Coating equipment and auxiliary heating pipe thereof
By designing an auxiliary heating tube, the coaxial motion of the two heating elements solves the problem of uneven heating in the coating equipment, achieving faster heating speed and more uniform heating effect, while reducing energy consumption.
Patent Information
- Application Number
- CN202422912975.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-27
- Publication Date
- 2026-02-17
- Estimated Expiration
- 2034-11-27
AI Technical Summary
In existing coating equipment, the uneven heating of silicon wafers leads to poor coating uniformity, especially in the fields of electronic components and optical devices where the problem of uneven film thickness is particularly prominent.
The auxiliary heating tube design includes a tubular outer shell, first and second heating elements, a limiting structure, and an axially arranged left and right spiral screw. The coaxial motion is achieved through the opposite reciprocating motion of the two heating elements to improve heating uniformity.
It increases the heating rate, prevents localized overheating, ensures uniform heating of the heated parts, and reduces energy consumption.
Smart Images
Figure CN223921550U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of coating equipment technology, and in particular to a coating equipment and its auxiliary heating tube. Background Technology
[0002] In the photovoltaic industry, silicon wafers typically require coating processes, such as PECVD coating. Currently, PECVD coating commonly employs the tubular direct deposition method. This method involves placing a graphite boat horizontally inside a quartz tube. The quartz furnace tube has a cylindrical structure, and heating occurs from the periphery towards the center. The graphite boat can be considered a cuboid structure. However, due to varying distances from the furnace tube wall and the heat transfer effect of the graphite boat itself, the heating is not uniform across different areas within the boat. Consequently, the thickness of the antireflective coating deposited on the silicon wafer surface varies slightly across different regions, resulting in generally uneven coating uniformity.
[0003] However, with the continuous development of technology, the requirements for coating uniformity are becoming increasingly stringent, especially in the fields of electronic components and optical devices, where the uniformity of film thickness is crucial. To achieve uniform heating of the substrate, many coating equipment typically employ electric heating devices, such as stainless steel heating tubes. However, the temperature at both ends of these heating tubes is relatively low, while the temperature in the middle is relatively high. This results in the substrate being heated unevenly, with the ends being colder and the middle being hotter, which still affects the coating uniformity. Utility Model Content
[0004] The technical problem to be solved by this utility model is to provide a coating equipment and its auxiliary heating tube, which can improve the heating rate and make the heated part heat evenly, so as to prevent the local heating temperature from being too high.
[0005] To solve the above-mentioned technical problems, the first aspect of this utility model discloses an auxiliary heating tube, including a tubular outer shell, and further including a first heating element, a second heating element, a limiting structure, and an axially arranged left and right rotating screw disposed within the tubular outer shell;
[0006] Both the first heating element and the second heating element are provided with internal threaded sleeves;
[0007] The inner threaded sleeve of the first heating element is threadedly connected to the right-hand portion of the left-hand and right-hand lead screws, and the inner threaded sleeve of the second heating element is threadedly connected to the left-hand portion of the left-hand and right-hand lead screws; the left-hand and right-hand lead screws can rotate in both directions.
[0008] The limiting structure is used to restrict the radial rotation of the first heating element and the second heating element.
[0009] As an optional implementation, the limiting structure is also used to supply power to the first heating element and the second heating element;
[0010] The limiting structure includes an axially arranged conductive positive rod and a negative rod, the positive rod being electrically connected to the positive terminal of an external power source, and the negative rod being electrically connected to the negative terminal of an external power source; the limiting structure also includes two pairs of conductive limiting members, each pair of limiting members being respectively disposed on both sides of the first heating element and the second heating element; the limiting members are electrically connected to the power input terminal of the corresponding heating element;
[0011] A pair of limiting members on the first heating element are slidably connected to the positive electrode rod and the negative electrode rod respectively, so as to restrict the radial rotation of the first heating element and realize the power supply of the first heating element;
[0012] A pair of limiting members on the second heating element are slidably connected to the positive electrode rod and the negative electrode rod, respectively, to restrict the radial rotation of the second heating element and to supply power to the second heating element.
