Spray head with cleaning function for degumming stripping machine

Abstract

The utility model provides a shower nozzle with a cleaning function for a degumming stripping machine, which comprises a shower nozzle body, the outer wall of the shower nozzle body is fixedly connected with a mounting frame, the bottom of the inner wall of the mounting frame is fixedly connected with a water bag, the inner wall of the water bag is fixedly connected with a spring, and the bottom of the water bag is fixedly connected with a drainage pipe. A one-way valve is arranged on the surface of the drainage pipe, a lifting plate is arranged at the top of the water bag, an electromagnetic column is fixedly connected to the bottom of the lifting plate, a magnetic suction column is fixedly connected to the inner wall of the mounting frame, a water inlet pipe is fixedly connected to the inner wall of the water bag, and an auxiliary assembly is arranged on the surface of the mounting frame. And a guide assembly is arranged in the mounting frame. According to the utility model, by arranging the mounting frame, the water bag, the spring and other structures, the timing self-cleaning function is realized at the nozzle of the spray head, the use cleanliness of the spray head is ensured, and the effect of photoresist removing and stripping operation is ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to a glue stripping machine field, especially in a glue stripping machine with the spray head of clean function. BACKGROUND

[0002] The glue stripping machine is a kind of equipment specially used for removing photoresist in the process of semiconductor device manufacturing, it is mainly applied to packaging, LED, optical communication, compound semiconductor and other fields, glue stripping machine can automatically complete stripping process, improve production efficiency and operation convenience, the spray head of glue stripping machine is mainly used to spray liquid, this liquid is usually specific chemical solvent or cleaning fluid, for removing photoresist on semiconductor device, integrated circuit or other electronic components.

[0003] In the traditional glue stripping process, it needs to use superhigh pressure to flush the wafer surface, in this process, there can be metal deposits rebound, again be hit by the liquid column of superhigh pressure on the wafer surface, lead to metal residue, after a period of time of spray head operation, the spray head needs to be cleaned, specific chemical solvent is used to clean the spray head to remove residual gold, regularly check and maintain the spray head of glue stripping machine, promptly find and clean residual gold, can prevent residual gold from accumulating too much, lead to more difficult cleaning condition occurs.

[0004] In the process of using the spray head, residual gold can be adhered to the surface, cannot provide self-cleaning function to the spray head in the process of glue stripping, can increase the frequency of subsequent cleaning spray head, reduce the cleanliness of spray head itself, cannot guarantee the efficiency of glue stripping operation and the effect of glue stripping, therefore a kind of glue stripping machine with the spray head with clean function is proposed to solve the above problems. UTILITY MODEL CONTENTS

[0005] Therefore, the utility model aims at providing a kind of glue stripping machine with the spray head with clean function, to improve the problem of the spray head with clean function in prior art cannot provide self-cleaning function to the spray head in the process of glue stripping, lead to reduce operation efficiency and operation effect.

[0006] A kind of glue stripping machine with the spray head with clean function, including spray head body, the outer wall of the spray head body is fixedly connected with mounting bracket, the bottom of the inner wall of the mounting bracket is fixedly connected with water bag, the inner wall of the water bag is fixedly connected with spring, the bottom of the water bag is fixedly connected with drain pipe, the surface of the drain pipe is provided with one-way valve, the top of the water bag is provided with lifting plate, the bottom of the lifting plate is fixedly connected with electromagnetic column, the inner wall of the mounting bracket is fixedly connected with magnetic attraction column, the inner wall of the water bag is fixedly connected with water inlet pipe, the surface of the mounting bracket is provided with auxiliary assembly, the inside of the mounting bracket is provided with guide assembly.

[0007] Further, the outer wall of the electromagnetic column is matched with the outer wall of the magnetic attraction column.

[0008] Further, the outer wall of the drainage pipe is fixedly connected with the inner wall of the mounting frame.

[0009] Further, the guide assembly comprises a guide groove, and the inner wall of the guide groove is slidably connected with a guide block.

[0010] Further, the auxiliary assembly comprises a protruding block, and the surface of the lifting plate is provided with a notch.

[0011] Further, the guide groove is arranged on the inner wall of the mounting frame, and the outer wall of the guide block is fixedly connected with the outer wall of the lifting plate.

[0012] Further, the top of the protruding block is fixedly connected with the bottom of the lifting plate.

[0013] Further, the water inlet pipe is arranged in an L shape, and the outer wall of the water inlet pipe is fixedly connected with the inner wall of the mounting frame.

