DOE optical performance test system based on LabVIEW

Abstract

The utility model relates to a DOE optical performance test system based on LabVIEW. The DOE optical performance test system based on LabVIEW comprises a laser light source driving module, a light source power detection module, a DOE power detection module and a LabVIEW software platform, and the laser light source driving module comprises a wavelength tunable laser, a neutral density optical filter, a one-dimensional electric displacement table and a beam splitter. The light source power detection module comprises a first photoelectric detector and a first digital source meter, the DOE power detection module comprises a DOE, a three-dimensional electric displacement table, a second photoelectric detector and a second digital source meter, and the LabVIEW software platform comprises a processor in which LabVIEW software is stored.

Description

TECHNICAL FIELD

[0001] The utility model belongs to optical measurement technical field, concretely relates to a kind of DOE optical performance test system and method based on LabVIEW. BACKGROUND

[0002] Diffractive optical element (DOE) is a kind of advanced optical element according to the principle of light diffraction, which controls the propagation path of light wave by precisely manufacturing small periodic structure on transparent substrate. Compared with traditional refractive optical element, DOE has the characteristics of light and thin, compact, flexible design and easy to mass production, so it plays an increasingly key role in modern optical system design. In imaging system, DOE is applied to perform complex optical functions, such as wavefront correction, beam shaping and aberration correction; in display technology, they are used to improve the resolution and contrast of display device; in optical communication field, DOE is used for wavelength division multiplexing and accurate routing of optical signal. In addition, DOE also plays an important role in many fields such as biomedical imaging, optical data processing and security system.

[0003] Diffractive efficiency is a key indicator to measure the optical performance of DOE, which reflects the conversion efficiency of DOE to light energy at a specific wavelength. The level of diffractive efficiency directly affects the imaging quality, light energy utilization and overall performance of optical system. Therefore, the accurate measurement and analysis of DOE diffractive efficiency is crucial for its design and application.

[0004] The traditional DOE diffractive efficiency detection method has the disadvantages of long time consumption, low efficiency, and difficulty in adapting to fast and batch testing requirements. The DOE diffractive efficiency detection system developed on the basis of the traditional DOE diffractive efficiency detection method can meet the testing requirements of DOE optical performance to some extent, but its popularity is low, and it cannot fully adapt to the testing requirements of different types of DOE. It is difficult to maintain stability and accuracy under variable working conditions.

[0005] Therefore, the development of a fully automated detection system that can efficiently, comprehensively and accurately evaluate the optical performance of DOE will help improve the quality control level of DOE products and promote the innovation and development of related optical technology. UTILITY MODEL CONTENT

[0006] The utility model aims to provide a kind of DOE optical performance test system and method based on LabVIEW, which can realize fast, accurate and fully automatic measurement of DOE optical diffractive efficiency under different test conditions.

[0007] To achieve the above-mentioned purpose, the utility model adopts the technical scheme of:

[0008] The utility model discloses a first aspect provides a kind of DOE optical performance test system based on LabVIEW, it includes laser light source drive module, light source power detection module, DOE power detection module and LabVIEW software platform.Wherein, laser light source drive module includes wavelength tunable laser, neutral density filter, one-dimensional electric displacement platform and beam splitter, the neutral density filter and the one-dimensional electric displacement platform are located between the wavelength tunable laser and the beam splitter, and the neutral density filter is set on the one-dimensional electric displacement platform.Light source power detection module includes first photodetector and first digital source table, the receiving end of the first photodetector is towards the reflecting surface of the beam splitter, and the first digital source table is connected with the first photodetector.DOE power detection module includes DOE, three-dimensional electric displacement platform, second photodetector and second digital source table, the DOE is located in the side of the transmission surface of the beam splitter, the second photodetector is set on the three-dimensional electric displacement platform, the receiving end of the second photodetector is towards the DOE, and the second digital source table is connected with the second photodetector.LabVIEW software platform is used to control the movement of the one-dimensional electric displacement platform and the three-dimensional electric displacement platform, and is used to process the data from the first digital source table and second digital source table to obtain the optical diffraction efficiency of DOE.

