Dust removal equipment for four groups of rapping structures in vacuum environment

Abstract

The utility model belongs to the technical field of photovoltaic and semiconductor crystal pulling dust removal, and particularly relates to dust removal equipment for four groups of rapping structures in a vacuum environment, which comprises four groups of fixed rapping mechanisms, so that the filtering area is increased, the number of filter bags is increased, and the layout is changed; the fixed rapping structure comprises a cylinder and a cylinder mounting structure, the mounting structure is simple, and the production cost is greatly reduced; the layout mode of four groups of filter bags is changed, and space is efficiently utilized; the observation window is arranged at the air outlet of the equipment, so that dust can be effectively blocked when the filter bag is damaged and leaks dust, the dust can more easily stay on glass, and problems can be found in time; an oxidation air inlet assembly is designed at the automatic ash removal pipeline, and the tank body enters the oxidation stage to simultaneously intake air up and down to accelerate the oxidation efficiency and reduce the oxidation duration. According to the utility model, the number of filter bags is increased, the outer diameter of equipment is increased, the rapping force is ensured, and the number of rapping mechanisms is increased, so that the stability and reliability of the equipment are improved, which is an inevitable trend of large-scale equipment and conforms to the change of environment.

Description

Technical Field

[0001] This utility model belongs to the field of dust removal technology for photovoltaic and semiconductor crystal pulling, specifically a dust removal device with a four-group rapping structure for use in a vacuum environment. Background Technology

[0002] The photovoltaic industry is one of the main application areas for monocrystalline silicon. With the increasing global demand for clean energy, the photovoltaic industry is experiencing rapid growth. The production of solar cells requires a large number of monocrystalline silicon wafers, which directly drives the expansion of monocrystalline silicon production scale, thereby increasing the demand for monocrystalline silicon dust removal equipment. For example, in recent years, the number of photovoltaic power plants built in my country has been increasing, leading to a sustained rise in demand for monocrystalline silicon and providing a broad development space for the monocrystalline silicon dust removal equipment market.

[0003] The photovoltaic industry has high requirements for the quality of monocrystalline silicon, and impurities such as dust generated during the production process can seriously affect the performance and quality of monocrystalline silicon. Therefore, in order to improve product competitiveness and continuously pursue higher quality standards, more advanced and efficient dust removal equipment is needed to ensure the production quality of monocrystalline silicon, thereby driving the continuous upgrading of monocrystalline silicon dust removal equipment technology and market development.

[0004] Therefore, to meet the demands of large-scale production and adapt to the higher requirements of upstream and downstream equipment, there is an urgent need for dust removal equipment with a larger filtration area. Simply increasing the height of the equipment may not meet the requirements of the on-site environment. Therefore, it is necessary to increase the number of filter bags, increase the outer diameter of the equipment, and increase the number of rapping mechanisms to improve the stability and reliability of the equipment. This is an inevitable trend of equipment scaling up and also adapts to the changing environment. Utility Model Content

[0005] In order to meet the requirements of dust removal equipment in monocrystalline silicon production, the purpose of this utility model is to provide a dust removal device with a four-group rapping structure for vacuum environment.

[0006] The objective of this utility model is achieved through the following technical solution:

[0007] This utility model includes an upper cover, a base, a fixed vibration mechanism, and a filter bag assembly. The upper cover is connected to the base, the base has an air inlet, and the upper cover has an air outlet. The fixed vibration mechanism is mounted on the upper cover, and the filter bag assembly is located within the space enclosed by the upper cover and the base. There are four sets of fixed vibration mechanisms. The filter bag assembly includes a filter bag hanging plate, a filter bag, an upper hanging plate, a guide shaft, a linear bearing, and a spring. The upper hanging plate is connected to the four sets of fixed vibration mechanisms. The filter bag hanging plate is divided into a first filter bag hanging plate, a second filter bag hanging plate, a third filter bag hanging plate, and a fourth filter bag hanging plate, each located below the upper hanging plate, corresponding one-to-one with the four sets of fixed vibration mechanisms. The first, second, third, and fourth filter bag hanging plates are connected to the upper hanging plate via springs. Linear bearings are installed on each of the four filter bag hanging plates, and guide shafts are slidably connected to the four linear bearings on the upper hanging plate. The first and third filter bag hanging plates are opposite each other and are both trapezoidal, while the second and fourth filter bag hanging plates are opposite each other and are both rhomboid. Multiple filter bags are respectively installed on the first, second, third, and fourth filter bag hanging plates. Each filter bag is closed at the top and open at the bottom. The top of each filter bag is connected to the filter bag hanging plate, and the bottom of each filter bag is installed on the lower partition plate. The lower partition plate is fixed inside the upper cover and has multiple through holes corresponding to the bottom of each filter bag. The upper cover is equipped with a venting solenoid valve A, and the base is equipped with an automatic dust removal port. An oxidation air intake component is connected to the automatic dust removal port. Air is simultaneously introduced from the top and bottom through the venting solenoid valve A and the oxidation air intake component to accelerate the oxidation efficiency inside the upper cover and the base.

[0008] Wherein: each of the filter bags is arranged in a hexagonal shape, and the first filter bag hanging plate and the third filter bag hanging plate are both isosceles trapezoids.

[0009] The air inlet of the device is located below the lower partition, and the air outlet of the device is located above the upper mounting plate.

[0010] The oxidation air intake assembly includes a venting solenoid valve B, a pressure regulating valve, and an air pipe B. The venting solenoid valve B is installed at the automatic dust removal port. One end of the air pipe B is connected to the venting solenoid valve B, and the other end is connected to an air compressed air source. The air pipe B is equipped with a pressure regulating valve.

[0011] A manual ball valve is installed between the venting solenoid valve B and the automatic dust removal port. When the venting solenoid valve B is normally open, the air pipe B is closed through the manual ball valve.

[0012] An observation window is installed on the air outlet of the equipment. The observation window includes an observation window pipe, a flange, a window glass, and an outer cover. The observation window pipe is fixed on the air outlet of the equipment. The axial center line of the observation window pipe is perpendicular to the axial center of the air outlet of the equipment. One end of the observation window pipe is provided with a flange. The outer cover is connected to the flange. The window glass is sandwiched between the outer cover and the flange. The upper half of the axial section of the other end of the observation window pipe extends into the air outlet of the equipment.

[0013] The fixed rapping mechanism includes a cylinder, a rapping mounting tube, a rapping mounting flange, a threaded straight connector, and an air pipe A. The rapping mounting tube is fixed in the opening at the top of the upper cover, and the lower end of the rapping mounting tube inside the upper cover is fixedly connected to the rapping mounting flange. The cylinder is housed in the rapping mounting tube and is sealed on the rapping mounting flange, with the piston of the cylinder facing the filter bag hanging plate. Threaded straight connectors are installed at the upper and lower ends of the cylinder, and the threaded straight connectors at both ends are connected through the air pipe A.

[0014] An electrical control cabinet and an electrical contact pressure gauge are respectively installed on the top cover. The electrical contact pressure gauge, the venting solenoid valve A, and the venting solenoid valve B in the oxidation intake assembly are respectively connected to the electrical control cabinet.

[0015] The upper cover includes a head and a cylindrical body. The upper end of the cylindrical body is sealed to the head, and the lower end is provided with a flange for sealing connection with the base. The head is elliptical and has four through holes for installing four fixed vibration mechanisms. The two sides of the head are symmetrically provided with lifting lugs for hoisting the dust removal equipment. The cylindrical body of the upper cover has a side-opening maintenance door for maintaining the filter bags.

[0016] The base includes a base cylinder and a base end cap. The upper end of the base cylinder is provided with a base flange for sealing connection with the upper cover, and the lower end is sealed with the base end cap. The lowest point of the base end cap is provided with a dust removal port. The bottom of the base end cap is provided with adjustable support legs and casters.

