Transmission displacement table

Abstract

The utility model belongs to the technical field of automation equipment, and discloses a transmission displacement table which comprises a fixed seat, a movable seat, a lead screw stepping motor and a crossed roller guide rail. Wherein the fixed seat is provided with a containing cavity, the movable seat is arranged on the side, where an opening is formed, of the containing cavity and used for bearing a to-be-transported piece, the lead screw stepping motor is arranged in the containing cavity, and the output end of the lead screw stepping motor is connected with the movable seat and can drive the movable seat to reciprocate between a first station and a second station; the crossed roller guide rail is arranged in the containing cavity and arranged side by side with the lead screw stepping motor, and the movable base and the fixed base are in sliding connection through the crossed roller guide rail. By adopting the lead screw stepping motor and the crossed roller guide rail, the whole structure is very compact while the transmission displacement table can output large torque, and therefore the use requirement for outputting the large torque in a narrow space can be met.

Description

TECHNICAL FIELD

[0001] The utility model relates to automatic equipment technical field especially relates to a kind of transmission displacement platform. BACKGROUND

[0002] In the semiconductor manufacturing process, wafers need to be accurately positioned, handled and transferred in multiple process steps. As a key equipment component, wafer transfer table is usually composed of precise drive system, sensor and control system, which can realize high-precision positioning and transmission of wafers in different process steps.

[0003] In the prior art, the wafer transfer table usually uses a voice coil motor to provide power, making the wafer transfer table have high-precision positioning accuracy and fast response characteristics. However, in some semiconductor manufacturing and optical element processing, due to the high process requirements, the transfer table needs to provide sufficient driving force in a limited space to ensure that the tool or workpiece maintains high-precision position control during processing. At this time, the transfer table needs to have the characteristics of small size and large torque output. However, due to the small output torque of the voice coil motor, and the large space occupied by the sliding assembly in the existing wafer transfer table, the overall size of the wafer transfer table is large, which leads to the fact that the existing wafer transfer table cannot meet the use demand of outputting large torque in a narrow space.

[0004] Therefore, it is urgent to design a transmission displacement platform that can solve the above technical problems. INVENTION CONTENTS

[0005] The purpose of the utility model is to provide a kind of transmission displacement platform, the structure of the transmission displacement platform is compact, and output torque is large, which can meet the use demand of outputting large torque in a narrow space.

[0006] To achieve this purpose, the utility model adopts the following technical solutions:

[0007] A kind of transmission displacement platform, comprising: fixed seat, the fixed seat is equipped with accommodating cavity;

[0008] Moving seat, the moving seat is formed on the side of the opening of the accommodating cavity, and the moving seat is used to carry the transported piece;

[0009] Lead screw stepper motor, the lead screw stepper motor is arranged in the accommodating cavity, the output end of the lead screw stepper motor is connected with the moving seat, and the moving seat can be reciprocated between the first station and the second station;

[0010] Cross roller guide, the cross roller guide is arranged in the accommodating cavity, and is arranged side by side with the lead screw stepper motor, and the moving seat is slidably connected with the fixed seat through the cross roller guide.

[0011] Optionally, the cross roller guide comprises a middle guide installed on the moving base and single guides installed on the fixed base, and the middle guide slides between the single guides.

[0012] Optionally, the transmission displacement table further comprises a first connecting plate comprising a horizontal part and a vertical part connected perpendicularly, the horizontal part is used for connecting the output end of the lead screw stepper motor with the moving base, the moving base is provided with a receiving groove for accommodating the horizontal part, and the middle guide is installed on the vertical part.

[0013] Optionally, the transmission displacement table further comprises an optoelectronic assembly used for emitting a position signal when the moving base is located at the first station or the second station.

[0014] Optionally, the optoelectronic assembly is arranged in the receiving cavity, and the optoelectronic assembly and the cross roller guide are arranged on different sides of the lead screw stepper motor.

