Photomask box storage device

Abstract

The utility model relates to a photomask box storage device which comprises a photomask box carrying device, a storage device, a photomask storage area, a photomask box storage area, a photomask storage box, a light transmitting part, a fan filtering device, a photomask box uncovering device, a photomask carrying device, a photomask cleaning channel, a photomask sensing element and a photomask box sensing element. Through the photomask box carrying device and the photomask carrying device, after a cover body of a photomask box is opened by the photomask box uncovering device, the photomask and the photomask box can be respectively stored in a photomask storage box and a photomask box storage area, and through a photomask sensing element and a photomask box sensing element, the placement angles of the photomask and the photomask box can be corrected, so that the photomask and the photomask box can be conveniently carried out. And the photomask sensing element can be matched with the light transmitting part, so that the advantages that the number of the photomask storage boxes and whether the photomasks are stored or not can be known in the first time without additionally opening the photomask storage boxes, and the like are achieved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of technology field that can store photomask and photomask box respectively independently, specifically, the photomask box storage device of photomask state can be known inside under the state of not opening photomask storage box. BACKGROUND

[0002] In the process of semiconductor manufacturing, automated material handling system (AMHS) is used with isolated access standard mechanical interface (SMIF) equipment to maintain and transport wafers and photomasks during non-use, replacing traditional manual handling and reducing the cost of clean room equipment installation and maintenance, which can improve the cleanliness of wafers and photomasks and achieve ultra-high production yield. In recent years, AMHS and SMIF have been listed as standard equipment specifications for international semiconductor factories.

[0003] According to the above technical concept, in addition to exposure use, photomasks must be placed in a high cleanliness and better airtight carrier during transportation and storage, such as photomask storage box (Mask Package) and photomask transfer box (Reticle SMIF Pod, RSP), to ensure the high cleanliness of photomasks. Once the circuit pattern of the photomask is contaminated, a distorted image will be formed on the wafer during exposure, causing defects and defects in the wafer, reducing the production yield of the wafer. Therefore, photomask storage box is particularly important.

[0004] However, the above-mentioned photomask storage box has the following problems and shortcomings to be improved when used:

[0005] Generally, photomask storage boxes use single handling devices and single storage spaces for photomask storage box storage, but this storage method has its limitations and cannot improve storage capacity. If you want to improve storage capacity, you must enlarge the overall volume of the storage device, which is very space-consuming and has high cost. In addition, to check whether there is a photomask in the photomask storage box, the photomask storage box must be opened, which causes invisible time cost and reduces overall efficiency.

[0006] Therefore, how to solve the above common problems and shortcomings is the direction that the applicant and manufacturers in this industry want to improve. INVENTION CONTENTS

[0007] The utility model discloses a subject mainly purpose is to provide a kind of through mask box handling device and the independent operation of mask handling device, can be opened in mask box cover opening device after mask box cover opening, mask and mask box are stored in mask storage box and mask box storage area respectively, effectively the maximum storage capacity is maximized, and through the design of mask sensing element and mask box sensing element, the angle of placement of mask and mask box can be adjusted and corrected, to avoid the problem of impact caused by angle of placement error occurs, in addition, mask sensing element can also be matched with light-transmitting part to determine whether there is mask storage in mask storage box, and the number of mask storage box is determined, so that the number of mask storage box and whether there is mask storage can be known in the first time without opening mask storage box additionally, and other advantages are achieved.

[0008] The utility model discloses a structure that can achieve the above-mentioned main purpose, including mask box handling device, storage device, mask storage area, mask box storage area, several mask storage boxes, several light-transmitting parts, fan filter device, at least one mask box cover opening device, mask handling device, several mask clean channels, several mask sensing elements and mask box sensing elements, the mask box handling device is handled mask box to temporary storage platform or mask box cover opening device, the mask box cover opening device is opened to the mask box, and the mask is sent to the mask storage box in mask storage area by mask handling device, and the mask box is sent to the mask box storage area by mask box handling device, the light-transmitting part is matched with mask sensing element, and whether there is mask storage in mask storage box and the number of mask storage box can be confirmed, and the temporary storage clean channel and mask clean channel can stabilize temperature and humidity in the space of temporary storage platform and mask storage box, the mask sensing element can also sense the storage angle of mask, and the fine adjustment of angle of placement is carried out by mask handling device, and the mask box sensing element can also sense the storage angle of mask box, and the fine adjustment of angle of placement is carried out by mask box handling device, in addition, the air circulation purification of storage device and mask box cover opening device and other parts can be carried out by fan filter device.