[0017] The advantages and positive effects of this utility model are as follows:

[0018] 1. This utility model features four sets of fixed rapping mechanisms and a modified arrangement of the filter bags, increasing the filtration area and the amount of gas that can flow per unit time, thereby enhancing dust handling capacity and effectively extending the crystal pulling time. Furthermore, simultaneous air intake from both the top and bottom of the tank during the oxidation stage accelerates oxidation efficiency and reduces oxidation time.

[0019] 2. With the four sets of fixed vibration mechanisms of this utility model distributed in a limited circumference, each filter bag is arranged in a hexagonal pattern, and the number of adjacent filter bags in each group is not equal, so as to ensure that the distance between the filter bags is consistent and maximize the space utilization.

[0020] 3. This utility model relies on mechanical shaking to clean the filter bag, without the need for external gas intervention, has good sealing performance, can be used under vacuum negative pressure conditions, and can work normally for a long time under an internal vacuum of 2 Pa negative pressure conditions.

[0021] 4. This utility model has an observation window at the air outlet of the equipment. The observation window pipe is designed with one end on the outside of the air outlet and the other end on the inside of the air outlet. This makes it easier to effectively block dust when the filter bag is damaged and leaks dust, and makes it easier for dust to stay on the glass, so that problems can be detected in time. Attached Figure Description

[0022] Figure 1 This is a front view of the structure of this utility model;

[0023] Figure 2 This is a top view of the structure of this utility model;

[0024] Figure 3 This is a schematic diagram of the structure of the fixed vibration mechanism of this utility model;

[0025] Figure 4 This is one of the structural schematic diagrams of the filter bag and filter bag hanging plate layout of this utility model (60 filter bags arranged);

[0026] Figure 5 This is the second structural schematic diagram of the filter bag and filter bag hanging plate layout of this utility model (54 filter bags arranged);

[0027] Figure 6 This is a partial enlarged view of the fixed vibration mechanism and filter bag assembly of this utility model;

[0028] Figure 7 This is a schematic diagram of the structure of the observation window of this utility model;

[0029] Figure 8 This is a schematic diagram of the structure of the oxidation air intake assembly of this utility model;

[0030] Wherein: 1 is the dust removal equipment, 2 is the top cover, 201 is the fixed rapping mechanism, 2011 is the cylinder, 2012 is the rapping mounting pipe, 2013 is the rapping mounting flange, 2014 is the O-ring seal, 2015 is the threaded straight pipe, 2016 is the air pipe A, 202 is the lifting lug, 203 is the venting solenoid valve A, 204 is the top cover flange, 205 is the side-opening maintenance door, 206 is the top cover cylinder, 207 is the end cap, 208 is the electrical contact pressure gauge, 3 is the base, 301 is the base cylinder, 302 is the base end cap, 303 is the adjustable support leg, 304 is the caster, 305 is the dust removal port, 306 is the automatic dust removal port, 3 07 is the base flange, 308 is the manual ball valve, 309 is the venting solenoid valve B, 310 is the pressure regulating valve, 311 is the air pipe B, 4 is the filter bag assembly, 401 is the filter bag hanging plate, 4011 is the first filter bag hanging plate, 4012 is the second filter bag hanging plate, 4013 is the third filter bag hanging plate, 4014 is the fourth filter bag hanging plate, 402 is the filter bag, 403 is the upper hanging plate, 404 is the guide shaft, 405 is the linear bearing, 406 is the spring, 5 is the electrical control cabinet, 6 is the equipment air inlet, 7 is the equipment air outlet, 8 is the observation window, 801 is the observation window pipe, 802 is the flange, 803 is the window glass, and 804 is the outer cover. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit the scope of this utility model.

[0032] The dust removal device 1 of this utility model is installed between the vacuum pipe and the vacuum pump of the single crystal growth furnace. It can effectively filter the volatiles generated during the crystal pulling process, realize online dust removal, and greatly extend the continuous working time of the vacuum pump, thereby extending the continuous operation time of the single crystal growth furnace.