[0015] Optionally, a limiting structure is arranged between the moving base and the fixed base, and the limiting structure is used for limiting the movement of the moving base between the first station and the second station.

[0016] Optionally, the limiting structure comprises a limiting groove and a limiting block, one of the limiting groove and the limiting block is arranged on the fixed base, and the other is arranged on the moving base, and the limiting block is arranged to slide in the limiting groove.

[0017] Optionally, the inner wall of the limiting groove is further provided with a buffer.

[0018] Optionally, the fixed base is further provided with a dust suction connector, the dust suction connector is used for connecting with an external dust suction equipment, and the dust suction connector can suck impurities in the receiving cavity.

[0019] Optionally, at least one of the moving base and the fixed base is a structural member made of an aviation aluminum alloy material.

[0020] The beneficial effects of the utility model are as follows:

[0021] The transmission displacement table provided by the utility model adopts a lead screw stepper motor as a power device of the transmission displacement table, and the moving base and the fixed base are connected through a cross roller guide, so that the overall size of the transmission displacement table is small while the precision and stability of the transmission displacement table are ensured, and the use requirement of a large output torque in a narrow space can be met. BRIEF DESCRIPTION OF DRAWINGS

[0022] Figure 1is a structural schematic view of the transmission displacement table provided by the embodiment of the utility model;

[0023] Figure 2 is the internal structure plan view of the transmission displacement table provided by the embodiment of the utility model;

[0024] Figure 3 is the internal structure schematic view of the transmission displacement table provided by the embodiment of the utility model;

[0025] Figure 4 is the internal structure schematic view of the transmission displacement table provided by the embodiment of the utility model from another perspective;

[0026] Figure 5 is the front view of the transmission displacement table provided by the embodiment of the utility model;

[0027] Figure 6 is the internal structure schematic view of the transmission displacement table provided by the embodiment of the utility model; Figure 5 is the sectional view of A-A in the middle;

[0028] Figure 7 is the structural schematic view of the moving seat provided by the embodiment of the utility model;

[0029] Figure 8 is the structural schematic view of the first side plate provided by the embodiment of the utility model.

[0030] In the figure:

[0031] 1, fixed seat; 11, bottom plate; 12, first side plate; 13, second side plate; 14, third side plate; 15, fourth side plate;

[0032] 2, moving seat; 21, accommodating groove;

[0033] 3, screw stepper motor; 4, mounting plate; 5, first connecting plate; 6, cross roller guide; 61, intermediate guide; 62, single guide;

[0034] 7, photoelectric assembly; 71, second connecting plate; 72, trigger piece; 73, fixed rod; 74, photoelectric sensor;

[0035] 8, limiting structure; 81, limiting groove; 82, limiting block; 83, buffer;

[0036] 9, dust suction connector; 10, wire outlet interface. DETAILED DESCRIPTION

[0037] The utility model will be further described in detail below in combination with the drawings and embodiments. It can be understood that the specific embodiments described herein are only used to explain the utility model and not to limit the utility model. In addition, it should be noted that only the parts related to the utility model are shown in the drawings for ease of description, not all the structures.

[0038] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0039] In the utility model, unless otherwise explicitly specified and limited, the first feature "on" or "below" the second feature can include that the first and second features are in direct contact, or the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0040] In the description of the embodiment, the terms "up", "down", "right", etc. orientation or position relationship is based on the orientation or position relationship shown in the drawings, only for the convenience of description and simplification of operation, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second" are only used to distinguish in the description, and have no special meaning.

[0041] As Figure 1 As shown in the figure, the embodiment provides a transmission displacement table, which comprises a fixed seat 1, a moving seat 2, a screw stepper motor 3 and a cross roller guide 6, wherein the fixed seat 1 is provided with a containing cavity, the moving seat 2 is arranged on the side forming the opening of the containing cavity, the moving seat 2 is used for carrying the piece to be transported, the screw stepper motor 3 is arranged in the containing cavity, the output end of the screw stepper motor 3 is connected with the moving seat 2 and can drive the moving seat 2 to reciprocate between the first station and the second station, the cross roller guide 6 is arranged in the containing cavity and is arranged side by side with the screw stepper motor 3, and the moving seat 2 is slidably connected with the fixed seat 1 through the cross roller guide 6.