[0014] The beneficial effects of the utility model are that: through the cooperation of the mounting frame, the water bag, the spring, the water inlet pipe, the drainage pipe, the one-way valve, the lifting plate, the magnetic attraction column, the electromagnetic column, the auxiliary assembly and the guide assembly, the nozzle realizes the timed self-cleaning function, avoids the decline of the effect of the stripping operation caused by the adhesion of residual gold on the surface of the nozzle after operation, and ensures the cleanliness of the nozzle. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a body structure side view schematic diagram of the nozzle with the cleaning function for the stripping machine;

[0016] Figure 2 It is a body structure separation side view schematic diagram of the nozzle with the cleaning function for the stripping machine;

[0017] Figure 3 It is a partial structure bottom view schematic diagram of the nozzle with the cleaning function for the stripping machine;

[0018] Figure 4 It is a partial structure bottom view schematic diagram of the nozzle with the cleaning function for the stripping machine; Figure 3 Enlarged schematic diagram of area A;

[0019] Figure 5 It is a partial structure bottom view schematic diagram of the nozzle with the cleaning function for the stripping machine;

[0020] Explanation of main element symbols:

[0021] Nozzle body 1 Guide block 9 Mounting frame 2 Lifting plate 10 Water bag 3 Bump 11 Spring 4 Magnetic attraction column 12 Drain pipe 6 Electromagnetic column 13 Check valve 7 Water inlet pipe 14 Guide groove 8 Slot 15

[0022] The following detailed description will further explain the present application with reference to the above mentioned figures. DETAILED DESCRIPTION

[0023] In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the accompanying drawings. The drawings show several embodiments of the present application. However, the present application can be realized in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of the present application is more thorough and complete.

[0024] It should be noted that when an element is referred to as being "on" another element, it can be directly on the other element or intervening elements can also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements can also be present. As used herein, the terms "vertical", "horizontal", "left", "right" and similar expressions are used for the purpose of illustration only.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description of the application herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0026] Reference will now be made to Figures 1 to 3The utility model discloses a spray head with cleaning function for glue stripping machine, including spray head body 1, spray head body 1 is connected with glue stripping machine main part through support, and the top of spray head body 1 is provided with connecting pipe, for conveying the liquid of glue removal, the outer wall fixedly connected with mounting bracket 2 of spray head body 1, the inner wall fixedly connected with water bag 3 of mounting bracket 2, the bottom area of water bag 3 is fixed with the bottom of mounting bracket 2 inner wall, and other areas of water bag 3 are not connected with mounting bracket 2, the inner wall fixedly connected with spring 4 of water bag 3, spring 4 is provided with two groups, and two groups of spring 4 are symmetrically arranged with the central axis of water bag 3 as the axis of symmetry, the bottom fixedly connected with drain pipe 6 of water bag 3, the port of drain pipe 6 far away from water bag 3 one end faces the spout place of spray head body 1, the surface of drain pipe 6 is provided with check valve 7, check valve 7 is used for controlling the water flow of drain pipe 6 orientation, so that drain pipe 6 can only discharge the water source inside water bag 3, and water flow cannot flow back to water bag 3 inside through drain pipe 6, avoid the impurities on the surface of spout into water bag 3, the top of water bag 3 is provided with lifting plate 10, the bottom fixedly connected with electromagnetic column 13 of lifting plate 10, the inner wall fixedly connected with magnetic attraction column 12 of mounting bracket 2, the inner wall fixedly connected with inlet pipe 14 of water bag 3, inlet pipe 14 is introduced into tap water through external pipeline, external pipeline can be fixed with water tank, and the inside of water tank is introduced into water bag 3 by the pump control tap water, the surface of mounting bracket 2 is provided with auxiliary assembly, and the inside of mounting bracket 2 is provided with guide assembly.

[0027] Referring to Figures 3-5 , guide assembly includes guide groove 8, and guide groove 8 is arranged on the inner wall of mounting bracket 2, the outer wall of guide block 9 is fixedly connected with the outer wall of lifting plate 10, the inner wall of guide groove 8 is slidably connected with guide block 9, and guide block 9 cooperates with guide groove 8 to provide the guiding function of moving for lifting plate 10, so that it can only vertically lift inside mounting bracket 2, auxiliary assembly includes lug 11, and the top of lug 11 is fixedly connected with the bottom of lifting plate 10, when lifting plate 10 extrudes water bag 3, lug 11 will extrude water bag 3 in advance, so that the water source inside water bag 3 is discharged through drain pipe 6, and lifting plate 10 will be driven to rise reset after descending through the rebound of spring 4, the position of guide block 9 at the upper end of guide groove 8 will be inserted with the plug rod inside guide groove 8, and the surface of lifting plate 10 is provided with slot 15, and the surface of mounting bracket 2 is provided with inlet pipe 14, and inlet pipe 14 is located at the outer wall of one end of mounting bracket 2 away from drain pipe 6.

