Fixing jig and laser processing equipment

Abstract

The utility model discloses a fixing jig and discloses a laser processing device with the fixing jig, the fixing jig comprises an adsorption assembly, an air nozzle and a plurality of supporting parts, the adsorption assembly is used for supporting a product, an adsorption hole is formed in the top of the adsorption assembly, and the adsorption assembly adsorbs and fixes the product through the adsorption hole; the air tap is arranged on the cavity part and is used for introducing negative pressure into the adsorption hole; the multiple supporting parts are used for supporting different positions of the bottom of the cavity part correspondingly, and the supporting heights of the cavity part can be adjusted correspondingly so as to adjust the inclination degree of the supporting face of the cavity part. According to the fixing jig, the machining parallelism of a product can be adjusted, and the machining precision of the product can be guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of laser processing, particularly relates to a fixing jig and laser processing equipment. BACKGROUND

[0002] In the laser processing of semiconductor glass, the product often needs to be fixed to prevent displacement during processing and cause poor processing of the product.

[0003] In the related art, an adsorption jig is generally used to adsorb and fix the product, and the conventional adsorption jig is integrally formed.

[0004] However, the conventional adsorption jig is difficult to adjust the processing parallelism of the product, which is not conducive to ensuring the processing precision of the product. SUMMARY

[0005] The utility model aims at at least one of the technical problems existing in the prior art. To this end, the utility model provides a fixing jig which can adjust the processing parallelism of the product and is conducive to ensuring the processing precision of the product.

[0006] The utility model further provides laser processing equipment with the fixing jig.

[0007] According to the fixing jig of the first aspect of the utility model, the fixing jig comprises:

[0008] An adsorption assembly is used to support the product, and the top of the adsorption assembly is formed with an adsorption hole, and the adsorption assembly adsorbs and fixes the product through the adsorption hole;

[0009] An air nozzle is arranged on the adsorption assembly and used to introduce negative pressure into the adsorption hole;

[0010] A plurality of support components are respectively used to support different positions of the bottom of the adsorption assembly, and can respectively adjust the support height of the adsorption assembly to adjust the inclination of the support surface of the adsorption assembly.

[0011] According to the fixing jig of the utility model, at least the following beneficial effects are achieved:

[0012] 1. The utility model discloses an adsorption assembly and an air nozzle, the adsorption assembly is used to support the product, the top of the adsorption assembly is formed with an adsorption hole, the adsorption assembly adsorbs and fixes the product through the adsorption hole, the air nozzle is arranged on the adsorption assembly and used to introduce negative pressure into the adsorption hole, so that the adsorption assembly can adsorb and fix the product through the adsorption hole by using the negative pressure introduced by the air nozzle, the product can be stably fixed on the adsorption assembly, and then the fixing jig is convenient for fixing the product.

[0013] 2. The utility model discloses a set of support components, a plurality of support components are used for supporting the different positions of the bottom of adsorption assembly respectively, can adjust the support height of each support component to the adsorption assembly respectively to adjust the inclination of the support surface of adsorption assembly, can understand, by adjusting the support height of each support component to the adsorption assembly respectively, can adjust the height of different positions of the bottom of adsorption assembly respectively, thereby, adjust the inclination of the support surface of adsorption assembly, further, adjust the processing parallelism of the product fixed on the adsorption assembly, realized the function of product parallelism adjustment, is favorable to guarantee the processing accuracy of product.

[0014] According to some embodiments of the utility model, the support component is provided with at least four, and the at least four support components are distributed in a rectangular shape on the adsorption assembly.

[0015] Beneficially, the utility model discloses at least four support components, and the at least four support components are distributed in a rectangular shape on the adsorption assembly, can understand that four support components can adjust the height of four different positions of the adsorption assembly, and the inclination of the support surface of adsorption assembly is adjusted more flexibly through the cooperation of four support components.

[0016] According to some embodiments of the utility model, the support component is set as a jackscrew.

[0017] Beneficially, the utility model discloses that the support component is set as a jackscrew, so that the support height of the support component to the adsorption assembly can be quickly adjusted by screwing the jackscrew, and the adjustment efficiency of the support component is improved.