[0042] By adopting the screw stepper motor 3 as the power device of the transmission displacement table, the screw stepper motor 3 is a motor integrating the stepper motor and the screw, which omits the assembly step of separately assembling the screw and the stepper motor, so that the overall structure is more compact, small in size and convenient to install, and compared with the voice coil motor, the screw stepper motor 3 can not only output greater torque, but also can realize precise linear motion control. Secondly, the movable seat 2 and the fixed seat 1 are connected through the cross roller guide 6, and the cross roller guide 6 has compact structure, high moving precision and large carrying capacity. Therefore, by adopting the screw stepper motor 3 and the cross roller guide 6, the transmission displacement table can not only ensure the precision and stability of the transmission displacement table, but also make the overall size of the transmission displacement table smaller, so as to meet the use requirement of large output torque in a small space.

[0043] In some embodiments, as shown in Figure 1 , Figure 3 and Figure 4 , the fixed seat 1 includes a bottom plate 11, a first side plate 12, a second side plate 13, a third side plate 14 and a fourth side plate 15, wherein the bottom plate 11 is substantially square, the first side plate 12, the second side plate 13, the third side plate 14 and the fourth side plate 15 are all vertically installed on the bottom plate 11, the first side plate 12 and the second side plate 13 are both U-shaped plates, and the opening directions of the two are opposite, the third side plate 14 connects one of the opposite ends of the first side plate 12 and the second side plate 13, and the fourth side plate 15 connects the other of the opposite ends of the first side plate 12 and the second side plate 13. The first side plate 12, the second side plate 13, the third side plate 14, the fourth side plate 15 and the bottom plate 11 surround to form a box structure with a containing cavity.

[0044] By setting the fixed seat 1 to be assembled by multiple components, the screw stepper motor 3 and the cross roller guide 6 can be assembled with part of the components of the fixed seat 1 first, and then the fixed seat 1 is assembled after the internal structure is installed, so that the overall assembly of the transmission displacement table is more convenient.

[0045] It can be understood that in some other embodiments, the fixed seat 1 can also be integrally formed or assembled by other structures, which is not limited here.

[0046] Further, in order to reduce the overall size of the transmission displacement table, recessed groove structures for mounting the third side plate 14 and the fourth side plate 15 are arranged on the first side plate 12 and the second side plate 13, and then the outer surfaces of the third side plate 14 and the fourth side plate 15 are flush with the outer surfaces of the first side plate 12 and the second side plate 13 after the installation, so that the appearance of the transmission displacement table is more compact and the overall size is smaller.

[0047] In some embodiments, as shown inFigure 1 、 Figure 3 and Figure 4 As shown in

[0048] It can be understood that in some other embodiments, other connection modes are also used between the lead screw stepper motor 3 and the fixed seat 1, for example, the lead screw stepper motor 3 is fixedly installed on the bottom plate 11, which is not limited here.

[0049] Further, in order to make the internal structure of the transmission displacement table more compact, the first avoiding structure for avoiding the lead screw stepper motor 3 is also provided on the bottom plate 11, and the end of the lead screw stepper motor 3 away from the output end can be arranged in the first avoiding structure, thereby reducing the occupation of the space in the accommodation cavity, and making the internal structure of the transmission displacement table more compact. Optionally, the first avoiding structure is a first avoiding hole or a first avoiding groove.