[0013] As another optional implementation, the limiting member is a positive electrode sleeve fitted on the positive electrode rod or a negative electrode sleeve fitted on the negative electrode rod.
[0014] As another alternative implementation, the two ends of the positive electrode rod and the negative electrode rod are respectively fixed to the tubular outer shell.
[0015] As another optional implementation, a high-temperature sensor is also included; the probe body of the high-temperature sensor is disposed on the tubular housing.
[0016] As another optional implementation, the tops of both the first heating element and the second heating element are fitted to the inner wall of the tubular outer shell; the internal threaded sleeves of both the first heating element and the second heating element are located at the bottom of the heating element.
[0017] As another optional implementation, the material of the first heating element and / or the second heating element is at least one or more of the following: nickel-chromium alloy, iron-chromium-aluminum alloy, platinum-iridium alloy, chromium-nickel-iron alloy, aluminum-platinum alloy, and copper-platinum alloy.
[0018] As another alternative implementation, the tubular outer shell is made of a metallic or alloy material.
[0019] As another optional implementation, the diameter and length of the left-hand and right-hand portions of the left-hand and right-hand leadscrews are equal.
[0020] The second aspect of this utility model discloses a coating apparatus, including a reactor, a cantilever slurry, and a graphite boat. The cantilever slurry is arranged in the reactor along the axial direction of the reactor, and the graphite boat carries the object to be coated and enters the reactor along the cantilever slurry. It also includes an auxiliary heating tube as described in the first aspect of this utility model, which is arranged in the axial direction of the reactor and located below the graphite boat.
[0021] Compared with the prior art, the embodiments of this utility model have the following beneficial effects:
[0022] This utility model embodiment improves the heating rate and ensures uniform heating of the heated part by using the opposite reciprocating motion of two heating units, thus preventing excessive local heating temperature. At the same time, the two heating elements are designed to move coaxially, making the structure more compact and suitable for uniform auxiliary heating in small spaces. Compared to filling the tube with the entire heating wire, the two smaller heating units consume less power. Attached Figure Description
[0023] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0024] Figure 1 This is a schematic diagram of the structure of a coating device disclosed in an embodiment of this utility model;
[0025] Figure 2 This is a schematic diagram of the structure of an auxiliary heating tube disclosed in an embodiment of this utility model;
[0026] Figure 3 This is a partial structural schematic diagram of an auxiliary heating tube disclosed in an embodiment of this utility model.
[0027] In the diagram: 1. Reactor; 2. Cantilever paddle; 3. Graphite boat; 4. Auxiliary heating tube; 41. Tubular shell; 5. Right-handed portion of the left-hand and right-handed lead screw; 6. Left-handed portion of the left-hand and right-handed lead screw; 7. First heating element; 8. Second heating element; 9. Internal threaded sleeve; 10. Positive electrode rod; 11. Positive electrode sleeve; 12. Negative electrode rod; 13. Negative electrode sleeve; 14. Motor; 15. High-temperature sensor. Detailed Implementation
[0028] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0029] Example 1
[0030] See Figures 2-3This utility model discloses an auxiliary heating tube 4, which includes a tubular outer shell 41, and also includes a first heating element 7, a second heating element 8, a limiting structure, and an axially arranged left and right rotating screw (including a right-hand rotating part 5 and a left-hand rotating part 6) disposed within the tubular outer shell 41.
[0031] Both the first heating element 7 and the second heating element 8 are provided with internal threaded sleeves 9;
[0032] The inner threaded sleeve 9 of the first heating element 7 is threadedly connected to the right-hand portion 5 of the left-hand and right-hand lead screws, and the inner threaded sleeve 9 of the second heating element 8 is threadedly connected to the left-hand portion 6 of the left-hand and right-hand lead screws; the left-hand and right-hand lead screws can rotate in both directions.
[0033] The limiting structure is used to restrict the radial rotation of the first heating element 7 and the second heating element 8.
