Metal diaphragm compressor and metal diaphragm head device therein

Abstract

A metal diaphragm compressor comprises an oil pressure unit, an air pressure unit and a metal diaphragm head device arranged between the oil pressure unit and the air pressure unit. The metal film head device comprises a lower film head, an upper film head and a metal film arranged between the lower film head and the upper film head. A compression oil chamber is formed between the lower diaphragm head and the metal diaphragm, and the lower diaphragm head further comprises an oil inlet flow channel and an oil outlet flow channel which are respectively communicated with the compression oil chamber. The upper film head further comprises a first upper film head structure, a second upper film head structure and a vacuum diffusion welding structure formed between the first upper film head structure and the second upper film head structure, and a compressed air chamber is formed between the first upper film head structure and the metal diaphragm. The upper film head further comprises an air inlet flow channel and an air outlet flow channel which penetrate through the first upper film head structure to be communicated with the compressed air chamber. The thermal expansion coefficient of the first upper film head structure is smaller than that of the second upper film head structure, so that the metal film head device is more heat-resistant, more durable and more reliable.

Description

Technical Field

[0001] This application relates to the field of fluid displacement devices, and in particular to the technology of metal diaphragm compressors. Background Technology

[0002] Metal diaphragm compressors, also known as metal diaphragm compressors, are a type of positive displacement compressor with a special structure that has indispensable applications in many important fields. In the energy industry, they can be used for the compression and transportation of gases such as hydrogen, providing key support for hydrogen energy storage and transportation; in the petrochemical industry, they can process chemical raw material gases such as ethylene, propylene, and chlorine; and in the electronics industry, materials industry, defense industry, pharmaceutical and food industries, they are also widely used for the compression and transportation of high-purity gases such as argon and helium.

[0003] A metal diaphragm compressor mainly consists of a hydraulic oil system, a gas compression system, and a metal diaphragm. The metal diaphragm plays a crucial isolating role, completely separating the hydraulic oil system and the gas compression system; one side contains the hydraulic oil, and the other side contains the gas to be compressed. During operation, the hydraulic oil system generates pressure, pushing the metal diaphragm towards the gas side, thereby compressing and expelling the gas.

[0004] Currently, significant progress has been made in the research of metal diaphragm compressors. For example, in the technology disclosed in patent number CN202310702208.7, the metal diaphragm uses a shape memory alloy component. Compared to ordinary metals, this alloy component has a greater recoverable deformability, which can meet the deformation requirements of deeper cavities, effectively increasing the cavity volume and improving the compressor's performance to a certain extent. Another example is the technology disclosed in patent number CN202322120260.X, which uses a non-metallic coating layer at the edges of the gas-side diaphragm, oil-side diaphragm, and intermediate detection diaphragm. This coating layer is heat-resistant, wear-resistant, and does not easily detach, maintaining a certain gap between the three diaphragm layers, reducing friction, eliminating slapping phenomena, avoiding wear and heat generation, and extending the diaphragm's service life.

[0005] However, according to the ideal gas equation PV = nRT (where P is pressure, V is gas volume, T is absolute temperature, n is amount of substance, and R is the molar gas constant), during the compression of gas in a compressor, an increase in pressure P leads to an increase in temperature T. In existing metal diaphragm compressor technology, although numerous studies have focused on improving the metal diaphragm to enhance its heat resistance and performance, the overheating problem of the compressor diaphragm head, especially the gas-side diaphragm head, has remained unresolved. Excessive diaphragm head heat and poor heat dissipation often cause the valves in the compressed gas output channel to burn out and the diaphragm head to crack, resulting in malfunctions. This not only affects the structural stability and service life of the diaphragm head itself but may also affect the quality of the compressed gas, increasing production costs and maintenance difficulty, thus limiting the further application of metal diaphragm compressors in some temperature-critical fields. Summary of the Invention

[0006] To address the shortcomings of existing technologies, this application aims to provide an improved metal diaphragm head device, in which the diaphragm head on the compressed gas side has better heat resistance and durability.

[0007] For the purposes of this application, the first preferred embodiment proposed in this application is a metal diaphragm compressor, which includes a hydraulic unit, a pneumatic unit, and a metal diaphragm head device disposed between the hydraulic unit and the pneumatic unit.

