Argon tail gas purification device capable of flexibly coping with oxygen peak

Abstract

The utility model relates to an argon tail gas purification device capable of flexibly coping with an oxygen peak, which comprises a pretreatment system for primarily treating raw material argon tail gas, a catalysis system for removing part or all of carbon monoxide, an oxidation reduction system for removing residual carbon monoxide or oxygen, and a precooler for precooling, the dehydration and decarbonization system is used for removing carbon dioxide and water; the rectification system is used for carrying out rectification to remove nitrogen and carbon monoxide; the oxidation-reduction system comprises two oxidation-reduction reaction cylinders which alternately perform reaction and regeneration, and the oxidation-reduction reaction cylinders are connected with a first regeneration pipeline for providing air and a second regeneration pipeline for providing secondary intermediate gas; the dehydration and decarburization system comprises three dehydration and decarburization adsorption cylinders, the third dehydration and decarburization adsorption cylinder is standby when an oxygen peak does not arrive, and the third dehydration and decarburization adsorption cylinder is put into adsorption when the oxygen peak arrives. The argon tail gas purification device is simple and convenient to operate, and can better deal with the oxygen peak of the argon tail gas for purification.

Description

TECHNICAL FIELD

[0001] The utility model relates to gas purification technical field, concretely relates to a device of high purity argon gas obtained by purifying argon tail gas. BACKGROUND

[0002] The argon tail gas output by the single crystal silicon manufacturing device contains carbon monoxide, oxygen, nitrogen and a small amount of water, wherein the contents of the impurities carbon monoxide, nitrogen and water are relatively stable, and the content of the impurity oxygen often appears to increase a lot, that is, a larger oxygen peak appears on the oxygen analyzer. In view of the fluctuation of the oxygen content in the argon tail gas, the existing argon tail gas purification device is difficult to cope with better. SUMMARY

[0003] The utility model discloses a kind of argon tail gas purification devices, which can flexibly cope with argon tail gas oxygen peak, simple operation, easy to control, thereby reduce rare gas consumption and reduce operating cost.

[0004] To achieve the above object, the utility model adopts the technical scheme that:

[0005] A kind of argon tail gas purification device that flexibly cope with oxygen peak, it includes:

[0006] preprocessing system for the preliminary treatment of raw material argon tail gas;

[0007] catalytic system for removing part or all carbon monoxide in the raw material argon tail gas after preprocessing to obtain first intermediate gas;

[0008] oxidation-reduction system for removing residual carbon monoxide or oxygen in the first intermediate gas according to oxygen peak condition to obtain second intermediate gas;

[0009] precooler for precooling the second intermediate gas to obtain third intermediate gas;

[0010] dehydration and decarbonization system for removing carbon dioxide and water in the third intermediate gas to obtain fourth intermediate gas;

[0011] rectification system for rectifying and denitrifying and carbon monoxide in the fourth intermediate gas to obtain the high-purity argon gas;

[0012] The oxidation-reduction system includes two oxidation-reduction reaction cylinders capable of switching working states;

[0013] The dehydration and decarbonization system includes three dehydration and decarbonization adsorption cylinders, the first dehydration and decarbonization adsorption cylinder and the second dehydration and decarbonization adsorption cylinder are alternately in adsorption state and regeneration state when oxygen peak does not arrive, and the third dehydration and decarbonization adsorption cylinder is standby, and the standby third dehydration and decarbonization adsorption cylinder is put into adsorption state when oxygen peak arrives.

[0014] The pre-treatment system comprises a filter connected in sequence for filtering solid particle impurities in the raw argon tail gas, a compressor for compressing the raw argon tail gas, and an argon oxygen analyzer for detecting oxygen content in the raw argon tail gas in real time.

[0015] The catalytic system comprises a heating unit and a catalytic unit.

[0016] The heating unit comprises a regenerator and a heater, and the catalytic unit comprises a catalytic furnace, the raw argon tail gas is connected to the heater through the regenerator, the outlet of the heater is connected to the inlet of the catalytic furnace, and the outlet of the catalytic furnace is connected to the redox system through the regenerator.

