Dry etching equipment cavity protection device and dry etching equipment

Abstract

The utility model discloses a dry etching equipment cavity protection device and dry etching equipment. According to the cavity protection device, a cavity attaching part comprises a first through hole, a first surface and a second surface, wherein the first surface and the second surface are oppositely arranged, and the first through hole penetrates through the first surface and the second surface; the cavity opening attaching part is provided with a second through hole and located on the first surface of the cavity attaching part, the diameter of the inner wall of the cavity opening attaching part is the same as that of the inner wall of the cavity attaching part, and the wall thickness of the cavity opening attaching part is smaller than that of the cavity attaching part; the bottom attaching part is arranged on the second surface of the cavity attaching part and located in the first through hole, the side wall of the bottom attaching part is connected with the inner wall of the cavity attaching part, and the surface, away from the cavity opening attaching part, of the bottom attaching part is flush with the surface, close to the bottom attaching part, of the cavity attaching part; the cavity attaching part is provided with a first hole and a second hole. According to the utility model, the protection on the inner wall of the cavity is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to dry etching technical field especially relates to a dry etching equipment cavity protection device and dry etching equipment. BACKGROUND

[0002] In the semiconductor manufacturing process, dry etching is a key step, and the by-product generated in the dry etching process will adhere to the inner wall of the cavity, and cleaning the adherend will cause damage to the cavity itself. SUMMARY

[0003] The utility model provides a kind of dry etching equipment cavity protection device and dry etching equipment to improve the protection of inner wall of cavity.

[0004] According to an aspect of the utility model, a kind of dry etching equipment cavity protection device is provided, and dry etching equipment cavity protection device includes:

[0005] Cavity bonding portion, cavity mouth bonding portion and bottom bonding portion;

[0006] Cavity bonding portion includes first through hole and oppositely arranged first surface and second surface, and first through hole penetrates first surface and second surface;

[0007] Cavity mouth bonding portion is provided with second through hole, and located at the first surface of cavity bonding portion, the inner wall diameter of cavity mouth bonding portion is same with the inner wall diameter of cavity bonding portion, and the wall thickness of cavity mouth bonding portion is less than the wall thickness of cavity bonding portion;

[0008] Bottom bonding portion is arranged at the second surface of cavity bonding portion, and located in first through hole, the side wall of bottom bonding portion is connected with the inner wall of cavity bonding portion, and the surface of bottom bonding portion away from cavity mouth bonding portion is flush with the surface of cavity bonding portion close to bottom bonding portion;Wherein, bottom bonding portion is provided with third through hole, and the axis of third through hole and the axis of first through hole and second through hole are on a straight line;

[0009] Cavity bonding portion is provided with first hole and second hole, and first hole and second hole are oppositely arranged, first hole is correspondingly arranged with gas concentration sensor in dry etching equipment cavity, and second hole is correspondingly arranged with material inlet of dry etching equipment cavity;

[0010] Bottom bonding portion is provided with a cutout portion, the center line of cutout portion along first direction coincides with the center line of first hole along first direction, and cutout portion is correspondingly arranged with suction port of dry etching equipment cavity;Wherein, first direction is the direction from bottom bonding portion to cavity mouth bonding portion.

[0011] Furthermore, the cavity fitting part includes n first splicing parts, each first splicing part including a first anti-detachment part, a first fitting part and a first body part; the cavity opening fitting part includes n second splicing parts, each second splicing part including a second anti-detachment part, a second fitting part and a second body part; the bottom fitting part includes n third splicing parts, each third splicing part including a third anti-detachment part, a third fitting part and a third body part;

[0012] The first splicing part is provided in a one-to-one correspondence with the second and third splicing parts, and the corresponding first splicing part, second splicing part and third splicing part form a splicing component of the cavity protection device; the corresponding first anti-detachment part, second anti-detachment part and third anti-detachment part form an anti-detachment part; the corresponding first fitting part, second fitting part and third fitting part form a fitting part; the corresponding first body part, second body part and third body part form a body part; the anti-detachment part and the fitting part are respectively provided on both sides of the body part; the anti-detachment part and the fitting part of the adjacent cavity protection device splicing component form an anti-detachment structure; the fitting part and the anti-detachment part of the adjacent cavity protection device splicing component form an anti-detachment structure; where n is an integer greater than or equal to 2.

[0013] Furthermore, the anti-detachment part includes a latching protrusion, and the fitting part includes a latching groove;

[0014] The protrusions and slots interlock to form an anti-detachment structure.

[0015] Furthermore, the first hole and the second hole are respectively set on two different first splicing parts.