[0050] In some embodiments, as shown in Figure 1 、 Figure 6 and Figure 7 The moving seat 2 is a cover-shaped structure, the opening shape of the moving seat 2 is the same as that of the fixed seat 1, the opening size of the moving seat 2 is slightly larger than that of the fixed seat 1, and then the moving seat 2 can be covered on the opening end of the fixed seat 1, thereby reducing the overall height of the transmission displacement table. At the same time, the inner side of the top plate of the moving seat 2 is connected with the output end of the lead screw stepper motor 3, and the outer side of the top plate of the moving seat 2 is used for carrying the to-be-transported piece. When the output end of the lead screw stepper motor 3 moves, it can drive the moving seat 2 to move synchronously, thereby driving the to-be-transported piece on the moving seat 2 to move.

[0051] It can be understood that in some other embodiments, the moving seat 2 can also adopt a flat plate structure or other structures, which are not limited here.

[0052] Optionally, at least one of the fixed seat 1 and the moving seat 2 is a structural member made of an aviation aluminum alloy material. The structural member made of the aviation aluminum alloy material can ensure lightweight while making the transmission displacement table have higher planeness, straightness and repeatability precision. The aviation aluminum alloy material is an existing material.

[0053] Of course, it can be understood that in other embodiments, the fixed seat 1 and the moving seat 2 can also be made of other materials according to actual needs, which are not limited here.

[0054] As shown in Figure 1 、 Figure 2And Figure 3 As shown in the figure, the cross roller guide 6 includes a middle guide rail 61 and two single guide rails 62 located on both sides of the middle guide rail 61, wherein the middle guide rail 61 is installed on the moving seat 2, and the two single guide rails 62 are both installed on the fixed seat 1, and the middle guide rail 61 slides between the two single guide rails 62. When the output end of the lead screw stepping motor 3 drives the moving seat 2 to move, the middle guide rail 61 on the moving seat 2 slides between the two single guide rails 62, so that the moving seat 2 has higher moving stability and motion accuracy.

[0055] Further, in order to make the internal structure of the transmission displacement table more compact, as shown in Figure 2 And Figure 3 In the embodiment, a first accommodating groove is formed on the first side plate 12, and the two single guide rails 62 are installed in the first accommodating groove. Since the middle guide rail 61 slides between the two single guide rails 62, the entire cross roller guide 6 is arranged in the first accommodating groove, thereby reducing the occupation of the space in the accommodating cavity and making the internal structure of the transmission displacement table more compact.

[0056] In order to further limit the movement of the moving seat 2 between the first station and the second station, as shown in Figure 5 And Figure 6 A limiting structure 8 is further arranged between the moving seat 2 and the fixed seat 1.

[0057] Optionally, as shown in Figure 6 The limiting structure 8 includes a limiting groove 81 and a limiting block 82, one of which is arranged on the fixed seat 1 and the other of which is arranged on the moving seat 2, and the limiting block 82 is arranged to slide in the limiting groove 81. The length of the limiting groove 81 can be set according to actual work requirements, and the two ends of the limiting groove 81 correspond to the positions of the two stations of the moving seat 2, so that when the limiting block 82 slides between the two ends of the limiting groove 81, the moving seat 2 reciprocates between the first station and the second station.

[0058] It can be understood that in some other embodiments, other types of limiting structures 8 can also be used, such as intelligent limiting by integrating sensors or motors, which are not limited herein.

[0059] When the limiting block 82 moves to the two ends of the limiting groove 81, the collision of the limiting block 82 with the inner walls of the two ends of the limiting groove 81 will cause a certain impact on the transmission displacement table, thereby affecting the positioning accuracy of the moving seat 2. In order to avoid the impact of the limiting block 82 on the transmission displacement table, as shown in Figure 6 The inner walls of the two ends of the limiting groove 81 are further provided with a buffer 83.

[0060] Optionally, the buffer 83 in the embodiment is an elastic block. When the limiting block 82 moves to the two ends of the limiting groove 81, the limiting block 82 collides with the elastic block, and the elastic block can absorb the impact kinetic energy of the limiting block 82, thereby avoiding the impact of the limiting block 82 on the transmission displacement table.

[0061] It can be understood that in some other embodiments, other types of buffers 83 such as springs can also be used, which are not limited herein.