[0017] The redox reaction cylinder is connected with a first regeneration pipeline for providing air as a regeneration gas after the adsorbent in the redox reaction cylinder is saturated with carbon monoxide and a second regeneration pipeline for providing the secondary intermediate gas as a regeneration gas after the adsorbent in the redox reaction cylinder is saturated with oxygen.

[0018] The outlet of the first regeneration pipeline and the outlet of the second regeneration pipeline are connected to the inlet of the catalytic system.

[0019] A blower and a first regeneration heater are arranged on the first regeneration pipeline, and a second regeneration heater is arranged on the second regeneration pipeline.

[0020] An argon oxygen analyzer and a carbon monoxide analyzer are arranged between the redox system and the pre-cooler.

[0021] The first dehydration and decarburization adsorption cylinder and the second dehydration and decarburization adsorption cylinder are jointly connected with a first regeneration gas pipeline, and the third dehydration and decarburization adsorption cylinder is connected with a second regeneration gas pipeline.

[0022] Thanks to the above technical scheme, the present application has the following advantages compared with the prior art: the present application is simple and convenient to operate, can better deal with the oxygen peak of argon tail gas for purification, reduces argon tail gas consumption, and saves operation cost. BRIEF DESCRIPTION OF DRAWINGS

[0023] ATTACHED Figure 1 The figure is a schematic diagram of the principle of the argon tail gas purification device of the present application for flexible response to oxygen peak. DETAILED DESCRIPTION

[0024] The present application will be further described below in combination with the embodiments shown in the drawings.

[0025] Example 1: as shown in the attached Figure 1As shown, an argon tail gas purification device capable of flexibly dealing with oxygen peaks comprises a pretreatment system, a catalytic system 1, a redox system 2, a pre-cooler 3, a dehydration and decarburization system 4 and a rectification system 5 arranged in sequence.

[0026] The front end of the pretreatment system is connected to a raw gas source providing raw argon tail gas, such as a single crystal silicon manufacturing device, for performing preliminary treatment on the raw argon tail gas, which comprises a filter for filtering solid particle impurities in the raw argon tail gas, a compressor for compressing the raw argon tail gas, and an argon oxygen analyzer for detecting the oxygen content in the raw argon tail gas in real time, which are connected in sequence.

[0027] The catalytic system 1 is used to remove part or all of the carbon monoxide in the pretreated raw argon tail gas to obtain a first intermediate gas. The catalytic system 1 comprises a heating unit and a catalytic unit. The heating unit comprises a regenerator and a heater, and the catalytic unit comprises a catalytic furnace. The raw argon tail gas is introduced into the heater through the regenerator, the outlet of the heater is connected to the inlet of the catalytic furnace, and the outlet of the catalytic furnace is connected to the redox system 2 through the regenerator.

[0028] The redox system 2 is connected to the catalytic system 1, which is used to remove the remaining carbon monoxide or oxygen in the first intermediate gas according to the oxygen peak to obtain a second intermediate gas. The redox system 2 comprises two redox reaction cylinders that alternately perform reaction and regeneration. The redox reaction cylinders are connected to a first regeneration pipeline for providing air as a regeneration gas when the oxygen peak has not arrived (i.e., the oxygen content is relatively low) and the adsorbent in the redox reaction cylinder is saturated with carbon monoxide, and a second regeneration pipeline for providing the second intermediate gas as a regeneration gas when the oxygen peak arrives (i.e., the oxygen content is high) and the adsorbent in the redox reaction cylinder is saturated with oxygen. A blower is arranged on the first regeneration pipeline. Regeneration heaters are arranged on the first regeneration pipeline and the second regeneration pipeline, respectively. The outlet of the first regeneration pipeline and the outlet of the second regeneration pipeline are connected to the inlet of the catalytic system.

[0029] The pre-cooler 3 is connected to the redox system 2, which is used to pre-cool the second intermediate gas to obtain a third intermediate gas. An argon oxygen and carbon monoxide analyzer is arranged between the redox system 2 and the pre-cooler 3.

