High-temperature suction cup cooling device and production equipment

Abstract

The utility model provides a high-temperature suction cup cooling device and production equipment, and is applied to the technical field of machine table cooling, a workbench is arranged on a machine table, the table top of the workbench is used for mounting a suction cup, a connecting bridge is located above the suction cup, and the moving plane of the connecting bridge is parallel to the table top of the workbench; the air blowing pipe is installed on the connecting bridge, one end of the air blowing pipe is used for being filled with air, the other end of the air blowing pipe is communicated with an air blowing device, and the air blowing device corresponds to the suction cup so that the moving air blowing device can blow air to the suction cup for cooling. According to the cooling device, the air blowing pipe is filled with air, the air is released through the air blowing device, the connecting bridge is moved back and forth, the connecting bridge drives the air blowing device to conduct air blowing cooling on the suction cup below, the machine table without air cooling is rapidly cooled, the cooling rate is increased, and the purposes of saving time and improving production efficiency are achieved.

Description

TECHNICAL FIELD

[0001] The application relates to a high-temperature chuck cooling device and production equipment. BACKGROUND

[0002] To solve the problem of cooling of a machine table, such as a wafer chuck, without air cooling, the shift personnel adopts the method of static cooling. First, static cooling, the engineer sets the parameters, and then uses the static cooling method, but it takes 3-4 hours to cool the machine table to room temperature, the cooling rate is slow, and the machine time is seriously wasted, which is not conducive to rapid recovery of production.

[0003] Therefore, there is a need for a new technical solution. CONTENT OF THE INVENTION

[0004] Therefore, the application provides a high-temperature chuck cooling device and production equipment.

[0005] The application provides the following technical solutions:

[0006] The high-temperature chuck cooling device comprises a workbench arranged on a machine table, and a table top of the workbench is used for mounting a chuck.

[0007] The cooling device comprises a plurality of supporting members, a moving assembly, a connecting bridge, a blowing pipe and a blowing device.

[0008] The plurality of supporting members are fixed on the machine table, and the plurality of supporting members are located on both sides of the chuck.

[0009] The connecting bridge is movably connected to the supporting members on both sides through the moving assembly, so that the connecting bridge is located above the chuck, and a moving plane of the connecting bridge is parallel to the table top of the workbench.

[0010] The blowing pipe is mounted on the connecting bridge, one end of the blowing pipe is used for filling gas, the other end of the blowing pipe is communicated with the blowing device, and the blowing device corresponds to the chuck, so that the blowing device moves towards the chuck to blow and cool.

[0011] Preferably, the cooling device further comprises a hose and an air compressor.

[0012] One end of the blowing pipe is connected to one end of the hose, and the other end of the hose is connected to the air compressor, so that the blowing pipe fills the compressed air of the air compressor.

[0013] Preferably, the cooling device further comprises a tank chain.

[0014] One end of the tank chain is connected to the connecting bridge, the other end of the tank chain is connected to the air compressor, and the hose is located in the tank chain so that the hose deforms along with the tank chain.

[0015] Preferably, the blowing device has a switching port and a switching valve.

[0016] The other end of the blowing pipe is connected to the switching port, and the switching valve is used to control the opening and closing of the gas passing through the blowing device.

[0017] The switching valve is a solenoid valve, and the blowing pipe is a quarter pipe.

[0018] Preferably, the two side supports are located on both sides of the workbench, and the workbench is movably arranged on the machine table so that the workbench drives the suction cup to move to the cooling device.

[0019] Preferably, the connecting assembly includes a mounting member, a first moving assembly, and / or a second moving assembly.

[0020] The two mounting members are respectively fixed at the two ends below the connecting bridge.

[0021] The first moving assembly includes a sliding groove and a linear guide rail, the sliding groove is formed on the mounting member, and the two linear guide rails are respectively fixed on the two side supports.

[0022] The second moving assembly includes a sleeve and a sliding rod, the sleeve is fixed on the mounting member, the two sliding rods are respectively fixed on the two side supports, and the sleeve is slidably sleeved on the sliding rod.

[0023] Preferably, the second moving assembly further includes a limiting block fixed at the two ends of the sliding rod, and the limiting block is fixed on the support, and the limiting block is used to limit the sliding distance of the sleeve.

[0024] Preferably, the connecting bridge is in the shape of a plate, and the two ends of the connecting bridge are provided with an avoiding groove, and the avoiding groove is in the shape of L and penetrates through the connecting bridge along the moving direction of the connecting bridge.

