Target material positioning tool and target material mounting system

Abstract

The utility model provides a target material positioning tool and a target material installation system, the target material positioning tool comprises a tool body, the tool body at least comprises a first end portion and a second end portion, the outer wall of the first end portion is provided with a thread shape the same as that of a target material installation screw, the second end portion can be tightly matched with an installation hole, and the first end portion and the second end portion are matched with each other. Therefore, positioning is realized; a special positioning tool is designed to ensure that the target material can be accurately positioned at the same position when being mounted each time, so that the deviation is reduced; the positioning tool can be repeatedly used, economic benefits are provided, the implementation efficiency is high, the cost is low, and the application range is wide; it can be ensured that the target material can be accurately positioned at the same position during installation every time, and therefore deviation is reduced; and the positioning tool can be repeatedly used, economic benefits are provided, the implementation efficiency is high, the cost is low, and the application range is wide.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to a target positioning tool and a target installation system. Background Technology

[0002] The target is typically designed as a circular object with a backplate on the back to act as a material carrier, and a certain thickness of material firmly attached to the backplate on the front. It is mounted on the chamber cover. When the cover is opened to 180°, the target is mounted face up and fixed to the cover. When the cover is closed to 0°, the target is face down, allowing the material to be sputtered onto the wafer. In physical vapor deposition (PVD) processes used in semiconductor manufacturing, the target used in the metal thin film deposition chamber is a consumable item; it needs to be replaced when the target consumption reaches its limit.

[0003] Currently, in physical vapor deposition (PVD) processes, the target is the cathode and the shield is the anode. Therefore, it is required that the target and the shield not come into contact and the gap between them not be too close to prevent short circuits caused by contact between the two electrodes. However, currently, there is always a problem of positional deviation of the target after each replacement and installation, which affects the physical vapor deposition (PVD) process to some extent.

[0004] Therefore, ensuring the accurate installation position of the target material each time it is replaced is a technical problem that urgently needs to be solved. Utility Model Content

[0005] The problem solved by this utility model is to provide a target positioning tool and a target installation system that can ensure that the target can be accurately positioned in the same position each time it is installed, thereby reducing deviation; and the positioning tool can be reused, which provides economic benefits, achieves high efficiency and low cost, and has a wide range of applications.

[0006] To solve the above problems, this utility model provides a target positioning tool, wherein the target has a plurality of mounting holes and includes: a tool body, the tool body including at least a first end and a second end opposite to each other, the outer wall of the first end having the same thread shape as the target mounting screw, and the second end being able to tightly fit into the mounting holes to achieve target positioning.

[0007] Optionally, the diameter of the second end is the same as the diameter of the mounting hole.

[0008] Optionally, it may also include an intermediate portion connected between the first end and the second end, the intermediate portion being integrally formed with the first end and the second end.

[0009] Optionally, the middle portion has the same diameter as the second end portion.

[0010] Optionally, the middle portion has the same diameter as the first end portion.

[0011] Optionally, the shape of the middle portion is the same as the shape of the second end portion.

[0012] Optionally, the shape of the middle portion is the same as the shape of the first end portion.

[0013] Optionally, the tool body is a hollow structure.

[0014] Accordingly, this utility model also provides a target installation system, comprising: a target having a plurality of mounting holes; a mounting cover for fixing the target having a plurality of mounting cover holes corresponding to the mounting holes; and at least two positioning tools for the target, wherein the positioning tools are respectively positioned within the mounting holes, and the at least two mounting holes are diagonally distributed on the target.

[0015] Optionally, the surface of the mounting cover hole has a thread that matches the first end, the first end being located within the mounting cover hole and forming an interference fit.

[0016] Compared with the prior art, the technical solution of this utility model has the following advantages:

[0017] This utility model provides a target positioning tool, including a tool body, which includes at least a first end and a second end. The outer wall of the first end has the same thread shape as the target mounting screw, and the second end can be tightly fitted with the mounting hole to achieve positioning. By designing a specialized positioning tool, it is ensured that the target can be accurately positioned in the same position each time it is installed, thereby reducing deviation. Furthermore, the positioning tool can be reused, providing economic benefits, achieving high efficiency and low cost, and has a wide range of applications. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the target positioning tool in one embodiment of the present invention;

[0019] Figure 2 This is a schematic diagram of the target positioning tool in another embodiment of the present invention;

[0020] Figure 3 This is a schematic diagram of the target positioning tool in another embodiment of the present invention;

[0021] Figure 4 This is a top view of the target installation system in one embodiment of the present invention;

[0022] Figure 5 for Figure 4 Find the cross-sectional view at point AA. Detailed Implementation

[0023] Currently, there is a gap between the target mounting screws and the target mounting holes. This gap will cause the target to be installed in a different position each time. The target position deviation will cause uneven gaps or even contact between the target and the shield after the mounting cover is closed, which can easily cause short circuits.

