Portable surface milling machine for milling heating base cushion block groove

Abstract

The utility model discloses a portable surface milling machine for milling a heating base cushion block groove in plasma vapor deposition coating equipment, which comprises a motor arranged on a motor bracket, a milling cutter connected to an output shaft of the motor, and a base, a working window is arranged on the base, the base comprises a guide base plate, and the guide base plate is arranged on the base. An L-shaped adjusting cushion block is arranged on the bottom surface of the guide base plate so as to stabilize the milling of the milling cutter; the motor support is arranged on the guide base plate and slides on the surface of the guide base plate. The utility model belongs to the technical field of heating base maintenance in PECVD equipment. According to the portable surface milling machine provided by the utility model, the expensive, tedious and careful transportation process of the heating base can be omitted, the occupation of a machining center can be avoided, the fine trimming process of a cushion block groove of the heating base is simplified, and the direct cost and indirect cost of fine trimming of the cushion block groove are remarkably reduced.

Description

Technical Field

[0001] This utility model relates to the field of heating base maintenance technology in PECVD equipment, and in particular to a portable milling machine for milling heating base pad grooves in PECVD equipment. Background Technology

[0002] Plasma-enhanced chemical vapor deposition (PECVD) is a crucial process in the manufacturing of thin-film transistor liquid crystal displays (TFT-LCDs). The susceptor, made of aluminum alloy, is a key component of the PECVD equipment. It serves as the lower electrode of a parallel capacitor, provides heating to maintain the temperature for the reaction, and allows for vertical movement to maintain the appropriate reaction spacing. Figure 1 As shown, ceramic pads are required at the four corners of the heating base, so pad grooves 701 are provided at each of the four corners. During the repair of the heating base, the bottom surface 704 of the pad groove needs to be milled to make it flat. Currently, the milling of the bottom of the pad groove 701 is done by a machining center. Because the aluminum heating base is large and heavy, it requires a crane for lifting. However, during the lifting of the large and heavy aluminum heating base, collisions are very likely to occur, leading to damage to the heating base. A detailed analysis follows:

[0003] Microparticles, arcing, discolored spots, and operational errors all indicate that the heating base needs replacement. The replaced heating base is sent back to the supplier for repair. Returned heating bases require cleaning to remove the anodic oxide film and other adhering dirt from their surface, followed by re-anodization. This cleaning operation is primarily performed in an alkaline aqueous solution, where the heating base is completely immersed. Each cleaning operation reduces the substrate thickness of the heating base by approximately 0.1 mm. Figure 2As shown, measurements indicate that the depth of the bottom surface of the pad groove relative to the support surface of the heating base is 14.5 mm, and the depth relative to the step surface of the heating base is 4.5 mm. During the cleaning operation, due to the relatively small space of the pad groove, small air bubbles will form locally on the bottom surface of the pad groove after the alkaline aqueous solution is placed in it. This causes local contact between the bottom surface of the pad groove and the alkaline aqueous solution, resulting in incomplete removal of the anodic oxide film on the bottom surface of the pad groove, leaving anodic oxide film residue and an uneven bottom surface. After the ceramic pad 8 is installed on the repaired heating base, the ceramic pad 8 is unstable, and the corresponding surfaces of the ceramic pad 8 protrude from the support surface and step surface of the heating base, respectively, leading to unstable support and significantly affecting the quality of the deposited film in the PECVD coating process. In the prior art, the bulky heating base usually needs to be hoisted from the supply end to the machining center for precision repair. However, the aluminum heating base is prone to bumps and knocks during hoisting, making the transportation of the heating base not only troublesome but also prone to damage. Meanwhile, the finishing process of machining centers is extremely cumbersome, especially the tool setting process, which consumes product production time and severely impacts the output efficiency of the machining center as a primary production workshop. It also indirectly increases the maintenance cost of the heating base. Therefore, simplifying the finishing process of the bottom surface of the heating base pad in plasma vapor deposition coating equipment, reducing the finishing cost of the pad bottom, and improving the efficiency of both the maintenance and production processes is a technical problem that needs to be solved. Utility Model Content

[0004] Based on this, and addressing the technical problems of complex finishing processes for the bottom surface of the heating base pad groove in plasma-enhanced chemical vapor deposition (PECVD) coating equipment, which occupy machining centers, indirectly increase finishing costs, and affect production efficiency, this utility model provides a portable milling machine for the heating base pad groove in PECVD coating equipment. This machine not only eliminates the costly, cumbersome, and careful transportation process, but also avoids occupying machining centers, simplifies the finishing process of the pad groove, and significantly reduces the finishing cost of the pad groove.