[0009] In the utility model, the power of test light beam is adjusted by neutral density filter, so that the power of incident light of DOE meets the needs of DOE and the detection range of photodetector, thereby the power requirement of laser light source is lower, DOE diffraction efficiency test under different laser energy can be realized, the power of test light beam is accurately adjusted by one-dimensional electric displacement platform and LabVIEW software, the diffraction light spot is detected by three-dimensional electric displacement platform and LabVIEW software, and the diffraction light of different diffraction orders can be quickly and continuously detected.

[0010] In the embodiment of the utility model, the connection line of the first photodetector and the beam splitter is perpendicular to the connection line of the second photodetector and the beam splitter, and the wavelength tunable laser, the neutral density filter, the beam splitter, the DOE and the second photodetector are on the same optical axis.

[0011] In the embodiment of the utility model, the first photoelectric detector is used for detecting the optical power of reflected light from the beam splitter, the first digital source table is used for converting the optical power of the reflected light into a voltage value output, the second photoelectric detector is used for detecting the optical power of diffracted light from the DOE, and the second digital source table is used for converting the optical power of the diffracted light into a voltage value output.

[0012] In the embodiment of the utility model, the output end of the first photoelectric detector is connected with the input end of the first digital source table, and the output end of the second photoelectric detector is connected with the input end of the second digital source table.

[0013] In the embodiment of the utility model, the LabVIEW software platform comprises a processor storing LabVIEW software, the one-dimensional electric displacement table, the three-dimensional electric displacement table, the first digital source table and the second digital source table are connected with the processor respectively, the processor is configured to receive data output by the first digital source table and the second digital source table, and is used for running an automatic control program and a data processing program, the movement of the one-dimensional electric displacement table and the three-dimensional electric displacement table is realized by running the corresponding automatic control program, and the optical diffraction efficiency of the DOE is obtained by processing data from the first digital source table and the second digital source table through the data processing program.

[0014] Preferably, the neutral density filter is a gradual neutral density filter or a series of neutral density filters with different OD values.

[0015] In the embodiment of the utility model, the wavelength of the laser light source comprises 380-1064nm.

[0016] In the embodiment of the utility model, the OD value of the neutral density filter is OD0.1-OD4.

[0017] In the embodiment of the utility model, the first photoelectric detector and the second photoelectric detector are gain-adjustable photoelectric detectors, so as to improve the detection result accuracy under low brightness detection conditions.

[0018] In the embodiment of the utility model, the one-dimensional displacement table, the three-dimensional displacement table, the first digital source table and the second digital source table are connected with the processor through data lines respectively, and the wavelength tunable laser is connected with the processor through Ethernet.

[0019] In the embodiment of the utility model, the sensitivity of the first photoelectric detector and the second photoelectric detector is greater than or equal to 0.1A / W respectively, and the gain-adjustable range is 0-70dB.

[0020] In the embodiment of the utility model, the first digital source table and the second digital source table are six-bit half digital source tables respectively.

[0021] In the embodiment of the utility model, the measurement error of the first digital source table and the second digital source table is ≤0.005% respectively.

[0022] The utility model discloses a second aspect further provides a kind of DOE optical performance test method based on LabVIEW, using the DOE optical performance test system described above carries out DOE optical performance test.

[0023] Preferably, the DOE optical performance test method includes the following steps:

[0024] (1) the DOE optical performance test system is built;

[0025] (2) corresponding automatic control program and data processing program are written in LabVIEW software;

[0026] (3) wavelength tunable laser is opened, and laser wavelength is set;

[0027] (4) file storage path, the coordinate of one-dimensional electric displacement platform and the coordinate of three-dimensional electric displacement platform are set in LabVIEW software;

[0028] (5) LabVIEW software is run, and one-dimensional electric displacement platform is moved to the coordinate position set by corresponding automatic control program, so that laser light source passes through the position corresponding to the required OD value on the neutral density filter or through the gradient neutral density filter, and three-dimensional electric displacement platform is moved to the position set by corresponding automatic control program, so that the receiving end of second photoelectric detector is aligned with the diffraction spot required to be tested;