[0016] Furthermore, the cavity fitting part, the cavity opening fitting part, and the bottom fitting part are made of corrosion-resistant material.

[0017] Furthermore, the materials of the cavity fitting part, the cavity opening fitting part, and the bottom fitting part are the same as the material of the cavity of the dry etching equipment.

[0018] Furthermore, the cavity fitting part includes a US-made aluminum cavity fitting body and a cavity hard oxide coating, and the cavity hard oxide coating covers the US-made aluminum cavity fitting body.

[0019] The cavity fitting part includes a US-made aluminum cavity fitting body and a cavity hard anodizing coating, and the cavity hard anodizing coating covers the US-made aluminum cavity fitting body;

[0020] The bottom bonding portion includes an American-made aluminum bottom bonding body and a bottom hard oxide coating, with the bottom hard oxide coating covering the American-made aluminum bottom bonding body.

[0021] Furthermore, n = 4.

[0022] Furthermore, the first hole is a round hole, and the second hole is an elliptical hole.

[0023] According to another aspect of the present invention, a dry etching apparatus is provided, which includes the cavity protection device for the dry etching apparatus described in any of the above embodiments.

[0024] The dry etching apparatus cavity protection device provided in this embodiment includes a cavity fitting part, a cavity opening fitting part, and a bottom fitting part. The cavity fitting part includes a first through hole and a first surface and a second surface disposed opposite to each other. The first through hole penetrates the first surface and the second surface. The cavity opening fitting part is provided with a second through hole and is located on the first surface of the cavity fitting part. The inner wall diameter of the cavity opening fitting part is the same as the inner wall diameter of the cavity fitting part, and the wall thickness of the cavity opening fitting part is less than the wall thickness of the cavity fitting part. The bottom fitting part is disposed on the second surface of the cavity fitting part. Located within the first through-hole, the sidewall of the bottom fitting portion is connected to the inner wall of the cavity fitting portion. The surface of the bottom fitting portion away from the cavity opening fitting portion is flush with the surface of the cavity fitting portion near the bottom fitting portion. The bottom fitting portion is provided with a third through-hole. By setting a cavity protection device in the dry etching equipment, a large amount of byproducts generated after semiconductor etching can be prevented from adhering to the inner wall of the cavity of the dry etching equipment. This avoids damage to the coating on the inner wall of the cavity when cleaning the byproducts, thus improving the protection of the inner wall of the cavity. Compared with the time-consuming cavity cleaning in the prior art, the dry etching equipment can be restarted after only a short time by replacing the cavity protection device, improving the working efficiency of the dry etching equipment. At the same time, the cavity protection device can fill the consumed coating during the cleaning process, so as to realize the reuse of the cavity protection device and reduce the later maintenance cost.

[0025] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the structure of a cavity protection device for a dry etching equipment according to an embodiment of the present utility model;

[0028] Figure 2 This is a schematic diagram of the structure of another dry etching equipment cavity protection device provided according to an embodiment of the present utility model;

[0029] Figure 3 This is a schematic diagram of the structure of another dry etching equipment cavity protection device provided according to an embodiment of the present utility model;

[0030] Figure 4 This is a schematic diagram of the structure of another dry etching equipment cavity protection device provided according to an embodiment of the present utility model;

[0031] Figure 5 This is a top view schematic diagram of an anti-detachment structure provided according to an embodiment of the present utility model. Detailed Implementation

[0032] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0033] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the utility model described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0034] This utility model embodiment provides a cavity protection device for a dry etching equipment. Figure 1 This is a schematic diagram of the structure of a cavity protection device for a dry etching equipment according to an embodiment of the present invention. Figure 2 This is a schematic diagram of another dry etching equipment cavity protection device provided according to an embodiment of the present invention. Figure 3 This is a structural schematic diagram of another dry etching equipment cavity protection device provided according to an embodiment of the present invention. Figure 4 This is a structural schematic diagram of another dry etching equipment cavity protection device provided according to an embodiment of the present invention, with reference to... Figures 1-4 The cavity protection device for dry etching equipment includes:

[0035] Cavity fitting part 1, cavity opening fitting part 2 and bottom fitting part 3;

[0036] The cavity fitting part 1 includes a first through hole and a first surface and a second surface disposed opposite to each other, the first through hole penetrating the first surface and the second surface;

[0037] The cavity fitting part 2 is provided with a second through hole and is located on the first surface of the cavity fitting part 1. The inner wall diameter of the cavity fitting part 2 is the same as the inner wall diameter of the cavity fitting part 1, and the wall thickness of the cavity fitting part 2 is less than the wall thickness of the cavity fitting part 1.

