Wafer heating disc lifting structure

Abstract

The utility model provides a wafer heating disc elevating structure, comprising a heating disc clamp, a clamp installation structure, an elevating transmission structure, a motor installation structure and a driving motor, the clamp installation structure comprises a guide rail substrate and a guide rail, and the guide rail is provided with a slide block; the lifting transmission structure comprises a lead screw assembly and a belt assembly, the lead screw assembly comprises a lead screw and a lead screw nut, the lead screw nut is connected with the heating disc clamp and the sliding block, and the bottom end of the lead screw is connected with the belt assembly; the motor mounting structure comprises a motor supporting plate and a motor transition plate; the driving motor is fixed on the motor transition plate; the motor transition plate is adjustably installed on the motor supporting plate, a driving shaft of the driving motor is connected with the belt assembly, the driving motor rotates to drive the lead screw to rotate through the belt assembly, and then the heating disc clamp is driven to vertically move along the guide rail. An adjusting screw is arranged on the motor transition plate, the transverse position of the driving motor is finely adjusted through the adjusting screw, and then the tightness of the belt assembly is adjusted.

Description

TECHNICAL FIELD

[0001] The utility model belongs to semiconductor manufacturing equipment technical field especially relates to a wafer heating disc lifting structure. BACKGROUND

[0002] In semiconductor technology, thin film sputtering is the main process means of metal interconnection, before the metal sputtering deposition process, the wafer needs to be baked to remove water vapor to meet the uniformity and stress requirements of the deposited thin film. After the wafer is placed in the wafer heating disc, the wafer heating disc drives the wafer to rise into the heating cavity for baking to remove water vapor. The existing wafer heating disc lifting structure is not reasonably arranged, which affects the lifting and moving precision of the heating disc, affects the position precision of the wafer heating disc, causes the temperature sensor fixedly arranged to detect temperature to have errors, and further affects the wafer water vapor removal effect. Therefore, it is necessary to provide a wafer heating disc lifting structure. SUMMARY

[0003] The utility model provides a wafer heating disc lifting structure, optimizes structure, realizes the tightness of belt assembly adjustable, improves lifting position precision.

[0004] To achieve the above object, the utility model provides the following technical scheme:

[0005] A wafer heating disc lifting structure, comprising a heating disc clamp, a clamp mounting structure, a lifting transmission structure, a motor mounting structure and a drive motor, the clamp mounting structure comprises a guide rail base plate and a guide rail, a sliding block is arranged on the guide rail; the lifting transmission structure comprises a lead screw assembly and a belt assembly, the lead screw assembly comprises a lead screw and a lead screw nut, the lead screw nut is connected with the heating disc clamp and the sliding block, the bottom end of the lead screw is connected with the belt assembly; the motor mounting structure comprises a motor support plate and a motor transition plate, the drive motor is fixed to the motor transition plate; the motor transition plate is adjustably mounted on the motor support plate, the drive shaft of the drive motor is connected with the belt assembly, the drive motor rotates to drive the lead screw to rotate, thereby driving the heating disc clamp to move vertically along the guide rail; an adjusting screw is arranged on the motor transition plate, the lateral position of the drive motor is finely adjusted through the adjusting screw, thereby adjusting the tightness of the belt assembly.

[0006] Preferably, the belt assembly comprises a first pulley, a second pulley and a belt, the belt is externally connected with the first pulley and the second pulley, the bottom end of the lead screw is connected with the first pulley, and the drive shaft of the drive motor is connected with the second pulley.

[0007] Preferably, the motor transition plate is provided with a waist-shaped sliding hole arranged transversely, the motor support plate is provided with a fixing hole corresponding to the sliding hole, the motor transition plate is connected to the fixing hole by a connecting screw passing through the sliding hole, and the motor transition plate can move transversely along the sliding hole when the connecting screw is not tightened, thereby driving the driving motor and the second pulley connected thereto to move, and adjusting the tightness of the belt assembly.

[0008] Preferably, the motor transition plate is provided with a waist-shaped sliding hole arranged transversely, the motor support plate is provided with a fixing hole corresponding to the sliding hole, the motor transition plate is connected to the fixing hole by a connecting screw passing through the sliding hole, and the motor transition plate can move transversely along the sliding hole when the connecting screw is not tightened, thereby driving the driving motor and the second pulley connected thereto to move, and adjusting the tightness of the belt assembly.