[0018] According to some embodiments of the utility model, the adsorption assembly comprises a cavity component and an adsorption plate, the adsorption plate is detachably fixed on the top surface of the cavity component, and the adsorption hole is formed in the adsorption plate.

[0019] Beneficially, the utility model discloses that the adsorption assembly comprises a cavity component and an adsorption plate, the adsorption plate is detachably fixed on the top surface of the cavity component, and the adsorption hole is formed in the adsorption plate, can understand that the requirement of contact surface is higher during the laser processing of semiconductor glass, and different semiconductor glass processing products have different requirements for the material of contact surface, the adsorption plate is detachably fixed on the top surface of the cavity component, so that different materials of the adsorption plate can be quickly replaced to meet the processing requirements, thereby reducing the jig cost.

[0020] According to some embodiments of the utility model, a first screw for connecting and fixing is arranged between the adsorption plate and the cavity component.

[0021] Beneficially, the utility model discloses that the first screw for connecting and fixing is arranged between the adsorption plate and the cavity component, so that the adsorption plate and the cavity component can be conveniently disassembled and mounted and fixed.

[0022] According to some embodiments of the present application, the adsorption plate comprises a meander plate body and a center plate body, the center plate body is embedded in the inner side of the meander plate body, and the adsorption hole is formed in the center plate body.

[0023] Beneficially, the present application comprises a meander plate body and a center plate body, the center plate body is embedded in the inner side of the meander plate body, and the adsorption hole is formed in the center plate body, so that the meander plate body and the center plate body can be detached, on the one hand, by reducing the area of the component with the adsorption hole, the processing and manufacturing of the adsorption hole can be facilitated, on the other hand, when the adsorption hole is damaged, the center plate body can be detached and replaced, which is beneficial to reduce the cost of the fixture.

[0024] According to some embodiments of the present application, a sealing strip is arranged between the meander plate body and the center plate body, and the sealing strip is used to seal the gap between the meander plate body and the center plate body.

[0025] Beneficially, the present application comprises a meander plate body and a center plate body, the center plate body is embedded in the inner side of the meander plate body, and the adsorption hole is formed in the center plate body, so that the meander plate body and the center plate body can be detached, on the one hand, by reducing the area of the component with the adsorption hole, the processing and manufacturing of the adsorption hole can be facilitated, on the other hand, when the adsorption hole is damaged, the center plate body can be detached and replaced, which is beneficial to reduce the cost of the fixture.

[0026] According to some embodiments of the present application, the adsorption hole is provided with a plurality of adsorption holes, and the plurality of adsorption holes are distributed in multiple rows on the adsorption assembly.

[0027] Beneficially, the present application comprises a meander plate body and a center plate body, the center plate body is embedded in the inner side of the meander plate body, and the adsorption hole is formed in the center plate body, so that the meander plate body and the center plate body can be detached, on the one hand, by reducing the area of the component with the adsorption hole, the processing and manufacturing of the adsorption hole can be facilitated, on the other hand, when the adsorption hole is damaged, the center plate body can be detached and replaced, which is beneficial to reduce the cost of the fixture.

[0028] According to some embodiments of the present application, a blocking strip is arranged on the adsorption assembly, and the blocking strip is used for positioning the product.

[0029] Beneficially, the present application comprises a meander plate body and a center plate body, the center plate body is embedded in the inner side of the meander plate body, and the adsorption hole is formed in the center plate body, so that the meander plate body and the center plate body can be detached, on the one hand, by reducing the area of the component with the adsorption hole, the processing and manufacturing of the adsorption hole can be facilitated, on the other hand, when the adsorption hole is damaged, the center plate body can be detached and replaced, which is beneficial to reduce the cost of the fixture.

[0030] According to some embodiments of the present application, the blocking strip is provided with at least two blocking strips, and the at least two blocking strips are respectively abutted and positioned with adjacent two sides of the product.

[0031] Beneficially: the utility model discloses at least two blocking strips are set, and the blocking strip of at least two is respectively with the abutment positioning of adjacent two sides of product, thereby, two blocking strips can be positioned to product from two directions respectively, and further, the positioning of product by the fixture is more accurate.

[0032] The laser processing equipment according to the second aspect of the utility model comprises a fixture according to the first aspect of the utility model, and the fixture is used for fixing electronic material processed by the laser processing equipment.