[0008] The metal diaphragm head device includes a lower diaphragm head, an upper diaphragm head, and a metal diaphragm disposed between the lower diaphragm head and the upper diaphragm head. A compression oil chamber is formed between the lower diaphragm head and the metal diaphragm head. The lower diaphragm head also includes an oil inlet channel and an oil outlet channel, which are respectively connected to the compression oil chamber.

[0009] The upper membrane head also includes a first upper membrane head structure, a second upper membrane head structure, and a vacuum diffusion welding structure formed between the first upper membrane head structure and the second upper membrane head structure. A compressed air chamber is formed between the first upper membrane head structure and the metal diaphragm. The upper membrane head also includes an inlet air passage and an outlet air passage, which respectively penetrate the first upper membrane head structure and connect to the compressed air chamber.

[0010] The coefficient of thermal expansion of the first upper diaphragm head structure is smaller than that of the second upper diaphragm head structure. Since the high-temperature compressed air chamber is formed between the first upper diaphragm head structure and the metal diaphragm, the upper diaphragm head on the compressed gas side can have better durability through the first upper diaphragm head structure with better heat resistance.

[0011] Based on the same technical concept, this application further proposes a second preferred embodiment, which is a metal diaphragm head device used in the metal diaphragm compressor of the first preferred embodiment.

[0012] The metal diaphragm head device includes a lower diaphragm head, an upper diaphragm head, and a metal diaphragm disposed between the lower diaphragm head and the upper diaphragm head. A compression oil chamber is formed between the lower diaphragm head and the metal diaphragm head. The lower diaphragm head also includes an oil inlet channel and an oil outlet channel, which are respectively connected to the compression oil chamber.

[0013] The upper membrane head also includes a first upper membrane head structure, a second upper membrane head structure, and a vacuum diffusion welding structure formed between the first upper membrane head structure and the second upper membrane head structure. A compressed air chamber is formed between the first upper membrane head structure and the metal diaphragm. The upper membrane head also includes an inlet air passage and an outlet air passage, which respectively penetrate the first upper membrane head structure and connect to the compressed air chamber.

[0014] The coefficient of thermal expansion of the first upper diaphragm head structure is smaller than that of the second upper diaphragm head structure. Since the high-temperature compressed air chamber is formed between the first upper diaphragm head structure and the metal diaphragm, the upper diaphragm head on the compressed gas side can have better durability through the first upper diaphragm head structure with better heat resistance.

[0015] The advantages and spirit of this application can be further understood through the following detailed description and accompanying drawings. Attached Figure Description

[0016] The provided drawings are used to provide a further understanding of the technical solutions of this application. They constitute a part of the specification, illustrating the implementation methods of this application and, together with the text description, explaining the principles of this application. Obviously, the provided drawings are not, and need not, drawn according to actual dimensions; they are used to explain the embodiments of this application and are not intended to limit the implementation methods of this application. For those skilled in the art, other drawings can be derived from these drawings without creative effort. The provided drawings include:

[0017] Figure 1 This is a schematic diagram of the structure of a metal diaphragm compressor, which is the first preferred embodiment proposed in this application.

[0018] Figure 2 This is a schematic diagram of the elastic deformation of a metal diaphragm to compress gas in the first preferred embodiment of this application.

[0019] Figure 3 This is a schematic diagram of the elastic deformation of a metal diaphragm to discharge hydraulic oil in the first preferred embodiment of this application.

[0020] Figure 4 This is a schematic diagram of another implementation of the inlet and outlet airflow channels in the first preferred embodiment proposed in this application.

[0021] Figure 5A and Figure 5BThis is a schematic diagram of the implementation of the second inlet air passage and the second outlet air passage in the first preferred embodiment proposed in this application.

[0022] Figure label:

[0023] Metal diaphragm compressor 100

[0024] Hydraulic Unit 1

[0025] Air pressure unit 2

[0026] Metal diaphragm head device 3

[0027] Lower membrane head 31

[0028] Top of the membrane 32

[0029] First upper membrane head structure 321

[0030] Second upper membrane head structure 322

[0031] Vacuum diffusion welding structure 323

[0032] Metal diaphragm 33

[0033] Compression oil chamber 34

[0034] Oil inlet channel 341

[0035] Oil outlet channel 342

[0036] Compressed air chamber 35

[0037] Inlet air passage 351

[0038] Airflow duct 352

[0039] First air intake duct 351

[0040] Second air intake duct 3512

[0041] First exhaust duct 3521

[0042] Second exhaust duct 3522

[0043] First trench 3513

[0044] Second trench 3514

[0045] Third trench 3523

[0046] Fourth trench 3524 Detailed Implementation

[0047] The specific structural and functional details disclosed in the description of this application are merely representative and are intended to describe exemplary embodiments of this application. This application may be implemented in many alternative forms and should not be construed as being limited solely to the embodiments disclosed herein.

