Secondary inflation film repressing device of vacuum film pressing machine

Abstract

The utility model discloses a secondary air inflation and film re-pressing device of a vacuum film pressing machine, a lower pressing table and an upper pressing table of the vacuum film pressing machine are closed to form a sealing cavity, and the sealing cavity is composed of an upper pressing table cavity and a lower pressing table cavity; the vacuumizing pipeline of the lower pressing table cavity is formed by sequentially connecting a lower pressing table vacuum pipe, a lower vacuum partition electromagnetic valve, a vacuum pipe and an electromagnetic valve. The secondary inflation and film re-pressing device comprises a pressure increasing valve, an exhaust pipe, a lower exhaust electromagnetic valve, a three-way connector I, a three-way connector II, an air pipe and a lower pressure increasing electromagnetic valve. According to the utility model, the vacuumizing pipeline is used as an inflating and pressurizing pipeline, and the pressurizing valve is used for increasing the pressure of the inflated gas to the required pressure, so that the secondary inflating and secondary film pressing effects of the cavity of the lower pressing table are realized, the undesirable phenomena of non-uniform filling, bubble generation and the like in the pressing process are effectively overcome, and the smooth proceeding of the subsequent process is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to photoresist dry film production technical field especially relates to a film surface compression device under vacuum state. BACKGROUND

[0002] In the circuit board production industry, with the development of electronic technology, the circuit line of electronic circuit and chip circuit is more and more fine (micron level, even nanometer level line), and the gap between copper lines is also smaller and smaller. In addition, for the production of chips, various functional films (such as anti-soldering film, insulating film, etc.) attached to the surface need to be tightly attached to the gap between the copper lines through the film pressing process.

[0003] After the upper and lower compression tables of the vacuum film press machine are closed to form a sealed cavity, the upper cavity is inflated and pressurized under the conditions of vacuum and heating, so that the air bag expands and generates high compression force to press the dry film on the carrier plate. However, due to the influence of the air bag itself and the process, uneven filling and air bubbles may occur during the pressing process, affecting the smooth progress of the subsequent process. SUMMARY

[0004] The utility model discloses a vacuum film press machine secondary inflation and re-pressing film device, which increases the secondary inflation and pressurization process of the lower cavity, increases the pressure and temperature in the cavity, and makes the activity of dry film molecules more active and the pressing reaction more complete, thereby effectively improving the adhesion of the dry film and the carrier plate.

[0005] The utility model discloses a vacuum film press machine secondary inflation and re-pressing film device, which increases the secondary inflation and pressurization process of the lower cavity, increases the pressure and temperature in the cavity, and makes the activity of dry film molecules more active and the pressing reaction more complete, thereby effectively improving the adhesion of the dry film and the carrier plate.

[0006] The utility model provides a kind of vacuum film press machine secondary inflation and re-pressing film device, the lower compression table and upper compression table of the vacuum film press machine are closed to form a sealed cavity, the sealed cavity is made of upper compression table cavity, lower compression table cavity;The vacuum pipeline of lower compression table cavity is sequentially connected by lower compression table vacuum pipe, lower vacuum cutoff solenoid valve, vacuum pipe, solenoid valve and is constituted;The secondary inflation and re-pressing film device includes booster valve, exhaust pipe, lower exhaust solenoid valve, tee joint I, tee joint II, gas pipe, lower pressurization solenoid valve;Lower compression table vacuum pipe is connected to tee joint I, and the other two ends of tee joint I are connected lower vacuum cutoff solenoid valve, tee joint II respectively;The other two ends of tee joint II are connected lower pressurization solenoid valve, lower exhaust solenoid valve respectively, and lower pressurization solenoid valve, lower exhaust solenoid valve are respectively connected with gas pipe, exhaust pipe;Booster valve is connected with gas pipe.

[0007] The utility model has the following beneficial effects:

[0008] This invention utilizes a vacuum pipeline as an inflation and pressurization pipeline, and uses a solenoid valve to control the opening and closing of the inflation pipeline. A booster valve is used to increase the pressure of the injected gas to the required pressure, thereby achieving secondary inflation and secondary molding of the lower pressing stage cavity. This optimizes the molding process, effectively overcomes defects such as uneven filling and air bubbles during the pressing process, significantly improves the yield of the pressing plate, and facilitates the smooth progress of subsequent manufacturing processes. Attached Figure Description

[0009] The present invention will now be described in further detail with reference to the embodiments and accompanying drawings:

[0010] Figure 1 This is a structural schematic diagram of an embodiment of the present utility model;

[0011] Figure 2 This is a technical schematic diagram of an embodiment of the present utility model.

