fiber achieve a larger scanning range. The scanning mode of the scanning driver can be divided into spiral scanning, grid scanning and lissajous scanning. The miniature piezoelectric scanning device of lissajous scanning generally has two driving parts, which drive the scanning device to vibrate in two directions at the same time. The closer the driving frequencies of the two directions in lissajous scanning, the closer the uniformity (density) of the scanning grid in the two directions, and theoretically the closer the driving frequencies of the two directions, the better. However, the closer the inherent frequencies used in the two directions of the scanner, the more obvious the vibration coupling effect will be, which will worsen the scanning trajectory, cause uncontrollable components in the scanning trajectory and result in distortion of the scanning image, which is difficult to completely eliminate through post-processing. Therefore, the inherent frequencies used in the two directions of the lissajous scanner should have a precise difference range, neither too small to cause coupling effect, nor too large to cause non-uniformity.
[0005] However, the lissajous scanner that processes and manufactures inherent frequencies with a precise difference in the two directions requires extremely high processing precision, and neither the cost of processing equipment nor the yield can be guaranteed. Practical new type content
[0006] The present application provides a double driving part lissajous fiber scanner to reduce the processing difficulty and improve the processing yield.
[0007] In order to achieve the above application purpose, the present application provides a double driving part lissajous fiber scanner, which comprises a cylindrical body and an optical fiber,
[0008] The axis extension direction of the cylinder body is the front-rear direction, the rear end of the cylinder body is fixedly connected with the base, and the cylinder body is supported by the base,
[0009] The cylinder body is composed of an upper opening base body and a sheet-shaped piezoelectric actuating part covering the upper opening of the base body, the front end of the sheet-shaped piezoelectric actuating part is beyond the front end of the base body, the part of the sheet-shaped piezoelectric actuating part connected with the base body forms a cylinder coinciding part with the base body, the front end of the sheet-shaped piezoelectric actuating part vibrates in the vertical direction, and the optical fiber is fixedly arranged at the front end of the sheet-shaped piezoelectric actuating part in a cantilever support manner,
[0010] At least one side of the cylinder coinciding part is provided with a first piezoelectric sheet, and the front end of the cylinder body is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet,
[0011] The sheet-shaped piezoelectric actuating part makes the inherent frequency of the combination part composed of the cylinder body, the first piezoelectric sheet and the optical fiber in the horizontal direction greater than the same order inherent frequency of the combination part in the vertical direction, and makes the combination part have a difference between the certain order inherent frequency closest to the V order inherent frequency in the horizontal direction and the V order inherent frequency in the vertical direction, and V is an integer greater than or equal to 1.
[0012] The combination part has a first order inherent frequency, a second order inherent frequency, a third order inherent frequency, …, and an N order inherent frequency in the vertical direction, and there is a certain order (for example, U order, U is an integer greater than or equal to two) inherent frequency closest to the V order inherent frequency in the horizontal direction (V is less than U) of the combination part, the closer the driving frequencies in the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and the more the number of points is, and theoretically the closer the driving frequencies in the two directions are, the better, but the closer the inherent frequencies used by the combination part in the two directions are, the more obvious the coupling effect is, so that the application adjusts the shape structure and / or size parameters of the sheet-shaped piezoelectric actuating part, so that the inherent frequencies of the combination part used in the two directions at the same time meet the requirements of being close enough to ensure good scanning effect and have uniform and dense scanning grid, and at the same time have enough difference, so that the vibration of the combination part in the two directions will not be coupled. In the embodiment, the V order is the first order and the U order is the second order. Of course, this is only the parameter selection of the embodiment, and in other embodiments of the similar structure type, V can also be selected as an integer greater than 1, and U can be selected as an integer greater than V
[0013] Therefore, the application adjusts the shape structure and / or size parameters of the sheet-shaped piezoelectric actuating part to make the vibration frequencies of the combination part in the two directions meet the Lissajous scanning working condition requirements, reduces the processing size and precision requirements of the cylinder body, makes the processing difficulty of the cylinder body low, the processing error easy to control, and the yield high.
