Valve mechanism for sealing, semiconductor equipment and semiconductor system

Abstract

The utility model provides a valve mechanism for sealing, semiconductor equipment and a semiconductor system, and relates to the field of valves, in particular to the valve mechanism comprising a valve plate located in a cavity and used for opening or sealing a first opening; at least part of the valve rod penetrates through the second opening, and the part, located in the cavity, of the valve rod is connected with the valve plate; the sealing assembly is used for sealing a gap between the valve rod and the second opening; the driving assembly is connected with the part, located outside the cavity, of the valve rod and used for driving the valve rod to drive the valve plate to move to be away from or close to the first opening so as to open or seal the first opening. The support is used for fixing the driving assembly and the cavity; the valve mechanism for sealing, the semiconductor equipment and the semiconductor system can effectively solve the problems that in the prior art, a valve is large in size and high in cost, and the application scene of a light-weight valve cannot be met.

Description

Technical Field

[0001] This application relates to the field of valves, specifically a valve mechanism, semiconductor device, and semiconductor system for sealing. Background Technology

[0002] Vacuum technology is a fundamental technology of modern industry, widely used in various sectors such as aerospace, biomedicine, food, and electronics. A vacuum chamber is a crucial component of vacuum technology, used to isolate a vacuum space from the external environment and maintain the vacuum level within that space. In practical applications, vacuum chambers typically need to exchange substances or objects with the external environment and also require control over the vacuum level. Therefore, valves that can be opened and closed as needed are required to control the connection between the vacuum chamber and the external environment. Vacuum valves can be classified according to their functions into control valves, isolation valves, and combination valves. Control valves primarily control the pressure and airflow within the vacuum chamber, isolation valves primarily control the connection between the vacuum chamber and the outside world, and combination valves combine the functions of both.

[0003] Taking isolation valves as an example, there are many types of existing isolation valves, including gate valves, angle valves, butterfly valves, diaphragm valves, and baffle valves. In actual engineering, isolation valves often need to be installed in pipelines with large nominal sizes and at vacuum chamber ports. Therefore, the corresponding isolation valves are also large in size and weight, and expensive. As a result, existing valves cannot meet the needs of large and medium-sized valve applications requiring lightweight design.

[0004] In summary, how to provide a valve that is small in size, lightweight, and low in cost to meet the application scenarios of lightweight valves is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0005] This application discloses a valve mechanism, semiconductor device, and semiconductor system for sealing, which solves the problems of large valve size, high cost, and inability to meet the application scenarios of lightweight valves in the prior art.

[0006] In a first aspect, this application provides a valve mechanism for sealing a cavity of a semiconductor device; the cavity has a first opening at the bottom and a second opening at the top.

[0007] The valve mechanism includes:

[0008] A valve plate, located inside the cavity, is used to open or seal the first opening;

[0009] A valve stem, at least a portion of which passes through the second opening, and the portion of the valve stem located within the cavity is connected to the valve plate;

[0010] A sealing assembly for sealing the gap between the valve stem and the second opening;

[0011] A drive assembly, connected to the portion of the valve stem located outside the cavity, is used to drive the valve stem to move the valve plate away from or towards the first opening, so as to open or seal the first opening;

[0012] A bracket is used to fix the drive assembly to the cavity.

[0013] By directly using the valve plate for sealing the cavity of the semiconductor device, the original valve body of the valve mechanism is eliminated, reducing the overall weight and volume of the valve mechanism, thereby reducing the cost of the valve mechanism and helping to meet the application requirements of lightweight valves; moreover, the sealing component is set between the valve stem and the second opening to avoid the decrease in airtightness at the contact point due to the movement of the valve stem, thereby effectively improving the sealing performance of the cavity.

[0014] In one possible implementation, the sealing assembly includes a sealing channel assembly that can be compressed or stretched along the extension direction of the channel, and the sealing channel assembly has a sealing channel inside.

[0015] The valve stem passes through the sealing channel, and one end of the valve stem outside the cavity is fixedly connected to the first end of the sealing channel assembly. The first end of the sealing channel assembly is sealed, and the second end of the sealing channel assembly is sealed to the second opening.