[0029] (6) the laser light source light beam emitted by wavelength tunable laser is adjusted after the light power of neutral density filter, and is divided into reflected light (monitoring beam) and transmitted light (detection beam) by beam splitter, the light power of reflected light is detected by first photoelectric detector, the light power of first photoelectric detector is converted into voltage value by first digital source table and then transmitted to LabVIEW software, and the transmitted light forms diffraction light by DOE, the light power of diffraction light is detected by second photoelectric detector, the light power of second photoelectric detector is converted into voltage value by second digital source table and then transmitted to LabVIEW software;

[0030] (7) the data from first digital source table and second digital source table are processed by data processing program to obtain DOE optical diffraction efficiency;

[0031] (8) the light power data from the first digital source table is recorded as laser power, the light power data from the second digital source table is recorded as DOE power, and the data processed by the data processing program is recorded as diffraction efficiency, and is saved to a target path.

[0032] In some embodiments of the utility model, in the step (4), the coordinate of the three-dimensional motorized displacement stage is set as a position at which the second photodetector can detect a maximum light intensity value.

[0033] Further, the beam splitting ratio of the beam splitter is 50%, and the optical diffraction efficiency of the different diffraction orders is η':

[0034]

[0035] In some embodiments of the utility model, in the step (4), a plurality of coordinates of the three-dimensional motorized displacement stage are set, and the DOE optical performance testing method further comprises a step (9), which is: repeating the steps (6) and (7), moving the three-dimensional motorized displacement stage to different coordinates through the automatic control program, respectively obtaining optical diffraction efficiencies of different diffraction orders, and obtaining a sum of the optical diffraction efficiencies of the different diffraction orders through the data processing program, that is, the optical diffraction efficiency η of the DOE.

[0036] Further, the beam splitting ratio of the beam splitter is 50%, and the optical diffraction efficiency of the different diffraction orders is η':

[0037]

[0038] Due to the use of the above technical scheme, the utility model has the following advantages compared with the prior art:

[0039] The DOE optical performance testing system of the utility model can realize automatic detection of the optical diffraction efficiency of the DOE, reduces errors caused by personnel operation differences, and improves the accuracy and efficiency of the test. Under the condition that the parameters in the LabVIEW software are set consistently, it can be ensured that each test is performed under the same conditions and the same test process is repeated, thereby ensuring the comparability of the results, which is crucial for verifying the stability of the product. BRIEF DESCRIPTION OF DRAWINGS

[0040] Figure 1 FIG. 1 is a structural schematic diagram of a LabVIEW-based DOE optical performance testing system according to an embodiment of the utility model;

[0041] Figure 2 FIG. 2 is an automatic test flowchart of the LabVIEW-based DOE optical performance testing system according to the embodiment 1 of the utility model,

[0042] wherein,Figure 1 In the specific implementation, the wavelength tunable laser is 11, the neutral density filter is 12, the one-dimensional motorized displacement stage is 13, the beam splitter is 14, the first photodetector is 21, the first digital source meter is 22, the DOE is 31, the three-dimensional motorized displacement stage is 32, the second photodetector is 33, the second digital source meter is 34, and the processor is 4. DETAILED DESCRIPTION

[0043] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the protection scope of the utility model.

[0044] Embodiment 1

[0045] The embodiment provides a DOE optical performance test system based on LabVIEW, as shown in the figure, which comprises a laser light source driving module, a light source power detection module, a DOE power detection module and a LabVIEW software platform. Figure 1 The laser light source driving module comprises a wavelength tunable laser 11, a neutral density filter 12, a one-dimensional motorized displacement stage 13 and a beam splitter 14.

[0046] Specifically, the laser light source driving module comprises a wavelength tunable laser 11, a neutral density filter 12, a one-dimensional motorized displacement stage 13 and a beam splitter 14.

[0047] Specifically, the light source power detection module comprises a first photodetector 21 and a first digital source meter 22.