[0014] The difference satisfies that when the combination part is driven to perform Lissajous scanning, the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction do not generate coupling.
[0015] Generally, the difference ranges from 10 Hz to 12 KHz. Further preferably, the difference ranges from 1 KHz to 10 KHz. The difference is selected according to the value of the V-order natural frequency of the scanner cantilever in the horizontal direction, as long as the scanner cantilever has sufficient amplitude when the piezoelectric actuator is driven to perform Lissajous scanning, and the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction do not generate coupling. For those skilled in the art, numerical selection according to the above description is a routine technical means in the art.
[0016] Optionally, any one side of the left and right sides of the cylindrical coincidence part is provided with a first piezoelectric sheet, and the front end of the cylindrical coincidence part is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet. The number of first piezoelectric sheets can be one, two or more. When the number of first piezoelectric sheets is two or more, each first piezoelectric sheet synchronously and equally expands and contracts.
[0017] Optionally, the left and right sides of the cylindrical coincidence part are both provided with first piezoelectric sheets, the first piezoelectric sheet on the left side synchronously and reversely expands and contracts with the first piezoelectric sheet on the right side, and the front end of the cylindrical coincidence part is driven to vibrate left and right in the horizontal direction. The number of first piezoelectric sheets on the same side can be one, two or more. When the number of first piezoelectric sheets on the same side is two or more, the first piezoelectric sheets on the same side synchronously and equally expand and contract.
[0018] Preferably, the surface of the cylindrical coincidence part provided with the first piezoelectric sheet is a plane, so as to facilitate the arrangement of the piezoelectric sheet. Further optionally, the surface of the cylindrical coincidence part provided with the first piezoelectric sheet can be the inner surface of the cylindrical coincidence part, or the outer surface of the cylindrical coincidence part.
[0019] Further preferably, when the left and right sides of the cylindrical coincidence part are both provided with first piezoelectric sheets, the first piezoelectric sheets on the left and right sides of the cylindrical coincidence part are symmetrically arranged, so as to drive the cylindrical coincidence part to accurately vibrate left and right in the horizontal direction, without generating a displacement component in the vertical direction.
[0020] One or more technical solutions in the present application have at least the following technical effects or advantages:
[0021] The piezoelectric actuating part of the Lissajous scanner does not necessarily have a specific difference in the inherent frequency in two driving directions, and coupling of vibration in the two driving directions can be avoided, and the processing difficulty and the requirement of processing precision are reduced. The adjustment of the shape structure and / or size parameter of the sheet-shaped piezoelectric actuating part 103 is used to make the vibration frequency of the combined part in two directions meet the Lissajous scanning working condition requirement, and the processing size and precision requirement of the barrel-shaped body are reduced, so that the barrel-shaped body has low processing difficulty, the processing error is easy to control, the yield is high, and the processing efficiency and yield are significantly improved. BRIEF DESCRIPTION OF DRAWINGS
[0022] Figure 1 It is a structural schematic diagram of the utility model. DETAILED DESCRIPTION
[0023] The technical solutions in the embodiments of the application will be clearly and completely described below with reference to the drawings in the embodiments of the application. Obviously, the described embodiments are only part of the embodiments of the application, rather than all the embodiments. Based on the embodiments in the application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the application.
[0024] Embodiment:
[0025] Combined Figure 1 As shown in the drawings, a double-drive Lissajous optical fiber scanner includes a barrel-shaped body and an optical fiber 104,
[0026] The barrel-shaped body is fixedly connected with the base 200 at the rear end of the barrel-shaped body, and is supported by the base 200,
[0027] The barrel-shaped body is composed of an upper opening base body 100 and a sheet-shaped piezoelectric actuating part 103 covering the upper opening of the base body 100, the front end of the sheet-shaped piezoelectric actuating part 103 exceeds the front end of the base body 100, the part of the sheet-shaped piezoelectric actuating part 103 connected with the base body 100 forms a barrel-shaped coincident part with the base body 100, the front end of the sheet-shaped piezoelectric actuating part 103 vibrates in the vertical direction, and the optical fiber 104 is fixedly arranged at the front end of the sheet-shaped piezoelectric actuating part 103 in a cantilever support manner,
[0028] At least one side of the barrel-shaped coincident part is provided with a first piezoelectric sheet 101, and the front end of the barrel-shaped body is driven to vibrate left and right in the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101,
[0029] The sheet piezoelectric actuating part 103 makes the natural frequency of the combination part in the horizontal direction greater than the same order natural frequency of the combination part in the vertical direction, and makes the combination part in the vertical direction have a difference between a certain order natural frequency closest to the V order natural frequency in the horizontal direction and the V order natural frequency in the horizontal direction, V being an integer greater than or equal to 1.