[0009] Preferably, the motor transition plate is provided with a waist-shaped sliding hole arranged transversely, the motor support plate is provided with a fixing hole corresponding to the sliding hole, the motor transition plate is connected to the fixing hole by a connecting screw passing through the sliding hole, and the motor transition plate can move transversely along the sliding hole when the connecting screw is not tightened, thereby driving the driving motor and the second pulley connected thereto to move, and adjusting the tightness of the belt assembly.

[0010] Preferably, the motor transition plate is provided with a waist-shaped sliding hole arranged transversely, the motor support plate is provided with a fixing hole corresponding to the sliding hole, the motor transition plate is connected to the fixing hole by a connecting screw passing through the sliding hole, and the motor transition plate can move transversely along the sliding hole when the connecting screw is not tightened, thereby driving the driving motor and the second pulley connected thereto to move, and adjusting the tightness of the belt assembly.

[0011] Preferably, the motor transition plate is provided with a waist-shaped sliding hole arranged transversely, the motor support plate is provided with a fixing hole corresponding to the sliding hole, the motor transition plate is connected to the fixing hole by a connecting screw passing through the sliding hole, and the motor transition plate can move transversely along the sliding hole when the connecting screw is not tightened, thereby driving the driving motor and the second pulley connected thereto to move, and adjusting the tightness of the belt assembly.

[0012] Preferably, the motor transition plate is provided with a waist-shaped sliding hole arranged transversely, the motor support plate is provided with a fixing hole corresponding to the sliding hole, the motor transition plate is connected to the fixing hole by a connecting screw passing through the sliding hole, and the motor transition plate can move transversely along the sliding hole when the connecting screw is not tightened, thereby driving the driving motor and the second pulley connected thereto to move, and adjusting the tightness of the belt assembly.

[0013] Compared with the prior art, the technical scheme of the utility model has beneficial effects.

[0014] For example, the wafer heating disc lifting structure adopts the heating disc clamp, the clamp mounting structure, the lifting transmission structure, the motor mounting structure and the driving motor, the clamp mounting structure includes the guide rail base plate and the guide rail, and the sliding block is arranged on the guide rail. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 Fig. 1 is a schematic structural view of the wafer heating disc lifting structure in the embodiment of the present application;

[0016] Figure 2 Fig. 2 is an exploded view of the wafer heating disc lifting structure in the embodiment of the present application;

[0017] Figure 3 Fig. 3 is an exploded view of the motor mounting structure in the embodiment of the present application;

[0018] Figure 4 Fig. 4 is a bottom view of the wafer heating disc lifting structure in the embodiment of the present application.

[0019] Legend of reference signs:

[0020] 1-heating disc clamp;

[0021] 2-clamp mounting structure; 21-guide rail base plate; 22-guide rail; 23-sliding block;

[0022] 3-lifting transmission structure; 31-screw rod assembly; 311-screw rod; 312-screw nut; 32-belt assembly; 321-first belt pulley; 322-second belt pulley; 323-belt;

[0023] 4-motor mounting structure; 41-motor support plate; 411-fixing hole; 42-motor transition plate; 421-sliding hole; 422-bent part; 423-screw hole; 424-motor fixing hole; 43-adjusting screw;

[0024] 5-driving motor;

[0025] 6-fixing plate. DETAILED DESCRIPTION

[0026] To make the purposes, features and benefits of the present application more obvious and easy to understand, the specific embodiments of the present application will be described in detail below with reference to the drawings. It should be understood that the specific embodiments described below are only used to explain the present application, but not to limit the present application. In the drawings, the same or similar reference signs can be used to refer to the same or similar elements in different embodiments, and the description of the same or similar elements in different embodiments and the description of prior art elements, features, effects, etc. can be omitted.

[0027] Figure 1 is a schematic diagram of the wafer heating disc lifting structure in the embodiment of the present application; Figure 2 is an exploded view of the wafer heating disc lifting structure in the embodiment of the present application; Figure 3 is an exploded view of the motor mounting structure in the embodiment of the present application; Figure 4 is a bottom view of the wafer heating disc lifting structure in the embodiment of the present application.

[0028] With reference to Figures 1-4 , the embodiment of the present application provides a wafer heating disc lifting structure.