[0062] When the moving seat 2 moves to the first station or the second station, the next operation needs to be performed by the staff. Optionally, as shown in Figure 4 , the transmission displacement table is also provided with a photoelectric assembly 7, which is arranged in the accommodating cavity of the fixed seat 1. The photoelectric assembly 7 is used to send a position signal when the moving seat 2 is located at the first station or the second station, thereby reminding the staff.

[0063] It can be understood that in some other embodiments, other types of position sensing devices such as position sensors can also be used, which are not limited herein.

[0064] As shown in Figure 4 , the photoelectric assembly 7 includes a trigger piece 72 and a photoelectric sensor 74. The trigger piece 72 moves synchronously with the moving seat 2, and the photoelectric sensor 74 is a groove type photoelectric sensor. The trigger piece 72 can slide through the groove on the photoelectric sensor 74. Further, in order to fix the trigger piece 72 and the photoelectric sensor 74, as shown in Figure 4 , the photoelectric assembly 7 further includes a second connecting plate 71 and a fixing rod 73. One end of the second connecting plate 71 is connected with the moving seat 2, the trigger piece 72 is installed on the second connecting plate 71, the fixing rod 73 is arranged on one side of the second connecting plate 71, and the photoelectric sensor 74 is installed on the fixing rod 73. Then, when the moving seat 2 moves, the trigger piece 72 moves synchronously, and the specific position of the moving seat 2 is determined through the cooperation between the trigger piece 72 and the photoelectric sensor 74.

[0065] Optionally, as shown in Figure 4 , two trigger pieces 72 are arranged on the second connecting plate 71 in the embodiment, and three photoelectric sensors 74 are arranged on the fixing rod 73. When the moving seat 2 is at the lowermost station, the two trigger pieces 72 are located in the grooves of the uppermost and lowermost photoelectric sensors 74 respectively, and send the position signal of the station; when the moving seat 2 is at the uppermost station, the lowermost trigger piece 72 is located in the groove of the middle photoelectric sensor 74, and sends the position signal of the station.

[0066] Of course, it can be understood that in some other embodiments, the number of trigger pieces 72 and photoelectric sensors 74 can also be arranged according to actual needs, which are not limited herein.

[0067] Further, in order to optimize the structural layout in the accommodation cavity of the fixed seat 1, make the internal structure of the transmission displacement table more compact, the photoelectric assembly 7 and the cross roller guide 6 are arranged on different sides of the lead screw stepper motor 3, as shown in Figure 3 and Figure 4 In the embodiment, the cross roller guide 6 is arranged between the lead screw stepper motor 3 and the first side plate 12, and the photoelectric assembly 7 is arranged between the lead screw stepper motor 3 and the fourth side plate 15.

[0068] Further, in order to make the internal structure of the transmission displacement table more compact, a second accommodation groove is formed in the fourth side plate 15 in the embodiment, and the photoelectric assembly 7 can be partially arranged in the second accommodation groove, thereby reducing the occupation of space in the accommodation cavity and making the internal structure of the transmission displacement table more compact.

[0069] In order to integrate and optimize the moving seat 2, the cross roller guide 6, the photoelectric assembly 7 and the limiting structure 8, and further reduce the overall size of the transmission displacement table, as shown in Figure 3 and Figure 4 In the embodiment, the transmission displacement table further comprises a first connecting plate 5, which comprises a horizontal part and a vertical part connected vertically. Optionally, the first connecting plate 5 is an L-shaped structure, the horizontal part of the first connecting plate 5 is arranged on the mounting plate 4, the horizontal part of the first connecting plate 5 is connected to the output end of the lead screw stepper motor 3 and the moving seat 2 at the same time, and the second connecting plate 71 is also connected to the horizontal part of the first connecting plate 5, the middle guide rail 61 is installed on the vertical part of the first connecting plate 5, and is opposite to the single guide rail 62, the limiting block 82 is also installed on the vertical part of the first connecting plate 5, and is opposite to the limiting groove 81 on different sides of the middle guide rail 61 installed on the vertical part. When the output end of the lead screw stepper motor 3 drives the first connecting plate 5 to move, the first connecting plate 5 can simultaneously drive the moving seat 2, the middle guide rail 61, the limiting block 82 and the second connecting plate 71 to move synchronously.