[0030] The combination part has a first order natural frequency, a second order natural frequency, a third order natural frequency,..., and an N order natural frequency in the vertical direction, wherein a certain order (for example, U order, U being an integer greater than or equal to two) natural frequency is closest to the V order natural frequency in the horizontal direction (V is less than U), the closer the driving frequencies in the two directions in the Lissajous scanning are, the closer the uniformity (density) of the scanning grid in the two directions is, and the more the number of points is, and theoretically the closer the driving frequencies in the two directions are, the better, but the closer the natural frequencies used by the combination part in the two directions are, the more obvious the coupling effect is, so the application adjusts the shape structure and / or size parameters of the sheet piezoelectric actuating part 103 to make the natural frequencies of the combination part used in the two directions meet the requirements of the Lissajous scanning condition, and at the same time, the difference is sufficient to make the vibration of the combination part in the two directions not coupled.
[0031] Therefore, the application adjusts the shape structure and / or size parameters of the sheet piezoelectric actuating part 103 to make the vibration frequencies of the combination part in the two directions meet the requirements of the Lissajous scanning condition, which reduces the requirements of the machining size and precision of the cylindrical body, makes the machining difficulty of the cylindrical body low, the machining error easy to control, and the yield high.
[0032] The difference satisfies that when the combination part is driven by the driving signal to make Lissajous scanning, the vibration of the combination part in the horizontal direction and the vibration of the combination part in the vertical direction will not be coupled.
[0033] Generally, the difference range is 10 Hz to 12 KHz. Further preferably, the difference range is 1 KHz to 10 KHz. The value is selected according to the selected V order natural frequency of the scanner cantilever in the horizontal direction, as long as the difference satisfies that the scanner cantilever has sufficient amplitude when the piezoelectric actuating part is driven to make Lissajous scanning, and makes the vibration of the scanner cantilever in the horizontal direction and the vibration of the scanner cantilever in the vertical direction not coupled. For those skilled in the art, numerical selection according to the above description is a conventional technical means in the art.
[0034] Optionally, the first piezoelectric sheet 101 is arranged on any one of the left and right sides of the cylindrical coincident part, and the front end of the cylindrical coincident part is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of the first piezoelectric sheet 101 can be one, two or more. When the number of the first piezoelectric sheet 101 is two or more, each of the first piezoelectric sheets 101 expands and contracts synchronously and equally.
[0035] Optionally, the first piezoelectric sheet 101 is arranged on any one of the left and right sides of the cylindrical coincident part, and the front end of the cylindrical coincident part is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of the first piezoelectric sheet 101 can be one, two or more. When the number of the first piezoelectric sheet 101 is two or more, each of the first piezoelectric sheets 101 expands and contracts synchronously and equally.
[0036] Optionally, the first piezoelectric sheet 101 is arranged on any one of the left and right sides of the cylindrical coincident part, and the front end of the cylindrical coincident part is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of the first piezoelectric sheet 101 can be one, two or more. When the number of the first piezoelectric sheet 101 is two or more, each of the first piezoelectric sheets 101 expands and contracts synchronously and equally.
[0037] Optionally, the first piezoelectric sheet 101 is arranged on any one of the left and right sides of the cylindrical coincident part, and the front end of the cylindrical coincident part is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of the first piezoelectric sheet 101 can be one, two or more. When the number of the first piezoelectric sheet 101 is two or more, each of the first piezoelectric sheets 101 expands and contracts synchronously and equally.