[0033] The laser processing equipment according to the utility model has at least the following beneficial effects:

[0034] 1. The utility model discloses a fixing jig is provided with adsorption assembly and air nozzle, and adsorption assembly is used for supporting electronic material, and adsorption assembly top forms adsorption hole, and adsorption assembly is adsorbed and fixed electronic material through adsorption hole, and air nozzle is arranged on adsorption assembly and is used for importing negative pressure to adsorption hole, so that adsorption assembly can utilize the negative pressure imported by air nozzle and be adsorbed and fixed electronic material through adsorption hole, so that electronic material can be stably fixed on adsorption assembly, and further, it is convenient to fix electronic material for the fixture.

[0035] 2. The utility model discloses a fixing jig is provided with a plurality of support components, and a plurality of support components are respectively used for supporting different positions of the bottom of adsorption assembly, can respectively adjust the support height of adsorption assembly to adjust the inclination of the support surface of adsorption assembly, and it can be understood that by respectively adjusting the support height of each support component to adsorption assembly, the height of different positions of the bottom of adsorption assembly can be adjusted, so that the inclination of the support surface of adsorption assembly is adjusted, and further, the processing parallelism of electronic material fixed on adsorption assembly is adjusted, the function of electronic material parallelism adjustment is realized, and the processing precision of electronic material is facilitated to be guaranteed.

[0036] Additional aspects and advantages of the utility model will be partially given in the following description, some will become obvious from the following description, or be understood by the practice of the utility model. BRIEF DESCRIPTION OF DRAWINGS

[0037] In order to more clearly illustrate the technical scheme in the embodiments of the utility model or the prior art, the following will briefly introduce the drawings needed to be used in the embodiment or the prior art description, and obviously, the drawings in the following description are only some embodiments of the utility model, and for those skilled in the art, other drawings can be obtained according to these drawings without creating creative labor.

[0038] Figure 1 It is a structural schematic diagram of the fixture of the utility model embodiment;

[0039] Figure 2 For Figure 1 The illustrated top view.

[0040] Reference numerals: 100 - adsorption assembly, 110 - adsorption hole, 120 - air nozzle, 130 - support part, 140 - cavity part, 150 - adsorption plate, 160 - first screw, 170 - meander plate body, 180 - center plate body, 190 - sealing rubber strip, 200 - blocking strip. DETAILED DESCRIPTION

[0041] The embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary and are only used to explain the present application and cannot be understood as a limitation of the present application.

[0042] In the description of the present application, it should be understood that the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0043] In the description of the present application, the meaning of several is one or more, the meaning of multiple is two or more, greater than, less than, more than, etc. are understood as not including the number, above, below, etc. are understood as including the number. If the first and second are described, this is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the order of indicated technical features.

[0044] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting, connection and connection" should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium, or it can be connected inside two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0045] A fixing jig and a laser processing equipment according to an embodiment of the present application are described below with reference to the drawings.

[0046] The present application aims to provide an embodiment of a fixing jig and a laser processing equipment.

[0047] In the embodiment, the laser processing equipment can be a laser perforating machine, and can also be a laser welding machine, a laser cutting machine, etc., and the laser processing equipment comprises a fixing jig for fixing an electronic material processed by the laser processing equipment, wherein the electronic material can be a semiconductor glass, and more specifically, the fixing jig is for fixing a semiconductor glass processed by the laser perforating machine.

[0048] With reference to Figure 1 and Figure 2 In the embodiment, the fixing jig comprises a suction assembly 100, an air nozzle 120, and a plurality of supporting components 130.

[0049] For the suction assembly 100, the suction assembly 100 is used for supporting a product, and a top of the suction assembly 100 is formed with a suction hole 110, and the suction assembly 100 is used for suction-fixing the product through the suction hole 110.

[0050] For the air nozzle 120, the air nozzle 120 is arranged on the suction assembly 100, and the air nozzle 120 is used for introducing negative pressure into the suction hole 110.

[0051] The embodiment introduces negative pressure into the suction hole 110 through the air nozzle 120, so that the suction assembly 100 can suction-fix the product through the suction hole 110 by using the negative pressure introduced by the air nozzle 120, so that the product can be stably fixed on the suction assembly 100, and then the product can be conveniently fixed by the fixing jig.