[0025] Preferably, the blowing position of the blowing device is located at the middle position below the connecting bridge.

[0026] According to the production equipment provided by the embodiment of the present application, the machine table, the workbench, the suction cup, and the high-temperature suction cup cooling device are provided.

[0027] Compared with the prior art, the above-mentioned at least one technical scheme adopted by the embodiment of the present application can achieve at least the following beneficial effects:

[0028] The cooling device of the application, the blowing pipe is filled with gas, and the gas is released through the blowing device, the connecting bridge is moved back and forth, the connecting bridge drives the blowing device to blow and cool the suction cup below, the machine table without air cooling is quickly cooled, the cooling rate is improved, the purpose of saving time and improving production efficiency is achieved. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical solutions of the embodiments of the application, the drawings needed in the embodiments will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the application, and all other drawings obtained by those of ordinary skill in the art without creative labor based on these drawings also belong to the protection scope of the application.

[0030] Figure 1 is a structural schematic diagram of the cooling device in the application;

[0031] Figure 2 is a schematic diagram of the position of the blowing pipe and the blowing device in the application;

[0032] Figure 3 is a structural schematic diagram of the blowing device in the application.

[0033] Reference signs: 1, linear guide rail; 2, connecting bridge; 3, quarter pipe; 4, blowing device; 401, front surface; 402, back surface; 5, sliding rod; 6, sleeve; 7, limiting block; 8, supporting plate; 9, avoiding groove; 10, head cover fixing place; 11, sliding rail. DETAILED DESCRIPTION

[0034] The embodiments of the application will be described in detail below with reference to the drawings.

[0035] The embodiments of the application are described below through specific concrete examples, and those skilled in the art can easily understand other advantages and effects of the application from the disclosure. Obviously, the described embodiments are only some of the embodiments of the application, not all. The application can also be implemented or applied by other different specific embodiments, and each detail in the specification can be modified or changed based on different views and applications without departing from the spirit of the application. It should be noted that the following embodiments and features in the embodiments can be combined with each other without conflict. Based on the embodiments in the application, all other embodiments obtained by those of ordinary skill in the art without creative labor also belong to the protection scope of the application.

[0036] It is to be appreciated that various aspects of the embodiments described below are presented for illustration and that the described aspects are merely examples of the many aspects of the application. Any feature, structure, and / or function described herein can be combined in any manner by those skilled in the art to create additional aspects of the application. It is to be understood that the foregoing general description and the following detailed description are exemplary and explanatory only and are not intended to be restrictive of any aspect of the application.

[0037] It is also to be understood that the above-referenced apparatus, methods and devices are merely meant to be exemplary of the many possible applications of the application. Numerous other embodiments of the application will be apparent to those skilled in the art in view of the foregoing detailed description of the application.

[0038] Furthermore, in the following description, numerous specific details are set forth in order to provide a thorough understanding of the examples. However, it will be apparent to one skilled in the art that the examples can be practiced without these specific details.

[0039] Therefore, the applicant, through in-depth research and improvement exploration on the cooling of the machine and the cooling of the high-temperature chuck, found that the shift personnel also used the method of blowing the chuck with a nitrogen hose to cool it. The surface of the chuck is directly blown with a hose, but the hose has only one hole and the hole diameter is small, and the cooling efficiency is slow.

[0040] The Chinese utility model patent document with publication number CN215491232U discloses a method of cooling the hot plate directly by uniformly placing the base on the pipeline on the workbench surface of the hot plate and introducing cooling liquid and / or inert gas into the pipeline, which can effectively improve the cooling speed of the hot plate and shorten the cooling time of the hot plate. At the same time, according to the actual demand, the gas-liquid combined method can be used for cooling, the cooling speed is faster, and the cooling speed can be adjusted and controlled.

[0041] Based on this, the following describes the technical solutions provided by the embodiments of the application in combination with the drawings.

[0042] The high-temperature chuck cooling device disclosed by the embodiments of the present specification is shown in FIG. 1. Figure 1 Figure 2 As shown in FIG. 1, a workbench is arranged on the machine, and the surface of the workbench is used to install the chuck.