[0024] Based on this, the present invention provides a target positioning tool, including a tool body, the tool body including at least a first end and a second end, the outer wall of the first end having the same thread shape as the target mounting screw, and the second end being able to tightly fit with the mounting hole to achieve positioning; by designing a specialized positioning tool, it is ensured that the target can be accurately positioned in the same position each time it is installed, thereby reducing deviation and avoiding uneven gaps or even contact between the target and the shield after the mounting cover is closed, eliminating the risk of short circuit; and the positioning tool can be reused, providing economic benefits, achieving high efficiency and low cost, and having a wide range of applications.

[0025] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0026] First, please refer to the reference. Figure 1 , Figure 4 and Figure 5 A target positioning tool is provided, wherein the target 201 has a plurality of mounting holes 103 penetrating the target for fixing the target. The target positioning tool includes a tool body 100, the tool body 100 including at least a first end 101 and a second end 102 opposite to each other. The outer wall of the first end 101 has the same thread shape as the target mounting screw. The second end 102 can be tightly fitted with the mounting holes 103 to achieve the positioning of the target.

[0027] In this embodiment, a specialized positioning tool is designed to accurately position the target material, ensuring that the target material is precisely positioned in the same location each time it is installed. This reduces deviations and prevents uneven gaps or even contact between the target material and the shield after the cover is closed, thus eliminating the risk of short circuits. Furthermore, the positioning tool is reusable, providing economic benefits and achieving high efficiency, low cost, and a wide range of applications.

[0028] In this embodiment, the target material is the raw material used to deposit thin films in the PVD process. During the sputtering process, the target material is bombarded by high-energy ions (such as argon ions), causing the atoms or molecules on its surface to be sputtered and deposited on the substrate surface to form a thin film.

[0029] In this embodiment, the diameter of the second end 102 is the same as the diameter of the mounting hole 103. This is to ensure that the second end 102 can be embedded in the mounting hole 103. The fact that the second end 102 and the mounting hole 103 have the same diameter ensures that the tool and the target mounting hole fit tightly together, preventing the tool from loosening or shifting during installation. This effectively reduces possible errors during target processing, improves the installation accuracy of the target, and reduces target shaking or damage caused by inaccurate positioning.

[0030] In this embodiment, the tool body 100 is made of stainless steel.

[0031] Of course, in some embodiments, the material of the tool body 100 may also be composite materials, engineering plastics, etc.

[0032] In this embodiment, the tool body 100 is a solid structure.

[0033] In some embodiments, the tool body 100 may also be a hollow structure. A hollow structure can significantly reduce the weight of the tool, making it easier for operators to use for extended periods, reducing labor intensity and production costs, while maintaining the structural strength of the tool, enhancing its heat dissipation performance, and extending its service life in high-temperature environments.

[0034] In this embodiment, an intermediate portion 104 is also included, located between the first end 101 and the second end 102, and the intermediate portion 104 is integrally formed with the first end 101 and the second end 102.

[0035] In this embodiment, the presence of the intermediate part 104 enhances the overall structural strength of the tool body 100, enabling it to withstand greater installation forces. Furthermore, the one-piece molding design reduces the possibility of breakage or loosening at the connection points, extends the tool's service life, reduces production costs, and ensures the quality and performance of the tool body 100.

[0036] In this embodiment, the length of the tool body 100 is greater than the depth of the mounting hole 103, and the first end portion 101 extends into the mounting cover hole.

[0037] In this embodiment, the middle part 104 has the same diameter as the first end part 101, which makes the tool more evenly stressed during installation, avoids deformation or damage caused by uneven stress, and makes the overall appearance and structure of the tool more consistent, which is conducive to standardized production and quality control.