[0048] It should be understood that the terms "center," "lateral," "upper," "lower," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer" used in the description of this application, indicating orientation or positional relationships based on the diagrams, are used solely for the purpose of describing this application, unless the applicant specifically emphasizes and limits their function. They do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on this application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as relative importance or the number of implicit technical features. In the description of this application, unless otherwise stated, "multiple" means two or more. Additionally, the term "comprising" and any variations thereof mean "at least including."

[0049] It should also be understood that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" used in the description of this application should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integrally formed connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0050] Unless the context clearly indicates otherwise, the terms “an” and “an item” used in this application description are also intended to include the plural. It should also be understood that the terms “comprising” and / or “including” specify the presence of the stated features, steps, operations, units and / or components, without excluding the presence or addition of one or more other features, steps, operations, units, components and / or combinations thereof.

[0051] The first preferred embodiment proposed in this application is a metal diaphragm compressor 100, please see... Figures 1 to 3The metal diaphragm compressor 100 includes a hydraulic unit 1, a pneumatic unit 2, and a metal diaphragm head device 3 disposed between the hydraulic unit 1 and the pneumatic unit 2. Since gases have higher compressibility than liquids, gases deform more under pressure, while oil deforms less. In other words, oil can withstand higher pressure with less deformation. The metal diaphragm compressor uses the metal diaphragm in the metal diaphragm head device 3 to transfer the high pressure exerted on the oil in the hydraulic unit 1 to the gas in the pneumatic unit 2, thereby forming high-pressure gas for output.

[0052] Please see Figures 1 to 3 The metal diaphragm head device 3 includes a lower diaphragm head 31, an upper diaphragm head 32, and a metal diaphragm 33 disposed between the lower diaphragm head 31 and the upper diaphragm head 32. Generally, the metal diaphragm 33 is a key component of the metal diaphragm compressor and must have good elasticity and recoverable deformation. In a preferred embodiment, the shape memory alloy part described in patent number CN202310702208.7 or the three-layer diaphragm with a covering structure described in patent number CN202322120260.X can be used, and this application is not limited thereto.

[0053] Please see Figure 1 The lower diaphragm head 31 has a recessed portion facing the metal diaphragm 33, forming a compression oil chamber 34 between the lower diaphragm head 31 and the metal diaphragm 33. The lower diaphragm head 31 also includes an oil inlet channel 341 and an oil outlet channel 342, which are respectively connected to the compression oil chamber 34. When hydraulic oil enters the compression oil chamber 34 through the oil inlet channel 341, the metal diaphragm 33 undergoes elastic deformation towards the upper diaphragm head 32, increasing the volume of the compression oil chamber 34. Figure 2 As shown. When hydraulic oil leaves the compression chamber 34 through the outlet channel 342, the metal diaphragm 33 undergoes elastic deformation towards the lower diaphragm head 31, and the volume of the compression chamber 34 decreases, as... Figure 3 As shown.

[0054] Please see Figures 1 to 3 The upper membrane head 32 on the compressed gas side is the technical focus of this application.

[0055] The upper diaphragm head 32 has another recess facing the metal diaphragm 33, forming a compression chamber 35 between the upper diaphragm head 32 and the metal diaphragm 33. The upper diaphragm head 32 also includes an inlet passage 351 and an outlet passage 352, respectively connected to the compression chamber 35. See below. Figure 2 When hydraulic oil enters the compression chamber 34, it causes the metal diaphragm 33 to elastically deform towards the upper diaphragm head 32. This increases the volume of the compression chamber 34 and decreases the volume of the compression air chamber 35. The gas in the compression air chamber 35 is thus compressed to form high-pressure gas, which is then discharged from the outlet air passage 352. (See also...) Figure 3When the hydraulic oil leaves the compression chamber 34, the metal diaphragm 33 undergoes elastic deformation towards the lower diaphragm head 31, reducing the volume of the compression chamber 34 and increasing the volume of the compression air chamber 35. The lower-pressure gas then enters the compression air chamber 35 through the air inlet passage 351, awaiting the next pressurization stroke. By continuously pumping hydraulic oil into and out of the compression chamber 34 using a hydraulic pump, high-pressure gas can be continuously generated through the metal diaphragm 33 and the compression air chamber 35.