[0048] Specifically, the DOE power detection module comprises a DOE 31, a three-dimensional motorized displacement table 32, a second photodetector 33 and a second digital source table 34. The DOE 31 is located on the side of the transmission surface of the beam splitter 14, and the transmitted light from the beam splitter 14 is the incident light of the DOE 31. The second photodetector 33 is arranged on the three-dimensional motorized displacement table 32, and the receiving end of the second photodetector 33 faces the DOE 31. The three-dimensional motorized displacement table 32 is used to adjust the position of the second photodetector 33 to realize the detection of different diffraction spots. The output end of the second photodetector 33 is connected with the input end of the second digital source table 34, and the second digital source table 34 is used to convert the optical power detected by the second photodetector 33 into a voltage value output.

[0049] Specifically, the LabVIEW software platform comprises a processor 4 storing LabVIEW software. The processor 4 is connected with the one-dimensional motorized displacement table 13, the three-dimensional motorized displacement table 32, the first digital source table 22 and the second digital source table 34, respectively. The processor 4 is configured to receive the data output by the first digital source table 22 and the second digital source table 34, and is used to run corresponding automatic control programs and data processing programs. The movement of the one-dimensional motorized displacement table 13 and the three-dimensional motorized displacement table 32 and the wavelength of the laser emitted by the wavelength tunable laser 11 are realized by running the corresponding automatic control programs. The data processing program is used to process the data from the first digital source table 22 and the second digital source table 34 to obtain the optical diffraction efficiency of the DOE 31. When the test system of the embodiment is built, the wavelength tunable laser 11, the neutral density filter 12, the beam splitter 14, the DOE 31 and the second photodetector 33 are on the same optical axis. The connection line of the first photodetector 21 and the beam splitter 14 is perpendicular to the connection line of the second photodetector 33 and the beam splitter 14. The second photodetector 33 is installed at the center position of the three-dimensional motorized displacement table 32.

[0050] In the embodiment, the wavelength tunable laser 11 can provide stable laser beams of different wavelengths to measure the diffraction efficiency of the DOE 31 at different wavelengths, and the wavelength coverage range is 380-1064 nm. The neutral density filter 12 cooperates with the use of the one-dimensional motorized displacement stage 13 to adjust the power of the laser, so that the power of the incident light of the DOE 31 meets the requirements of the DOE 31 and the detection range of the photodetector, thereby the power requirement of the laser source is lower, and the DOE 31 diffraction efficiency test under different laser energies can be realized. In the embodiment, the power of the laser source of the wavelength tunable laser 11 selected is 100 mW, and the neutral density filter 12 selected is a gradual neutral density filter 12, and the OD value is OD0.1-OD4. In the embodiment, the splitting ratio of the beam splitter 14 is 50%, and the beam splitter 14 splits the laser beam into reflected light and transmitted light with equal energy. The transmitted light is used as the incident light of the DOE 31, which can be called a test beam. By monitoring the optical power of the reflected light in real time, the incident light power of the DOE 31 can be obtained in real time, so the reflected light can be called a monitoring beam, which reflects the optical power of the incident light of the DOE 31, thereby avoiding the test error caused by the fluctuation of the laser energy.

[0051] In the embodiment, the first photodetector 21 and the second photodetector 33 are gain-adjustable photodetectors, and the sensitivities are ≥0.1 A / W, respectively. The gain-adjustable range is 0-70 dB, and the first digital source meter 22 and the second digital source meter 34 are six-bit half digital source meters, and the measurement errors are ≤0.005%, respectively, which is suitable for high dynamic range detection from low light intensity to high light intensity. In the embodiment, the one-dimensional motorized displacement stage 13, the three-dimensional motorized displacement stage 32, the first digital source meter 22 and the second digital source meter 34 are connected with the processor 4 through data lines. In the embodiment, the processor 4 is a computer, and the wavelength tunable laser 11 is connected with the computer through Ethernet. The digital source meter is connected with the computer through a GPIB line and a GPIB card, and the LabVIEW program reads the detected original optical power data in real time.