[0009] Through the above-mentioned technology, the general mask storage box can be stored in single handling device and single storage space, but the storage capacity of this kind of storage has its limit, and the overall volume of storage device must be enlarged to improve the storage capacity, which occupies a lot of space and has high cost, and besides, when it is generally desired to confirm whether there is mask in mask storage box, the mask storage box must be opened, which causes invisible time cost in the process, breaks through the problem of reducing overall efficiency, and achieves the above-mentioned advantages of the utility model. ACCURACY OF DRAWINGS

[0010] Figure 1 It is the perspective view of the preferred embodiment of the utility model.

[0011] Figure 2 A planar perspective view of the mask box carrying device of the preferred embodiment of the present utility model.

[0012] Figure 3 A schematic view of the mask storage box of the preferred embodiment of the present utility model.

[0013] Figure 4 An A-A line cross-sectional view of the third drawing of the preferred embodiment of the present utility model.

[0014] Figure 5 A three-dimensional perspective view of the mask cover opening device of the preferred embodiment of the present utility model.

[0015] Figure 6 A schematic view of the mask rotating device of the preferred embodiment of the present utility model.

[0016] Figure 7 A schematic view of the mask carrying device of the preferred embodiment of the present utility model.

[0017] Figure 8 A schematic view of the mask temporary storage platform of the preferred embodiment of the present utility model.

[0018] Figure 9 A schematic view of the mask box carrying of the preferred embodiment of the present utility model.

[0019] Figure 10 A schematic view of the mask box carrying of the preferred embodiment of the present utility model. Figure 1 .

[0020] Figure 11 A clean schematic view of the temporary storage platform of the preferred embodiment of the present utility model.

[0021] Figure 12 A schematic view of the mask box carrying of the preferred embodiment of the present utility model. Figure 2 .

[0022] Figure 13 A schematic view of the mask box cover opening of the preferred embodiment of the present utility model. Figure 1 .

[0023] Figure 14 A schematic view of the mask box cover opening of the preferred embodiment of the present utility model. Figure 2 .

[0024] Figure 15 A schematic view of the mask rotating of the preferred embodiment of the present utility model.

[0025] Figure 16 A schematic view of the scanning of the preferred embodiment of the present utility model.

[0026] Figure 17The utility model discloses a light mask storage box of preferable embodiment of the utility model is opened the diagram.

[0027] Figure 18 The utility model discloses a light mask storage diagram of preferable embodiment of the utility model is opened.

[0028] Figure 19 The utility model discloses a light mask clean passageway operation diagram of preferable embodiment of the utility model.

[0029] Figure 20 The utility model discloses a light mask storage diagram of preferable embodiment of the utility model.

[0030] Figure 21 The utility model discloses a read module diagram of still another preferable embodiment of the utility model.

[0031] Figure 22 The utility model discloses a light mask butt joint part diagram of still another preferable embodiment of the utility model.

[0032] Figure 23 The utility model discloses a rotating device diagram of still another preferable embodiment of the utility model.

[0033] Figure 24 The utility model discloses a manual loading platform diagram of another preferable embodiment of the utility model.

[0034] Figure 25 The utility model discloses a stereoscopic perspective view of still another preferable embodiment of the utility model.

[0035] Reference signs:

[0036] Light mask box carrying device 1

[0037] Light mask box sensing element 11

[0038] Light mask box carrying track 12

[0039] Rotating mechanism 13

[0040] Supporting arm 14

[0041] Motor 141

[0042] Carrying arm 15

[0043] Carrying arm motor 151

[0044] Carrying arm pulley 152

[0045] Carrying arm belt 153

[0046] Arm 154

[0047] Storage device 2

[0048] Reticle storage area 21

[0049] Reticle pod storage area 22

[0050] Fan filter unit 23

[0051] Fan module 231

[0052] Chemical filter 232

[0053] Temporary stage 3

[0054] Temporary clean aisle 31

[0055] Reticle pod opening device 4

[0056] Opening stage 41

[0057] Opening lift 42

[0058] Opening lift stage 421

[0059] Reticle clamping mechanism 422

[0060] Reticle rotating device 5

[0061] Rotating stage 51

[0062] Rotating element 52

[0063] Interference mechanism 53

[0064] Reticle handling device 6

[0065] Reticle sensing element 61

[0066] Reticle handling track 62

[0067] Reticle handling stage 63

[0068] Reticle handling stage motor 631

[0069] Reticle handling element 64

[0070] Support element 65

[0071] Cranage stage 7

[0072] Manual loading stage 8

[0073] cleaning device …… 9

[0074] storage box unit …… A

[0075] photomask storage box …… A1

[0076] light-transmitting part …… A11

[0077] photomask cleaning passage …… A12

[0078] photomask docking part …… A13

[0079] photomask box …… C

[0080] cover …… C1

[0081] bottom box …… C2

[0082] reading module …… C3

[0083] photomask …… D

[0084] storage box rotating device …… E

[0085] photomask box storage area rotating device …… F DETAILED DESCRIPTION

[0086] Please refer to Figures 1 to 8 the perspective view of the preferred embodiment of the present application to the photomask temporary storage platform schematic diagram, it can be clearly seen from the figure that the present application comprises:

[0087] photomask box carrying device 1;

[0088] storage device 2 is arranged on one side of the photomask box carrying device 1, comprising a photomask storage area 21 and a photomask box storage area 22 arranged on one side of the photomask storage area 21, a plurality of photomask storage boxes A1 are arranged in the photomask storage area 21, and light-transmitting parts A11 are arranged on the left and right sides of each photomask storage box A1;

[0089] fan filter device 23 is arranged above the storage device 2;

[0090] at least one temporary storage platform 3 is arranged on the side of the storage device 2 different from the fan filter device 23, so as to receive at least one photomask box carried by the photomask box carrying device 1 and intended to be stored for placement;

[0091] At least one mask box opening device 4 is arranged on the side of the storage device 2 opposite the fan filter unit 23, to receive at least one mask box carried by the mask box handling device 1 and to open the cover of the mask box. In this embodiment, two mask box opening devices 4 are provided. If only one mask box opening device 4 is needed, one of the two mask box opening devices 4 can be removed to form a single mask box opening device 4.

[0092] A mask rotating device 5 is arranged on the side of the mask box opening device 4, to adjust the storage direction of the mask.

[0093] A mask handling device 6 is arranged on the side of the storage device 2, to handle and store the mask on the mask rotating device 5.

[0094] A temporary storage clean aisle 31 is arranged on the side of the temporary storage platform 3, to control the temperature and humidity of the temporary storage platform 3 by a clean device 9.

[0095] A plurality of mask clean aisles A12 are arranged in the mask storage box A1, to control the temperature and humidity of the mask storage box A1 by a clean device 9.

[0096] A plurality of mask sensing elements 61 are connected to the mask handling device 6, to sense the storage angle of the mask and to fine-tune the storage angle by the mask handling device 6. The mask sensing elements 61 can also determine whether the mask storage box A1 is empty and the number of mask storage boxes A1 by the light transmission part A11.

[0097] A mask box sensing element 11 is connected to the mask box handling device 1, to sense the storage angle of the mask box and to fine-tune the storage angle by the mask box handling device 1.

[0098] The mask box handling device 1 is arranged on the side of the crane platform 7.

[0099] The mask sensing elements 61 can sense whether the mask is dropped and the position of the mask, and the mask box sensing elements 11 can sense whether the mask box is dropped and the position of the mask box.

[0100] The mask handling device 6 has a mask handling track 62, a mask handling stage 63 movably arranged on the mask handling track 62, a mask handling element 64 connected to the mask handling stage 63, and a support element 65 arranged on the side of the mask handling stage 63 to support the mask storage box A1. The mask handling element 64 and the support element 65 operate independently.

[0101] The mask handling stage 63 is vertically movable on the mask handling track 62 by the mask handling stage motor 631 and the gear rack.

[0102] The mask handling element 64 is a telescopic mask handling element 64, and the front end of the supporting element 65 is provided with a mask sensing element 61.

[0103] The mask box handling device 1 has a vertical mask box handling track 12, a supporting arm 14 movably arranged on the mask box handling track 12 and having a rotating mechanism 13, and a handling arm 15 movably connected with the supporting arm 14, so that the handling arm 15 is vertically moved by the supporting arm 14.

[0104] The supporting arm 14 is vertically lifted and lowered by a motor 141 driving a gear, so that the gear is connected with the rack to vertically lift and lower the supporting arm 14.

[0105] The rotating mechanism 13 drives the handling arm 15 to rotate by a motor.