[0038] The bottom fitting part 3 is disposed on the second surface of the cavity fitting part 1 and located inside the first through hole. The side wall of the bottom fitting part 3 is connected to the inner wall of the cavity fitting part 1. The surface of the bottom fitting part 3 away from the cavity fitting part 2 is flush with the surface of the cavity fitting part 1 near the bottom fitting part 3. The bottom fitting part 3 is provided with a third through hole, and the axis of the third through hole is in a straight line with the axis of the first through hole and the axis of the second through hole.

[0039] The cavity fitting part 1 is provided with a first hole 11 and a second hole 12. The first hole 11 and the second hole 12 are arranged opposite to each other. The first hole 11 is arranged to correspond to the gas concentration sensor in the cavity of the dry etching equipment, and the second hole 12 is arranged to correspond to the material inlet of the cavity of the dry etching equipment.

[0040] The bottom fitting part 3 is provided with a cutting opening 31. The center line of the cutting opening 31 along the first direction coincides with the center line of the first hole 11 along the first direction, and the cutting opening 31 is correspondingly provided with the exhaust port of the dry etching equipment cavity; wherein, the first direction is the direction from the bottom fitting part 3 to the cavity fitting part 2.

[0041] The cavity fitting part 1 and the cavity opening fitting part 2 can be annular structures, which are formed by covering the cavity sidewall of the dry etching equipment with the cavity fitting part 1 and the cavity opening fitting part 2.

[0042] Specifically, before processing semiconductor devices, the cavity protection device of this invention is installed on the inner wall of the dry etching equipment cavity. Then, the semiconductor device to be processed is fed into the cavity through the material inlet and second hole 12 for dry etching. A gas concentration sensor passes through the first hole 11 to monitor the gas concentration inside the cavity in real time. Simultaneously, the etching products inside the cavity are extracted to the outside through the exhaust port and cutout 31 of the dry etching equipment cavity. During semiconductor device processing, the cavity sidewalls can be completely shielded, allowing the products generated during the dry etching process to adhere completely to the cavity bonding part 1, cavity opening bonding part 2, and bottom bonding part 3, thus protecting the cavity sidewalls and bottom of the dry etching equipment.

[0043] The dry etching apparatus cavity protection device provided in this embodiment includes a cavity fitting part 1, a cavity opening fitting part 2, and a bottom fitting part 3. The cavity fitting part 1 includes a first through hole and a first surface and a second surface disposed opposite to each other. The first through hole penetrates the first surface and the second surface. The cavity opening fitting part 2 is provided with a second through hole and is located on the first surface of the cavity fitting part 1. The inner wall diameter of the cavity opening fitting part 2 is the same as the inner wall diameter of the cavity fitting part 1, and the wall thickness of the cavity opening fitting part 2 is less than the wall thickness of the cavity fitting part 1. The bottom fitting part 3 is disposed on the first surface of the cavity fitting part 1. The bottom bonding part 3 has two surfaces and is located within the first through hole. The side wall of the bottom bonding part 3 is connected to the inner wall of the cavity bonding part 1. The surface of the bottom bonding part 3 away from the cavity opening bonding part 2 is flush with the surface of the cavity bonding part 1 near the bottom bonding part 3. The bottom bonding part 3 is provided with a third through hole. By setting a cavity protection device in the dry etching equipment, a large amount of products generated after semiconductor etching can be prevented from adhering to the inner wall of the cavity of the dry etching equipment. This avoids damage to the coating on the inner wall of the cavity when cleaning the products on the inner wall of the cavity, thus improving the protection of the inner wall of the cavity. Compared with the time-consuming cavity cleaning in the prior art, the dry etching equipment can be restarted after only a short time by replacing the cavity protection device, which improves the working efficiency of the dry etching equipment. At the same time, the cavity protection device can fill the consumed coating during the cleaning process, so as to realize the reuse of the cavity protection device and reduce the later maintenance cost.

[0044] Furthermore, the cavity fitting part includes n first splicing parts, each first splicing part including a first anti-detachment part, a first fitting part and a first body part; the cavity opening fitting part includes n second splicing parts, each second splicing part including a second anti-detachment part, a second fitting part and a second body part; the bottom fitting part includes n third splicing parts, each third splicing part including a third anti-detachment part, a third fitting part and a third body part;

[0045] The first splicing part is provided in a one-to-one correspondence with the second and third splicing parts, and the corresponding first splicing part, second splicing part and third splicing part form a splicing component of the cavity protection device; the corresponding first anti-detachment part, second anti-detachment part and third anti-detachment part form an anti-detachment part; the corresponding first fitting part, second fitting part and third fitting part form a fitting part; the corresponding first body part, second body part and third body part form a body part; the anti-detachment part and the fitting part are respectively provided on both sides of the body part; the anti-detachment part and the fitting part of the adjacent cavity protection device splicing component form an anti-detachment structure; the fitting part and the anti-detachment part of the adjacent cavity protection device splicing component form an anti-detachment structure; where n is an integer greater than or equal to 2.