[0034] In this embodiment, when the left and right screws rotate forward or reverse, the internal threaded sleeve 9 drives the corresponding heating element to move axially. Since the screw threads are opposite, the two heating elements either move in opposite directions or towards each other, changing with the forward and reverse rotation of the screws, thus enabling the two heating elements to move back and forth in the same axial direction.
[0035] In this embodiment, the internal threaded sleeve 9 is fixedly connected to the corresponding heating element; the left and right rotating screws can achieve forward and reverse rotation by being connected to the built-in or external motor 14.
[0036] This utility model embodiment improves the heating rate and ensures uniform heating of the heated part by using the opposite reciprocating motion of two heating units, thus preventing excessive local heating temperature. At the same time, the two heating elements are designed to move coaxially, making the structure more compact and suitable for uniform auxiliary heating in small spaces. Compared to filling the tube with the entire heating wire, the two smaller heating units consume less power.
[0037] In an optional embodiment, the limiting structure is also used to supply power to the first heating element 7 and the second heating element 8;
[0038] The limiting structure includes an axially arranged conductive positive pole 10 and a negative pole 12. The positive pole 10 is electrically connected to the positive terminal of an external power supply, and the negative pole 12 is electrically connected to the negative terminal of an external power supply. The limiting structure also includes two pairs of conductive limiting members, each pair of limiting members being respectively disposed on both sides of the first heating element 7 and the second heating element 8. The limiting members are electrically connected to the power input terminal of the corresponding heating element.
[0039] A pair of limiting members on the first heating element 7 are slidably connected to the positive electrode rod 10 and the negative electrode rod 12 respectively, so as to restrict the radial rotation of the first heating element 7 and realize the power supply of the first heating element 7;
[0040] A pair of limiting members on the second heating element 8 are slidably connected to the positive electrode rod 10 and the negative electrode rod 12 respectively, so as to restrict the radial rotation of the second heating element 8 and realize the power supply of the second heating element 8.
[0041] In another optional embodiment, the limiting member is a positive sleeve 11 fitted onto the positive pole 10 or a negative sleeve 13 fitted onto the negative pole 12. By matching the positive pole 10 and the positive sleeve 11, the internal threaded sleeve 9 is limited to moving only along the axial direction of the positive pole 10, so that the rotation of the screw is converted only into the axial force for the movement of the internal threaded sleeve 9.
[0042] In another alternative embodiment, the two ends of the positive electrode 10 and the negative electrode 12 are respectively fixed to the tubular outer casing 41.
[0043] In another optional embodiment, a high-temperature sensor 15 is also included; the probe body of the high-temperature sensor 15 is disposed on the tubular housing 41. Furthermore, the high-temperature sensor can be fixedly installed at both ends and the middle of the sidewall of the heating tube, respectively. The high-temperature sensor identifies the temperature at both ends and the middle of the auxiliary heating tube 4, and uses the temperature data to control the forward and reverse rotation of the motor 14 to adjust the positions of the first heating element 7 and the second heating element 8 in a timely manner, thereby enabling the auxiliary heating tube 4 to uniformly heat the space inside the reactor.
[0044] In another optional embodiment, the tops of the first heating element 7 and the second heating element 8 are both fitted against the inner wall of the tubular outer shell 41; the internal threaded sleeves 9 of the first heating element 7 and the second heating element 8 are both located at the bottom of the heating element.
[0045] In another optional embodiment, the first heating element 7 and / or the second heating element 8 are made of at least one or more of the following materials: nickel-chromium alloy, iron-chromium-aluminum alloy, platinum-iridium alloy, chromium-nickel-iron alloy, aluminum-platinum alloy, and copper-platinum alloy, all of which are high-temperature resistant materials.
[0046] In another alternative embodiment, the tubular outer shell 41 is made of a thermally conductive material such as a metal or alloy, for example, stainless steel.
[0047] In yet another optional embodiment, the diameter and length of the left-hand portion 6 and the right-hand portion of the left-hand and right-hand leadscrews are equal.
[0048] In another optional embodiment, both the positive electrode sleeve 11 and the negative electrode sleeve 13 are made of high-temperature resistant metal or alloy materials.