[0016] By adding a sealing channel assembly with a sealing channel and having the valve stem pass through the sealing channel, the axial movement of the valve stem will not affect the sealing effect of the sealing channel assembly, thereby improving the sealing performance between the valve stem and the second opening.

[0017] In one possible implementation, the sealing channel assembly is a welded bellows, the first end of which is sealed and connected to the drive end of the drive assembly via a connector, and the second end of which is sealed to the second opening via a flange.

[0018] Using the welded bellows as a sealing channel assembly results in a greater longitudinal compression, which in turn allows the valve stem to have a greater axial stroke, thus enabling the valve plate to have a greater stroke.

[0019] Meanwhile, one end of the welded bellows is closed and connected to the drive assembly, while the other end is sealed to the second opening through the flange. This effectively ensures the sealing performance of the welded bellows opening and improves the ease of installation and removal of the welded bellows, making it easier to replace and maintain, and avoiding the problem of reduced sealing caused by directly connecting the welded bellows to the second opening.

[0020] In one possible implementation, the first end face of the flange is sealed to the second end of the welded bellows, the second end of the flange is pressed against the outer wall surface of the cavity surrounding the second opening by a clamping ring, and a sealing ring is provided between the second end face of the flange and the outer wall surface of the cavity.

[0021] The second end of the welded bellows is directly welded to the flange, thereby ensuring the sealing between the second end face of the welded bellows and the first end face of the flange. A sealing ring is provided between the second end of the flange and the edge of the second opening, and the second end of the flange is pressed against the edge of the second opening by the clamping ring. During the process, the sealing ring is deformed by force, forming a sealing surface at the second end face of the flange and the edge of the second opening, ensuring the sealing performance between the flange and the second opening.

[0022] In one possible implementation, the sealing ring includes an annular central support and a rubber ring, the rubber ring being fixedly sleeved on the outer annular wall surface of the central support;

[0023] The inner wall of the second end of the flange is provided with a stepped groove, and the central support is snapped into the stepped groove.

[0024] The rubber ring is pressed between the second end face of the flange and the outer wall surface of the cavity outside the second opening.

[0025] The central support ensures the roundness of the rubber ring, thereby guaranteeing the seal between the flange and the second opening after assembly. Simultaneously, the central support and the stepped groove work together to limit each other's movement, effectively ensuring the accurate relative position of the sealing ring and the flange. In one possible embodiment, a guide assembly is provided at the valve stem, which is fixed relative to the support or the cavity to guide the valve stem along a predetermined trajectory.

[0026] The valve stem is fitted inside the sealing channel. By adding the guide component, the valve stem is guided, thereby ensuring that the valve stem always moves along a preset trajectory. This also ensures that the valve plate has a relatively fixed movement trajectory, preventing the valve stem from contacting and rubbing against the inner wall of the welded bellows, and also preventing the valve plate from contacting and rubbing against the inner wall of the cavity.

[0027] In one possible implementation, the drive assembly is a cylinder, hydraulic cylinder, or electric telescopic rod with a guiding function, and the movement trajectory of the moving end of the drive assembly is consistent with the axial direction of the valve stem.

[0028] The drive assembly uses a cylinder, hydraulic cylinder, or electric telescopic rod with built-in guiding function. When it drives the valve stem to move, it can meet the guiding requirements of the valve stem, so that the valve stem can move along a preset trajectory. The preset trajectory is preferably a straight line that overlaps with the axis of the valve stem.

[0029] In one possible implementation, the bracket is a hollow bracket that fixes the fixed end of the drive assembly to the cavity.

[0030] By employing the hollowed-out bracket, the weight of the valve mechanism is further reduced, and the relative positional relationship between the drive assembly and the cavity is effectively ensured.

[0031] Secondly, this application provides a semiconductor device including a valve mechanism for sealing as described in any one of the above claims and the cavity, the cavity being connected to a vacuum channel or a vacuum pump through the first opening.

[0032] Using the valve mechanism described above to seal the first opening of the cavity helps to achieve overall weight reduction of the semiconductor device. At the same time, during use, by connecting a vacuum channel or vacuum pump at the first opening, the cavity is always kept in a vacuum state.

[0033] Thirdly, this application provides a semiconductor system including the semiconductor device described above and the vacuum channel or the vacuum pump.