[0052] The DOE optical performance test system based on the embodiment and the DOE optical performance test method include the following steps:

[0053] (1) Build the above-mentioned DOE optical performance test system;

[0054] (2) Write corresponding automatic control program and data processing program in LabVIEW software;

[0055] (3) Turn on the wavelength tunable laser 11, and set the laser wavelength in the software matched with the wavelength tunable laser 11;

[0056] (4) Set the file storage path, the coordinates of the one-dimensional motorized displacement stage 13 and the coordinates of the three-dimensional motorized displacement stage 32 in the LabVIEW software;

[0057] (5) Run the LabVIEW software, and make the one-dimensional motorized displacement stage 13 move to the set coordinate position through the corresponding automatic control program, so that the laser light source passes through the position corresponding to the required OD value on the neutral density filter or the gradient neutral density filter with the required OD value;

[0058] (6) Move the three-dimensional motorized displacement stage 32 to the set position through the corresponding automatic control program, so that the second photodetector 33 is aligned with the diffraction spot to be tested. The laser light source light beam emitted by the wavelength tunable laser 11 is divided into a monitoring light beam (reflected light) and a detection light beam (transmitted light) through the beam splitter 14 after the light power is adjusted through the neutral density filter. The monitoring light beam is detected by the first photodetector 21, and the light power of the first photodetector 21 is converted into a voltage value by the first digital source meter 22 and then transmitted to the LabVIEW software; the detection light beam is diffracted by the DOE 31 to form a diffraction spot, which is detected by the second photodetector 33. The light power of the second photodetector 33 is converted into a voltage value by the second digital source meter 34 and then transmitted to the LabVIEW software;

[0059] (7) The voltage values from the first digital source meter 22 and the second digital source meter 34 are processed by the data processing program to obtain the diffraction efficiency η of the DOE 31:

[0060]

[0061] (8) The voltage value raw data from the first digital source meter 22 is recorded as the laser power, the voltage value raw data from the second digital source meter 34 is recorded as the DOE 31 power, and the data processed by the data processing program is recorded as the diffraction efficiency, which are saved to the target path respectively.

[0062] If the diffraction efficiencies of multiple different diffraction spots need to be tested, only the coordinate set of the three-dimensional motorized displacement stage 32 or the moving direction and distance of the three-dimensional motorized displacement stage 32 need to be input in step (4), and then steps (5) and (6) are repeated. After the test of the previous diffraction point is completed, the three-dimensional motorized displacement stage 32 is automatically controlled by the LabVIEW software to move to the next coordinate to complete the corresponding test, and the data is processed, so as to obtain the optical diffraction efficiencies of different diffraction orders of the DOE 31 and the sum of the optical diffraction efficiencies of different diffraction orders, i.e. the optical diffraction efficiency of the DOE 31. The optical diffraction efficiency η' of different diffraction orders:

[0063]

[0064] The voltage value raw data (laser power and DOE power) and data processing results (diffraction efficiency) are displayed on the human-computer interaction interface.

[0065] Embodiment 2

[0066] This embodiment provides a single-point diffraction efficiency test method for the known position of the DOE by using the DOE optical performance test system of embodiment 1, and the steps are as follows:

[0067] (1) Build the DOE optical performance test system according to embodiment 1;

[0068] (2) Write the corresponding automatic control program and data processing program in the LabVIEW software;

[0069] (3) Turn on the wavelength tunable laser 11 and set the laser wavelength to 940 nm;

[0070] (4) Set the file storage path in the control panel of the human-computer interaction interface of the host computer LabVIEW software platform, select the test mode as single-point test, and set the coordinates of the one-dimensional electric displacement table 13 and the three-dimensional electric displacement table 32, wherein the coordinates of the one-dimensional electric displacement table 13 are set as follows: taking the leftmost movement starting point of the one-dimensional electric displacement table 13 as the origin x=0, determining the accurate movement distance that can make the neutral density filter 12 adjust the light power of the light source to the required range of DOE test by manual or other means, and inputting the movement distance, in this embodiment, the one-dimensional electric displacement table moves to the coordinate x=5mm corresponding to OD0.5; the coordinates of the three-dimensional electric displacement table 32 are set as follows: taking the initialization position of the three-dimensional electric displacement table 32 as the origin (0, 0, 0), and finding the maximum value of light intensity by moving the three-dimensional displacement table in advance, at this time, the probe of the second photodetector 33 is aligned with the diffraction spot of the DOE 31, and the coordinates x, y, z are confirmed; in this embodiment, the accurate coordinates input are (2mm, 3mm, 5mm);