[0005] This application provides a portable milling machine for milling heating base pad grooves in a plasma vapor deposition coating equipment. It includes a motor mounted on a motor bracket, a milling cutter connected to the output shaft of the motor, and a base with a working window. The base includes a guide plate, and an L-shaped adjusting pad is provided on the bottom surface of the guide plate to stabilize the milling of the milling cutter. The motor bracket is mounted on the guide plate and slides on the surface of the guide plate.

[0006] Furthermore, a lifting platform is provided between the guide plate and the motor bracket. The base of the lifting platform is located on the guide plate, and the motor bracket is located on the worktable of the lifting platform, so that the motor bracket is indirectly located on the guide plate through the lifting platform.

[0007] Furthermore, the work window matches the area to be processed on the milling machine.

[0008] Furthermore, the adjustment accuracy of the lifting platform is less than or equal to 0.05mm.

[0009] Furthermore, the thickness of the L-shaped adjusting pad is equal to the height difference between the support surface and the step surface of the heating base.

[0010] Furthermore, the width of each part of the L-shaped adjusting pad is consistent with the width of the step surface at the contact point.

[0011] Furthermore, the guide substrate and the L-shaped adjustment pad are integrally formed.

[0012] Furthermore, the diameter of the milling cutter's shaft is greater than or equal to the diameter of the cutter head.

[0013] Furthermore, the length and width of the working window are the same as the length and width difference of the bottom surface of the pad groove, and are the same as the difference of the radius of the milling cutter head and the cutter shaft, and the limiting surface of the working window is in contact with the cutter shaft.

[0014] Furthermore, the end mill is made of cemented carbide, and its hardness is 85-95.

[0015] Compared with the prior art, the technical solution provided in this application has the following advantages:

[0016] 1. This application provides a portable milling machine for milling heating base pad grooves in plasma vapor deposition coating equipment. It is small in size, lightweight, compact in structure, and modular in design for easy disassembly and assembly, ensuring the portability of the milling machine. Moreover, it is easy to operate. The milling cutter only needs to be confined within the working window, and the bottom surface of the pad groove can be uniformly milled by sliding the motor located on the guide plate. This meets the requirements of maintenance personnel to work alone, and allows maintenance personnel to directly hand-hold the milling machine at the supply end for milling and fine repair. This avoids occupying the machining center and eliminates the hoisting process, simplifies the fine repair process, and reduces the direct and indirect costs of fine repair.

[0017] 2. The accuracy of handheld portable milling machines is improved through the coordinated use of the working window of the guide plate and the L-shaped adjusting pad. Common handheld milling tools, lacking proper positioning, restraint, and guidance, result in uneven bottom surfaces of the pad slots after milling, and are prone to damaging the sidewalls of the pad slots. The portable milling machine provided by this invention controls the movement of the portable milling machine on the guide surface of the guide plate, thereby controlling the milling of the pad slot bottom surface by the milling cutter, resulting in a flat bottom surface with high planar accuracy. Furthermore, by restricting the movement of the milling cutter through the working window, precise milling of the pad slot bottom surface can be performed as if in a machining center, avoiding damage to the sidewalls of the pad slot and preventing the heating base from becoming unusable. Specifically, when the cutter head moves within the working window, the limiting surface contacts the cutter head first relative to the side wall of the pad slot. Especially when the working window aligns with the area to be machined on the milling machine, this better protects the side wall of the pad slot from damage caused by friction from the cutter head's side. Thus, the limiting surface not only guides the cutter head as it mills the boundary of the pad slot bottom, precisely controlling the milling of the bottom boundary, but also effectively avoids damage to the side wall of the pad slot. This is achieved by sliding the motor along the guide surface of the guide plate, providing positioning and guidance for the milling cutter to cut the bottom of the pad slot. Simultaneously, the L-shaped adjusting shims provide stable support for the balance of the guide plate. The thickness of the L-shaped adjusting shims on the bottom surface of the guide plate is equal to the height difference between the support surface of the heating base and the step surface. The surface contact between the L-shaped adjusting shims and the guide plate provides more stable support while leveling the guide plate, thus avoiding operational errors caused by instability of the guide plate and facilitating stable milling by the cutter. This results in uniform, stable, and precise milling of the bottom surface of the pad slot by the milling machine. Furthermore, when the guide plate and the L-shaped adjusting pad are integrally formed, and the guide plate and the L-shaped adjusting pad are snapped together at the corner with steps where the heating base pad slot is located, the L-shaped adjusting pad provides positioning for itself and also for the working window of the guide plate. That is, when the L-shaped adjusting pad is placed, it is aligned with the corner of the heating base and the working window is aligned with the area to be processed by the milling machine. This further simplifies the operation procedure of handheld machine milling of the bottom surface, reduces the difficulty of individual operation by the operator, and improves the milling accuracy. This allows for manual milling of the bottom surface of the pad slot directly at the supply end, saving the transportation cost of the heating base and reducing the maintenance time of the heating base. At the same time, milling and finishing directly at the supply end also avoids occupying the production time of the machining center, allowing the production output efficiency of the machining center to return to normal, further reducing the maintenance cost and maintenance time of the heating base pad slot.