[0056] According to the ideal gas equation PV = nRT, where P is pressure, V is gas volume, and T is absolute temperature, when the gas in the compression chamber 35 is compressed into high-pressure gas, the volume V decreases and the pressure P increases, thus causing the temperature T to rise. In other words, once the metal diaphragm compressor starts operating, the temperature of the compression chamber 35 will continuously rise and remain at a high temperature, placing a burden on the metal diaphragm 33 and the upper diaphragm head 32. However, existing technology only focuses on the metal diaphragm, making many improvements to its heat resistance, but neglects the upper diaphragm head. Once the upper diaphragm head burns out due to overheating or thermal deformation, the entire upper diaphragm head must be removed and replaced, which is quite costly.

[0057] To address this problem in the prior art, the upper membrane head 32 proposed in this application further includes a first upper membrane head structure 321, a second upper membrane head structure 322, and a vacuum diffusion welding structure 323 formed between the first upper membrane head structure 321 and the second upper membrane head structure 322. More specifically, the first upper membrane head structure 321 and the second upper membrane head structure 322 are tightly joined together by forming the vacuum diffusion welding structure 323 through vacuum diffusion welding. The first upper membrane head structure 321 is closer to the metal diaphragm 33, while the compression chamber 35 is formed between the first upper membrane head structure 321 and the metal diaphragm 33. The inlet air passage 351 and the outlet air passage 352 respectively penetrate the first upper membrane head structure 321 and communicate with the compression chamber 35. In one embodiment, please see... Figures 1 to 3 The inlet air passage 351 and the outlet air passage 352 also penetrate the vacuum diffusion welding structure 323 and the second upper membrane head structure 322 respectively to connect to the outside.

[0058] The technical concept of the upper diaphragm head 32 in this application lies in using different materials for the first upper diaphragm head structure 321 and the second upper diaphragm head structure 322. More specifically, the coefficient of thermal expansion of the first upper diaphragm head structure 321 is smaller than that of the second upper diaphragm head structure 322. In other words, the first upper diaphragm head structure 321, which is in contact with the compression chamber 35, is more heat-resistant than the second upper diaphragm head structure 322 and is less prone to deformation after being heated. The second upper diaphragm head structure 322 of this application can be made of carbon steel, which is commonly used in existing metal diaphragm compressors. The first upper diaphragm head structure 321 can be made of stainless steel, titanium alloy, nickel-based alloy, cobalt-based alloy, etc., which have better heat resistance than carbon steel. Because metal materials with a better coefficient of thermal expansion are very expensive, it would be too costly and unnecessary to use metal materials with a better coefficient of thermal expansion for the entire upper diaphragm head 32. The advantage of this application is that only the first upper membrane head structure 321 needs to be made of a metal material with a good coefficient of thermal expansion, while the second upper membrane head structure 322 can be made of a general metal material. Then, by tightly bonding the first upper membrane head structure 321 and the second upper membrane head structure 322 through a vacuum diffusion welding structure 323, a better heat resistance effect can be achieved, and it will hardly be damaged under normal use. Another advantage of this application is that when the upper membrane head of the prior art is damaged due to high-temperature use, it must be completely replaced. However, if the first upper membrane head structure 321 is damaged under extreme use conditions, this application only requires disassembling the old first upper membrane head structure 321, replacing it with a new one, and then re-bonding the new first upper membrane head structure 321 and the second upper membrane head structure 322 through the vacuum diffusion welding structure 323.

[0059] Compared with traditional fusion welding structures, the vacuum diffusion welded structure 323 formed by vacuum diffusion welding has advantages such as larger and more uniform welding area, more reliable connection, and less deformation. More importantly, it has fewer pores and better air tightness, which allows the first upper membrane head structure 321 and the second upper membrane head structure 322 to fit tightly together. Even if the inlet air channel 351 and the outlet air channel 352 penetrate the vacuum diffusion welded structure 323 and the second upper membrane head structure 322, the gas will not leak out from the connection between the vacuum diffusion welded structure 323 and the first upper membrane head structure 321 and the second upper membrane head structure 322.