[0038] Optionally, the first piezoelectric sheet 101 is arranged on any one of the left and right sides of the cylindrical coincident part, and the front end of the cylindrical coincident part is driven to vibrate left and right along the horizontal direction by the expansion and contraction of the first piezoelectric sheet 101. The number of the first piezoelectric sheet 101 can be one, two or more. When the number of the first piezoelectric sheet 101 is two or more, each of the first piezoelectric sheets 101 expands and contracts synchronously and equally.
[0039] It should be noted that the above embodiments illustrate the application rather than limit the application, and alternative embodiments can be designed by those skilled in the art without departing from the scope of the appended claims. In the claims, any reference signs located between parentheses shall not be construed as limiting the claims. The word "comprise" or "include" does not exclude the presence of elements or steps not listed in the claims. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The use of the word "about" preceding an element does not exclude the presence of the element.
[0040] All of the features disclosed in this specification (including any accompanying claims, abstract and drawings) can be combined in any combination, except combinations where at least some of such features (whether property features, method features, or any combinations thereof) are mutually exclusive.
[0041] Any of the features disclosed in this specification (including any accompanying claims, abstract and drawings) can be replaced by alternative features serving the same, equivalent or similar purpose, unless specifically stated otherwise. That is, unless specifically stated otherwise, any feature is one of a number of equivalent or similar features.
Claims
1. A dual drive Lissajous fiber scanner, characterized in that, Includes cylindrical body and optical fiber, With the axial extension direction of the cylindrical body as the front-to-back direction, the rear end of the cylindrical body is fixedly connected to the base for support. The cylindrical body comprises an open-top substrate and a sheet-like piezoelectric actuator with an open-top cover substrate. The front end of the sheet-like piezoelectric actuator extends beyond the front end of the substrate. The portion of the sheet-like piezoelectric actuator connected to the substrate forms a cylindrical overlapping portion with the substrate. The front end of the sheet-like piezoelectric actuator vibrates vertically. The optical fiber is fixedly mounted on the front end of the sheet-like piezoelectric actuator using a cantilever support method. At least one of the left and right sides of the overlapping cylindrical part is provided with a first piezoelectric plate, and the extension and retraction of the first piezoelectric plate drives the front end of the cylindrical body to vibrate left and right in the horizontal direction. The sheet-shaped piezoelectric actuator causes the natural frequency of the assembly consisting of the cylindrical body, the first piezoelectric sheet, and the optical fiber in the horizontal direction to be greater than the natural frequency of the same order in the vertical direction. It also causes a difference between the natural frequency of the assembly in the vertical direction that is closest to its natural frequency of order V in the horizontal direction and the natural frequency of order V in the horizontal direction, where V is an integer greater than or equal to 1.
2. A dual drive Lissajous fiber scanner as claimed in claim 1, characterized in that, The aforementioned difference ensures that vibrations of the assembly in both directions do not couple.
3. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that The difference range is 10Hz to 12KHz.
4. A dual drive Lissajous fiber scanner as claimed in claim 3, characterized in that, The difference range is 1kHz to 10kHz.
5. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that, A first piezoelectric sheet is provided on either the left or right side of the cylindrical overlapping part, and the front end of the cylindrical overlapping part vibrates left and right in the horizontal direction by the extension and retraction of the first piezoelectric sheet.
6. A dual drive Lissajous fiber scanner as claimed in claim 1 or 2, characterized in that The first piezoelectric sheet is provided on both the left and right sides of the cylindrical overlapping part. The first piezoelectric sheet on the left side and the first piezoelectric sheet on the right side extend and retract synchronously in opposite directions and of equal length, driving the front end of the cylindrical overlapping part to vibrate left and right in the horizontal direction.
7. A dual drive Lissajous fiber scanner as claimed in claim 6, characterized in that The surface of the first piezoelectric sheet in the cylindrical overlapping part is flat.
8. A dual drive Lissajous fiber scanner as claimed in claim 6, characterized in that The first piezoelectric plates on the left and right sides of the overlapping cylindrical part are symmetrically arranged.