[0071] (5) Run the automatic control program in the host computer LabVIEW software platform, and the LabVIEW program sends instructions to the one-dimensional electric displacement table 13 through the network cable, and the one-dimensional electric displacement table 13 moves to the set position after receiving the instructions;

[0072] (6) The LabVIEW program sends instructions to the three-dimensional electric displacement table 32 through the network cable, and the three-dimensional electric displacement table 32 moves to the accurate coordinates (2mm, 3mm, 5mm) after receiving the instructions;

[0073] (7) LabVIEW program reads the voltage value of the first digital source table 22 and the voltage value of the second digital source table 34 through GPIB, and processes the voltage value from the first digital source table 22 and the second digital source table 34 through the data processing program to obtain the optical diffraction efficiency η of the DOE 31:

[0074]

[0075] (8) The voltage value raw data from the first digital source table 22 is recorded as laser power, the voltage value raw data from the second digital source table 34 is recorded as DOE power, and the data processed by the data processing program is recorded as diffraction efficiency, which are saved to the target path and displayed on the human-computer interaction interface, respectively.

[0076] The test results of the embodiment are shown in Table 1.

[0077] Table 1

[0078]

[0079] Example 3

[0080] The embodiment provides a multi-point diffraction efficiency test method with fixed intervals for known positions of the DOE by using the DOE optical performance test system of Example 1. The steps of self-operation of the system are as follows:

[0081] (1) The DOE optical performance test system is built according to Example 1;

[0082] (2) The corresponding automatic control program and data processing program are written in the LabVIEW software;

[0083] (3) The wavelength tunable laser 11 is turned on, and the laser wavelength is set to 940 nm;

[0084] (4) The file storage path is set, the test mode is selected as fixed interval test, and the coordinates of the one-dimensional electric displacement table 13 and the coordinates of the three-dimensional electric displacement table 32 are set in the control panel of the human-computer interaction interface of the LabVIEW software platform of the upper computer, wherein the coordinates of the one-dimensional electric displacement table 13 are set as in Example 1, the coordinates of the three-dimensional electric displacement table 32 are set as the position of the probe of the second photodetector 33 aligning with one point of the DOE 31 diffraction array, the test range and test interval of the three-dimensional electric displacement table 32 x, y, z are set, and in this embodiment, the x-axis test interval is set to 10 mm, the x-axis range is set to 40 mm, and the y-axis and z-axis ranges are set to 0;

[0085] (5) running the automatic control program in the host computer LabVIEW software platform, the LabVIEW program sends instructions to the one-dimensional electric displacement table 13 through the network cable, and the one-dimensional electric displacement table 13 moves to the set position after receiving the instructions;

[0086] (6) The LabVIEW program calculates the coordinate combination of x, y, and z according to the test range and test interval of the three-dimensional electric displacement table 32x, y, and z. After the LabVIEW program reads the first coordinate position, it sends instructions to the three-dimensional electric displacement table 32 through the network cable, and the three-dimensional electric displacement table 32 moves to the set coordinates of x, y, and z after receiving the instructions;

[0087] (7) The LabVIEW program reads the voltage values of the first digital source table 22 and the second digital source table 34 through GPIB, and processes the voltage values from the first digital source table 22 and the second digital source table 34 to obtain the optical diffraction efficiency η' of one of the diffraction orders of the DOE 31 through the data processing program:

[0088]

[0089] (8) The voltage value raw data from the first digital source table 22 is recorded as the laser power, the voltage value raw data from the second digital source table 34 is recorded as the DOE power, and the data processed by the data processing program is recorded as the diffraction efficiency η', which are saved to the target path respectively;