[0052] In some specific embodiments, the suction assembly 100 comprises a cavity component 140 and a suction plate 150, the suction plate 150 is detachably fixed on a top surface of the cavity component 140, and the suction hole 110 is formed in the suction plate 150.

[0053] It can be understood that the semiconductor glass has relatively high requirements for a contact surface in a laser processing process, and different semiconductor glass processing products have different requirements for the material of the contact surface. By detachably fixing the suction plate 150 on the top surface of the cavity component 140, different materials of the suction plate 150 can be quickly replaced to meet the processing requirements, so as to reduce the cost of the jig.

[0054] Specifically, a first screw 160 is arranged between the suction plate 150 and the cavity component 140 for connecting and fixing, so as to facilitate the disassembly and installation of the suction plate 150 and the cavity component 140.

[0055] Specifically, the air nozzle 120 is communicated with the inner cavity of the cavity component 140, the adsorption plate 150 covers the inner cavity of the cavity component 140, and the adsorption hole 110 is communicated with the inner cavity of the cavity component 140, so that the air nozzle 120 can be communicated with the adsorption hole 110.

[0056] In some specific embodiments, the adsorption plate 150 comprises a meander plate body 170 and a center plate body 180, the center plate body 180 is embedded in the inner side of the meander plate body 170, and the adsorption hole 110 is formed in the center plate body 180, so that the meander plate body 170 and the center plate body 180 can be disassembled. On the one hand, by reducing the area of the component formed with the adsorption hole 110, the processing and manufacturing of the adsorption hole 110 can be facilitated. On the other hand, when the adsorption hole 110 is damaged and fails, the center plate body 180 can be disassembled and replaced, which is beneficial to reduce the cost of the fixture.

[0057] Further, a sealing rubber strip 190 is arranged between the meander plate body 170 and the center plate body 180, and the sealing rubber strip 190 is used to seal the gap between the meander plate body 170 and the center plate body 180, so as to avoid the gap between the meander plate body 170 and the center plate body 180 from leaking pressure, and further make the adsorption force of the adsorption hole 110 on the product more stable.

[0058] In some specific embodiments, the adsorption hole 110 is provided with a plurality of adsorption holes 110, and the plurality of adsorption holes 110 are distributed in multiple rows on the adsorption assembly 100, so that the plurality of adsorption holes 110 on the adsorption assembly 100 can respectively adsorb and fix the multiple positions of the product, so that the adsorption position distribution of the adsorption hole 110 on the product is more uniform, and further, the adsorption of the fixture on the product is more stable.

[0059] Specifically, in order to make the adsorption position distribution of the adsorption hole 110 on the product more uniform, the adsorption hole 110 is provided with a plurality of adsorption holes 110, and the plurality of adsorption holes 110 are arranged in a row x column arrangement mode.

[0060] Further, the diameter of the adsorption hole 110 is mm.

[0061] In some specific embodiments, the adsorption assembly 100 is provided with a blocking strip 200, and the blocking strip 200 is used to position the product, so that the fixed position of the product on the adsorption assembly 100 is more accurate, and further, the processing precision is improved.

[0062] Further, the blocking strip 200 is provided with at least two blocking strips 200, and the at least two blocking strips 200 are respectively abutted and positioned with adjacent two sides of the product, so that the two blocking strips 200 can be respectively positioned from two directions, and further, the positioning of the fixture on the product is more accurate.

[0063] Still further, the two blocking strips 200 are perpendicular to each other.

[0064] In some embodiments, the blocking strip 200 is positioned in abutment with at least two adjacent sides of the product, so that the blocking strip 200 can position the product from two directions, thereby making the positioning of the product by the fixing jig more accurate.

[0065] For the plurality of support components 130, the plurality of support components 130 are respectively used to support different positions of the bottom of the adsorption assembly 100, and the plurality of support components 130 can respectively adjust the support height of the adsorption assembly 100 to adjust the inclination of the support surface of the adsorption assembly 100.