[0060] The steps of joining the first upper membrane head structure 321 and the second upper membrane head structure 322 by vacuum diffusion welding include:

[0061] (1) Provide a vacuum or inert gas-filled welding environment: In the embodiment of vacuum environment, the higher the vacuum level, the more conducive it is to the decomposition and evaporation of impurities and oxides on the surface of the weldment, and the smooth progress of the welding process.

[0062] (2) The surfaces of the first upper film head structure 321 and the second upper film head structure 322 that are opposite to each other are pretreated, for example: cleaning, removing surface oxides, removing organic surface film, or removing work hardening layer, etc.

[0063] (3) The first upper membrane head structure 321 and the second upper membrane head structure 322 are stacked, clamped and pressed according to a preset arrangement to form a stacked part, so as to avoid displacement during the welding process.

[0064] (4) In a welding environment, a first pressure and a first temperature are applied to the preset welding surface of the stacked components for a first time. In one embodiment, the first temperature is not lower than 50% and not higher than 80% of the melting point of the second upper film head structure 322. In a more preferred embodiment, the first temperature is not lower than 60% of the melting point of the second upper film head structure 322. The first pressure is applied along the normal direction of the preset welding surface of the stacked components to induce slight plastic deformation on the preset welding surface of the stacked components, so that the first upper film head structure 321 and the second upper film head structure 322 can achieve a tight bond. Preferably, the first pressure is between 0.5 MPa and 50 MPa. When the second upper film head structure 322 is made of 1020 carbon steel, its melting point is approximately 1510°C, and the first temperature should be between 755°C and 1208°C. When the second upper film head structure 322 is made of 1045 carbon steel, the carbon content increases and the melting point decreases, with a melting point of about 1450℃. At this time, the first temperature should be between 725℃ and 1160℃.

[0065] (5) After the first time period ends, a second pressure and a second temperature are applied for a second time, which is not shorter than the first time, and the second pressure is not less than the first pressure. Although increasing the pressure can improve the tightness of the stacked parts, excessive pressure can lead to overall plastic deformation. Therefore, it is preferable that the second pressure in this stage is less than the first pressure, and the second temperature is preferably lower than the first temperature. It must be noted that the heating temperature is one of the important process conditions for welding. Small changes in heating temperature can cause significant changes in the atomic diffusion rate at the interface. Within a certain temperature range, the higher the temperature, the greater the diffusion coefficient, the faster the diffusion process, and the higher the bonding strength of the welded parts. However, when the temperature exceeds a certain value, further increases in temperature do not significantly improve the welding quality, and may even decrease it. Therefore, it is preferable that the second temperature is lower than the first temperature.

[0066] (6) During a second time period, based on the second pressure, an intermittent pressure jitter is provided, the amplitude of which is not less than 10% of the second pressure. This pressure jitter continues for a third time period, which is shorter than the second time period. By providing intermittent pressure jitter, when the preset welding surface of the stacked components changes from a solid phase to a liquid phase, the physical contact of the preset welding surface can be expanded through atomic diffusion, making the interatomic diffusion at the interface more uniform, thereby forming a stronger connection strength for the welded structure. In a preferred embodiment, the frequency of the pressure jitter is not less than 5 Hz, and the amplitude of the pressure jitter is based on -10% to +10% of the second pressure.

[0067] (7) After the second time ends, the temperature is reduced, thereby forming a vacuum diffusion welding structure 323 between the first upper membrane head structure 321 and the second upper membrane head structure 322.

[0068] Because the welding environment is a vacuum or inert gas, the vacuum diffusion welded structure 323 of this application will not be affected by adverse ambient air, and has low impurity content, good strength uniformity, few pores, and good airtightness.

[0069] Table 1 below shows preferred embodiments of the melting temperature and first temperature of some metallic materials.

