Laser parallel processing equipment for realizing beam splitting and regulation based on deflecting mirror

Abstract

The utility model relates to laser parallel processing equipment for realizing beam splitting, regulation and control based on a deflecting mirror, which comprises a laser generating device and a deflecting mirror for receiving laser from the laser generating device and deflecting the laser into a plurality of sub light paths in different directions; and the lens is arranged at the tail end of the sub light path and used for irradiating the laser to the to-be-machined surface. According to the laser parallel processing equipment, the deflection mirror is additionally arranged in the laser light path, so that the effect of splitting the laser beam into a plurality of sub-beams is achieved. According to the scheme, the purposes of multiplexing laser energy and improving the processing efficiency of equipment are achieved, the performance of a laser light source can be fully utilized, and the energy utilization rate is improved.

Description

Technical Field

[0001] This utility model relates to the field of laser processing equipment technology, specifically to a laser parallel processing equipment based on a deflector to achieve beam splitting and control. Background Technology

[0002] Laser drilling is currently widely used in the PCB industry, but with the increase in single-pulse energy of lasers and the growing demand for large-size and high-resolution components, current laser drilling equipment is generally single-axis. On the one hand, processing efficiency is limited by the movement speed, making it difficult to effectively improve; on the other hand, with the development of light source technology, a single optical axis can no longer fully utilize the light source's performance, leading to overcapacity. Existing laser drilling equipment faces the dual constraints of low processing efficiency and low energy utilization, while the cost of high-power CO2 lasers is also a constraint on equipment investment. Utility Model Content

[0003] In order to improve the processing efficiency of existing laser drilling equipment and reduce the cost of equipment, this utility model provides a laser parallel processing equipment based on deflection mirrors to realize beam splitting and control.

[0004] The technical solution of this utility model provides a laser parallel processing device based on a deflector to achieve beam splitting and control, including...

[0005] Laser generating device

[0006] Deflecting mirrors receive laser light from a laser generator and deflect it into several sub-optical paths with different directions.

[0007] The lens, located at the end of the sub-optical path, is used to direct the laser beam onto the surface to be processed.

[0008] Preferably, at least one of the sub-optical paths generated by the deflecting mirror is provided with a beam splitter, which is used to multiply the corresponding sub-optical path.

[0009] Preferably, a reflective phase delay device is further provided in the sub-optical path, and the reflective phase delay device is placed in the optical path in front of the lens.

[0010] Preferably, it further includes a shaping optical path, which is placed between the laser generator and the deflecting mirror, and the shaping optical path is used to control the diameter and shape of the laser beam.

[0011] Preferably, it further includes an absorbing thin-film reflector, which is placed between the laser generator and the deflector.

[0012] This invention relates to a laser parallel processing device based on deflection mirrors for beam splitting and control. By adding deflection mirrors to the laser optical path, the device achieves the effect of splitting the laser beam into several sub-beams. This solution realizes the purpose of laser energy reuse and improves the processing efficiency of the device, fully utilizing the performance of the laser source and enhancing energy utilization. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the optical path of the laser processing equipment of this utility model;

[0014] Figure 2 This is a schematic diagram of the deflection optical path of the deflection mirror 2 of this utility model;

[0015] Figure 3 This is a schematic diagram of the structure of component 3 of this utility model.

[0016] In the picture:

[0017] 1: Laser generator; 2: Deflector; 3: Beam splitter; 4: Reflective phase delayer; 5: Absorbing thin film reflector; 6: Shaping optical path; 7: Beam splitter; 9: Lens. Detailed Implementation

[0018] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. In this specification, the dimensions of the drawings do not represent the actual dimensions. They are only used to illustrate the relative positional and connection relationships between the components. Components with the same name or the same reference numeral represent similar or identical structures and are limited to illustrative purposes.

[0019] This application provides a multi-path parallel laser processing device to improve the processing efficiency and energy utilization of a single laser processing device, while simultaneously achieving laser multiplexing. Among the currently considered technical solutions, one approach is to utilize the switching characteristics of an acousto-optic modulator (AOM) to split a single beam into multiple optical paths, thereby improving the processing efficiency and energy utilization of a single laser source. However, firstly, the technical barriers to acousto-optic modulators are relatively high, and foreign AOM devices are very expensive, resulting in excessive costs; secondly, there is an interaction between the switching speed and insertion loss of the AOM, with faster switching speeds leading to greater losses; finally, especially in the field of laser drilling, the elliptical diffracted light generated by the AOM significantly affects the processing quality of the hole shape. The second approach utilizes the diffraction principle of a diffractive optical element (DOE) to spatially disperse and phase-modulate the laser beam, thereby achieving the effect of splitting the laser beam into multiple beams. For diffractive optical elements (DOEs), due to the limitations of diffractive optics principles, the efficiency of dual-beam splitters can generally reach 80%, resulting in a significant waste of laser energy. Furthermore, changing the number of split beams requires purchasing DOEs and adjusting the optical path, which is extremely costly and time-consuming. Thirdly, spatial light modulators (SLMs) are used. Under the control of time-varying electrical drive signals or other signals, the amplitude or intensity, phase, polarization state, and wavelength of the light distribution in space are changed to achieve beam splitting. SLMs, which modulate the liquid crystal molecule morphology by changing the voltage, require a certain transition time and software computation time, making them much slower than the previous two methods. Additionally, high-efficiency SLMs are extremely expensive, and the algorithms for changing the light intensity distribution are quite complex, making it difficult to simultaneously achieve high efficiency and high uniformity.