[0066] It can be understood that by respectively adjusting the support height of each support component 130 on the adsorption assembly 100, the height of different positions of the bottom of the adsorption assembly 100 can be respectively adjusted, thereby adjusting the inclination of the support surface of the adsorption assembly 100, and further adjusting the processing parallelism of the product fixed on the adsorption assembly 100, thereby realizing the function of product parallelism adjustment and being beneficial to ensuring the processing precision of the product.

[0067] Specifically, the support component 130 is provided as a top screw, so that by screwing the top screw, the support height of the support component 130 on the adsorption assembly 100 can be quickly adjusted, thereby improving the adjustment efficiency of the support component 130.

[0068] In some specific embodiments, the support component 130 is provided at least four, and the at least four support components 130 are distributed in a rectangular shape on the adsorption assembly 100.

[0069] It can be understood that the four support components 130 can adjust the height of four different positions of the adsorption assembly 100, and the inclination of the top support surface of the adsorption assembly 100 is adjusted more flexibly through the cooperation of the four support components 130.

[0070] In some specific embodiments, in order to make the distribution position of the support component 130 on the adsorption assembly 100 more uniform, the cavity component 140 is in the shape of an H-shaped beam, and the four support components 130 are distributed at the four corners of the cavity component 140.

[0071] In the description of the present specification, the description of the terms "one embodiment, some embodiments, illustrative embodiments, examples, specific examples, or some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0072] The terms "first", "second", "third", "fourth", and the like in the description and in the claims of the present application and above drawings are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the use of these terms herein is merely for distinguishing between the objects and not necessarily for describing a particular sequential or chronological order, unless explicitly stated otherwise.

[0073] It is also to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting, unless explicitly stated as such.

[0074] Further, the terms "comprise" and "comprising" and any variations thereof are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of steps or units does not necessarily comprise only those steps or units but can include other steps or units not expressly listed or inherent to such process, method, article, or apparatus.

[0075] Also, the terms "comprise", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus. An element proceeded by "comprises a... " does not, without more constraints, exclude the presence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0076] The embodiments of the present application are described in detail above with reference to the accompanying drawings, but the present application is not limited to the above-described embodiments, and various changes can be made within the scope of knowledge of those skilled in the art without departing from the spirit of the present application.

Claims

1. A fixing fixture, characterized in that, include: An adsorption component (100) is used to support the product and has an adsorption hole (110) formed on the top. The adsorption component (100) adsorbs and fixes the product through the adsorption hole (110). An air nozzle (120) is provided on the adsorption assembly (100) for introducing negative pressure into the adsorption hole (110); Several support components (130) are used to support different positions at the bottom of the adsorption component (100), and can adjust the support height of the adsorption component (100) to adjust the inclination of the support surface of the adsorption component (100).

2. The fixing fixture according to claim 1, characterized in that, At least four support components (130) are provided, and the at least four support components (130) are rectangularly distributed on the adsorption assembly (100).

3. A fixing fixture according to claim 1, characterized in that, The support component (130) is configured as a set screw.

4. A fixing fixture according to claim 1, characterized in that, The adsorption assembly (100) includes a cavity component (140) and an adsorption plate (150). The adsorption plate (150) is detachably fixed to the top surface of the cavity component (140), and the adsorption holes (110) are formed on the adsorption plate (150).

5. A fixing fixture according to claim 4, characterized in that, A first screw (160) for connection and fixation is provided between the cavity component (140) and the adsorption plate (150).

6. A fixing fixture according to claim 4, characterized in that, The adsorption plate (150) includes a U-shaped plate (170) and a central plate (180), the central plate (180) being fitted inside the U-shaped plate (170), and the adsorption holes (110) being formed in the central plate (180).

7. A fixing fixture according to claim 6, characterized in that, A sealing strip (190) is provided between the herringbone plate (170) and the center plate (180), and the sealing strip (190) is used to seal the gap between the herringbone plate (170) and the center plate (180).

8. A fixing fixture according to claim 1, characterized in that, The adsorption pores (110) are provided in a plurality of rows on the adsorption assembly (100).

9. A fixing fixture according to claim 1, characterized in that, The adsorption component (100) is provided with a baffle (200) for positioning the product.

10. Laser processing equipment, characterized in that, The invention includes a fixture as described in any one of claims 1 to 9, the fixture being used to fix electronic materials processed by the laser processing equipment.

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