[0012] In the diagram: Lower pressure assembly 1, Upper pressure assembly 2, Sealing cavity 3, Upper pressure assembly cavity 3a, Lower pressure assembly cavity 3b, Lower pipe port 4, Upper pipe port 5, Pressure boosting valve 6, Exhaust pipe 7, Lower exhaust solenoid valve 8, T-connector I 9', T-connector II 9, Air pipe 10, Lower pressurizing solenoid valve 11, Lower vacuum isolation solenoid valve 12, Vacuum pipe 13, Solenoid valve 14, Lower pressure assembly vacuum pipe 15 Detailed Implementation

[0013] Figure 1 and Figure 2 The image shows an embodiment of a vacuum film press secondary inflation and repressing device according to the present invention.

[0014] like Figure 1 As shown, the lower pressing platform 1 and upper pressing platform 2 of the vacuum film press close to form a sealed cavity 3 (composed of the upper pressing platform cavity 3a and the lower pressing platform cavity 3b), which is the location where the film pressing operation takes place. The lower pipe port 4 and upper pipe port 5 are the connection channels between the cavity and the outside world, and also the channels for gas to enter and exit during vacuuming and pressurization operations. The lower pressing platform vacuum tube 15, the lower vacuum isolation solenoid valve 12, the vacuum tube 13, and the solenoid valve 14 of the vacuum film press are connected in sequence to form the vacuuming pipeline.

[0015] like Figure 1As shown, the secondary inflation and repressurization membrane device in this embodiment includes a booster valve 6, an exhaust pipe 7, a lower exhaust solenoid valve 8, a three-way connector I 9', a three-way connector II 9, an air pipe 10, and a lower pressurization solenoid valve 11. The lower pressurization vacuum pipe 15 is connected to the three-way connector I 9', and the other two ends of the three-way connector I 9' are respectively connected to the lower vacuum isolation solenoid valve 12 and the three-way connector II 9; the other two ends of the three-way connector II 9 are respectively connected to the lower pressurization solenoid valve 11 and the lower exhaust solenoid valve 8, and the lower pressurization solenoid valve 11 and the lower exhaust solenoid valve 8 are respectively connected to the air pipe 10 and the exhaust pipe 7; the booster valve 6 is connected to the air pipe 10.

[0016] like Figure 1 and Figure 2 As shown, when the lower pressing stage cavity 3b needs to be pressurized, the lower pressurizing solenoid valve 11 opens, and the lower exhaust solenoid valve 8 and the lower vacuum isolation solenoid valve 12 close. The gas is pressurized by the booster valve 6 and then injected into the lower pressing stage cavity 3b through the gas pipe 10, the lower pressurizing solenoid valve 11, and the lower pressing stage vacuum pipe 15 to realize the pressurization process. When the lower pressing stage cavity 3b needs to be vented, the lower pressurizing solenoid valve 11 closes, and the lower exhaust solenoid valve 8 and the lower vacuum isolation solenoid valve 12 open. The gas in the cavity is discharged through the lower pressing stage vacuum pipe 15, the lower exhaust solenoid valve 8, and the exhaust pipe 7 to realize the venting process. When the lower pressing stage cavity 3b needs to be evacuated, the lower pressurizing solenoid valve 11 and the lower exhaust solenoid valve 8 close, and the lower vacuum isolation solenoid valve 12 and the lower pressing stage vacuum valve 14 open. The gas in the cavity is discharged through the lower pressing stage vacuum pipe 15, the lower vacuum isolation solenoid valve 12, the vacuum pipe 13, and the lower pressing stage vacuum valve 14 to realize the evacuation process.

Claims

1. A vacuum film press secondary inflation and repressing device, wherein the lower pressing platform (1) and upper pressing platform (2) of the vacuum film press are closed to form a sealed cavity (3), the sealed cavity (3) being composed of an upper pressing platform cavity (3a) and a lower pressing platform cavity (3b); the vacuum tube of the lower pressing platform cavity (3b) is composed of a lower pressing platform vacuum tube (15), a lower vacuum isolation solenoid valve (12), a vacuum tube (13), and a solenoid valve (14) connected in sequence; characterized in that: The secondary inflation and repressurization membrane device includes a booster valve (6), an exhaust pipe (7), a lower exhaust solenoid valve (8), a three-way connector I (9'), a three-way connector II (9), an air pipe (10), and a lower pressurization solenoid valve (11). The lower pressurization vacuum pipe (15) is connected to the three-way connector I (9'), and the other two ends of the three-way connector I (9') are respectively connected to the lower vacuum isolation solenoid valve (12) and the three-way connector II (9). The other two ends of the three-way connector II (9) are respectively connected to the lower pressurization solenoid valve (11) and the lower exhaust solenoid valve (8). The lower pressurization solenoid valve (11) and the lower exhaust solenoid valve (8) are respectively connected to the air pipe (10) and the exhaust pipe (7). The booster valve (6) is connected to the air pipe (10).

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