[0034] By using the aforementioned semiconductor device, combined with the vacuum channel and the vacuum pump, a continuous vacuum inside the cavity and overall lightweight design are achieved. Attached Figure Description

[0035] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0036] Figure 1 This is a schematic diagram of the valve mechanism used for sealing according to an embodiment of this application;

[0037] Figure 2 This is a schematic diagram of the structure of a semiconductor device according to an embodiment of this application;

[0038] Figure 3 This is a schematic diagram of the sealing structure between the flange and the second opening position in an embodiment of this application;

[0039] Figure 4 This is a schematic diagram of the sealing ring structure in an embodiment of this application;

[0040] Figure 5 This is a cross-sectional view of the sealing ring in an embodiment of this application.

[0041] Explanation of reference numerals in the attached figures:

[0042] 1. Bracket; 2. Drive assembly; 3. Connector; 4. Welded bellows; 5. Valve stem; 6. Flange; 7. Compression ring; 8. Valve plate; 9. First opening; 10. Second opening; 11. Rubber ring; 12. Central bracket. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of this application clearer, the application will now be described in further detail with reference to the accompanying drawings.

[0044] In semiconductor systems, based on loadlock devices, the cavity of the semiconductor device needs to be kept in a vacuum state. The first opening 9 is externally connected to a vacuum channel or vacuum pump. When the negative pressure generated by the vacuum channel or vacuum pump is insufficient, opening the first opening 9 will cause the vacuum level in the cavity to drop. Therefore, a valve mechanism needs to be added at the position of the first opening 9, and the overall weight reduction of the semiconductor device must be ensured.

[0045] The terminology used in the following embodiments is for the purpose of describing particular embodiments only and is not intended to be limiting of this application. As used in the specification and appended claims of this application, the singular expressions “a,” “an,” “the,” “the,” and “this” are intended to also include expressions such as “one or more,” unless the context clearly indicates otherwise.

[0046] References to "one embodiment" or "some embodiments" as described in this specification mean that one or more embodiments of this application include a specific feature, structure, or characteristic described in connection with that embodiment. Therefore, the phrases "in one embodiment," "in some embodiments," "in other embodiments," "in still other embodiments," etc., appearing in different parts of this specification do not necessarily refer to the same embodiment, but rather mean "one or more, but not all, embodiments," unless otherwise specifically emphasized. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless otherwise specifically emphasized.

[0047] Example 1

[0048] This application provides a valve mechanism for sealing a cavity of a semiconductor device; the cavity has a first opening 9 at the bottom and a second opening 10 at the top.

[0049] The valve mechanism includes:

[0050] Valve plate 8, located inside the cavity, is used to open or seal the first opening 9;

[0051] The valve stem 5 has at least a portion that passes through the second opening 10, and the portion of the valve stem 5 located within the cavity is connected to the valve plate 8.

[0052] A sealing assembly for sealing the gap between the valve stem 5 and the second opening 10;

[0053] The drive assembly 2 is connected to the portion of the valve stem 5 located outside the cavity, and is used to drive the valve stem 5 to move the valve plate 8 away from or towards the first opening 9, so as to open or seal the first opening 9.

[0054] Bracket 1 is used to fix drive assembly 2 to cavity.

[0055] By directly placing the valve plate 8 into the cavity of the semiconductor device and directly contacting and sealing it with the first opening 9 of the cavity, the original valve body of the valve mechanism is eliminated, reducing the overall weight and volume of the valve mechanism, thereby reducing the cost of the valve mechanism and helping to meet the application requirements of lightweight valves.

[0056] Furthermore, a sealing component is provided between the valve stem 5 and the second opening 10 to prevent the airtightness of the contact point from decreasing due to the movement of the valve stem 5, thereby effectively improving the sealing performance of the cavity.

[0057] In practical use, by setting a first sealing ring at the bottom of the valve plate 8, when the valve plate 8 is in contact with the edge of the first opening 9, the first sealing ring can be squeezed and deformed, thereby increasing the sealing performance between the valve plate 8 and the edge of the first opening 9.

[0058] Meanwhile, a second sealing ring is added to the back of the valve plate 8. When the valve plate 8 moves in the opposite direction to the position of the second opening 10, the back of the valve plate 8 fits against the edge of the second opening 10, and the second sealing ring is squeezed and deformed, thereby increasing the sealing performance at the second opening 10.