[0018] 3. The high-precision adjustable lifting table provides a precise milling depth for the bottom surface of the pad slot. With an adjustment accuracy of less than or equal to 0.05mm, this high-precision lifting table ensures that each plane of the reinstalled ceramic pad is flush with the corresponding support and step surfaces, thus providing stable support and guaranteeing the quality of the deposited film in the PECVD coating process. Furthermore, the adjustable height of the lifting table facilitates multiple-feed milling of the pad slot bottom.

[0019] In summary, portable milling tools can effectively simplify the finishing process of heating base pad slots, reduce the direct and indirect costs of pad slot finishing, improve the maintenance efficiency of heating bases, and also improve the production efficiency of maintenance and production processes. Attached Figure Description

[0020] Figure 1 The images show a top view of the heating base and a partial enlarged view of the ceramic pad in the prior art.

[0021] Figure 2 This is a cross-sectional view of the pad groove of the heating base in the prior art;

[0022] Figure 3 This is a first-view structural schematic diagram of an embodiment of the portable milling machine of this utility model;

[0023] Figure 4 This is a second-view structural schematic diagram of an embodiment of the portable milling machine of this utility model;

[0024] Figure 5 This is a schematic diagram of the motor structure in the portable milling machine of this utility model;

[0025] Figure 6 This is a schematic diagram of the support structure in the portable milling machine of this utility model;

[0026] Figure 7 This is a first-view structural diagram of the lifting platform in the portable milling machine of this utility model;

[0027] Figure 8 This is a second-view structural diagram of the lifting platform in the portable milling machine of this utility model;

[0028] Figure 9 This is a schematic diagram of the structure of the face milling cutter in the portable face milling machine of this utility model.

[0029] Figure 10 This is a first-view structural diagram of the guide plate and L-shaped adjusting pad in the portable milling machine of this utility model;

[0030] Figure 11This is a second-view structural diagram of the guide plate and L-shaped adjusting pad in the portable milling machine of this utility model;

[0031] Explanation of reference numerals in the attached figures:

[0032] 1-Motor; 101-Clamping mechanism; 2-Motor bracket; 201-Tool hole; 202-Through hole; 3-Lifting platform; 301-Micrometer head; 302-Locking screw; 303-Worktable surface; 304-Base; 4-End mill; 401-Tool shaft; 402-Tool head; 5-L-shaped adjusting pad; 6-Guide base plate; 601-Working window; 602-Limiting surface; 603-Guide surface; 7-Heating base; 701-Padded block groove; 702-Supporting surface; 703-Step surface; 704-Padded block groove bottom surface; 8-Ceramic pad; 9-Screw hole. Detailed Implementation

[0033] To make the above-mentioned objects, features, and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a full understanding of this utility model. However, this utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this utility model. Therefore, this utility model is not limited to the specific embodiments disclosed below.

[0034] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0035] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0036] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0037] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0038] It should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. When an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementation.

[0039] See Figures 3 to 11 This utility model provides a portable milling machine for a heating base pad groove in a plasma vapor deposition coating equipment, including a motor 1, a motor bracket 2, a lifting platform 3, a milling cutter 4, an L-shaped adjusting pad 5, and a guide plate 6. The motor bracket 2 is a connecting plate with multiple through holes 202. The bottom surface of the motor 1 has four screw holes 9. The motor 1 is positioned on the motor bracket 2 through these four through holes 202. Screws are threaded through the through holes 202 of the motor bracket 2 and into the screw holes 9 of the motor 1, thus fixing the motor 1 to the motor bracket 2. The motor bracket 2 also has six through holes 202 for positioning the lifting platform 3. Similarly, screws are threaded through the through holes 202 of the motor bracket 2 and into the screw holes 9 of the worktable surface 303 of the lifting platform 3, thus fixing the lifting platform 3 to the motor bracket 2. The motor 1 and the lifting platform 3 are located on opposite sides of the motor bracket 2 and are staggered.