[0046] Specifically, the cavity bonding part is disassembled into n first splicing parts, the cavity opening bonding part is disassembled into n second splicing parts, and the bottom bonding part is disassembled into n third splicing parts. The corresponding first splicing parts, second splicing parts, and third splicing parts are combined to form a cavity protection device splice, so as to facilitate the installation of the cavity protection device into the dry etching equipment. An anti-detachment part and an interlocking part are set in the cavity protection device splice. The anti-detachment part can form an anti-detachment structure with the interlocking part of the adjacent cavity protection device splice, and the interlocking part can form an anti-detachment structure with the anti-detachment part of the adjacent cavity protection device splice. This improves the stability of the cavity protection device splice after assembly, avoids the formation of connection gaps between adjacent cavity protection device splices, and further avoids the adhesion of a large amount of products generated after semiconductor etching to the inner wall of the cavity of the dry etching equipment.

[0047] Furthermore, Figure 5 This is a top view schematic diagram of an anti-detachment structure provided according to an embodiment of the present utility model, with reference to... Figure 5 The anti-detachment part includes a locking protrusion, and the fitting part includes a locking groove;

[0048] The protrusions and slots interlock to form an anti-detachment structure.

[0049] Specifically, the first cavity protection device splice includes a first main body 51, a first locking protrusion 52, and a first locking groove 53. The first locking protrusion 52 and the second locking groove 63 of the adjacent cavity protection device splice form an anti-detachment structure, and the first locking groove 53 and the third locking protrusion 42 of the adjacent cavity protection device splice form an anti-detachment structure, so as to improve the stability of the cavity protection device splice after assembly and avoid the generation of connection gaps between adjacent cavity protection device splices.

[0050] Furthermore, the first hole and the second hole are respectively set on two different first splicing parts.

[0051] Specifically, by setting the first hole and the second hole on two different first splicing parts, it is easier to install the cavity protection device splicing parts into the dry etching equipment and improve splicing efficiency.

[0052] Furthermore, the cavity fitting part, the cavity opening fitting part, and the bottom fitting part are made of corrosion-resistant material.

[0053] Specifically, this can prevent etching gas from corroding the cavity bonding part, cavity opening bonding part, and bottom bonding part. For example, the materials of the cavity bonding part, cavity opening bonding part, and bottom bonding part can be the same as the material of the dry etching equipment cavity, or the materials of the cavity bonding part, cavity opening bonding part, and bottom bonding part can be different from the material of the dry etching equipment cavity.

[0054] Furthermore, the materials of the cavity fitting part, the cavity opening fitting part, and the bottom fitting part are the same as the material of the cavity of the dry etching equipment.

[0055] Specifically, since the inner wall of the dry etching equipment cavity is made of corrosion-resistant material, the materials of the cavity fitting part, cavity opening fitting part and bottom fitting part are the same as the material of the dry etching equipment cavity, which can ensure the corrosion resistance of the cavity protection device.

[0056] Furthermore, the cavity fitting part includes a US-made aluminum cavity fitting body and a cavity hard oxide coating, and the cavity hard oxide coating covers the US-made aluminum cavity fitting body.

[0057] The cavity fitting part includes a US-made aluminum cavity fitting body and a cavity hard anodizing coating, and the cavity hard anodizing coating covers the US-made aluminum cavity fitting body;

[0058] The bottom bonding portion includes an American-made aluminum bottom bonding body and a bottom hard oxide coating, with the bottom hard oxide coating covering the American-made aluminum bottom bonding body.

[0059] Specifically, applying a hard oxide coating to the surface of American-made aluminum can improve the corrosion resistance of the cavity fitting parts, cavity opening fitting parts, and bottom fitting parts.

[0060] Furthermore, n = 4.

[0061] Furthermore, the first hole is a round hole, and the second hole is an elliptical hole.

[0062] This utility model provides a dry etching apparatus, which includes the cavity protection device of the dry etching apparatus described in any of the above embodiments. Therefore, it has the beneficial effects of the cavity protection device of the dry etching apparatus, which will not be repeated here.