[0033] like Figure 1 , Figure 2 As shown, this utility model includes an upper cover 2, a base 3, a fixed vibration mechanism 201, a filter bag assembly 4, and an electrical control cabinet 5. The upper cover 2 and the base 3 are connected to form a sealed tank. The axial center line of the tank is perpendicular to the horizontal plane. An equipment air inlet 6 is provided on the base 3, and an equipment air outlet 7 is provided on the upper cover 2. The fixed vibration mechanism 201 is installed on the upper cover 2, and the filter bag assembly 4 is located in the space enclosed by the upper cover 2 and the base 3.

[0034] The upper cover 2 in this embodiment includes a head 207 and a cylindrical body 206. The upper end of the cylindrical body 206 is sealed and welded to the head 207, and the lower end is welded with a flange 204 for sealing connection with the base 3. The head 207 is elliptical to save materials and reduce the weight of the equipment. Four through holes are provided on the head 207, and four sets of fixed vibration mechanisms 201 are installed in the four through holes respectively. The two sides of the head 207 are symmetrically provided with lifting lugs 202 for transporting and disassembling the dust removal equipment 1. The cylindrical body 206 is provided with a side-opening maintenance door 205 for maintaining the filter bag 402.

[0035] The base 3 in this embodiment includes a base cylinder 301 and a base head 302. The upper end of the base cylinder 301 is provided with a base flange 307, and the lower end is sealed and welded with a base head 302. The base flange 307 is sealed and connected to the upper cover flange 204. The lowest point of the base head 302 is provided with a dust removal port 305 for routine dust removal. The bottom of the base head 302 is provided with adjustable support legs 303 and casters 304. The casters 304 are used to support the dust removal equipment 1 and facilitate the movement of the dust removal equipment 1. When it is necessary to adjust the height of the dust removal equipment 1, the adjustable support legs 303 can be adjusted to the required height for easy interface connection and convenient use.

[0036] like Figures 1-3 As shown, the fixed rapping mechanism 201 of this embodiment is located on the top of the dust removal equipment 1, including a cylinder 2011, a rapping mounting pipe 2012, a rapping mounting flange 2013, an O-ring seal 2014, a threaded straight pipe 2015, and an air pipe A2016. The rapping mounting pipe 2012 is fixed in the through hole on the end cap 207. The axis of the through hole is parallel to the axis of the upper cover 2. The four through holes are evenly arranged on the end cap 207 along the circumferential direction, corresponding one-to-one with the four fixed rapping mechanisms 201. The lower end of the rapping installation pipe 2012, located inside the tank, is fixed to a rapping installation flange 2013. The rapping installation flange 2013 is horizontally positioned, while the upper end of the rapping installation pipe 2012 is located outside the tank. A cylinder 2011 is housed within the rapping installation pipe 2012. An O-ring seal 2014 is installed in a sealing groove on the rapping installation flange 2013. The cylinder 2011 is mounted on the rapping installation flange 2013, and the O-ring seal 2014 seals the contact surface between the cylinder 2011's mounting flange and the rapping installation flange 2013. The piston of the cylinder 2011 faces vertically downwards. This structure is simpler than existing technologies, suitable for mass production, and saves costs. Threaded straight-through pipes 2015 are installed at both the upper and lower ends of the cylinder 2011, and these pipes are connected via air pipes A2016. The intake air source for cylinder 2011 can be air. Cylinder 2011 has a good airtight structure, which meets the requirements of the crystal pulling production process.