[0090] (9) After completing a test, the LabVIEW program continues to read the next coordinate position of the three-dimensional electric displacement table 32, sends instructions to the three-dimensional electric displacement table 32 through the network cable, and the three-dimensional electric displacement table 32 can automatically move to the next position for testing. This cycle continues until the entire test is completed, obtaining the optical diffraction efficiency η' of different diffraction orders, and the sum of the optical diffraction efficiencies of different diffraction orders (η) is obtained through the data processing program. The LabVIEW program automatically stores the data in the form of a table and saves it in the target path, completing the automated testing of the optical diffraction efficiency of the DOE 31. The test results of this embodiment are shown in Table 2.

[0091] Table 2

[0092]

[0093] Example 4

[0094] This embodiment provides a method for testing the multi-point diffraction efficiency of a known position of a DOE using the DOE optical performance test system of Example 1. The steps of the system running itself are as follows:

[0095] (1) Build the DOE optical performance test system according to Example 1;

[0096] (2) Write the corresponding automatic control program and data processing program in LabVIEW software;

[0097] (3) Turn on the wavelength tunable laser 11, and set the laser wavelength to 940 nm;

[0098] (4) In the control panel of the human-computer interaction interface of the LabVIEW software platform of the host computer, set the file storage path, select the test mode as fixed interval test, and set the coordinates of the one-dimensional electric displacement table 13 and the coordinates of the three-dimensional electric displacement table 32. The coordinates of the one-dimensional electric displacement table 13 are set as in Example 1, and the test mode is set as user-defined. The user can create an excel table in advance, and input the x, y, z coordinate combinations of each diffraction point with the initial position of the three-dimensional electric displacement table 32 as the origin. The coordinate combinations set in this embodiment are shown in Table 3. Then, input the excel file in the LabVIEW program;

[0099] (5) Run the automatic control program in the LabVIEW software platform of the host computer. The LabVIEW program sends instructions to the one-dimensional electric displacement table 13 through the network cable. After receiving the instructions, the one-dimensional electric displacement table 13 moves to the set position;

[0100] (6) The LabVIEW program reads the x, y, z coordinate combinations in the excel file, and then reads the first coordinate position. After reading the first coordinate position, the LabVIEW program sends instructions to the three-dimensional electric displacement table 32 through the network cable. After receiving the instructions, the three-dimensional electric displacement table 32 moves to the set position;

[0101] (7) The LabVIEW program reads the voltage values of the first digital source table 22 and the second digital source table 34 through GPIB, and processes the voltage values from the first digital source table 22 and the second digital source table 34 through the data processing program to obtain the optical diffraction efficiency η' of one of the diffraction orders of the DOE 31:

[0102]

[0103] (8) Record the voltage value raw data from the first digital source table 22 as laser power, record the voltage value raw data from the second digital source table 34 as DOE power, and record the data processed by the data processing program as diffraction efficiency η', and save them to the target path respectively;

[0104] (9) When one test is completed, the LabVIEW program continues to read the next coordinate position of the three-dimensional electric displacement table 32, sends the instruction to the three-dimensional electric displacement table 32 through the network cable, and the three-dimensional electric displacement table 32 can automatically move to the next position for testing, and so on until the whole test is completed, the optical diffraction efficiency η' of different diffraction orders is obtained, the sum (η) of the optical diffraction efficiency of different diffraction orders is obtained through the data processing program, the LabVIEW program automatically stores the data in the form of a table and saves it in the target path, the automation test of the diffraction efficiency of the DOE 31 is completed, and the test results of the embodiment are shown in Table 3.

[0105] Table 3

[0106]

[0107]

[0108] Examples 2-4 use single-point and multi-point diffraction to detect the optical diffraction efficiency of the same DOE, and the detection results are consistent, wherein the multi-point diffraction detection results of Example 3 and Example 4 only differ by 0.05%.

[0109] The above examples realize the automation test of the optical diffraction efficiency of the DOE, improve the accuracy and efficiency of the test, and ensure the comparability of the results.