[0106] The handling arm 15 includes a handling arm motor 151, a handling arm pulley 152 connected with the handling arm motor 151, and a handling arm belt 153 connected with the handling arm pulley 152, and the handling arm belt 153 is combined with the arm 154.

[0107] The light-transmitting portion A11 is a through hole.

[0108] The fan filter device 23 includes a fan module 231 and a chemical filter screen 232 arranged on one side of the fan module 231. The fan module 231 includes a fan and a motor driving the fan to rotate. When the motor receives external power, the fan is driven to rotate.

[0109] The temporary storage platform 3 is provided in multiple embodiments. If only one temporary storage platform 3 is required, the other temporary storage platforms 3 can be removed to form a single temporary storage platform 3.

[0110] The mask box cover opening device 4 includes a cover opening platform 41 on which the mask box is placed, and a cover opening lifting device 42 arranged below the cover opening platform 41 to open the cover of the mask box. The cover opening lifting device 42 includes a cover opening lifting platform 421 and a mask clamping mechanism 422 arranged on one side of the cover opening lifting platform 421.

[0111] The mask rotating device 5 includes a rotating platform 51 on which the mask box is placed, a rotating element 52 connected with the rotating platform 51 to drive the rotating platform 51 to rotate, and a plurality of abutting mechanisms 53 arranged on one side of the rotating platform 51. The rotating element 52 can be one of a rotary air cylinder, a rotary motor, or other rotating mechanisms.

[0112] The cleaning device 9 can be a system for conveying dry air or a nitrogen blowing system for providing inert gas (nitrogen N2), and can effectively inhibit internal dust and pollution and reduce relative humidity.

[0113] The mask sensing element 61 and the mask box sensing element 11 can be one of a photoelectric sensor or an infrared sensor.

[0114] Please refer to the accompanying drawings Figures 1 to 20 for the perspective view to the mask box storage diagram of the preferred embodiment of the utility model, as shown in the figure, so that when you want to store the mask box, the following steps can be performed:

[0115] (A), the mask box C is carried to the overhead crane platform 7 by the overhead crane, and then is handled by the mask box handling device 1 (as shown in Figure 9 ) ;

[0116] (B), the support arm 14 can move vertically on the mask box handling rail 12 by using the motor 141, and when the support arm 14 moves to the above-mentioned specific position, the handling arm pulley 152 is driven by the handling arm motor 151, so that the handling arm belt 153 runs to drive the arm 154 to extend out and grab and fix the mask box C, when the grabbing is stable, the arm 154 is retracted to the original position by the handling arm belt 153, and is rotated to the correct direction by the rotating mechanism 13;

[0117] (C), the mask box C is placed on the temporary storage platform 3 by the handling arm 15, if it is the first group of mask boxes C, this step is ignored, and the mask box C is directly moved to the opening platform 41, and the second mask box C to be opened is placed on the temporary storage platform 3 in advance, and waits for the previous mask box C to be processed, and then the mask box C is moved to the opening platform 41 by the handling arm 15 to perform the opening operation (as shown in Figure 1 、 Figure 5 、 Figure 10 ) ;

[0118] (D), the mask box C is moved to the opening platform 41 of the mask box opening device 4 by the handling arm 15 using the mask box handling rail 12, and is placed after being rotated to the correct position by the rotating mechanism 13 if rotation is required, and during the carrying process of the mask box handling device 1, whether the mask box C falls during the carrying process can be sensed by the mask box sensing element 11, and the carrying operation can be stopped immediately when the condition occurs (as shown in Figure 2 、 Figure 5 、 Figure 12 ) ;

[0119] (E) The photomask box C is moved downwards by the lifting platform 421. At this time, because the area of ​​the cover C1 is larger than that of the bottom box C2 of the photomask box C, the edge of the cover C1 will abut against the lifting platform 41. The bottom box C2 will be supported on the lifting platform 421 so that the bottom box C2 will be separated from the cover C1 by the movement of the lifting platform 421, forming an opening action. Then, the photomask D is clamped and fixed by the photomask clamping mechanism 422. Then, the lifting platform 421 moves downwards again to separate the photomask D from the lifting platform 421. Finally, the photomask transport element 64 receives and transports it from the photomask clamping mechanism 422 (e.g., Figure 5 , Figure 13 , Figure 14 As shown), the photomask D can be placed on the photomask rotation device 5 to adjust its desired orientation. If the original orientation is correct, the photomask transport element 64 will not place the photomask D on the photomask rotation device 5. In detail regarding the rotation operation, when rotation is required, the photomask transport element 64 can transport the photomask D to the rotation platform 51, and the rotation element 52 can drive the rotation platform 51 to rotate, thus completing the rotation of the photomask D. Afterwards, the abutment mechanism 53 provides lateral abutment to stabilize the photomask D (as shown). Figure 15 (as shown);