[0029] Specifically, the wafer heating disc lifting structure comprises a heating disc clamp 1, a clamp mounting structure 2, a lifting transmission structure 3, a motor mounting structure 4 and a driving motor 5. The clamp mounting structure 2 comprises a guide rail base plate 21 and a guide rail 22, and a sliding block 23 is arranged on the guide rail 22. The lifting transmission structure 3 comprises a lead screw assembly 31 and a belt assembly 32. The lead screw assembly 31 comprises a lead screw 311 and a lead screw nut 312. The lead screw nut 312 is connected to the heating disc clamp 1 and the sliding block 23. The bottom end of the lead screw 311 is connected to the belt assembly 32. The motor mounting structure 4 comprises a motor support plate 41 and a motor transition plate 42. The driving motor 5 is fixed to the motor transition plate 42. The motor transition plate 42 is adjustably mounted on the motor support plate 41. The driving shaft of the driving motor 5 is connected to the belt assembly 32. The driving motor 5 rotates to drive the lead screw 311 to rotate, thereby driving the heating disc clamp 1 to move vertically along the guide rail 22. An adjusting screw 43 is arranged on the motor transition plate 42. The lateral position of the driving motor 5 is fine-tuned by the adjusting screw 43, thereby adjusting the tightness of the belt assembly 32.

[0030] In some embodiments, the belt assembly 32 comprises a first belt pulley 321, a second belt pulley 322 and a belt 323. The belt 323 is externally connected to the first belt pulley 321 and the second belt pulley 322. The bottom end of the lead screw 311 is connected to the first belt pulley 321. The driving shaft of the driving motor 5 is connected to the second belt pulley 322.

[0031] Specifically, the belt 323 deforms due to aging and other reasons during use, and cannot fit well with the first pulley 321 and the second pulley 322, causing positional errors during transmission. By fine-tuning the position of the drive motor 5, the belt 323 is kept taut and in contact with the first pulley 321 and the second pulley 322, ensuring positioning accuracy. Compared with the existing technology where the motor is fixed and the belt tension cannot be adjusted, the positioning accuracy is higher.

[0032] In some embodiments, the motor transition plate 42 is provided with an oblong sliding hole 421, which is arranged laterally. The motor support plate 41 is provided with a fixing hole 411 corresponding to the sliding hole 421. The motor transition plate 42 is connected to the fixing hole 411 by a connecting screw (not shown) passing through the sliding hole 421. When the connecting screw is not tightened, the motor transition plate 42 can move laterally along the sliding hole 421; thereby driving the drive motor 5 and the second pulley 322 connected thereto to move, thereby adjusting the tension of the belt assembly 32.

[0033] In some embodiments, the end of the motor transition plate 42 away from the lead screw 311 is bent downward to form a bent portion 422. The bent portion 422 is provided with a screw hole 423. An adjusting screw 43 is disposed in the screw hole 423. The screw hole 423 abuts against the side of the motor support plate 41. The distance by which the motor transition plate 42 moves laterally along the sliding hole 421 is adjusted by adjusting the depth of the adjusting screw 43 into the screw hole 423. When the motor transition plate 42 is adjusted to the required tension state of the belt 323, the motor transition plate 42 is locked to the motor support plate 41 by tightening the connecting screw.

[0034] In some embodiments, the motor transition plate 42 is provided with a through hole that allows the drive shaft to pass through, and a motor fixing hole 424 is provided on the outer periphery of the through hole. A sliding hole 421 is provided on the outer side of the motor fixing hole 424 near the edge. This ensures that when the drive shaft of the drive motor 5 is connected to the second pulley 322, the fixing hole 411 of the motor support plate 41 corresponding to the sliding hole 421 is as far away from the second pulley 322 as possible, thus avoiding interference between the connecting screw and the belt 323.

[0035] In some embodiments, the top of one end of the motor support plate 41 is connected to the bottom surface of the guide rail base plate 21, and the top of the other end is connected to the motor transition plate 42, so that the guide rail base plate 21 and the drive motor 5 are arranged in parallel on the same side of the motor support plate 41, thereby reducing the space occupied.

[0036] In some embodiments, the guide rail base plate 21 has a U-shaped cross-section, so that the guide rail 22 and the lead screw 311 are located inside the guide rail base plate 21, which serves to protect them.

[0037] In some embodiments, a fixing plate 6 is provided on the top of the guide rail substrate 21, which is used to install and fix the wafer heating plate lifting structure.