[0030] The dehydration and decarburization system 4 is connected with the pre-cooling machine 3, which is used to remove carbon dioxide and water in the third intermediate gas to obtain the fourth intermediate gas. The dehydration and decarburization system 4 comprises three dehydration and decarburization adsorption cylinders, the first dehydration and decarburization adsorption cylinder and the second dehydration and decarburization adsorption cylinder are alternately in the adsorption state and the regeneration state when the oxygen peak does not arrive, and the third dehydration and decarburization adsorption cylinder is standby, and the third dehydration and decarburization adsorption cylinder is put into the adsorption state when the oxygen peak arrives. The first dehydration and decarburization adsorption cylinder and the second dehydration and decarburization adsorption cylinder are commonly connected with the first regeneration gas pipeline using the regeneration gas 1, and the third dehydration and decarburization adsorption cylinder is connected with the second regeneration gas pipeline using the regeneration gas 2.

[0031] The rectification system 5 is connected with the dehydration and decarburization system 4, which is used to rectify the fourth intermediate gas to remove nitrogen and carbon monoxide to obtain high-purity argon gas.

[0032] The raw argon tail gas is filtered through a filter, compressed to the required pressure, heated to 150-300 DEG C, and then enters the catalytic unit. The catalytic unit can catalyze the reaction of carbon monoxide and oxygen to generate carbon dioxide. When the oxygen content is low (carbon monoxide is excessive), the oxygen in the argon tail gas is consumed by carbon monoxide, and the argon tail gas carrying carbon monoxide, carbon dioxide, nitrogen and water (i.e. the first intermediate gas) enters the oxidation-reduction system 2; when the oxygen peak appears, the oxygen is excessive, and the argon tail gas carrying oxygen, carbon dioxide, nitrogen and water (i.e. the first intermediate gas) enters the oxidation-reduction system 2.

[0033] The two oxidation-reduction reaction cylinders of the oxidation-reduction system 2 are usually one working and the other regenerating. When carbon monoxide is excessive, the oxidation-reduction reaction cylinder is used to remove carbon monoxide, and after the carbon monoxide is adsorbed and saturated, the first regeneration pipeline is connected, the regeneration gas is air, the air is pressurized by a blower, and then heated to regenerate the oxidation-reduction reaction cylinder, and the waste gas after regeneration is vented. When oxygen is excessive, the oxidation-reduction reaction cylinder is used to remove oxygen, and after the oxygen is adsorbed and saturated, the second regeneration pipeline is connected, the regeneration gas is the argon tail gas containing carbon monoxide at the outlet of the oxidation-reduction system 2, i.e. the second intermediate gas, and the regeneration gas at the outlet of the oxidation-reduction system 2 returns to the inlet of the raw argon tail gas.

[0034] The argon tail gas, i.e. the second intermediate gas, from the oxidation-reduction system 2 is cooled to 8-14 DEG C by the pre-cooling machine 3, and then enters the dehydration and decarburization system 4 to remove carbon dioxide and water. The dehydration and decarburization system 4 comprises three dehydration and decarburization adsorption cylinders. When the oxygen peak does not arrive, one dehydration and decarburization adsorption cylinder works, one dehydration and decarburization adsorption cylinder regenerates, and the third dehydration and decarburization adsorption cylinder is standby. The regeneration gas 1 and the regeneration gas 2 can be regenerated by nitrogen or argon. When the oxygen peak appears, the third dehydration and decarburization adsorption cylinder is put into use, and after the oxygen peak disappears, the third dehydration and decarburization adsorption cylinder is regenerated by the regeneration gas 2, and after the regeneration is completed, it can be closed.

[0035] The argon tail gas from the dehydration and decarburization system 4, i.e. the fourth-stage intermediate gas, is subjected to a rectification system 5 to remove nitrogen and carbon monoxide, and high-purity argon gas is obtained.