[0070] It can be understood that in some other embodiments, the first connecting plate 5 and the second connecting plate 71 can be an integral structure, at this time, the first connecting plate 5 further comprises a second vertical part opposite to the photoelectric sensor 74, and the trigger piece 72 is arranged on the second vertical part of the first connecting plate 5.

[0071] By arranging the first connecting plate 5, all internal structures are integrated together, which not only facilitates the assembly of the internal structures, but also greatly reduces the occupied space of the internal structures, further reduces the overall size of the transmission displacement table, and enables the transmission displacement table to be applied to more use scenarios.

[0072] Further, as shown in Figure 4As shown, the second connecting plate 71 in the embodiment also comprises a horizontal part and a vertical part connected vertically, and the horizontal part of the second connecting plate 71 is connected with the horizontal part of the first connecting plate 5, the trigger piece 72 is installed on the vertical part of the second connecting plate 71, and the first connecting plate 5 is provided with a third accommodating groove, and the horizontal part of the second connecting plate 71 is arranged in the third accommodating groove, so as to reduce the occupied space of the horizontal part of the second connecting plate 71 in the accommodating cavity.

[0073] Further, as shown in Figure 4 , the mounting plate 4 is provided with a second avoiding structure for avoiding the vertical part of the first connecting plate 5, and the vertical part of the first connecting plate 5 is arranged in the second avoiding structure, so as to reduce the occupied space of the vertical part of the first connecting plate 5 in the accommodating cavity.

[0074] Further, as shown in Figure 3 and Figure 4 , the mounting plate 4 is further provided with a third avoiding structure for avoiding the vertical part of the second connecting plate 71, and the vertical part of the second connecting plate 71 is arranged in the third avoiding structure, so as to reduce the occupied space of the vertical part of the second connecting plate 71 in the accommodating cavity.

[0075] Further, as shown in Figure 6 and Figure 7 , the moving seat 2 is provided with a containing groove 21 for avoiding the horizontal part of the first connecting plate 5 and the horizontal part of the second connecting plate 71, and the horizontal part of the first connecting plate 5 and the horizontal part of the second connecting plate 71 can be partially arranged in the containing groove 21, so as to further reduce the occupied space of the horizontal part of the first connecting plate 5 and the horizontal part of the second connecting plate 71 in the accommodating cavity.

[0076] Through the above arrangement, the internal structure of the transmission displacement table is more compact.

[0077] As shown in Figure 3 and Figure 5 , the fixed seat 1 is further provided with a dust suction connector 9, which can be connected with an external dust suction device, and is used for sucking impurities in the accommodating cavity of the fixed seat 1. Optionally, in the embodiment, the dust suction connector 9 is arranged on the first side plate 12, and of course, it can be understood that the dust suction connector 9 can also be arranged at other positions according to design requirements, which is not limited here. Through the arrangement of the dust suction connector 9, the transmission displacement table can meet the use requirements of the clean room environment within 100 levels.

[0078] As shown in Figure 3 and Figure 5As shown, the fixed seat 1 is further provided with an outgoing line interface 10, the outgoing line interface 10 internally arranges and concentrates the cables of the lead screw stepping motor 3 and the photoelectric component 7, and is connected with an external power supply and a control console, so as to supply power for the lead screw stepping motor 3 and transmit the position signal emitted by the photoelectric component 7 to the control console. By arranging the outgoing line interface 10, the internal structure of the transmission displacement table is further optimized.