[0059] In one possible implementation, the sealing assembly includes a sealing channel assembly that can be compressed or stretched along the extension direction of the channel, and the sealing channel assembly has a sealing channel inside.

[0060] The valve stem 5 passes through the sealing channel, and the end of the valve stem 5 outside the cavity is fixedly connected to the first end of the sealing channel assembly. The first end of the sealing channel assembly is sealed, and the second end of the sealing channel assembly is sealed to the second opening 10.

[0061] By adding a sealing channel assembly with a sealing channel and allowing the valve stem 5 to pass through the sealing channel, the axial movement of the valve stem 5 will not affect the sealing effect of the sealing channel assembly, thereby improving the sealing performance between the valve stem 5 and the second opening 10.

[0062] In some embodiments, the sealing component is a sealing ring, the outer peripheral surface of the valve stem 5 is a smooth surface and slides and seals with the inner wall of the sealing ring, and the outer wall of the sealing ring contacts and seals with the inner wall of the second opening 10, thereby achieving a seal between the valve stem 5 and the second opening 10. At the same time, in some applications, by increasing the length of the sealing ring along the center line direction, the valve stem 5 has a certain guiding ability when passing through the sealing ring, that is, the sealing ring also serves as a guiding component.

[0063] In one possible implementation, the sealing channel assembly is a welded bellows 4, the first end of which is sealed and connected to the drive end of the drive assembly 2 via a connector 3, and the second end of which is sealed to the second opening 10 via a flange 6.

[0064] The use of welded bellows 4 as a sealing channel assembly provides greater longitudinal compression, which in turn allows the valve stem 5 to have a greater axial stroke, thus enabling the valve plate 8 to have a greater stroke.

[0065] Meanwhile, one end of the welded bellows 4 is closed and connected to the drive assembly 2, while the other end is sealed to the second opening 10 through the flange 6. This effectively ensures the sealing performance of the opening end of the welded bellows 4 and improves the ease of installation and removal of the welded bellows 4, making it easier to replace and maintain, and avoiding the problem of reduced sealing caused by directly connecting the welded bellows 4 to the second opening 10.

[0066] In practical applications, flange 6 can be made of the same material as the welded bellows 4, so the two can have a good welding effect when welded, avoiding leakage at the weld position. Flange 6 can be connected to the second opening 10 by means of threads, crimping, etc., effectively avoiding the problem of poor sealing caused by welding different materials.

[0067] In some scenarios, corrugated pipes made of corrosion-resistant plastic material can achieve the same effect when used to seal the channel.

[0068] In one possible implementation, the first end face of the flange 6 is sealed to the second end of the welded bellows 4, the second end of the flange 6 is pressed against the outer wall surface of the cavity surrounding the second opening 10 by a clamping ring 7, and a sealing ring is provided between the second end face of the flange 6 and the outer wall surface of the cavity.

[0069] The second end of the welded bellows 4 is directly connected to the flange 6 by welding, thereby ensuring the sealing between the second end face of the welded bellows 4 and the first end face of the flange 6. A sealing ring is set between the second end of the flange 6 and the edge of the second opening 10, and the second end of the flange 6 is pressed against the edge of the second opening 10 by the compression ring 7. During the process, the sealing ring is deformed by force, forming a sealing surface at the second end face of the flange 6 and the edge of the second opening 10, ensuring the sealing performance between the flange 6 and the second opening 10.

[0070] In practical applications, the second end of the flange 6 is preferably sealed to the edge of the second opening 10 by crimping, which facilitates the maintenance of the flange 6 during use. At the same time, the addition of a sealing ring creates an elastic seal between the flange 6 and the edge of the second opening 10, which helps to eliminate the problem of reduced sealing at the contact point caused by equipment vibration.

[0071] In some scenarios, flange 6 can be connected to the second opening 10 by threaded connection to achieve the same sealing effect.

[0072] In one possible implementation, the sealing ring includes an annular central support 12 and a rubber ring 11, with the rubber ring 11 fixedly sleeved on the outer annular wall surface of the central support 12.