[0036] The utility model discloses a kind of for the raw material argon tail gas of oxygen content fluctuation is purified and obtains high-purity argon gas, it can flexibly cope with oxygen peak, remove the impurity of argon tail gas, obtain ultra-pure argon gas, it is simple to operate, low in cost, can save cost for enterprise, improve economic efficiency, utilize blast air regeneration oxidation-reduction system 2, low in cost also can reduce the consumption of argon tail gas.The third dehydration and decarburization adsorption cylinder should cope with the situation that oxygen peak appears, carbon dioxide generation increases.Independent control, save operating cost.

[0037] The above examples are only for illustrating the technical concept and characteristics of the utility model, and the purpose is to enable persons skilled in the art to understand the content of the utility model and implement it, and it cannot limit the protection scope of the utility model. Any equivalent change or modification according to the spirit and essence of the utility model shall be covered within the protection scope of the utility model.

Claims

1. An argon tail gas purification apparatus for dealing with oxygen peaks, characterized by: The argon tail gas purification device for coping with the oxygen peak comprises: a pretreatment system for preliminarily treating raw argon tail gas; a catalytic system for removing part or all of carbon monoxide in the pretreated raw argon tail gas to obtain a first intermediate gas; a redox system for removing residual carbon monoxide or oxygen in the first intermediate gas according to the oxygen peak to obtain a second intermediate gas; a pre-cooler for pre-cooling the second intermediate gas to obtain a third intermediate gas; a dehydrating and decarbonating system for removing carbon dioxide and water in the third intermediate gas to obtain a fourth intermediate gas; a rectifying system for rectifying and removing nitrogen and carbon monoxide from the fourth intermediate gas to obtain high-purity argon gas; the redox system comprises two redox reaction cylinders capable of switching working states; the dehydrating and decarbonating system comprises three dehydrating and decarbonating adsorption cylinders, the first and second dehydrating and decarbonating adsorption cylinders are alternately in adsorption state and regeneration state when the oxygen peak does not arrive, and the third dehydrating and decarbonating adsorption cylinder is standby, and the standby third dehydrating and decarbonating adsorption cylinder is put into adsorption state when the oxygen peak arrives.

2. The argon tail gas purification apparatus to combat oxygen peaks of claim 1, characterized in that: The pretreatment system comprises a filter for filtering solid particle impurities in the raw argon tail gas, a compressor for compressing the raw argon tail gas, and an argon oxygen analyzer for detecting the oxygen content in the raw argon tail gas in real time, which are connected in sequence.

3. The argon tail gas purification apparatus to combat oxygen peaks of claim 1, wherein: The catalytic system comprises a heating unit and a catalytic unit.

4. An argon tail gas purification apparatus to address oxygen peaks according to claim 3, characterized in that: The heating unit comprises a regenerator and a heater, the catalytic unit comprises a catalytic furnace, the raw argon tail gas is connected to the heater through the regenerator, the outlet of the heater is connected to the inlet of the catalytic furnace, and the outlet of the catalytic furnace is connected to the redox system through the regenerator.

5. The argon tail gas purification apparatus to address oxygen peaks of claim 1, wherein: The redox reaction cylinder is connected with a first regeneration pipeline for providing air as the regeneration gas after the adsorbent in the redox reaction cylinder is saturated with carbon monoxide, and a second regeneration pipeline for providing the second intermediate gas as the regeneration gas after the adsorbent in the redox reaction cylinder is saturated with oxygen.

6. An argon tail gas purification apparatus to address oxygen peaks according to claim 5, characterized in that: The outlet of the first regeneration pipeline and the outlet of the second regeneration pipeline are connected to the inlet of the catalytic system.

7. The argon tail gas purification apparatus to address oxygen peaks of claim 5, wherein: A blower and a first regeneration heater are arranged on the first regeneration pipeline, and a second regeneration heater is arranged on the second regeneration pipeline.

8. The argon tail gas purification apparatus to combat oxygen peaks of claim 1, wherein: An argon oxygen and carbon monoxide analyzer is arranged between the redox system and the pre-cooler.

9. The argon tail gas purification apparatus to combat oxygen peaks of claim 1, wherein: The first and second dehydrating and decarbonating adsorption cylinders are jointly connected with a first regeneration gas pipeline, and the third dehydrating and decarbonating adsorption cylinder is connected with a second regeneration gas pipeline.

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