[0110] The above examples only illustrate the technical concept and characteristics of the present application, and the purpose is to enable those skilled in the art to understand the content of the present application and implement it, and cannot limit the protection scope of the present application. Any equivalent changes or modifications made according to the spirit and essence of the present application should be covered within the protection scope of the present application.

Claims

1. A LabVIEW-based DOE optical performance test system, characterized in that, It comprises: a laser light source driving module comprising a wavelength tunable laser, a neutral density filter, a one-dimensional motorized displacement stage and a beam splitter, the neutral density filter and the one-dimensional motorized displacement stage being located between the wavelength tunable laser and the beam splitter, and the neutral density filter being arranged on the one-dimensional motorized displacement stage; a light source power detection module comprising a first photodetector and a first digital source meter, the receiving end of the first photodetector facing the reflecting surface of the beam splitter, and the first digital source meter being connected with the first photodetector; a DOE power detection module comprising a DOE, a three-dimensional motorized displacement stage, a second photodetector and a second digital source meter, the DOE being located on the side of the transmitting surface of the beam splitter, the second photodetector being arranged on the three-dimensional motorized displacement stage, the receiving end of the second photodetector facing the DOE, and the second digital source meter being connected with the second photodetector; a LabVIEW software platform for controlling the movement of the one-dimensional motorized displacement stage and the three-dimensional motorized displacement stage, and for processing the data from the first digital source meter and the second digital source meter to obtain the optical diffraction efficiency of the DOE.

2. The DOE optical performance testing system of claim 1, wherein, The connection line of the first photodetector and the beam splitter is perpendicular to the connection line of the second photodetector and the beam splitter, and the wavelength tunable laser, the neutral density filter, the beam splitter, the DOE and the second photodetector are on the same optical axis.

3. The DOE optical performance testing system of claim 1, wherein, The first photodetector is used for detecting the optical power of the reflected light from the beam splitter, the first digital source meter is used for converting the optical power of the reflected light into a voltage value output, the second photodetector is used for detecting the optical power of the diffracted light from the DOE, and the second digital source meter is used for converting the optical power of the diffracted light into a voltage value output.

4. The DOE optical performance testing system of claim 1, wherein, The output end of the first photodetector is connected with the input end of the first digital source meter, and the output end of the second photodetector is connected with the input end of the second digital source meter.

5. The DOE optical performance testing system of claim 1, wherein, The LabVIEW software platform comprises a processor storing LabVIEW software, the one-dimensional motorized displacement stage, the three-dimensional motorized displacement stage, the first digital source meter and the second digital source meter are respectively connected with the processor, the processor is configured to receive the data output by the first digital source meter and the second digital source meter, and is used for running an automatic control program and a data processing program, the movement of the one-dimensional motorized displacement stage and the three-dimensional motorized displacement stage is realized by running the corresponding automatic control program, and the optical diffraction efficiency of the DOE is obtained by processing the data from the first digital source meter and the second digital source meter through the data processing program.

6. The DOE optical performance testing system of claim 1, wherein, The light source wavelength of the wavelength tunable laser is 380-1064 nm.

7. The DOE optical performance testing system of claim 1, wherein, The neutral density filter is a gradual neutral density filter or a series of neutral density filters with different OD values. And / or, the OD value of the neutral density filter is OD0.1-OD4.

8. The DOE optical performance testing system of claim 5, wherein, The one-dimensional motorized displacement stage, the three-dimensional motorized displacement stage, the first digital source table and the second digital source table are connected with the processor through data lines respectively, and the wavelength tunable laser is connected with the processor through Ethernet.

9. The DOE optical performance testing system of claim 1, wherein, The first photodetector and the second photodetector are gain-adjustable photodetectors, the sensitivity of the first photodetector and the second photodetector is greater than or equal to 0.1 A / W respectively, and the gain-adjustable range is 0-70 dB.

10. The DOE optical performance testing system of claim 1, wherein, The first digital source table and the second digital source table are six-bit half digital source tables respectively. And / or, the measurement error of the first digital source table and the second digital source table is less than or equal to 0.005% respectively.

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