[0070] Table 1. Preferred embodiments of melting temperature and first temperature of metallic materials

[0071] Metallic materials Melting temperature (°C) First temperature (°C) silver 960 480～768 copper 1083 541～866 70-30 brass 916 458～732 titanium 1815 907～1452 beryllium 1280 640～1024 Stainless steel 1454 727～1163 niobium 2415 1207～1932 Tantalum 2996 1498～2396 molybdenum 2625 1312～2100

[0072] In another embodiment, grooves or engravings can be pre-formed on the welding surfaces of the first upper membrane head structure 321 and the second upper membrane head structure 322. Therefore, after the vacuum diffusion welding structure 323 is formed, a high-strength and tight groove can be formed between the first upper membrane head structure 321 and the second upper membrane head structure 322. Such a groove can be used for air inlet and outlet, and can also be filled with coolant as a cooling channel to cool the upper membrane head 32, further reducing the probability of the upper membrane head 32 being damaged by heat, and solving the problems of valve burnout and membrane head cracking caused by poor heat dissipation of the upper membrane head in the prior art.

[0073] For details, please see Figure 4 In one embodiment, the inlet channel 351 further includes a first inlet channel 3511 and a second inlet channel 3512 connected to each other. The first inlet channel 3511 is disposed in the first upper membrane head structure 321, and the second inlet channel laterally penetrates the vacuum diffusion welding structure 323. The outlet channel 352 further includes a first outlet channel 3521 and a second outlet channel 3522 connected to each other. The first outlet channel 3521 is disposed in the first upper membrane head structure 321, and the second outlet channel 3522 laterally penetrates the vacuum diffusion welding structure 323.

[0074] Please continue... Figure 5A The surface of the first upper membrane head structure 321 facing the second upper membrane head structure 322 has a plurality of first grooves 3513 and second grooves 3514 pre-formed therein; the surface of the second upper membrane head structure 322 facing the first upper membrane head structure 321 has a plurality of third grooves 3523 and fourth grooves 3524 pre-formed therein, corresponding to the first grooves 3513 and second grooves 3514. Please see Figure 5B After the vacuum diffusion welding structure 323 is formed by vacuum diffusion welding, the first groove 3513 and the third groove 3523 form the second air inlet channel 3512, and the second groove 3514 and the fourth groove 3524 form the second air outlet channel 3522. The second air inlet channel 3512 and the second air outlet channel 3522 only have the vacuum diffusion welding structure 323 on their side edges, and there is no vacuum diffusion welding structure 323 at the bottom and top. Therefore, the second air inlet channel 3512 and the second air outlet channel 3522 are formed to penetrate the vacuum diffusion welding structure 323 laterally.

[0075] Based on the same concept, a first cooling groove (not shown) can be provided on the first upper membrane head structure 321 near the first groove 3513 and the second groove 3514, and a second cooling groove (not shown) can be provided on the surface of the second upper membrane head structure 322 corresponding to the first cooling groove. After the vacuum diffusion welded structure 323 is formed by vacuum diffusion welding, the first cooling groove and the second cooling groove form a cooling channel. After injecting coolant, the second inlet air passage 3512 and the second outlet air passage 3522 can be cooled, which can further improve the service life of the upper membrane head 32.

[0076] Second preferred embodiment

[0077] Based on the same technical concept, this application further proposes a second preferred embodiment, which is a metal diaphragm head device 3 used in the metal diaphragm compressor 100 described in the first preferred embodiment. The features of the metal diaphragm head device 3 proposed in this embodiment are the same as those of the metal diaphragm head device 3 described in the first preferred embodiment, and will not be repeated here.

[0078] The detailed description of the preferred embodiments above is intended to more clearly describe the features and spirit of this application, and is not intended to limit the application by the preferred embodiments disclosed above. Rather, its purpose is to cover various equivalent changes within the scope of the claims to be protected by this application.

Claims

1. A metal diaphragm compressor, comprising a hydraulic unit (1), a pneumatic unit (2), and a metal diaphragm head device (3) disposed between the hydraulic unit (1) and the pneumatic unit (2), characterized in that: The metal diaphragm head device (3) includes a lower diaphragm head (31), an upper diaphragm head (32), and a metal diaphragm (33) disposed between the lower diaphragm head (31) and the upper diaphragm head (32); A compression oil chamber (34) is formed between the lower diaphragm head (31) and the metal diaphragm (33). The lower diaphragm head (31) also includes an oil inlet channel (341) and an oil outlet channel (342), which are respectively connected to the compression oil chamber (34). The upper membrane head (32) further includes a first upper membrane head structure (321), a second upper membrane head structure (322), and a vacuum diffusion welding structure (323) formed between the first upper membrane head structure (321) and the second upper membrane head structure (322). A compressed air chamber (35) is formed between the first upper membrane head structure (321) and the metal diaphragm (33). The upper membrane head (32) also includes an inlet air passage (351) and an outlet air passage (352), which respectively penetrate the first upper membrane head structure (321) and connect to the compressed air chamber (35).