[0073] The inner wall of the second end of flange 6 is provided with a stepped groove, and the central support 12 is snapped into the stepped groove.

[0074] The rubber ring 11 is pressed between the second end face of the flange 6 and the outer wall surface of the cavity outside the second opening 10.

[0075] The central support 12 ensures the roundness of the rubber ring 11, thereby ensuring the sealing between the flange 6 and the second opening 10 after assembly. At the same time, the central support 12 and the stepped groove are installed together and mutually limit each other, effectively ensuring the accurate relative position of the sealing ring and the flange 6.

[0076] like Figure 3 , Figure 4 and Figure 5As shown, the sealing ring includes an annular central support 12 and a rubber ring 11. The inner wall of the second end of the flange 6 is provided with a stepped groove for assembling and positioning the central support 12. The outer diameter of the central support 12 is consistent with the inner diameter of the second opening 10. The rubber ring 11 is pressed between the end face of the second end of the flange 6 and the edge of the second opening 10, thereby ensuring the accurate installation position of the sealing ring and guaranteeing the sealing performance of the installation position.

[0077] In one possible implementation, a guide assembly is provided at the valve stem 5, and the guide assembly is fixed relative to the bracket 1 or the cavity to guide the valve stem 5 to move along a predetermined trajectory.

[0078] The valve stem 5 is fitted inside the sealing channel. By adding a guide component, the valve stem 5 is guided, which ensures that the valve stem 5 always moves along a preset trajectory. This also ensures that the valve plate 8 has a relatively fixed movement trajectory, avoiding contact and friction between the valve stem 5 and the inner wall of the welded bellows 4, as well as avoiding contact and friction between the valve plate 8 and the inner wall of the cavity.

[0079] In practical use, a guide frame can be installed inside the cavity to guide the movement direction of the valve stem 5, or a guide ring can be added inside the second opening 10 to guide the movement direction of the valve stem 5. Both methods can achieve the above-mentioned effects.

[0080] In one possible implementation, the drive assembly 2 is a cylinder, hydraulic cylinder, or electric telescopic rod with a guiding function, and the movement trajectory of the moving end of the drive assembly 2 is consistent with the axial direction of the valve stem 5.

[0081] The drive assembly 2 uses a cylinder, hydraulic cylinder or electric telescopic rod with built-in guiding function. When it drives the valve stem 5 to move, it can meet the guiding requirements of the valve stem 5, so that the valve stem 5 can move according to a preset trajectory. The preset trajectory is preferably a straight line that overlaps with the axis of the valve stem 5.

[0082] In practical use, the function of the drive component 2 is to drive the valve stem 5 to move linearly along its own axis. Therefore, any device capable of linear motion drive can be used as the drive component 2. Cylinders, hydraulic cylinders or electric telescopic rods are preferred because they have a relatively stable motion trajectory and a fixed stroke distance when moving, which is suitable for precisely controlling the motion trajectory and stroke distance of the valve stem 5 and the valve plate 8.

[0083] In one possible implementation, the bracket 1 is a hollow bracket, and the bracket 1 fixes the fixed end of the drive component 2 to the cavity.

[0084] By using a hollow bracket 1, the weight of the valve mechanism is further reduced, and the relative positional relationship between the drive component 2 and the cavity is effectively ensured.

[0085] In practical applications, the use of hollow brackets can significantly reduce the weight of the valve mechanism, thus meeting the lightweight requirements of semiconductor equipment when the valve mechanism is applied to semiconductor equipment.

[0086] In some application scenarios, the fixed end of the drive component 2 can be directly fixed to the cavity, such as fixing the cylinder body of the cylinder or oil cylinder directly to the cavity, which can achieve the same effect.

[0087] Example 2

[0088] Based on the above embodiments, this embodiment provides a semiconductor device, including a valve mechanism and a cavity for sealing as described above, wherein the cavity is connected to a vacuum channel or a vacuum pump through a first opening 9.

[0089] The valve mechanism described above is used to seal the first opening 9 of the cavity, which helps to achieve the overall weight reduction of the semiconductor device. At the same time, during use, by connecting a vacuum channel or vacuum pump at the first opening 9, it is ensured that the cavity is always in a vacuum state.