[0043] ​The cooling device comprises a plurality of supporting members, a moving assembly, a connecting bridge 2, a blowing pipe and a blowing device 4. The plurality of supporting members are fixed on a machine table and located on both sides of a suction cup. For example, the supporting members can be located on both sides of a workbench. The two ends of the connecting bridge 2 are respectively connected to the supporting members on both sides through the moving assembly, so that the connecting bridge 2 is located above the suction cup, and the moving plane of the connecting bridge 2 is parallel to the table top of the workbench. The blowing pipe is installed on the connecting bridge 2. The blowing pipe can pass through the inside of the bridge or be located at the lower part of the bridge. One end of the blowing pipe is used to fill gas, and the other end of the blowing pipe is connected to the blowing device 4. The blowing device 4 corresponds to the suction cup, so that the blowing device 4 moves towards the suction cup to blow and cool. The connecting bridge 2 can be driven to move by a driving member, such as a motor. Figure 1 The bidirectional arrow indicates the direction of the back-and-forth movement of the connecting bridge 2. The supporting members can be supporting plates 8, and the number of the supporting members can be four. The supporting members on both sides are symmetrically arranged. The suction cup is positioned on the workbench mainly by three positioning columns on the back of the chuck top plate. Meanwhile, there are three screw holes on the front, which correspond to the screw holes on the base of the suction cup, and three screws can be fixed. The head plate is fixed on the supporting plate 8, and the machine table is provided with a slide rail 11 moving in the Y direction, i.e., Y Guide chuck.

[0044] In an embodiment, the cooling device further comprises a hose and an air compressor. One end of the blowing pipe is connected to one end of the hose, and the other end of the hose is connected to the air compressor, so that the blowing pipe fills the compressed air of the air compressor.

[0045] In an embodiment, the cooling device further comprises a tank chain. One end of the tank chain is connected to the connecting bridge 2, and the other end of the tank chain is connected to the air compressor. The hose is located in the tank chain, so that the hose deforms along with the tank chain.

[0046] In an embodiment, as shown in Figure 2 and Figure 3 , the blowing device 4 has an adapter and a switch valve. The other end of the blowing pipe is connected to the adapter, and the switch valve is used to control the opening and closing of the gas passing through the blowing device 4. The switch valve is an electromagnetic valve, and the blowing pipe is a quarter pipe 3. The adapter can be located on the back 402 of the blowing device 4, and the electromagnetic valve can be located on the front 401 of the blowing device 4.

[0047] As shown in Figure 2 and Figure 3As shown, the cooling device is connected to the back 402 of the air blowing device 4 through a quarter pipe 3, passes through the bridge, and is connected to the compressed air outside the machine table through the tank. The air blowing device 4 is installed with an electromagnetic valve to control the opening and closing of the air. The air blowing device 4 is, for example, an arm electromagnetic valve. The air blowing device 4 is composed of an electromagnetic valve, a fixing device, and an air outlet. It is arranged in the middle of the bridge, the air outlet is downward, and it can move back and forth through the chuck to achieve the purpose of rapid cooling.

[0048] In an embodiment, the workbench is movably arranged on the machine table, so that the workbench drives the chuck to move to the cooling device.

[0049] In an embodiment, the chuck is moved below the air blowing device 4 when in use, and then a program is designed to move the bridge back and forth with the chuck as the diameter according to the principle of air blowing. After the program is opened, the chuck automatically moves to the middle of the stage, the bridge moves above the chuck to start blowing and moving back and forth, and the chuck can be cooled to the set range. The stage represents the cavity of the prober.

[0050] In an embodiment, as shown, Figure 1 The connecting assembly includes a mounting member, a first moving assembly, and / or a second moving assembly. Two mounting members are fixed at the two ends below the connecting bridge 2. The first moving assembly includes a sliding groove and a linear guide 1 (LM Guide) matched with sliding. The sliding groove is formed on the mounting member, and two linear guides 1 are fixed on the two side support members. The second moving assembly includes a sleeve 6 and a slide rod 5. The sleeve 6 is fixed on the mounting member, two slide rods 5 are fixed on the two side support members, and the sleeve 6 is slidably sleeved on the slide rod 5. The sliding groove is U-shaped. The sliding groove can be formed on the mounting member or a U-shaped block is fixed on the mounting member, and the linear guide 1 is a rod-shaped structure of a cuboid. The sleeve 6 is fixed in the U-shaped notch of the mounting member. The slide rod 5 and the linear guide 1 are both connected and fixed on the two support members on the same side.

[0051] In an embodiment, as shown, Figure 1 The second moving assembly further includes a limiting block 7 fixed at the two ends of the slide rod 5, and the limiting block 7 is fixed on the support member. The limiting block 7 is used to limit the sliding distance of the sleeve 6.

[0052] In an embodiment, as shown, Figure 1 The connecting bridge 2 is plate-shaped, and two ends of the connecting bridge 2 are provided with avoiding grooves 9. The avoiding grooves 9 are L-shaped and penetrate through the connecting bridge 2 along the moving direction of the connecting bridge 2. The avoiding grooves 9 can avoid the related parts on the support member when the connecting bridge 2 moves.