[0028] Referring to Figures 3-5 , the outer wall of electromagnetic column 13 is matched with the outer wall of magnetic attraction column 12, electromagnetic column 13 can be inserted into the hole in the center of magnetic attraction column 12, and electromagnetic column 13 can form magnetic attraction with magnetic attraction column 12 after being electrified, and the outer wall of drain pipe 6 is fixedly connected with the inner wall of mounting bracket 2.

[0029] Working principle: the electromagnetic column 13 is electrically connected with the power supply through the wire, the time of electrification and the electrification gap are pre-set through the PLC controller, the electrification of the electromagnetic column 13 is controlled by the PLC controller, which is the existing public technology in the field, and will not be described here, when the electromagnetic column 13 is electrified, the surface has magnetism, the electromagnetic column 13 will form the attraction with the magnetic attraction column 12, the two will approach each other, at the same time, the lifting plate 10 will be stressed to drive the guide block 9 to slide downwards in the guide groove 8, the lower limit of the protruding block 11 extrudes the center of the water bag 3, the spring 4 is compressed under stress, so that the water source in the water bag 3 is sprayed to the nozzle body 1 through the drain pipe 6, the self-cleaning function is realized for the nozzle, the risk that the residual gold adheres to the surface of the nozzle after work is reduced, the cleanliness of the nozzle body 1 is improved, and the effect of the stripping operation is ensured.

[0030] In summary, the nozzle with the cleaning function for the stripping machine in the above-mentioned embodiments of the utility model realizes the self-cleaning function of the nozzle at the nozzle at regular intervals, avoids the residual gold adhering to the surface of the nozzle after work, reduces the stripping operation effect, and ensures the cleanliness of the nozzle.

[0031] In the description of the present specification, the description of the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the utility model. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0032] The above-described embodiments only express several implementation manners of the utility model, the description is more specific and detailed, but it cannot be understood as the limitation of the utility model patent scope. It should be noted that for ordinary skilled persons in the art, without departing from the concept of the utility model, a number of modifications and improvements can be made, which belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent should be subject to the appended claims.

Claims

1. A nozzle for a stripping machine having a cleaning function, characterized in that, The utility model provides a water spraying head, including the nozzle body, the outer wall of nozzle body is fixedly connected with the mounting bracket, the bottom of mounting bracket inner wall is fixedly connected with water bag, the inner wall of water bag is fixedly connected with spring, the bottom of water bag is fixedly connected with drain pipe, the surface of drain pipe is provided with one -way valve, the top of water bag is provided with lifting plate, the bottom of lifting plate is fixedly connected with electromagnetic column, the inner wall of mounting bracket is fixedly connected with magnetic attraction column, the inner wall of water bag is fixedly connected with water inlet pipe, the surface of mounting bracket is provided with auxiliary assembly, the inside of mounting bracket is provided with guide component.

2. The nozzle with a cleaning function for a de-gluing and peeling machine according to claim 1, characterized in that, The outer wall of the electromagnetic column is matched with the outer wall of the magnetic attraction column.

3. The nozzle with a cleaning function for a de-gluing and peeling machine according to claim 1, characterized in that, The outer wall of the drain pipe is fixedly connected with the inner wall of the mounting bracket.

4. The nozzle with a cleaning function for a de-gluing and peeling machine according to claim 1, characterized in that, The guide component includes a guide groove, and the inner wall of the guide groove is slidably connected with a guide block.

5. The nozzle with a cleaning function for a de-gluing and peeling machine according to claim 1, characterized in that, The auxiliary assembly includes a protrusion, and the surface of the lifting plate is provided with a notch.

6. The nozzle with a cleaning function for a de-gluing and peeling machine according to claim 4, characterized in that, The guide groove is arranged on the inner wall of the mounting bracket, and the outer wall of the guide block is fixedly connected with the outer wall of the lifting plate.

7. The nozzle with a cleaning function for a de-gluing and peeling machine according to claim 5, characterized in that, The top of the protrusion is fixedly connected with the bottom of the lifting plate.

8. The nozzle with a cleaning function for a de-gluing and peeling machine according to claim 1, characterized in that, The water inlet pipe is arranged in an L shape, and the outer wall of the water inlet pipe is fixedly connected with the inner wall of the mounting bracket.

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