[0090] It is worth noting that the connection between the first opening 9 and the vacuum channel or vacuum pump also needs to be sealed to avoid leakage at the connection point.

[0091] Example 3

[0092] Based on the above embodiments, this embodiment provides a semiconductor system, including the aforementioned semiconductor device and a vacuum channel or vacuum pump.

[0093] By using the aforementioned semiconductor equipment, combined with a vacuum channel and a vacuum pump, a continuous vacuum inside the cavity and overall lightweight design can be achieved.

[0094] Among them, the vacuum pump is preferably a molecular pump or a mechanical pump, which can continuously provide negative pressure, and thus provide negative pressure to the cavity when the first opening 9 is turned on.

[0095] The above-described preferred embodiments have further detailed the purpose, technical solution, and advantages of this utility model. It should be understood that the above description is only a preferred embodiment of this utility model and is not intended to limit this utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A valve mechanism for sealing, characterized in that, Used to seal the cavity of a semiconductor device; the cavity has a first opening (9) at the bottom and a second opening (10) at the top. The valve mechanism includes: A valve plate (8) is located inside the cavity and is used to open or seal the first opening (9). A valve stem (5), at least a portion of which passes through the second opening (10), and the portion of the valve stem (5) located within the cavity is connected to the valve plate (8); A sealing assembly for sealing the gap between the valve stem (5) and the second opening (10); The drive assembly (2) is connected to the portion of the valve stem (5) located outside the cavity, and is used to drive the valve stem (5) to move the valve plate (8) away from or near the first opening (9) to open or seal the first opening (9). A bracket (1) is used to fix the drive assembly (2) to the cavity.

2. The valve mechanism for sealing according to claim 1, characterized in that, The sealing assembly includes a sealing channel assembly, which can be compressed or stretched along the extension direction of the channel, and the sealing channel assembly has a sealing channel inside. The valve stem (5) passes through the sealing channel, and one end of the valve stem (5) outside the cavity is fixedly connected to the first end of the sealing channel assembly. The first end of the sealing channel assembly is sealed, and the second end of the sealing channel assembly is sealed to the second opening (10).

3. The valve mechanism for sealing according to claim 2, characterized in that, The sealing channel assembly is a welded bellows (4). The first end of the welded bellows (4) is sealed and connected to the driving end of the driving assembly (2) through a connector (3). The second end of the welded bellows (4) is sealed to the second opening (10) through a flange (6).

4. The valve mechanism for sealing according to claim 3, characterized in that, The first end face of the flange (6) is sealed to the second end of the welded bellows (4). The second end of the flange (6) is pressed against the outer wall surface of the cavity outside the second opening (10) by a clamping ring (7). A sealing ring is provided between the second end face of the flange (6) and the outer wall surface of the cavity.

5. The valve mechanism for sealing according to claim 4, characterized in that, The sealing ring includes an annular central support (12) and a rubber ring (11), and the rubber ring (11) is fixedly sleeved on the outer annular wall surface of the central support (12); The inner wall of the second end of the flange (6) is provided with a stepped groove, and the central support (12) is snapped into the stepped groove; The rubber ring (11) is pressed between the second end face of the flange (6) and the outer wall surface of the cavity outside the second opening (10).

6. The valve mechanism for sealing according to any one of claims 1-5, characterized in that, A guide assembly is provided at the valve stem (5), and the guide assembly is fixed relative to the bracket (1) or the cavity to guide the valve stem (5) to move along a predetermined trajectory.

7. The valve mechanism for sealing according to any one of claims 1-5, characterized in that, The drive assembly (2) is a cylinder, oil cylinder or electric telescopic rod with guiding function, and the movement trajectory of the moving end of the drive assembly (2) is consistent with the axial direction of the valve stem (5).

8. The valve mechanism for sealing according to any one of claims 1-5, characterized in that, The bracket (1) is a hollow bracket, and the bracket (1) fixes the fixed end of the drive component (2) to the cavity.

9. A semiconductor device, characterized in that, Includes a valve mechanism for sealing as described in any one of claims 1-8 and the cavity, the cavity being connected to a vacuum channel or a vacuum pump through the first opening (9).

10. A semiconductor system, characterized in that, Includes the semiconductor device of claim 9 and the vacuum channel or the vacuum pump.

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