[0038] In summary, the wafer heating disc lifting structure provided by the utility model, including heating disc clamp 1, clamp mounting structure 2, lifting transmission structure 3, motor mounting structure 4 and drive motor 5, clamp mounting structure 2 includes guide rail base plate 21 and guide rail 22, be provided with sliding block 23 on guide rail 22, lifting transmission structure 3 includes screw rod assembly 31 and belt assembly 32, screw rod assembly 31 includes screw rod 311 and screw nut 312, screw nut 312 connects heating disc clamp 1 and sliding block 23, the bottom end of screw rod 311 connects belt assembly 32, motor mounting structure 4 includes motor support plate 41 and motor transition plate 42, drive motor 5 is fixed in motor transition plate 42, motor transition plate 42 is adjustably installed in motor support plate 41, the drive shaft of drive motor 5 connects belt assembly 32, drive motor 5 rotates and drives screw rod 311 to rotate, and then drives heating disc clamp 1 to move vertically along guide rail 22, be provided with adjusting screw 43 on motor transition plate 42, the lateral position of drive motor 5 is fine-tuned by adjusting screw 43, and then the tightness of belt assembly 32 is adjusted, the structure is optimized, the tightness of belt assembly 32 is adjusted, and the lifting position precision is improved.

[0039] Although specific embodiments have been described above, these embodiments are not intended to limit the scope of the present disclosure, even if a single embodiment is described with respect to a particular feature. The features provided in the present disclosure are intended to be illustrative, not limiting, unless otherwise stated. In specific implementations, one or more technical features of a dependent claim can be combined with technical features of an independent claim, and technical features from a corresponding independent claim can be combined by any appropriate means, not just the specific combinations listed in the claims, if technically feasible.

[0040] Although the utility model discloses as above, the utility model is not limited to this. Any person skilled in the art, without departing from the spirit and scope of the utility model, can make various changes and modifications, therefore the protection scope of the utility model should be limited by the range defined in the claims.

Claims

1. A wafer heating plate lifting structure, characterized in that, The heating disc clamp, the clamp mounting structure, the lifting transmission structure, the motor mounting structure and the driving motor, the clamp mounting structure includes a guide rail base plate and a guide rail, a sliding block is arranged on the guide rail, the lifting transmission structure includes a screw rod assembly and a belt assembly, the screw rod assembly includes a screw rod and a screw rod nut, the screw rod nut connects the heating disc clamp and the sliding block, the bottom end of the screw rod is connected with the belt assembly, the motor mounting structure includes a motor support plate and a motor transition plate, the driving motor is fixed on the motor transition plate, the motor transition plate is adjustably mounted on the motor support plate, the driving shaft of the driving motor is connected with the belt assembly, the driving motor rotates to drive the screw rod to rotate, and then drives the heating disc clamp to move vertically along the guide rail, an adjusting screw is arranged on the motor transition plate, the lateral position of the driving motor is finely adjusted through the adjusting screw, and then the tightness of the belt assembly is adjusted.

2. The wafer heating plate lifting structure according to claim 1, wherein, The belt assembly includes a first belt pulley, a second belt pulley and a belt, the belt externally connects the first belt pulley and the second belt pulley, the bottom end of the screw rod is connected with the first belt pulley, and the driving shaft of the driving motor is connected with the second belt pulley.

3. The wafer heating plate lifting structure according to claim 2, wherein, A waist-shaped sliding hole is arranged on the motor transition plate, the sliding hole is arranged laterally, a fixed hole is arranged on the motor support plate corresponding to the sliding hole, the motor transition plate is connected to the fixed hole through a connecting screw passing through the sliding hole, when the connecting screw is not tightened, the motor transition plate can move laterally along the sliding hole, then drives the driving motor and the second belt pulley connected thereto to move, and then adjusts the tightness of the belt assembly.

4. The wafer heating plate lifting structure according to claim 3, wherein, The end of the motor transition plate away from the screw rod is bent downward to form a bending part, the bending part is provided with a screw hole, the adjusting screw is arranged in the screw hole, the screw hole abuts against the side edge of the motor support plate, the distance of the lateral movement of the motor transition plate along the sliding hole is adjusted by adjusting the depth of the adjusting screw screwed into the screw hole, when the motor transition plate is adjusted to move to the required tightness of the belt, the motor transition plate is locked to the motor support plate by tightening the connecting screw.

5. The wafer heating plate lifting structure according to claim 3, wherein, The motor transition plate is provided with a through hole allowing the driving shaft to pass through, the outer periphery of the through hole is provided with a motor fixing hole, and the sliding hole is arranged outside the motor fixing hole close to the edge.

6. The wafer heating plate lifting structure according to claim 1, wherein, The top of one end of the motor support plate is connected to the bottom surface of the guide rail base plate, and the top of the other end is connected to the motor transition plate.

7. The wafer heating plate lifting structure according to claim 1, wherein, The guide rail base plate is in the shape of a Chinese character "fang" in cross section, so that the guide rail and the screw rod are located inside the guide rail base plate.

8. The wafer heating plate lifting structure according to claim 1, wherein, A fixed plate is arranged on the top of the guide rail base plate.

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