[0037] like Figures 1-6As shown, the filter bag assembly 4 in this embodiment includes a filter bag hanging plate 401, a filter bag 402, an upper hanging plate 403, a guide shaft 404, a linear bearing 405, and a spring 406. The upper hanging plate 403 is fixedly connected to the vibrating mounting tubes 2012 in the four sets of fixed vibrating mechanisms 201. The filter bag hanging plate 401 is divided into a first filter bag hanging plate 4011, a second filter bag hanging plate 4012, a third filter bag hanging plate 4013, and a fourth filter bag hanging plate, which are respectively located below the upper hanging plate 403. 4014 corresponds one-to-one with the four sets of fixed vibration mechanisms 201. The pistons of the cylinders 2011 in the four fixed vibration mechanisms 201 face the first filter bag hanging plate 4011, the second filter bag hanging plate 4012, the third filter bag hanging plate 4013, and the fourth filter bag hanging plate 4014, respectively. In this embodiment, the upper hanging plate 403 and the first filter bag hanging plate 4011, the second filter bag hanging plate 4012, the third filter bag hanging plate 4013, and the fourth filter bag hanging plate 4014 are all horizontally arranged. The first filter bag hanging plate 4011, the second filter bag hanging plate 4012, the third filter bag hanging plate 4013, and the fourth filter bag hanging plate 4014 are connected to the upper hanging plate 403 via springs 406. Linear bearings 405 are installed on each of the first filter bag hanging plate 4011, the second filter bag hanging plate 4012, the third filter bag hanging plate 4013, and the fourth filter bag hanging plate 4014. The upper hanging plate 403 is provided with guide shafts 404 that are slidably connected to the four linear bearings 405. The guide shafts 404 cooperate with the linear bearings 405 to enable the first filter bag hanging plate 4011, the second filter bag hanging plate 4012, the third filter bag hanging plate 4013, and the fourth filter bag hanging plate 4014 to move up and down relative to the upper hanging plate 403, ensuring that the filter bag 402 moves rapidly and linearly during vertical vibration, thus improving the vibration effect. Furthermore, the guide limit is at the top, allowing for sufficient downward travel. The first filter bag hanging plate 4011 and the third filter bag hanging plate 4013 are opposite each other and are both trapezoidal (preferably isosceles trapezoids), and the second filter bag hanging plate 4012 and the fourth filter bag hanging plate 4014 are opposite each other and are both rhomboid. This embodiment can accommodate 54 filter bags 402 (e.g., Figure 5 (as shown) or accommodates 60 filter bags 402 (e.g.) Figure 4 As shown), or to accommodate more filter bags, the filtration area increases, the amount of gas that can flow per unit time increases, the dust handling capacity increases, and the crystal pulling time is effectively extended. Multiple filter bags 402 are respectively provided on the first filter bag hanging plate 4011, the second filter bag hanging plate 4012, the third filter bag hanging plate 4013, and the fourth filter bag hanging plate 4014. Each filter bag 402 is cylindrical, closed at the top and open at the bottom. The axis of the filter bag 402 extends vertically. The upper end of each filter bag 402 is connected to the filter bag hanging plate 401, and the lower end of each filter bag 402 is installed on a lower partition plate. The lower partition plate is fixed inside the upper cover cylinder 206 near the lower end. Multiple through holes corresponding to the lower ends of each filter bag 402 are provided on the lower partition plate.

[0038] In this embodiment, the filter bags 402 are arranged in a hexagonal pattern. This arrangement ensures that the filter bags 402 are evenly distributed in a hexagonal pattern around the center of the tank, with equal spacing between each filter bag 402. Each filter bag 402 is divided into four groups, which are respectively connected to the first filter bag hanging plate 4011, the second filter bag hanging plate 4012, the third filter bag hanging plate 4013, and the fourth filter bag hanging plate 4014. This filter bag distribution method results in a compact structure and high space utilization. Alternatively, the filter bags 402 can also be distributed circumferentially, with no limit on the number of outermost rings, which can be increased or decreased as needed. When the number of filter bags 402 increases to a certain level, the cylinder 2011 also needs to be increased proportionally. This rational division scheme maximizes the arrangement of more filter bags while efficiently utilizing the internal space. The filtration accuracy of the filter bags 402 in this embodiment is 0.2–1 micrometer.