[0063] It should be understood that the various forms of the process shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this utility model can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this utility model can be achieved, and this is not limited herein.

[0064] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A cavity protection device for a dry etching apparatus, characterized in that, include: Cavity fitting part, cavity opening fitting part and bottom fitting part; The cavity fitting portion includes a first through hole and a first surface and a second surface disposed opposite to each other, wherein the first through hole penetrates the first surface and the second surface; The cavity fitting part is provided with a second through hole, which is located on the first surface of the cavity fitting part. The inner wall diameter of the cavity fitting part is the same as the inner wall diameter of the cavity fitting part, and the wall thickness of the cavity fitting part is less than the wall thickness of the cavity fitting part. The bottom fitting portion is disposed on the second surface of the cavity fitting portion and located within the first through hole. The sidewall of the bottom fitting portion is connected to the inner wall of the cavity fitting portion. The surface of the bottom fitting portion away from the cavity fitting portion is flush with the surface of the cavity fitting portion near the bottom fitting portion. The bottom fitting portion is provided with a third through hole, and the axis of the third through hole is in a straight line with the axis of the first through hole and the axis of the second through hole. The cavity fitting part is provided with a first hole and a second hole. The first hole and the second hole are arranged opposite to each other. The first hole is arranged to correspond to the gas concentration sensor in the cavity of the dry etching equipment, and the second hole is arranged to correspond to the material inlet of the cavity of the dry etching equipment. The bottom fitting portion is provided with an opening, the center line of the opening portion along the first direction coincides with the center line of the first hole along the first direction, and the opening portion is correspondingly provided with the exhaust port of the dry etching equipment cavity; wherein, the first direction is the direction from the bottom fitting portion to the cavity fitting portion.

2. The cavity protection device for dry etching equipment according to claim 1, characterized in that, The cavity fitting portion includes n first splicing portions, each of which includes a first anti-detachment portion, a first fitting portion, and a first body portion; the cavity opening fitting portion includes n second splicing portions, each of which includes a second anti-detachment portion, a second fitting portion, and a second body portion; the bottom fitting portion includes n third splicing portions, each of which includes a third anti-detachment portion, a third fitting portion, and a third body portion. The first splicing part is provided in a one-to-one correspondence with the second splicing part and the third splicing part, and the corresponding first splicing part, second splicing part and third splicing part form a cavity protection device splicing component; the corresponding first anti-detachment part, second anti-detachment part and third anti-detachment part form an anti-detachment part; the corresponding first fitting part, second fitting part and third fitting part form a fitting part; the corresponding first body part, second body part and third body part form a body part; the anti-detachment part and the fitting part are respectively provided on both sides of the body part; and the anti-detachment part and the fitting part of the adjacent cavity protection device splicing component form an anti-detachment structure; the fitting part and the anti-detachment part of the adjacent cavity protection device splicing component form an anti-detachment structure; where n is an integer greater than or equal to 2.

3. The cavity protection device for dry etching equipment according to claim 2, characterized in that, The anti-detachment part includes a locking protrusion, and the fitting part includes a locking groove; The protrusion and the slot engage with each other to form the anti-detachment structure.

4. The cavity protection device for dry etching equipment according to claim 2, characterized in that, The first hole and the second hole are respectively set on two different first splicing parts.

5. The cavity protection device for dry etching equipment according to claim 1, characterized in that, The cavity fitting part, the cavity opening fitting part, and the bottom fitting part are made of corrosion-resistant material.

6. The cavity protection device for dry etching equipment according to claim 5, characterized in that, The materials of the cavity fitting part, the cavity opening fitting part, and the bottom fitting part are the same as the material of the cavity of the dry etching equipment.

7. The cavity protection device for dry etching equipment according to claim 5, characterized in that, The cavity fitting part includes a US standard aluminum cavity fitting body and a cavity hard oxide coating, and the cavity hard oxide coating covers the US standard aluminum cavity fitting body; The cavity fitting part includes a US standard aluminum cavity fitting body and a cavity hard anodizing coating, and the cavity hard anodizing coating covers the US standard aluminum cavity fitting body; The bottom bonding portion includes an American standard aluminum bottom bonding body and a bottom hard anodizing coating, and the bottom hard anodizing coating covers the American standard aluminum bottom bonding body.

8. The cavity protection device for dry etching equipment according to claim 2, characterized in that, n＝4。 9. The cavity protection device for dry etching equipment according to claim 1, characterized in that, The first hole is a round hole, and the second hole is an elliptical hole.

10. A dry etching apparatus, characterized in that, Includes the cavity protection device of the dry etching equipment as described in any one of claims 1-9.

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