[0049] Optionally, the high-temperature sensor can be a WRW-1500 high-temperature thermocouple, and the motor can be a Siemens servo motor with its own controller, model 1FK7063-2AF71-1RG0.
[0050] In another alternative embodiment, the bases of the first heating element 7 and the second heating element 8 are made of quartz, and the internal threaded sleeve 9 is fixed below the base.
[0051] Example 2
[0052] See Figures 1-3 This utility model discloses a coating device, including a reactor 1, a cantilever slurry 2, and a graphite boat 3. The cantilever slurry 2 is arranged in the reactor 1 along the axial direction of the reactor 1. The graphite boat 3 carries the object to be coated and enters the reactor 1 along the cantilever slurry 2 for processing. The reactor 1 provides the main heat required for coating. It also includes an auxiliary heating tube 4 as described in Embodiment 1, which provides additional heat to assist in coating. The auxiliary heating tube 4 is arranged in the axial direction of the reactor 1 and is located below the graphite boat 3.
[0053] The contents disclosed in this utility model embodiment are merely preferred embodiments of this utility model and are only used to illustrate the technical solutions of this utility model, not to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the various embodiments of this utility model.
Claims
1. An auxiliary heating tube comprising a tubular casing, characterised in that, The first heating body and the second heating body are provided with inner threaded sleeves. The inner threaded sleeve of the first heating body is threadedly connected with the right-hand threaded part of the left-right threaded screw rod, and the inner threaded sleeve of the second heating body is threadedly connected with the left-hand threaded part of the left-right threaded screw rod. The left-right threaded screw rod can move forward and backward. The limiting structure is used for limiting the radial rotation of the first heating body and the second heating body.
2. The auxiliary heating tube of claim 1, wherein The limiting structure is also used for supplying power to the first heating body and the second heating body. The limiting structure comprises axially arranged positive and negative rods which can conduct electricity, the positive rod is electrically connected with the positive pole of an external power supply, and the negative rod is electrically connected with the negative pole of the external power supply. The limiting structure further comprises two pairs of limiting members which can conduct electricity, each pair of the limiting members is arranged on the two sides of the first heating body and the second heating body respectively, and the limiting members are electrically connected with the power input end of the corresponding heating body. The pair of limiting members on the first heating body are in sliding connection with the positive rod and the negative rod respectively, so as to limit the radial rotation of the first heating body and supply power to the first heating body.
3. The auxiliary heating tube of claim 2, wherein, The pair of limiting members on the second heating body are in sliding connection with the positive rod and the negative rod respectively, so as to limit the radial rotation of the second heating body and supply power to the second heating body.
4. The auxiliary heating tube of claim 2, wherein, The limiting members are positive sleeves sleeved on the positive rod or negative sleeves sleeved on the negative rod.
5. The auxiliary heating tube of claim 1, wherein The two ends of the positive rod and the negative rod are fixed on the tubular shell respectively.
6. The auxiliary heating tube of claim 1, wherein The auxiliary heating pipe further comprises a high-temperature sensor, and a probe body of the high-temperature sensor is arranged on the tubular shell.
7. The auxiliary heating tube of claim 1, wherein The top of the first heating body and the top of the second heating body are in contact with the inner wall of the tubular shell, and the inner threaded sleeves of the first heating body and the second heating body are arranged at the bottom of the heating body.
8. The auxiliary heating tube of claim 1, wherein The material of the tubular shell is metal material or alloy material.
9. A coating apparatus comprising a reaction furnace, a cantilevered boat disposed in the reaction furnace in an axial direction of the reaction furnace, and a graphite boat in which an object to be coated is loaded and which enters the reaction furnace along the cantilevered boat, characterized in that, The left-hand threaded part and the right-hand threaded part of the left-right threaded screw rod are equal in diameter and length. The auxiliary heating pipe further comprises the auxiliary heating pipe according to any one of claims 1-8, the auxiliary heating pipe is arranged along the axial direction of the reaction furnace and is located below the graphite boat.