[0120] (F) Then, the photomask transport element 64 performs a gripping and fixing action on the photomask D on the rotating platform 51;

[0121] (G) The photomask transport element 64 then moves the photomask D to one side of the photomask storage area 21. During the transport, it moves via the photomask transport track 62. At this time, before the photomask transport element 64 moves, the photomask sensing element 61 first senses and confirms which photomask storage box A1 does not contain a photomask D. This confirmation method is used in conjunction with the light-transmitting part A11 for confirmation by infrared beam matching. If it is blocked, it means that the photomask storage box A1 contains a photomask D; if it is not blocked, it means that there is no photomask D. After the confirmation is completed, the photomask transport stage 63 is driven by the photomask transport stage motor 631 to... The photomask transport platform 63 can move along the photomask transport track 62 to the front of the empty photomask storage box A1. Then, the support element 65 lifts the photomask storage box A1 in the photomask storage area 21 to create space for the photomask D on the photomask transport element 64 to be stored. Then, the photomask sensing element 61 first senses whether the storage angle of the photomask D is skewed. If skew is found, the photomask transport element 64 can fine-tune the placement angle. When the angle is adjusted to the optimal state, the photomask transport element 64 extends into the aforementioned space to store the photomask D (e.g., ...). Figure 16 , Figure 17 , Figure 18 (As shown).

[0122] (H) The handling arm 15 uses the photomask box handling track 12 to transfer the photomask box C to the photomask box storage area 22 for storage (e.g., ...). Figure 20 (as shown);

[0123] (I) During operation, the fan module 231 in the fan filter device 23 continuously draws in external air, which is then filtered by the chemical filter 232 before being circulated inside. Furthermore, the temperature and humidity inside the photomask storage box A1 can be controlled via the photomask clean channel A12, ensuring the photomask D storage environment meets the highest standards. Meanwhile, the temporary storage clean channel 31 on one side of the temporary storage platform 3 can stabilize the temperature and humidity inside the photomask box C (e.g., ...). Figure 1 , Figure 11 , Figure 19 (As shown).

[0124] Please refer to Figure 21 The diagram shows a reading module of another preferred embodiment of the present invention. As can be clearly seen from the diagram, a reading module C3 is provided on the photomask box C. In this embodiment, a barcode is used as an example. The data in the reading module C3 is read by a reader. The data is a condition for the photomask box transport device 1 to transport the photomask box C to the temporary storage platform 3 or the photomask box opening device. In other words, the reading module C3 on the photomask box C is read by a reader. The reading module C3 stores relevant information about the photomask box C, including the storage direction and whether it can be directly sent to the photomask box opening device without going through the temporary storage platform 3. If the storage direction needs to be changed, the transport arm 15 rotates the photomask box C through the rotating mechanism 13. This achieves automatic change of direction or storage path as needed, which is very convenient.

[0125] Please refer to Figure 22 and Figure 23The diagram shows a schematic of the photomask docking portion and the rotating device in another preferred embodiment of the present invention. As can be clearly seen from the diagram, each photomask storage box A1 is provided with several photomask docking portions A13, allowing the photomask storage boxes A1 to be stacked and stored through the connection of the photomask docking portions A13. This ensures that the photomask storage boxes A1 can be placed more securely in a stacked manner, preventing problems such as tipping over or misalignment. In this embodiment, the photomask docking portion A13 is an example of a concave-convex interlocking mechanism. Furthermore, each photomask storage box A1 is stacked... After storage, storage box units A are formed. When multiple storage box units A1 are stacked to form multiple storage box units A, each storage box unit A is arranged in a ring. Each storage box unit A is rotated by the storage box rotation device E to facilitate storage or retrieval of the photomask transport device 6. In other words, when one row of stacked storage box units A is full of photomasks, the storage box rotation device E can be used to rotate all storage box units A at the same time, making it easy for the photomask transport device 6 to store or retrieve photomasks. In addition, a photomask box storage area rotation device F is provided on one side of the storage box rotation device E, which can rotate several photomask boxes C to make empty positions available for the storage positions of the photomask box transport device 1, facilitating placement.