[0039] In this embodiment, a venting solenoid valve A203 is provided near the upper end of the upper cylindrical body 206 to allow air to enter the tank, achieving gas exchange between the inside and outside of the tank. The venting solenoid valve A203 is located above each filter bag 402, relatively far from the filter bags 402, to avoid excessively high local oxygen content when directly oxidizing the filter bags 402, which could easily burn the filter bags 402. An automatic dust removal port 306 is also provided at the lowest point of the base end cap 302 for connecting to the ash discharge pipe of the automatic dust removal system. An oxidation air intake component is connected to the automatic dust removal port 306, allowing air to enter simultaneously from both the top and bottom via the venting solenoid valve A203 and the oxidation air intake component, accelerating the oxidation efficiency inside the tank. The oxidation air intake assembly in this embodiment includes a venting solenoid valve B309, a pressure regulating valve 310, and an air pipe B311. The venting solenoid valve B309 is installed at the automatic dust removal port 306. One end of the air pipe B311 is connected to the venting solenoid valve B309, and the other end is connected to an air compressed air source. The pressure regulating valve 310 is provided on the air pipe B311. A manual ball valve 308 can be added between the venting solenoid valve B309 and the automatic dust removal port 306. When the venting solenoid valve B309 is normally open, the air pipe B311 is closed by the manual ball valve 308.

[0040] In this embodiment, the device air inlet 6 is installed on the base cylinder 301, below the lower partition, and the device air outlet 7 is installed on the upper cover cylinder 206, above the upper hanging plate 403.

[0041] In this embodiment, an observation window 8 is installed on the air outlet 7 of the equipment. The observation window 8 includes an observation window pipe 801, a flange 802, a window glass 803, and an outer cover 804. The observation window pipe 801 is welded to the air outlet 7 of the equipment, and the axial center line of the observation window pipe 801 is perpendicular to the axial center of the air outlet 7 of the equipment. One end of the observation window pipe 801 is provided with a flange 802, and the outer cover 804 is connected to the flange 802. The window glass 803 is sandwiched between the outer cover 804 and the flange 802. The upper half of the axial section of the other end of the observation window pipe 801 extends into the air outlet 7 of the equipment. The gas filtered by the filter bag 402 is discharged from the air outlet 7 of the equipment. During the exhaust process, part of the gas is blocked by the other end of the observation window pipe 801, which makes it easier to effectively block dust when the filter bag 402 is damaged and leaks dust, and makes it easier for dust to stay on the window glass 803, so that problems can be detected in time.

[0042] In this embodiment, an electrical control cabinet 5 and an electrical contact pressure gauge 208 are installed on the upper cover cylindrical body 206. The electrical contact pressure gauge 208, the venting solenoid valve A203, and the venting solenoid valve B309 are respectively connected to the electrical control cabinet 5. The electrical contact pressure gauge 208 is used to detect the pressure inside the tank.

[0043] The working principle of this utility model is as follows:

[0044] When turbid gas enters through the equipment inlet 6, it passes through the through-holes in the lower partition and enters the interior of each filter bag 402. After the filter bags 402 filter the dust, the dust concentrates at the bottom cleaning port 305. The filtered clean gas is discharged from the equipment outlet 7. During the discharge process, it can be observed through the observation window 8 whether there is still dust in the gas. After crystal pulling is completed, the equipment inlet 6 and equipment outlet 7 are closed, and the tank enters the oxidation stage. The venting solenoid valve A203 remains open, allowing air to enter the tank. The venting solenoid valve B309 opens, allowing compressed air to enter the dust-concentrated base 3. Simultaneous air intake from both the top and bottom accelerates the oxidation efficiency and reduces the oxidation time. When oxidation is complete and the pointer of the electric contact pressure gauge 208 reaches the 0 contact, a feedback signal is sent to the electrical control cabinet 5. The electrical control cabinet 5 controls the venting solenoid valve B309 to close, stopping the compressed air intake, and then opens the cleaning port 305 to clean the dust.