[0053] In one embodiment, as shown in Figure 2 The blowing position of the blowing device 4 is located at the middle position under the connecting bridge 2.

[0054] The embodiments of the present application also disclose a production equipment, as shown in Figure 1 The equipment comprises a machine table, a workbench, a suction cup and the high-temperature suction cup cooling device of any one of the above embodiments.

[0055] The novel tool of the present application is the blowing device 4 for rapidly cooling the high-temperature chuck, and the machine table without air cooling is rapidly cooled, so that the time is saved and the production efficiency is improved. The device has simple material structure and can achieve the purpose of rapid cooling, save manpower and material resources, and improve production efficiency.

[0056] In the present application, the same and similar parts among various embodiments can be referred to each other, and each embodiment focuses on the difference from other embodiments. In particular, for the embodiments described later, the description is relatively simple, and the relevant parts can be referred to the part of the foregoing embodiments.

[0057] The above is only a specific implementation of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can easily think of changes or replacements within the technical range disclosed in the present application, which should be covered in the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A high temperature chuck cooling device, characterized by, The workbench is arranged on the machine table, and a table top of the workbench is used for mounting a suction cup; The cooling device comprises a plurality of supporting members, a moving assembly, a connecting bridge, a blowing pipe and a blowing device; The plurality of supporting members are fixed on the machine table and located on both sides of the suction cup; The two ends of the connecting bridge are respectively connected to the supporting members on both sides through the moving assembly, so that the connecting bridge is located above the suction cup, and a moving plane of the connecting bridge is parallel to the table top of the workbench; The blowing pipe is mounted on the connecting bridge, one end of the blowing pipe is used for filling gas, the other end of the blowing pipe is communicated with the blowing device, and the blowing device corresponds to the suction cup, so that the blowing device moves towards the suction cup to blow and cool.

2. The high temperature chuck cooling apparatus of claim 1, wherein The cooling device further comprises a hose and an air compressor; One end of the blowing pipe is connected to one end of the hose, and the other end of the hose is connected to the air compressor, so that the blowing pipe fills the compressed air of the air compressor.

3. The high temperature chuck cooling apparatus of claim 2, wherein, The cooling device further comprises a tank chain; One end of the tank chain is connected to the connecting bridge, and the other end of the tank chain is connected to the air compressor, and the hose is located in the tank chain, so that the hose deforms along with the tank chain.

4. The high temperature chuck cooling apparatus of claim 1, wherein The blowing device has a switching port and a switch valve; The other end of the blowing pipe is connected to the switching port, and the switch valve is used for controlling the opening and closing of the gas passing through the blowing device; The switch valve is an electromagnetic valve, and the blowing pipe is a quarter pipe.

5. The high temperature chuck cooling apparatus of claim 1, wherein, The supporting members on both sides are located on both sides of the workbench, and the workbench is movably arranged on the machine table, so that the workbench drives the suction cup to move to the cooling device.

6. The high temperature chuck cooling apparatus of claim 1, wherein The moving assembly comprises a mounting member, a first moving assembly and / or a second moving assembly; Two mounting members are respectively fixed at the two ends below the connecting bridge; The first moving assembly comprises a sliding groove and a linear guide rail, the sliding groove is formed on the mounting member, and two linear guide rails are respectively fixed on the supporting members on both sides; The second moving assembly comprises a sleeve and a sliding rod, the sleeve is fixed on the mounting member, two sliding rods are respectively fixed on the supporting members on both sides, and the sleeve is slidably sleeved on the sliding rod.

7. The high temperature chuck cooling apparatus of claim 6, wherein, The second moving assembly further comprises a limiting block fixed on the two ends of the sliding rod, and the limiting block is fixed on the supporting member, and the limiting block is used for limiting the sliding distance of the sleeve.

8. The high temperature chuck cooling apparatus of claim 1, wherein, The connecting bridge is in the form of a plate, and two ends of the connecting bridge are provided with avoiding grooves, and the avoiding grooves are in the form of L and penetrate through the connecting bridge along the moving direction of the connecting bridge.

9. The high temperature chuck cooling apparatus of claim 1, wherein, The blowing position of the blowing device is located at the middle position below the connecting bridge.

10. A production apparatus characterized by comprising: The cooling device comprises a machine table, a workbench, a suction cup and the high-temperature suction cup cooling device of any one of claims 1-9.

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