[0126] Please refer to Figure 24 The figure shows a schematic diagram of a manual loading platform of another preferred embodiment of the present invention. As can be clearly seen from the figure, a manual loading platform 8 is provided on one side of the photomask box handling device 1. With the design of the manual loading platform 8, the photomask box can be manually loaded according to the site environment or the needs of the user, thus achieving the advantage of diversified operation and use.

[0127] Please refer to Figure 25 The figure shown is a perspective view of a more preferred embodiment of the present invention. As can be clearly seen from the figure, this embodiment is largely the same as the aforementioned embodiment. The main difference is that this embodiment does not have the temporary storage platform and photomask rotation device of the aforementioned embodiment. In other words, when this embodiment does not have the temporary storage platform and photomask rotation device, it does not affect the overall operation. After the photomask box transport device 1 picks up the photomask box from the overhead crane platform 7, it is directly sent to the photomask box opening device 4. After the photomask box is opened, the photomask is stored by the photomask transport device 6 and the photomask box is stored by the photomask box transport device 1.

[0128] Therefore, the key to improving commonly used technologies lies in the photomask storage device of this utility model:

[0129] First, the photomask box C can be quickly transported via the photomask box transport track 12, transport arm 15, and support arm 14 of the photomask box transport device 1, and the use of the track method makes the overall transport more stable and smooth.

[0130] Secondly, the upper and lower two-layer design of the photomask storage area 21 and the photomask box storage area 22 of the storage device 2 allows the photomask D and the photomask box C to be stored separately, effectively increasing the maximum storage capacity.

[0131] Third, the photomask storage boxes A1 are designed to maximize storage capacity through a circular arrangement and a stacked arrangement.

[0132] Fourth, through the design of the light-transmitting part A11, the photomask sensing element 61 can quickly detect from top to bottom or from bottom to top to confirm whether there is a shortage of photomask storage boxes A1. If the quantity is different from the original setting, it means that the photomask storage boxes A1 may be placed incorrectly. In this way, the correctness of the placement of the photomask storage boxes A1 can be quickly determined without manual confirmation, which is very convenient and fast.

[0133] Fifth, thanks to the design of the light-transmitting section A11, it is possible to quickly confirm whether there is a photomask D in the photomask storage box A1 without having to open it separately, which is very convenient overall.

[0134] Sixth, thanks to the design of the chemical filter 232 in the fan filter device 23, the internal environment of this project can reach the highest level.

[0135] Seventh, through the design of the temporary storage platform 3, other photomask boxes C can be continuously loaded while waiting for the cover to be opened, shortening the overall operation time and reducing waiting time.

[0136] Eighth, through the combination design of the rotating platform 51 and rotating element 52 of the photomask rotating device 5, the storage direction of the photomask D can be changed according to the needs, achieving the advantage of full automation.

[0137] Ninth, the design of the temporary clean passage 31 can effectively suppress internal dust and pollution, and reduce the relative humidity to 5%.

[0138] Tenth, thanks to the design of the photomask clean channel A12, the temperature and humidity inside the photomask storage box A1 can be effectively regulated to the optimal state.

[0139] Eleventh, through the combination design of photomask sensing element 61 and photomask box sensing element 11, the storage angle of photomask D can be sensed and corrected in real time, effectively avoiding damage to photomask D during the transportation process due to incorrect angle, resulting in huge losses.

[0140] Twelfth, through the coordinated operation of the photomask transport track 62, photomask transport platform 63, support element 65, and photomask transport element 64, fast and stable photomask D transport can be achieved.

[0141] Thirteenth, the photomask box C can be moved quickly and stably by means of the photomask box transport track 12, transport arm 15, and support arm 14.

[0142] Fourteenth, the combination of the lid opening platform 41 and the lid opening lifting device 42 achieves the advantage of quickly opening the lid.

[0143] Fifteenth, the design of the reader and the reading module C3 allows for automatic changes in direction or storage path as needed, which is very convenient.

[0144] Sixteenth, thanks to the design of the photomask docking part A13, the photomask storage box A1 can be placed more securely in a stacked manner without problems such as tipping over or misplacement.