[0079] The transmission displacement table provided by the embodiment adopts the lead screw stepping motor 3 as the power device of the transmission displacement table, and the moving seat 2 and the fixed seat 1 are slidably connected through the cross roller guide rail 6, so that the overall size of the transmission displacement table is small while the precision and stability of the transmission displacement table are ensured, and the use requirement of a narrow space requiring a large output torque can be met. The transmission displacement table can realize high speed and high positioning precision, the overall flatness can reach 10um, and the maximum load can reach 2kg, and the transmission displacement table is widely applied to the narrow space requiring high positioning precision, straightness, flatness and the like.

[0080] Obviously, the above embodiments of the utility model are only examples for clearly explaining the utility model, and are not the limitation of the embodiments of the utility model. For the ordinary skilled in the art, various obvious changes, re-adjustment and replacement can be made without departing from the protection scope of the utility model. Here, all the embodiments need not and cannot be exhausted. Any modification, equivalent replacement and improvement within the spirit and principle of the utility model should be included in the protection scope of the utility model claim.

Claims

1. A transport displacement table, characterized by, The utility model relates to a transmission displacement table, including: Fixed seat (1), fixed seat (1) is equipped with accommodating cavity; Mobile seat (2), mobile seat (2) is equipped in the side of the accommodating cavity formation opening, mobile seat (2) is used for carrying the piece to be transported; Lead screw stepper motor (3), lead screw stepper motor (3) is arranged in the accommodating cavity, and the output of lead screw stepper motor (3) is connected with mobile seat (2), and mobile seat (2) can be driven to reciprocate between first station and second station; Cross roller guide (6), cross roller guide (6) is arranged in the accommodating cavity, and is arranged side by side with lead screw stepper motor (3), and mobile seat (2) is slidably connected with fixed seat (1) through cross roller guide (6).

2. The transport displacement stage of claim 1, wherein, Cross roller guide (6) includes middle guide rail (61) and single guide rail (62) on both sides of middle guide rail (61), middle guide rail (61) is installed on mobile seat (2), and two single guide rails (62) are installed on fixed seat (1), and middle guide rail (61) slides between two single guide rails (62).

3. The transport displacement stage of claim 2, wherein, The transmission displacement table further includes a first connecting plate (5), the first connecting plate (5) includes a horizontal part and a vertical part connected vertically, the horizontal part is used for connecting the output of the lead screw stepper motor (3) and the mobile seat (2), the mobile seat (2) is provided with a receiving groove (21) for accommodating the horizontal part, and the middle guide rail (61) is installed on the vertical part.

4. The transport displacement stage of claim 1, wherein, The transmission displacement table further includes a photoelectric assembly (7) for emitting a position signal when the mobile seat (2) is located at the first station or the second station.

5. The transport displacement stage of claim 4, wherein, The photoelectric assembly (7) is arranged in the accommodating cavity, and the photoelectric assembly (7) is arranged on different sides of the cross roller guide (6) and the lead screw stepper motor (3).

6. The transport displacement stage of claim 1, wherein, A limiting structure (8) is arranged between the mobile seat (2) and the fixed seat (1), and the limiting structure (8) is used for limiting the movement of the mobile seat (2) between the first station and the second station.

7. The transport displacement stage of claim 6, wherein, The limiting structure (8) includes a limiting groove (81) and a limiting block (82), one of the limiting groove (81) and the limiting block (82) is arranged on the fixed seat (1), and the other is arranged on the mobile seat (2), and the limiting block (82) is arranged to slide in the limiting groove (81).

8. The transport displacement stage of claim 7, wherein, The inner wall of both ends of the limiting groove (81) is further provided with a buffer (83).

9. The transport displacement stage of claim 1, wherein, The fixed seat (1) is further provided with a dust suction connector (9), the dust suction connector (9) is used for connecting with external dust suction equipment, and the dust suction connector (9) can suck impurities in the accommodating cavity.

10. The transport displacement stage of claim 1, wherein, At least one of the mobile seat (2) and the fixed seat (1) is a structural member made of aviation aluminum alloy material.

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