[0038] In this embodiment, the outer wall of the middle portion 104 does not have the same threads as the outer wall of the first end portion 101.

[0039] In other embodiments, please refer to Figure 2 The middle part 104 and the second end part 102 have the same diameter, which can enhance the connection stability between the first end part and the middle part, ensure the reliability of the tool during installation, effectively reduce stress concentration, reduce the risk of the tool being damaged due to excessive stress during use, and the same diameter design makes the tool easier to install and disassemble, reducing the difficulty of operation.

[0040] In other embodiments, please refer to Figure 3 The shape of the middle part 104 is the same as that of the first end part 101, that is, the outer wall of the middle part 104 has the thread. This makes the overall appearance of the tool more harmonious, easier for users to identify and operate, enhances the connection reliability between the middle part 104 and the first end part 101, and ensures the stability of the tool during use.

[0041] In this embodiment, the diameter of the first end 101 may be different from or the same as the diameter of the second end 102.

[0042] Accordingly, please refer to Figure 4 and Figure 5 The present invention also provides a target installation system 200, comprising: a target 201 having a plurality of mounting holes 103; a mounting cover 202 for fixing the target 201 having a plurality of mounting cover holes 203 corresponding to the mounting holes 103; and at least two positioning tools 100 for the target, the positioning tools 100 being respectively positioned within the mounting holes 103, and at least two of the mounting holes 103 being diagonally distributed on the target.

[0043] In this embodiment, the positioning tools 100, which are diagonally distributed on the target 201, can ensure the overall stability of the target 201 during the installation process, prevent the target 201 from tilting or shifting during installation, better constrain the position of the target 201, improve the installation accuracy between the target 201 and the mounting cover 202, and avoid uneven gaps or even contact between the target and the shield after the mounting cover is closed. Using at least two positioning tools 100 can enhance the reliability of the entire installation system and reduce installation problems caused by the failure of a single tool.

[0044] In this embodiment, the surface of the mounting cover hole has a thread that matches the first end 101, and the first end 101 is located inside the mounting cover hole.

[0045] In this embodiment, the fixing effect between the positioning tool 101 and the mounting cover 202 of the target material can be significantly enhanced by the threaded fit and interference fit, ensuring the stability of the target material 101 during use, improving the sealing between the mounting cover hole 103 and the positioning tool 100, preventing dust or impurities from entering, extending the service life of the target material, making the installation and disassembly of the target material more convenient, and facilitating maintenance and replacement by the user.

[0046] Although the present invention has been disclosed above, it is not limited thereto. Any person skilled in the art can make various modifications and alterations without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope defined in the claims.

Claims

1. A target positioning tool, wherein the target has a plurality of mounting holes, characterized in that, include: The tool body includes at least a first end and a second end opposite to each other. The outer wall of the first end has the same thread shape as the target mounting screw, and the second end can be tightly fitted with the mounting hole to achieve the positioning of the target.

2. The target positioning tool as described in claim 1, characterized in that, The diameter of the second end is the same as the diameter of the mounting hole.

3. The target positioning tool as described in claim 1, characterized in that, It also includes an intermediate portion connected between the first end and the second end, the intermediate portion being integrally formed with the first end and the second end.

4. The target positioning tool as described in claim 3, characterized in that, The middle portion has the same diameter as the second end portion.

5. The target positioning tool as described in claim 3, characterized in that, The middle portion has the same diameter as the first end portion.

6. The target positioning tool as described in claim 3, characterized in that, The shape of the middle part is the same as the shape of the second end.

7. The target positioning tool as described in claim 3, characterized in that, The shape of the middle part is the same as the shape of the first end.

8. The target positioning tool as described in claim 1, characterized in that, The tool body is a hollow structure, and the shape of the tool body matches the structure of the mounting hole.

9. A target mounting system, characterized in that, include: The target material has a plurality of mounting holes; A mounting cover is used to fix the target material, and the mounting cover has a plurality of mounting cover holes corresponding to the mounting holes; Provide at least two positioning tools for the target as described in any one of claims 1 to 8, wherein the positioning tools are respectively positioned within the mounting holes, and the at least two mounting holes are diagonally distributed on the target.

10. The target mounting system as described in claim 9, characterized in that, The surface of the mounting cover hole has a thread that matches the first end, and the first end is located inside the mounting cover hole and forms an interference fit.

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