[0145] Seventeenth, by independently setting the storage box rotation device E and the photomask storage area rotation device F, the photomask storage box A1 and the photomask box C in the photomask storage area 22 can rotate independently or move simultaneously, thereby shortening the overall storage time.

[0146] Eighteenth, thanks to the design of the manual loading platform 8, the photomask box C can be manually input according to the site environment or user needs, achieving the advantage of diversified operation and use.

[0147] Nineteenth, when there are two photomask box opening devices 4, the efficiency of storing photomask D can be effectively improved, including the efficiency of taking out photomask D, thus achieving a multitasking effect.

[0148] However, while various embodiments of the present invention have been shown and illustrated herein, these embodiments are provided by way of example only, and any operational theories or benefits provided herein are intended only to illustrate the present invention; such theories and explanations do not bind or limit the scope of the patent application relating to organizational restructuring achieved by practicing the present invention. It should be understood that any variations, alterations, or alternatives conceived without departing from the embodiments of the present invention fall within the scope of patent protection of the present invention.

Claims

1. A reticle pod storage device, comprising: The utility model relates to a photomask box conveying device, a storage device arranged on one side of the photomask box conveying device, a photomask storage area and a photomask box storage area arranged on one side of the photomask storage area, a plurality of photomask storage boxes arranged in the photomask storage area, and a light-transmitting part arranged on the left and right sides of each photomask storage box. A fan filter device arranged above the storage device. At least one photomask box opening device arranged on a side of the storage device different from the fan filter device to receive at least one photomask box carried by the photomask box conveying device and to open the cover of the photomask box. A photomask conveying device arranged on one side of the storage device and capable of taking photomasks. A plurality of photomask cleaning channels respectively connected to each photomask storage box to control the temperature and humidity in the photomask storage box. A plurality of photomask sensing elements connected to the photomask conveying device to sense the storage angle of the photomask and to fine-tune the storage angle by the photomask conveying device, and the photomask sensing elements can determine whether there is a photomask in the photomask storage box through the light-transmitting part. A photomask box sensing element connected to the photomask box conveying device to sense the storage angle of the photomask box and to fine-tune the storage angle by the photomask box conveying device. The photomask box is provided with a reading module. Each photomask storage box is provided with a plurality of photomask docking parts to stack and store each photomask storage box through the connection of each photomask docking part. Each photomask storage box forms a storage box unit after stacking and storing, and each storage box unit is arranged in a circular arrangement when a plurality of storage box units are formed by stacking each photomask storage box.

2. The pod storage apparatus of claim 1, wherein A crown platform is arranged on one side of the photomask box conveying device.

3. The pod storage apparatus of claim 1, wherein A manual loading platform is arranged on one side of the photomask box conveying device.

4. The pod storage apparatus of claim 3, wherein The photomask sensing elements can sense whether the photomask falls and the position of the photomask, and the photomask box sensing elements can sense whether the photomask box falls and the position of the photomask box.

5. The pod storage apparatus of claim 1, wherein The photomask conveying device has a photomask conveying track, a photomask conveying platform movably arranged on the photomask conveying track, a photomask conveying element connected to the photomask conveying platform, and a supporting element arranged on one side of the photomask conveying platform to support each photomask storage box.

6. The pod storage apparatus of claim 1, wherein, The photomask box conveying device has a vertical photomask box conveying track, a supporting arm movably arranged on the photomask box conveying track and having a rotating mechanism, and a conveying arm movably connected to the supporting arm to move vertically by the supporting arm.

7. The pod storage apparatus of claim 1, wherein Each photomask storage box forms a storage box unit after stacking and storing, and each storage box unit is arranged in a circular arrangement when a plurality of storage box units are formed by stacking each photomask storage box.

8. The pod storage apparatus of claim 1, wherein, A photomask box storage area rotating device is arranged on one side of the photomask box rotating device.

9. The pod storage apparatus of claim 1, wherein, ​ 10. The pod storage apparatus of claim 1, wherein, ​ 11. The pod storage apparatus of claim 1, wherein At least one temporary storage platform is arranged on the side of the storage device opposite to the fan filter unit, for receiving at least one reticle pod carried by the reticle pod handling device and placing the reticle pod on the temporary storage platform. A temporary clean aisle is arranged on the side of the temporary storage platform, for controlling the temperature and humidity of the temporary storage platform.

12. The pod storage apparatus of claim 1, wherein, A reticle rotating device is arranged on the side of the reticle pod opening device, for adjusting the storage direction of the reticle.

Images