[0040] A clamping mechanism 101, acting as an output shaft, is also provided at the center of the bottom surface of the motor 1 for clamping the milling cutter 4. The milling cutter 4 is cylindrical, with one end being a cutter head 402 and the part adjacent to the cutter head 402 being the cutter shaft 401. The end face of the cutter head 402 is provided with a cutting edge, and the cutter head 402 only has an end face cutting edge, without an outer circular cutting edge. The milling end face of the milling cutter 4 is consistent with the cross-section of the cutter head 402, and the length of the cutting edge is about 1 mm. The motor bracket 2 is also provided with a tool hole 201, through which the milling cutter 4 is clamped by the clamping mechanism 101 of the motor 1. The lifting platform 3 is placed on the guide surface 603 of the guide base plate 6 and slides freely on the guide surface 603 of the guide base plate 6. The lifting platform 3 is provided with a micrometer head 301 and a locking screw 302. Tightening the micrometer head 301 is used to adjust the height of the lifting platform 3, with an adjustment accuracy of 0.02 mm and a minimum scale of 0.01 mm. When adjusted to the required height, the height of the lifting platform 3 is locked by tightening the locking screw 302. An L-shaped adjusting pad 5 is provided on the bottom surface of the guide plate 6. The thickness of the L-shaped adjusting pad 5 is equal to the height difference between the support surface and the step surface of the heating base. During use, it contacts the step surface 703 of the heating base 6, thereby making the top surface of the guide plate 6 parallel to the support surface 702 or the step surface 703 of the heating base 7, thus leveling the guide plate 6. The guide plate 6 also has a through hole as a working window 601. The shape and size of the working window 601 are consistent with the orthographic projection shape and size of the pad groove 701, meaning the working window 601 matches the area to be processed by the milling machine.

[0041] In use, first, the L-shaped adjusting pad 5 is placed on the heating base 6. Specifically, the L-shaped adjusting pad 5 is aligned with the stepped surface 703 at the corner of the heating base 7. At this time, the upper surface of the L-shaped adjusting pad 5 is flush with the support surface 702 of the heating base 7. The "L" shape of the L-shaped adjusting pad 5 is fully aligned with the corner of the heating base 7, which is beneficial for the positioning of the L-shaped adjusting pad 5. Then, the guide plate 6 is placed on the support surface 702 of the heating base 7 and the upper surface of the L-shaped adjusting pad 5, so that the guide surface 603 of the guide plate 6 is parallel to the support surface 702 or the stepped surface 703 of the heating base 7. This ensures that the bottom surface 704 of the pad groove can be milled evenly when the portable milling machine slides evenly on the guide surface 603 of the guide plate 6. At the same time, the guide plate 6 is moved to present the pad groove 701 in the working window 601, that is, the orthographic projection of the pad groove 701 coincides with the working window 601. Then, the lifting platform 3 is placed on the guide surface 603 of the guide base plate 6, specifically, the base 304 of the lifting platform 3 is brought into contact with the guide surface 603 of the guide base plate 6. Simultaneously, the milling cutter 4 passes through the working window 601 of the guide base plate 6 and contacts the bottom surface 704 of the pad groove. The limiting surface 602 not only restricts the movement of the milling cutter 4 and protects the sidewall of the pad groove, but also provides guidance for the milling cutter 4 to precisely mill the boundary of the bottom surface 704 of the pad groove. Finally, the net feed of the portable milling machine is calculated by measuring the difference between the height of the thicker side of the ceramic pad 8 and the depth of the bottom surface 704 of the pad groove relative to the support surface 702 of the heating base 7. Based on the net feed, the height of the lifting platform 3 is adjusted, and the portable milling machine is slid evenly on the guide surface 603 of the guide base plate 6 to uniformly mill the bottom surface 704 of the pad groove.

[0042] Common handheld milling tools, lacking proper positioning, restraint, and guidance, result in uneven bottom surfaces of the milled pad slots and are prone to damaging the sidewalls of the pad slots. In this embodiment, the guide plate and L-shaped adjusting pad provide positioning and guidance for the milling cutter's cutting of the pad slot bottom surface, synergistically improving the flatness of the pad slot bottom surface milled by the handheld portable milling machine.