2. The metal diaphragm compressor according to claim 1, characterized in that: The coefficient of thermal expansion of the first upper membrane head structure (321) is smaller than that of the second upper membrane head structure (322).

3. The metal diaphragm compressor according to claim 1 or 2, characterized in that: The inlet air passage (351) and the outlet air passage (352) respectively penetrate the second upper membrane head structure (322), the vacuum diffusion welding structure (323) and the first upper membrane head structure (321) and are connected to the compressed air chamber (35).

4. The metal diaphragm compressor according to claim 1 or 2, characterized in that: The air inlet channel (351) further includes a first air inlet channel (3511) and a second air inlet channel (3512) that are connected to each other, and the air outlet channel (352) further includes a first air outlet channel (3521) and a second air outlet channel (3522) that are connected to each other. The first air inlet channel (3511) and the first air outlet channel (3521) are disposed in the first upper membrane head structure (321), and the second air inlet channel (3512) and the second air outlet channel (3522) penetrate the vacuum diffusion welding structure (323) laterally.

5. The metal diaphragm compressor according to claim 4, characterized in that: The surface of the first upper membrane head structure (321) facing the second upper membrane head structure (322) has a plurality of first grooves (3513) and second grooves (3514); the surface of the second upper membrane head structure (322) facing the first upper membrane head structure (321) has a plurality of third grooves (3523) and fourth grooves (3524) corresponding to the first grooves (3513) and second grooves (3514); the first grooves (3513) and the third grooves (3523) form the second air inlet channel (3512), and the second grooves (3514) and the fourth grooves (3524) form the second air outlet channel (3522).

6. A metal diaphragm head device for use in a metal diaphragm compressor, comprising a lower diaphragm head (31), an upper diaphragm head (32), and a metal diaphragm (33) disposed between the lower diaphragm head (31) and the upper diaphragm head (32), characterized in that: A compression oil chamber (34) is formed between the lower diaphragm head (31) and the metal diaphragm (33). The lower diaphragm head (31) also includes an oil inlet channel (341) and an oil outlet channel (342), which are respectively connected to the compression oil chamber (34). The upper membrane head (32) further includes a first upper membrane head structure (321), a second upper membrane head structure (322), and a vacuum diffusion welding structure (323) formed between the first upper membrane head structure (321) and the second upper membrane head structure (322). A compressed air chamber (35) is formed between the first upper membrane head structure (321) and the metal diaphragm (33). The upper membrane head (32) also includes an inlet air passage (351) and an outlet air passage (352), which respectively penetrate the first upper membrane head structure (321) and connect to the compressed air chamber (35).

7. The metal diaphragm head device according to claim 6, characterized in that: The coefficient of thermal expansion of the first upper membrane head structure (321) is smaller than that of the second upper membrane head structure (322).

8. The metal diaphragm head device according to claim 6 or 7, characterized in that: The inlet air passage (351) and the outlet air passage (352) respectively penetrate the second upper membrane head structure (322), the vacuum diffusion welding structure (323) and the first upper membrane head structure (321) and are connected to the compressed air chamber (35).

9. The metal diaphragm head device according to claim 6 or 7, characterized in that: The air inlet channel (351) further includes a first air inlet channel (3511) and a second air inlet channel (3512) that are connected to each other, and the air outlet channel (352) further includes a first air outlet channel (3521) and a second air outlet channel (3522) that are connected to each other. The first air inlet channel (3511) and the first air outlet channel (3521) are disposed in the first upper membrane head structure (321), and the second air inlet channel (3512) and the second air outlet channel (3522) penetrate the vacuum diffusion welding structure (323) laterally.

10. The metal diaphragm head device according to claim 9, characterized in that: The surface of the first upper membrane head structure (321) facing the second upper membrane head structure (322) has a plurality of first grooves (3513) and second grooves (3514); the surface of the second upper membrane head structure (322) facing the first upper membrane head structure (321) has a plurality of third grooves (3523) and fourth grooves (3524) corresponding to the first grooves (3513) and second grooves (3514); the first grooves (3513) and the third grooves (3523) form the second air inlet channel (3512), and the second grooves (3514) and the fourth grooves (3524) form the second air outlet channel (3522).

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