[0045] When the filter bag 402 needs to be cleaned, the cylinders 2011 in the four fixed vibration mechanisms 201 work in sequence, the piston strikes the filter bag hanging plate 401, causing the filter bag hanging plate 401 to move relative to the upper hanging plate 403, thereby driving the filter bag 402 to move and achieve the cleaning of the filter bag 402.

[0046] In the accompanying drawings of this embodiment, the same or similar reference numerals correspond to the same or similar components. In the description of this application, it should be understood that if terms such as "upper," "lower," "left," and "right" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, they are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the terms used to describe positional relationships in the accompanying drawings are only for illustrative purposes and should not be construed as limiting this patent. For those skilled in the art, the specific meaning of the above terms can be understood according to the specific circumstances.

[0047] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A dust removal device with a four-group rapping structure for use in a vacuum environment, comprising an upper cover (2), a base (3), a fixed rapping mechanism (201), and a filter bag assembly (4), wherein the upper cover (2) is connected to the base (3), the base (3) has an air inlet (6), the upper cover (2) has an air outlet (7), the fixed rapping mechanism (201) is mounted on the upper cover (2), and the filter bag assembly (4) is located within the space enclosed by the upper cover (2) and the base (3); characterized in that: The fixed vibration mechanism (201) consists of four sets. The filter bag assembly (4) includes a filter bag hanging plate (401), a filter bag (402), an upper hanging plate (403), a guide shaft (404), a linear bearing (405), and a spring (406). The upper hanging plate (403) is connected to the four sets of fixed vibration mechanisms (201). The filter bag hanging plate (401) is divided into a first filter bag hanging plate (4011), a second filter bag hanging plate (4012), a third filter bag hanging plate (4013), and a fourth filter bag hanging plate (4014), which are respectively located below the upper hanging plate (403). The fixed vibration mechanism (201) is configured in a one-to-one correspondence. The first filter bag hanging plate (4011), the second filter bag hanging plate (4012), the third filter bag hanging plate (4013), and the fourth filter bag hanging plate (4014) are respectively connected to the upper hanging plate (403) by springs (406). Linear bearings (405) are respectively installed on the first filter bag hanging plate (4011), the second filter bag hanging plate (4012), the third filter bag hanging plate (4013), and the fourth filter bag hanging plate (4014). The upper hanging plate (403) is provided with a sliding mechanism that slides with the four linear bearings (405). A connecting guide shaft (404); the first filter bag hanging plate (4011) and the third filter bag hanging plate (4013) are opposite each other and are both trapezoidal, the second filter bag hanging plate (4012) and the fourth filter bag hanging plate (4014) are opposite each other and are both rhomboid; the first filter bag hanging plate (4011), the second filter bag hanging plate (4012), the third filter bag hanging plate (4013) and the fourth filter bag hanging plate (4014) are respectively provided with a plurality of filter bags (402), each filter bag (402) is closed at the upper end and open at the lower end, and the upper end of each filter bag (402) is connected to the filter bag hanging plate. (401) Connection: The lower end of each filter bag (402) is installed on the lower partition plate, which is fixed inside the upper cover (2). The lower partition plate has multiple through holes corresponding to the lower ends of each filter bag (402). The upper cover (2) is provided with a venting solenoid valve A (203), and the base (3) is provided with an automatic dust removal port (306). An oxidation air intake component is connected to the automatic dust removal port (306). Air is simultaneously introduced from the upper and lower parts through the venting solenoid valve A (203) and the oxidation air intake component, thereby accelerating the oxidation efficiency inside the upper cover (2) and the base (3).

2. The dust removal equipment for a vacuum environment with four sets of rapping structures according to claim 1, characterized in that: Each of the filter bags (402) is arranged in a hexagonal shape, and the first filter bag hanging plate (4011) and the third filter bag hanging plate (4013) are both isosceles trapezoids.

3. The dust removal equipment for a vacuum environment with four sets of rapping structures according to claim 1, characterized in that: The air inlet (6) of the device is located below the lower partition, and the air outlet (7) of the device is located above the upper mounting plate (403).