[0043] The width of the L-shaped adjusting pad 5 is consistent with the width of the step surface 703 at the contact point, which helps to determine whether the L-shaped adjusting pad 5 and the step surface 703 at the corner are in contact and the degree of contact.

[0044] The L-shaped adjusting pad 5 can also be integrally formed with the guide base plate 6. The guide base plate and the L-shaped adjusting pad are snapped together at the corner with steps where the heating base pad groove is located. In this way, the L-shaped adjusting pad 5 can not only provide positioning for itself, but also provide positioning for the working window 601 of the guide base plate 6. There is no need to move the guide base plate 6 to align the working window 601 with the bottom surface 704 of the pad groove. At the same time as placing the L-shaped adjusting pad 5, the L-shaped adjusting pad 5 is matched with the corner of the heating base 7, and the working window matches the area to be processed by the milling machine.

[0045] The working window can also be larger than the area to be machined on the milling machine. In this case, the diameter of the cutter head 402 is smaller than the diameter of the cutter shaft 401, meaning the milling cutter is a two-stage stepped shaft. Specifically, the length and width of the working window are the same as the length and width difference of the bottom surface of the pad slot, and are also the same as the radius difference of the cutter head 402 and cutter shaft 401 of the milling cutter 4. Furthermore, the limiting surface 602 of the working window 601 is in contact with the cutter shaft 401. In this way, the limiting surface 602 can also restrict the movement of the milling cutter 4, protect the sidewall of the pad slot, and provide guidance for the milling cutter 4 to accurately mill the boundary of the bottom surface 704 of the pad slot.

[0046] The end mill 4 is made of cemented carbide with a hardness of 85-95.

[0047] Both the motor 1 and the lifting platform 3 mentioned above are commercially available products. Specifically, the motor 1 is a multi-functional trimming machine (model: GKF500) manufactured by Robert Bosch GmbH; the lifting platform 3 is a Z-axis manual lifting platform (model: LZ60) manufactured by Shenzhen Runjia Precision Technology Co., Ltd.

[0048] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0049] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A portable milling machine for milling grooves in a heating base pad, comprising a motor (1) mounted on a motor bracket (2), and a milling cutter (4) connected to the output shaft of the motor (1), characterized in that, It also includes a base, on which a working window (601) is provided. The base includes a guide plate (6), and an L-shaped adjusting pad (5) is provided on the bottom surface of the guide plate (6) to stabilize the milling of the milling cutter (4). The motor bracket (2) is provided on the guide plate (6) and slides on the surface of the guide plate (6).

2. The portable milling machine according to claim 1, characterized in that, A lifting platform (3) is provided between the guide plate (6) and the motor bracket (2). The base (304) of the lifting platform (3) is provided on the guide plate (6), and the motor bracket (2) is provided on the work surface (303) of the lifting platform (3), so that the motor bracket (2) is indirectly provided on the guide plate (6) through the lifting platform (3).

3. The portable milling machine according to claim 2, characterized in that, The work window (601) matches the area to be processed on the portable milling machine.

4. The portable milling machine according to claim 2 or 3, characterized in that, The adjustment accuracy of the lifting platform (3) is less than or equal to 0.05 mm.

5. The portable milling machine according to claim 4, characterized in that, The thickness of the L-shaped adjusting pad (5) is equal to the height difference between the support surface (702) and the step surface (703) of the heating base (7).

6. The portable milling machine according to claim 5, characterized in that, The width of the L-shaped adjusting pad (5) is consistent with the width of the step surface (703) at the mating point.

7. The portable milling machine according to claim 6, characterized in that, The guide base plate (6) and the L-shaped adjustment pad (5) are integrally formed.

8. The portable milling machine according to claim 2, characterized in that, The diameter of the cutter shaft (401) of the milling cutter (4) is greater than or equal to the diameter of the cutter head (402).

9. The portable milling machine according to claim 8, characterized in that, The length and width of the working window (601) are the same as the length and width of the bottom surface (704) of the pad groove, and are the same as the radius difference of the cutting head (402) and the cutting shaft (401) of the milling cutter (4), and the limiting surface (602) of the working window (601) is in contact with the cutting shaft (401).

10. The portable milling machine according to any one of claims 1, 2, 3, 5-9, characterized in that, The milling cutter (4) is made of cemented carbide and has a hardness of 85 to 95.

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