[0020] The laser parallel processing equipment of this application achieves the purpose of optical axis beam splitting through deflection mirrors and beam splitters. It includes a laser generator 1 for generating laser light and a lens 9 for irradiating the surface to be processed, as well as a deflection mirror 2. The laser light emitted from the laser generator 1 is deflected by the deflection mirror 2 into two beams with different angles, forming two sub-optical paths. When the deflection mirror 2 is placed at angle α, the incident beam is split into two beams by the deflection mirror 2, the reflecting mirror, and the beam splitter 3, and projected onto the left side of the material on two separate platforms for simultaneous processing. When the deflection mirror 2 is rotated from angle θ to angle β, the original incident beam is projected onto the right side of the material on two separate platforms for simultaneous processing. The rotation of the deflection mirror 2 by angle θ is precisely controlled by software commands and a motor, and angles α, θ, and β are precisely adjusted. Using other beam splitting elements is extremely costly; the above solution effectively saves costs. Due to the small-angle deflection of the deflecting mirror, the laser beam propagates in two different directions, thus forming two different processing axes, Z1 axis and Z2 axis. Optionally, a lens 9 is provided at the end of the two sub-optical paths to project the laser beam of the sub-optical path onto the surface to be processed.

[0021] Preferably, the sub-optical path also includes a beam splitter 3, which further divides the beam of the sub-optical path into two sub-beams, thereby doubling the number of sub-optical paths. Correspondingly, a lens 9 is provided at the end of the sub-optical path to project the laser beam of the sub-optical path onto the surface to be processed.

[0022] In a specific embodiment, the laser from the laser generator 1 is deflected into two beams by the deflector 2. Each laser beam is then further subdivided into two beams by the 50:50 beam splitter 3, forming four sub-optical paths. These sub-paths are projected onto two different processing areas for parallel and consistent material processing. Because the peak power of the laser in this invention is sufficiently high, the power of each axis of the optical path after beam splitting is sufficient to damage the material surface.

[0023] Preferably, in each sub-optical path, a reflective phase delayer 4 is also provided in front of the lens 9. The reflective phase delayer 4 introduces a phase of λ / 4 to convert linearly polarized light into circularly polarized light and eliminate the variation of the drill hole slit.

[0024] In the optical path between the laser generator 1 and the deflector 2, a shaping optical path 6 is first set up to shape and adjust the beam emitted by the laser generator 1. The shaping optical path 6 is a lens combination that controls the diameter and shape of the beam to shape the laser beam into a flat-top beam with the required diameter.

[0025] Preferably, an absorption film reflector 5 is also provided in the optical path between the laser generator 1 and the deflector 2 to adjust the optical path and prevent reflected light from damaging the laser generator 1.

[0026] Optionally, a beam splitter 7 is also provided in the optical path between the laser generator 1 and the deflector 2 to separate a lower energy bypass from the optical path for monitoring of the laser generator 1.

[0027] The laser has a wavelength of 9.4 μm, a typical power of 283 W, and a single pulse frequency of 200 kHz. The linearly polarized light pulse emitted from the laser is split into two beams by a beam splitter (99% reflection, 1% transmission): one beam passes through an attenuator and enters a photodetector for laser monitoring; the other beam is shaped into a flat-top beam by a diffractive optical element, and then passes through a laser beam expander and an aperture to filter stray light and optimize the beam. The adjusted and optimized laser beam passes through a deflector. Due to the small-angle deflection of the deflector, the beam propagates in two different directions, thus forming two different processing axes (Z1 axis and Z2 axis). The light on the Z1 axis is split into two beams (Z1-1 axis light and Z1-2 axis light) by a beam splitter (50% reflection, 50% transmission) and projected onto two different processing areas, but both undergo parallel and consistent material processing. The Z2 axis follows the same principle, thus achieving fast, efficient, and consistent processing. Because the laser of this invention has a sufficiently high peak power, the optical path power of each axis after beam splitting is sufficient to destroy the material surface.

[0028] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model. Any modifications and improvements made to the technical solution of the present utility model by those skilled in the art without departing from the spirit of the present utility model should fall within the protection scope defined by the claims of the present utility model.

Claims

1. A laser parallel processing device based on deflection mirrors for beam splitting and control, characterized in that, include Laser generating device (1), The deflector (2) receives the laser light from the laser generator (1) and deflects it into several sub-optical paths with different directions. Lens (9) is located at the end of the sub-optical path and is used to irradiate the surface to be processed with laser.

2. The laser parallel processing equipment based on deflection mirrors for beam splitting and control as described in claim 1, characterized in that, At least one of the sub-optical paths generated by the deflecting mirror (2) is provided with a beam splitter (3), which is used to multiply the corresponding sub-optical path.

3. The laser parallel processing equipment based on deflection mirrors for beam splitting and control as described in any one of claims 1-2, characterized in that, The sub-optical path is also provided with a reflective phase delay unit (4), which is placed in the optical path in front of the lens (9).

4. The laser parallel processing equipment based on deflection mirrors for beam splitting and control as described in any one of claims 1-2, characterized in that, It also includes a shaping optical path (6), which is placed between the laser generating device (1) and the deflecting mirror (2). The shaping optical path (6) is used to control the diameter and shape of the laser beam.

5. The laser parallel processing equipment based on deflection mirrors for beam splitting and control as described in any one of claims 1-2, characterized in that, It also includes an absorption film reflector (5), which is placed between the laser generator (1) and the deflector (2).

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