4. The dust removal equipment for a vacuum environment with four sets of rapping structures according to claim 1, characterized in that: The oxidation air intake assembly includes a venting solenoid valve B (309), a pressure regulating valve (310), and an air pipe B (311). The venting solenoid valve B (309) is installed at the automatic dust removal port (306). One end of the air pipe B (311) is connected to the venting solenoid valve B (309), and the other end is connected to an air compressed air source. The air pipe B (311) is equipped with a pressure regulating valve (310).

5. The dust removal equipment for a vacuum environment with four sets of rapping structures according to claim 4, characterized in that: A manual ball valve (308) is provided between the venting solenoid valve B (309) and the automatic dust removal port (306). When the venting solenoid valve B (309) is normally open, the air pipe B (311) is closed through the manual ball valve (308).

6. The dust removal equipment for a vacuum environment with four sets of rapping structures according to claim 1, characterized in that: An observation window (8) is installed on the air outlet (7) of the equipment. The observation window (8) includes an observation window pipe (801), a flange (802), a window glass (803), and an outer cover (804). The observation window pipe (801) is fixed on the air outlet (7) of the equipment. The axial center line of the observation window pipe (801) is perpendicular to the axial center of the air outlet (7) of the equipment. One end of the observation window pipe (801) is provided with a flange (802). The outer cover (804) is connected to the flange (802). The window glass (803) is sandwiched between the outer cover (804) and the flange (802). The upper half of the axial section of the other end of the observation window pipe (801) extends into the air outlet (7) of the equipment.

7. The dust removal equipment for a vacuum environment with four sets of rapping structures according to claim 1, characterized in that: The fixed rapping mechanism (201) includes a cylinder (2011), a rapping mounting tube (2012), a rapping mounting flange (2013), a threaded straight connector (2015), and an air pipe A (2016). The rapping mounting tube (2012) is fixed in the opening at the top of the upper cover (2). The lower end of the rapping mounting tube (2012) located inside the upper cover (2) is fixedly connected to the rapping mounting flange (2013). The cylinder (2011) is housed in the rapping mounting tube (2012), and the cylinder (2011) is sealed and installed on the rapping mounting flange (2013). The piston of the cylinder (2011) faces the filter bag hanging plate (401). The upper and lower ends of the cylinder (2011) are respectively equipped with threaded straight connectors (2015), and the threaded straight connectors (2015) at both ends are connected through the air pipe A (2016).

8. The dust removal equipment for a vacuum environment with four sets of rapping structures according to claim 1, characterized in that: The upper cover (2) is equipped with an electrical control cabinet (5) and an electrical contact pressure gauge (208). The electrical contact pressure gauge (208), the venting solenoid valve A (203), and the venting solenoid valve B (309) in the oxidation intake assembly are respectively connected to the electrical control cabinet (5).

9. The dust removal equipment for a vacuum environment with four sets of rapping structures according to claim 1, characterized in that: The upper cover (2) includes a head (207) and a cylindrical body (206). The upper end of the cylindrical body (206) is sealed to the head (207), and the lower end is provided with a flange (204) for sealing connection with the base (3). The head (207) is elliptical and has four through holes for installing four fixed vibration mechanisms (201). The two sides of the head (207) are symmetrically provided with lifting lugs (202) for hoisting the dust removal equipment. The cylindrical body (206) has a side-opening maintenance door (205) for maintaining the filter bag (402).

10. The dust removal equipment for a vacuum environment with four sets of rapping structures according to claim 1, characterized in that: The base (3) includes a base cylinder (301) and a base end cap (302). The upper end of the base cylinder (301) is provided with a base flange (307) for sealing connection with the upper cover (2), and the lower end is sealed with the base end cap (302). The lowest point of the base end cap (302) is provided with a dust removal port (305). The bottom of the base end cap (302) is provided with adjustable support legs (303) and casters (304).

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